CN1699126A - Device for transmitting bread board - Google Patents
Device for transmitting bread board Download PDFInfo
- Publication number
- CN1699126A CN1699126A CNA2005100693985A CN200510069398A CN1699126A CN 1699126 A CN1699126 A CN 1699126A CN A2005100693985 A CNA2005100693985 A CN A2005100693985A CN 200510069398 A CN200510069398 A CN 200510069398A CN 1699126 A CN1699126 A CN 1699126A
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- CN
- China
- Prior art keywords
- panel
- conveyer
- unit
- pin
- framework
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Abstract
The substrate transfer device comprises a frame, a first means provided on the frame for transferring the substrate at the upper side, a second means formed with substrate supporting pins having mutually different heights for receiving the substrate from the first means, and a transfer means for receiving the substrate from the second means and transferring the substrate to a substrate treatment part which performs substrate treatment.
Description
Technical field
The present invention relates to be used for the device of delivery panel, more specifically, relate to and to prevent the device that panel is polluted in the delivery panel effectively.
Background technology
Usually, such as panels such as flat-panel monitor, semiconductor wafer, Liquid Crystal Display (LCD) and photomask glass through such as deposition, etching, peel off, handle during a series of processing line such as cleaning and rinsing.
In order to handle delivery panel between the line at these, the panel conveyer comes down to requisite.
Substrate transfer device can be designed to multiple structure, still, and the structure of common usage level delivery panel.That is to say that in order to handle panel, panel conveyer horizontal transmission panel is arranged in the loader of handling the line inlet so that panel is handed over to, and perhaps takes over the panel of having handled from loader, and the panel that this has been handled is handed over to other processing line.
But along with the increase of panel size with owing to be retained in the container attached to the impurity on the panel surface, panel on even keel in container transmits, and panel may be contaminated or be had a stain.
In order to address the above problem, the transfer approach that a kind of transmission is in the panel of heeling condition has been proposed.Application number is .95-315675, and the Japanese patent application of 95-344610 and 96-38472 has disclosed this method.In these patents, processing equipment is arranged to dead-beat and arranges, and with the heeling condition delivery panel.
But, because all being arranged to dead-beat, arranges by processing equipment, being used for the Unit Installation area just can increase.
In addition, in order to transmit the panel that is in heeling condition, the drum assembly that is used for delivery panel is installed is transformed into heeling condition by the panel state conversion unit from horizontality, the structure that therefore is used for the driver element of head roll becomes complicated.Particularly this structure is not suitable for transmitting and handling large-sized panel.
Summary of the invention
Therefore, the present invention is devoted to address the above problem.
The purpose of this invention is to provide a kind of panel conveyer, handle line by installation panel supply line and panel in multiple-structure, this panel conveyer can transmit and handle panel effectively.
Another object of the present invention provides a kind of panel conveyer with converting unit, and this converting unit is transformed into obliquity with panel from level attitude, and this panel conveyer has simple structure.
To achieve these goals, the invention provides a kind of panel conveyer, comprising: framework; Be provided on this framework the first panel delivery unit with delivery panel; Switch unit is used for receiving this panel from this first panel delivery unit, to switch the panel direction of transfer; Have the second panel delivery unit of cylinder, this cylinder is used for receiving this panel from this switch unit, and this panel is sent to the panel processing unit.
Description of drawings
The accompanying drawing that is included among the application and constitutes the application's a part provides further understanding of the present invention, and these accompanying drawings show embodiments of the invention, and is used from specification sheets one and explains principle of the present invention.In the accompanying drawings:
Fig. 1 is the scheme drawing of panel conveyer according to one preferred embodiment of the present invention;
Fig. 2 is the enlarged drawing of the support section shown in Fig. 1, tilt adjusting unit and lifting unit;
Fig. 3 is the enlarged perspective of the tilt adjusting unit shown in Fig. 1;
Fig. 4 is the lateral plan of panel receiving condition when tilt adjusting unit and lifting unit rising;
Fig. 5 is the lateral plan of the panel transfer state when showing tilt adjusting unit and lifting unit rising;
Fig. 6 shows panel to be loaded onto the state that panel loads the bottom;
Fig. 7 is the transparent view of panel conveyer according to another embodiment of the present invention.
The specific embodiment
In detail with reference to the preferred embodiments of the present invention, their example has been shown in the accompanying drawing now.In institute's drawings attached, use identical reference number to represent identical or similar part as much as possible.
As depicted in figs. 1 and 2, panel conveyer of the present invention comprises: framework 1; Be provided on this framework 1 the first panel delivery unit 3 with delivery panel G; Switch unit (inversion unit) 6 is used for receiving panel G from this first panel delivery unit 3, to switch the panel direction of transfer; The second panel delivery unit with cylinder R, this cylinder are used for receiving panel G from switch unit 6, and this panel G is sent to the panel processing unit 10 that is used to peel off, rinse and wash panel G.
The first panel delivery unit 3 comprises the straight-line motion assembly 8 that is installed on the framework 1 and has the forwarder 4 that is placed in the slide block on the straight-line motion assembly 8 slidably.This forwarder 4 has pallet 2, and panel G can be arranged on this pallet 2.Pallet 2 is provided at two side ends, and has the part P of rising, so that provide the gap between panel G and pallet 2 when panel G is arranged on the pallet 2.
The switch unit 6 that receives panel G from forwarder 4 comprises a pair of subtend support section (hand portion) H that is used to receive panel G.This support section H is positioned on the direction identical with straight-line motion assembly 8, to advance in the space of defining between delivery panel G and pallet 2.
When panel G was loaded by robot, 8 work of straight-line motion assembly were with beginning delivery panel G.
Support section H comprises a plurality of bar member L, and panel G is supported on these bar members L.
Switch unit 6 has lifting and reduces the structure of support section H, vertically to be transmitted in the panel G of horizontal direction feeding.
Support section H removes mutually, to change gap wherein.
That is to say that the lower end of support section H is installed on the guided way 21, so that can move in the horizontal direction.Guided way 21 is installed on the vertical direction of the ways 14 on a plurality of baffle plates 12 that are fixed in the framework 1 movably.First leading screw 15 with the corresponding screw thread that forms with direction toward each other is connected to the lower end 19 of support section H by spiral.
The rotational force of first electric machine assembly 23 makes leading screw 15 rotations of winning.By multiple structure rotational force is delivered to first leading screw 15 from first electric machine assembly 23.
Among the embodiment herein, in order to improve and reduce switch unit 6, ways 14 is installed on the baffle plate 12, and second leading screw 11 is connected to the rear surface of the guided way of installing movably along ways 14 21 by spiral.Second leading screw 11 is connected to second electric machine assembly 13, can transmit rotational force.
By said structure, first and second electric machine assemblies 23 and 13 make support section H move on vertical and horizontal direction, thereby near each other or leave.
Simultaneously, below switch unit 6, be provided for the panel state conversion unit 5 of conversion panel G state.
As shown in Figure 3 and Figure 4, this panel state conversion unit 5 comprises a plurality of vertically-guided member S that are positioned at below the framework 1; The first adapter plate f1, ways S pass the first adapter plate f1 regularly; The second adapter plate f2, ways S pass the second adapter plate f2 regularly, and this second adapter plate f2 and the first adapter plate f1 are separately; Be positioned at the removable plate m above the second adapter plate f2, removable plate m can vertically move.
The lifting unit that comprises the 3rd electric machine assembly 52 that is arranged in drive part housing 51 moves removable plate m up and down.
The 3rd electric machine assembly 52 is designed to transmit rotational force by gear or belt to leading screw 62.Leading screw 62 is connected to removable plate m by spiral, extends through first and second adapter plate f1 and the f2.
On removable plate m, provide leaning device 17.This leaning device 17 comprises that twisting is connected to the bottom 36 of removable plate m; A plurality of spaced-apart and be fixed on first load-carrying element 18 of bottom on 36; A plurality of supporting pins 38 that are vertically fixed on first load-carrying element 18.
Bottom 36 is connected to removable plate m by carriage/link pin assembly 22 twistings.Cylinder assembly 24 is installed in the position away from the twisting connecting bridge, to move bottom 36 up and down.
The piston end of cylinder assembly 24 is installed to bottom 36 by ball and cocket joint.Therefore, when cylinder assembly 24 was mobile up and down, link pin assembly 22 tilted bottom 36.
Supporting pin 38 comprises the first pin 38a and the 38b and second pin 39a and the 39b, the first pin 38a and 38b are positioned at the outer end portion of first load-carrying element 18, the second pin 39a and 39b are positioned at the inner end portion of first load-carrying element 18, as shown in Figure 6, wherein the length of first pin 38a and 38b greater than the length of the second pin 39a and 39b.
Fixed support 20 is installed on first load-carrying element 18, and second load-carrying element 26 is installed on the fixed support 20.Set pin 28 is installed in two opposite ends of second load-carrying element 26.
Set pin 28 can be designed as along the longitudinal direction of second load-carrying element 26 near each other and leave.For mobile set pin 28, can utilize such as multiple structures such as piston moving structures, omitted detailed description herein to this structure.
When leaning device 17 was positioned at hoisting position, the panel conveying roller R that is used for panel is sent to the second panel delivery unit of panel processing unit was installed between first and second load-carrying elements 18 and 26.
The cylinder R of the second panel delivery unit is a bevelled, perhaps changes to obliquity.
In Fig. 1, though 17 entrance sides that are mounted in panel processing unit 10 of leaning device, leaning device 17 also can be installed in the outlet side of panel processing unit 10.
As shown in Figure 6, by the supporting pin 38a of formation differing heights L1 and L2,38b and 39a, 39b can improve the cargo-carring stability of panel.
That is to say that the height L1 that is positioned at the first supporting pin 38a of exit portion and 38b is greater than second supporting pin 39a that is positioned at intake section and the height L2 of 39b.Look like horizontal arrangement though be loaded into the panel G of supporting pin 38, because the strong point P1 of outlet supporting pin 38a and 38b and P4 will be higher than strong point P2 and the P3 of inlet supporting pin 39a and 39b, so it is crooked in fact.
Therefore, because panel G is arranged on the supporting pin with differing heights, so delivery panel G more firmly.
In this embodiment, the diff-H between the supporting pin is very little.
Fig. 7 shows another preferred embodiment of the present invention.
In this embodiment, the panel delivery unit is arranged in to be handled between the line, to receive and to transfer the panel that is in heeling condition between the processing line.
That is to say, as shown in Figure 7, providing layout panel state conversion unit 5 shown in Figure 2 between the processing line 71 and 79 of step, therefore allow to be sent to heeling condition from the panel G that processing line 71 sends and handle line 79.
The operation of panel conveyer according to the preferred embodiment of the invention is described with reference to the accompanying drawings.
,, when expectation delivery panel G, utilize panel G to be loaded on the forwarder 4 of the first panel delivery unit 3 to shown in Figure 6 as Fig. 1 such as instruments such as robots.In Fig. 1, operation straight-line motion assembly 8 is moved to the left forwarder 4 so.
At this point place, support section H is between the pallet 2 and panel G of forwarder 4, and the control unit (not shown) stops moving of forwarder 4.
Then, by operating second electric machine assembly 13, support section H rises a little, to remove panel G from forwarder 4.As a result, forwarder 4 is turned back to its starting position by straight-line motion assembly 8, and simultaneously, operates second electric machine assembly 13 to reduce support section H.
That is to say that when operation second electric machine assembly 13 reduced support section H, the guided way 21 that spiral is connected to second leading screw 11 reduced.As a result, the support section H that is connected to rail 21 moves down.
As above-described, when the direction of transfer of panel G was switched to vertical direction by switch unit 6, panel G handed over to the panel state conversion unit 5 that is installed in below the support section H.
That is to say that when the panel G on being positioned at support section H descends, as shown in Figure 4, panel G will be positioned on the supporting pin 38 of panel state conversion unit 5.
In this point, panel state conversion unit 5 keeps its horizontality.When the panel G that is horizontal handed over to panel state conversion unit 5, leaning device 17 was started working.
That is to say that when cylinder assembly 24 starts, a side of bottom 36 will descend.As a result, as shown in Figure 5, bottom 36 is had a down dip to the right by carriage/link pin assembly 22.In this point, the set pin 28 that is installed in second supporting component, 26 1 ends prevents that panel G from moving to sidepiece.
In this state, by the leading screw 62 that is rotated by the 3rd electric machine assembly 52, the removable plate m that spiral is connected to leading screw 62 is lowered.As a result, be installed in leaning device 17 on the removable plate m along with reducing together.
Then, panel G is handed over to the cylinder R of the second panel delivery unit between second load-carrying element 26 and bottom 36.
In this point, the position of panel G is tilted device 17 and changes.More accurately, the leaning angle of panel G be tilted device 17 be controlled to be identical with the leaning angle of cylinder R, thereby the effect identical with the horizontal transmission panel is provided.
Drive the 3rd electric machine assembly 52, becoming up to the upper end of supporting pin 38 is lower than the height of cylinder R.
As a result, by conventional process, bevelled cylinder R is sent to panel processing unit 10 with panel G, thereby through a series of processing line, during this period, is downward through bevelled panel G attached to the impurity of panel G.
After this, drive switch unit, panel state cell and leaning device 6,5 and 17, to repeat the aforesaid operations process with the direction opposite with above-mentioned driving direction.
According to the present invention, because the panel conveyor layout is in the panel of heeling condition for transmitting, so can obtain the failure-free treatment effect.
Since can come vertically to move and sloping desk by single assembly, can the economy system installing space.
Owing to utilize leaning device to make that the angle of inclination of panel is identical with the cylinder angle of inclination of panel delivery unit, therefore the panel that hands over to cylinder is in heeling condition, and the rotation by cylinder is sent to the panel processing unit with panel, so delivery panel stably, and can not be pushed or vibrate.
It will be appreciated by those skilled in the art that and to carry out various modifications and change to the present invention.Therefore, need only these modifications and change within appended claims and equivalency range thereof, the present invention just should comprise these modifications and change.
Claims (16)
1, a kind of panel conveyer comprises:
Framework;
Be provided on this framework the first panel delivery unit with delivery panel;
Switch unit, it receives this panel from this first panel delivery unit, to switch the panel direction of transfer;
Be provided at below this switch unit, be used for the panel state conversion unit of conversion panel state; With
Have the second panel delivery unit of cylinder, this cylinder is used for receiving this panel from this switch unit, and this panel is sent to the panel processing unit.
2, according to the panel conveyer of claim 1, wherein this first panel delivery unit comprises straight-line motion assembly that is installed on this framework and the forwarder that is furnished with this panel on it, and this forwarder is moved by this assembly.
3, according to the panel conveyer of claim 1, wherein this switch unit comprises:
The a pair of support section that receives panel from this forwarder;
The guided way of described support section is installed on it, is used to make described support section level movable;
First leading screw that spiral is connected to this support section and is driven by first electric machine assembly; With
Second leading screw that spiral is connected to this guided way and is driven by second electric machine assembly.
4, according to the panel conveyer of claim 1, wherein the panel state conversion unit comprises the mutually different supporting pin of a plurality of height, first load-carrying element of the described pin of a plurality of supports; With the bottom that is fixed with described first load-carrying element on it.
5, according to the panel conveyer of claim 4, wherein this panel state conversion unit further comprises the leaning device that is used to adjust this panel degree of dip.
6, according to the panel conveyer of claim 4, wherein this panel state conversion unit further comprises the lifting unit that is used to transfer the panel that is in heeling condition.
7, a kind of panel conveyer comprises:
Framework;
Be provided at the leaning device on the framework, it utilizes hinging manner that cargo-carring panel is tilted to predefined angle; With
By promoting and reducing the lifting unit that this leaning device makes this panel be supported or receive.
8, a kind of panel conveyer comprises:
Framework;
Be arranged on the rail that is provided on this framework forwarder slidably with delivery panel;
Be provided at the leaning device on this framework, it utilizes hinging manner with the cargo-carring panel predefined angle that tilts;
By promoting and reducing the lifting unit that this leaning device makes this panel be supported or receive; With
Receive the delivery unit that this panel also hands over to this panel the panel processing unit from this leaning device.
9, according to each panel conveyer in claim 7 and 8, wherein this lifting unit comprises:
First adapter plate that is fixed on this framework and separates with the bottom;
Be installed in the removable plate of this first adapter plate, it is movable in vertical direction; With
Be installed in the leaning device on this removable plate.
10, according to the panel conveyer of claim 9, wherein this leaning device comprises:
Be installed in the cylinder assembly between this bottom and the removable plate;
Be installed in the carriage hinge component between this bottom, this removable plate and this cylinder assembly.
11, according to each panel conveyer in claim 7 and 8, wherein this leaning device comprises:
A plurality of first load-carrying elements that are installed on the bottom;
A plurality of supporting pins that are installed on the described load-carrying element; With
Be installed on described first load-carrying element and be arranged in the set pin that the panel on the described supporting pin moves with control.
12, according to the panel conveyer of claim 10, wherein this removable plate provides and prevents that this removable plate from moving down the drg that surpasses the level that preestablishes.
13, according to the panel conveyer of claim 11, wherein this supporting pin comprises first pin and built-in second pin that is installed in the first load-carrying element end, and the height of described first pin is greater than the height of described second pin.
14, according to the panel conveyer of claim 11, wherein to be designed in the appropriate position along this first load-carrying element be adjustable to this set pin.
15, panel conveyer according to Claim 8 further comprises the switch unit that is used to switch the panel direction of transfer.
16, panel conveyer according to Claim 8 further comprises the panel state conversion unit of the outlet side that is installed in this panel processing unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040035541 | 2004-05-19 | ||
| KR1020040035541A KR100528810B1 (en) | 2004-05-19 | 2004-05-19 | Apparatus for transferring works |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1699126A true CN1699126A (en) | 2005-11-23 |
| CN100480155C CN100480155C (en) | 2009-04-22 |
Family
ID=35475418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100693985A Expired - Fee Related CN100480155C (en) | 2004-05-19 | 2005-05-18 | Device for transmitting bread board |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4249155B2 (en) |
| KR (1) | KR100528810B1 (en) |
| CN (1) | CN100480155C (en) |
| TW (1) | TWI301470B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112239068A (en) * | 2019-07-19 | 2021-01-19 | 亚智科技股份有限公司 | Bar type substrate conveying device and method thereof |
| CN116119247A (en) * | 2023-04-19 | 2023-05-16 | 泉州绿光达电子科技有限公司 | Carrying device for solar lamp processing |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100739100B1 (en) | 2006-03-08 | 2007-07-12 | 주식회사 디엠에스 | Substrate transporting apparatus |
| KR100783762B1 (en) | 2007-01-04 | 2007-12-07 | 주식회사 디엠에스 | Transfering apparatus for substrate |
| CN101652302B (en) * | 2007-04-05 | 2012-10-10 | 平田机工株式会社 | Substrate conveyance system |
| JP5047859B2 (en) * | 2008-03-31 | 2012-10-10 | 住友重機械工業株式会社 | Lift pin unit and XY stage apparatus having the same |
| KR101179563B1 (en) | 2009-10-07 | 2012-09-04 | 주식회사 케이씨텍 | Apparatus and method for processing substrate |
| KR101203709B1 (en) | 2010-08-30 | 2012-11-21 | 주식회사 디엠에스 | substrate treatment apparatus |
| KR101199778B1 (en) * | 2010-12-14 | 2012-11-09 | 엘지디스플레이 주식회사 | Apparatus and method for processing substrate |
| CN103337472B (en) * | 2013-05-23 | 2016-04-20 | 沈阳拓荆科技有限公司 | The using method of the semiconductor coated film equipment pin of differing heights |
| KR101415828B1 (en) * | 2013-07-18 | 2014-07-08 | 에버테크노 주식회사 | Platen transffering device of exposure apparatus for printed circuit board |
| CN103803290B (en) * | 2013-11-07 | 2018-05-15 | 雄华机械(苏州)有限公司 | Automobile door lock with andante slewing equipment |
| CN105501963A (en) * | 2016-01-11 | 2016-04-20 | 厦门市富桥机械有限公司 | Intelligent board grabbing machine |
| KR101712034B1 (en) * | 2016-07-19 | 2017-03-03 | 디앤에이 주식회사 | Turn over module and laser lift off apparatus having the same |
| KR102354184B1 (en) * | 2018-03-06 | 2022-01-21 | 주식회사 엘지에너지솔루션 | Apparatus for aligning unit cell and method for manufacturing electrode assembly thereby |
| KR20200118319A (en) | 2019-04-05 | 2020-10-15 | 주식회사 디엠에스 | Substrate transferring apparatus |
| CN113682715A (en) * | 2020-05-19 | 2021-11-23 | 亚智科技股份有限公司 | Inclined platform, substrate transmission device and substrate transmission method |
| JP7163944B2 (en) * | 2020-09-15 | 2022-11-01 | 日新イオン機器株式会社 | Substrate holder and ion implanter |
-
2004
- 2004-05-19 KR KR1020040035541A patent/KR100528810B1/en not_active IP Right Cessation
-
2005
- 2005-05-17 TW TW094115892A patent/TWI301470B/en not_active IP Right Cessation
- 2005-05-18 JP JP2005145738A patent/JP4249155B2/en not_active Expired - Fee Related
- 2005-05-18 CN CNB2005100693985A patent/CN100480155C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112239068A (en) * | 2019-07-19 | 2021-01-19 | 亚智科技股份有限公司 | Bar type substrate conveying device and method thereof |
| CN116119247A (en) * | 2023-04-19 | 2023-05-16 | 泉州绿光达电子科技有限公司 | Carrying device for solar lamp processing |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4249155B2 (en) | 2009-04-02 |
| KR100528810B1 (en) | 2005-11-15 |
| TW200538368A (en) | 2005-12-01 |
| JP2005330106A (en) | 2005-12-02 |
| TWI301470B (en) | 2008-10-01 |
| CN100480155C (en) | 2009-04-22 |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Weihai dianmei Shiguang electromechanical Co Ltd Assignor: Display Production Service Co., Ltd. Contract record no.: 2012990000113 Denomination of invention: Device for transmitting bread board Granted publication date: 20090422 License type: Exclusive License Open date: 20051123 Record date: 20120316 |
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| ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090422 Termination date: 20190518 |
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| CF01 | Termination of patent right due to non-payment of annual fee |