CN1743508A - Chemical etching solution for titanium and titanium alloy - Google Patents
Chemical etching solution for titanium and titanium alloy Download PDFInfo
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- CN1743508A CN1743508A CN 200510044852 CN200510044852A CN1743508A CN 1743508 A CN1743508 A CN 1743508A CN 200510044852 CN200510044852 CN 200510044852 CN 200510044852 A CN200510044852 A CN 200510044852A CN 1743508 A CN1743508 A CN 1743508A
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Abstract
A chemical etching solution used in Ti and Ti alloys characterizes that it is composed of H2F2, HNO3 and water, their volume percentage is: H2F2 5-15% HNO3 8-35%, water 50-85%, which can be used under normal temperature having the advantages of quick corrosion, small side corrosion, long life time of the solution and low process cost.
Description
Technical field
The present invention relates to a kind of chemical etching liquor, particularly relate to a kind of chemical etching liquor that is applicable to titanium or titanium alloy.
Background technology
Chemical milling is to utilize the corrosive nature of chemical solution that unwanted metal is dissolved the process of removing fast by chemical reaction.The basic procedure of chemical milling is: the original metal part is carried out conventional cleaning and oil removing make cleaning surfaces, and then at its surface-coated photoresist material, and according to processing pattern carry out the exposure of photoresist material, then develop and the post bake processing, the metal that utilizes the chemical etching liquor corrosion to expose again, after treating that corrosion process finishes, the glue with the surface removes with strong alkali solution again, and last water cleans up and obtains etching and processing workpiece product.
Present existing chemical etching liquor mainly is the chemical etching liquor at the processing of metal superfines such as stainless steel, copper, nickel, and does not appear in the newspapers as yet for the chemical etching liquor of titanium or titanium alloy.Recently the use of titanium or titanium alloy more and more be extensive, and the requirement that relates to microfabrication also increases gradually, and the demand of chemical etching liquor that for this reason is used for titanium or titanium alloy is also urgent day by day.
Summary of the invention
The purpose of this invention is to provide a kind of chemical etching liquor that is used for titanium or titanium alloy, it can satisfy the demand of prior art.
A kind of chemical etching liquor that is used for titanium or titanium alloy is characterized in that being made up of hydrofluoric acid, nitric acid and water, and their percent by volume scope is hydrofluoric acid 5%-15%, nitric acid 8%-35%, water 50%-85%; Described hydrofluoric acid concentration is more than or equal to 40%, and the concentration of nitric acid is 65%-68%.
Advantages such as etching solution of the present invention can use at normal temperatures, and it is fast to have corrosion speed, and lateral erosion is little, and solution long service life and tooling cost are low are even also can realize the fast-etching of titanium or titanium alloy in static solution.
Embodiment
Embodiment 1:
With 50 milliliters hydrofluoric acid (40% the aqueous solution, density 1.13), 150 milliliters nitric acid (67% the aqueous solution, density 1.40) mix with 800 milliliters water, the etching solution of gained is carried out chemical milling by existing etch process to industrially pure titanium TA2 (the pole plate parts of fuel cell).Etch temperature is 30 ℃, static being immersed in this solution of titanium (TA2) plate that 0.08mm is thick during operation, and about 2 minutes mashed the wearing of post-etching, its minimum line directly is 0.02mm, the aperture is 0.2mm.Can reach every liter of dissolving 32 gram titaniums the work-ing life of this solution.
Embodiment 2:
With 120 milliliters hydrofluoric acid (40% the aqueous solution, density 1.13), 350 milliliters nitric acid (67% the aqueous solution, density 1.40) mix with 530 milliliters water, the etching solution of gained is carried out chemical milling by existing etch process to industrially pure titanium TA2 (the pole plate parts of fuel cell).Etch temperature is 20 ℃, static being immersed in this solution of titanium (TA2) plate that 0.3mm is thick during operation, and about 8 minutes mashed the wearing of post-etching, its minimum line directly is 0.5mm, the aperture is 0.8mm.
Embodiment 3:
With 50 milliliters hydrofluoric acid (40% the aqueous solution, density 1.13), 150 milliliters nitric acid (67% the aqueous solution, density 1.40), 0.2g the water of EDTA and 800 milliliters mixes, and the etching solution of gained is carried out chemical milling by existing etch process to industrially pure titanium TA2 (the pole plate parts of fuel cell).Etch temperature is 25 ℃, static being immersed in this solution of titanium (TA2) plate that 0.08mm is thick during operation, and about 2 minutes mashed the wearing of post-etching, its minimum line directly is 0.02mm, the aperture is 0.2mm.Can reach every liter of dissolving 75 gram titaniums the work-ing life of this etching solution.
For can add a small amount of complexing agent disodium ethylene diamine tetraacetate (EDTA) work-ing life that prolongs solution, consumption is in 0.01 ~ 1g/L scope; The use temperature scope of this chemical etching liquor is 0 ~ 40 ℃, can adopt two kinds of processing modes in immobilized or mobile chemical etching liquor, when add man-hour in the static solution of 25 ℃ of use temperatures, the chemical milling speed of titanium or titanium alloy is 20 microns/minute.
Used hydrofluoric acid and nitric acid are commercially available among the present invention, and hydrofluoric acid concentration is more than or equal to 40%, and the concentration of nitric acid is 65%-68%.
This etching solution can be widely used in the chemical milling course of processing of the important components and parts of electronic industry, optics measurement instrument industry, petrochemical industry, pharmaceutical equipment industry, nuclear industry, semiconductor machining industry and fuel cell etc. and structural part.
Claims (2)
1. a chemical etching liquor that is used for titanium or titanium alloy is characterized in that being made up of hydrofluoric acid, nitric acid and water, and their percent by volume scope is hydrofluoric acid 5%-15%, nitric acid 8%-35%, water 50%-85%; Described hydrofluoric acid concentration is more than or equal to 40%, and the concentration of nitric acid is 65%-68%.
2. solution according to claim 1 is characterized in that it contains a kind of additive disodium ethylene diamine tetraacetate, and the concentration of this additive is 0.01-1g/L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100448521A CN100390322C (en) | 2005-09-21 | 2005-09-21 | Chemical etching solution for titanium and titanium alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100448521A CN100390322C (en) | 2005-09-21 | 2005-09-21 | Chemical etching solution for titanium and titanium alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1743508A true CN1743508A (en) | 2006-03-08 |
| CN100390322C CN100390322C (en) | 2008-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100448521A Expired - Fee Related CN100390322C (en) | 2005-09-21 | 2005-09-21 | Chemical etching solution for titanium and titanium alloy |
Country Status (1)
| Country | Link |
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| CN (1) | CN100390322C (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101634025A (en) * | 2008-06-30 | 2010-01-27 | 德普伊产品公司 | Open-celled metal implants with roughened surfaces |
| CN101122025B (en) * | 2007-08-09 | 2010-05-19 | 成都飞机工业（集团）有限责任公司 | Titanium alloying milling solution and milling technique used for the same |
| CN102409352A (en) * | 2011-11-14 | 2012-04-11 | 云南钛业股份有限公司 | Continuous acid washing process method for titanium tape reel |
| CN102525673A (en) * | 2010-10-07 | 2012-07-04 | 长庚医学科技股份有限公司 | Method for treating surface of dental implant |
| CN102888613A (en) * | 2012-11-02 | 2013-01-23 | 西部钛业有限责任公司 | Pickling solution for removing oxide skins of surfaces of nickel and nickel alloy and pickling method |
| CN103194756A (en) * | 2013-04-26 | 2013-07-10 | 南开大学 | Titanium nitride film deplating method |
| CN103304146A (en) * | 2013-06-06 | 2013-09-18 | 惠州市创仕实业有限公司 | Etching method for OGS (One Glass Solution) glass subjected to secondary chemical enhancement |
| CN103540322A (en) * | 2013-10-22 | 2014-01-29 | 武汉新芯集成电路制造有限公司 | Etching solution and method for metal barrier layers |
| CN105350051A (en) * | 2015-11-13 | 2016-02-24 | 哈尔滨东安发动机（集团）有限公司 | Method for avoiding Sn-Bi alloy pollution on surface of aluminum part |
| CN105750853A (en) * | 2014-12-15 | 2016-07-13 | 无锡市普尔换热器制造有限公司 | Cleaning technology for titanium alloy plate finned heat exchanger |
| CN110455793A (en) * | 2019-08-29 | 2019-11-15 | 佛山市安齿生物科技有限公司 | Method for distinguishing pure titanium and titanium alloy |
| CN110923714A (en) * | 2019-09-26 | 2020-03-27 | 宁波福至新材料有限公司 | Etching solution and etching method for titanium foil micropore pattern |
| CN111139480A (en) * | 2020-01-16 | 2020-05-12 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN111235577A (en) * | 2020-01-16 | 2020-06-05 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN113355675A (en) * | 2021-05-31 | 2021-09-07 | 北京缔诚科技发展有限公司 | Surface chemical roughening method for titanium alloy |
| CN113564599A (en) * | 2021-07-16 | 2021-10-29 | 宁波福至新材料有限公司 | Etching solution for titanium and titanium alloy metal sheets |
| CN113969403A (en) * | 2021-10-27 | 2022-01-25 | 湖南工程学院 | Etching solution and method for nickel and titanium high-temperature alloy |
| CN115044906A (en) * | 2022-04-29 | 2022-09-13 | 福建金石能源有限公司 | Etching solution and back contact heterojunction solar cell manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS4520764Y1 (en) * | 1966-09-08 | 1970-08-19 | ||
| JPS60114739A (en) * | 1983-11-28 | 1985-06-21 | Daido Steel Co Ltd | Grinding and corrosion of ti |
| JPS63149396A (en) * | 1986-12-12 | 1988-06-22 | Kobe Steel Ltd | Pre-treatment of anodic oxidation of valve metal |
| US4927492A (en) * | 1987-08-31 | 1990-05-22 | Westinghouse Electric Corp. | Etching process for zirconium metallic objects |
| CN1158408C (en) * | 2001-10-31 | 2004-07-21 | 沈阳黎明航空发动机集团公司 | Solution for removing containmanted titanium alloy layers |
-
2005
- 2005-09-21 CN CNB2005100448521A patent/CN100390322C/en not_active Expired - Fee Related
Cited By (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101122025B (en) * | 2007-08-09 | 2010-05-19 | 成都飞机工业（集团）有限责任公司 | Titanium alloying milling solution and milling technique used for the same |
| CN101634025A (en) * | 2008-06-30 | 2010-01-27 | 德普伊产品公司 | Open-celled metal implants with roughened surfaces |
| CN102525673A (en) * | 2010-10-07 | 2012-07-04 | 长庚医学科技股份有限公司 | Method for treating surface of dental implant |
| CN102409352A (en) * | 2011-11-14 | 2012-04-11 | 云南钛业股份有限公司 | Continuous acid washing process method for titanium tape reel |
| CN102888613A (en) * | 2012-11-02 | 2013-01-23 | 西部钛业有限责任公司 | Pickling solution for removing oxide skins of surfaces of nickel and nickel alloy and pickling method |
| CN103194756A (en) * | 2013-04-26 | 2013-07-10 | 南开大学 | Titanium nitride film deplating method |
| CN103194756B (en) * | 2013-04-26 | 2016-02-17 | 南开大学 | A kind of strip method of titanium nitride film |
| CN103304146A (en) * | 2013-06-06 | 2013-09-18 | 惠州市创仕实业有限公司 | Etching method for OGS (One Glass Solution) glass subjected to secondary chemical enhancement |
| CN103540322A (en) * | 2013-10-22 | 2014-01-29 | 武汉新芯集成电路制造有限公司 | Etching solution and method for metal barrier layers |
| CN103540322B (en) * | 2013-10-22 | 2015-05-13 | 武汉新芯集成电路制造有限公司 | Film stripping method for metal barrier layers |
| CN105750853A (en) * | 2014-12-15 | 2016-07-13 | 无锡市普尔换热器制造有限公司 | Cleaning technology for titanium alloy plate finned heat exchanger |
| CN105350051B (en) * | 2015-11-13 | 2017-08-08 | 哈尔滨东安发动机（集团）有限公司 | A kind of method for solving aluminum hardware surface Sn Bi alloy contaminations |
| CN105350051A (en) * | 2015-11-13 | 2016-02-24 | 哈尔滨东安发动机（集团）有限公司 | Method for avoiding Sn-Bi alloy pollution on surface of aluminum part |
| CN110455793B (en) * | 2019-08-29 | 2021-12-14 | 佛山市安齿生物科技有限公司 | Method for distinguishing pure titanium and titanium alloy |
| CN110455793A (en) * | 2019-08-29 | 2019-11-15 | 佛山市安齿生物科技有限公司 | Method for distinguishing pure titanium and titanium alloy |
| CN110923714A (en) * | 2019-09-26 | 2020-03-27 | 宁波福至新材料有限公司 | Etching solution and etching method for titanium foil micropore pattern |
| CN111235577B (en) * | 2020-01-16 | 2022-03-29 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN111235577A (en) * | 2020-01-16 | 2020-06-05 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN111139480A (en) * | 2020-01-16 | 2020-05-12 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN111139480B (en) * | 2020-01-16 | 2022-03-29 | 广东安特齿科有限公司 | Acid etching solution and acid etching treatment method of titanium implant |
| CN113355675A (en) * | 2021-05-31 | 2021-09-07 | 北京缔诚科技发展有限公司 | Surface chemical roughening method for titanium alloy |
| CN113564599A (en) * | 2021-07-16 | 2021-10-29 | 宁波福至新材料有限公司 | Etching solution for titanium and titanium alloy metal sheets |
| CN113969403A (en) * | 2021-10-27 | 2022-01-25 | 湖南工程学院 | Etching solution and method for nickel and titanium high-temperature alloy |
| CN113969403B (en) * | 2021-10-27 | 2023-10-31 | 湖南工程学院 | Etching solution and method for nickel-titanium superalloy |
| CN115044906A (en) * | 2022-04-29 | 2022-09-13 | 福建金石能源有限公司 | Etching solution and back contact heterojunction solar cell manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100390322C (en) | 2008-05-28 |
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