CN1645183A - Raster optical modulator with translational reflective mirror and array thereof - Google Patents
Raster optical modulator with translational reflective mirror and array thereof Download PDFInfo
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- CN1645183A CN1645183A CN 200510020185 CN200510020185A CN1645183A CN 1645183 A CN1645183 A CN 1645183A CN 200510020185 CN200510020185 CN 200510020185 CN 200510020185 A CN200510020185 A CN 200510020185A CN 1645183 A CN1645183 A CN 1645183A
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Abstract
A light modulator consists of base, insulation layer, electrode layer, movable flat plate, fixed grating, and cover. It is featured as locating flat plate in the first plane to concentrate light intensity on zero class of diffraction as on voltage and locating it in the second plane to concentrate light intensity on top class of diffraction by driving it to move vertically with voltage in order to realize various modulation for incoming beam for providing different energy distribution of diffraction light.
Description
Technical field
The present invention relates to a kind of beam modulation device, specifically, the present invention relates to a kind of raster optical modulator with translational reflective mirror and array, it is based on movable flat board and fixed grating and realizes different modulating to light beam, so that different diffraction light energy distributions to be provided, reach the requirement of projection display system.
Background of invention
Prior art discloses the multiple photomodulator based on MEMS technology that can use separately or use with other modulators, and these modulators comprise digital micro-mirror device (DMD) and grating light valve (GLV) etc.
In this class device, be representative with digital micro-mirror device (DMD) and grating light valve (GLV), their commerce is used and has been obtained great success.DMD is up to a million the modulators that deflectable reflection micro mirror constitutes by the manufacturing of MEMS technology.The image of the close clearance order projection of DMD micro mirror produces finer seamless picture, analysis power height.
But the defective of DMD is that its complex multilayered structures causes complex manufacturing process, and yields is low
Grating light valve (GLV) is a kind of typical low-light mechanical system, is used for photoswitch or optical attenuator etc.The GLV device is by diffraction effect light beam to be played the effect of switch or decay, rather than adopts minute surface radiation or Polarization Modulation.To be that structure is a plurality of on silica-based be suspended in suprabasil parallel micro stripline things with this device, and these ribbons have electric coupling, and when a voltage was provided for it, movable ribbon was basad bending, thereby formed good diffraction grating.The light valve array of diffraction grating specifically comprises delegation's aligning parallel to each other, separates, elongated reflection part movably, each movably reflection part all can be parallel and the plane that separates in independently move with respect to the fixation reflex parts.Movably and fixing reflection part so dispose, make corresponding removable and the fixation reflex parts cause light incident thereon to take place to reflect under different states together or (with) diffraction.When side-play amount is λ/4, produce the phase differential of pi/2 via the incident beam of different ribbon reflections, therefore the one-level at diffraction image obtains largest light intensity; The side-play amount difference, the light intensity that obtains in one-level is also different, so just reaches the purpose of beam modulation.
GLV and DMD difference are that it is to utilize the optical grating diffraction principle to realize beam modulation, and its response speed is higher, and circuit is simple, and manufacturing process is simple, the yields height.But the following problem of the same existence of GLV device:
If 1 incident light wave is not accurately to be λ, so so-called black pixel will show certain light tone, and so-called bright pixel can't show light tone completely.Therefore compare relatively poor with notional result based on the getable contrast of demonstration of above-mentioned principle.
2, in the time of must guaranteeing not apply voltage as far as possible, be that device is in OFF state, ribbon is in the same plane, reach the purpose that reflects incident light fully, otherwise,, also will form grating if ribbon is not in the same plane, will produce us and not wish the diffraction light that obtains, reduce device contrast of display degree; And when applying bias voltage, promptly device is in ON state, must guarantee that again the movable ribbon in the pixel all drops to sustained height, and these making precision and technologies to device have all proposed very high requirement.
3, because there are a gap w in structure and process limitations between two bands
g, this gap will influence grating diffration efficient.
4, for to obtain suitable skew and bigger effective diffraction area, the length of ribbon should be about 100 microns, and like this, this device can only be used for linear array, when being used to show, need can't form seamless battle array structure as DMD by mechanical scanning.
Can the existing light modulator technologies of contrast respectively has its relative merits, a kind of photomodulator be arranged, when having above-mentioned photomodulator advantage concurrently, can avoid its shortcoming again, accomplish effective optical area height on the pixel, be easy to integrated battle array, technology is simple, the yields height, and this becomes the original intention of our invention
Summary of the invention:
Problems at the prior art existence, the effective diffraction area that overcomes the shortcoming of DMD complex process and GLV is low, be difficult to be integrated into shortcomings such as face battle array, the object of the present invention is to provide a kind of raster optical modulator with translational reflective mirror and array, enlarge the useful area of device, realize the array structure of photomodulator, obtain the raster optical modulator with translational reflective mirror system, improve the optical diffraction efficient of device, simplify the processing technology of device.
The technical solution adopted for the present invention to solve the technical problems is as follows
What the present invention designed is a kind of raster optical modulator with translational reflective mirror, and modulated incident light beam, photomodulator comprise following building block:
Substrate;
Insulation course that forms on the substrate and electrode layer;
Be positioned at a determining deviation on the electrode layer, by the movable flat board that brace summer supports, movable flat board has reflecting surface, and is driven to do vertically downward by the electrostatic force that the bias voltage that is applied on the brace summer produces and move;
Be used to support the brace summer of movable flat board, this brace summer lower support and is coated with metallic film as positive electrode in substrate, make it with forming movable capacitor plate between the electrode layer.
A fixed grating, this fixed grating cover on the structural unit of above-mentioned parts composition, and fix with substrate, are the movable dull and stereotyped spatial joint clearance that moves between fixed grating and the electrode layer; And
Driving circuit is by electrode outlet line connection electrode layer and brace summer.
If will obtain light modulator arrays, just fixed grating integral body is covered in a plurality of structural units of forming by above-mentioned parts and form on the array, and fix with substrate by being arranged in juxtaposition, promptly form light modulator arrays.
This photomodulator and array thereof can be operated in the switch attitude, when making alive not, promptly in " OFF " attitude, movable dull and stereotyped difference in height with fixed grating is n λ/2, satisfy incident beam and on phase place, differ 2n π, meet and interfere the back light intensity to concentrate on the zero level of diffraction image through the two-beam line that grating and flat reflective obtain; Applying bias voltage V
1After, promptly in " ON " attitude, dull and stereotyped displacement vertically downward is (2n-1) λ/4, and satisfying through incident beam is (2n-1) pi/2 through the phase differential of the fixed grating folded light beam that both reflections obtain with movable flat board, diffraction intensity is almost nil at the zero level place, and obtains largest light intensity at ± 1 grade of place.
This grating light modulator and array thereof also can be operated in the simulation attitude, and the distance of fixed grating and following movable flat board above the control if get n=1, then ought apply voltage range at 0-V
1Between the time, difference in height is linear adjustable between λ/2 to λ/4, the difference of the distance that diffraction intensity can move along with flat board and changing, thereby form different gray-levels; Also can realize different gray-levels by the time that remains on certain duty.
The present invention's benefit analysis compared with prior art is as follows:
1, because the fixed grating among the present invention does not need to participate in mechanical motion, efficiently solves the gap (two gap between the slender beam) that the structure of GLV must exist, improved the optical diffraction efficient of device.
2, the reflection part that participates in mechanical motion adopts flat type, for guaranteeing that flat board is in parastate in downdraw process is easy, and the dull and stereotyped displacement that need move down is very little, its mechanical fatigue, adhesion effect is very little to the influence of structure, therefore can guarantee basically to be in ON state or OFF state following time at device, the constant phase difference of many folded light beams improves the contrast of optical modulation.
3, whole movable flat board is to do whole vertical up-or-down movement by the drive of electrostatic force, has enlarged effective diffraction area of device, has reduced the gap between the pixel, can realize the face battle array structure of light valve, obtains face battle array grating light modulator system.
4, adopt the fixed grating structure, the processing of fixed grating can separate with the processing of movable flat board and other parts, all it doesn't matter for characteristics such as the mechanical response of it and total, natural frequency, only relevant with optical diffraction efficient, therefore can more effectively solve the optical diffraction problem, simplify the processing technology of device.
5, when realizing systems array, do not need all additional grating of each pixel, and only need be after obtaining array structure, utilize encapsulation technology, the fixed grating that processes is fixed in the substrate, and the assurance grating surface meets the demands with the planar surface difference in height and gets final product, and has simplified the structure of device.
6, moving component of the present invention has only movable flat board, and is to be driven by electrostatic force to do vertical up-or-down movement, rather than the hinge of DMD structure drive left and right sides deflection, and its processing technology is simple, the mechanical stability height.
7, the mode of driving treadmill exercise has a lot, can adopt different support beam structures to drive dull and stereotyped moving up and down, like this, different structures can realize the different response speed of treadmill exercise, can be widely used on demonstration, projection, printing, optical communication, the spectrometer to satisfy this photomodulator in different application scenarios.
Description of drawings
Fig. 1 is the structure diagram (only having shown a pixel) of a kind of specific implementation of the raster optical modulator with translational reflective mirror that proposes of the present invention;
Fig. 2 is the sectional view of Fig. 1;
Fig. 3 is the sectional structure chart (only having shown a pixel) of second kind of specific implementation of the raster optical modulator with translational reflective mirror that proposes of the present invention;
Fig. 4 is the synoptic diagram of the raster optical modulator with translational reflective mirror array that proposes of the present invention;
Fig. 5 is a raster optical modulator with translational reflective mirror shown in Figure 1 view in " OFF " attitude;
Fig. 6 is a raster optical modulator with translational reflective mirror shown in Figure 1 view in " ON " attitude;
Fig. 7 is the diffraction efficiency distribution figure of two states;
Embodiment
Referring to Fig. 1, the structure of the single pixel of this raster optical modulator with translational reflective mirror is formed and is comprised fixed grating 1, reflecting surface 2, brace summer 3, insulation course 4 substrates 5, electrode layer 6, movable flat board 7, driving circuit 8.Its production method is as follows: utilize the peroxidating technology oxide of deposit one deck silicon in substrate 5 earlier, form insulation course 4, play insulating effect; The electrode layer of being made up of polycrystalline silicon material 6 is that deposit forms on this oxide; Utilize sacrificial layer technology, make brace summer 3 and movable dull and stereotyped 7; Brace summer 3 is with forming the condenser type pole plate between the electrode layer 6, the optional material of brace summer 3 is a lot, and the present invention adopts the double-deck mode of aluminizing on the silicon nitride, also can adopt the single layer structure of polysilicon as material.Movable dull and stereotyped 7 are made up of the silicon materials of nitrating, have very high rigidity, and are supported by brace summer, are positioned at a determining deviation place on the electrode layer 6, drive to do vertically downward and move by being applied to bias voltage on the electrode layer 6, are coated with AL reflecting surface 2 on the movable flat board 7; Fixed grating 1 surface is coated with the Al reflecting surface equally, utilize encapsulation technology that fixed grating 1 is fixing with substrate 5, form a pixel, if being covered in a plurality of pixel cells of being made up of above-mentioned parts, fixed grating 1 integral body forms by being arranged in juxtaposition on face battle array or the linear array, forming structure as shown in Figure 4, is the movable dull and stereotyped spatial joint clearance that moves between fixed grating and the electrode layer.
Above-mentioned grating light modulator is by the moving up and down of movable flat board, and makes incident beam obtain different light distribution at the diverse location that plays diffraction image behind optical grating diffraction.Referring to Fig. 5, be OFF state, promptly not alive initial state, when making alive not, when movable flat board is in illustrated first plane, movable dull and stereotyped difference in height with fixed grating is n λ/2, satisfies incident beam and differs 2n π through the two-beam line that grating and flat reflective obtain on phase place, meets and interferes the back to concentrate on the zero level of diffraction image in light intensity; Referring to Fig. 6, be ON state, when applying certain bias voltage, the effect of electrostatic force is moved movable flat board vertically downward, when the decline displacement was (2n-1) λ/4, the phase differential of the folded light beam that obtains through both reflections was (2n-1) pi/2, the diffraction intensity that obtains like this, the place is almost nil in zero level, and obtains largest light intensity at ± 1 grade of place.The diffraction efficiency distribution of this two states is referring to Fig. 7.
Movable dull and stereotyped 2 realize moving vertically have a lot of prior aries to realize, are example with a pixel, and Fig. 2 and Fig. 3 have provided wherein two kinds.Fig. 3 be movable dull and stereotyped 7 center fixation on brace summer 3, brace summer has four; Fig. 3 is that movable four angles of dull and stereotyped 7 are connected with brace summer 3.No matter be which kind of mode, brace summer or electrode layer are being applied under certain voltage condition that brace summer is through electric coupling, brace summer is driven by electric field force all can and be bent downwardly, and moves vertically downward thereby drive movable flat board.
Bias voltage applying device 8 adopts this area existing mature technology, adopts driven more.According to different array requests, adopt active driving or passive drive mode.The electrode outlet line of driving circuit can obtain when making this structure simultaneously.
Invention has been described more than to adopt embodiment.Those have only those skilled in the art to read just become after the disclosure file open-and-shut improvement and modification, still belong to the application's spirit and category.
Claims (4)
1, raster optical modulator with translational reflective mirror is characterized in that photomodulator includes:
The a substrate;
Insulation course that forms on the b substrate and electrode layer;
C is positioned at a determining deviation on the electrode layer, by the movable flat board that brace summer supports, movable flat board has reflecting surface, and drives to do vertically and move by being applied to bias voltage on brace summer or the electrode layer;
D is used to support the brace summer of movable flat board, and this brace summer lower support and is coated with metallic film in substrate, have electric coupling, makes it with forming movable capacitor plate between the electrode layer.
Fixed grating of e, this fixed grating cover on the structural unit of above-mentioned parts composition, and fix with substrate, are the movable dull and stereotyped spatial joint clearance that moves between fixed grating and the electrode layer.
The f driving circuit is by electrode outlet line connection electrode layer and brace summer.Can produce the driving voltage of varying level, different frequency.
2, raster optical modulator with translational reflective mirror according to claim 1 is characterized in that: brace summer is positioned under the movable flat board, or is positioned at the outside, movable dull and stereotyped four limits, and with its parallel arrangement in same plane.
3, a kind of raster optical modulator with translational reflective mirror array, it is characterized in that: use the described photomodulator structural unit of a plurality of claims 1 to be arranged in array by row and column, the movable flat board of adjacent structure unit is arranged on the line alternately, fixed grating integral body covers in a plurality of structural units and forms on the array, and fix with substrate, form light modulator arrays, each photomodulator can independently apply bias voltage, spacing of reflecting surface is all adjustable separately about it, obtains the different diffraction effect.
4, according to claim 1,2 or 3 described raster optical modulator with translational reflective mirror and arrays, it is characterized in that: when making alive not, movable dull and stereotyped difference in height with fixed grating is n λ/2, satisfy incident beam and on phase place, differ 2n π, meet and interfere the back to concentrate on the zero level of diffraction image in light intensity through fixed grating and the two-beam line that movable flat reflective obtains; After applying bias voltage, dull and stereotyped displacement vertically downward is (2n-1) λ/4 o'clock, satisfying through incident beam is (2n-1) pi/2 through the phase differential of the fixed grating folded light beam that both reflections obtain with movable flat board, and diffraction intensity is almost nil at the zero level place, and obtains largest light intensity at ± 1 grade of place.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100201853A CN100349035C (en) | 2005-01-13 | 2005-01-13 | Raster optical modulator with translational reflective mirror and array thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100201853A CN100349035C (en) | 2005-01-13 | 2005-01-13 | Raster optical modulator with translational reflective mirror and array thereof |
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| CN1645183A true CN1645183A (en) | 2005-07-27 |
| CN100349035C CN100349035C (en) | 2007-11-14 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175322A (en) * | 2011-01-31 | 2011-09-07 | 重庆大学 | Imaging spectrometer based on grating translational light modulator |
| CN102323669A (en) * | 2011-09-29 | 2012-01-18 | 上海丽恒光微电子科技有限公司 | MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof |
| CN102360119A (en) * | 2011-09-29 | 2012-02-22 | 上海丽恒光微电子科技有限公司 | Light modulator pixel unit and manufacturing method thereof |
| WO2012031467A1 (en) * | 2010-09-07 | 2012-03-15 | 上海丽恒光微电子科技有限公司 | Light modulator pixel unit and manufacturing method thereof |
| CN102686508A (en) * | 2010-01-04 | 2012-09-19 | 上海丽恒光微电子科技有限公司 | A tri wavelength diffraction modulator and a method for modulation |
| CN114370830A (en) * | 2022-03-01 | 2022-04-19 | 东莞锐视光电科技有限公司 | Adjustable stripe light source system |
| CN115826225A (en) * | 2022-11-22 | 2023-03-21 | 西北工业大学 | MEMS grating modulator and preparation method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2072690U (en) * | 1990-06-02 | 1991-03-06 | 南京大学 | Dynamic grating diffraction instrument |
| US5920418A (en) * | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
-
2005
- 2005-01-13 CN CNB2005100201853A patent/CN100349035C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102686508A (en) * | 2010-01-04 | 2012-09-19 | 上海丽恒光微电子科技有限公司 | A tri wavelength diffraction modulator and a method for modulation |
| US8854720B2 (en) | 2010-01-04 | 2014-10-07 | Shanghai Lexvu Opto Microelectronics Technology Co., Ltd. | Tri wavelength diffraction modulator and a method for modulation |
| CN102686508B (en) * | 2010-01-04 | 2014-04-16 | 上海丽恒光微电子科技有限公司 | A tri wavelength diffraction modulator and a method for modulation |
| WO2012031467A1 (en) * | 2010-09-07 | 2012-03-15 | 上海丽恒光微电子科技有限公司 | Light modulator pixel unit and manufacturing method thereof |
| CN102401994A (en) * | 2010-09-07 | 2012-04-04 | 上海丽恒光微电子科技有限公司 | Optical modulator pixel unit and manufacturing method thereof |
| CN102401994B (en) * | 2010-09-07 | 2013-11-20 | 上海丽恒光微电子科技有限公司 | Optical modulator pixel unit and manufacturing method thereof |
| CN102175322A (en) * | 2011-01-31 | 2011-09-07 | 重庆大学 | Imaging spectrometer based on grating translational light modulator |
| CN102175322B (en) * | 2011-01-31 | 2012-09-26 | 重庆大学 | Imaging spectrometer based on grating translational light modulator |
| CN102360119A (en) * | 2011-09-29 | 2012-02-22 | 上海丽恒光微电子科技有限公司 | Light modulator pixel unit and manufacturing method thereof |
| CN102323669A (en) * | 2011-09-29 | 2012-01-18 | 上海丽恒光微电子科技有限公司 | MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof |
| CN102323669B (en) * | 2011-09-29 | 2014-12-31 | 上海丽恒光微电子科技有限公司 | MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof |
| CN114370830A (en) * | 2022-03-01 | 2022-04-19 | 东莞锐视光电科技有限公司 | Adjustable stripe light source system |
| CN115826225A (en) * | 2022-11-22 | 2023-03-21 | 西北工业大学 | MEMS grating modulator and preparation method |
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