CN1649181B - Self-supported nitride semiconductor substrate and its production method, and light-emitting nitride semiconductor device using it - Google Patents

Self-supported nitride semiconductor substrate and its production method, and light-emitting nitride semiconductor device using it Download PDF

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CN1649181B
CN1649181B CN2005100048162A CN200510004816A CN1649181B CN 1649181 B CN1649181 B CN 1649181B CN 2005100048162 A CN2005100048162 A CN 2005100048162A CN 200510004816 A CN200510004816 A CN 200510004816A CN 1649181 B CN1649181 B CN 1649181B
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铃木贵征
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Sumitomo Chemical Co Ltd
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Hitachi Cable Ltd
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Abstract

The invention provides a nitride semiconductor free-standing substrate for preparing a luminescent element exhibiting a high luminescent power at a low driving voltage. The nitride semiconductor free-standing substrate, which has a diameter of at least 10 mm and of which the X-ray diffraction half width of at least either of a (20-24) diffraction plane and a (11-24) diffraction plane is 500 sec or less, can be produced by (1) forming a first nitride semiconductor layer with a dislocation density of 10<n>/cm<2> (0<n<=10) on a base substrate, (2) forming a mask layer composed of a material other than a nitride semiconductor on the first nitride semiconductor layer, (3) forming, in the mask layer, an opening section having an opening area of 10<-n>cm<2> or less, penetrating in a membrane thickness direction, and with a density of 10<n-2>/cm<2>, (4) forming a second nitride semiconductor layer with a thickness of 50 mu m or more on the mask layer, and (5) removing the base substrate to the mask layer.

Description

Nitride semiconductor self-supporting substrate and manufacture method thereof and the nitride semiconductor luminescent element that uses it
Technical field
The present invention relates to be used for the nitride semiconductor luminescent element that obtains the nitride semiconductor self-supporting substrate of light-emitting component etc. of high luminous output and manufacture method thereof and use relevant nitride semiconductor self-supporting substrate with low driving voltage.
Background technology
Generally be difficult to make nitride-based semiconductor to carry out the body crystals growth from fused solution, therefore normally behind growing nitride semiconductor layer on the variety classes bottom substrates such as sapphire substrate or GaAs, remove the bottom substrate and only stay the nitride semiconductor base plate that nitride semiconductor layer obtains to support oneself.
Usually the nitride semiconductor layer that is grown on the variety classes bottom substrate of the little coupling of lattice such as sapphire is, nitride semiconductor layer is not epitaxial growth consistently on the lattice of bottom substrate, but producing the nuclei of crystallization at many places point, the nuclear that produces becomes big also the fusion and forms continuous film.Thereby the lattice plane of this nitride semiconductor layer nexus is not parallel fully (is not plane) completely with substrate, and the crystal orientation of nitride-based semiconductor has deviation a little.Generally utilize diffraction half range value in the X-ray diffraction method as the method for estimating the crystal orientation deviation.
The quality of nitride semiconductor base plate was by { 0002} or { the half range value of the X ray swing curve of 0004} diffraction surfaces is estimated, and the little person of half range value is be evaluated as high-quality in the past.For example speciallyying permit and disclose a kind of GaN monocrystalline in No. 3184717, is that the half range total head of secondary crystallization method X ray swing curve is 5～250 seconds, and is that thickness is the GaN monocrystalline more than or equal to 80 μ m as the substrate that is used for growing GaN based semiconductor crystallizing layer.Also have, disclose length and width in Te Kaiping 10-053495 number and all be more than or equal to 10mm and thickness for more than or equal to 300 μ m or length for being nitride single-crystal more than or equal to 10 μ m more than or equal to 20mm and diameter, the half range value of X ray swing curve is smaller or equal to 5 minutes.
Summary of the invention
But, even find that { nitride semiconductor self-supporting substrate of the X-ray diffraction half range value of 0002} asymmetrical diffraction face little (for example smaller or equal to 250 seconds), the glorious degrees of the light-emitting components such as light-emitting diode of Xing Chenging is also low sometimes thereon.That is to say, find to obtain to be used to prepare the nitride semiconductor self-supporting substrate that obtains the light-emitting component of high luminous output with low driving voltage according to determinating reference in the past.
Thereby purpose one of the present invention provides and is used to prepare the nitride semiconductor self-supporting substrate that obtains the light-emitting component of high luminous output with low driving voltage.
Purpose two of the present invention provides the method that can positively make described nitride semiconductor self-supporting substrate.
Purpose three of the present invention provides the light-emitting component that uses described nitride semiconductor self-supporting substrate.
The result that the present inventor concentrates on studies in view of above-mentioned purpose, notice usefulness { 20-24} diffraction surfaces and { the 11-24} diffraction surfaces is { 0002} and { determinating reference of the half range value of the X-ray diffraction swing curve of 0004} asymmetrical diffraction face suits instead, finding to need only wherein any one is smaller or equal to 500 seconds, just can obtain to be used to prepare the nitride semiconductor self-supporting substrate that obtains the light-emitting component of high luminous output with low driving voltage.
That is, being characterized as of nitride semiconductor self-supporting substrate of the present invention, { 20-24} diffraction surfaces and { the X-ray diffraction half range value of at least one of 11-24} diffraction surfaces be to be more than or equal to 10mm smaller or equal to 500 seconds, diameter.In the above-mentioned nitride semiconductor self-supporting substrate, preferred described nitride-based semiconductor is non-doping or n type or p type, and carrier density is smaller or equal to 1 * 10 20Cm -3
The method of the present invention of making above-mentioned nitride semiconductor self-supporting substrate is characterised in that (1) forms has 10 on the bottom substrate nIndividual/cm 2First nitride semiconductor layer of (0＜n≤10) dislocation density, (2) form the mask layer that is made of the material beyond the nitride-based semiconductor on described first nitride semiconductor layer, (3) at described mask layer with smaller or equal to 10 N-2Individual/cm 2Density leave and have smaller or equal to 10 -nCm 2The peristome of perforation film thickness direction of aperture area, (4) after to form thickness on the described mask layer be second nitride semiconductor layer more than or equal to 50 μ m, (5) removed extremely described mask layer of described bottom substrate.The density of opening at the described peristome of described mask layer is preferably smaller or equal to 10 N-4Individual/cm 2
Can use any one of sublimed method, organic metal vapor growth method, hydride vapor growth method, liquid-phase growth method or their combination as the growth method of described nitride-based semiconductor.Also have, described bottom substrate can use the material that is made of the material that is different from the nitride-based semiconductor that constitutes described self-supporting substrate.
Can on described bottom substrate, form described first nitride semiconductor layer when making described nitride semiconductor self-supporting substrate across resilient coating.
Being characterized as of nitride semiconductor luminescent element of the present invention, the epitaxial loayer of the nitride based luminous device structure of formation on above-mentioned nitride semiconductor self-supporting substrate.
Use nitride semiconductor self-supporting substrate of the present invention, light-emitting diode (LED) element of can growing, videodisc (LD) element, photo detector etc. install with the few nitride semiconductor layer of lattice defect, therefore can improve the characteristic of these elements significantly.Thereby the light-emitting component that uses described nitride semiconductor self-supporting substrate to form can obtain high luminous output with low driving voltage.
Description of drawings
Fig. 1 is the cross section structure of the nitride semiconductor layer that forms in order to make nitride semiconductor self-supporting substrate of expression, and has the synoptic diagram of the mask layer of the peristome that connects film thickness direction.
Fig. 2 is the synoptic diagram of the cross section structure of expression nitride semiconductor luminescent element of the present invention.
Fig. 3 is { the X-ray diffraction half range value of 20-24} face and the curve that concerns between the luminous output of the LED element of making on each GaN self-supporting substrate of the GaN self-supporting substrate of expression embodiment 1～7 and comparative example 1,2 acquisitions.
Fig. 4 is { the X-ray diffraction half range value of 11-24} face and the curve that concerns between the luminous output of the LED element of making on each GaNO self-supporting substrate of the GaN self-supporting substrate of expression embodiment 1～7 and comparative example 1,2 acquisitions.
Embodiment
Being characterized as of nitride semiconductor self-supporting substrate of the present invention, { 20-24} diffraction surfaces and { the X-ray diffraction half range value of at least one of 11-24} diffraction surfaces is smaller or equal to 500 seconds.Here, term " self-supporting substrate " is meant and not only can keeps self shape, and has the substrate that does not produce the intensity of unfavorable condition when operation.In order to possess this intensity, the thickness of self-supporting substrate should be more than or equal to 50 μ m, is preferably more than to equal 200 μ m.And consider the easiness etc. of riving behind the formation element, the thickness of self-supporting substrate is preferably smaller or equal to 1mm.If self-supporting substrate is blocked up, then is difficult to rive and produces concavo-convex at splitting surface.Consequently, when for example being suitable for semiconductor laser etc., cause the problem of equipment energy characteristic variation because of reflection loss.
Nitride semiconductor self-supporting substrate of the present invention is, as long as any one method growing nitride semiconductor of the enough sublimed methods of energy, organic metal vapor growth method (MOVPE), hydride vapor growth method (HVPE), liquid-phase growth method or their combination, then can make the manufacturing that ins all sorts of ways, but especially preferably with so-called ELO (Epitaxial Lateral Overgrowth, epitaxial lateral overgrowth) manufactured.The ELO method as shown in Figure 1, on bottom substrate 1, form first nitride semiconductor layer 2, on first nitride semiconductor layer 2, form mask layer 3, leave the peristome 31 of the big or small perforation film thickness direction of a plurality of expectations at mask layer 3 after, after forming second nitride semiconductor layer 4 on the mask layer 3, remove bottom substrate 1 at last to mask layer 3.Describe each operation below in detail.
The bottom substrate 1 that is used for growing nitride semiconductor layer 2,4 can use sapphire, carborundum, silicon, GaAs etc.But by the bottom substrate 1 that these materials constitute be, not high with the lattice constant match of nitride semiconductor layer 2,4, therefore preferably form resilient coating 10 thereon, and epitaxial growth nitride semiconductor layer 2,4 thereon.Can near 500 ℃, pile up GaN layer or AlN layer as resilient coating 10.
First nitride semiconductor layer 2 that on resilient coating, forms preferably undope impurity (non-doping) or n type or p type, and carrier density is smaller or equal to 1 * 10 20Cm -3If carrier density surpasses 1 * 10 20Cm -3, then the excessive concentration of n type or p type impurity causes the nitride semiconductor crystal quality low.
First nitride semiconductor layer 2 can be identical with second nitride semiconductor layer 4 that forms nitride semiconductor self-supporting substrate.These nitride semiconductor layers 2,4 can use any one method of sublimed method, organic metal vapor growth method, hydride vapor growth method, liquid-phase growth method or their combination to form.The thickness of first nitride semiconductor layer 2 is preferably about 0.1～500 μ m.As described below, the dislocation density of first nitride semiconductor layer 2 is 10 nIndividual/cm 2(0＜n≤10).
Be formed on first nitride semiconductor layer 2 mask layer 3 preferably by the refractory metal of anti-growth temperature in nitride-based semiconductor or with SiN, TiN, SiO 2The material bad Deng the liquate of nitride-based semiconductor forms.By growing nitride semiconductor on the bad mask layer 3 of liquate, the peristome 31 that can be suppressed at film thickness direction produces the nuclei of crystallization in addition, reduces the crystal orientation deviation when nuclei of crystallization merge.
Do not do special qualification for the method that peristome 31 is set at mask layer 3, but photoetching process or selective etch method etc. are effective.Shape for peristome 31 is not done special qualification.The aperture area of peristome 31 is preferably smaller or equal to the inverse (10 of the dislocation density of crystallizing layer (first nitride semiconductor layer 2) below it -nCm 2), be more preferably less than and equal 10 -n-2Cm 2Thus, even the dislocation density height of first nitride semiconductor layer 2 (even n is big) also can narrow down by making peristome 31, through peristome 31, made low run through top dislocation numerical control from first nitride semiconductor layer 2.The speed of growth, crystal orientation deviation, the peristome of considering nitride semiconductor crystal nuclear form factors such as difficulty, and the aperture area lower limit of peristome 31 is preferably 10 -10Cm 2About.
Be arranged on the nuclei of crystallization generation density of unit are peristome 31 quantity (density) of mask layer 3 corresponding to the nitride-based semiconductor of growing in the above.Nuclei of crystallization growth is also merged when becoming continuous film, produces new defectives such as dislocation from small crystal orientation deviation easily, and therefore, the density of peristome 31 is preferably as far as possible little.Also have, consider the damaged easness of mask layer 3 etc., the total aperture area of peristome 31 must abundant total aperture area less than mask layer 3.Thereby the density of peristome 31 is preferably smaller or equal to 10 N-2Individual/cm 2, be more preferably less than and equal 10 N-4Individual/cm 2But if the density of peristome 31 is low excessively, slow through the nuclei of crystallization fusion of peristome 31 growths, the thickness that obtains required second nitride semiconductor layer 4 of low-dislocation-density nitride semiconductor layer is with excessive.Thereby the density lower limit of peristome 31 is preferably 10 2Individual/cm 2About.
The thickness of mask layer 3 with this formation is preferably about 0.01～10 μ m.If the thickness deficiency of mask layer 3 0.01 μ m then can't give full play to the effect of ELO method.Also have, if the thickness of mask layer 3 surpasses 10 μ m, it is long then to produce nitride semiconductor crystal nuclear required time above peristome 31.
The composition that is grown in second nitride semiconductor layer 4 above the mask layer 3 can be different from first nitride semiconductor layer 2, and carrier density is preferably smaller or equal to 1 * 10 20Cm -3Scope.If carrier density surpasses 1 * 10 20Cm -3, then the excessive concentration of n type or p type impurity causes the nitride semiconductor self-supporting substrate quality to descend.
Second nitride semiconductor layer 4 can use any one of sublimed method, organic metal vapor growth method, hydride vapor growth method, liquid-phase growth method or their combination.Second nitride semiconductor layer 4 carries out mirror ultrafinish as self-supporting substrate by polishing after removing bottom substrate 1 and mask layer 3, so thickness setting is preferably more than to equal 200 μ m for the thickness after polishing is more than or equal to 50 μ m.And consider the easiness etc. of riving after element forms, preferably make thickness after the polishing for smaller or equal to 1mm.
After forming second nitride semiconductor layer 4, remove bottom substrate 1 and mask layer 3 with grinding, dissolve methods such as (wet etching), dry etching.The two sides of preferred mirror ultrafinish gained nitride semiconductor self-supporting substrate.This is because even the low desirable crystalline substrate of dislocation density is concavo-convex if the surface exists, then epitaxially grown thereon crystallization also can have convex-concave surface, at the device production process, especially can reduce element greatly in photo-mask process and form rate of finished products.
Not doing special qualification for the nitride-based semiconductor that the present invention can use, can be as general formula: In xAl yGa 1-x-yNitride-based semiconductor shown in the N (0≤x, 0≤y, x+y≤1).Also having, also can be the p type GaN of an amount of doped with Mg etc.
Therefore the few nitride semiconductor layer of lattice defect of can growing on nitride semiconductor self-supporting substrate of the present invention can form device epitaxial wafers such as high performance LED, LD, photo detector.Especially the light-emitting components such as LED, LD that use nitride semiconductor self-supporting substrate formation of the present invention are for obtaining high luminous output with low driving voltage.
Further specify the present invention according to following examples, but the present invention is not limited to this.
Reference example 1
Even { the little GaN substrate of X-ray diffraction half range value of 0002} asymmetrical diffraction face, also the glorious degrees for the light-emitting diode (LED) of representing to use it is low, makes the GaN self-supporting substrate of sample 1～9, uses each GaN self-supporting substrate to form LED shown in Figure 2.
The manufacture method of the GaN self-supporting substrate of each sample is as follows.After forming GaN resilient coating and GaN layer on the sapphire substrate of 2 inches diameter, remove sapphire substrate and GaN resilient coating.The two sides of polishing gained GaN substrate, the GaN self-supporting substrate of making thickness 270 μ m.Each sample is changed heating-up temperature etc. creates conditions and forms GaN resilient coating and GaN layer.
The LED structure that is formed on each GaN self-supporting substrate is identical with following embodiment 8.{ the relation between the luminous output of the LED that the X-ray diffraction half range value of 0002} face and each GaN self-supporting substrate of use form of the GaN self-supporting substrate of table 1 expression sample 1～9.Can know from table 1, even { the little GaN self-supporting substrate of X-ray diffraction half range value of 0002} face, using the luminous output of the LED of its formation is not certain height.
Table 1
The sample sequence number { the diffraction half range value (second) of 0002} face Luminous output (mW)
1? 47? 4.0?
2? 48? 6.0?
3? 64? 1.8?
4? 98? 2.4?
5? 138? 2.6?
6? 142? 4.8?
7? 164? 2.0?
8? 248? 1.4?
9? 267? 3.8?
Embodiment 1
In being provided with the quartzy tubulation shape reaction vessel of halogen gas supply pipe and N source supply pipe, the quartz boat that the Ga metal is housed is set in the position of approaching halogen gas supply pipe, in the position of leaving quartz boat and the position of approaching N source supply pipe, the sapphire bottom substrate 1 of the 2 inches diameter vertical with reaction tube is fixedly installed on the support simultaneously.
When the quartz boat that the Ga metal is housed is heated to 900 ℃, sapphire bottom substrate 1 is heated to 510 ℃, in the tubular reactor container, introduces carrier gas hydrogen and HCl gas by the halogen tracheae, supply with carrier gas nitrogen and ammonia by N source supply pipe at this state.HCl gas and Ga reaction generate GaCl.According to GaCl and NH 3Reaction, the resilient coating that on sapphire bottom substrate 1, constitutes by GaN with the growth of 30nm thickness.
The temperature of the bottom substrate 1 that forms resilient coating is risen to 1050 ℃, use the GaCl that generates and ammonia as source gas, with 24 μ m/hr speed growth GaN crystallization in 10 minutes, the first Doped GaN layer 2 not of growth thickness 4 μ m.The dislocation density of the one GaN layer 2 is about 1 * 10 9Individual/cm 2Grow a GaN layer 2 back from tubular reactor container taking-up wafer.On a GaN layer 2, form SiO 2Film as mask layer 3 after, by photoetching process at SiO 2On the film 3 with 1 * 10 7Individual/cm 2Density forms aperture area 0.1 μ m 2Peristome 31.
The gained wafer is fixed on the support in the HVPE device.When the quartz boat that the Ga metal is housed is heated to 900 ℃, wafer is heated to 1050 ℃, introduces carrier gas hydrogen and HCl gas by the halogen tracheae, supply with carrier gas nitrogen and ammonia by N source supply pipe at this state.HCl gas and Ga reaction generate GaCl.According to GaCl and NH 3Reaction is at SiO 2With 3 hours GaN of 100 μ m/hr speed growth, form the 2nd GaN layer 4 of thickness 300 μ m on the film 3.The wafer of Huo Deing has structure as shown in Figure 1 like this.
Take out the wafer that forms the 2nd GaN layer 4 from the tubular reactor container, use diamond abrasive to remove sapphire bottom substrate 1 to SiO by grinding or polishing 2 Film 3, the GaN self-supporting substrate of acquisition thickness 300 μ m.The GaN self-supporting substrate of Huo Deing such as is not all cracking at the crack after the growth and after grinding like this.
Use CuK α 1Produce X ray as x-ray source at 40kV and 45mA, measure { the 20-24} face and { result of the X-ray diffraction half range value of 11-24} face respectively did for oneself 278 seconds and 286 seconds of GaN self-supporting substrate.Thereby the GaN self-supporting substrate that can confirm this embodiment has excellent crystallinity.
Adopt secondary ion mass spectrometry with halogen labeling (SIMS) to confirm that this GaN self-supporting substrate contains and have an appointment 5 * 10 17Cm -3Si impurity, and Mg content is less than detecting lower limit.Infer that Si may be sneaked into by source gas HCl and quartzy tubulose reaction vessel.
Comparative example 1
Except with 2 * 10 20Cm -3Ratio doping Si grows beyond the 2nd GaN layer 4, all the other and the embodiment 1 identical GaN self-supporting substrate of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 550 seconds and 568 seconds, confirmed that crystallinity significantly is worse than the GaN self-supporting substrate of embodiment 1 of GaN.
Comparative example 2
Except with 2 * 10 20Cm -3The ratio doped with Mg is grown beyond the 2nd GaN layer 4, all the other and the embodiment 1 identical GaN self-supporting substrate of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 820 seconds and 845 seconds, confirmed that crystallinity significantly is worse than the GaN self-supporting substrate of embodiment 1 of GaN.
Embodiment 2
Except replace sapphire bottom substrate with GaAs bottom substrate, all the other and the embodiment 1 identical GaN self-supporting substrate of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 322 seconds and 336 seconds, though confirm a little to have comparatively good crystallinity not as embodiment 1 of GaN.
Embodiment 3
The sapphire of 2 inches diameter (C and) bottom substrate 1 is installed in the tubular reactor container of MOVPE device, after in the hydrogen exchange container, rises to 1050 ℃, cleaning bottom substrate 1 in following temperature of bottom substrate 1 of state of circulation hydrogen.Then, the temperature of bottom substrate 1 is dropped to 510 ℃, use hydrogen, use TMG and ammonia, on bottom substrate 1, form the GaN resilient coating of thickness 30nm as source gas as carrier gas.
Substrate temperature is risen to 1050 ℃, use TMG and ammonia,, form the first Doped GaN layer 2 not of thickness 4 μ m with 4 μ m/hr speed growth GaN crystallization in 1 hour as source gas.The dislocation density of the one GaN layer 2 is about 1 * 10 8Individual/cm 2
After forming a GaN layer, take out wafer, on a GaN layer 2, form SiO from the tubular reactor container 2Film, by photoetching process with 1 * 10 6Individual/cm 2Density forms aperture area 1 μ m 2Peristome.
The gained wafer HVPE device of packing into, be fixed on the support.When the quartz boat that the Ga metal is housed is heated to 900 ℃, wafer is heated to 1050 ℃, introduces carrier gas hydrogen and HCl gas by the halogen tracheae, supply with carrier gas nitrogen and ammonia from N source supply pipe near sapphire bottom substrate 1 at this state.HCl gas and Ga reaction generate GaCl.According to GaCl and NH 3Reaction with 100 μ m/hr speed growth GaN crystallization in 3 hours, forms the 2nd GaN layer 4 of thickness 300 μ m.
Identical with embodiment 1, remove sapphire bottom substrate 1 to SiO by grinding or polishing 2 Film 3, the GaN self-supporting substrate of acquisition thickness 300 μ m.Measure { the 20-24} face and { result of the X-ray diffraction half range value of 11-24} face respectively did for oneself 120 seconds and 136 seconds of this GaN self-supporting substrate.Affirmation can obtain the GaN self-supporting substrate of crystallinity excellence.
Embodiment 4
Except replacing SiO with the TiN film 2Film is grown beyond the 2nd GaN layer 4, all the other and the embodiment 3 identical GaN self-supporting substrates of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 102 seconds and 104 seconds, and affirmation can obtain good crystallinity in the GaN of embodiment 3 self-supporting substrate of this GaN self-supporting substrate.
Embodiment 5
Except replacing SiO with the Mo film 2Film is grown beyond the 2nd GaN layer 4, all the other and the embodiment 3 identical GaN self-supporting substrates of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 203 seconds and 211 seconds, and affirmation can obtain good crystallinity in the GaN of embodiment 1 self-supporting substrate of this GaN self-supporting substrate.
Embodiment 6
In being provided with the quartzy tubulation shape reaction vessel of halogen gas supply pipe and N source supply pipe, the quartz boat that the Ga metal is housed is set in the position of approaching halogen gas supply pipe, in the position of leaving quartz boat and the position of approaching N source supply pipe, the sapphire bottom substrate 1 of the 2 inches diameter vertical with reaction tube is fixedly installed on the support simultaneously.
When the quartz boat that the Ga metal is housed is heated to 900 ℃, sapphire bottom substrate 1 is heated to 510 ℃, in reaction vessel, introduces carrier gas hydrogen and HCl gas by the halogen tracheae, supply with carrier gas nitrogen and ammonia by N source supply pipe at this state.HCl gas and Ga reaction generate GaCl.According to GaCl and NH 3Reaction, the resilient coating that on sapphire bottom substrate 1, constitutes by GaN with the growth of 30nm thickness.
The temperature of the bottom substrate 1 that forms resilient coating is risen to 1050 ℃, use the GaCl that generates and ammonia as source gas, with 100 μ m/hr speed growth GaN crystallization in 2 hours, the first Doped GaN layer 2 not of growth thickness 200 μ m.The dislocation density of the one GaN layer 2 is about 1 * 10 6Individual/cm 2
Grow a GaN layer 2 back from answering container taking-up wafer.On a GaN layer 2, form SiO 2Behind the film, by photoetching process at SiO 2On the film 3 with 1 * 10 4Individual/cm 2Density forms aperture area 10 μ m 2 Peristome 31.
The gained wafer is fixed on the support in the HVPE device.When the quartz boat that the Ga metal is housed is heated to 900 ℃, wafer is heated to 1050 ℃, introduces carrier gas hydrogen and HCl gas by the halogen tracheae, supply with carrier gas nitrogen and ammonia by N source supply pipe at this state.HCl gas and Ga reaction generate GaCl.According to GaCl and NH 3Reaction is at SiO 2With 3 hours GaN of 100 μ m/hr speed growth, form the 2nd GaN layer 4 of thickness 300 μ m on the film 3.
Identical with embodiment 1, remove sapphire bottom substrate 1 to SiO by grinding or polishing 2 Film 3, the GaN self-supporting substrate of acquisition thickness 300 μ m.Measure { the 20-24} face and { result of the X-ray diffraction half range value of 11-24} face respectively did for oneself 50 seconds and 67 seconds of this GaN self-supporting substrate.Affirmation can obtain the GaN self-supporting substrate of crystallinity excellence.
Embodiment 7
Except SiO 2The density of the peristome 31 of film 3 is from 1 * 10 4Individual/cm 2Become 1 * 10 3Individual/cm 2Form beyond the 2nd GaN layer 4 all the other and the embodiment 6 identical GaN self-supporting substrates of making.{ the 20-24} face and { the X-ray diffraction half range value of 11-24} face was respectively done for oneself 26 seconds and 32 seconds of this GaN self-supporting substrate.Affirmation can obtain the GaN self-supporting substrate of crystallinity excellence.
{ 20-24} face and { measurement result of the X-ray diffraction half range value of 11-24} face is shown in table 2 with GaN self-supporting substrate in embodiment 1～7 and the comparative example 1,2.
Table 2
Embodiment 8
As shown in Figure 2, on each GaN self-supporting substrate 101 of embodiment 1～7 and comparative example 1,2 acquisitions, form the epitaxial loayer of nitride based luminous device structure, make the LED element by organic metal vapor phase growth (MOCVD) method.The organic metal raw material can use trimethyl gallium (TMG), trimethyl aluminium (TMA), trimethyl indium (TMI), two luxuriant magnesium (Cp 2Mg).Source gas uses ammonia (NH 3), silane (SiH 4).Hydrogen and nitrogen are used in carrier gas.
At first, on GaN self-supporting substrate 101 at 1050 ℃ of grow dopings 1 * 10 19Cm -3The n-GaN contact layer 102 of the thickness 4 μ m of Si.Then 800 ℃ of growths as active layer, by the In of thickness 3nm separately 0.1 Ga 0.93 layers of quantum well layer 111 that N constitutes and, 4 layers of barrier layer, the 112 mutual laminations that are made of the GaN of thickness 10nm separately constitute and InGaN with multiple quantum well structure (MQW) is an active layer 110.On active layer, form the p-Al of thickness 30nm successively 0.1Ga 0.9The p-GaN contact layer 122 of N coating layer 121 and thickness 200nm.
Take out the wafer that is formed with above-mentioned layer from the MOVPE device, on p-GaN contact layer 122, be provided with and contain in the positive pole 125 of Ni and Au, the negative pole 124 that is made of Ti and Al is set in GaN substrate 101 the insides.At last wafer is cut into the square sheets of 350 μ m, as the LED element.Each LED element sample is fed the 20mA forward current, produce the blue-violet laser of 405nm.Luminous output and the driving voltage of this moment are shown in table 3.
Table 3
Fig. 3 and Fig. 4 represent each sample 1～9 of LED element { 20-24} face and { the X x ray diffraction half range value of 11-24} face and the relation between the luminous output separately.Can know { the 20-24} face and { the X-ray diffraction half range value of 11-24} face is during less than 500 seconds (sample 1～7), the twice of (sample 8,9) when the luminous output of LED element surpasses greater than 500 seconds of GaN self-supporting substrate from Fig. 3 and Fig. 4.And { the 20-24} face and { driving voltage of the X-ray diffraction half range value of 11-24} face LED element during greater than 500 seconds also worsens of GaN self-supporting substrate.

Claims (8)

1. nitride semiconductor self-supporting substrate is characterized in that: { the X-ray diffraction half range value of 20-24} diffraction surfaces is for smaller or equal to 50 seconds, and diameter is more than or equal to 10mm, smaller or equal to 50.8mm.
2. as the nitride semiconductor self-supporting substrate of claim 1 record, it is characterized in that: described nitride-based semiconductor is non-doping or n type or p type.
3. make the method for the nitride semiconductor self-supporting substrate of claim 1 or 2 records, it is characterized in that: (1) forms on the bottom substrate has 10 nIndividual/cm 2First nitride semiconductor layer of dislocation density, wherein, 6≤n≤9, (2) form on described first nitride semiconductor layer by beyond the nitride-based semiconductor and mask layer that constitute with the bad material of described nitride-based semiconductor liquate, (3) at described mask layer with smaller or equal to 10 N-2Individual/cm 2Density leave and have smaller or equal to 10 -nCm 2The peristome of perforation film thickness direction of aperture area, (4) form on the described mask layer thickness more than or equal to 200 μ m, second nitride semiconductor layer smaller or equal to 300 μ m after, (5) remove described bottom substrate to described mask layer.
4. as the manufacture method of the nitride semiconductor self-supporting substrate of claim 3 record, it is characterized in that: the growth method of described nitride-based semiconductor is any one of sublimed method, organic metal vapor growth method, hydride vapor growth method, liquid-phase growth method or their combination.
5. as the manufacture method of claim 3 or 4 nitride semiconductor self-supporting substrates of putting down in writing, it is characterized in that: described bottom substrate is made of the sapphire that is different from the nitride-based semiconductor that constitutes described self-supporting substrate, carborundum, silicon or GaAs material.
6. as the manufacture method of claim 3 or 4 nitride semiconductor self-supporting substrates of putting down in writing, it is characterized in that: on described bottom substrate, form described first nitride semiconductor layer across resilient coating.
7. as the manufacture method of the nitride semiconductor self-supporting substrate of claim 5 record, it is characterized in that: on described bottom substrate, form described first nitride semiconductor layer across resilient coating.
8. a nitride semiconductor luminescent element is characterized in that: the epitaxial loayer that forms nitride based luminous device structure on the nitride semiconductor self-supporting substrate of claim 1 or 2 records.
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