JP4358788B2

JP4358788B2 - Optical scanner

Info

Publication number: JP4358788B2
Application number: JP2005168216A
Authority: JP
Inventors: 良文高橋
Original assignee: Anritsu Corp
Current assignee: Anritsu Corp
Priority date: 2005-06-08
Filing date: 2005-06-08
Publication date: 2009-11-04
Anticipated expiration: 2025-06-08
Also published as: JP2006343482A

Description

本発明は、反射板に歪みを発生することなく、その回動範囲を大きするための技術に関する。 The present invention relates to a technique for enlarging a rotation range of a reflector without generating distortion.

例えば可変波長光源や光フィルタ等の光学装置では、光の出射方向を連続的に可変するための光スキャナが用いられている。 For example, in an optical device such as a variable wavelength light source or an optical filter, an optical scanner for continuously changing the light emission direction is used.

光スキャナは、ミラーの角度を可変して入射光に対して出射光の角度を連続的に可変するものであり、小型で精密性が要求される場合、半導体製造に用いる基板に対するエッチング処理により精密に且つ小型に形成した、所謂ＭＥＭＳ（Micro Electro Mechanical Systems）構造のものが用いられている。 Optical scanners are designed to change the angle of the mirror and continuously change the angle of the outgoing light with respect to the incident light. When small size and precision are required, precision is achieved by etching the substrate used in semiconductor manufacturing. In addition, a so-called MEMS (Micro Electro Mechanical Systems) structure formed in a small size is used.

図１６は、ＭＥＭＳ技術で構成された光スキャナ１の基本的な構造を示すものである。
この光スキャナ１は、矩形枠状の固定部２の内側に、捩れ変形自在な軸部３、４を介して反射板５を回動自在に支持しており、電界や磁界による力Ｆ、Ｆ′を反射板５の両端に交互に付与し、反射板５を往復回動させる。 FIG. 16 shows a basic structure of the optical scanner 1 configured by the MEMS technology.
This optical scanner 1 supports a reflecting plate 5 rotatably inside a rectangular frame-shaped fixed portion 2 via torsionally deformable shaft portions 3 and 4, and forces F and F due to electric and magnetic fields. 'Is alternately applied to both ends of the reflecting plate 5 to rotate the reflecting plate 5 back and forth.

このような基本構造の光スキャナ１では、半導体基板に対するエッチング処理により薄型で小型に形成されているため、高速動作が可能となる。 Since the optical scanner 1 having such a basic structure is formed thin and small by etching the semiconductor substrate, it can operate at high speed.

ところが、上記のように薄型に形成された光スキャナ１の反射板５に対して直接力を加えると、反射板５自体に歪みが発生し、所望の反射特性が得られない場合がある。 However, when a force is directly applied to the reflection plate 5 of the optical scanner 1 formed thin as described above, the reflection plate 5 itself may be distorted, and desired reflection characteristics may not be obtained.

これを解決する技術として、反射板５に直接力を加えずに、軸部３、４に対して捩れ方向に力を与えることで、反射板５を間接的に回動駆動する方法が知られている。 As a technique for solving this, there is known a method of indirectly rotating and driving the reflecting plate 5 by applying a force in a twisting direction to the shaft portions 3 and 4 without directly applying a force to the reflecting plate 5. ing.

図１７に示す光スキャナ１０は、上記間接駆動型の一例であり、矩形平板状の支持板１１の一面側両端にピエゾ素子１２、１３をそれぞれ設け、各ピエゾ素子１２、１３上に、可動板１４、１５をそれぞれ支持している。 An optical scanner 10 shown in FIG. 17 is an example of the indirect drive type, and is provided with piezo elements 12 and 13 at both ends of one side of a rectangular flat plate-like support plate 11, and a movable plate on each piezo element 12 and 13. 14 and 15 are supported.

各可動板１４、１５は、外形コの字状で左右対称に形成され、基部１４ａ、１５ａと、基部の両端から平行に延びた腕部１４ｂ、１４ｃ、１５ｂ、１５ｃとを有し、互いの腕部の先端同士を近接させた状態で各ピエゾ素子１２、１３にそれぞれ支持されており、駆動信号に対するピエゾ素子１２、１３の厚さ方向の変形により、前後方向（支持板１１の厚さ方向）に往復移動する。 Each of the movable plates 14 and 15 has a U-shaped outer shape and is symmetrically formed. The movable plates 14 and 15 have base portions 14a and 15a and arm portions 14b, 14c, 15b and 15c extending in parallel from both ends of the base portion. The arm portions are supported by the piezo elements 12 and 13 with their tips close to each other, and are deformed in the thickness direction of the piezo elements 12 and 13 with respect to the driving signal, so that the longitudinal direction (thickness direction of the support plate 11) ).

可動板１４、１５の内側中央には矩形状の反射板１６が第１軸１７および第２軸１８を介して支持されている。 A rectangular reflecting plate 16 is supported at the inner center of the movable plates 14 and 15 via a first shaft 17 and a second shaft 18.

第１軸１７は、反射板１６の上縁中央から上方に直線状に延びて左右に分岐し、その一方が可動板１４の腕部１４ｂの先端に連結され、他方が可動板１５の腕部１５ｂの先端に連結されている。また、第２軸１８は、反射板１６の下縁中央から下方に直線状に延びて左右に分岐し、その一方が可動板１４の腕部１４ｃの先端に連結され、他方が可動板１５の腕部１５ｃの先端に連結されている。 The first shaft 17 linearly extends upward from the center of the upper edge of the reflecting plate 16 and branches left and right, one of which is connected to the tip of the arm portion 14 b of the movable plate 14 and the other is the arm portion of the movable plate 15. It is connected to the tip of 15b. The second shaft 18 linearly extends downward from the center of the lower edge of the reflecting plate 16 and branches to the left and right. One of the second shafts 18 is connected to the tip of the arm portion 14 c of the movable plate 14, and the other is the movable plate 15. It is connected to the tip of the arm portion 15c.

この構造の光スキャナ１０では、例えば可動板１４が支持板１１側に移動すると、第１軸１７および第２軸１８が上方からみて時計回りに捩れ、反射板１６が時計回りに回動し、逆に、可動板１５が支持板１１側に移動すると、第１軸１７および第２軸１８が上方からみて反時計回りに捩れ、反射板１６が反時計回りに回動することになる。 In the optical scanner 10 having this structure, for example, when the movable plate 14 moves to the support plate 11 side, the first shaft 17 and the second shaft 18 are twisted clockwise as viewed from above, and the reflecting plate 16 is rotated clockwise, Conversely, when the movable plate 15 moves to the support plate 11 side, the first shaft 17 and the second shaft 18 are twisted counterclockwise as viewed from above, and the reflecting plate 16 rotates counterclockwise.

したがって、可動板１４、１５が交互に同一方向に移動するようにピエゾ素子１２、１３を駆動することで、反射板１６を往復回動させることができる。 Therefore, the reflecting plate 16 can be reciprocally rotated by driving the piezo elements 12 and 13 so that the movable plates 14 and 15 alternately move in the same direction.

なお、上記構造の光スキャナは例えば次の特許文献１に開示されている。 An optical scanner having the above structure is disclosed in, for example, the following Patent Document 1.

特開２００１−２６７４６７６号公報JP 2001-267476 A

しかしながら、上記構造の光スキャナ１０のように、ピエゾ素子１２、１３により、可動板１４、１５を支持板１１に対して接近、離間するように移動させ、反射板１６を回動させる構造では、反射板１６に大きな振幅を与えることが困難であり、反射板１６を広い角度範囲に回動させることができないという問題があった。また、２つの可動板１４、１５をそれぞれピエゾ素子１２、１３で支持する構造であるため、光スキャナ全体を薄く形成できないという別の問題もあった。 However, in the structure in which the movable plates 14 and 15 are moved toward and away from the support plate 11 by the piezo elements 12 and 13 and the reflection plate 16 is rotated, as in the optical scanner 10 having the above structure, There is a problem that it is difficult to give a large amplitude to the reflecting plate 16, and the reflecting plate 16 cannot be rotated in a wide angle range. In addition, since the two movable plates 14 and 15 are supported by the piezoelectric elements 12 and 13, respectively, there is another problem that the entire optical scanner cannot be formed thin.

本発明は、この問題を解決し、反射板を広い角度範囲に回動でき、また、薄く形成できる光スキャナを提供することを目的としている。 An object of the present invention is to solve this problem, and to provide an optical scanner that can rotate a reflector in a wide angle range and can be formed thin.

前記目的を達成するために、本発明の請求項１の光スキャナは、
枠板状に形成された固定部（２１）と、
基部（２５ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（２５ｂ、２５ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央側に向けた状態で前記枠内の一端側に配置された第１駆動板（２５）と、
前記第１駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第１駆動軸（２６）と、
前記第１駆動板の他方の腕部の外縁から前記第１駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第１駆動軸とともに前記固定部の枠内で前記第１駆動板を回動自在に支持する第２駆動軸（２７）と、
基部（３０ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（３０ｂ、３０ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央部に向けた状態で前記枠内の他端側に配置された第２駆動板（３０）と、
前記第２駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第３駆動軸（３１）と、
前記第２駆動板の他方の腕部の外縁から前記第３駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第３駆動軸とともに前記固定部の枠内で前記第２駆動板を回動自在に支持する第４駆動軸（３２）と、
前記固定部の枠内で且つ前記第１駆動板および第２駆動板とで囲まれた領域のほぼ中央に配置され、光を反射するための反射面が少なくとも一面側に形成された反射板（３５）と、
前記反射板の外縁から前記第１駆動板の一方の腕部の先端と前記第２駆動板の一方の腕部の先端との間に向かって直線状に延びその長さ方向に捩れ変形可能な第１直線部（３６ａ）、該第１直線部から分岐して前記第１駆動板の一方の腕部の先端との間を連結する第１連結部（３６ｂ）および前記第１直線部から分岐して前記第２駆動板の一方の腕部の先端との間を連結する第２連結部（３６ｃ）とを有する第１反射板軸（３６）と、
前記反射板の前記第１反射板軸の直線部が設けられている位置と反対側の外縁から前記第１反射板軸の直線部と一直線上に並び且つ前記第１駆動板の他方の腕部の先端と前記第２駆動板の他方の腕部の先端との間に向かって直線状に延び、その長さ方向に捩れ変形可能な第２直線部（３７ａ）、該第２直線部から分岐して前記第１駆動板の他方の腕部の先端との間を連結する第３連結部（３７ｂ）および前記第２直線部から分岐して前記第２駆動板の他方の腕部の先端との間を連結する第４連結部（３７ｃ）とを有する第２反射板軸（３７）と、
前記第１駆動板の基部および第２駆動板の基部に力を周期的に付与して前記第１駆動板および第２駆動板を往復回動させ、前記第１反射板軸および第２反射板軸を変形させて、前記反射板を往復回動させる駆動手段（２２、２３、４０）とを備えている。 In order to achieve the object, an optical scanner according to claim 1 of the present invention comprises:
A fixing portion (21) formed in a frame plate shape;
The base portion (25a) and a pair of arm portions (25b, 25c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions are formed into a frame of the fixing portion. A first drive plate (25) disposed on one end side in the frame in a state directed toward the center side inside,
A first drive shaft (26) that connects between an outer edge of one arm portion of the first drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The first drive plate extends from the outer edge of the other arm portion so as to be aligned with the first drive shaft, connects the inner edge of the fixed portion, and is formed to be able to be twisted and deformed in the length direction thereof. A second drive shaft (27) for rotatably supporting the first drive plate within the frame of the fixed portion together with the first drive shaft;
The base portion (30a) and a pair of arm portions (30b, 30c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions is formed into a frame of the fixing portion. A second drive plate (30) disposed on the other end side in the frame in a state of being directed toward the center of the inside,
A third drive shaft (31) that connects between an outer edge of one arm portion of the second drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The second drive plate extends from the outer edge of the other arm of the second drive plate so as to be aligned with the third drive shaft, and is connected to the inner edge of the fixed portion so that it can be twisted and deformed in the length direction. A fourth drive shaft (32) for rotatably supporting the second drive plate within the frame of the fixed portion together with the third drive shaft;
A reflecting plate (disposed in the frame of the fixed portion and at substantially the center of the region surrounded by the first driving plate and the second driving plate) and having a reflecting surface for reflecting light formed on at least one surface side ( 35)
Extending linearly from the outer edge of the reflecting plate to the tip of one arm of the first drive plate and the tip of one arm of the second drive plate, and torsionally deformable in its length direction The first straight portion (36a) branches from the first straight portion, the first connecting portion (36b) that branches from the first straight portion and connects to the tip of one arm of the first drive plate, and the first straight portion. A first reflector shaft (36) having a second connecting portion (36c) for connecting between the tip of one arm portion of the second drive plate;
The other arm of the first drive plate is aligned with the straight portion of the first reflector shaft from the outer edge of the reflector opposite to the position where the linear portion of the first reflector shaft is provided. A second linear portion (37a) that extends linearly between the distal end of the second drive plate and the distal end of the other arm portion of the second drive plate and can be torsionally deformed in the length direction thereof, branches off from the second linear portion A third connecting portion (37b) that connects the tip of the other arm portion of the first drive plate and a tip of the other arm portion of the second drive plate that branches off from the second straight portion. A second reflector shaft (37) having a fourth connecting part (37c) connecting between the two,
A force is periodically applied to the base portion of the first drive plate and the base portion of the second drive plate to reciprocate the first drive plate and the second drive plate, and the first reflector plate shaft and the second reflector plate Drive means (22, 23, 40) for reciprocatingly rotating the reflecting plate by deforming the shaft is provided.

また、本発明の請求項２の光スキャナは、請求項１記載の光スキャナにおいて、
前記駆動手段は、
前記固定部に設けられ、前記第１駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第１電極（２２）と、
前記固定部に設けられ、前記第２駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第２電極（２３）と、
前記第１電極および第２電極に電圧を周期的に与えて前記第１駆動板および第２駆動板を往復回動させる駆動信号発生器（４０）とを含んでいることを特徴としている。 An optical scanner according to claim 2 of the present invention is the optical scanner according to claim 1,
The driving means includes
A first electrode (22) provided on the fixed part and for applying a voltage for generating an electrostatic attractive force between the fixed part and the base of the first drive plate;
A second electrode (23) for applying a voltage for generating an electrostatic attraction between the fixed portion and the base of the second drive plate;
And a drive signal generator (40) that periodically applies a voltage to the first electrode and the second electrode to reciprocately rotate the first drive plate and the second drive plate.

また、本発明の請求項３の光スキャナは、請求項２記載の光スキャナにおいて、
絶縁層（１０１）を第１導電層（１０２）と第２導電層（１０３）とで挟む３層構造の一枚のＳＯＩ基板（１００）に対するエッチング処理により一体的に形成された光スキャナであって、
前記固定部は、前記絶縁層を第１導電層と第２導電層とで挟む３層構造を有し、
前記第１電極および第２電極は、前記ＳＯＩ基板の一方の導電層に対するエッチング処理で形成されたギャップ（２４）により前記固定部から絶縁されて形成されていることを特徴としている。 The optical scanner according to claim 3 of the present invention is the optical scanner according to claim 2,
An optical scanner integrally formed by etching a single-layer SOI substrate (100) having a three-layer structure in which an insulating layer (101) is sandwiched between a first conductive layer (102) and a second conductive layer (103). And
The fixing portion has a three-layer structure in which the insulating layer is sandwiched between a first conductive layer and a second conductive layer,
The first electrode and the second electrode are formed so as to be insulated from the fixed portion by a gap (24) formed by an etching process on one conductive layer of the SOI substrate.

また、本発明の請求項４の光スキャナは、請求項３記載の光スキャナにおいて、
前記第１電極と第２電極は前記ＳＯＩ基板の一方の導電層に形成され、前記第１駆動板と第２駆動板は前記ＳＯＩ基板の他方の導電層に形成されていることを特徴としている。 The optical scanner according to claim 4 of the present invention is the optical scanner according to claim 3,
The first electrode and the second electrode are formed on one conductive layer of the SOI substrate, and the first drive plate and the second drive plate are formed on the other conductive layer of the SOI substrate. .

上記のように、本発明の光スキャナは、固定部の枠内の両端に設けた第１駆動板と第２駆動板とを回動駆動して、その端部と反射板との間を連結している第１反射板軸、第２反射板軸に捩れ方向の力を与えることで反射板を間接的に回動させている。 As described above, in the optical scanner of the present invention, the first drive plate and the second drive plate provided at both ends in the frame of the fixed portion are rotationally driven, and the end portion and the reflection plate are connected. The reflector is indirectly rotated by applying a twisting force to the first reflector axis and the second reflector axis.

このため、第１反射板軸、第２反射板軸に大きな捩れを与えることができ、反射板を歪ませることなく、その回動角を格段に大きくすることができる。 For this reason, a big twist can be given to a 1st reflecting plate axis | shaft and a 2nd reflecting plate axis | shaft, and the rotation angle can be enlarged greatly, without distorting a reflecting plate.

また、絶縁層を第１導電層と第２導電層とで挟む３層構造のＳＯＩ基板により形成された固定部の一方の導電層に対するエッチング処理で形成されたギャップにより、駆動手段を構成する第１電極と第２電極とを固定部から絶縁して形成したものでは、一枚の既成のＳＯＩ基板に対する簡単なエッチング処理により光スキャナ全体を構成することができ、少ない工程および材料で低コストに且つ薄型に製造できる。 Further, the driving means is constituted by a gap formed by etching the one conductive layer of the fixed portion formed by the three-layer SOI substrate sandwiching the insulating layer between the first conductive layer and the second conductive layer. In the case where the first electrode and the second electrode are formed insulated from the fixed portion, the entire optical scanner can be configured by a simple etching process on a single existing SOI substrate, and the cost can be reduced with fewer processes and materials. And it can be manufactured in a thin shape.

以下、図面に基づいて本発明の実施の形態を説明する。
図１、図２は、本発明を適用した光スキャナ２０の構成を示している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show the configuration of an optical scanner 20 to which the present invention is applied.

これらの図に示しているように、光スキャナ２０は、例えばＳｉＯ_２の絶縁層１０１を厚さが等しく高い導電性を有するシリコン（Ｓｉ）の第１導電層１０２と第２導電層１０３とで挟む３層構造のＳＯＩ基板１００に対するエッチング処理により一体的に形成されたものである。 As shown in these drawings, the optical scanner 20 includes, for example, an insulating layer 101 made of SiO ₂ having a first conductive layer 102 and a second conductive layer 103 made of silicon (Si) having the same and high conductivity. The SOI substrate 100 having a three-layer structure sandwiched is integrally formed by etching.

固定部２１は、上記した絶縁層１０１、第１導電層１０２および第２導電層１０３からなる３層構造を有し、上板２１ａ、下板２１ｂ、側板２１ｃ、２１ｄにより矩形枠状に形成されている。 The fixing portion 21 has a three-layer structure including the insulating layer 101, the first conductive layer 102, and the second conductive layer 103, and is formed in a rectangular frame shape by the upper plate 21a, the lower plate 21b, and the side plates 21c and 21d. ing.

固定部２１の側板２１ｃ、２１ｄの一面側の第１導電層１０２部分には、櫛型の第１電極２２、第２電極２３が左右対称に設けられている。 Comb-shaped first electrodes 22 and second electrodes 23 are provided symmetrically on the first conductive layer 102 portion on one side of the side plates 21c and 21d of the fixing portion 21.

第１電極２２および第２電極２３は、エッチング処理により形成されたギャップ２４、２４により固定部２１の第１導電層部分と絶縁されている。 The first electrode 22 and the second electrode 23 are insulated from the first conductive layer portion of the fixed portion 21 by gaps 24 and 24 formed by an etching process.

第１電極２２には、固定部２１の枠の内側へ向かって延びた複数の突起２２ａが所定間隔で設けられ、第２電極２３にも、固定部２１の枠の内側へ向かって延びた複数の突起２３ａが所定間隔で設けられている。 The first electrode 22 is provided with a plurality of protrusions 22a extending toward the inside of the frame of the fixing portion 21 at a predetermined interval, and the second electrode 23 also has a plurality of protrusions extending toward the inside of the frame of the fixing portion 21. The projections 23a are provided at predetermined intervals.

固定部２１の枠内には、略コの字状に形成され左右対称の第１駆動板２５と第２駆動板３０とが配置され、第１駆動板２５と第２駆動板３０の間に反射板３５が配置されている。 A first drive plate 25 and a second drive plate 30 that are substantially U-shaped and symmetrical are arranged in the frame of the fixed portion 21, and are disposed between the first drive plate 25 and the second drive plate 30. A reflector 35 is disposed.

第１駆動板２５は、固定部２１の側板２１ｃに沿って延びた帯状の基部２５ａ、基部２５ａの両端から基部２５ａと直交する方向（固定部２１の上板２１ａ、下板２１ｂにそれぞれ沿った方向）に延びた一対の腕部２５ｂ、２５ｃとにより略コの字状に形成されており、一対の腕部２５ｂ、２５ｃを固定部２１の枠内の中央に向けた状態で固定部２１の枠内の左側に配置されている。 The first drive plate 25 has a strip-like base 25a extending along the side plate 21c of the fixed portion 21, and directions perpendicular to the base 25a from both ends of the base 25a (along the upper plate 21a and the lower plate 21b of the fixed portion 21, respectively. And a pair of arm portions 25b and 25c extending in the direction), and the pair of arm portions 25b and 25c is directed toward the center in the frame of the fixing portion 21 and Located on the left side of the frame.

また、基部２５ａの外縁には、第１電極２２の複数の突起２２ａの隙間にそれぞれの先端部が進入するように延びた複数本の突起２５ｄが平行に設けられている。 In addition, a plurality of projections 25 d extending in parallel so that the respective leading ends enter the gaps between the plurality of projections 22 a of the first electrode 22 are provided in parallel on the outer edge of the base portion 25 a.

第１駆動板２５の腕部２５ｂの上縁と固定部２１の上板２１ａの内縁と間は、長さ方向に捩れ変形可能に細く形成された第１駆動軸２６によって連結されている。また、第１駆動板２５の腕部２５ｃの下縁と固定部２１の下板２１ｂとの間は、長さ方向に捩れ変形可能に細く形成された第２駆動軸２７によって連結されている。 The upper edge of the arm portion 25b of the first drive plate 25 and the inner edge of the upper plate 21a of the fixed portion 21 are connected by a first drive shaft 26 that is formed so as to be twistable and deformable in the length direction. In addition, the lower edge of the arm portion 25c of the first drive plate 25 and the lower plate 21b of the fixed portion 21 are connected by a second drive shaft 27 that is thinly formed to be twistable in the length direction.

第１駆動軸２６と第２駆動軸２７は、固定部２１の側板２１ｃ、２１ｄと平行で且つ互いに一直線上に並ぶ位置に設けられており、固定部２１の内側で第１駆動板２５を回動自在に支持している。 The first drive shaft 26 and the second drive shaft 27 are provided at positions parallel to the side plates 21 c and 21 d of the fixed portion 21 and aligned with each other, and rotate around the first drive plate 25 inside the fixed portion 21. Supports freely.

第２駆動板３０は、第１駆動板２５と左右対称に形成され、固定部２１の側板２１ｄに沿って延びた帯状の基部３０ａ、基部３０ａの両端から基部３０ａと直交する方向（固定部２１の上板２１ａ、下板２１ｂにそれぞれ沿った方向）に延びた一対の腕部３０ｂ、３０ｃとにより略コの字状に形成されており、一対の腕部３０ｂ、３０ｃを固定部２１の枠内の中央に向けた状態で固定部２１の枠内の右側に配置されている。 The second drive plate 30 is formed symmetrically with the first drive plate 25 and extends along the side plate 21d of the fixed portion 21, and a direction perpendicular to the base portion 30a from both ends of the base portion 30a (the fixed portion 21). And a pair of arm portions 30b and 30c extending in the direction along the upper plate 21a and the lower plate 21b, respectively. The pair of arm portions 30b and 30c is formed into a frame of the fixing portion 21. It is arranged on the right side in the frame of the fixed portion 21 in a state directed toward the center.

また、基部３０ａの外縁には、第２電極２３の複数の突起２３ａの隙間にそれぞれの先端部が進入するように延びた複数本の突起３０ｄが平行に設けられている。 In addition, a plurality of protrusions 30 d are provided in parallel on the outer edge of the base portion 30 a so as to extend into the gaps between the plurality of protrusions 23 a of the second electrode 23.

第２駆動板３０の腕部３０ｂの上縁と固定部２１の上板２１ａの内縁と間は、長さ方向に捩れ変形可能に細く形成された第３駆動軸３１によって連結されている。また、第２駆動板３０の腕部３０ｃの下縁と固定部２１の下板２１ｂとの間は、長さ方向に捩れ変形可能に細く形成された第４駆動軸３２によって連結されている。 The upper edge of the arm portion 30b of the second drive plate 30 and the inner edge of the upper plate 21a of the fixed portion 21 are connected by a third drive shaft 31 that is formed so as to be twistable and deformable in the length direction. Further, the lower edge of the arm portion 30c of the second drive plate 30 and the lower plate 21b of the fixed portion 21 are connected by a fourth drive shaft 32 that is thinly formed to be twistable in the length direction.

第３駆動軸３１と第４駆動軸３２は、固定部２１の側板２１ｃ、２１ｄと平行で且つ互いに一直線上に並ぶ位置に設けられており、固定部２１の枠内で第２駆動板３０を回動自在に支持している。 The third drive shaft 31 and the fourth drive shaft 32 are provided at positions parallel to the side plates 21 c and 21 d of the fixed portion 21 and aligned with each other, and the second drive plate 30 is disposed within the frame of the fixed portion 21. It is pivotably supported.

反射板３５は、外形が横長矩形で、第１駆動板２５と第２駆動板３０とで囲まれた矩形の領域の中央に配置されている。反射板３５の両面または一方の面には光を反射するための反射面が形成されている。 The reflection plate 35 has a horizontally long outer shape and is arranged at the center of a rectangular region surrounded by the first drive plate 25 and the second drive plate 30. Reflective surfaces for reflecting light are formed on both surfaces or one surface of the reflective plate 35.

反射板３５の上縁中央と、第１駆動板２５の上側の腕部２５ｂの先端および第２駆動板３０の上側の腕部３０ｂの先端との間は、第１反射板軸３６を介して連結されている。 Between the center of the upper edge of the reflecting plate 35 and the tip of the upper arm portion 25b of the first driving plate 25 and the tip of the upper arm portion 30b of the second driving plate 30 via the first reflecting plate shaft 36. It is connected.

第１反射板軸３６は、略Ｙ字状に形成され、反射板３５の上縁中央から固定部２１の上板２１ａに直交する方向に直線状に延びその長さ方向に捩れ変形可能に細く形成された直線部３６ａと、直線部３６ａの先端と第１駆動板２５の腕部２５ｂの先端との間を連結する左連結部３６ｂと、直線部３６ａの先端と第２駆動板３０の腕部３０ｂの先端との間を連結する右連結部３６ｃとを有している。これら左右の連結部３６ｂ、３６ｃは、直線部３６ａの軸回りに弾性変形できるように形成されている。 The first reflecting plate shaft 36 is formed in a substantially Y shape and extends linearly from the center of the upper edge of the reflecting plate 35 in a direction perpendicular to the upper plate 21a of the fixing portion 21 so that it can be twisted and deformed in its length direction. The formed straight portion 36a, the left connecting portion 36b for connecting the tip of the straight portion 36a and the tip of the arm portion 25b of the first drive plate 25, the tip of the straight portion 36a and the arm of the second drive plate 30 And a right connecting portion 36c that connects the tip of the portion 30b. These left and right connecting portions 36b and 36c are formed so as to be elastically deformable around the axis of the straight portion 36a.

また、反射板３５の下縁中央と、第１駆動板２５の下側の腕部２５ｃの先端および第２駆動板３０の下側の腕部３０ｃの先端との間は、第１反射板軸３６と上下対称な第２反射板軸３７を介して連結されている。 In addition, the first reflector plate axis extends between the center of the lower edge of the reflector 35 and the tip of the lower arm portion 25c of the first drive plate 25 and the tip of the lower arm portion 30c of the second drive plate 30. 36 and a second reflector shaft 37 that is vertically symmetrical.

第２反射板軸３７は、第１反射板軸３６と上下対称に形成され、反射板３５の下縁中央から固定部２１の下板２１ｂに直交する方向に直線状に延びその長さ方向に捩れ変形可能に細く形成された直線部３７ａと、直線部３７ａの先端と第１駆動板２５の腕部２５ｃの先端との間を連結する左連結部３７ｂと、直線部３７ａの先端と第２駆動板３０の腕部３０ｃの先端との間を連結する右連結部３７ｃとを有している。これら左右の連結部３７ｂ、３７ｃは、直線部３７ａの軸回りに弾性変形できるように形成されている。 The second reflector axis 37 is formed vertically symmetrical with the first reflector axis 36 and extends linearly from the center of the lower edge of the reflector 35 in a direction perpendicular to the lower plate 21b of the fixed portion 21 in the length direction thereof. A straight portion 37a that is thinly formed to allow torsional deformation, a left connecting portion 37b that connects the tip of the straight portion 37a and the tip of the arm portion 25c of the first drive plate 25, a tip of the straight portion 37a, and a second And a right connecting portion 37c that connects the tip of the arm portion 30c of the drive plate 30 to the right end. These left and right connecting portions 37b and 37c are formed so as to be elastically deformable around the axis of the linear portion 37a.

なお、図２に示しているように、上記した各駆動板２５、３０、各駆動軸２６、２７、３１、３２、反射板３５および各反射板軸３６、３７は、前記ＳＯＩ基板１００の第１導電層１０２により形成されている。また、第１電極２２の突起２２ａ（第１電極２２全体でもよい）と第２電極２３の突起２３ａ（第２電極２３全体でもよい）のそれぞれの厚さは、第１駆動板２５の突起２５ｄと第２駆動板３０の突起３０ｄのそれぞれの厚さより小（または後述のように大）となるように設定されている。 As shown in FIG. 2, the drive plates 25 and 30, the drive shafts 26, 27, 31, and 32, the reflection plate 35, and the reflection plate shafts 36 and 37 are the same as those of the SOI substrate 100. One conductive layer 102 is formed. Further, the thicknesses of the protrusion 22a of the first electrode 22 (or the entire first electrode 22) and the protrusion 23a of the second electrode 23 (or the entire second electrode 23) may be the same as the protrusion 25d of the first drive plate 25. And the thickness of each protrusion 30d of the second drive plate 30 is set to be smaller (or larger as will be described later).

このように突起の厚さが異なるようにすることで非駆動状態（静止状態）において、電極側の突起２２ａ、２３ａと駆動板側の突起２５ｄ、３０ｄの厚さ中心の位置がずれる。そして、後述するように電圧印加で生じる吸引力がこのずれ分をなくす方向、即ち互いの厚さ中心が一致する方向に働くことになる。 Thus, by making the thicknesses of the protrusions different, the positions of the thickness centers of the electrode-side protrusions 22a and 23a and the driving plate-side protrusions 25d and 30d are shifted in the non-driving state (stationary state). Then, as will be described later, the attractive force generated by the voltage application acts in a direction in which this deviation is eliminated, that is, in a direction in which the respective thickness centers coincide.

固定部２１の表面（第１導電層部分）の任意の点、第１電極２２および第２電極２３は駆動信号発生器４０に接続されている。 Arbitrary points on the surface (first conductive layer portion) of the fixing portion 21, the first electrode 22 and the second electrode 23 are connected to the drive signal generator 40.

駆動信号発生器４０は、第１電極２２および第２電極２３とともにこの実施形態の駆動手段を構成するものであり、固定部２１の第１導電層部分を基準電位として、第１電極２２に対しては、図３の（ａ）のように所定周期で所定電圧Ｖの駆動信号Ｓ１を印加し、第２電極２３に対しては、図３の（ｂ）のように、信号Ｓ１を反転した駆動信号Ｓ２を印加する。 The drive signal generator 40 constitutes the drive means of this embodiment together with the first electrode 22 and the second electrode 23, and the first conductive layer portion of the fixed portion 21 is used as a reference potential with respect to the first electrode 22. As shown in FIG. 3A, a drive signal S1 having a predetermined voltage V is applied at a predetermined cycle, and the signal S1 is inverted with respect to the second electrode 23 as shown in FIG. 3B. A drive signal S2 is applied.

この駆動信号Ｓ１、Ｓ２を与えることにより反射板３５は往復回動する。
即ち、図２に示した状態から、第１電極２２と第１駆動板２５との間に電圧Ｖが印加されると、図４の（ａ）のように、第１電極２２の突起２２ａと第１駆動板２５の突起２５ｄの間に互いの突起の厚さ中心が一致する方向に静電的な吸引力が生じ、第１駆動板２５が第１駆動軸２６、第２駆動軸２７を中心に時計回りに回動する。 By applying the drive signals S1 and S2, the reflecting plate 35 reciprocates.
That is, when the voltage V is applied between the first electrode 22 and the first drive plate 25 from the state shown in FIG. 2, the protrusion 22a of the first electrode 22 is An electrostatic attractive force is generated between the protrusions 25d of the first drive plate 25 in the direction in which the thickness centers of the protrusions coincide with each other, and the first drive plate 25 moves the first drive shaft 26 and the second drive shaft 27 together. Rotate clockwise around the center.

このため、第１駆動板２５の腕部２５ｂ、２５ｃの先端と反射板３５との間を連結している第１反射板軸３６、第２反射板軸３７の左連結部３６ｂ、３７ｂが前方（図４では下方）に引っ張られ、直線部３６ａ、３７ａが反時計回りに捩れ変形し、反射板３５が反時計回りに回動する。なお、この第１反射板軸３６、第２反射板軸３７の直線部３６ａ、３７ａが反時計回りに捩れ変形することにより、第２駆動板３０は時計回りに回動する。 For this reason, the left connecting portions 36b and 37b of the first reflecting plate shaft 36 and the second reflecting plate shaft 37 connecting the tips of the arm portions 25b and 25c of the first drive plate 25 and the reflecting plate 35 are forward. The straight portions 36a and 37a are twisted and deformed counterclockwise, and the reflecting plate 35 is rotated counterclockwise. The second drive plate 30 is rotated clockwise by the straight portions 36a and 37a of the first reflector plate shaft 36 and the second reflector plate shaft 37 being twisted and deformed counterclockwise.

逆に、第２電極２３と第２駆動板３０との間に電圧Ｖが印加されると、図４の（ｂ）のように、第２電極２３の突起２３ａと第２駆動板３０の突起３０ｄの間に互いの突起の厚さ中心が一致する方向に静電的な吸引力が生じ、第２駆動板３０が第３駆動軸３１、第４駆動軸３２を中心に反時計回りに回動する。 Conversely, when a voltage V is applied between the second electrode 23 and the second drive plate 30, as shown in FIG. 4B, the projection 23a of the second electrode 23 and the projection of the second drive plate 30. An electrostatic attraction force is generated in the direction in which the thickness centers of the protrusions coincide with each other during 30 d, and the second drive plate 30 rotates counterclockwise around the third drive shaft 31 and the fourth drive shaft 32. Move.

このため、第２駆動板３０の腕部３０ｂ、３０ｃの先端と反射板３５との間を連結している第１反射板軸３６、第２反射板軸３７の右連結部３６ｃ、３７ｃが前方（図４では下方）に引っ張られ、直線部３６ａ、３７ａが時計回りに捩れ変形し、反射板３５が時計回りに回動する。なお、この第１反射板軸３６、第２反射板軸３７の直線部３６ａ、３７ａが時計回りに捩れ変形することにより、第１駆動板２５は反時計回りに回動する。 For this reason, the right connecting portions 36c and 37c of the first reflecting plate shaft 36 and the second reflecting plate shaft 37 that connect the tips of the arm portions 30b and 30c of the second drive plate 30 and the reflecting plate 35 are forward. Pulled downward (downward in FIG. 4), the straight portions 36a and 37a are twisted and deformed clockwise, and the reflecting plate 35 rotates clockwise. The first drive plate 25 rotates counterclockwise when the straight portions 36a, 37a of the first reflector plate shaft 36 and the second reflector plate shaft 37 are twisted and deformed clockwise.

したがって、上記したように互いに反転した信号Ｓ１、Ｓ２を一定周期で印加させると、反射板３５は所定の角度範囲内で往復回動することになり、例えばその一面側に入射した光に対する反射光の出射角を所定範囲内で連続的に往復掃引することができる。 Therefore, as described above, when the signals S1 and S2 reversed to each other are applied at a constant period, the reflector 35 reciprocates within a predetermined angle range. For example, the reflected light with respect to the light incident on one surface side thereof. Can be continuously reciprocated within a predetermined range.

上記構成の光スキャナ２０は、第１駆動板２５と第２駆動板３０とを回動駆動して、第１駆動板２５の各腕部２５ｂ、２５ｃの先端と反射板３５との間および第２駆動板３０の各腕部３０ｂ、３０ｃの先端と反射板３５との間をそれぞれ連結している第１反射板軸３６、第２反射板軸３７に捩れ方向の力を与えることで反射板３５を間接的に回動させている。 The optical scanner 20 having the above-described configuration rotationally drives the first drive plate 25 and the second drive plate 30, and between the tip of each arm portion 25 b, 25 c of the first drive plate 25 and the reflection plate 35 and the first drive plate 25. 2 Reflecting plate by applying a twisting direction force to the first reflecting plate shaft 36 and the second reflecting plate shaft 37 respectively connecting the tips of the arm portions 30b, 30c of the driving plate 30 and the reflecting plate 35. 35 is indirectly rotated.

このため、第１反射板軸３６、第２反射板軸３７に大きな捩れを与えることができ、反射板３５を歪ませることなく、その回動角を格段に大きくすることができる。 For this reason, a large twist can be given to the first reflector plate shaft 36 and the second reflector plate shaft 37, and the rotation angle thereof can be remarkably increased without distorting the reflector plate 35.

次に、上記光スキャナ２０の製造方法の一例について説明する。
始めに、図５の（ａ）のように、ＳＯＩ基板１００の第１導電層１０２の表面のうち、第１電極２２、第２電極２３およびギャップ２４の形成部分を除いた部分に、マスク２０１をフォトリソグラフィ技術により形成してから、図５の（ｂ）のように、ＩＣＰ−ＲＩＥ装置でマスク２０１に覆われていない第１導電層部分を所定時間エッチングして、第１電極２２、第２電極２３およびギャップ２４の形成部分の厚さを他の部分より薄く形成する。なお、ここでは第１電極２２、第２電極２３の全体を他の部分より薄くしているが、その突起２２ａ、２３ａの厚さだけを他の部分より薄くしてもよい。 Next, an example of a method for manufacturing the optical scanner 20 will be described.
First, as shown in FIG. 5A, a mask 201 is formed on a portion of the surface of the first conductive layer 102 of the SOI substrate 100 excluding a portion where the first electrode 22, the second electrode 23, and the gap 24 are formed. Then, as shown in FIG. 5B, the first conductive layer portion not covered with the mask 201 is etched for a predetermined time by the ICP-RIE apparatus as shown in FIG. The portions where the two electrodes 23 and the gap 24 are formed are formed thinner than the other portions. In addition, although the 1st electrode 22 and the 2nd electrode 23 whole are made thinner than another part here, you may make only the thickness of the protrusion 22a, 23a thinner than another part.

次に、図５の（ｃ）のように、固定部２１、第１電極２２、第２電極２３、第１駆動板２５、第１駆動軸２６、第２駆動軸２７、第２駆動板３０、第３駆動軸３１、第４駆動軸３２、反射板３５、第１反射板軸３６、第２反射板軸３７の各形成部分にマスク２０２を形成してから、図５の（ｄ）のように、マスク２０２に覆われていない第１導電層部分をエッチング除去する。 Next, as shown in FIG. 5C, the fixing portion 21, the first electrode 22, the second electrode 23, the first drive plate 25, the first drive shaft 26, the second drive shaft 27, and the second drive plate 30. After the mask 202 is formed on each of the formation portions of the third drive shaft 31, the fourth drive shaft 32, the reflection plate 35, the first reflection plate shaft 36, and the second reflection plate shaft 37, as shown in FIG. Thus, the first conductive layer portion not covered with the mask 202 is removed by etching.

そして、第１導電層１０２側のマスク２０２を除去して、図５の（ｅ）のように、ＳＯＩ基板１００の裏面側、即ち、第２導電層１０３の表面の固定部２１の形成部分にマスク２０３を形成してから、図５の（ｆ）のように、マスク２０３に覆われていない第２導電層部分をエッチング除去する。 Then, the mask 202 on the first conductive layer 102 side is removed, and as shown in FIG. 5E, on the back side of the SOI substrate 100, that is, on the formation portion of the fixing portion 21 on the surface of the second conductive layer 103. After the mask 203 is formed, as shown in FIG. 5F, the second conductive layer portion not covered with the mask 203 is removed by etching.

最後に、フッ酸（ＦＨ）を用いて図５の（ｇ）のように、絶縁層１０１のうち、ギャップ２４の部分を除いて表面に露出している不要部分を除去することで、前記構成の光スキャナ２０が完成する。 Finally, as shown in FIG. 5G using hydrofluoric acid (FH), unnecessary portions exposed on the surface of the insulating layer 101 except for the gap 24 are removed, thereby removing the structure. The optical scanner 20 is completed.

このように、上記実施形態の光スキャナ２０は、一枚の既成のＳＯＩ基板１００に対する簡単なエッチング処理により構成することができ、少ない工程および材料で低コストに且つ薄型に製造できる。 As described above, the optical scanner 20 according to the above embodiment can be configured by a simple etching process on one piece of the existing SOI substrate 100, and can be manufactured thinly at low cost with few processes and materials.

また、前記実施形態では、第１電極２２および第２電極２３の突起の厚さを、第１駆動板２５および第２駆動板３０の突起の厚さより小としていたが、図６に示すように、第１電極２２の突起２２ａおよび第２電極２３の突起２３ａの厚さを、第１駆動板２５の突起２５ｄおよび第２駆動板３０の突起３０ｄの厚さより大にしてもよい。この場合、前記図５の（ａ）、（ｂ）の製造過程で、第１電極２２、第２電極２３の形成部分の厚さを他の部分より薄くする代わりに、第１電極２２、第２電極２３の形成部分以外の厚さをエッチングにより薄くすればよい。 Moreover, in the said embodiment, although the thickness of the protrusion of the 1st electrode 22 and the 2nd electrode 23 was made smaller than the thickness of the protrusion of the 1st drive plate 25 and the 2nd drive plate 30, as shown in FIG. The thickness of the protrusion 22a of the first electrode 22 and the protrusion 23a of the second electrode 23 may be larger than the thickness of the protrusion 25d of the first drive plate 25 and the protrusion 30d of the second drive plate 30. In this case, in the manufacturing process of FIGS. 5A and 5B, instead of making the thickness of the first electrode 22 and the second electrode 23 thinner than the other parts, the first electrode 22 and the second electrode 23 are formed. The thickness except for the portion where the two electrodes 23 are formed may be reduced by etching.

また、上記した光スキャナ２０では、第１駆動板２５、第２駆動板３０、反射板３５およびそれらを支持する各軸を、第１電極２２および第２電極２３と同一の導電層（第１導電層１０２）に形成していたが、図７、図８に示す光スキャナ５０のように、第１駆動板２５、第２駆動板３０、反射板３５およびそれらを支持する各軸を、第１電極２２および第２電極２３が形成されている導電層（第１導電層１０２）と反対側の導電層（第２導電層１０３）に形成してもよい。 In the optical scanner 20 described above, the first drive plate 25, the second drive plate 30, the reflection plate 35, and the shafts that support them are arranged on the same conductive layer (first electrode as the first electrode 22 and the second electrode 23). The first driving plate 25, the second driving plate 30, the reflecting plate 35, and the shafts that support them, as in the optical scanner 50 shown in FIGS. 7 and 8, are formed on the conductive layer 102). You may form in the conductive layer (2nd conductive layer 103) on the opposite side to the conductive layer (1st conductive layer 102) in which the 1 electrode 22 and the 2nd electrode 23 are formed.

この場合には、各電極２２、２３の突起２２ａ、２３ａと、各駆動板２５、３０の突起２５ｄ、３０ｄとの間に層厚以上のずれが必然的に生じるので、より大きな振幅で各駆動板２５、３０を回動でき、反射板３５の回動振幅もさらに大きくすることができる。また、前記した厚さ調整のためのエッチング加工を省略でき、製造も容易となる。ただし、この場合、駆動信号Ｓ１、Ｓ２の電圧は、固定部２１の背面側（第２導電層１０３）を基準にして印加する。 In this case, since the deviation of the layer thickness or more is inevitably generated between the projections 22a and 23a of the electrodes 22 and 23 and the projections 25d and 30d of the drive plates 25 and 30, each drive is performed with a larger amplitude. The plates 25 and 30 can be rotated, and the rotation amplitude of the reflecting plate 35 can be further increased. In addition, the above-described etching process for adjusting the thickness can be omitted, and the manufacture is facilitated. However, in this case, the voltages of the drive signals S1 and S2 are applied with reference to the back side (second conductive layer 103) of the fixed portion 21.

また、上記光スキャナ２０、５０では、櫛型の電極２２、２３を用いていたが、これは本発明を限定するものではない。 In the optical scanners 20 and 50, the comb-shaped electrodes 22 and 23 are used, but this does not limit the present invention.

例えば、前記した図７、図８に示した光スキャナ５０の各電極２２、２３の突起２２ａ、２３ａおよび各駆動板２５、３０の突起２５ｄ、３０ｄを省略し、図９、図１０に示すように、電極２２、２３の内側端面と各駆動板２５、３０の基部２５ａ、３０ａの外側端面との間に静電的に生じるに吸引力を利用して各駆動板２５、３０を回動させる光スキャナ６０も実現できる。 For example, the projections 22a and 23a of the electrodes 22 and 23 and the projections 25d and 30d of the drive plates 25 and 30 of the optical scanner 50 shown in FIGS. 7 and 8 are omitted, as shown in FIGS. In addition, the drive plates 25 and 30 are rotated by using an attractive force generated electrostatically between the inner end surfaces of the electrodes 22 and 23 and the outer end surfaces of the base portions 25a and 30a of the drive plates 25 and 30. An optical scanner 60 can also be realized.

また、例えば、図１１、図１２に示す光スキャナ７０のように、駆動板２５、３０の各基部２５ａ、３０ａにそれぞれ対向する第１電極２２と第２電極２３を、固定部２１の第２導電層側に絶縁板７１を挟んで固定してもよい。このように電極構造を対向型にした場合、各電極２２、２３と各駆動板２５、３０との間隔を大きくできるので、さらに大きな回動振幅を得ることができる。 Further, for example, as in the optical scanner 70 shown in FIGS. 11 and 12, the first electrode 22 and the second electrode 23 respectively facing the base portions 25 a and 30 a of the drive plates 25 and 30 are connected to the second portion of the fixing portion 21. The insulating plate 71 may be sandwiched and fixed on the conductive layer side. In this way, when the electrode structure is of the opposed type, the distance between the electrodes 22 and 23 and the drive plates 25 and 30 can be increased, so that a larger rotation amplitude can be obtained.

また、上記のような対向型にする場合、静電駆動だけでなく電磁駆動も可能となる。
例えば図１３のように、各駆動板２５、３０の基部２５ａ、３０ａに磁気吸着性を有する金属膜７３を蒸着し、前記電極２２、２３の代わりに電磁石（コイルのみでもよい）７４を設け、前記した駆動信号発生器４０によりこれらの電磁石７４に対して交互に通電することで、前記実施形態と同様に駆動板２５、３０を回動させることができる。なお、図１３において符号７２は、電磁石７４を支持する支持板である。 Further, in the case of the facing type as described above, not only electrostatic driving but also electromagnetic driving is possible.
For example, as shown in FIG. 13, a metal film 73 having magnetic adsorptivity is deposited on the base portions 25a and 30a of the drive plates 25 and 30, and an electromagnet (or only a coil) 74 is provided instead of the electrodes 22 and 23. By alternately energizing the electromagnets 74 by the drive signal generator 40 described above, the drive plates 25 and 30 can be rotated as in the above embodiment. In FIG. 13, reference numeral 72 denotes a support plate that supports the electromagnet 74.

このような電磁駆動式の場合、静電駆動型に比べて格段に低い電圧で大きな力を得ることができ、駆動信号発生器４０の構成が簡単化できる。 In the case of such an electromagnetic drive type, a large force can be obtained with a voltage that is significantly lower than that of the electrostatic drive type, and the configuration of the drive signal generator 40 can be simplified.

また、前記実施形態の光スキャナ２０、５０、６０、７０では、反射板３５を支持する各反射板軸３６、３７の形状がＹ字状であったが、図１４のように、直線部３６ａ、３７ａに対して各連結部３６ｂ、３６ｃ、３７ｂ、３７ｃが直交するＴ字状に形成してもよい。 Further, in the optical scanner 20, 50, 60, 70 of the above embodiment, the shape of each reflector plate shaft 36, 37 that supports the reflector 35 is Y-shaped, but as shown in FIG. , 37a may be formed in a T-shape in which the connecting portions 36b, 36c, 37b, 37c are orthogonal to each other.

また、図１５の（ａ）、（ｂ）のように、各反射板軸３６、３７の直線部３６ａ、３７ａを固定部２１の上板２１ａおよび下板２１ｂまで延長してもよい。このように反射板軸３６、３７の直線部３６ａ、３７ａの先端を固定部２１に連結した構造の場合、反射板３５の前後方向の移動を規制することができ、その回動中心のずれが少なくて済む。 Further, as shown in FIGS. 15A and 15B, the straight portions 36 a and 37 a of the reflecting plate shafts 36 and 37 may be extended to the upper plate 21 a and the lower plate 21 b of the fixing portion 21. Thus, in the case of the structure in which the ends of the straight portions 36a, 37a of the reflecting plate shafts 36, 37 are connected to the fixed portion 21, the movement of the reflecting plate 35 in the front-rear direction can be restricted, and the shift of the rotation center is prevented. Less is enough.

本発明の実施形態の全体構成図Overall configuration diagram of an embodiment of the present invention 図１のＡ−Ａ線拡大断面図AA line enlarged sectional view of FIG. 実施形態の要部の出力信号図Output signal diagram of the main part of the embodiment 実施形態の動作説明図Operation explanatory diagram of the embodiment 実施形態の製造方法の一例を示す図The figure which shows an example of the manufacturing method of embodiment 他の実施形態の構造を示す拡大断面図Expanded sectional view showing the structure of another embodiment 他の実施形態の全体構成図Overall configuration diagram of another embodiment 図７のＢ−Ｂ線拡大断面図BB expanded sectional view of FIG. 他の実施形態の全体構成図Overall configuration diagram of another embodiment 図９の実施形態のＣ−Ｃ線拡大断面図CC expanded sectional view of the embodiment of FIG. 他の実施形態の全体構成図Overall configuration diagram of another embodiment 図１１の実施形態のＤ−Ｄ線拡大断面図DD sectional enlarged sectional view of the embodiment of FIG. 電磁駆動型の構成例を示す拡大断面図Enlarged cross-sectional view showing a configuration example of electromagnetic drive type 反射板軸の変形例を示す図The figure which shows the modification of a reflecting plate axis | shaft 反射板軸の変形例を示す図The figure which shows the modification of a reflecting plate axis | shaft 従来装置の概略構成図Schematic configuration diagram of conventional equipment 従来装置の概略構成図Schematic configuration diagram of conventional equipment

Explanation of symbols

２０、５０、６０、７０……光スキャナ、２１……固定部、２２……第１電極、２３……第２電極、２４……ギャップ、２５……第１駆動板、２６……第１駆動軸、２７……第２駆動軸、３０……第２駆動板、３１……第３駆動軸、３２……第４駆動軸、３５……反射板、３６……第１反射板軸、３７……第２反射板軸、４０……駆動信号発生器 20, 50, 60, 70: Optical scanner, 21: Fixed portion, 22: First electrode, 23: Second electrode, 24: Gap, 25: First drive plate, 26: First Drive shaft 27... Second drive shaft 30... Second drive plate 31... Third drive shaft 32. Fourth drive shaft 35 .. reflector plate 36. 37 …… Second reflector axis, 40 …… Drive signal generator

Claims

A fixing portion (21) formed in a frame plate shape;
The base portion (25a) and a pair of arm portions (25b, 25c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions are formed into a frame of the fixing portion. A first drive plate (25) arranged on one end side in the frame in a state directed toward the center side inside,
A first drive shaft (26) that connects between an outer edge of one arm portion of the first drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The first drive plate extends from the outer edge of the other arm portion so as to be aligned with the first drive shaft, connects the inner edge of the fixed portion, and is formed to be able to be twisted and deformed in the length direction thereof. A second drive shaft (27) for rotatably supporting the first drive plate within the frame of the fixed portion together with the first drive shaft;
The base portion (30a) and a pair of arm portions (30b, 30c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions is formed into a frame of the fixing portion. A second drive plate (30) disposed on the other end side in the frame in a state of being directed toward the center of the inside,
A third drive shaft (31) that connects between an outer edge of one arm portion of the second drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The second drive plate extends from the outer edge of the other arm of the second drive plate so as to be aligned with the third drive shaft, and is connected to the inner edge of the fixed portion so that it can be twisted and deformed in the length direction. A fourth drive shaft (32) for rotatably supporting the second drive plate within the frame of the fixed portion together with the third drive shaft;
A reflecting plate (disposed in the frame of the fixed portion and at substantially the center of the region surrounded by the first driving plate and the second driving plate) and having a reflecting surface for reflecting light formed on at least one surface side ( 35)
Extending linearly from the outer edge of the reflecting plate to the tip of one arm of the first drive plate and the tip of one arm of the second drive plate, and torsionally deformable in its length direction The first straight portion (36a) branches from the first straight portion, the first connecting portion (36b) that branches from the first straight portion and connects to the tip of one arm of the first drive plate, and the first straight portion. A first reflector shaft (36) having a second connecting portion (36c) for connecting between the tip of one arm portion of the second drive plate;
The other arm of the first drive plate is aligned with the straight portion of the first reflector shaft from the outer edge of the reflector opposite to the position where the linear portion of the first reflector shaft is provided. A second linear portion (37a) that extends linearly between the distal end of the second drive plate and the distal end of the other arm portion of the second drive plate and can be torsionally deformed in the length direction thereof, branches off from the second linear portion A third connecting portion (37b) that connects the tip of the other arm portion of the first drive plate and a tip of the other arm portion of the second drive plate that branches off from the second straight portion. A second reflector shaft (37) having a fourth connecting part (37c) connecting between the two,
A force is periodically applied to the base portion of the first drive plate and the base portion of the second drive plate to reciprocate the first drive plate and the second drive plate, and the first reflector plate shaft and the second reflector plate An optical scanner comprising driving means (22, 23, 40) for reciprocatingly rotating the reflecting plate by deforming a shaft.

The driving means includes
A first electrode (22) provided on the fixed part and for applying a voltage for generating an electrostatic attractive force between the fixed part and the base of the first drive plate;
A second electrode (23) for applying a voltage for generating an electrostatic attraction between the fixed portion and the base of the second drive plate;
A drive signal generator (40) for periodically applying a voltage to the first electrode and the second electrode to reciprocately rotate the first drive plate and the second drive plate. The optical scanner according to 1.

An optical scanner integrally formed by etching a single-layer SOI substrate (100) having a three-layer structure in which an insulating layer (101) is sandwiched between a first conductive layer (102) and a second conductive layer (103). And
The fixing portion has a three-layer structure in which the insulating layer is sandwiched between a first conductive layer and a second conductive layer,
The said 1st electrode and the 2nd electrode are insulated and formed from the said fixing | fixed part by the gap (24) formed by the etching process with respect to one conductive layer of the said SOI substrate, The 2nd electrode is formed. Optical scanner.

The first electrode and the second electrode are formed on one conductive layer of the SOI substrate, and the first drive plate and the second drive plate are formed on the other conductive layer of the SOI substrate. The optical scanner according to claim 3.