CN1668777A - Process for metallising support media made from plastic material - Google Patents

Abstract

In order to metallise a support made from high temperature polymer, the melting temperature of which is higher than 180 degree C, it is shown that the stages of cleaning, plasma etching, grafting and then metallising in a metallisation bath can be applied. According to the invention, the metallisation bath is brought to a temperature between 50 degree C and 70 degree C, the plasma being a nitrogenous plasma.

Description

The method of metallizing on the mounting medium of making by plastic material

The objective of the invention is by plastic material, particularly the method for metallizing on the mounting medium made of high temperature plastic material.The objective of the invention is to produce junctor especially for electronic industry, more generally be high temperature resistant and as the mounting medium that mixes assembly parts, described junctor and more generally high temperature resistant and as the mounting medium that mixes assembly parts be light, be easy to make, and have high electrical insulation capability, allow necessary conductivity by metallizing simultaneously.

Particularly from U.S. Pat-A-5 407 622, known a kind of method of producing the circuit of two dimension or three-dimensional metallizing by the sandwich molding process, particularly use first mould of plastic material and make it stand to make that it can be by the activation step of metallizing, do not cause itself being coated with second mould of the plastic material of metal, making outside the activating area of first parts is exposed to, is metallic coating step then.Description to this method is pointed out, adheres to the chemical oxidation that promotion stage (activation) use is undertaken by solution, and it is hydrophilic that this makes that frosting becomes.U.S. Pat-A-4 812275 also relates to the sandwich molding process.For this method, adhesion be by chemical milling make will metallizing surperficial roughen come promoted.

The another kind of method of deposited catalyst precursor has been described among U.S. Pat-A-5 153 023.According to this document, the selectivity metallizing is to realize to dissolve described precursor in the position that does not require metallizing by those zones and the described parts of rinsing that local heating requires to adhere to catalyzer.

A kind of sandwich molding technique has more early been described in English Patent GB-A-1 254 308.According to this document, used two kinds of materials, wherein a kind of metallizing that is suitable for, another kind is not suitable for.Then by comprising the chemical milling stage of product surface, the treatment stage and the method for plating metal in stage of deposition electrochemical catalyst then handle described composite product.

The chemical technology on the surface of typically, be used to clean, sensitization and activation will be coated exists.Immersion method is in order the palladium seed crystal to be attached to upward surperficial and to carry out in special bath.These routine techniquess can be summarized as follows: carry out the absorption of catalyzer and metallizing then after comprising cleaning and surperficial preparatory stage of peeling off.

Chemical solution is used in the processing of prior art.Like this, the plastics of each type have its own special surface preparation procedure.The main drawback of these handling procedures is that they comprise many steps, according to not being all for 16 to 22 steps of polymer property.On the other hand, these require the quite long treatment time in multiple stages, in some cases before can beginning metallizing even reach 65 minutes.Therefore, to the polymer materials of the difficult treatment of the plastic basis material that is used for metallizing, complexity and expensive, particularly several types will metallizing the time.These methods also must be carried out expensive solution and be handled.In addition, employed activation or catalytic solution mainly use colloidal palladium-Xi (PdSn) solution in these methods, this solution costliness, contaminative are arranged, and very responsive to temperature fluctuation.For example, the temperature that is lower than 10 ℃ can partially or even wholly make these activated solution inactivations, and they is become can not use.On the other hand, the use of etching and engraving solution makes frosting coarse a bit, and some that this means that it is not useable for requiring very level and very slick surface is connected, accurate welding, electronics and packaging application.Should be pointed out that in order to ensure the favorable mechanical binding property, this coarse be necessary in ordinary method.Must be pointed out that also a lot of unusual pyritous engineering plastics especially for connecting in using those as LCP, PPS and PBT, are considered to and can not come metallizing with the wet chemical method of above-mentioned routine.This has seriously limited the possibility of the chance of the characteristic of utilizing these polymkeric substance on technical scale.Some grade of these plastics comprises very special additive (blending) so that they are suitable for coming metallizing with chemical means, but this has reduced its mechanical property and dielectric characteristics.As a result, they become and are not suitable for being used for connecting.

Therefore, the shortcoming of these programs be chemically treated slow, desired number of steps, costliness and the use that the palladium colloidal solution of pollution is arranged, the danger of under the impossibility of metallizing on the high-temperature engineering plastics, the position produced coarse and situation, peeling off at smooth surface at the metallizing parts.In fact, in these cases, metallizing is the result of mechanical adhesion, and does not have sufficient bonding.

In order to address these problems in the present invention, nitrogen or ammonia plasma treatment are used in decision, to realize the chemical adhesion of metal deposit on lubricious material.Nitrogen or ammonia plasma treatment are to produce in will be by the vacuum (-tight) housing of the goods of metallizing holding.In vacuum (-tight) housing, produce elementary vacuum, injecting gas, this gas is NH ₃, N ₂Or (N ₂+ H ₂) in a kind of, or the mixture of these gases.Obtain plasma body with electromagnetic energy (low frequency, radio frequency) by microwave or microwave discharge.

Carried out and from following file, known the activation test of some plastic material that passes through plasma body: " Interest of NH ₃And N ₂Plasmas for Polymers SurfaceTreatment Before Electroless Metallization ", M.ALAMI, M.CHARBONNIER and M.ROMAND, Plasmas and Polymers, the 1st volume, N 2,1996,113-126 page or leaf, D1; " Plasma Chemical Modification ofPolycarbonate Surfaces for Electroless Plating ", the author is the same, J.Adhesion, the 57th volume, 77-90 page or leaf, D2; " Surface plasmafunctionalization of polycarbonate:Application to electrolessnickel and copper plating ", M.Charbonnier, M.Romand, E.Harry, M.Alami, Journal of applied electrochemistry, January calendar year 2001, the 31st volume, N 1, the 57-63 page or leaf, D3; " Electroless Plating of polymers:XPS study of the initiation mechanisms ", M.CHARBONNIER; M.ALAMI and M.ROMAND; Journal of applied electrochemistry, in April, 1998, the 28th volume, N 4, the 449-453 pages or leaves, D4; " Plasma Treatment Process forPalladium Chemisorption onto Polymers before ElectrolessDeposition ", Charbonnier, M.; Alami, M.; Romand, M., Journal ofthe electrochemical society, 1996, the 143 volumes, the 2nd phase, 472-480 page or leaf, D5.

Yet, although first piece of file D1 imagined this processing that is fit to polymkeric substance substantially really, but it has only described unformed polystyrene, polycarbonate and polymeric amide as the example of reality, these materials at electronic applications as the quality of carrier because the high water absorbing capacity of their temperature limitation and polymeric amide and interesting.

Second, third only provides the processing of polycarbonate and the detailed description of mechanism thereof with the 4th piece of file D2, D3 and D4.These materials are not too important at electronics and element field, and reason is that its quality is very general with regard to thermoresilient, electrical insulating property, industrial workability and mechanical suitability.

On the contrary, in electronic circuit and field of connectors, the plastic material with high thermoresilient is preferred, they are hypocrystalline and/or liquid crystal type, typically be polyester polybutylene terephthalate (PBT) or LCP, polyphenylene sulfide (PPS) type, or syndiotactic polystyrene (SPS) type.

These polymeric plastics materials can be used as high temperature polymer, because their melt temperature is: PBT is 220 ℃, and above-mentioned other three kinds of listing are higher than 350 ℃.

Comparatively speaking, be considered to be suitable for come the melt temperature of other polymkeric substance of metallizing much lower by plasma body or other method, ABS or PVC are about 90 ℃, and polycarbonate is about 120 ℃.

Yet known high-temperature engineering plastics material is an inert in the chemical treatment relevant with metallizing.This inertia these plastics therein is significantly to strengthen under the situation of partial crystallization.Consequently limited trial to these high-temperature material metallizings.

As for file D5, it is carrying out identical work with D1 aspect polycarbonate and the unformed polystyrene.In addition, the author points out clearly, and the maximum ga(u)ge of realizing by their method is less than 2 μ m.This obviously is not useable for industry and connects application, and wherein common required thickness is greater than the metallic film of 20 μ m.

Tend to stop the expert to use another fact that is noted of plasma method to be, the author of file D1 to D5 has used a kind of laboratory nickel plating bath of specific type, it is only operated being higher than under 85 ℃ the temperature, has tart pH, and systematically decompose, as specifically noted among the file D4.This has greatly limited the selection that metallizing is bathed, and can not carry out plant-scale operation.

In addition, the test of carrying out in the laboratory, use the method metallizing on aforementioned high temperature polymer materials described in the plasma activated processes, particularly file D1 to D5 produces difference or inconsistent at least metallizing result.Use industrial metallizing to bathe, adopt the activating plasma described in these files, can not plate any metal at high temperature plastics or on the cold plastics described in these files.According to these discoveries, generally accepted viewpoint is that these engineering plastic materials are not suitable for coming metallizing by these plasma bodys.

About giving one of the high temperature plastic material metallizing even more discouraging result is that these materials all are filled with additive (filler and compound) usually, for example are widely used in the glass fibre in the industry.Glass fibre has increases the inert effect of plastics to various activation methods.This is enough to explain the inconsistent characteristic of the method described in these files.

Although the situation of this priori is arranged, in order to address these problems, within the scope of the invention, we begin one's study and can utilize existing plasma etching to carry out the condition of " nothing " metallizing.

This electroless plated metal, the metallizing that promptly do not use electric current is particularly including the 1) degreasing of base material, 2) plasma etching, 3) activation of carrier surface, particularly by being immersed in the Palladous chloride dilute solution, and with the activation of water rinse, 4) chemical reduction and 5 by hypophosphite or formaldehyde baths) actual metallizing handles.During this metallizing comprises that immersing metallizing bathes.

Though the unsuccessful test of beginning, as previously discussed, we find that if employed various bath is not felt secure rightly, Yu Qi metallizing can not take place so under the ideal condition.Therefore we systematically feel secure to them, just can record metallizing then and take place in a satisfactory manner thereafter.Specifically be included in nickel of dipping in these baths, a fresh plate of peeling off in HCl solution for described bath bottoming.

We arrive the needs of eliminating bottoming with our diversion then, and we find then, and the temperature of bath must be monitored more closely.We find like this, and metallizing is bathed should have 50 ℃ to 70 ℃, preferred 55 ℃ to 65 ℃ temperature, and described metallizing bath is heated to 85 ℃ according to prior art.

In order to control this temperature better during metallizing, we choose especially with respect to the very large bath of the volume of the goods that will handle, so that the dipping of these goods in described bath influences its temperature not too largely.Another kind of solution from this point of view is the goods that preheating will be handled.

According to the present invention, and need not seek help from bottoming in order further to improve metallizing, and in order to activate high-temperature engineering plastics better, we are with inert rare gas such as neon, helium or argon and be used for the gas (N of plasma body ₂Or NH ₃) mix.The additional proportion of rare gas element is 0.1 to 6% volume, the disassociation that this has increased nitrogen in the active compound and/or ammonia or its mixture 7 to 8%, and becoming is free radical and the ion or the atomic component that excite.

Soak time is 5 seconds to 5 minutes, and power density is 0.1 to 1.1W/cm ², be preferably 0.3 to 0.7W/cm ²The electromagnetic activation frequency can be from 75Hz to microwave.The activatory effect is carbon and C-H and nitrogenous NH, the NH of grafting on the fracture goods ₂, N ₂ ⁺.... and compound is more generally as acid amides, amine, imines or imide.

Described parts can be immersed then and contain palladium salt (PdCl for example ₂Or PdSO ₄In+HCl) the solion, this makes can the grafting palladium ion.Described then palladium will contain reductive agent, as chemical reduction in the bath of hypophosphite, formaldehyde or hydrosulphite.Carry out the reductive method after this grafting such condition is provided, make when the grafted goods are immersed in the chemical plating metal bath, the metal cladding that the first layer is thin is deposited, and the metal cladding that this first layer is thin increases by electrochemical deposition or electroplating deposition then and fills to produce thick metallic coating.Resulting product is characterised in that, by analyzing the nitrogenous and palladium compound that can find at the metal/polymer interface, the thickness of described thick metal cladding is preferably 0.2 μ m to 20 μ m.

Within the scope of the invention, described method has been expanded to comprise according to prior art is assert the material that is not easy metallizing originally, as PBT, PPS, SPS and LCP.Finally, proved can be according to present method and preferred version of the present invention metallizing on these materials.

In addition, can control plasma-etching method, selectivity metallizing on the feasible goods that can form at the plastic carrier medium different by two kinds, and not be used in two activation stages between the molded stage.In fact, rely on this selectivity metallizing, the activation of parts of goods can be provided, with another non-activated parts bondings of this goods or be molded into this more on the activatory parts, then to whole metallizing, metallizing only carries out (pointed in as U.S. Pat-A-5407622) on the parts of having prepared like this.Can save needs thus to the engraving operation.Yet this technology of activated part of operating that comprises may be accompanied by the local deactivation of this activated part during bonding or molded more described not activated part, particularly in the presence of pollution substance and contaminants such as grease and oil.

According to the present invention, by carry out the bonding of two parts or molded again before activation, still different parts use different plastic materials, have solved this problem.Then, when plasma-activated, change the activatory condition, so that two parts have only one to be activated.Change the activatory time length typically.For example, be restricted to 10 seconds (or be less than 15 seconds time length), because the parts of being made by LCP or SPS were activated in 5 seconds, and another parts of being made by PBT or PPS respectively are not activated, and they only just are activated after 60 seconds.In fact, with the parts that comprise PBT and SPS with comprise that the parts of PPS and LCP test.

On the basis of these tests, can determine, optimize the graft reaction that plasma parameter (time and energy) causes having enough differences, to such an extent as to after the grafting step of palladium ion, can in the bath of the autocatalysis chemical copper that contains stablizer, carry out selectivity plating the first layer metal.Therefore, obviously the improvement of the inventive method is to cause the distinguishing activation of two material products, allows the selectivity metallizing thus, particularly by quick metallizing step.

Therefore, an object of the present invention is method to the goods metallizing of making by the high temperature polymer plastic material, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, for metallizing, metallizing is bathed and is lifted to 50 ℃ to 70 ℃ temperature.

Another object of the present invention is the method to the goods metallizing of being made by the high temperature polymer plastic material, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, metallizing is bathed and is felt secure in advance.

Another object of the present invention is the method to the goods metallizing of being made by the high temperature polymer plastic material, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, for metallizing, described goods comprise the parts of being made by different plastic materials, and regulate the operational condition of these steps, make and on of these parts, carry out grafting and metallizing thereafter, and on another, do not carry out grafting and metallizing thereafter.

Main purpose of the present invention is a kind of plastic sheet that is coated with metal deposit at least in part, comprises the plastic material of the first non-metallizing,

-be coated with second plastic material of metal deposit at least in part, described metal deposit is included in the attachment site that comprises nitrogen moiety and palladium part at the interface with second material, comprise the first layer that is called as initiation layer with first thickness, comprise that at least one is called as the outer field second layer with second thickness, described first and second plastic materials do not have metal or catalysis load (charge).

Still according to the present invention, described parts are such: described interface is plasma-activated by this second material at least, then these parts are immersed into ionic palladium bathe in and be structured on second material.

In order to produce parts of the present invention, the plasma-activated time that on two kinds of plastic materials, only activates a kind of plastic material.

According to a particular form of the present invention, describedly plasma-activated two kinds of materials are all activated, and a stage that makes a kind of material inactivation is set between described activation and described impregnation stage, the described inactivation stage can be to wait for or the ageing stage.

In a kind of alternative mode, plasma-activatedly be applied to two kinds of materials, in the electroless plating stage after in parts being impregnated into the ionic palladium bath, for example add oxygen, only on a kind of plastic material, to form initiation layer by stirring bath, stirring, injection air or bubbling.

According to the present invention, first and second materials can be selected from the grade (catalytically uncharged grades) of material SPS, LCP, PBT, PPS and their various no catalysis load.After the processing, but described first and second plastic materials can form be selected from LCP/SPS, PBT/LCP, PBT/SPS, PPS/LCP, PPS/SPS, PBT/SPS can not metallizing/metallizing right.

Outer can be especially electrochemical deposition by metal such as copper or nickel produce.

The thickness of initiation layer can be thick thick to 20 μ m from 0.3 μ m, but advantageously be 0.3 μ m to 1.5 μ m, and outer layer thickness is preferably 4 μ m to 30 μ m.

In the parts of the present invention, the sedimental bounding force on second plastic material is greater than 1N/mm ², especially, the sedimental bounding force on second plastic material can be greater than 2N/mm ²

Still according to the present invention, shown the peak that has at least corresponding to the nitrogen part on the surface that settling is stripped from back second material, corresponding to the peak of palladium part, and presented corresponding to the palladium part, be specially PdN _xThe spectroscopic analysis result of the peak skew of key.

With reference to following description and accompanying drawing, the present invention will be better understood.These are described and the proposition of accompanying drawing is for exemplary purpose purely, anything but in order to limit the present invention.These accompanying drawings have shown:

-Fig. 1: the spin differentiation of bimodal energy position of palladium 3d;

-Fig. 2 a, 2b and 2c: the example that is used for the parts of molded activation stage of the present invention;

-Fig. 3: according to the detailed view of parts behind metallizing of Fig. 2 A, 2B, 2C;

-Fig. 4: the XPS spectrum figure at the plastic-metal interface of parts of the present invention;

First details of the image of-Fig. 5: Fig. 4;

Second details of the image of-Fig. 6: Fig. 4;

-Fig. 7: the statistical graph of the XPS spectrum details at the interface of another unit type of the present invention;

-Fig. 8: according to the schematic cross-section of the parts that comprise the unitary plastic material of the inventive method metallizing.

Employed plasma technique is under reduced pressure to produce the high-frequency electrical potential gradient in the scope of the invention in gas.Produced distinct portions then, having comprised: excite or not electrons excited, ion, atom and molecule, free radical, UV and optical photon.

In the practice, three kinds of excitation frequencies that are used to produce this plasma body be in low-frequency range (＜100Hz), radio-frequency region (13.56MHz) and microwave range (430MHz or 2.45GHz).

Employed plasma body is nitrogenous plasma body, for example N ₂Or NH ₃Or N ₂+ H ₂Type, it forms the group of C-N class at polymer surfaces.Described plasma body also is highly active composition, and its surface to base material has many effects, comprising:

-by eliminating the cleaning surfaces of organic contaminants,

-remove peeling off of upper layer by form nano level certain roughness at substrate surface.

In addition, plasma body UV makes the C-C of polymkeric substance and c h bond fracture, described like this free radical can with other free radical of gas or with other macromolecular chain reaction on surface.

Containing the result that nitrogen plasma realizes by use within the scope of the invention is functionalization, and it is that the chemical official that realizes with reactive gas plasma can grafting: nitrogenous sense (N ₂, NH ₃Plasma body) is grafted to the surface of polymkeric substance.Nitrogenous N ₂Plasma body makes can obtain following group: H ₂N-C amine, N=C imines, N ≡ C nitrile.NH ₃Plasma body causes forming following group: H ₂N-C amine, the N-C=O acid amides.

Within the scope of the present invention, the subordinate phase of the high temperature plastics of acquisition metallizing is an electroless plated metal.Electroless plated metal is under the situation of not using external power, the method for the metal level of electroless plating on base material from the aqueous solution.This is a kind ofly not use method of operating under the additional power source situation.Bath of using in order to obtain metal deposit or solution are the industry solution by specialized company's design.Described bath is made up of several reagent place, particularly including:

-be used for sedimentary metal-salt: Ni, Cu, Ag, Co;

-reductive agent: sodium hypophosphite, formaldehyde;

-stablizer;

The agent of-pH regulator; With

-sequestrant.

Metal deposition reaction be will deposited metal ions and the reductive agent of described system between the result of oxidation-reduction reaction.For the surface at any base material obtains deposition, need make this surface active, that is to say the katalysis that has redox reaction, so that can cause reduction of metal ion.If base material is non-conductive,, need produce nucleation site in its surface as the situation of polymkeric substance.This is to finish by the fixing salt of group VIII metal (being generally palladium), so that can cause deposition reaction.Therefore, in the present invention,, implemented this method in order to come the surface of modification base material by Cement Composite Treated by Plasma.

Like this, according to the present invention, by making base material, particularly the connect elements of being made up of polymkeric substance stands N ₂Or NH ₃Or (N ₂+ H ₂) plasma body of type, formed the group of C-N type on its surface.Bathe when then this sample being immersed palladium: PdCl ₂Or PdSO ₄When middle, between nitrogen and palladium atom, produced strong covalent linkage: C-N-Pd; Make surface active thus, this makes oxidation-reduction reaction described above to begin.First advantage of the inventive method is, this processing of having simplified has been omitted and well known in the prior artly has been used for the chemical treatment of surface conditioning and uses the sensitization of tin protochloride to handle, and wherein the processing to solution is difficulty and costliness.

The method of this simplification that will be described below may be summarized to be following organization chart: solvent degreasing, plasma etching, activation, rinsing and metallizing.

As noted earlier, for polymer-modified surface, we have used " not polymerisable " gas: N ₂, NH ₃, so that can the nitrogenous chemical official's energy of grafting.Without limitation, by use have aluminium electrode in parallel, carry out Cement Composite Treated by Plasma with the radio frequency reactor of the 13.56MHz of capacitive operation.The junctor base material that will handle is arranged in lower electrode, and promptly on the negative pole, this electrode is connected to the RF producer.The higher electrode of ground connection is that positive pole is installed with the hole, and this makes the gas at reactor inlet evenly to flow.Water circulation system is cooled off two electrodes continuously, guarantees that thus they can not be heated to above 60 ℃.The efficient of Cement Composite Treated by Plasma depends on various operating parameterss, and in order to optimize the condition of metallizing, we focus on these parameters of change with our effort:

Gaseous tension in the-reactor: 0.12Pa to 35Pa;

-gas flow: 10 to 1000sccm;

The gas of-use: NH ₃, N ₂, (H ₂+ N ₂) as main gas with added rare gas in some cases such as helium, argon and neon;

The time length of-processing: 0.5 second to 10 minutes;

-power: the power density that producer provides: 0.1 to 1.1W/cm ²

In the industry the most no electrobath of normal use contain the salt that is useful on sedimentary metal, strong reductive agent, be used for the intercalating agent of metal ion and prevent the stable compound that solution decomposes.For the purposes of the present invention, we use two kinds of baths of being made by Enthone-OMI.The bath of first kind of coprecipitated nickel hydroxide: Enplate Ni426 is phosphorous hardly.The deposition of copper is carried out in second kind of bath: Enplate Cu872.

For all non-conductive materials such as polymkeric substance, need by grafting can catalyzed reaction precious metal such as palladium produce nucleation site in the above, make the surface become catalytic activity.Here, we use palladium, because it is with fixed nitrogen has very strong avidity by Cement Composite Treated by Plasma in advance.

We use three kinds of solution to come to the sample metallizing, that is:

-in order to ensure the absorption of catalyzer, contain the PdCl of 0.05g/l to 0.5g/l ₂With 1 to 30cm ³The Palladous chloride of the pure HCl of/l is bathed (flood 0.5 to 5 minute, and followed with water rinse about 30 seconds);

-as reduced bath, we use at the sodium hypophosphite of 50 to 85 ℃ of operations and bathe, the perhaps formaldehyde baths in sodium hydroxide medium, the perhaps bisulfite salt bath in alkaline medium is with the chemical reduction (flooding 1 minute to 10 minutes) of the catalyzer of guaranteeing to be grafted to substrate surface.This step is chosen wantonly, and the stability that industry is bathed is depended in its use.In fact, the Pd that before the metallizing step, carries out with chemical reducing agent ²⁺The reduction of part makes this metallizing begin fast, and produces the second best in quality settling;

-metallizing nickeliferous or mantoquita is bathed (thickness according to desired metal floods the different time).

Exemplarily, for the base material of PBT+30% glass fibre, the electroless plated metal program can be summarized as follows:

-degreasing: Virahol is in conjunction with ultrasonic wave or alkaline defatting agent

-RF plasma body (0.5 second to 10 minutes)

-immersion PdCl ₂In the bath

-rinsing: distilled water

-immerse in hypophosphite or the formaldehyde baths

-immerse in the metallizing bath

-rinsing.

For to the parts degreasing, for example, the plastic connector box placed be with hyperacoustic isopropanol bath, or contain in the bath of alkaline defatting agent of tensio-active agent and sodium hydroxide.

Make the bath that contains hypophosphite and nickel reach 50 to 65 ℃ temperature separately.After nitrogenous functional group being grafted to above the polymkeric substance form the C-N key, its by the adhesion palladium seed crystal to above it and by PdCl ₂Activation.Because palladium has strong avidity to nitrogen, so produced the key of C-N-Pd type, the fixed palladium is in Pd (II) attitude like this.Palladium must be in Pd (0) attitude to show activity.This is by making the grafted base material be exposed to the direct effect (immerse Hypophosporous Acid, 50 salt bath in) of reductive agent, or is exposed to the effect (comprising the bath of hypophosphite) of metallizing bath itself and realization.

Analyze the surface of preparation thus then.In order to characterize the surface on the surface of isolator, particularly polymkeric substance, a kind of possible technology is an x-ray photoelectron spectroscopy: XPS.The advantage of this method is that it can disclose the existence of some chemical bond from the teeth outwards.The another kind of method of inspection such as secondary ion mass spectrometry(SIMS) (SIMS) make it possible to characterize the peak corresponding to the chemical part that exists on material surface.

The wettability of goods uses the Digidrop instrument of being made by GBX Scientific Instruments to measure, and this instrument comprises photographic camera, picture processing and the analytical system relevant with software, allows automatic measurement contact angle.

Bond test is undertaken by removing adhesive tape, is commonly referred to Scotch test (Scotch is the registered trademark of 3M), and employed adhesive tape is the 3M 250 model.This test is included in and makes intersection otch (grid) separately on the metallizing settling.These otch must be enough deeply to arrive base material.Then with adhesive tape securely attached to the surface of cutting.After 3 minutes, tear adhesive tape very apace with single action.Usually, test is finished with 180 ° angle.The cut-away portions of check test coating then.Standardized six grades of classification are used to assess the binding property of settling on base material.

Sequenced next step test is that test is torn in traction.This test in, by for settling from base material draw back must be applied on the settling, measure binding property perpendicular to the drawing force of interface plane.With cyano-acrylate binder the cylinder shape contact block that is manufactured from aluminium is bonded on the coating.Fix base material, with tractor contact block is drawn back, tractor is noted from coating and is drawn back a needed maximum, force of disk.Ratio between this maximum, force and the contact block surface is commonly used to characterize binding property.

Before carrying out traction test, need to wait for 24 hours with at room temperature dry.

The base material of being studied is the parts that use in connection or MID class circuit (molded interconnective element).These parts are for example to scribble for example junctor box of metal level, the conductivity path that described metal level forms is unconnected, can conduct electricity, or constitute solenoid isolation.This metal level is at industry or environmental stress, for example as must neither change under those stress that run in automobile and not separated.The parts of described metallizing must be able to take significant electric stress especially and can not destroy substrate surface.Standing the ability of electric stress measures by thermal shock test.These tests have two classes: classical thermal shocking or cycling hot are impacted.These thermal shockings are used to confirm that settling stands significant heat fluctuation and therefore stand to produce the ability of the surge of temperature rise in conducting metal.By check in the hold facility of the metal deposit on the base material after thermal shocking, can verification sample to the tolerance of surge.

As the part of manufacturing method of electronic elements, in the above must nickel deposited and copper be for example following material with the material that is used for junctor that produces conductive path:

-PBT+30% glass fibre (polybutylene terephthalate), the industrial Pocan that is called;

-LCP (liquid crystalline polymers), the industrial Vectra that is called;

-SPS+30% glass fibre, the industrial Questra that is called;

-PPS polyphenylene sulfide+40% glass fibre (for example RYTON that makes by Chevron Phillips).

Therefore, we have studied following these plasma process parameters each: treatment time, generator power, gas flow and pressure.In order to optimize the parameter of plasma body, we are by measuring the surface that wetting angle and XPS analysis have characterized each sample of handling.

Be filled with the PBT base material of 30% glass fibre

We have studied the influence of treatment time, power, gas flow and gaseous tension.We have also studied the influence of gaseous species: NH ₃Or N ₂And with the mixture of rare gas, be neon in this example.

Each junctor of handling is measured wetting angle.The result of these measurements makes us can be according to the variation of parameter tracking wetting angle of research.

The untreated PBT sample wetting angle numerical value that is filled with 30% glass fibre is 83.6 °.Handling 180 seconds to 240 seconds according to proof is ideal, and reduces about 10 ° of this angle value.

For example, for this base polymer, allow the processing parameter (T1) that metal deposition begins on the sample to be:

-the treatment time: 240 seconds

-gas type: N ₂(95%)+Ne (5%)

-power: 0.2 to 0.3W/cm ²

-flow: 350sccm (ml/min)

-pressure: 25Pa

Second kind of processing (T2) with another kind of gas also allows metal deposition to begin:

-the treatment time: 300 seconds

-gas type: N ₂(90%)+H ₂(10%)

-power: 0.8 to 0.9W/cm ²

-flow: 350sccm (ml/min)

-pressure: 25Pa

In a word, according to the gas (NH that is used to handle ₃Or N ₂), simultaneously also according to employed rare gas, optimized parameters of plasma processing, i.e. the power that discharged of pressure and flow, treatment time and producer.Rare gas promotes disassociation, thereby needs less power.On the other hand, for guaranteeing grafting, use the mixture of nitrogen and hydrogen to need bigger power and longer treatment time.

The XPS analysis of instance element provides the information of polymer surface modification process.For each Cement Composite Treated by Plasma, we analyze two representational junctor samples being made by PBT.Each junctor is dipped into PdCl ₂In the bath 4 minutes, rinsing in water then.Owing to know the avidity of palladium, when we are expected at by XPS analysis sample surperficial, can find the palladium of trace to the nitrogen-containing functional group that was fixed to polymer surfaces in the past.The ratio of the various atoms that the calculation sample surface occurs.We have summed up analytical results in following chart.Given numerical value is corresponding to the percentage ratio of atom.

Sample	????％C	????％O	????％N	????％Pd	????％Cl
						Handle the PBT of T1	????67	????23	????5.8	????3	????1.2
Handle the PBT of T2	????67.9	????23.0	????3.6	????3.2	????0.5

We notice, handle T1 than the more nitrogen of having handled the T2 grafting, but that the level of institute's grafted palladium keeps is identical.

The LCP base material

In subordinate phase, we have carried out identical measurement to another polymkeric substance LCP after different Cement Composite Treated by Plasma.The junctor target of being made by this plastics is to be used for very pyritous application (190 ℃ of non-stop runs with 245 ℃ of welding).We have characterized the surface of the sample of having handled.

We sum up the wetting angle of the different treatment of being carried out.This make we can the evaluation test parameter to the influence of base material wettability.

The wetting angle value of untreated LCP sample is 78.8.After the processing in 15 seconds, wetting angle significantly is reduced to 40.2 °.Since 30 seconds, it is smooth that wetting angle is tending towards, and average wetted angle value is for about 12 °.For the treatment time of being longer than for 240 seconds, polymkeric substance has the trend of variation.

LCP is to handling sensitivity, so need the short time, this does not resemble PBT.

By changing kind, treatment time and the power of flow and pressure parameter, gas, can carry out Cement Composite Treated by Plasma to LCP.

Purpose for example allows the LCP processing parameter (T3) of beginning metal deposition on the viscosity sample of LCP type polymkeric substance to be:

-the treatment time: 20 seconds

-gas type: N ₂(96%)+Ar (4%)

-power: 0.15 to 0.20W/cm ²

-flow: 200sccm (ml/min)

-pressure: 22Pa

Second kind of LCP processing (T4) with another kind of gas also allows metal deposition to begin:

-the treatment time: 35 seconds

-gas type: NH ₃

-power: 0.2 to 0.25W/cm ²

-flow: 50sccm (ml/min)

-pressure: 25Pa

By XPS the surface analysis of these samples is shown, be immersed in ionic palladium bathe in after, the reducing bath that contains formaldehyde in sodium hydroxide medium has produced has the surface that following atom is formed:

Sample	????％C	????％O	????％N	????％Pd	????％Cl
						Handle the LCP of T3	????66.5	????21.7	????7.2	????3.4	????1.2
Handle the LCP of T4	????67.1	????22.4	????6.7	????2.9	????0.9

T4 handles than less nitrogen of T3 grafting and less palladium, but it is enough to cause the metal deposition that bounding force is arranged on the junctor of being made by LCP.

Optimizing plasma parameter so that after condition of surface can be modified, the base material of importantly confirming described modification is particularly come metallizing by electroless nickel plating by correctly with in mode repeatably.During beginning, we use the nickel of being made by Enthone to bathe.In order to bathe the metallizing of optimizing base material with this, we have carried out some researchs in advance.The purpose of these researchs is all even repeatably metallizings that obtain the modification base material.For this reason, we have studied following influence:

The composition (ratio of different components, initial soln and the pH between depositional stage) that-Enthone bathes.

The cleaning of-base material.

The treatment time of-described method different steps.

After these researchs, we use Scotch tape test, tensile test and thermal shock test then, several samples of Cement Composite Treated by Plasma under the previous operational condition of describing (T1 to T4) have been carried out the quantitative and qualitative test of metal and substrate adherence.

Thus, we have used two kinds of Enthone metallizings of different compositions to bathe, and that is to say, mix with solution A, the B of different ratios.

	Plastics are bathed	Standard is bathed
			Solution A	??50cm 3/l	??100cm 3/l
Solution B	??50cm 3/l	??100cm 3/l
			Distilled water	??900cm 3/l	??800cm 3/l

To the bath of each type, we have prepared to have the solution of different pH:

	Plastics are bathed	Standard is bathed
			??pH	????5.4	????5.4
????6.2	????6.0
		????6.4		????6.2

Visually, all samples have all been plated metal equably on its whole surface, do not occur bubbling.

Standard bath raio plastics are moulded the higher sedimentation velocity of permission.PH has significant effects to sedimentation velocity: when pH in standard is bathed when 5.4 are increased to 6.2, sedimentation velocity increases by 20%.Along with pH increases, sedimentation velocity also increases.If pH is increased to the numerical value greater than 8, the nearly metal deposit of 20 μ m of deposition can be less than in 1 hour so.Sedimental binding property is still very good, does not significantly bubble.Tested several industry and bathed, for example the Europlate Ni 810 that is made by MacDermid-FRAPPAZ comprises higher phosphorus content than Enthone model, and thereby has a better erosion resistance.Obtained similar result.

In order further to improve described method, tested the method for other several cleaning sample surfaces:

-pass through at O ₂What plasma body was handled down peels off;

-alkali cleaning in concentrated NaOH solution then with acid solution neutralization (immersing in the acetum), is used water rinse then;

-classical clean and be dipped in the super body ripple bath with Virahol.

For relatively they are to the effect of PBT and LCP, we have carried out described 3 kinds of cleanings abreast.

Adopt the resulting sedimental quality of different surface treatments not show evident difference.

The bottoming (priming) that is used for not having the electrobath metallizing is an optional step of the present invention.Can give described bath bottoming (prime), so that the metallizing of treated base material can begin in solution.

According to some test, be impregnated into not several samples in the bath of bottoming not by metallizing rightly, in some cases, the zone that accounts for the either large or small size of sample surfaces 90% shows there is not nickel.Chemical nickel bath or chemical copper to all tests are bathed this problem of all having noticed.First solution of this problem is that the nickel plate that will newly peel off in HCl solution immerses in the described solution.With this understanding, the existence of big catalytic surface can begin oxidation-reduction reaction in the described bath, because the suitable Eo+ that reacts is automatically adjusted in described bath.It obtains proof by discharge hydrogen on substrate surface.Produced the repeatability of uniform sample metallizing and 100% for the bath bottoming metallizing that the back is carried out.

For the electroless plated metal method, the dipping time in various baths has obtained confirmation to the importance of sediment quality.

By the test of different dipping time in hypophosphite and formaldehyde, we have confirmed the influence of this processing to the nickel deposition time opening.The characteristic that is noted that polymkeric substance is a The key factor in the final metallizing of base material.

-for LCP, minimum dipping time was 20 seconds, then the metal of base material plating is inhomogeneous to adopt the shorter time;

-for PBT, minimum dipping time was 60 seconds, then the metal of some samples plating is relatively poor to adopt the shorter time.

By the time of time limitation between these two different times with metallizing, and may select combinedly with other, this constraint also can be used to the selectivity metallizing of two-component articles.

Fig. 1 has shown the differentiation of the bimodal energy position of the 3d spin of palladium according to PBT connector component dipping time in the Hypophosporous Acid, 50 salt bath, on described connector component chemisorption Pd ²⁺Ion.In the zero-time, palladium is with Pd ²⁺Exist, the energy position at Pd 3d 5/2 peak is at 337.9eV.Along with at H ₂PO ₂ ^-The increase of middle dipping time, the energy position at this peak is shifted to more weak bound energy, and it is corresponding to Pd ²⁺Be reduced to metal Pd (0).The energy position of the peak Pd 3d 5/2 of palladium metal is positioned at 335.8eV, at PBT at H ₂PO ₂ ^-Middle dipping reached this value after 15 minutes.Following contrast table has shown for Vectra and PBT at H ₂PO ₂ ^-In different dipping time under the energy position at Pd 3d 5/2 peak.It has proved that base material is to Pd ²⁺The influence of reduction rate, and show that Vectra is more active than PBT, because 3 minutes latter stage, most Pd ²⁺Be reduced into Pd (0), peak maximum transferase 10 .9eV.

If we systematically observe following parameter, our metallizing correctly just so, repeatability is 100%.In a word, bath must be at about 60 ℃, are desirably under 62 ℃ to 63 ℃ the service temperature to use, and bathe preferably must to be felt secure, at PdCl ₂Dipping time in the bath at least 2 minutes; At H ₂PO ₂ ^-Being 20 seconds to LCP in the bath, is 60 seconds to PBT.By selecting for example 40 seconds, this differentiated method also makes it possible to carry out respectively metallizing on the different parts of the same goods of different plastic materials.

We are sedimental bonding at the different enterprising row metals of high temperature plastics base material then.Settling is formed on PBT and LCP, SPS and the PPS, and we carry out surface treatment according to the ideal conditions that above institute determines and describes on described base material:

This treatment process makes it possible to finish electroless nickel plating according to instruction from above.On treated base material, form several settlings one by one, to duplicate the structure of electronic component.Then, we then are the electrochemical deposition things with no method for electrically manufacturing chemistry settling.Described settling is nickel or copper, and these metals are employed metals in the interconnection technique during electronic component is made, because they are good conductors.

Making in this way, the sample of metallizing stands adhesiveness test: Scotch tape test, tensile test and thermal shocking.

The feasible adhesive stress that can relatively on each sample, measure of tensile test and the adhesive stress of industrial standards defined, this standard code is used for connecting, and the minimum adhesive stress of described settling tolerance is 1.2N/mm ²

In order to study the adhesion of metal level on PBT, we have analyzed the influence of employed gaseous species in the Cement Composite Treated by Plasma, are the influence of the thickness of sedimentary chemical nickel in the first layer then, and the influence of copper type layer.

Some examples for the test on connector material, carried out shown below:

The first kind	Second class	The 3rd class
			Electronickelling
Chemical nickel	Electronickelling	Electronickelling
			Chemical copper	Electro-coppering	Electro-coppering
Chemical nickel	Chemical nickel	Chemical nickel
			PBT and NH 3Plasma body	PBT and N 2Plasma body	PBT and NH 3Plasma body

The specimen preparation of the first kind is as follows:

The flash plating of the chemical nickel of-0.3 μ m

The chemical copper settling of-6.5 μ m

The electroless nickel layer of-0.25 μ m (preventing the oxidation of copper)

Second settling of the electrochemistry nickel of-5.2 μ m, final thickness are 12.25 μ m.

The specimen preparation of second class is as follows:

The chemical nickel settling of-0.87 μ m to 4.58 μ m

The electrochemical copper settling of-6 μ m to 9 μ m

Electrochemistry nickel second settling of-5.2 μ m, final thickness are 12 μ m to 16 μ m.

The specimen preparation of the 3rd class is as follows:

The chemical nickel deposition of-0.3 μ m to 4.6 μ m

The electrochemical copper deposition of-6 μ m to 15 μ m

Electrochemistry nickel second settling of-5.2 μ m is to obtain the final thickness of 11 μ m to 20 μ m.

We have carried out tensile test to all samples.

All samples has all obtained satisfied result, the minimum stress that tensile test is accepted greater than the parts of these kinds to all tests of carrying out.

The results are summarized in the following table, second class of the first kind of table 1, table 2 and the 3rd class of table 3 have shown the adhesive stress of overgauge, regardless of the original depth of the nickel that is added and the thickness of the electrochemical copper that is added.The total thickness of maximum has been observed minimum adhesive stress.Effectively, settling is thick more, and internal stress is big more, and the stress that settling is subjected to is big more, and the danger of bonding failure is arranged.

Table 1

The first kind
										Base material	?NH 3Plasma body	Chemical nickel (μ m)	Chemical copper chemical nickel electrochemistry nickel (μ m) (μ m) (μ m)			Total thickness (μ m)	ASTM D5179 adherence test (N/mm 2)	ISO 2409 Scotch test (keeping %)	DIN 53496 thermal shock tests
??PBT	200sccm 25Pa 180W, 90 seconds	??0.3	??6.5	????0.25	????5.2	????12.25	????＞3.1	????100	100% bears
										??LCP	??0.3	??6.5	????0.25	????5.2	????12.25	????＞1.2	????95	100% bears
??SPS		??0.3	??6.5	????0.25	????5.2	????12.25	????＞1.8	????100	100% bears

Table 2

Second class
									Base material	Plasma body N 2+Ne	Chemical nickel (μ m)	Electrochemical copper (μ m)	Electrochemistry nickel (μ m)	Total thickness (μ m)	ASTM D5179 adherence test (N/mm 2)	ISO 2409 Scotch test (keeping %)	DIN 53496 thermal shock tests
??PBT	200sccm 25Pa 180W, 90 seconds	??0.87	????9	????5.2	????15.07	????＞2.6	????100	100% bears
									??PBr	??4.58	????6	????5.2	????15.78	????＞2.4	????100	100% bears
??LCP		??0.87	????9	????5.2	????15.07	????＞1.2	????100	100% bears
									??LCP	??4.58	????6	????5.2	????15.78	????＞1.1	????90	95% bears

Table 3

The 3rd class
									Base material	Plasma body NH 3	Chemical nickel (μ m)	Electrochemical copper (μ m)	Electrochemistry nickel (μ m)	Total thickness (μ m)	ASTM D5179 adherence test (N/mm 2)	ISO 2409 Scotch test (keeping %)	DIN 53496 thermal shock tests
??PBT	200sccm 25Pa 180W, 90 seconds	??0.35	????15	????5.2	????20.55	????＞2.1	????100	100% bears
									??PBT	??1.5	????10	????5.2	????16.7	????＞2.3	????100	100% bears
??PBT		??4.6	????6	????5.2	????15.8	????＞2.45	????100	100% bears
									??SPS	??0.35	????15	????5.2	????20.55	????＞2.05	????100	95% bears
??SPS		??1.5	????10	????5.2	????16.7	????＞1.9	????100	100% bears
									??SPS	??4.57	????6	????5.2	????15.77	????＞1.7	????100	100% bears

To each sample, the original depth of observed nickel is not obvious to the influence of maximum adhesion stress value.The Scotch tape test produces similar positive result with thermal shocking, and this result has confirmed previous result, and confirms that method of the present invention metal attachment area on plastic basis material has produced real grafting.

Similarly, if we consider that the thickness of electrochemical copper is 6 μ m, our original depth of the observing nickel adhesive stress value that do not have the greatest impact so.

We in addition before metallizing, carry out multiple activation circularly, each circulation comprises that goods are exposed to is selected from aforesaid plasma body 60 seconds (or another time), ion 2 minutes (or another time) of dipping is with the grafting palladium, and 3 minutes (or another time) in the immersion Hypophosporous Acid, 50 salt bath.Then, characteristic of looking following operation and material that will metallizing different can obtain different results.

On the other hand, for the element of two parts of producing by molded first plastic material of the second plastic material sandwich, because moldedly again carried out twice, activation back and the influence of preceding waiting time of palladium grafting are considered.In fact, moulding part is at first poured into a mould in a workshop of factory, activates in another workshop of factory, and returns in first workshop molded again.

Within the scope of the invention, studied the influence of before grafting, waiting for that causes owing to this commercial run.Definite, LCP sample complete deactivation after 15 days, PBT sample 50% inactivation, but the SPS sample has successfully plated metal.This activation loss means can make the two material products of full activatory, and for example LCP-SPS waits for 15 days (or another time) then before whole metallizing.According to said method, the SPS parts can be by metallizing optionally.The form of physical construction is enough to non-plated region among the LCP and the plated region among the SPS are separated.

Similarly, the effect that the time of metallizing and stirring metallizing are bathed makes the metallizing effect that difference be arranged, and the contrast of PPS and LCP metallizing time in the blended bath is arranged discloses, and the PPS metallizing needs 120 seconds, and LCP 5 to 10 seconds afterreactions in the metallizing bath.Like this, according to one embodiment of the invention, blended PPS-LCP sample is activated, and immerses in the metallizing bath to be no more than for 15 seconds, and takes out from bathe, so that finally have only LCP by metallizing.Still, physical construction is enough to the zone of the zone of non-metallizing and metallizing is separated, and both need not use the material that provides catalysis load, need not comprise the metallizing precursor again.

Stir under the situation about stopping in the metallizing bath, the metallizing of PPS and LCP is at once.In fact, if stirring velocity greater than 500rpm, stirs so and bathes the metallizing that has hindered PPS.This is because stir oxygen to be introduced in the solution of metallizing.Oxygen has been poisoned the catalysis nuclear on the product surface of being made by plastic material.Excessive oxygen makes the metallizing inactivation of plastics, because palladium poisoning this moment or oxidized.This thing happens for PPS, and this thing happens for the less degree of the LCP that comprises excessive catalytic sites ground.

Yet excessive air can slow down the metallizing of LCP.If use the nitrogen replace oxygen, two goods can plate metal with having no problem so.

It is that the ENPLATE NI 426 that is for example made by Enthone OMI bathes that employed metallizing is bathed.

Like this, except the time length, can be used for promoting the parameter of selectivity metallizing to comprise the temperature of stirring velocity and/or described bath in this case.

The result, by using different high temperature polymer materials, for example conduct is difficult for by the PBT of the material of metallizing or PPS and the SPS or the LCP that are suitable for metallizing, and the present invention can make the goods of molded interconnected device (Molded Interconnect Device) class.The lip-deep form of the article component of these differing materials has been represented zone that does not have metallizing and the zone of having plated metal respectively.

The selectivity parameter of differentiated metallizing is as follows, and wherein some can be used in combination, or uses separately:

The characteristic of-activating plasma,

-the finishing of previous or a plurality of activation cycle in grafting,

-after activation and grafting before waiting time,

The time length in-metallizing stage,

The stirring velocity that-metallizing is bathed,

The temperature that-metallizing is bathed,

The characteristic of-institute metallizing (nickel or copper).

All these parameters can be made amendment with the type of the metallizing of being pursued according to the characteristic of the two-pack high temperature polymer materials that is kept.Also with again molding technique is compatible under the condition identical with the front for these methods, then is metallizing subsequently.

An example of two material products of metallizing is shown schematically among Fig. 2 A, 2B, the 2C: first material 1 that will metallizing is molded in first position, must be molded in again on first material by nonreactive second material 2 for metallizing, be stayed the zone 3 of first material of exposure.This unit is produced the surface with activated positions by nitrogenous plasma-activated then.

Fig. 3 has shown the partial cross section in the selectivity metallizing district with two metal levels 5,6, and wherein in order to carry out the analysis at metal-plastic interface 4, (suppressed) removed in some zone.

After Fig. 4 has shown 200sccm, 20Pa, the 200W of LCP base material, 40 seconds NH3 plasma body metallizing, the total curve of spectrum that is produced by photoelectron spectrum (ESCA or XPS analysis).This total spectrum has shown a plurality of peaks, and peak 8 expressions exist nitrogen moiety, peak 7 and 9 to represent carbon and oxygen part respectively.

With peak 8 is the center, and the curve details among Fig. 5 can characterize three inferior peaks 10,11,12, and this is the reason owing to nitrogenous activating plasma.

Fig. 6 has shown that the energy band with palladium of the curve that obtains by method for plating metal of the present invention is the details at center on the PPS base material.This details has disclosed two peaks 13,14 that belong to palladium usually, has shown corresponding to palladium/representational displacement of the nitrogen key statistical study shown in Fig. 7, that influenced by the inventive method.

Fig. 8 has represented that the plastic material 20 of these parts is by metallizing by the synoptic diagram of the parts of method production of the present invention.This parts 20 can be half shells for example, comprise edge 26, peripheral 27, one or more contact block 28, interior spacer 29, outside surface 30 and internal surface 31.

This shell comprises zone 21,22, the 23a to 23c, 24,25,32 of metallizing, zone 21 forms the part of isolator, zone 24 is access paths of metallizing, zone 23a to 23c is the interior contact block that is connected to isolator 21 by the perforation 22 of metallizing, these inner contact blocks that connect allow to provide touch down point or heat sink contact block, zone 25 forms the extension in zone 21, to produce the connection of outside ground connection.

In order to process this parts, in advance with one or more covering elements as be known in the art cover with materials as PBT molded as described in the zone of not metallizing of shell, as edge 26 and peripheral 27, be placed on then in the plasma-activated device.Because the effect of the inventive method, even the zone that hides all will be activated as perforation, and can introduce the palladium grafting and produce palladium-nitrogen key, be immersed in palladium bathe in the time be formed for the adhesion position of metallizing.

Then described parts are immersed that metallizing is bathed or during a series of metallizing bathes, with the aforesaid metal cladding of the thickness of the insulation function that obtains to be suitable for requiring or conducting function.

In order to reduce the complicacy that hides operation, can produce path 24 then equably to internal surface 31 metallizings, and can contact block 23a to 23c be separated on internal surface 31 at additional laser construction phase.

Thus, can realize described method and the parts that obtain thus with flexible way, with the time that is less than art methods and " high temperature " material that is adapted to hi-tech component industrial use.

Claims (13)

1. method to the goods metallizing made by the high temperature polymer plastic material, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, it is characterized in that metallizing is bathed and is lifted to 50 ℃ to 70 ℃ temperature.

2. the method for claim 1 is characterized in that, described bath is lifted to 55 ℃ to 65 ℃ temperature.

3. the method for plating metal of article of making by the high temperature plastics polymer materials, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, it is characterized in that described plasma etch step is used N ₂Or NH ₃Or N ₂+ H ₂The nitrogenous plasma body of type.

4. any described method among the claim 1-3, it is characterized in that, the gas that is used for plasma body comprises inert rare gas such as neon, helium or argon, and the additional proportion of rare gas element is 0.1 to 6%, to increase nitrogen disassociation the becoming free radical in 7 to 8% the active compound.

5. any described method among the claim 1-4 is characterized in that the plasma-activated time is about 5 seconds to 5 minutes.

6. any described method among the claim 1-5 is characterized in that the power density of plasma body is about 0.1W/cm ²To 1.1W/cm ²

7. any described method among the claim 1-6 is characterized in that, described grafting is to comprise palladium salt, particularly PdCl by described article are immersed ₂In the solion of the chlorate of+HCl, and the palladium ion grafting is realized.

8. any described method among the claim 1-7 is characterized in that described polymkeric substance is PBT, LCP, PPS or SPS.

9. any described method among the claim 1-8, it is characterized in that, finish described dipping metallizing by electrochemistry or electroplating deposition, to produce thick metal cladding, a feature of the product that obtains is, by analyzing polymers/metal interface, find nitrogenous compound therein, the thickness of described metal cladding is 0.2 μ m to 20 μ m.

10. to the method for the goods metallizing made by the high temperature polymer plastic material, comprise the steps: cleaning, plasma etching, grafting and then by be immersed in metallizing bathe in metallizing, it is characterized in that, described goods comprise the parts of being made by different plastic materials, and regulate the operational condition of these steps, make and on of these parts, effectively carry out metallizing, and on other parts, do not carry out metallizing.

11. any described method is characterized in that among the claim 1-10, the operational condition that is conditioned of these steps is at least a in the following condition, and wherein some can be used in combination, or uses separately:

The characteristic of-activating plasma,

-the finishing of previous or a plurality of activation cycle in grafting,

-after activation and grafting before waiting time,

The time length in-metallizing stage,

The stirring velocity that-metallizing is bathed,

The temperature that-metallizing is bathed,

The characteristic of-institute metallizing (nickel or copper).

12. any described method is characterized in that the time length of described action of plasma is less than or equal to 15 seconds among the claim 1-11.

13. any described method is characterized in that among the claim 1-12, it is that copper is bathed that described metallizing is bathed.

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