CN1704213A - Fragile work piece cutting equipment with double nozzle - Google Patents
Fragile work piece cutting equipment with double nozzle Download PDFInfo
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- CN1704213A CN1704213A CN 200410045530 CN200410045530A CN1704213A CN 1704213 A CN1704213 A CN 1704213A CN 200410045530 CN200410045530 CN 200410045530 CN 200410045530 A CN200410045530 A CN 200410045530A CN 1704213 A CN1704213 A CN 1704213A
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Abstract
The invention discloses a vulnerable cutting device with double jet which comprises a working table, a radiating beam provision unit, a first jet and a second jet. The radiating beam provision unit provides a radiating beam to attack first surface's first zone of vulnerable work-piece which is fixed on working table so that it can generate a drawing stress on the zone. First jet spouts a liquid flow to attack a second zone of first surface so that it can generate a compressive stress. Second jet spouts a liquid flow to attack a third zone of first surface so that it can clean and dry the three zones. The drawing stress and compressive stress can form a gap at vulnerable work-piece. The second zone is between first zone and third zone.
Description
Technical field
The present invention relates to a kind of brittle workpiece cutting equipment of tool twin-jet nozzle, refer in particular to a kind of compression of utilizing twin-jet nozzle accurately to control surface of the work, and the tensile stress that radiation beam caused of cooperation such as thunder laser beam is to cause uniform crackle and highly to cut reproducible brittle workpiece cutting equipment.
Background technology
For the cutting of brittle workpiece (such as glass, quartz, pottery, photoelectricity and semiconductor crystal material), use diamond cutter or tungsten-carbide knife to come standardized zanjon trace of workpiece that institute's desire is cut usually, utilize mechanical force to make workpiece separately again.Yet, because of the cutting groove mark too dark and too wide, but might undermine the usable floor area of element and waste workpiece, and cause irregular be full of cracks along thickness direction, make the cutting qualification rate descend.Recently utilize the method for laser cutting general gradually, its method is to utilize laser to come the local heat workpiece, makes its fusion and forms a deep trench, with mechanical force workpiece is separated again.
The method of another kind cutting brittle workpiece is to use for example thermal source process technology of laser, utilizes the principle that crackle is grown up and defective links in the fault mechanics to cut brittle workpiece.
Fig. 1 shows United States Patent (USP) the 5th, 609, No. 284 disclosed a kind of laser cutting techniques.As shown in Figure 1, thunder laser beam 102 streaks along predetermined cuts path 105 on workpiece 101, is impacting workpiece 101 followed by cooling off jet flow 103 together thereafter.Workpiece 101 is stressed because of the upper strata is subjected to tension force lower floor, thereby produces thermal shock (thermal shock) to be formed on subsurface dark crackle (blind crack) 104, if give heating again after cutting finishes, can make dark crackle expansion and be separated into two.Utilize cooling jet flow 103 to cause dark crackle 104 with thunder laser beam 102, its shortcoming is to be not easy to quantize.And cooling jet flow 103 must critically be controlled with the distance of thunder laser beam 102, to reach preferable cutting effect.
In addition, cooling jet flow 103 liquid normally, it can splash after being sprayed at the surface of workpiece 101 everywhere.In the time of in drop 106 falls within thunder laser beam 102 regional extents, can influence the focusing of thunder laser beam 102, and then influence the tensile stress that 102 pairs of workpiece 101 of thunder laser beam are provided, make the growth of dark crackle 104 critically to be controlled.In addition, drop 106 also can't be distributed on the surface of workpiece 101 equably, and making to provide the thunder laser beam 102 of certain energy to provide certain tensile stress to workpiece 101.Therefore, the line of cut of the finished product that is cut out has sizable variability.Moreover residual drop 106 also can pollute (for example causing washmarking) on the surface of workpiece 101 after being dried, and then influences the characteristic of the finished product that is cut.
The TaiWan, China patent announcement is numbered No. 445189 and is disclosed a kind of laser processing unit (plant) and method.In this known technology, use difference mechanism that one thunder laser beam is divided into the multiple tracks thunder laser beam so that workpiece is processed, and do not mention the correlation technique of cooling fluid.
The TaiWan, China patent announcement is numbered and is disclosed a kind of but air-flow technology of carrying out the laser cutting of glass of supercool of utilizing for No. 458837, wherein uses thunder laser beam one, cooperate a supercool but the gas shock workpiece the surface and finish cutting.Yet in this known technology, the supercool but control of air-flow can't quantize, and is difficult to for workpiece provides even and enough compression, so control mode is very complicated.
The TaiWan, China patent announcement is numbered No. 419867 and is disclosed a kind of laser cutting apparatus and method, wherein directly be sprayed on the workpiece in order to the cooling fluid of cooling off, be similar to above-mentioned United States Patent (USP) the 5th, 609, the cooling way of being mentioned for No. 284, the drop influence of also being splashed easily, and then the reproducible problem of influence cutting.
Therefore, how to develop and a kind of cutting equipment of the reproducible brittle workpiece of cutting that height can be provided easily, real be the problem of inventor institute desire solution.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of brittle workpiece cutting equipment of tool twin-jet nozzle.
Another technical problem that the present invention will solve a kind of can providing is provided highly cuts uniformity and the brittle workpiece cutting equipment that highly cuts reproducible tool twin-jet nozzle.
For solving the problems of the technologies described above, the present invention proposes a kind of brittle workpiece cutting equipment of tool twin-jet nozzle, comprise:
One workbench is in order to be fixed thereon a brittle workpiece;
One radiating beam provision unit provides a radiation beam to impact in the first area on a first surface of this brittle workpiece, in order to cause a tensile stress in this first area;
One first nozzle impacts in the second area on this first surface of this brittle workpiece, in order to cause a compression at this second area in order to spray a liquid jet; And
One second nozzle, impact one the 3rd zone on this first surface of this brittle workpiece in order to spray a gas jet, in order to clean dry this first area, this second area and the 3rd zone, wherein this tensile stress and this compression make this brittle workpiece form a crackle, and this second area is between this first area and the 3rd zone.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, this second area and the 3rd area part are overlapping.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, this gas jet is made up of nitrogen, carbon dioxide or air.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle more comprises a liquid supplying unit, in order to supply a liquid to this first nozzle.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle more comprises a gas supply unit, in order to supply a gas to this second nozzle.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle more comprises a drive unit, produces a relative motion in order to impel this workbench and this radiating beam provision unit.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle more comprises a cutting route guidance unit, forms along a predetermined direction in order to guide this crackle.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, an injection direction of this liquid jet are perpendicular to this first surface, and an injection direction of this gas jet is perpendicular to this first surface.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, an injection direction of this liquid jet are non-perpendicular to this first surface, and an injection direction of this gas jet is perpendicular to this first surface.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, an injection direction of this liquid jet are non-perpendicular to this first surface, and an injection direction of this gas jet is non-perpendicular to this first surface.
The brittle workpiece cutting equipment of aforesaid tool twin-jet nozzle, an injection direction of this liquid jet are perpendicular to this first surface, and an injection direction of this gas jet is non-perpendicular to this first surface.
By above-mentioned structure of the present invention, can effectively avoid liquid jet on surface of the work, to form residual drop, so the energy that can effectively avoid radiation beam to be applied to surface of the work is subjected to the influence of residual drop, and can avoid surface of the work to be polluted.In addition, use liquid jet and gas jet with cleaning and drying effect, can accurately control the compression that workpiece is provided, the stable energy that adds radiation beam is to tensile stress that workpiece provided, can accurately facilitate the formation and the growth of crackle, obtain good cutting effect, and the cutting reappearance of height.
Description of drawings
Fig. 1 shows United States Patent (USP) the 5th, 609, No. 284 disclosed a kind of laser cutting techniques.
Fig. 2 shows the schematic diagram according to the incision principle of the brittle workpiece of preferred embodiment of the present invention.
Fig. 3 shows the schematic diagram according to the brittle workpiece cutting equipment of preferred embodiment of the present invention.
Fig. 4 A to 4D shows several configuration states of the nozzle of Fig. 3.
The drawing reference numeral explanation:
10, workbench 11, brittle workpiece 14, crackle 15, first surface
15A, first area 15B, second area 15C, the 3rd zone 20, radiating beam provision unit
22, radiation beam 30, first nozzle 32, liquid jet 40, second nozzle
42, gas jet 50, liquid supplying unit 60, gas supply unit 70, drive unit
80, cutting path guide unit 101, workpiece 102, thunder laser beam 103, cooling jet flow
104, dark crackle 105, cutting path 106, drop
The specific embodiment
Fig. 2 shows the schematic diagram according to the incision principle of the brittle workpiece of preferred embodiment of the present invention, and Fig. 3 shows the schematic diagram according to the brittle workpiece cutting equipment of preferred embodiment of the present invention.Shown in Fig. 2 and 3, the brittle workpiece cutting equipment of a kind of tool twin-jet nozzle of present embodiment comprises a workbench 10, one radiating beam provision unit 20, one first nozzle 30, one second nozzle 40, a liquid supplying unit 50 and a gas supply unit 60.One brittle workpiece 11 is fixed on the workbench 10.Workbench 10 is driven by a drive unit 70 and produces relative motion with radiating beam provision unit 20.Radiating beam provision unit 20 provides a radiation beam 22 to impact among the first area 15A on a first surface 15 of brittle workpiece 11, in order to cause a tensile stress at first area 15A.First nozzle 30 impacts among the second area 15B on the first surface 15 of brittle workpiece 11, in order to cause a compression at second area 15B in order to spray a liquid jet 32.Second nozzle 40 impacts one the 3rd regional 15C on the first surface 15 of brittle workpiece 11 in order to spray a gas jet 42, in order to clean dry first area 15A, second area 15B and the 3rd regional 15C.Gas jet 42 can be made up of nitrogen, carbon dioxide or air.Liquid supplying unit 50 is in order to supplying a liquid (such as water) to first nozzle 30, and gas supply unit 60 is in order to supply gas to the second nozzle 40.Tensile stress and compression can make brittle workpiece 11 form a crackle 14, and second area 15B is between first area 15A and the 3rd regional 15C.
By above-mentioned design, radiation beam 22 impacts in first area 15A so that tensile stress is caused in this zone, liquid jet 32 impacts in second area 15B so that compression is caused in this zone, the relative motion of cooperating platform 10 and radiation beam 22 and liquid jet 32 can be controlled the growth of crackle and reaches the purpose of cutting.Because the present invention utilizes gas jet 42 to impact in the 3rd regional 15C, can in real time the drop that splashes everywhere that is produced from liquid jet 32 be blown away, and not influence the focus characteristics of radiation beam 22 at first area 15A.Therefore, tensile stress and compression can be subjected to accurate control, make the cutting vestige have quite high reappearance.In addition,, also can assist to provide compression quite uniformly, make cutting action smooth by the characteristic of control gas jet 42.
It should be noted that second area 15B can overlap with the 3rd regional 15C.In addition, cutting equipment of the present invention can more comprise a cutting route guidance unit 80, form along a predetermined direction in order to guide this crackle, can adopt a diamond cutter head to reach along this predetermined direction setting-out usually, this is necessary when some certain material of cutting.
Radiation beam can adopt directionality thermal source radiation beam, such as CO2 Lasers, diode laser, Nd-Yag laser, copper laser, ultraviolet laser etc.For example, when glass-cutting, quartz (silica), sapphire (sapphire), GaAs materials such as (GaAs), using CO2 Lasers (wavelength is 10.6 μ m) is the preferable practice.When the cutting silicon materials, be the preferable practice with diode laser (wavelength 700-900nm) or Nd-Yag laser (wavelength is 1.06 μ m).
Fig. 4 A to 4D shows several configuration states of the nozzle of Fig. 3.In Fig. 3, an injection direction both of an injection direction of liquid jet 32 and gas jet 42 is perpendicular to first surface 15.In Fig. 4 A to 4C, the injection direction of liquid jet 32 is non-perpendicular to first surface 15, and the injection direction of gas jet 42 is also non-perpendicular to first surface 15.In Fig. 4 A, liquid jet 32 is parallel with the injection direction of gas jet 42.In Fig. 4 B, liquid jet 32 is not parallel with the injection direction of gas jet 42, and two jet flows are to be dissipated on the first surface 15.In Fig. 4 C, liquid jet 32 is not parallel with the injection direction of gas jet 42, and two jet flows are to converge on the first surface 15.In Fig. 4 D, the injection direction of liquid jet 32 is perpendicular to first surface 15, and the injection direction of gas jet 42 is non-perpendicular to first surface 15.Perhaps, in other variation, the injection direction of liquid jet 32 can be not orthogonal to first surface 15, and the injection direction of gas jet 42 can be perpendicular to first surface 15.
By above-mentioned structure of the present invention, can effectively avoid liquid jet on surface of the work, to form residual drop, so the energy that can effectively avoid radiation beam to be applied to surface of the work is subjected to the influence of residual drop, and can avoid surface of the work to be polluted.In addition, use liquid jet and gas jet with cleaning and drying effect, can accurately control the compression that workpiece is provided, the stable energy that adds radiation beam is to tensile stress that workpiece provided, can accurately facilitate the formation and the growth of crackle, obtain good cutting effect, and the cutting reappearance of height.
Though more than with embodiment the present invention is described, therefore do not limit scope of the present invention, only otherwise break away from main idea of the present invention, the sector person can carry out various distortion or change.
Claims (11)
1. the brittle workpiece cutting equipment of a tool twin-jet nozzle comprises:
One workbench is in order to be fixed thereon a brittle workpiece;
One radiating beam provision unit provides a radiation beam to impact in the first area on a first surface of this brittle workpiece, in order to cause a tensile stress in this first area;
One first nozzle impacts in the second area on this first surface of this brittle workpiece, in order to cause a compression at this second area in order to spray a liquid jet; And
One second nozzle, impact one the 3rd zone on this first surface of this brittle workpiece in order to spray a gas jet, in order to clean dry this first area, this second area and the 3rd zone, wherein this tensile stress and this compression make this brittle workpiece form a crackle, and this second area is between this first area and the 3rd zone.
2. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, this second area and the 3rd area part are overlapping.
3. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that this gas jet is made up of nitrogen, carbon dioxide or air.
4. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, more comprises a liquid supplying unit, in order to supply a liquid to this first nozzle.
5. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, more comprises a gas supply unit, in order to supply a gas to this second nozzle.
6. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, more comprises a drive unit, produces a relative motion in order to impel this workbench and this radiating beam provision unit.
7. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, more comprises a cutting route guidance unit, forms along a predetermined direction in order to guide this crackle.
8. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, an injection direction of this liquid jet is perpendicular to this first surface, and an injection direction of this gas jet is perpendicular to this first surface.
9. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, an injection direction of this liquid jet is non-perpendicular to this first surface, and an injection direction of this gas jet is perpendicular to this first surface.
10. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, an injection direction of this liquid jet is non-perpendicular to this first surface, and an injection direction of this gas jet is non-perpendicular to this first surface.
11. the brittle workpiece cutting equipment of tool twin-jet nozzle as claimed in claim 1 is characterized in that, an injection direction of this liquid jet is perpendicular to this first surface, and an injection direction of this gas jet is non-perpendicular to this first surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410045530 CN1704213A (en) | 2004-05-28 | 2004-05-28 | Fragile work piece cutting equipment with double nozzle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410045530 CN1704213A (en) | 2004-05-28 | 2004-05-28 | Fragile work piece cutting equipment with double nozzle |
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| CN1704213A true CN1704213A (en) | 2005-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410045530 Pending CN1704213A (en) | 2004-05-28 | 2004-05-28 | Fragile work piece cutting equipment with double nozzle |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102643017A (en) * | 2011-03-14 | 2012-08-22 | 京东方科技集团股份有限公司 | Non-contact type breaking method and equipment and method and equipment for cutting and breaking |
| CN101428370B (en) * | 2005-06-27 | 2013-05-29 | 三菱电机株式会社 | Laser beam machining method |
| CN104402208B (en) * | 2009-05-15 | 2017-07-04 | 康宁股份有限公司 | Prevent gas from occupying the nozzle used in hot glass sheet line technique |
| CN111103710A (en) * | 2019-12-30 | 2020-05-05 | Tcl华星光电技术有限公司 | Display panel splitting device |
-
2004
- 2004-05-28 CN CN 200410045530 patent/CN1704213A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101428370B (en) * | 2005-06-27 | 2013-05-29 | 三菱电机株式会社 | Laser beam machining method |
| CN104402208B (en) * | 2009-05-15 | 2017-07-04 | 康宁股份有限公司 | Prevent gas from occupying the nozzle used in hot glass sheet line technique |
| CN102643017A (en) * | 2011-03-14 | 2012-08-22 | 京东方科技集团股份有限公司 | Non-contact type breaking method and equipment and method and equipment for cutting and breaking |
| CN102643017B (en) * | 2011-03-14 | 2014-09-10 | 京东方科技集团股份有限公司 | Non-contact type breaking method and equipment and method and equipment for cutting and breaking |
| CN111103710A (en) * | 2019-12-30 | 2020-05-05 | Tcl华星光电技术有限公司 | Display panel splitting device |
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