CN1641389A - Two-dimensional collimation microlens array for array diode laser - Google Patents
Two-dimensional collimation microlens array for array diode laser Download PDFInfo
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- CN1641389A CN1641389A CN 200510011114 CN200510011114A CN1641389A CN 1641389 A CN1641389 A CN 1641389A CN 200510011114 CN200510011114 CN 200510011114 CN 200510011114 A CN200510011114 A CN 200510011114A CN 1641389 A CN1641389 A CN 1641389A
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- 238000000034 method Methods 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 239000013307 optical fiber Substances 0.000 claims description 10
- 238000004020 luminiscence type Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract 3
- 239000000654 additive Substances 0.000 abstract 1
- 230000000996 additive effect Effects 0.000 abstract 1
- 238000001459 lithography Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
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Abstract
This is a kind of planar collimating micro-lens array of diode laser emitter, and is related to a the structure design of a kind of planar collimating micro-lens array of diode laser emitter which can be batched produced and has a low cost. The main technical characters of this invention is to process another curving plane that is just the micro-lens curving plane array in the direction of the fiber by the processing measures such as the ionic emission, the lithography, the cautery, the laser and so on the basis of universal linear collimating fiber. Because this invention requires linear process, it can process a line collimating fiber at the same time. Therefore the processing cost of each micro-lens array is low and is fit for large-scale batched production. Besides we can use only one micro-lens array to synchronously have planar collimating with high precision to the different emanative angle in two directions of the fast and the slow axis of the array diode laser emitter. What's more, there isn't any additive interfacial wastage. So it has the characters of high collimating efficiency, low processing cost and convenient optical assembly.
Description
Technical field
The present invention relates to a kind of array diode laser two-dimensional collimation method and device, the structural design of the low-cost two-dimensional collimation microlens array for array diode laser that is particularly suitable for producing in batches belongs to optical field.
Background technology
Diode laser (comprising the array diode laser) is because characteristics such as volume is little, electro-optical efficiency height obtain application more and more widely, as laser ranging, Laser Processing, laser surgey etc.But diode laser is because its special active area waveguiding structure, and the laser corrugated that it sends is not a plane wave, neither spherical wave but class Gaussian image spreading beam.Promptly in the direction of vertical P-N knot and the direction of parallel P-N knot, just so-called fast, slow-axis direction, the angle of divergence is different, and the angle of divergence is very big, is 30 °～60 ° on quick shaft direction, is 8 °～10 ° on slow-axis direction; Such light beam makes the application of diode laser be subjected to restriction to a great extent, so an urgent demand is carried out two-dimensional collimation to the both direction of diode laser array.
By analysis to domestic array diode laser (hereinafter to be referred as LDA) inner structure, the Bar inside that can find at single LDA, each luminescence unit of slow-axis direction is formed by semiconductor technology, and positional precision is very high, can reach μ m level; Quick shaft direction is owing to semiconductor technology and heat conduction indium layer is inhomogeneous, and positional precision is less better, can only reach 20-30 μ m level; And between Bar and Bar because the cause of electrode outlet line, positional precision is the poorest, can only reach 100-200 μ m level, and the inclination of the Bar that causes thus also can reach 0.6 °～1.2 °.Therefore, in the face of the encapsulation precision present situation of LDA, have only and separately each Bar of LDA is carried out two-dimensional collimation with enough thin one dimension microlens array and just can reach the collimation effect of getting well.And this one dimension microlens array or the aspherical microlens array that different radius-of-curvature arranged at both direction to be proofreading and correct astigmatism, but the difficulty of processing of this microlens array is big, and the cost height is difficult to mass production.Collimate the fast and slow axis of LD respectively with two lenticules (slow axis is a microlens array), but this method is debug difficulty, collimation efficient is low, and the collimation effect is relatively poor relatively.For example Chinese patent open (notification number: 2454954) and international monopoly PCT/EP02/06041, PCT/EP99/02944 all adopt two lenticules to collimate the fast and slow axis of LD respectively.
Summary of the invention
The purpose of this invention is to provide a kind of two-dimensional collimation microlens array for array diode laser, it is low to be intended to overcome in the prior art collimation efficient to array diode laser two-dimensional collimation, the collimation weak effect, debug difficulty and difficulty of processing is big, the cost height is difficult for deficiency and the defective produced in batches.
Technical scheme of the present invention is as follows: a kind of two-dimensional collimation microlens array for array diode laser, it is characterized in that: at the general little lenticule curved array that is processed with of one dimension collimating optical fibre upper edge optical axis direction, the same optical axis of each luminescence unit of each lens axis of lenticule curved array and array diode laser.
The said curved surface of the present invention is sphere or aspheric surface; Said one dimension collimating optical fibre cross section is circle or D shape.
Lenticule curved array of the present invention adopts ion sputtering, photoetching, chemical corrosion or laser accurate to process.
The present invention compared with prior art, have the following advantages and the high-lighting effect: the present invention proposes a kind of low-cost two-dimensional collimation microlens array for array diode laser that is suitable for producing in batches, its major technique characteristics be exactly at present general one dimension collimating optical fibre basis by methods such as ion sputtering, photoetching, burn into Laser Processings along processing another curved surface (being the lenticule curved array) on the optical fiber direction, just can carry out the microlens array that high-precision two-dimensional collimates thereby only produce to the astigmatic bundle that LDA sends with a two-dimensional collimation element.Because of the presently claimed invention is one dimension processing, so can process simultaneously row's collimating optical fibre, therefore, the low processing cost of every microlens array is suitable for large-scale batch production.And only adopt a microlens array just can be simultaneously the fast axle of array diode laser and the different angles of divergence on the slow axis both direction to be carried out high-precision two-dimensional to collimate, there is not additional interface loss, so, collimation efficient higher (near general one-dimension optical-fiber collimation), and processing cost is low, and optics is debug conveniently.
Description of drawings
Fig. 1 is the optical texture synoptic diagram that utilizes two-dimensional array of micro-lenses collimation LDA provided by the invention.
Embodiment
Two-dimensional collimation microlens array for array diode laser 2 provided by the invention is the little lenticule curved array that are processed with of a face upper edge optical axis direction at general one dimension collimating optical fibre, and each lenticule curved surface can be sphere or aspheric surface; The cross section of used one dimension collimating optical fibre is circle or D shape.The same optical axis of each luminescence unit of each lens axis of described lenticule curved array and array diode laser 1.Lenticule curved array 2 can process by micro-processing methods such as ion sputtering, photoetching, chemical corrosion or laser accurate processing, as long as guarantee each lens axis of lenticule curved array and the same optical axis of each luminescence unit of array diode laser 1, just can carry out the high-precision two-dimensional collimation to the astigmatic bundle that array diode laser 1 sends.
Claims (4)
1. two-dimensional collimation microlens array for array diode laser, it is characterized in that: in the one side of general one dimension collimating optical fibre along the little lenticule curved array (2) that is processed with of optical axis direction, the same optical axis of each luminescence unit of each lens axis of described lenticule curved array and array diode laser (1).
2. according to the described two-dimensional collimation microlens array of claim 1, it is characterized in that: described lenticule curved surface is sphere or aspheric surface.
3. according to the described two-dimensional collimation microlens array of claim 1, it is characterized in that: described one dimension collimating optical fibre cross section is circle or D shape.
4. according to the described two-dimensional collimation microlens array of claim 1, it is characterized in that: described lenticule curved array adopts ion sputtering, photoetching, chemical corrosion or laser accurate to process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100111147A CN1299128C (en) | 2005-01-07 | 2005-01-07 | Two-dimensional collimation microlens array for array diode laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100111147A CN1299128C (en) | 2005-01-07 | 2005-01-07 | Two-dimensional collimation microlens array for array diode laser |
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| Publication Number | Publication Date |
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| CN1641389A true CN1641389A (en) | 2005-07-20 |
| CN1299128C CN1299128C (en) | 2007-02-07 |
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| CNB2005100111147A Expired - Fee Related CN1299128C (en) | 2005-01-07 | 2005-01-07 | Two-dimensional collimation microlens array for array diode laser |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102713688A (en) * | 2010-01-15 | 2012-10-03 | 肖特公开股份有限公司 | Collimated light source and method for the production thereof |
| CN106502036A (en) * | 2016-12-30 | 2017-03-15 | 中国华录集团有限公司 | A kind of optical projection system for encapsulating semiconductor laser alignment structure with many luminous points |
| CN111564759A (en) * | 2019-02-14 | 2020-08-21 | 上海桐钻光电科技有限公司 | Frequency difference laser light source |
| CN114609708A (en) * | 2020-12-09 | 2022-06-10 | 微凤凰有限公司 | Microlens array having aspherical surface shape on first side |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5181224A (en) * | 1991-05-10 | 1993-01-19 | University Of California | Microoptic lenses |
| US6556352B2 (en) * | 2000-08-23 | 2003-04-29 | Apollo Instruments Inc. | Optical coupling system |
| CN1553243A (en) * | 2003-05-29 | 2004-12-08 | 中国科学院光电技术研究所 | Method for realizing high-power semiconductor laser beam collimation by using micro-lens array |
-
2005
- 2005-01-07 CN CNB2005100111147A patent/CN1299128C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102713688A (en) * | 2010-01-15 | 2012-10-03 | 肖特公开股份有限公司 | Collimated light source and method for the production thereof |
| CN102713688B (en) * | 2010-01-15 | 2014-10-01 | 肖特公开股份有限公司 | Collimated light source and method for the production thereof |
| CN106502036A (en) * | 2016-12-30 | 2017-03-15 | 中国华录集团有限公司 | A kind of optical projection system for encapsulating semiconductor laser alignment structure with many luminous points |
| CN111564759A (en) * | 2019-02-14 | 2020-08-21 | 上海桐钻光电科技有限公司 | Frequency difference laser light source |
| CN114609708A (en) * | 2020-12-09 | 2022-06-10 | 微凤凰有限公司 | Microlens array having aspherical surface shape on first side |
| CN114609708B (en) * | 2020-12-09 | 2024-09-06 | 微凤凰有限公司 | Microlens array having aspherical surface shape on first side |
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| CN1299128C (en) | 2007-02-07 |
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Granted publication date: 20070207 Termination date: 20110107 |