CN1635397A - Laser scanning refraction/diffraction mixed f-theta mirror system - Google Patents
Laser scanning refraction/diffraction mixed f-theta mirror system Download PDFInfo
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- CN1635397A CN1635397A CN 200410093936 CN200410093936A CN1635397A CN 1635397 A CN1635397 A CN 1635397A CN 200410093936 CN200410093936 CN 200410093936 CN 200410093936 A CN200410093936 A CN 200410093936A CN 1635397 A CN1635397 A CN 1635397A
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Abstract
This invention relates to optics scanning lens system and especially to the f-theta lens used to attune the carbon dioxide laser emission wavelength range, which belongs to optics scanning lens system. The device comprises the light barrier, refractor, refractor or diffraction mixture lens and is characterized by the following: it sets the mixture lens behind the co-axis refractor according to the characteristics of the infrared irradiation window and its diffraction surface relievo.
Description
Technical field
The present invention relates to a kind of optical scanning mirror system, particularly be applied to the scanning f-theta mirror of tunable CO 2 laser wavelength coverage, belong to the laser optical scanning mirror system.
Background technology
The main emission wavelength ranges of tuning CO2 laser instrument is at 9.00～11.00 mu m wavebands.It is operated in predominant wavelength 10.6 μ m but be used for most designs of f-theta mirror that the CO2 laser scans uses now.The f-theta mirror technology of single wavelength is very perfect, there are a lot of companies to design and produced the f-theta mirror that is used for the CO2 laser scans of many different models, the user can select different f-theta mirrors according to the requirement of oneself, as Umicore Laser Optics Ltd.But the CO2 laser instrument is in laser engraving is used, because different substrates are for different wave length sensitivity difference, usually to select the highest wavelength of sensitivity to carve, available tuning CO2 laser works is on different wavelength, but need to change the f-theta mirror, because most f-theta mirror all is to design therein on certain wavelength.Therefore the design wavelength scope has very realistic meanings at all available f-theta mirror of 9.00～11.00 μ m.
Can both work in 9.00～11.00 mu m waveband scopes if make the f-theta mirror, then should in this wavelength band, realize achromatism, be optimized design again for two traditional refractor systems and can not meet the demands, can only increase refractor sheet number.But increase refractor sheet number two shortcomings are arranged.One, make the f-theta mirror system become complicated heavy; Two, increase cost, well-known infra-red material is very expensive.
Summary of the invention
The objective of the invention is under the condition that does not increase f-theta mirror system refractor sheet number, to introduce diffraction relief surface type, realize achromatism and eliminate various monochromatic aberrations, make the f-theta mirror can be used in the interior arbitrary wavelength of 9.00～11.00 mu m waveband scopes.
The present invention has designed a f-theta mirror that works in CO2 laser instrument predominant wavelength 10.6 μ m earlier, its design object is: entrance pupil diameter 14mm, scan angle+20 °, effective focal length 250mm, sweep limit 175mm * 175mm, this system is a dioptric system, structure comprises light hurdle 1-1, plane of refraction 1-2... as shown in Figure 1.Introduce diffraction relief surface type and reach achromatic purpose on this system-based, make the f-theta mirror can be operated in arbitrary wavelength in the tunable wavelength band of tuning CO2 laser instrument, refraction/diffraction mixing f-theta mirror is structure as shown in Figure 5.
The technical scheme that the present invention is concrete:
This laser scanning refraction/diffraction mixing f-theta mirror system, comprise light hurdle, refractor, the plane of scanning motion, be characterized in: place refraction/diffraction hybrid lens 5-8 in the back of refractor 5-7, with being mounted with light hurdle 5-1, refractor 5-7, refraction/diffraction hybrid lens 5-8, plane of scanning motion 5-6 on the optical axis successively, the front surface of refraction/diffraction hybrid lens prepares diffraction relief surface type 5-4, be placed on the side near refractor, its reverse side is plane of refraction 5-5.
Beneficial effect of the present invention: in light path, adopt refraction/diffraction hybrid lens, utilized light refraction and diffraction two specific characters in the air, increased the degree of freedom in the optical design process, can break through many limitations of conventional optical systems.Simultaneously because diffraction optical element has negative dispersion and positive light coke, it is excessive to have solved in traditional dioptric system common refractor focal power, total system complex structure, huge, heavy problem; It is crooked serious to have solved the refractive surface that achromatism brought in the dioptric system, the problem that monochromatic aberration is big.The present invention shows and the incomparable advantage of traditional dioptric system.The invention is characterized in the characteristics of utilizing refraction/diffraction hybrid lens, in tunable CO2 laser instrument emission band scope, proofreaied and correct aberration.The present invention provides a kind of brand-new thought and notion for the optical design of the f-theta mirror that matches with laser scanning.
Description of drawings
Fig. 1 is the structural representation that works in the f-theta mirror of CO2 laser instrument predominant wavelength
Fig. 2 is the optical transfer function that works in CO2 laser instrument predominant wavelength f-theta mirror system
Fig. 3 is the hot spot point diagram that works in the CO2 laser instrument predominant wavelength f-theta mirror system plane of scanning motion
Fig. 4 works in the curvature of field and the f-theta distortion of CO2 laser instrument predominant wavelength f-theta mirror system
Fig. 5 is the structural representation of f-theta mirror of the present invention
Fig. 6 is the optical transfer function of the present invention in 9.0～11.0 mu m waveband systems
Fig. 7 is the chromatic longitudiinal aberration curve of the present invention in 9.0～11.0 mu m waveband systems
Fig. 8 is the hot spot point diagram of the present invention at the plane of scanning motion of 9.0～11.0 mu m waveband systems
Fig. 9 is the hot spot point diagram of the present invention on wavelength 9.0 μ m system scan planes
Figure 10 is the hot spot point diagram of the present invention on wavelength 10.0 μ m system scan planes
Figure 11 is the hot spot point diagram of the present invention on wavelength 11.0 μ m system scan planes
Figure 12 is the hot spot point diagram of the present invention on wavelength 10.6 μ m system scan planes
Figure 13 utilizes the curvature of field and the f-theta distortion of the present invention in 9.0～11.0 mu m waveband systems
Wherein: 1-1, light hurdle 1-2, plane of refraction 1-3, plane of refraction 1-4, plane of refraction 1-5, plane of refraction 1-6, plane of scanning motion 1-7, refractor 1-8, refractor 5-1, light hurdle 5-2, plane of refraction 5-3, plane of refraction 5-4, diffraction relief surface type 5-5, plane of refraction 5-6, plane of scanning motion 5-7, refractor 5-8, refraction/diffraction hybrid lens
Embodiment
This laser scanning refraction/diffraction mixing f-theta mirror system, comprise light hurdle, refractor, the plane of scanning motion, it is characterized in that: place refraction/diffraction hybrid lens 5-8 in the back of refractor 5-7, with being mounted with light hurdle 5-1, refractor 5-7, refraction/diffraction hybrid lens 5-8, plane of scanning motion 5-6 on the optical axis successively, the front surface of refraction/diffraction hybrid lens prepares diffraction relief surface type 5-4, be placed on the side near refractor, its reverse side is plane of refraction 5-5.
Refractor 5-7 is concavees lens.
The front surface 5-4 of refraction/diffraction hybrid lens is a diffraction relief surface type, and rear surface 5-5 is a sphere; The substrate of diffraction relief surface type 5-4 can be plane, sphere or aspheric surface.
Refractor, refraction/diffraction hybrid lens material can be selected wherein one or both the combination of infrared ZnSe and GaAs.
Below in conjunction with accompanying drawing the present invention is described in further detail:
As shown in Figure 1, work in the structural representation of the f-theta mirror of CO2 laser instrument predominant wavelength, during work, when the predominant wavelength of CO2 laser instrument emission is positive refractor 1-8 by focal power, light produces a series of aberrations such as spherical aberration, coma, the curvature of field, by focal power during for negative refractor 1-7, and can spherical aberration corrector, aberrations such as coma, the curvature of field, and produce necessary amount of distortion, finish the distribution of focal power.So the light that comes out to be focused at the plane of scanning motion from f-theta mirror shown in Figure 1 has well been eliminated various monochromatic aberrations and has been satisfied the relation of f-θ.But, because it just designs on the predominant wavelength of CO2 laser instrument, yet different engraving media is to different wavelength reflection sensitivity differences, usually select the highest wavelength of sensitivity to carve, this just needs to make different f-theta mirrors, and change often, lose time so not only but also increased cost.
Fig. 5 is the structural representation of f-theta mirror of the present invention.
When the present invention works, when the light of infrared waves section 9-11 μ m is positive refraction/diffraction hybrid lens 5-8 by focal power, light produces a series of aberrations such as spherical aberration, coma, the curvature of field and aberration, by having the refractor 5-7 of negative power, can spherical aberration corrector, aberration such as coma, the curvature of field, and produce necessary amount of distortion, finish the distribution of focal power, diffraction surfaces 5-4 correcting chromatic aberration.So the light that comes out to be focused at the plane of scanning motion from f-theta mirror shown in Figure 5 has well been eliminated various monochromatic aberrations and aberration and has been satisfied the relation of f-θ.
The substrate of diffraction relief surface type 5-4 can be plane or sphere or aspheric surface, and substrate is chosen as the plane in structure shown in Figure 5.Two surfaces at refraction/diffraction hybrid lens 5-8 prepare diffraction relief surface type 5-4 and plane of refraction 5-5 respectively.
The material of refractor 1-7,1-8,5-7, refraction/diffraction hybrid lens 5-8 can be selected the combination of any among ZnSe and the GaAs or two kinds.
Claims (4)
1. laser scanning refraction/diffraction mixing f-theta mirror system, comprise light hurdle, refractor, the plane of scanning motion, it is characterized in that: refraction/diffraction hybrid lens (5-8) is placed in the back at refractor (5-7), with being mounted with light hurdle (5-1), refractor (5-7), refraction/diffraction hybrid lens (5-8), the plane of scanning motion (5-6) on the optical axis successively, the front surface of refraction/diffraction hybrid lens prepares diffraction relief surface type (5-4), be placed on the side near refractor, its reverse side is plane of refraction (5-5).
2. according to the described laser scanning refraction/diffraction of claim 1 mixing f-theta mirror system, it is characterized in that: refractor (5-7) is concavees lens.
3. according to the described laser scanning refraction/diffraction of claim 1 mixing f-theta mirror system, it is characterized in that: the front surface of refraction/diffraction hybrid lens (5-4) is a diffraction surfaces, and rear surface (5-5) is sphere; The substrate of diffraction relief surface type (5-4) can be plane, sphere or aspheric surface.
4. laser scanning refraction/diffraction mixing f-theta mirror system according to claim 1, its feature also is: refractor, refraction/diffraction hybrid lens material can be selected wherein one or both combination of infrared ZnSe, GaAs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410093936 CN1635397A (en) | 2004-12-14 | 2004-12-14 | Laser scanning refraction/diffraction mixed f-theta mirror system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410093936 CN1635397A (en) | 2004-12-14 | 2004-12-14 | Laser scanning refraction/diffraction mixed f-theta mirror system |
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| Publication Number | Publication Date |
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| CN1635397A true CN1635397A (en) | 2005-07-06 |
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| CN 200410093936 Pending CN1635397A (en) | 2004-12-14 | 2004-12-14 | Laser scanning refraction/diffraction mixed f-theta mirror system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113589322A (en) * | 2021-07-06 | 2021-11-02 | 太原理工大学 | VCSEL linear array for multi-line laser radar |
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2004
- 2004-12-14 CN CN 200410093936 patent/CN1635397A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113589322A (en) * | 2021-07-06 | 2021-11-02 | 太原理工大学 | VCSEL linear array for multi-line laser radar |
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