CN1632476A - 基于无序多壁碳纳米管的红外激光功率探测器 - Google Patents

基于无序多壁碳纳米管的红外激光功率探测器 Download PDF

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CN1632476A
CN1632476A CN 200510011172 CN200510011172A CN1632476A CN 1632476 A CN1632476 A CN 1632476A CN 200510011172 CN200510011172 CN 200510011172 CN 200510011172 A CN200510011172 A CN 200510011172A CN 1632476 A CN1632476 A CN 1632476A
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infrared laser
power detector
laser power
thin slice
detector based
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CN100356148C (zh
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刘晓萌
孙家林
朱嘉麟
李俊林
吴念乐
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Tsinghua University
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Tsinghua University
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Abstract

基于无序多壁碳纳米管的红外激光功率探测器,该探测器包括一片由多壁碳纳米管粉末压成的薄片和一金属基片,即把多壁碳纳米管薄片的一面与金属基片紧密接触,另一面覆以金属导电薄膜。工作时,先把金属导电薄膜和金属基片分别用导线和外电路测量仪表相连接,然后将被测红外激光入射到金属导电薄膜的表面,这样,随着入射光强的变化,电路中将产生不同强度的光致电流,且在光强增大时电流增大,光强减小时电流减小。本发明相对于现有技术,结构简单,制作方便,而且光电响应速度快,对红外波段光非常敏感,其探测响应时间为秒量级。该器件在红外激光功率测量领域具有广阔的应用前景。

Description

基于无序多壁碳纳米管的红外激光功率探测器
技术领域
本发明涉及一种光电子学器件,特别涉及一种利用碳纳米管制造的红外激光功率探测器。
背景技术
已有的红外探测技术资料表明,红外激光功率探测器元件主要采用对红外光有一定光电响应特性的半导体材料、常规化合物材料以及特殊高分子复合材料等制成,其结构和原理也是多种多样。碳纳米管自其诞生以来,一直为人们所关注,燎原般地渗透到科研和生活的各个领域;合成制备碳纳米管的成熟技术也多有报道。例如文献[Zhang XF,Cao AY,Wei BQ,LiYH,Wei JQ,Xu CL,and Wu DH,CHEMICAL PHYSICS LETTERS 2002,362:285-290],[CiLJ,Wei JQ,Wei BQ,Liang J,Xu CL,and Wu DH,CARBON 2001,39(3):329-335],[WeiJQ,Ci LJ,Jiang B,Li YH,Zhang XF,Zhu HW,Xu CL,and Wu DH,JOURNAL OF MATERIALSCHEMISTRY 2003,13(6):1340-1344],[Yu Hao,Zhang Qunfeng,Wei Fei,Qian Weizhong,Luo Guohua,Carbon 41(2003)2855-2863]和[中国发明专利,公开号:1456498]中均有相关的报道。文献资料表明,碳纳米管具有特殊的能级结构和优异的电学性质,但是,如何利用纳米材料研制一种结构更简单,制作方便且光电响应快的红外激光功率探测器是目前值得研究的问题。
发明内容
本发明的目的是充分利用纳米材料所具有的特殊的能级结构和优异的电学性质,开发研制一种具有结构简单,制作方便,且对红外波段光有敏感响应的红外激光功率探测器。
本发明的技术方案如下:
一种基于无序多壁碳纳米管的红外激光功率探测器,其特征在于:包括一片由多壁碳纳米管粉末压成的薄片,设置在薄片一侧且与薄片紧密接触的金属基片和设置在薄片另一侧的金属导电薄膜,并在金属导电薄膜和金属基片上引出电极。
本发明提供一种基于无序多壁碳纳米管粉末制成的激光功率探测器,相对于现有技术,结构简单,制作方便,而且光电响应速度快,对红外波段光非常敏感,其探测响应时间为秒量级。该器件在红外激光功率测量领域具有广阔的应用前景。
附图说明
图1为本发明所用多壁碳纳米管的扫描电子显微镜图像。
图2为本发明实施例中多壁碳纳米管薄片的纵剖面图。
图3为本发明提供的激光功率探测器实施例的结构示意图。其中1为金属基片,2为多壁碳纳米管粉末压制的薄片,3为银胶薄膜,4表示激光光束的入射方向。
图4为本发明提供的激光功率探测器对波长为780nm的红外激光器的功率测量曲线。
图5为本发明提供的激光功率探测器对波长为1064nm的红外激光器的功率测量曲线。
图6为本发明提供的激光功率探测器对波长为10.6μm的红外激光器的功率测量曲线。
图7为本发明提供的激光功率探测器在对激光功率进行测量时的时间响应曲线。
具体实施方式
图3是本发明激光功率探测器的结构示意图,它包括一片由多壁碳纳米管粉末压成的薄片2,设置在薄片一侧且与薄片紧密接触的金属基片1和设置在薄片另一侧的金属导电薄膜或金属导电胶膜3,并在金属导电薄膜和金属基片上引出电极。本发明采用的多壁碳纳米管粉末可以是用任何方法制备的多壁碳纳米管;薄片可以采用圆形、方形或其它形状;金属导电薄膜可采用金、银、铜、铝等导电金属制作,或采用含所述金属的导电胶膜。制作方法是将多壁碳纳米管粉末压成薄片,然后将多壁碳纳米管薄片的一侧与金属基片1紧密接触,另一侧覆以金属导电薄膜或均匀涂敷金属导电胶膜3。工作时,先把金属导电薄膜或金属导电胶膜3和金属基片分别用导线和外电路测量仪表相连接,然后将被测红外激光入射到金属导电薄膜或金属导电胶膜3上。研究结果证实,当红外激光照射在该区域时,会在回路中产生光致电流,且这一电流的大小与激光光强在很大的区域范围内呈线性关系。即当激光光强增大时,产生的电流也增大;反之,当激光光强减小时,产生的电流也减小,因而,可以通过测量光致电流的大小来达到检测激光功率大小的目的。这样,便构成了上述红外激光功率探测器。
下面举出一个具体实施例对本发明作进一步说明。
本发明采用多壁碳纳米管粉末(微观结构如图1所示)压制的层状圆形薄片(侧剖面图如图2所示),圆片的一侧涂敷银胶薄膜,另一面与铜基片紧密接触,构成无序多壁碳纳米管红外激光功率探测器(如图3所示)。分别将780nm、1064nm和10.6μm的红外激光4照射在银胶薄膜上,均可产生较强的光致电流(分别如图4、图5、图6所示)。该功率探测器最高实验测量功率为10W(如图6所示)。从该功率探测器对激光照射时的时间响应曲线(如图7所示)可知,该功率探测器的测量响应时间小于3秒。

Claims (1)

1.一种基于无序多壁碳纳米管的红外激光功率探测器,其特征在于:包括一片由多壁碳纳米管粉末压成的薄片(2),设置在薄片一侧且与薄片紧密接触的金属基片(1)和设置在薄片另一侧的金属导电薄膜(3),并在金属导电薄膜和金属基片上引出电极。
CNB200510011172XA 2005-01-14 2005-01-14 基于无序多壁碳纳米管的红外激光功率探测器 Expired - Fee Related CN100356148C (zh)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101639368A (zh) * 2008-07-18 2010-02-03 泰勒斯公司 机电装置及制造方法
CN101871818A (zh) * 2010-06-25 2010-10-27 清华大学 红外探测器
CN101314464B (zh) * 2007-06-01 2012-03-14 北京富纳特创新科技有限公司 碳纳米管薄膜的制备方法
CN103487141A (zh) * 2012-06-12 2014-01-01 清华大学 光强分布的检测系统
CN111380614A (zh) * 2018-12-29 2020-07-07 清华大学 红外探测器及红外成像仪

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6400088B1 (en) * 2000-11-15 2002-06-04 Trw Inc. Infrared carbon nanotube detector
JP3924472B2 (ja) * 2002-02-05 2007-06-06 株式会社ジェイテクト カーボンナノチューブを用いたセンサ
JP4514402B2 (ja) * 2002-10-28 2010-07-28 シャープ株式会社 半導体素子及びその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101314464B (zh) * 2007-06-01 2012-03-14 北京富纳特创新科技有限公司 碳纳米管薄膜的制备方法
CN101639368A (zh) * 2008-07-18 2010-02-03 泰勒斯公司 机电装置及制造方法
CN101871818A (zh) * 2010-06-25 2010-10-27 清华大学 红外探测器
CN103487141A (zh) * 2012-06-12 2014-01-01 清华大学 光强分布的检测系统
CN103487141B (zh) * 2012-06-12 2015-07-29 清华大学 光强分布的检测系统
CN111380614A (zh) * 2018-12-29 2020-07-07 清华大学 红外探测器及红外成像仪

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