CN102175322B - Imaging spectrometer based on grating translational light modulator - Google Patents
Imaging spectrometer based on grating translational light modulator Download PDFInfo
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- CN102175322B CN102175322B CN201110033800A CN201110033800A CN102175322B CN 102175322 B CN102175322 B CN 102175322B CN 201110033800 A CN201110033800 A CN 201110033800A CN 201110033800 A CN201110033800 A CN 201110033800A CN 102175322 B CN102175322 B CN 102175322B
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Abstract
The invention discloses an imaging spectrometer based on a grating translational light modulator, which can apply a linear array detector. The imaging spectrometer comprises a receiving optical system, a dispersing component, an imaging lens, a grating translational light modulator array, a convergent mirror and a detector, wherein radiation information of a target is imaged on the dispersing component line by line according to different time sequences by using the receiving optical system, and is imaged on programmable grating translational light modulator linear arrays by using the imaging lens after being subjected to light splitting by the dispersing component; the grating translational light modulator linear arrays are programmed and driven line by line, so that light of different wavelengths passes through according to the time sequence and is converged onto the detector by using the convergent mirror; and through data synthesis, the spatial dimension information and optical dimension information of the target are obtained. The spectrometer has the advantages of small size, light weight, low price, high speed and high resolution, and can be widely applied to the fields of space flight and aviation remote sensing, industry, agriculture, biological medicine, substance analysis and classification, universal and astronomical detection, environment and disaster monitoring, atmosphere detection, searching and tracking of military targets, and the like.
Description
Technical field
The present invention relates to a kind of imaging spectrometer, in particular, the present invention relates to a kind of imaging spectrometer of the raster translation optical modulator face battle array of making based on MOEMS.
Background technology
Imaging spectral technology is exactly one type of novel multi-vitamin technology for information acquisition that imaging technique and spectral technique are combined, and it can access the spatial information and the spectral information of detected target.The two-dimensional space of the main detection of a target of normally used imaging spectrometer and one dimension spectral information form data cube.Seek out three-dimensional data, must adopt scanning technique or hyperchannel Detection Techniques.By wearing the classification of rail imaging mode, the sweep type imaging spectrometer can be divided into optical mechaical scanning imaging and pull-broom type imaging again.The optical mechaical scanning imaging makes the target emanation energy of each instantaneous field of view's correspondence on the scan line get into detector through optical system in proper order through the mechanical motion of scanning mirror.The pull-broom type imaging is to staring imaging of every scan line.For high light spectrum image-forming, the former detector adopts line array device, and the latter adopts face battle array device.Because the influence of face battle array focal plane device processing technology and cost, the development and application of pull-broom type high light spectrum image-forming is restricted.
Can the spectrum dimension of the information that received with a kind of device opposite battle array device be compressed, and makes and in the pull-broom type imaging spectrometer, can improve signal quality with low cost, many pixels, high-resolution linear array detector, becomes the research focus.Method commonly used is to use spatial light modulator.Roughly can be divided into following several types: traditional mechanical moves and rotary-type modulator; LCD space light modulator; MOEMS (MOEMS) photomodulator.
The advantage that traditional mechanical moves with rotary type modulator is that near the desirable state of opening and closing, and the level of parasitic light is lower.But it need do step continuous motion, causes moving component to be easy to generate mechanical fatigue, alignment error and instability, and speed is relatively low.The harmful effect that LCD space light modulator has avoided mechanical movable member to produce, but its switch switch speed is still slower, can not accomplish standard-sized sheet and complete shut-down to the modulation of light, and also the absorption spectrum of liquid crystal has limited its application at visible light and near infrared bands of a spectrum.The photomodulator that uses emerging MOEMS MOEMS technology to make has that volume is little, programming flexibly, sweep velocity is fast, be convenient to outstanding advantages such as integrated.It has overcome the vibration of traditional mechanical formula modulator and the shortcoming that error is introduced easily in wearing and tearing, and modulating speed, bandwidth and the efficient of light obviously is superior to LCD space light modulator again, is hot research in recent years.The DMD that produces like Texas Instruments is exactly typical case's representative.But the gap between the micro mirror of DMD makes this masterplate on the optical modulation effect, produce the interference of diffraction parasitic light, can not reach the desired light modulation effect.
Can compress the spectrum dimension of the information that planar array detector spare received in traditional pull-broom type imaging spectrometer; Make and to improve signal quality with low cost, many pixels, high-resolution linear array detector spare; And promptly there is not traditional mechanical formula imaging spectrometer because the error that vibration and wearing and tearing are introduced; On modulating speed, bandwidth, efficient, surpass the liquid crystal type imaging spectrometer again; And the optical interference that the micro mirror gap that can avoid the reflective MOEMS spectrometer of this tilting mirror of DMD causes, this becomes us and invents the original intention based on the imaging spectrometer of raster translation optical modulator.
Summary of the invention
The purpose of this invention is to provide little, in light weight, the low-cost imaging spectrometer of a kind of volume, overcome pull-broom type optical spectrum imagers focal plane device cost height and the shortcoming that can't do big face battle array; With raster translation optical modulator GMLM is its light path gating element; Avoid traditional mechanical formula imaging spectrometer because the error that vibration and wearing and tearing are introduced; On modulating speed, bandwidth, efficient, surpass the liquid crystal type imaging spectrometer again; And the optical interference that the micro mirror gap that can avoid the reflective MOEMS imaging spectrometer of this tilting mirror of DMD causes realizes high efficiency optical modulation.
Technical scheme of the present invention is following:
A kind of imaging spectrometer based on raster translation optical modulator comprises receiving optics, dispersion element, imaging mirror, raster translation optical modulator array, convergent mirror, detector.Said dispersion element is arranged at the emitting light path of receiving optics; Imaging mirror, raster translation optical modulator array are set in turn on the emitting light path of dispersion element; Convergent mirror, detector are set in turn in the emitting light path of raster translation optical modulator array.The radiation information of object is imaged on the dispersion element through said receiving optics by the different time order line by line; Through being imaged onto on the grating translation optical modulator linear array able to programme through the imaging mirror again after the dispersion element beam split; Through programming drives line by line to the raster translation optical modulator linear array; The light timesharing of different wave length is passed through in proper order, and converged on the detector, at last through synthetic space dimension information and the spectrum dimension information that obtains object of data through convergent mirror.
The receiving optics of this imaging spectrometer receives the radiation information of the target that obtains with the mode of operation of pushing broom through refraction or reflected version, and is collimated on the dispersion element line by line.The preferred newtonian of receiving optics, Cassegrain's formula or Ritchie-Ke Laiqinshi reflecting telescope mode constitutes, to avoid the influence of chromatic aberation.
Dispersion element of the present invention is reflective gratings, transmission-type grating or prism.Imaging mirror of the present invention and convergent mirror are reflective or the transmission-type mirror.
The raster translation optical modulator that the present invention uses is MOEMS raster translation optical modulator GMLM (the Grating Moving Light Modulator of applicant's early-stage Study; Patent No. ZL200510020186.8); With its core devices, adopt diffraction principle that incident light is carried out phase modulation (PM) as spectral modulation.Because it is the microdevice that adopts the MOEMS technology to make; The unique texture and the diffraction principle of grating design in addition; When a plurality of grating light modulators unit constitutes linear array; Both do not had traditional mechanical formula photomodulator because the error that vibration and wearing and tearing are introduced surpasses the liquid crystal type imaging spectrometer again on modulating speed, bandwidth, efficient, and on the optical grating diffraction direction, do not had DMD such because the optical interference that cell gap causes.When the different spectrum of raster translation optical modulator linear array timesharing gated optical bands of a spectrum, as long as each unit pixel in its array is carried out independently driven.This scheme can realize the spectrum dimension information of object is compressed, and corresponding detector is a linear array detector.So just reduce the cost of the detector array of traditional pull-broom type imaging spectrometer, when guaranteeing big signal to noise ratio (S/N ratio), can further use the linear array detector of many pixel high-resolutions to improve the imaging spectrometer signal quality again.
Advantage of the present invention is:
1, spectrometer adopts novel MOEMS raster translation optical modulator linear array; Overcome traditional mechanical formula photomodulator because the shortcoming of the error that vibration and wearing and tearing are introduced; On modulating speed, bandwidth, efficient, surpass the liquid crystal type imaging spectrometer, and on the optical grating diffraction direction, do not have DMD such because the optical interference that cell gap causes.
2, the employing of new device makes the spectrometer overall volume little, in light weight.
3, novel imaging spectral is owing to adopt MOEMS raster translation optical modulator linear array; Reduced the dimension of detector; Make and adopt cost spectral resolution and signal quality lower, that the better linear array detector of performance further improves imaging spectrometer to become possibility, overcome pull-broom type optical spectrum imagers focal plane device cost height and the shortcoming that can't do big face battle array.
4, adopt MOEMS raster translation optical modulator GMLM (Grating Moving Light Modulator; Patent No. ZL200510020186.8) as the core devices of spectral modulation; It is simple that it has processing, and response speed is fast, the advantage that cost is low, optical modulation efficient is high; The linear array that its a plurality of unit of usefulness are formed is as the compression device of spectrum dimension information, the problem that can avoid above-mentioned photomodulator to bring preferably.
This imaging spectrometer can be widely used in the fields such as Search/Track of space flight and aviation remote sensing, industry, agricultural, biological medicine, species analysis and classification, universe and astrosurveillance, environment and disaster monitoring, atmospheric exploration and military target.
Description of drawings
Fig. 1 is the imaging spectrometer structural drawing based on raster translation optical modulator of the present invention;
Fig. 2 is single random grating translation optical modulator structural drawing;
Fig. 3 is the linear array structure figure that raster translation optical modulator constitutes;
Fig. 4 adopts the raster translation optical modulator linear array to realize the schematic diagram of spectrum surface information spatial modulation.
Among the figure: 1. object, 2. receiving optics, 3. dispersion element, 4. imaging mirror; 5. raster translation optical modulator linear array, 6. convergent mirror, 7. detector, 21. silicon substrates; 22. oxide, 23. insulation courses, 24. negative electrodes; 25. the bottom reflecting surface, 26. top layer reflectings surface, 27, semi-girder, 28. bias voltage applying device.
Embodiment
Below in conjunction with accompanying drawing the present invention is further specified:
Fig. 1 has shown the imaging spectrometer structure based on raster translation optical modulator of the present invention.Wherein, the radiation information of object 1 is imaged on the dispersion element 3 by the different time order through receiving optics 2 line by line, through being imaged onto on the grating translation optical modulator linear array 5 able to programme through imaging mirror 4 after dispersion element 3 beam split again.Through 5 programmings drive line by line to the raster translation optical modulator linear array, the light timesharing of different wave length is passed through in proper order, and converged on the detector 7, at last to synthetic space dimension information and the spectrum dimension information that obtains object of data through convergent mirror 6.
Fig. 2 has shown the raster translation optical modulator structure of single pixel of the present invention.Wherein, deposit growth one deck oxide 22 on silicon substrate 21, the insulation course of deposit etching again 23, negative electrode 24; Plate bottom reflecting surface 25, through deposit sacrifice layer, splash-proofing sputtering metal; Form top layer reflecting surface 26; The needed grating of etching above that again, this grating is positive electrode, and last releasing sacrificial layer just can obtain structure as shown in Figure 2.In fact incident ray has received the dual modulation of the bottom grating of top layer grating and hollow out, and this modulation effect changes with two-layer grating space is different, and its principle is similar to the rectangular channel phase grating.And its spacing can be regulated through bias voltage applying device 28.End face reflection horizon 26 is supported through four rotational symmetric semi-girders 27; Totally four of semi-girders 27; Through upright supports on silicon base 21; And four limits that are parallel to the square modulator are arranged, keep certain interval in vertical direction with the top layer reflecting surface, and are connected with the top layer reflecting surface of its top through the column that the semi-girder top makes progress.Promptly reached the effect that flexible support is provided for top layer reflecting surface 26, made that again effective area of raster at top layer reflecting surface 26 centers is enough big.When reflecting surface did not apply voltage up and down, the reflecting surface distance was n λ/2 (λ is a lambda1-wavelength, and n is a positive integer) up and down, and this moment, phase differential was 0, and ± 1 energy is almost 0, and diffraction energy concentrates on 0 grade, and grating light modulator is equivalent to a catoptron.Make drop-down λ/4 distances under the effect of removable slit at electrostatic attraction when having applied up and down certain voltage difference between the reflecting surface; The reflecting surface distance is (2n-1) λ/4 up and down; This moment, grating light modulator was equivalent to a rectangular channel phase grating; Phase differential is л, under the ideal situation about 81% diffraction energy concentrate on ± 1 grade, and 0 grade of energy is almost 0.Like this 0 grade or ± 1 grade place convergent mirror 6, incident light is realized " opening " and "off" state along with the driving voltage of photomodulator is different, just arrives or can not arrive the state of detector 7.
Fig. 3 is the linear array with single random grating translation optical modulator formation of structure shown in Figure 2.Because the optical diffraction principle of rectangular channel phase grating; Gap between the unit pixel is also served as the regional part of effective optical diffraction through the bottom reflecting surface 25 that covers on it with top layer reflecting surface grating 26 together; So on the optical diffraction direction, form seamless optical modulation effect fully, the optical interference of having avoided the mirrored photomodulator unit pixel gap of DMD to cause effectively.
Adopt raster translation optical modulator linear array 5 to realize by the spatial modulation of the spectrum face after the dispersion element beam split, as shown in Figure 4, the corresponding optical channel of each pixel.When pixel status was " opening ", the light of this optical channel of process can reach sensitive detection parts through subsequent optical path; When pixel status was " pass ", the light of this optical channel of process can not reach sensitive detection parts, has been diffracted into other locus.Open the pixel in the raster translation optical modulator linear array 5 successively according to being driven like this by the corresponding spectral position programming after the dispersion element beam split; Make each the wavelength components timesharing in the spectral information arrive detector 7; Then can realize the compression of spectrum dimension information, reach the purpose that reduces the detector dimension with raster translation optical modulator linear array 5.
Claims (4)
1. imaging spectrometer based on raster translation optical modulator is characterized in that: it is made up of receiving optics (2), dispersion element (3), imaging mirror (4), raster translation optical modulator array (5), convergent mirror (6), detector (7); Said dispersion element (3) is arranged on the emitting light path of receiving optics (2); Imaging mirror (4), raster translation optical modulator array (5) are set in turn on the emitting light path of dispersion element (3); Convergent mirror (6), detector (7) are set in turn on the emitting light path of raster translation optical modulator array (5); The radiation information of object is imaged on the dispersion element (3) through said receiving optics (2) in chronological order line by line; After dispersion element (3) beam split, be imaged onto on the grating translation optical modulator array able to programme (5) through imaging mirror (4) again; Through programming drives to raster translation optical modulator array (5); The fairing preface of different wave length is passed through; And converge on the detector (7) through convergent mirror (6), the space dimension information that obtains object through data processing is at last tieed up information with spectrum; Raster translation optical modulator array (5) is a linear array, the corresponding optical channel of each pixel cell of raster translation optical modulator array (5), and when pixel status was " opening ", the light of this optical channel of process can reach sensitive detection parts through subsequent optical path; When pixel status is " pass "; Light through this optical channel can not reach sensitive detection parts, is diffracted into other locus, and the making alive programming drives according to undertaken one by one by the corresponding spectral position after dispersion element (3) beam split; Open the pixel in the raster translation optical modulator array (5) successively; Make each the wavelength components timesharing in the spectral information arrive detector (7), realize the spectrum dimension information of object is carried out the timesharing gating that corresponding detector (7) is a linear array detector.
2. the imaging spectrometer based on raster translation optical modulator according to claim 1 is characterized in that: said receiving optics (2) preferably is made up of newtonian, Cassegrain's formula or Ritchie-Ke Laiqinshi reflecting telescope mode.
3. the imaging spectrometer based on raster translation optical modulator according to claim 1 is characterized in that: said dispersion element (3) is reflective gratings, transmission-type grating or prism.
4. the imaging spectrometer based on raster translation optical modulator according to claim 1 is characterized in that: said imaging mirror (4) and convergent mirror (6) are reflective or transmission-type mirror.
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| CN106092318B (en) * | 2016-06-02 | 2018-07-24 | 北京印刷学院 | A kind of total-reflection type broadband multi-optical spectrum imaging system |
| KR102577524B1 (en) * | 2017-05-25 | 2023-09-12 | 10103560 캐나다 리미티드 | High-efficiency multiplexing |
| US10809124B2 (en) * | 2018-05-07 | 2020-10-20 | Perkinelmer Health Sciences, Inc. | Spectrometers and instruments including them |
| CN109357761B (en) * | 2018-08-06 | 2021-02-12 | 北京理工大学 | Local spectrum high-resolution imaging spectrometer system |
| CN109357760A (en) * | 2018-08-06 | 2019-02-19 | 北京理工大学 | A kind of imaging spectrometer system based on spatial light modulator |
| CN112484857B (en) * | 2020-11-04 | 2023-04-07 | 西北工业大学宁波研究院 | Spectral imaging system and method based on DMD |
| CN115031838A (en) * | 2022-05-05 | 2022-09-09 | 西安应用光学研究所 | Wavelength calibration method for scanning type double-layer secondary diffraction linear array spectrometer |
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| US6853449B2 (en) * | 2003-01-28 | 2005-02-08 | Honeywell International Inc. | Programmable diffraction grating sensor |
| CN1645183A (en) * | 2005-01-13 | 2005-07-27 | 重庆大学 | Raster optical modulator with translational reflective mirror and array thereof |
| CN1658009A (en) * | 2005-01-13 | 2005-08-24 | 重庆大学 | Raster translation optical modulator and array |
| CN1664612A (en) * | 2005-03-18 | 2005-09-07 | 中国科学院上海技术物理研究所 | Wide viewing field and high resolution ratio imaging arrangement for pushbroom optical spectrum imagers |
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| JP2007178523A (en) * | 2005-12-27 | 2007-07-12 | Nikon Corp | Wavelength selection switch |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6853449B2 (en) * | 2003-01-28 | 2005-02-08 | Honeywell International Inc. | Programmable diffraction grating sensor |
| CN1645183A (en) * | 2005-01-13 | 2005-07-27 | 重庆大学 | Raster optical modulator with translational reflective mirror and array thereof |
| CN1658009A (en) * | 2005-01-13 | 2005-08-24 | 重庆大学 | Raster translation optical modulator and array |
| CN1664612A (en) * | 2005-03-18 | 2005-09-07 | 中国科学院上海技术物理研究所 | Wide viewing field and high resolution ratio imaging arrangement for pushbroom optical spectrum imagers |
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