CN1632905A - 真空阴极弧直管过滤器 - Google Patents
真空阴极弧直管过滤器 Download PDFInfo
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- CN1632905A CN1632905A CN 200410044010 CN200410044010A CN1632905A CN 1632905 A CN1632905 A CN 1632905A CN 200410044010 CN200410044010 CN 200410044010 CN 200410044010 A CN200410044010 A CN 200410044010A CN 1632905 A CN1632905 A CN 1632905A
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- metal
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- vacuum
- cathode arc
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2004100440101A CN100447934C (zh) | 2004-11-05 | 2004-11-05 | 真空阴极弧直管过滤器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2004100440101A CN100447934C (zh) | 2004-11-05 | 2004-11-05 | 真空阴极弧直管过滤器 |
Publications (2)
Publication Number | Publication Date |
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CN1632905A true CN1632905A (zh) | 2005-06-29 |
CN100447934C CN100447934C (zh) | 2008-12-31 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2004100440101A Active CN100447934C (zh) | 2004-11-05 | 2004-11-05 | 真空阴极弧直管过滤器 |
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CN (1) | CN100447934C (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101321427B (zh) * | 2008-07-22 | 2011-03-16 | 核工业西南物理研究院 | 直流磁过滤阴极真空弧等离子体源 |
CN101346030B (zh) * | 2008-08-25 | 2011-09-14 | 哈尔滨工业大学 | 可控多元阴极弧等离子体形成装置及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6288244A (ja) * | 1985-10-15 | 1987-04-22 | Matsushita Electronics Corp | マグネトロン用フイルタ装置 |
US5282944A (en) * | 1992-07-30 | 1994-02-01 | The United States Of America As Represented By The United States Department Of Energy | Ion source based on the cathodic arc |
US5279723A (en) * | 1992-07-30 | 1994-01-18 | As Represented By The United States Department Of Energy | Filtered cathodic arc source |
DE19739527C2 (de) * | 1997-09-09 | 2003-10-16 | Rossendorf Forschzent | Vakuumbogen-Plasmaquelle mit Magnet-Partikelfilter |
US6016036A (en) * | 1998-01-28 | 2000-01-18 | Eaton Corporation | Magnetic filter for ion source |
CN2471791Y (zh) * | 2001-03-29 | 2002-01-16 | 阎鹏勋 | 一种沉积高质量薄膜低温等离子体装置 |
CN1459516A (zh) * | 2003-02-20 | 2003-12-03 | 大连理工大学 | 高真空磁过滤弧源 |
-
2004
- 2004-11-05 CN CNB2004100440101A patent/CN100447934C/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101321427B (zh) * | 2008-07-22 | 2011-03-16 | 核工业西南物理研究院 | 直流磁过滤阴极真空弧等离子体源 |
CN101346030B (zh) * | 2008-08-25 | 2011-09-14 | 哈尔滨工业大学 | 可控多元阴极弧等离子体形成装置及方法 |
Also Published As
Publication number | Publication date |
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CN100447934C (zh) | 2008-12-31 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190715 Address after: 150000 Heilongjiang Province, Harbin City Economic Development Zone haping Road District Dalian road and Xingkai road junction Patentee after: Harbin University of Technology Robot Group Co., Ltd. Address before: 150001 Harbin, Nangang, West District, large straight street, No. 92 Patentee before: Harbin Institute of Technology |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201118 Address after: 276800 middle of Qingdao Road, Shandong, Rizhao City Patentee after: RIZHAO DAXIANG HOUSE CONSTRUCTION Co.,Ltd. Address before: 150000 Heilongjiang Province, Harbin City Economic Development Zone haping Road District Dalian road and Xingkai road junction Patentee before: HIT ROBOT GROUP Co.,Ltd. |
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TR01 | Transfer of patent right |