CN1624421A - Depth of parallelism measuring method - Google Patents
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- CN1624421A CN1624421A CN 200310116917 CN200310116917A CN1624421A CN 1624421 A CN1624421 A CN 1624421A CN 200310116917 CN200310116917 CN 200310116917 CN 200310116917 A CN200310116917 A CN 200310116917A CN 1624421 A CN1624421 A CN 1624421A
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Abstract
A measuring method for parallelism, when the first beam of light is used to measure interference fringe on each mirror surface of light tested, the second one is also used to do the measurement of inclination correcting unit, and in accordance with correcting data from interference fringe image information of each interference fringe, correcting each information of mirror surface of light slitting and measures parallelism between mirror surface of light with high accuracy. Objective table is in the first position, by the light from light source with short interference distance, the image information of the first interference fringe is acquired, and by the light from light source with long interference distance the image information of the second interference fringe is acquired. Then objective table is in the second position, and the image information of the third interference fringe of mirror surface of light and that of the forth interference fringe of reflecting mirror are acquired. The information on inclination of the image information of the second and forth interference fringe is calculated, and the difference of the information of the first and third one is corrected, and the parallel uneven between light mirror surface of light are measured.
Description
Technical field
The present invention relates to a kind of depth of parallelism assay method that the depth of parallelism between a plurality of light reflection surfaces is measured accurately, particularly relate to a kind of for example about a kind of as the occasion that on pedestal, has compartment of terrain configuration glass plate as thin as a wafer, having under the situation of a plurality of smooth planes of reflection the depth of parallelism assay method that can measure its interplanar depth of parallelism.
Background technology
For example, the sort of on pedestal in the parts with small arranged spaced glass plate as thin as a wafer, just there is the requirement that to measure accurately the surface or the depth of parallelism between the back side and the pedestal (because comprise the local depth of parallelism, so be also referred to as parallel inequality in the following description) of parallel plane glass.
As everyone knows, because this mensuration requires to get rid of because of the interference of the interference fringe that face caused beyond the plane was seized, so in existing known techniques, but utilize the aplanatism elongated interferometer that has carried the Michelson's type that to export the short light beam of interference distance etc. to carry out.
Below an example of the mensuration of the interferometer that utilizes this Michelson's type etc. is specifically described, it can be arranged at these parts on the objective table that detected body mounting uses with the form that parallel plane glass be positioned at the top, at first this objective table is moved to along the vertical direction and can observe the position of interference fringe by the surface or the back side of parallel plane glass, and obtain the 1st interference fringe image, then this objective table is moved to along the vertical direction and can observe the position of interference fringe by pedestal, and obtain the 2nd interference fringe image, poor according to each inclination information of the 1st interference fringe image and the 2nd interference fringe image measured both parallel inequalities then.
Because resembling detected body mounting objective table as described above is equipped on the interferometer, though make its high-precision formation that moves up and down smoothly and can keep the posture of detected body so adopt, in any case how much after mobile detected also understand some inclination with mobile preceding detected.Therefore, as above-mentioned example, in the occasion that must measure the surface of parallel plane glass or the back side and the parallel inequality of pedestal with high precision, owing to follow of the variation of detected body mounting, be difficult on precision, obtain satisfied measurement result with detected the degree of tilt that moves of objective table.
This shows that above-mentioned existing depth of parallelism assay method still has defective, and demands urgently further being improved.In order to solve the defective of existing depth of parallelism assay method, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but does not see always that for a long time suitable design finished by development, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that above-mentioned existing depth of parallelism assay method exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, actively studied innovation, in the hope of founding a kind of new depth of parallelism assay method, can improve general existing depth of parallelism assay method, make it have more practicality.Through constantly research, design, and after studying repeatedly and improving, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the defective that existing depth of parallelism assay method exists, and provide a kind of new depth of parallelism assay method, technical matters to be solved is to make it that a kind of illumination light of disturbing in the interference fringe of utilizing the face beyond can preventing to produce from detected is provided, and when utilizing interferometer that the depth of parallelism between a plurality of light reflection surfaces is measured accurately, make the detected face that to measure move to the move operation of the detected body mounting of desired location even follow with objective table, and make the posture of detected body produce, the also depth of parallelism assay method that this inclination can be proofreaied and correct accurately, thereby be suitable for practicality more, and have the value on the industry.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of depth of parallelism assay method according to the present invention's proposition, be a kind ofly will have detected detected body mounting constituting by a plurality of light reflection surfaces of arranging along the vertical direction on objective table, and utilize interferometer that this a plurality of detected depth of parallelism is carried out method for measuring, it may further comprise the steps:
As the illumination light of interferometer, employing can be changed the 2nd light beam that produces the 1st light beam of the interference fringe that contrast changes according to the distance of the reference plane of aforementioned detected and interferometer, do not produce the interference fringe of certain contrast according to the distance of this detected and this reference plane and constitute;
About from a plurality of aforementioned detected the selected the 1st detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 1st set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 1st interference fringe image, simultaneously about with the slant correction faces of aforementioned a plurality of detected relative summary secured in parallel, will utilize the resulting interference fringe of aforementioned the 2nd light beam to take pictures and obtain the 2nd interference fringe image;
Afterwards, aforementioned objective table is moved at above-below direction, and about from aforementioned a plurality of detected the selected the 2nd detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 2nd set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 3rd interference image, about aforementioned slant correction face, obtain the 4th interference fringe image simultaneously to utilizing the resulting interference fringe of aforementioned the 2nd light beam to take pictures;
Afterwards, according to poor from aforementioned the 2nd interference fringe image and the resulting inclination information of aforementioned the 4th interference fringe image respectively, to proofreading and correct from the difference of aforementioned the 1st interference fringe image and the resulting inclination information of aforementioned the 3rd interference fringe image respectively, and measure the aforementioned the 1st detected and the aforementioned the 2nd detected 's the depth of parallelism.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid depth of parallelism assay method, but wherein said the 1st light beam constitute by the short light of interference distance, but aforesaid the 2nd light beam is made of the long light of interference distance.
Aforesaid depth of parallelism assay method, the multi-wavelength wave mode light that wherein said the 1st light beam is exported by the variable wavelength LASER Light Source constitutes, and single wavelength wave mode light that described the 2nd light beam is exported by the variable wavelength LASER Light Source constitutes.
Aforesaid depth of parallelism assay method, wherein said slant correction face is the minute surface that is disposed on the aforementioned objective table.
Aforesaid depth of parallelism assay method, wherein said interferometer are the aplanatism elongated interferometer of Michelson's type etc.
Aforesaid depth of parallelism assay method, wherein said interferometer are the not aplanatism elongated interferometer of luxuriant and rich with fragrance assistant type etc.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
Depth of parallelism assay method of the present invention, be a kind ofly will have detected detected body mounting constituting by a plurality of light reflection surfaces of arranging along the vertical direction on objective table, and utilize interferometer that this a plurality of detected depth of parallelism is carried out method for measuring, it is characterized in that:
As the illumination light of interferometer, be to adopt the 2nd light beam that produces the 1st light beam of the interference fringe that contrast changes according to the distance of the reference plane of aforementioned detected and interferometer, do not produce the interference fringe of certain contrast according to the distance of this detected and this reference plane to be changed and constitute;
About from a plurality of aforementioned detected the selected the 1st detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 1st set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 1st interference fringe image, simultaneously about with the slant correction faces of aforementioned a plurality of detected relative summary secured in parallel, be to obtain the 2nd interference fringe image with utilizing the resulting interference fringe of aforementioned the 2nd light beam to take pictures;
Afterwards, this objective table is moved at above-below direction, and about from aforementioned a plurality of detected the selected the 2nd detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 2nd set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 3rd interference image, about aforesaid slant correction face, be to obtain the 4th interference fringe image simultaneously to utilizing the resulting interference fringe of aforementioned the 2nd light beam to take pictures;
Afterwards, according to poor from aforementioned the 2nd interference fringe image and the resulting inclination information of aforementioned the 4th interference fringe image respectively, to proofreading and correct from the difference of aforementioned the 1st interference fringe image and the resulting inclination information of aforementioned the 3rd interference fringe image respectively, and measure the aforementioned the 1st detected and the aforementioned the 2nd detected 's the depth of parallelism.
And, but can make aforesaid the 1st light beam be the short light of interference distance, but and make aforesaid the 2nd light beam be the long light of interference distance.
In this case, make the aplanatism elongated interferometer of aforesaid interferometer for Michelson's type etc.
And, can make aforementioned the 1st light beam be multi-wavelength wave mode light, and make aforesaid the 2nd light beam be single wavelength wave mode light from the output of variable wavelength LASER Light Source from the output of variable wavelength LASER Light Source.
In this case, making aforesaid interferometer is the not aplanatism elongated interferometer of luxuriant and rich with fragrance assistant type etc.
And aforesaid slant correction face can be the minute surface that is disposed on the aforementioned objective table.
Here, the above-mentioned depth of parallelism is meant the parallel degree of 2 light reflection surfaces, is all parallel degree and local both general names of parallel degree (parallel inequality).
Via as can be known above-mentioned, the invention relates to a kind of depth of parallelism assay method, it is when but each light reflection surface that utilizes the 1st short light beam of interference distance to detected body carries out interference fringe mensuration, but the 2nd light beam that also utilizes interference distance length carries out the mensuration about the slant correction face, and according to correction data from the interference fringe image information of each slant correction face, inclination information to each light reflection surface is proofreaied and correct, thereby the depth of parallelism of carrying out accurately between light reflection surface is measured.It is that objective table 30 is set in the 1st position, but and the light that sent of the short light source 11 of utilization interference distance, obtain the 1st interference fringe image information about light reflection surface 20a, but the light that utilizes the long light source 12 of interference distance to be sent obtains the 2nd interference fringe image information about catoptron 26.Objective table 30 is set in the 2nd position, and similarly obtains about the 3rd interference fringe image information of light reflection surface 20b and about the 4th interference fringe image information of catoptron 26 with above-mentioned.Ask the inclination information of the 2nd, the 4th interference fringe image information, and in view of the above the difference of the inclination information of the 1st, the 3rd interference fringe image information is proofreaied and correct, and measure parallel inequality between light reflection surface 20a, b.
In sum, the depth of parallelism assay method of special construction of the present invention, a kind of illumination light of disturbing in the interference fringe of utilizing the face beyond can preventing to produce from detected is provided, and when utilizing interferometer that the depth of parallelism between a plurality of light reflection surfaces is measured accurately, make the detected face that to measure move to the move operation of the detected body mounting of desired location even follow with objective table, and make the posture of detected body produce, the also depth of parallelism assay method that this inclination can be proofreaied and correct accurately, thus be suitable for practicality more.It has above-mentioned many advantages and practical value, and in class methods, do not see have similar design to publish or use and really genus innovation, no matter it is all having bigger improvement on method or on the function, have technically than much progress, and produced handy and practical effect, and more existing depth of parallelism assay method has the multinomial effect of enhancement, thus be suitable for practicality more, and have the extensive value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of instructions, below with preferred embodiment of the present invention and conjunction with figs. describe in detail as after.
Description of drawings
Fig. 1 is the generalized schematic of the interferometer of the 1st example of the present invention.
Fig. 2 is the generalized schematic of the interferometer of the 2nd example of the present invention.
Fig. 3 is the synoptic diagram of the effect of the interferometer among Fig. 2.
Fig. 4 is the interferometer that utilizes among Fig. 2, and multi-wavelength wave mode light is used as illumination light, and the explanation synoptic diagram when obtaining interference fringe image about detected face.
Fig. 5 is the interferometer that utilizes among Fig. 2, when the mensuration of detected body objective table and Fig. 4, under the identical state, single wavelength wave mode light used as illumination light, and the explanation synoptic diagram when obtaining interference fringe image about mirror surface.
Fig. 6 is the interferometer that utilizes among Fig. 2, and multi-wavelength wave mode light is used as illumination light, and the explanation synoptic diagram when obtaining interference fringe image about the detected body back side.
Fig. 7 is the interferometer that utilizes among Fig. 2, when the mensuration of detected body objective table and Fig. 6, under the identical state, single wavelength wave mode light used as illumination light, and the explanation synoptic diagram when obtaining interference fringe image about mirror surface.
Fig. 8 is the interferometer that utilizes among Fig. 2, and multi-wavelength wave mode light is used as illumination light, and make objective table move gained about detected interference fringe picture image pattern.
Fig. 9 is the interferometer that utilizes among Fig. 2, under the identical state, single wavelength wave mode light is used the interference fringe picture image pattern about mirror surface of gained as illumination light when the mensuration of detected body objective table and Fig. 8.
Figure 10 is the interferometer that utilizes among Fig. 2, and multi-wavelength wave mode light is used as illumination light, and makes objective table move the interference fringe picture image pattern about the detected body back side of gained.
Figure 11 is the interferometer that utilizes among Fig. 2, under the identical state, single wavelength wave mode light is used the interference fringe picture image pattern about mirror surface of gained as illumination light when the mensuration of detected body objective table and Figure 10.
10: 11: the 1 light sources of interferometer main body
Light source 13 in 12: the 2: the Beam Transformation mirror
14: beam expander 15: beam splitter
16: datum plate 16a: reference field
17: condenser lens 18: imaging lens system
19: camera head (CCD camera) 20: detected body
20a～c: light reflection surface (detected face) 25:PZT objective table
26: catoptron 30: detected body objective table
40: computing machine 50: monitor
100: interferometer 101: interferometer
110: interferometer main body 111: semiconductor laser light resource (LD)
112: collimator lens 113: divergent lens
114: beam splitter 115: collimator lens
116: datum plate 116a: reference field
117: parallel plane glass plate (detected body) 117a: detected
117b: detected back side 118: imaging lens system
119: camera head (CCD camera) 120: computing machine
121: monitor 122: power supply (LD power supply)
123: function generator 124: piezoelectric element
126: catoptron 130: detected body objective table
140: laser light
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, to its concrete grammar of depth of parallelism assay method, step, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.Below utilize diagram that the depth of parallelism assay method about example of the present invention is specifically described.
The 1st example
Seeing also shown in Figure 1ly, is the generalized schematic that is used to implement about the formation of the interferometer of the depth of parallelism assay method of the 1st example.
As shown in FIG., this interferometer 100 adopts the interferometer main body 10 that is equipped with Michelson's type (Te Huaiman-Green's type), make detected body 20 keep moving up and down with a plurality of light reflection surface 20a～c and can be around 2 the detected body objective table 30 of deflection, computing machine 40 and monitor 50, and by detected body 20 is remained under the state on the detected body objective table 30, a plurality of light reflection surface 20a～c are carried out interference fringe as detected face respectively measure, thereby can measure the parallel inequality between these a plurality of light reflection surfaces accurately and constitute.
In addition, the detected body 20 in this example is a kind of parts that for example dispose the glass plate of thin thickness on pedestal with slight gap, and for example, light reflection surface 20a is light tight, and light reflection surface 20b, c are transparent surface.
Above-mentioned interferometer main body 10, but but comprise long laser instrument grade in an imperial examination 2 light sources 12 of short Halogen lamp LED grade in an imperial examination 1 light source 11 interference distances of interference distance, these two light sources 11,12 are carried out the camera head 19 of datum plate 16, condenser lens 17, imaging lens system 18 and CCD camera etc. of Beam Transformation mirror 13, beam expander 14, beam splitter 15, the reflection-type of the conversion of alternative formula.
In interferometer main body 10, make illumination light that the 1st light source 11 or the 2nd light source 12 exported to the light beam divisional plane 15a of beam splitter 15 incident, and in this light beam divisional plane 15a, be divided into transmitted beam and folded light beam 2 parts.And, make transmitted beam incident datum plate 16 and with its reflected light as reference light, and make detected of folded light beam incident and with its reflected light as object light, and utilize camera head 19 to obtain and measure with reference to the interference fringe that the interference of light produced of light and object light and to interference fringe image information by these.
In addition, datum plate 16 is supported by PZT objective table 25 by a plurality of piezoelectric element (not shown) that PZT driving circuit not shown in the figures is connected.And, in interferometer 100, be used to indication from computing machine 40, by piezoelectric element being applied certain voltage and drives this piezoelectric element in certain mark time, datum plate 16 is moved along optical axis direction, and make according to the view data that should move the interference fringe that change from CCD camera 19 to computing machine 40 outputs.
And, in this example, on detection bodies objective table 30, maintain catoptron 26 as main points.
As mentioned above, but but from the output light of the 1st short light source 11 of interference distance with from the output light of the 2nd long light source 12 of interference distance, utilize Beam Transformation mirror 13 to be converted, be disposed at Beam Transformation mirror 13 under the situation of illustrated position from the output light of the 2nd light source 12, it is (not shown in the figures to move to certain retreating position at Beam Transformation mirror 13 from illustrated position on the other hand; Down with) situation under from the output light of the 1st light source 11, respectively to beam expander 14 incidents.In addition, mobile both can the utilization manually of this Beam Transformation mirror 13 carried out, and also can carry out automatically according to the program of computing machine 40.
And, but the output light from above-mentioned the 1st light source 11 is short because of interference distance, so when being aplanatism when long just with reference to light with from the object light of certain light reflection surface 20a～c from datum plate 16, promptly the institute's allocation in the moving range of detected body objective table 30 only produces the interference fringe about certain light reflection surface 20a～c.Therefore, when moving of the above-below direction that utilizes detected body objective table 30 (arrow A), when forming the state that produces interference fringe about required light reflection surface 20a～c, just can not produce interference fringe from other light reflection surface 20a～c, resulting interference fringe information can be got rid of interference fringe and disturb, and can embody the surface configuration of required light reflection surface 20a～c well.
On the other hand, but the output light from above-mentioned the 2nd light source 12 is long because of interference distance, even so from datum plate 16 with reference to light and not long for aplanatism from the object light of certain light reflection surface 20a～c, also can produce interference fringe about certain light reflection surface 20a～c, can obtain interference fringe information at the gamut in the moving range of detected body objective table 30 about required light reflection surface 20a～c.Therefore, in this example, be used to obtain interference fringe information about each position of catoptron 26 from the output light of the 2nd light source 12, wherein this catoptron 26 follow the moving of detected body objective table 30 that move up and down and only mobile phase with distance.
Below will utilize the mensuration program of depth of parallelism assay method of the 1st example of above-mentioned interference instrument 100 to describe.
(1), at first, Beam Transformation mirror 13 is moved setting from position shown in Figure 1 to certain retreating position, but and will use as illumination light from the output light of the 1st short light source 11 of interference distance.That carries out detected body objective table 30 moves up and down operation and the operation of 2 axial deflections, to be used to the output light from the 1st light source 11, forms the interference fringe about the 1st light reflection surface 20a on the imaging apparatus of camera head 19.
(2), to utilizing the 1st light source 11 resulting, interference fringe about the 1st light reflection surface 20a is taken pictures by camera head 19, and the interference fringe image information (the 1st interference fringe image information) of gained is stored in the storer (not shown) of computing machine 40.
(3), then, under detected body objective table 30 keeps motionless state, make Beam Transformation mirror 13 move to position shown in Figure 1, but and will use as illumination light from the output light of the 2nd long light source 12 of interference distance.
(4), to utilizing the 2nd light source 12 resulting, take pictures by camera head 19 about the interference fringe of catoptron 26, and resulting interference fringe image information (the 2nd interference fringe image information) be stored in the storer of computing machine 40.
(5), make beam converter 13 move to from position shown in Figure 1 fixed retreating position, but and will use as illumination light from the output light of the 1st short light source 11 of interference distance.That carries out detected body objective table 30 moves up and down operation and the operation of 2 axial deflections, to be used to the output light from the 1st light source 11, forms the interference fringe about the 2nd light reflection surface 20b on the imaging apparatus of camera head 19.
(6), to utilizing the 1st light source 11 resulting, take pictures by camera head 19 about the interference fringe of the 2nd light reflection surface 20b, and the interference fringe image information (the 3rd interference fringe image information) of gained be stored in the storer of computing machine 40.
(7), then, under detected body objective table 30 keeps motionless state, make Beam Transformation mirror 13 move to position shown in Figure 1, but and will use as illumination light from the output light of the 2nd long light source 12 of interference distance.
(8), to utilizing the 2nd light source 12 resulting, take pictures by camera head 19 about the interference fringe of catoptron 26, and resulting interference fringe image information (the 4th interference fringe image information) be stored in the storer of computing machine 40.
(9), ask for respectively the poor of the inclination information of extracting out above-mentioned the 2nd interference fringe image information of storing from storer and above-mentioned the 4th interference fringe image information, and the difference of the inclination information of extracting out from above-mentioned the 1st interference fringe image information and above-mentioned the 3rd interference fringe image information is respectively proofreaied and correct according to this difference.
(10), according to needing, the 3rd light reflection surface 20c is carried out said procedure (5)～(8), obtain about the 5th interference fringe image information of the 3rd light reflection surface 20c and about the 6th interference fringe image information of the catoptron 26 of this moment, and carry out said procedure (9), the parallel inequality between this light reflection surface 20c and light reflection surface 20a or the light reflection surface 20b is proofreaied and correct.
In this example, as mentioned above, when the mensuration of each light reflection surface 20a～c, also carry out mensuration about catoptron 26, and obtain the slant correction data respectively, so can be to the inclination information of each light reflection surface 20a～c of being corrected according to this correction data poor, promptly the parallel inequality between each light reflection surface 20a～c is carried out high-precision mensuration.
In addition, the parallel inequality between light reflection surface 20b and the light reflection surface 20c is the uneven thickness of glass plate in previous example.
In above-mentioned example, but the output light from the 1st light source 11 is made of the short light of interference distance, but the output light from the 2nd light source 12 is made of the long light of interference distance, and these 2 outputs are changed when the mensuration of light reflection surface 20a～c and during the mensuration of catoptron 26 each other, but also can be as following illustrated example, but the multi-wavelength wave mode light that uses the variable wavelength LASER Light Source to be exported replaces the short light of above-mentioned interference distance, but single wavelength wave mode of using the variable wavelength LASER Light Source to be exported replaces the long light of above-mentioned interference distance, and the light that utilizes the multi-wavelength wave mode carries out the mensuration of light reflection surface, utilizes the light of single wavelength wave mode to carry out the mensuration of catoptron.So, can be as described later, the interferometers such as phenanthrene assistant type that use aplanatism elongated not are as interferometer.
The 2nd example
Below, the depth of parallelism assay method about the 2nd example is described, but at first utilize Fig. 2 that the interferometer that is used to implement this depth of parallelism assay method is described.
As shown in FIG., this interferometer 101, comprise the interferometer main body 110 of utilizing the phenanthrene assistant type that interference fringe observes the surface configuration of detected 117a of transparent parallel plane glass plate (detected body) 117, computing machine 120, monitor 121, semiconductor laser light resource (LD) 111 power supply (LD power supply) 122, be used for producing function generator 123 to the control signal of controlling from the output current value of this power supply (LD power supply) 122.
Above-mentioned interference instrument main body 110 comprise from the collimator lens 112 of the coherent light incident of semiconductor laser light resource 111, divergent lens 113, beam splitter 114, collimator lens 115, with detected body (parallel plane glass plate) 117 between relative and have the datum plate 116 of reference field 116a and imaging lens system 118 and a CCD camera head 119 that the interference fringe of utilizing interference of light gained is taken pictures by work space.
In this interferometer main body 110, make reference field 116a from the laser light 140 incident datum plates 116 of semiconductor laser light resource 111, in this reference field 116a, be divided into transmitted beam and folded light beam 2 parts, and make detected 117a of transmitted beam incident parallel plane glass plate 117, with its reflected light as object light, and with the reflected light among the reference field 116a as reference light, and will utilize these object light and with reference to the interference light that the interference of light produced of light by collimator lens 115, beam splitter 114, imaging lens system 118 guiding CCD camera heads 119, and in this CCD camera head 119, interference fringe is taken pictures.
Taken interference fringe is resolved at computing machine 120, and can measure the surface configuration of detected 117a by this.In addition, the surface configuration of taken interference fringe and detected 117a being resolved shows in monitor 121.
And, as the parallel plane glass plate 117 of detected body be maintained at be used to make detected body to keep moving up and down and can be around 2 the detected body objective table 130 of deflection.
On detected body objective table 130, maintain the catoptron 26 of above-mentioned the 1st example and the catoptron 126 of performance same function.
In addition, the piezoelectric element 124 of datum plate 116 by being connected with not shown PZT driving circuit supported by not shown datum plate support member.And the indication according to from computing machine 120 applies certain voltage and this piezoelectric element 124 is driven on this piezoelectric element 124, and makes datum plate 116 only move a phase bit part along optical axis direction (left and right directions among the figure) by this.Utilize this view data that moves the interference fringe that changes to be output, and these plural numbers are opened view data carry out the stripe pattern parsing to computing machine 120.
Above-mentioned semiconductor laser light resource 111 uses the type with temperature controller energy, such as the aforementioned, when making injection current one regularly, the laser light (near for example single wavelength of wavelength X 650nm) that can vibrate and obtain single wavelength wave mode, on the other hand, when injection current was changed, laser light wavelength and the light intensity exported changed, and formed the laser light of multi-wavelength wave mode.
And, be the CCD of 1/30 (second) during above-mentioned camera head 119 uses 1 optical storage.
The above-mentioned control signal that above-mentioned function generator 123 is exported is square wave (comprising stepped square wave), and its frequency is for for example about 200HZ, and speed setting does not produce the degree of flicker in the time will utilizing the captured image information of CCD to regenerate.
And, in the interferometer 101 of this example,, adopt formation shown below for the generation that stops interference fringe to be disturbed.
Promptly, when the laser light of output multi-wavelength wave mode, utilize the semiconductor laser light resource 111 of single compressional wave type, and during 1 optical storage to the element (CCD of CCD camera head 119) that is subjected to interference of light striped, the laser light of light source 111 being exported with the cycle of enough weak points 140 is modulated to a plurality of wavelength, and will utilize said elements to be subjected to light from the interference light of detected body 117, thereby can make this interference light carry out integration in during above-mentioned 1 optical storage.
Semiconductor laser light resource has by making injection current change the feature that wavelength is also changed, be subjected to the element of interference of light striped owing to have during certain optical storage, so in the multi-wavelength wave mode of this example, by wavelength is scanned than enough fast speed during its 1 optical storage, compare with the occasion of utilizing the light source export multi-wavelength light simultaneously that interference fringe is observed, can obtain same result.
Then, utilize Fig. 3 of the variation of expression interference fringe contrast, conceptually illustrate about situation about the surface of detected 117a being measured by the light of above-mentioned multi-wavelength wave mode.In the interferometer 101 of this example, as shown in Figure 3, when to the variable in distance of optical axis, the interference fringe contrast produces periodic the variation.In Fig. 3, by setting to become peak value at detected 117a (the 1st light reflection surface), can form the good interference fringe of contrast at reference field 116a and detected surface 117a, and the interference fringe contrast that makes detected body back side 117b is 0, thereby the interference fringe of eliminating detected body back side 117b is disturbed.
Like this, in this example, but utilize the light of multi-wavelength wave mode to be equivalent in above-mentioned the 1st example, utilize the short light of interference distance, on the other hand, but utilize the light of single wavelength wave mode to be equivalent in above-mentioned the 1st example, utilize the long light of interference distance.
Below, carried out utilizing the above-mentioned interference instrument apparatus, about the mensuration program of the depth of parallelism assay method of the 2nd example, one side simultaneously describes with reference to Fig. 4～Fig. 7.In addition, here, about above-mentioned detected 117a as the 1st mensuration face described with situation about measuring as the 2nd parallel inequality (uneven thickness) of measuring the above-mentioned detected body back side 117b of face.
(1), at first, adjust function generator 123, and set, and the laser light of this multi-wavelength wave mode is used as illumination light so that the light beam that semiconductor laser light resource 111 is exported is certain multi-wavelength wave mode.That carries out detected body objective table 130 moves up and down operation and the operation of 2 axial deflections, to utilize the laser light of multi-wavelength wave mode, on the imaging apparatus of camera head 119, form about the good interference fringe of the contrast of detected 117a (as shown in Figure 4).
(2), resulting to the laser light of utilizing the multi-wavelength wave mode, interference fringe about detected 117a is taken pictures by camera head 119, and the interference fringe image information (the 1st interference fringe image information) of gained is stored in the storer (not shown) of computing machine 120.
(3), then, under detected body objective table 130 keeps motionless state, adjust function generator 123, and change the light beam that semiconductor laser light resource 111 is exported and become certain single wavelength wave mode, and laser light that should list wavelength wave mode is used as illumination light.
(4), resulting to the laser light of utilizing single wavelength wave mode, interference fringe (with reference to Fig. 5) about catoptron 126 is taken pictures by camera head 119, and resulting interference fringe image information (the 2nd interference fringe image information) is stored in the storer of computing machine 120.
(5), adjust function generator 123, and change, and the laser light of this multi-wavelength wave mode used as illumination light so that the light beam that semiconductor laser light resource 111 is exported becomes certain multi-wavelength wave mode.That carries out detected body objective table 130 moves up and down operation and the operation of 2 axial deflections, to utilize the laser light of this multi-wavelength wave mode, forms the interference fringe (as shown in Figure 6) about detected body back side 117b on the imaging apparatus of camera head 119.
(6), resulting to the laser light of utilizing the multi-wavelength wave mode, interference fringe about detected 117b is taken pictures by camera head 119, and the interference fringe image information (the 3rd interference fringe image information) of gained is stored in the storer (not shown) of computing machine 120.
(7), then, under detected body objective table 130 keeps motionless state, adjust function generator 123, and change the light beam that semiconductor laser light resource 111 is exported and become certain single wavelength wave mode, and laser light that should list wavelength wave mode is used as illumination light.
(8), resulting to the laser light of utilizing single wavelength wave mode, interference fringe (with reference to shown in Figure 7) about catoptron 126 is taken pictures by camera head 119, and resulting interference fringe image information (the 4th interference fringe image information) is stored in the storer of computing machine 120.
(9), ask for respectively the poor of the inclination information of extracting out above-mentioned the 2nd interference fringe image information of storing from storer and above-mentioned the 4th interference fringe image information, and the difference of the inclination information of extracting out from above-mentioned the 1st interference fringe image information and above-mentioned the 3rd interference fringe image information is respectively proofreaied and correct according to this difference.
In this example, as mentioned above, when the mensuration of detected 117a and detected body back side 117b, also carry out mensuration about catoptron 26, and obtain the slant correction data respectively, so can be to the inclination information of detected 17a being corrected according to this correction data and detected body back side 117b poor, the parallel inequality (uneven thickness) of a promptly detected 117a and detected body back side 117b is carried out high-precision mensuration.
Seeing also Fig. 8-shown in Figure 11, is to utilize resulting each the interference fringe image information of above-mentioned each mensuration program.In addition, in each figure, the big interference fringe on right side is about detected 117a and detected body back side 117b, and the interference fringe in the small circular in left side is about catoptron 126.
Promptly, Fig. 8 uses as illumination light for the light with the multi-wavelength wave mode, and detected body objective table 130 is moved, diagram when obtaining interference fringe image information (corresponding the 1st interference fringe image information) about detected 117a, Fig. 9 is for keeping at detected body objective table 130 under the motionless state, the light of single wavelength wave mode is used the diagram when obtaining interference fringe image information (corresponding the 2nd interference fringe image information) about catoptron 126 as illumination light.
And, Figure 10 uses as illumination light for the light with the multi-wavelength wave mode, and detected body objective table 130 is moved, diagram when obtaining interference fringe image information (corresponding the 3rd interference image information) about detected body back side 117b, Figure 11 is for keeping at detected body objective table 130 under the motionless state, the light of single wavelength wave mode is used the diagram when obtaining interference fringe image information (corresponding the 4th interference fringe image information) about catoptron 126 as illumination light.
In addition,, be not limited to above-mentioned example, also can adopt the form of other various changes as depth of parallelism assay method of the present invention.For example, the order of measuring light reflection surface no matter adopt which type of order can, the order that can begin, or measure according to the order that the light reflection surface from the nearer side of distance light source begins according to light reflection surface from a distance light source side far away.
And the light reflection surface as measuring gained is not limited to above-mentioned type, if for for example to become the light reflection surface of stepped configuration, even then also can measure for lighttight light reflection surface.
As the order of operation of above-mentioned a plurality of detected depth of parallelism being carried out timing, can consider various forms, as long as making the result is that the present invention's illustrated " poor according to the inclination information that obtains from the 2nd interference fringe image information and the 4th interference fringe image information respectively, state that the difference of the inclination information that obtains from the 1st interference fringe image information and the 3rd interference fringe image information is respectively proofreaied and correct " gets final product.
In addition, even, also be not limited to above-mentioned example, can use various types of interferometers as measuring used interferometer.
And, depth of parallelism assay method of the present invention is applicable to the detected body of various forms, to for example resembling the applied optics such as semiconductor fabrication, size is little, have in the mensuration of the parts that need carry out a plurality of light reflection surfaces that high precision sets etc., and is particularly useful.
As mentioned above, as utilize depth of parallelism assay method of the present invention, as the illumination light of interferometer, employing can will produce the 1st light beam of the interference fringe that contrast changes, not produce the formation that the 2nd light beam of the interference fringe of certain contrast is changed according to the distance of this detected and this reference plane according to the distance of the reference plane of detected and interferometer; When utilizing above-mentioned the 1st light beam that each light reflection surface on the detected body is carried out interference fringe mensuration, also can utilize the 2nd light beam, to measuring about the slant correction face of the configuration of relative slightly secured in parallel with above-mentioned catoptron, and from the interference fringe image information of each slant correction face, obtain the slant correction data, so can be accurately poor to the inclination information of each light reflection surface of being corrected according to this correction data, promptly the depth of parallelism between each light reflection surface is measured.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the method that can utilize above-mentioned announcement and technology contents are made a little change or be modified to the equivalent embodiment of equivalent variations, but every content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (8)
1, a kind of depth of parallelism assay method, be a kind ofly will have detected detected body mounting constituting by a plurality of light reflection surfaces of arranging along the vertical direction on objective table, and utilize interferometer that this a plurality of detected depth of parallelism is carried out method for measuring, it is characterized in that it may further comprise the steps:
Illumination light as interferometer, employing can be changed the 2nd light beam that produces the 1st light beam of the interference fringe that contrast changes according to the distance of the reference plane of aforementioned detected and interferometer, do not produce the interference fringe of certain contrast according to the distance of this detected and this reference plane and constitute
About selected the 1st detected of falling from a plurality of aforementioned detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 1st set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 1st interference fringe image, simultaneously about with the slant correction faces of aforementioned a plurality of detected relative summary secured in parallel, to utilize the resulting interference fringe of aforementioned the 2nd light beam to take pictures and obtain the 2nd interference fringe image
Afterwards, aforementioned objective table is moved at above-below direction, and about from aforementioned a plurality of detected the selected the 2nd detected, utilizing aforementioned the 1st light beam to produce the aforementioned objective table of the 2nd set positions of interference fringe, and under this state, this interference fringe taken pictures and obtain the 3rd interference image, about aforementioned slant correction face, obtain the 4th interference fringe image simultaneously to utilizing the resulting interference fringe of aforementioned the 2nd light beam to take pictures
Afterwards, according to poor from aforementioned the 2nd interference fringe image and the resulting inclination information of aforementioned the 4th interference fringe image respectively, to proofreading and correct from the difference of aforementioned the 1st interference fringe image and the resulting inclination information of aforementioned the 3rd interference fringe image respectively, and measure the aforementioned the 1st detected and the aforementioned the 2nd detected 's the depth of parallelism.
2, depth of parallelism assay method according to claim 1, but it is characterized in that wherein said the 1st light beam is made of the short light of interference distance, but aforementioned the 2nd light beam is made of the long light of interference distance.
3, depth of parallelism assay method according to claim 1, it is characterized in that the multi-wavelength wave mode light that wherein said the 1st light beam is exported by the variable wavelength LASER Light Source constitutes, single wavelength wave mode light that described the 2nd light beam is exported by the variable wavelength LASER Light Source constitutes.
4,, it is characterized in that wherein said slant correction face is the minute surface that is disposed on the aforementioned objective table according to the described depth of parallelism assay method of arbitrary claim in the claim 1 to 3.
5, depth of parallelism assay method according to claim 1 and 2 is characterized in that the aplanatism elongated interferometer of wherein said interferometer for Michelson's type etc.
6, depth of parallelism assay method according to claim 4 is characterized in that the aplanatism elongated interferometer of wherein said interferometer for Michelson's type etc.
7,, it is characterized in that wherein said interferometer is the not aplanatism elongated interferometer of luxuriant and rich with fragrance assistant type etc. according to claim 1 or 3 described depth of parallelism assay methods.
8, depth of parallelism assay method according to claim 4 is characterized in that wherein said interferometer is the not aplanatism elongated interferometer of luxuriant and rich with fragrance assistant type etc.
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| CNB200310116917XA CN1304818C (en) | 2003-12-01 | 2003-12-01 | Depth of parallelism measuring method |
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| CNB200310116917XA CN1304818C (en) | 2003-12-01 | 2003-12-01 | Depth of parallelism measuring method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308656C (en) * | 2005-08-12 | 2007-04-04 | 中国科学院上海光学精密机械研究所 | Apparatus for measuring parallelity of laser beam |
| CN102749044A (en) * | 2012-06-26 | 2012-10-24 | 深圳市华星光电技术有限公司 | Parallel detection system and method |
| CN102967277A (en) * | 2012-11-19 | 2013-03-13 | 尹玉军 | Method for measuring depth of parallelism of orienting pipes |
| US8743375B2 (en) | 2012-06-26 | 2014-06-03 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Parallelism measuring system and method thereof |
| CN104748699A (en) * | 2013-12-25 | 2015-07-01 | 财团法人金属工业研究发展中心 | Optical measurement method and optical measurement system |
| CN109073371A (en) * | 2016-04-19 | 2018-12-21 | Abb瑞士股份有限公司 | The device and method of tilt detection |
| CN111238419A (en) * | 2020-01-20 | 2020-06-05 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
| WO2020135891A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Laser parallelism detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4844616A (en) * | 1988-05-31 | 1989-07-04 | International Business Machines Corporation | Interferometric dimensional measurement and defect detection method |
| US6278809B1 (en) * | 1997-05-30 | 2001-08-21 | Ion Optics, Inc. | Fiber optic reflectance apparatus for in situ characterization of thin films |
| JP2001249014A (en) * | 2000-03-03 | 2001-09-14 | Mitsutoyo Corp | Parallelism measuring device for facing planes |
| JP2002071388A (en) * | 2000-09-04 | 2002-03-08 | Hitachi Electronics Eng Co Ltd | Diffraction grating encoder and positioning device of magnetic head |
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2003
- 2003-12-01 CN CNB200310116917XA patent/CN1304818C/en not_active Expired - Fee Related
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| CN1308656C (en) * | 2005-08-12 | 2007-04-04 | 中国科学院上海光学精密机械研究所 | Apparatus for measuring parallelity of laser beam |
| CN102749044A (en) * | 2012-06-26 | 2012-10-24 | 深圳市华星光电技术有限公司 | Parallel detection system and method |
| WO2014000334A1 (en) * | 2012-06-26 | 2014-01-03 | 深圳市华星光电技术有限公司 | Parallelism detection system and method |
| US8743375B2 (en) | 2012-06-26 | 2014-06-03 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Parallelism measuring system and method thereof |
| CN102749044B (en) * | 2012-06-26 | 2015-06-24 | 深圳市华星光电技术有限公司 | Parallel detection system and method |
| CN102967277A (en) * | 2012-11-19 | 2013-03-13 | 尹玉军 | Method for measuring depth of parallelism of orienting pipes |
| CN104748699A (en) * | 2013-12-25 | 2015-07-01 | 财团法人金属工业研究发展中心 | Optical measurement method and optical measurement system |
| CN109073371A (en) * | 2016-04-19 | 2018-12-21 | Abb瑞士股份有限公司 | The device and method of tilt detection |
| CN109073371B (en) * | 2016-04-19 | 2020-06-02 | Abb瑞士股份有限公司 | Apparatus and method for tilt detection |
| US11493338B2 (en) | 2016-04-19 | 2022-11-08 | Abb Schweiz Ag | Tilt detection apparatus and method thereof |
| WO2020135891A1 (en) * | 2018-12-25 | 2020-07-02 | 茂莱（南京）仪器有限公司 | Laser parallelism detector |
| CN111238419A (en) * | 2020-01-20 | 2020-06-05 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
| CN111238419B (en) * | 2020-01-20 | 2021-10-01 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
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