CN1696764A - Light beam shaping device in use for semiconductor laser array in high power - Google Patents
Light beam shaping device in use for semiconductor laser array in high power Download PDFInfo
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- CN1696764A CN1696764A CN 200510016666 CN200510016666A CN1696764A CN 1696764 A CN1696764 A CN 1696764A CN 200510016666 CN200510016666 CN 200510016666 CN 200510016666 A CN200510016666 A CN 200510016666A CN 1696764 A CN1696764 A CN 1696764A
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Abstract
A light beam reshaping device consists of laser array, the first lens set, the second lens set, the first planoconvex lens set, quick shaft compression column lens, the second planoconvex lens set, optical fibre array, optical fibre bundle, focusing lens and optical fibre. The device can ensure high coupling rate, high power and high brightness as well as can be used in high power semiconductor laser array.
Description
Technical field:
The invention belongs to field of semiconductor lasers, relate to the structural design of semiconductor laser array light-beam forming unit.
Background technology:
Volume is little, in light weight owing to having, the life-span long for semiconductor laser array, the power advantages of higher, has broad application prospects and enormous and latent market in fields such as military affairs, industry and medical treatment, thereby has become the research focus of competitively chasing countries in the world.But because the intrinsic fault of construction of semiconductor laser array, its each luminescence unit output beam quality is very poor, be embodied in: each luminescence unit is 30 °～40 ° in the angle of divergence perpendicular to p-n junction direction (fast axle), and the angle of divergence that is parallel to p-n junction direction (slow axis) is 7 °～10 °.Because the different angles of divergence and serious astigmatism and the asymmetric ovalize hot spot of hot spot extreme are arranged perpendicular to the p-n junction direction with on being parallel to the p-n junction direction, and this has seriously hindered the practical application of semiconductor laser array.In order to overcome this obstacle, improve the output beam quality of semiconductor laser array, must carry out beam shaping to obtain the angle of divergence and all very little symmetrical hot spot of spot diameter.
The beam shaping technology that two kinds of comparative maturities are arranged at present.Wherein a kind ofly relate to a plurality of optical fiber, embodiment is: an end (coupled end) of each optical fiber and luminescence unit in the semiconductor laser array is corresponding to one by one to carry out light beam coupling, and the other end (output terminal) then pools a branch of to obtain the output facula of circle symmetry.Consider that the beam divergence angle on the vertical PN junction direction of each luminescence unit generally is greater than the maximum light acceptance angle corresponding with Optical Fiber Numerical Aperture, usually need between fiber array and semiconductor laser array, add a cylindrical lens, perhaps the coupled end end face of all optical fiber be made semisphere.This coupling technique is simple relatively and efficient is higher, generally between 80%-90%, but the numerical aperture minimum of optical fiber generally about 0.11～0.22, the angle of divergence is 9.21 °～12.71 °, the beam divergence angle of its optical fiber output is bigger.Therefore, although this technology can obtain higher output power, also need further collimation.
Another technology only relates to an optical fiber, embodiment is: at first utilize the microtrabeculae lens to compress the big beam divergence angle of each luminescence unit on vertical PN junction direction, utilize the non-imaging micro-optical systems of particular design to make the output beam half-twist of each luminescence unit also close mutually then, thereby obtain the rectangular light spot of a near symmetrical, by plus lens light beam coupling is entered the optical fiber that a diameter is 400 μ m or 600 μ m at last.In theory, the coupling efficiency of this technology can reach more than 90%, but in fact because the structure of micro-optical systems is too complicated, design and making are all very difficult, and coupling efficiency generally has only about 65%, is difficult to be further enhanced again.
Summary of the invention:
Obviously, background technology or the output angle of divergence is bigger, or design and make all very difficultly, coupling efficiency is lower, is difficult to the high quality beam output that realizes that simultaneously high power, high brightness and numerical aperture are little.Purpose of the present invention is exactly to solve the output beam quality problem of semiconductor laser array, and obtain high power and high quality beam output simultaneously on the little basis of output power height, light beam numerical aperture guaranteeing.For this reason, the present invention will provide a kind of light-beam forming unit that is used for high-power semiconductor laser array.
The present invention includes: laser array, first lens combination, second lens combination, the first plano-convex lens group, fast axial compression contract post lens, the second plano-convex lens group, fiber array, fibre bundle, condenser lens, optical fiber.Place laser array, first lens combination, second lens combination, the first plano-convex lens group, fast axial compression contract post lens, the second plano-convex lens group, fiber array, fibre bundle, condenser lens, optical fiber successively in direction of beam propagation; Each luminescence unit of laser array is launched several light beams, every light beam is perpendicular to about 30 °～40 ° of the angle of divergence of p-n junction direction (fast axle), about 7 °～10 ° of the angle of divergence that is parallel to p-n junction direction (slow axis), through first lens combination several light beams are carried out anaberration, focus on and to make oval hot spot be converged to a millimeter level circle hot spot, the focus of second lens combination forms two telecentric optics structures at the focused light spot place and first lens combination, and enlargement factor is 2.5 times; After the two telecentric optics structures of several light beams processes of each luminescence unit emission of laser array, make the angle of divergence fast, slow axis of several light beams all be compressed into the small value aperture light beam, every the light beam of distance change ambassador between the small value aperture light beam of second lens combination output end face output is corresponding one by one with the plano-convex lens in the first plano-convex lens group; Between the first plano-convex lens group and the second plano-convex lens group, be mounted with the fast axial compression post lens that contract, the first plano-convex lens group and the corresponding placement mutually of the second plano-convex lens group, the convex of the first plano-convex lens group is positioned near the contract one side of post lens and arrange by arcuate shape of fast axial compression, the plane of the first plano-convex lens group is positioned over the one side near second lens combination, the first plano-convex lens group optical axis is parallel with direction of beam propagation, the light beam of each the plano-convex lens output in the first plano-convex lens group is a directional light, after contracting the post lens, fast axial compression enters the second plano-convex lens group, the convex of the second plano-convex lens group is near the contract another side of post lens of fast axial compression, the plane of the second plano-convex lens group is near fiber array and press the one-dimensional array arrangement, the optical axis of the second plano-convex lens group is parallel with direction of beam propagation, plano-convex lens output micron order circle hot spot in the second plano-convex lens group; It is corresponding one by one staggered relatively with the output terminal in the second plano-convex lens group that the optic fibre input end of fiber array is pressed the one-dimensional array arrangement; With the integrated a branch of fibre bundle of the output terminal of fiber array, the output end face of fibre bundle and the input end face of condenser lens are staggered relatively, the output end face of condenser lens and the input end face of optical fiber are staggered relatively, make several light beams be focused into a hot spot and enter an optical fiber, make laser array realize high power, the high quality beam output that the high brightness numerical aperture is little, then finish the making of the light-beam forming unit that is used for high-power semiconductor laser array.
Advantage of the present invention: in order to solve the background technology design and to make all very difficult, coupling efficiency is lower, the very difficult problem that realizes the high quality beam output that high power, high brightness and numerical aperture are little simultaneously, the present invention has adopted two telecentric optics structures, solved design and made all very difficult, the problem that coupling efficiency is lower makes design and make relatively simplely, and the present invention designs novel simple relatively micro-optical systems to guarantee higher coupling efficiency.Because the present invention has adopted the technical scheme of fiber array and fibre bundle, one-dimensional array is arranged light beam to be become circular light beam and goes forward side by side into an optical fiber, solved the very difficult problem that realizes the high quality beam output that high power, high brightness and numerical aperture are little simultaneously, the present invention has realized the light beam output that high power, high brightness, high-quality and numerical aperture are little, is provided for the light-beam forming unit of high-power semiconductor laser array.
Description of drawings:
Fig. 1 is a light-beam forming unit structural representation among the present invention, also is Figure of abstract.
Fig. 2 is the first lens group structure synoptic diagram
Fig. 3 is the second lens group structure synoptic diagram
Embodiment:
The present invention is further described below in conjunction with drawings and Examples, but the invention is not restricted to these embodiment.
Comprise as shown in Figure 1: laser array 1, first lens combination 2, second lens combination 3, the first plano-convex lens group 4, fast axial compression contract post lens 5, the second plano-convex lens group 6, fiber array 7, fibre bundle 8, condenser lens 9, optical fiber 10.
Embodiment 1:
The first plano-convex lens group 4 is made up of several identical plano-convex lenss, and present embodiment adopts seven plano-convex lenss, and the plane of plano-convex lens is pressed arcs of recesses and arranged, and the convex of plano-convex lens is pressed the convex shape and arranged.Fast axial compression post lens 5 input faces that contract are that projection face, output face are recessed cylinder.
The second plano-convex lens group 6 is made up of several identical plano-convex lenss, and plano-convex lens is that convex, output face are the plane by one-dimensional array arrangement, input face.Condenser lens 9 is that convex surface, output face are the plane for the plano-convex lens input face.Optical fiber 10 is silica fibre.
The device that the present invention uses does not have the wide 150 μ m of bar, the cycles 500 μ m that aluminium quantum well high power laser array has seven luminescence units, each luminescence unit as 808nm, and the luminous zone area is 4050 μ m * 1 μ m, and the continuous Output optical power of room temperature is 14W.
Every light beam of seven luminescence units emission is 30 ° or 35 ° or 40 ° in the angle of divergence perpendicular to the p-n junction direction (fast axle) of laser array; When the angle of divergence was 35 °, its numerical aperture was 0.5736; The angle of divergence that is parallel to the p-n junction direction (slow axis) of laser array 1 is 7 ° or 8 ° or 9 ° or 10 °; When the angle of divergence was 7 °, its numerical aperture was 0.12; Carry out anaberration, focus on and to make it be converged to the focused light spot of 1600 μ m through 2 pairs of seven light beams of first lens combination, the focus of second lens combination 3 both had been the focused light spot of 1600 μ m, make second lens combination 3 and first lens combination 2 form two telecentric optics structures, enlargement factor is 2.5 times.After seven two telecentric optics structures of light beams process of seven luminescence unit emissions of laser array 1, the angle of divergence is that 35 ° fast axis values aperture is compacted into 0.229, the angle of divergence is that 7 ° slow axis numerical aperture is compacted into 0.048 small value aperture light beam, the small value aperture light beam is through the first plano-convex lens group, 4 output directional lights, enter the second plano-convex lens group 6 again after post lens 5 are contracted in fast axial compression, the micron order circle hot spot beam diameter of being exported by the second plano-convex lens group 6 is 200 μ m, numerical aperture 0.06.Is seven micron orders circle spot diameters that 200 μ m, numerical aperture are that 0.06 laser beam is coupled in the fiber array 7 that seven core diameters are arranged is 200 μ m, and to be integrated into fibre bundle 8 its diameters be 750 μ m, making diameter through condenser lens 9 again is that 750 μ m fibre bundles 8 focus on that to become a diameter be the uniform light spots of 400 μ m, numerical aperture 0.099 (5.68 °) and the silica fibre 10 that enters 400 μ m or 600 or 800 or 1000 μ m, and the optical fiber output couple efficiency can reach 75%.Make laser array realize high power, the high quality beam output that the high brightness numerical aperture is little, then finish the making of the light-beam forming unit that is used for high-power semiconductor laser array.
When the present invention is used for the high power laser array, it is 10mm * 0.001mm that laser array 1 can adopt the wide 150 μ m of laser array, each luminescence unit bar, cycles 500 μ m, the luminous zone area of nineteen luminescence unit, the continuous Output optical power of room temperature is 40W, in the angle of divergence perpendicular to laser array p-n junction direction (fast axle) is that 35 °, numerical aperture are 0.5736, the angle of divergence that is parallel to laser array p-n junction direction (slow axis) is that 7 °, numerical aperture are 0.12, and other parameter is identical with embodiment 1.
Claims (3)
1, the light-beam forming unit that is used for high-power semiconductor laser array, comprise: laser array (1) is characterized in that: place laser array (1), first lens combination (2), second lens combination (3), the first plano-convex lens group (4), fast axial compression contract post lens (5), the second plano-convex lens group (6), fiber array (7), fibre bundle (8), condenser lens (9), optical fiber (10) successively in direction of beam propagation; Each luminescence unit of laser array (1) is launched several light beams, through first lens combination (2) several light beams are carried out anaberration, focusing makes oval hot spot be converged to millimeter level circle hot spot, the focus of second lens combination (3) forms two telecentric optics structures at focused light spot place and first lens combination (2), after the two telecentric optics structures of several light beams processes of each luminescence unit emission of laser array (1), make the fast of several light beams, the angle of divergence of slow axis all is compressed into the small value aperture light beam, and every the light beam of distance change ambassador between the small value aperture light beam of second lens combination (3) output end face output is corresponding one by one with the plano-convex lens in the first plano-convex lens group (4); Between the first plano-convex lens group (4) and the second plano-convex lens group (6), be mounted with the fast axial compression post lens (5) that contract, the first plano-convex lens group (4) and the corresponding placement mutually of the second plano-convex lens group (6), the convex of the first plano-convex lens group (4) is positioned near the contract one side of post lens (5) and arrange by arcuate shape of fast axial compression, the plane of the first plano-convex lens group (4) is positioned over the one side near second lens combination (3), first plano-convex lens group (4) optical axis is parallel with direction of beam propagation, first plano-convex lens group (4) output beam is a directional light, after contracting post lens (5), fast axial compression enters the second plano-convex lens group (6), the convex of the second plano-convex lens group (6) is near the contract another side of post lens (5) of fast axial compression, the plane of the second plano-convex lens group (6) is near fiber array (7) and press the one-dimensional array arrangement, the optical axis of the second plano-convex lens group (6) is parallel with direction of beam propagation, plano-convex lens output micron order circle hot spot in the second plano-convex lens group (6); It is corresponding one by one staggered relatively with the output terminal in the second plano-convex lens group (6) that the optic fibre input end of fiber array (7) is pressed the one-dimensional array arrangement; With the integrated a branch of fibre bundle of the output terminal of fiber array (7) (8), the input end face of the output end face of fibre bundle (8) and condenser lens (9) is staggered relatively, the input end face of the output end face of condenser lens (9) and optical fiber (10) is staggered relatively, makes several light beams be focused into a hot spot and enters an optical fiber (10).
2, the light-beam forming unit that is used for high-power semiconductor laser array, it is characterized in that: first lens combination (2) is by first concave-convex lens (11), first biconvex lens (12), first meniscus (13) and second biconvex lens (14) are formed and are placed successively along direction of beam propagation, the concave surface of first concave-convex lens (11) is near the output terminal of laser array (1), the convex surface of first concave-convex lens (11) is near the input face of first biconvex lens (12), the output face of first biconvex lens (12) is near the convex surface of first meniscus (13), the concave surface of first meniscus (13) and second biconvex lens (14) convex input face are glued together, and the convex output face of second biconvex lens (14) is near the convex input face of the 3rd biconvex lens (15).
3, the light-beam forming unit that is used for high-power semiconductor laser array, it is characterized in that: second lens combination (3) is by the 3rd biconvex lens (15), second concave-convex lens (16), second meniscus (17), the 3rd meniscus (18) is formed and is placed successively along direction of beam propagation, the concave surface gummed of the convex output face of the 3rd biconvex lens (15) and second concave-convex lens (16), the convex surface of second concave-convex lens (16) is near the convex surface of second meniscus (17), the concave surface of second meniscus (17) is near the convex surface of the 3rd meniscus (18), and the concave surface of the 3rd meniscus (18) is near the plane of the first plano-convex lens group (4).
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| CN 200510016666 CN1696764A (en) | 2005-03-30 | 2005-03-30 | Light beam shaping device in use for semiconductor laser array in high power |
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| CN 200510016666 CN1696764A (en) | 2005-03-30 | 2005-03-30 | Light beam shaping device in use for semiconductor laser array in high power |
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| CN101661205B (en) * | 2008-08-27 | 2012-05-30 | 中国科学院半导体研究所 | Method for manufacturing cylindrical lens for compressing fast axis of light beam of high-power semiconductor laser array device |
| CN101834402B (en) * | 2009-09-24 | 2012-06-27 | 西安炬光科技有限公司 | Semiconductor laser side pump module |
| CN102591019A (en) * | 2012-03-02 | 2012-07-18 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN103439773A (en) * | 2013-08-28 | 2013-12-11 | 中国科学院半导体研究所 | High-power all-solid-state continuous laser beam combining system |
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| CN101661205B (en) * | 2008-08-27 | 2012-05-30 | 中国科学院半导体研究所 | Method for manufacturing cylindrical lens for compressing fast axis of light beam of high-power semiconductor laser array device |
| CN101834402B (en) * | 2009-09-24 | 2012-06-27 | 西安炬光科技有限公司 | Semiconductor laser side pump module |
| CN106873167B (en) * | 2011-11-04 | 2018-10-12 | 应用材料公司 | The optical design of circuit is generated using microlens array |
| US9636778B2 (en) | 2011-11-04 | 2017-05-02 | Applied Materials, Inc. | Optical design for line generation using microlens array |
| CN106873167A (en) * | 2011-11-04 | 2017-06-20 | 应用材料公司 | The optical design of circuit is produced using microlens array |
| CN103797564B (en) * | 2011-11-04 | 2016-11-02 | 应用材料公司 | Microlens array is used to produce the optical design of circuit |
| CN103797564A (en) * | 2011-11-04 | 2014-05-14 | 应用材料公司 | Optical design for line generation using microlens array |
| CN102591019A (en) * | 2012-03-02 | 2012-07-18 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN102591019B (en) * | 2012-03-02 | 2014-08-20 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN103439773B (en) * | 2013-08-28 | 2015-05-13 | 中国科学院半导体研究所 | High-power all-solid-state continuous laser beam combining system |
| CN103439773A (en) * | 2013-08-28 | 2013-12-11 | 中国科学院半导体研究所 | High-power all-solid-state continuous laser beam combining system |
| CN104052552A (en) * | 2014-06-13 | 2014-09-17 | 南京大学 | Large-diameter super-conduction weak-light receiver |
| CN104375273A (en) * | 2014-10-21 | 2015-02-25 | 武汉锐科光纤激光器技术有限责任公司 | Light spot shaping device for high power semiconductor laser unit |
| CN104375273B (en) * | 2014-10-21 | 2016-11-09 | 武汉锐科光纤激光技术股份有限公司 | A kind of high-power semiconductor laser spot shaping device |
| CN104503089A (en) * | 2014-12-18 | 2015-04-08 | 北京首量科技有限公司 | Variable-multiplying power beam expander used for laser processing system |
| CN106730402A (en) * | 2017-01-05 | 2017-05-31 | 海南瑞韩医学美容医院管理有限公司海口龙华京华城红妆医学美容门诊部 | A kind of hand for treating chloasma has |
| CN106872362B (en) * | 2017-01-18 | 2023-12-12 | 浙江大学 | LED light source device for visible and near infrared spectrum detection and application thereof |
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| CN110494239A (en) * | 2017-02-15 | 2019-11-22 | 通用电气公司 | System and method for preparing component using laser array |
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| CN115839826A (en) * | 2022-11-03 | 2023-03-24 | 长园视觉科技(珠海)有限公司 | Detection device and detection method for transmittance and numerical aperture of optical fiber |
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