CN101033948A - Measurement system for three-dimensional deformation based on splitting optical fiber - Google Patents
Measurement system for three-dimensional deformation based on splitting optical fiber Download PDFInfo
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Abstract
This invention relates to three-dimensional deformation measurement system based on the beam fiber. It is made of a laser which provides light sources, image access system with a CCD camera and a system of spectrophotometric transmitting light and Phase-shift which is a 5-shape fiber. Through the rotary control of space position by the fiber the objects of deformation measurement in the vertical direction, the horizontal direction and the direction from the surface can be achieved. This invention has a rational structure compact, is easy to operate, can be applied to the deformation measurement on the surface of objects in static one-dimensional, two-dimensional and three-dimensional.
Description
Technical field
The present invention relates to the optical 3-dimensional deformation measuring system, particularly a kind of measurement system for three-dimensional deformation based on splitting optical fiber.
Background technology
Along with industrial expansion, people to material stressed after, the research of performance parameters such as the distortion of generation, stress, strain requires also to improve constantly.Can only be applied to metal stresses scale that object point measures to speckle The Application of Technology that can Measuring Object face zone from the past.Utilize the speckle technology that there have been many methods hardware system and the deformation process scheduling algorithm processing aspect that object carries out the deformation measurement of bidimensional or three-dimensional.
In the present at home document record, the technology of electronic speckle pattern interferometry commercial measurement body surface three-dimensional anamorphotic system is: adopt three laser instruments to shine to provide radiation source, the reference substance that irradiation testee and its side are placed from three different directions.Promote to stick on three catoptrons above the reference substance with PZT phase-shifter, being used to provides the reference light of corresponding three beams thing light interference and introduces phase shift.Before ccd video camera, place the big shearing prism, make the information on body surface information and the reference substance all enter among the CCD, in conjunction with four step phase-shifting techniques, three laser instruments shine measured object successively respectively, and the speckle pattern of being gathered is carried out computing and separate obtaining three independently deformation fields.But this system is because the quantity of laser instrument is many, and structure is huge, and three level crossing directions on the reference substance are adjusted difficulty, and because the separating effect of big shearing prism may influence the speckle image quality, and this system can not carry out the measurement of one dimension or two dimension separately.
In patent US 6188483 B1, measure in the system of three-dimensional object surface distortion, utilize a laser instrument that light source is provided, utilize spectroscope and reflective mirror characteristic, carry out beam split, pass light.Two twin-beam electronics diffusing class interference system and a surface deformation detection system are attached in the system, rely on four bundle laser beam finished surface internal strains of outgoing to detect respectively, and utilize a branch of and inner another light beams in the four bundle laser to constitute the surface deformation detection system.With the electronic speckle figure that obtains before and after the distortion use directly cut algorithm mutually handle after, obtain the 3 D deformation data.This system can carry out the measurement of one dimension, two dimension or 3 D deformation separately.Shortcoming is to adopt discrete element to carry out beam split, pass light, and optical device is various, and optics positions is placed the accuracy requirement height, and system debug precision prescribed height is adjusted operating difficulties.
Summary of the invention
The objective of the invention is at the defective that exists in the prior art, a kind of improved measurement system for three-dimensional deformation based on splitting optical fiber is provided, simple in structure, easy to operate, and can guarantee measuring accuracy.
In order to achieve the above object, design of the present invention is:
The present invention is primarily aimed at hardware system and improves and innovate, adopt one fen five type optical fiber to carry out beam split, pass light, getting wherein, four bundle branch optical fibers constitute two opposite internal strains detections, by being scheduled to of optical fiber exit ports angle of divergence parameter, can directly be met the divergent beams of system requirements, need not beam expander spare.In order to improve the deformation measurement precision, still adopt four step phase shift algorithm, adopt traditional introducing phase shifting method, in above-mentioned two pairs of coherent light beams, select wherein a branch of branch optical fiber exit ports position to paste a PZT phase-shifter respectively respectively, promotion by the PZT phase-shifter drives the branch optical fiber fine motion, just can introduce phase shift in this light beam.The light beam of shared wherein a branch of introducing phase shift in conjunction with the 5th bundle branch optical fiber, obtains to satisfy the coherent light beam of system requirements.Therefore, entire system is owing to the employing of optical fiber, and structure is simplified greatly, debugging operations is convenient, because the use of blocking switch, this system can carry out the measurement of one dimension, two dimension or 3 D deformation separately, and make the software configuration of image post-processed simply, and guaranteed measuring accuracy.
According to above-mentioned inventive concept, the present invention adopts following technical proposals:
A kind of measurement system for three-dimensional deformation based on splitting optical fiber, pass light and Phase Shifting System is formed by the image receiving system of a laser instrument that light source is provided, a band ccd video camera and beam split, it is characterized in that described beam split passes light and Phase Shifting System is one fen five type optical fibre light splitting biography light and Phase Shifting System.
The structure that above-mentioned one minute five type optical fibre light splitting passes light and Phase Shifting System is: the main fiber that comes from described laser instrument connects one fen fiber coupler input port of five through a fiber adjusting mount, the output port of fiber coupler connects five bundle fiber optic taps to carry out beam split and pass light: a branch of branch optical fiber is connected the image receiving system of described band ccd video camera, the output port of four bundle branch beams is respectively placed one and is blocked switch, the output port of four bundle branch optical fibers is aimed at testee respectively, wherein two branch optical fibers are fixed by Phase Shifting System, respectively paste a PZT phase-shifter in the Phase Shifting System, expansion by the PZT phase-shifter is moved, the branch optical fiber that drives its stickup moves, and phase shift is introduced in the light beam.
The structure of above-mentioned Phase Shifting System is: branch optical fiber is fixed on the L type optical fiber fixed block, and L type optical fiber fixed block is pasted to become to be rigidly connected with the PZT phase-shifter, and then, the PZT phase-shifter is pasted to become to be rigidly connected with the fiber support frame.Branch optical fiber is not connected with the PZT phase-shifter with the fiber support frame.The PZT phase-shifter is moved forward by driven promotion L type optical fiber fixed block, moves axially along optical fiber thereby make L type optical fiber fixed block drive branch optical fiber, and phase shift is introduced in the branch optical fiber.
Above-mentioned no phase shift optical fiber fixed sturcture is: branch optical fiber directly is fixed on the fiber support frame.
The structure of the image receiving system of above-mentioned band ccd video camera is: from described laser emitting light beam through a microscope and fiber adjusting mount, pass light by branch optical fiber, by the spectroscope beam split, spectroscope places between ccd video camera and the CCD camera lens light beam after protecting the bundle collimating mirror, blocking switch.
Above-mentioned ccd video camera connects a computing machine.
The present invention compares with existing three-dimensional electronic speckle deformation detection system, has following conspicuous outstanding substantive distinguishing features and remarkable advantage: adopted one minute five type optical fibre light splitting in the system of the present invention, passed light; A shared light beams; Be met two of requirement of experiment by two PZT phase-shifters and restraint the laser branch beam that to introduce phase shift.By the beam split of optical fiber, three pairs of coherent light beams that the system that just can obtain is required.Optical device required for the present invention is few, and compactness rational in infrastructure is easy and simple to handle, is applicable to that the quasi real time 3 D deformation of body surface is measured.
Description of drawings
Fig. 1 is the system architecture synoptic diagram of one embodiment of the invention.
Fig. 2 is the structural representation that one minute five type optical fibre light splitting in Fig. 1 example passes light and Phase Shifting System.
Fig. 3 is the no phase shift branch beam fixed sturcture synoptic diagram in Fig. 2 example.
Fig. 4 is the phase shift branch beam fixed sturcture synoptic diagram in Fig. 2 example.
Fig. 5 is the adjustment schematic diagram of the harvester in Fig. 1 example.
Fig. 6 is that two pedal line coplanes are adjusted synoptic diagram.
Fig. 7 is the projection coplane principle schematic that vertical direction two branch beams are adjusted coplane.
Fig. 8 is vertical direction two branch optical fiber exit ports locus synoptic diagram.
Fig. 9 is that two horizontal line coplanes are adjusted synoptic diagram.
Figure 10 is the projection coplane principle schematic that horizontal direction two branch beams are adjusted coplane.
Figure 11 is vertical direction and horizontal direction four bundle branch optical fiber exit ports locus synoptic diagram.
Embodiment
A preferred embodiment of the present invention is: referring to Fig. 1, this passes light based on the measurement system for three-dimensional deformation of splitting optical fiber by the image receiving system of a laser instrument that light source is provided 1, a band ccd video camera 6 and beam split and Phase Shifting System is formed, described beam split, passes light and Phase Shifting System is one fen five type optical fibre light splitting biography light and Phase Shifting System.
The structure that above-mentioned one minute five type optical fibre light splitting passes light and Phase Shifting System is: connect one fen fiber coupler 4 input port of five from the main fiber of described laser instrument 1 through a fiber adjusting mount 3, the output port of fiber coupler 4 connects five bundle fiber optic taps 11,12,13,14,15 carry out beam split and pass light: a branch of branch optical fiber 11 is connected the image receiving system of described band ccd video camera 6, four bundle branch beams 12,13,14,15 output port respectively has one to block switch 20,21,19,18, the output port of this four bundles branch beam is aimed at testee 22 respectively, and wherein branch optical fiber 14 sticks on the identical Phase Shifting System of structure 23 with 15 exit ports by L type optical fiber fixed block 25, on 24.Expansion by PZT phase- shifter 17,16 is moved, and drives branch beam 14,15 and moves, and phase shift is introduced in the light beam.
The structure of above-mentioned Phase Shifting System 23,24 is: branch optical fiber 14,15 is fixed on the L type optical fiber fixed block 25, L type optical fiber fixed block 25 is pasted to become to be rigidly connected with PZT phase- shifter 16,17, then, PZT phase- shifter 16,17 is pasted to become to be rigidly connected with fiber support frame 26.Optical fiber is not connected with PZT phase- shifter 16,17 with fiber support frame 26.PZT phase- shifter 16,17 is subjected to driven to promote L type optical fiber fixed block 25 to move forward, and moves axially along optical fiber thereby make L type optical fiber fixed block 25 drive branch optical fiber 14,15, and phase shift is introduced in the optical fiber 14,15.
The structure of the image receiving system of above-mentioned band ccd video camera 6 is: from described laser instrument 1 outgoing beam through a microscope 2 and fiber adjusting mount 3, pass light by branch optical fiber 11, light beam through beam-expanding collimation mirror 10, block switch 9 after by spectroscope 7 beam split, spectroscope 7 places between ccd video camera 6 and the CCD camera lens 8.
Above-mentioned ccd video camera 6 connects a computing machine 5.
The image receiving system of above-mentioned laser instrument 1, band ccd video camera and one minute five type optical fibre light splitting pass light and Phase Shifting System all form components and parts and be installed on the base plate 27.
Above-mentioned fiber coupler 4 claims splitter again, is to divide element in the bar optical fiber at the most with the light signal from an optical fiber, and we mainly use it and carry out beam split in system, pass light.In the native system, adopt starlike/tree-shaped fiber coupler,, with five optical fiber and burn and melt stretching together, make the polymerization of nuclear core together, to reach the optically-coupled effect by the facture of sintering processing.The length of drawing awl by adjustment, and, realize the energy proportion of optical fibre light splitting to the control of sintering temperature, with reach native system to the ratio of five bundle branch beam energy near impartial requirements.
System's adjustment process
The purpose of adjusting mainly contains 3 points:
1. horizontal direction two is restrainted branch beams about sample surface centre normal symmetry in the assurance face;
2. vertical direction two is restrainted branch beams about sample surface centre normal symmetry in the assurance face;
3. the size of obtaining four bundle branch beam space requirements is used for the demarcation of incident angle.
1. the adjustment of image collecting device
Suppose that CCD camera lens 8 axis directions are the Z axle, crosscut surface level and rip cutting vertical plane by CCD camera lens 8 axis are respectively X-axis and Y-axis.
Adopt the method for adjustment shown in Fig. 5 (a), revise the collection direction of CCD camera lens 8 and the relative position of camera lens and ccd video camera 6, purpose is: reach the consistance of irradiation area and pickup area, the collection direction that makes CCD camera lens 8 is along Z-direction.
Among Fig. 5 (b), select for use sample 28 as adjusting additional device, sample 28 front center are decorated with reference to cross, it is the center of circle with the cross center, at least be decorated with the circle that a diameter equates with CCD camera lens peripheral diameter, in sample surface with literal (regulating the imaging samples position, i.e. object distance).
Spectroscope 7 usefulness fixture blocks 29 are fixed in about two millimeters places before the target surface of ccd video camera 6, and make spectroscope 7 sides parallel with the target surface of ccd video camera 6.Place CCD camera lens 8 then, the center that makes the center of CCD camera lens 8 and ccd video camera 6 is on same horizontal line.Sample 28 is positioned over a place, position, and is adjusted to the center of CCD camera lens 8 identical substantially with reference to the central space position of cross.With sample 28 along CCD camera lens 8 axially slowly away from camera lens, move to till the picture that can in display, see the literal on the sample A clearly i.e. position b place, and guarantee that the collection direction of CCD camera lens 8 is parallel with the surface normal of sample 28.Finely tune the position, space (in height and the surface level and the angle of CCD camera lens 8) of ccd video camera 6 then, make with reference to the image space of cross center at monitor.
Like this, can finish the adjustment of harvester, make the consistance of irradiation area and pickup area, and make the collection direction be positioned at perpendicular (y-z).
2. the adjustment of vertical direction illumination beam
After the image collecting device adjustment finishes, for two branch optical fibers 13 guaranteeing vertical direction and 15 exit ports surface with the angular illumination testee that is symmetrical in the testee surface normal, this device adopts the geometrical principle of two straight lines formations plane principle, projection theory and an equilateral triangle as adjusting mathematical model, and two illumination beams 13 and 15 of vertical direction are adjusted to position accurately.At this, substep is told about adjustment process.
The coplane of the first step, two pedal line (being in the y-z face) is adjusted;
Adopt principle (two straight lines constitute a plane principle) adjustment as shown in Figure 6, purpose is: adjust two pedal line and make its coplane, and in the y-z face.
Among Fig. 6, two lines are hung on the weight support 32 by weight is unsettled respectively, will guarantee that here two lines are free vertical, form pedal line 30 and 31.Two pedal line 30,31 will be between sample 28 surface and CCD camera lens 8 and pedal line 30 from about 5 millimeters of sample 28 surfaces, pedal line 30,31 at interval should not be excessive, so that can obtain the imaging clearly of two pedal line.
Because after the image collecting device adjustment finishes, guaranteed the CCD camera lens along its axial images acquired, then, can guarantee two pedal line, 30,31 coplanes as long as guaranteeing the picture of two pedal line 30 and 31 can overlap.
Utilize light 33 irradiations, pedal line 30 and 31 is imaged on the display screen, the picture of pedal line 30 and 31 is overlapped, then finish its coplane (in the y-z face) and adjust by the position of adjusting support 32.
Be positioned at the adjustment of the branch optical fiber 13 exit ports light beams of lower end on second step, the vertical direction;
To close as the light among Fig. 6 33, open the branch optical fiber 13 that is positioned at the lower end on the vertical direction, make two pedal line of shoot laser light beam irradiates 30,31 of branch optical fiber 13.Purpose is: the direction of illumination of adjusting branch optical fiber 13 shoot laser light beams is positioned at the y-z face.
Adopt principle (projection theory) as shown in Figure 7, because two pedal line 30,31 coplane, as long as two projections of two pedal line 30,31 are dropped in the y-z face simultaneously, just then the direction of illumination of the shoot laser light beam of branch optical fiber 13 drops in the y-z face.
At first, observe the image space above the display of being projected in of two pedal line 30,31, according near their position of projection imaging reference cross vertical curve, adjust the locus of the exit ports of branch optical fiber 13, make the projection imaging of two pedal line 30,31 be positioned at same straight line and the image space of the lip-deep vertical curve with reference to cross that drops on sample 28 on.Article two, the projection imaging of pedal line 30,31 after the shoot laser light beam irradiates of branch optical fiber 13 is on the same straight line, shows that the direction of illumination of outgoing laser beam is positioned at the y-z face.
Secondly, adjust the irradiating angle (angle of light beam in the vertical direction and Z-direction) of branch optical fiber 13, make beam center and overlap with reference to the cross intersection point.
At last, measure exit ports and the axis of CCD camera lens 8 and the surface distance of sample 28 of lower end branch optical fiber 13, be recorded as L respectively
1And C
1
The adjustment of the exit ports light beam of the branch optical fiber 15 on being positioned on the 3rd step, the vertical direction;
Still adopt branch optical fiber 13 to adjust principles, purpose is: the exit ports light beam irradiates direction that makes branch optical fiber 15 in the y-z face, and with the light beam irradiates direction of branch optical fiber 13 about the Z rotational symmetry.
At first,,, open the shoot laser light beam of branch optical fiber 15, make two pedal line of shoot laser light beam irradiates 30,31 of optical fiber 15 by blocking switch 18 by blocking switch 21 close fork optical fiber 13.
Secondly, observe the image space above the display of being projected in of two pedal line 30,31, according near their position of projection imaging reference cross vertical curve, the distance of adjusting branch optical fiber 15 exit ports and CCD camera lens axis and reference substance surface is respectively L
1And C
1, make beam center and overlap, and make the projection imaging of two pedal line 30,31 be positioned at same straight line and drop on the image space of the lip-deep vertical curve with reference to cross of object of reference with reference to the cross intersection point.Article two, the projection imaging of pedal line 30,31 after the shoot laser light beam irradiates of branch optical fiber 15 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch optical fiber 15 is positioned at the y-z face.
So far, vertical direction upper and lower side two ends branch optical fiber 13 and 15 exit ports locus are as shown in Figure 8.
The 4th step, checking branch optical fiber 13 and 15 shoot laser light beam coexist in the y-z face.
Open the shoot laser light beam of branch optical fiber 13 and 15 simultaneously by blocking switch 21 and 18, observe two pedal line 30,31 through branch optical fiber 13 and the postradiation image space that is projected on the display of 15 whiles, still at the vertical curve image space place of reference cross, checking is adjusted correct.
3. the adjustment of horizontal direction illumination beam
After the shoot laser light beam adjustment of image collecting device and vertical direction branch optical fiber 13 and 15 finishes, for the exit ports of two branch optical fibers 12 guaranteeing horizontal direction and 14 surface with the angular illumination testee that is symmetrical in the testee surface normal, this experiment still adopts the geometrical principle of two straight lines formations plane principle, projection theory and an equilateral triangle as adjusting mathematical model, and two branch optical fibers 13 of horizontal direction and 15 shoot laser light beam are adjusted to position accurately.At this, still substep is told about adjustment process.
The first step, two horizontal coplanes (being in the x-z face) are adjusted;
Adopt principle (two straight lines constitute a plane principle) adjustment as shown in Figure 9, purpose is: adjust two horizontal lines and make its coplane, and in the x-z face.
Among Fig. 9, horizontal stand 34 and 35 is in sustained height, and two lines are hung on horizontal stand 34 and 35 by weight is unsettled respectively, will guarantee that here two lines tighten, and forms two horizontal lines 36 and 37.Two horizontal lines 36,37 will and guarantee that horizontal line 36 and 37 all has imaging clearly in display between sample 28 surfaces and CCD camera lens 8 equally.
After the image collecting device adjustment finishes, guaranteed the CCD camera lens, can overlap, can guarantee two horizontal line coplanes as long as guarantee the picture of two horizontal lines 36 and 37 along its axial images acquired.
Adopt branch optical fiber 13 and 15 identical adjustment principle, as long as the horizontality of support 34 and 35 is guaranteed, then horizontal line 36 and 37 picture must overlap, adjust the height of support 34 and 35, the imaging of horizontal line 36 and 37 is on the horizontal line with reference to cross, finishes its coplane (in the x-z face) and adjust.
Second step, be positioned at the adjustment of shoot laser light beam of the branch optical fiber 14 of left end (towards tested sample) on the horizontal direction;
Adopt and close as the light among Fig. 9 33, open the branch optical fiber 14 that is positioned at left end on the horizontal direction by blocking switch 19, make two horizontal lines of shoot laser light beam irradiates 36,37 of branch optical fiber 14, purpose is: the direction of illumination of adjusting the shoot laser light beam of branch optical fiber 14 is positioned at the x-z face.
Adopt principle (projection theory) as shown in figure 10, because two horizontal lines 36,37 coplane, as long as two projections of two horizontal lines 36,37 are dropped in the x-z face simultaneously, just the direction of illumination of the shoot laser light beam of branch optical fiber 14 is in the x-z face.
At first, observe the image space above the display of being projected in of two horizontal lines 36,37, according near their position of projection imaging reference cross horizontal line, adjust the locus of the exit ports of branch optical fiber 14, make the projection imaging of two horizontal lines 36,37 be positioned at same straight line and drop on the lip-deep horizontal image space of sample 28 with reference to cross.Article two, the projection imaging of horizontal line 36,37 after the shoot laser light beam irradiates of branch optical fiber 14 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch optical fiber 14 is positioned at the x-z face.
Secondly, adjust the irradiating angle (light beam in the horizontal direction with the angle of Z-direction) of branch optical fiber 14, make beam center and overlap with reference to the cross intersection point.
At last, the distance on the axis of the exit ports of measurement branches optical fiber 14 and CCD camera lens 8 and the surface of sample 28 is recorded as L respectively
2And C
2
The 3rd step, be positioned at the adjustment of shoot laser light beam of the branch optical fiber 12 of right-hand member on the horizontal direction;
Adopt the adjustment principle of branch optical fiber 14, purpose is: the direction of illumination of shoot laser light beam that makes the branch optical fiber 12 that is positioned at right-hand member on the horizontal direction is at the x-z face, and with the direction of illumination of the shoot laser light beam of branch optical fiber 14 about the Z rotational symmetry.
At first, by blocking the shoot laser light beam of switch 19 close fork optical fiber 14,, make two horizontal lines of shoot laser light beam irradiates 36,37 of branch optical fiber 12 by blocking the fetch boiling water shoot laser light beam of square branch optical fiber that upwards is positioned at right-hand member 12 of switch 20.
Secondly, observe the image space above the display of being projected in of two horizontal lines 36,37, according near their position of projection imaging reference cross horizontal line, the distance on the surface of the exit ports of adjustment branch optical fiber 12 and the axis of CCD camera lens 8 and sample 28 is respectively L
2And C
2, make beam center and overlap, and make the projection imaging of two horizontal lines 36,37 be positioned at same straight line and drop on the lip-deep horizontal image space of sample 28 with reference to cross with reference to the cross intersection point.Article two, the projection imaging of horizontal line 36,37 after the shoot laser light beam irradiates of branch optical fiber 12 is on the same straight line, shows that the direction of illumination of the shoot laser light beam of branch optical fiber 12 is positioned at the x-z face.
The 4th step, checking branch optical fiber 12 and 14 shoot laser light beam coexist in the y-z face.
Open the shoot laser light beam of branch optical fiber 12 and 14 simultaneously by blocking switch 20 and 19, observe two horizontal lines 36,37 through branch optical fiber 12 and the postradiation image space that is projected on the display of 14 whiles, still at the horizontal line image space place of reference cross, checking is adjusted correct.
So far, on level and the vertical direction four the bundle branch optical fibers 12,14,13,15 the exit ports locus as shown in figure 11.
4. from the adjustment of face direction reference beam
The exit ports position of branch optical fiber 11 is put in the side of spectroscope 7, make its outgoing beam process beam-expanding collimation mirror 10 and block switch 9 and enter spectroscope 7, enter the reception target surface of ccd video camera 6 after reflection, form the surface deformation detection system with the shoot laser light beam of branch optical fiber 14, the locus of the exit ports of fine setting branch optical fiber 11 is up to seeing speckle at the display middle section.
So far, the locus of system's five bundle branch optical fibers 11,12,13,14,15 is all adjusted and is finished.The branch beam irradiating angle is demarcated
According to the bulk data that the four adjustment results that restraint branch optical fibers 12,13,14,15 obtain, carry out the demarcation of irradiating angle.
On the vertical direction, because the exit ports of branch optical fiber 13,15 is about the surface of Z rotational symmetry irradiation tested sample 28, according to geometric relationship shown in Figure 8, its irradiating angle α equates as can be known, promptly
On the horizontal direction, because the exit ports of branch optical fiber 12,14 is about the surface of Z rotational symmetry irradiation tested sample 28, according to geometric relationship shown in Figure 11, its irradiating angle θ equates as can be known, promptly
Principle of work of the present invention
As shown in Figure 1, laser instrument 1 provides LASER Light Source, and after laser beam focused on through microscope 2, the adjustment by fiber adjusting mount 3 made light beam enter the main fiber of one minute five fiber coupler 4, obtains 11,12,13,14,15 5 light beams.Light beam 11 enters spectroscope 7 by blocking switch 9 after by beam-expanding collimation device 10 beam-expanding collimations; Light beam 12 and 14 is placed in the surface level and about body surface normal symmetrical illumination tested sample 22, and wherein the output port of light beam 14 is pasted with PZT phase-shifter 17 so that phase shift is introduced in the light beam 14, horizontal direction deformation detection system in the formation face; Light beam 13 and 15 is placed in the vertical plane and about body surface normal symmetrical illumination tested sample 22, and wherein the output port of light beam 15 is pasted with PZT phase-shifter 16 so that phase shift is introduced in the light beam 15, vertical direction deformation detection system in the formation face.Output end position at light beam 12,13,14,15 blocks switch 20,21,19,18 respectively, and the order that controlled deformation detects is carried out.
In the said system, shining on the testee through after blocking switch 20,21,19,18 respectively behind branch beam 12,13,14,15 outgoing beams.Branch beam 11,12,13 is fixing as shown in Figure 3 respectively, branch optical fiber 14,15 respectively as shown in Figure 4 structure fix.
In the said system, the data acquisition operation steps is:
At first, carry out vertical direction (Y direction) deformation detection in the face, open and block switch 18,21, close and block switch 9 and block switch 19,20, make the shoot laser light beam of branch optical fiber 13 and 15 constitute vertical direction deformation detection system in the face;
Utilize four width of cloth images before the distortion of vertical direction deformation detection system acquisition in the face, utilize the PZT phase-shifter 16 at branch optical fiber 15 endpiece places to introduce phase shift between the image, the position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.
Secondly, carry out horizontal direction (X-direction) deformation detection in the face, closing and working as switch 18,21, open and block switch 19,20, block switch 9 and still be in closed condition, make the shoot laser light beam of branch optical fiber 12 and 14 constitute horizontal direction deformation detection system in the face like this;
Utilize four width of cloth phase shifted images before the distortion of horizontal direction deformation detection system acquisition in the face, utilize the PZT phase-shifter 17 at the endpiece place of branch optical fiber 14 to introduce phase shift between the image.The position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.
At last, carry out, close and block switch 18,20,21, open and block switch 9, the shoot laser light beam of branch optical fiber 11 and 14 is constituted from face direction deformation detection system from face direction (Z-direction) deformation detection.
Four width of cloth phase shifted images of utilization before the distortion of face direction deformation detection system acquisition utilize the PZT phase-shifter 17 at branch optical fiber 14 endpiece places to introduce phase shift between the image.The position of four width of cloth images is mutually: 0, pi/2, π, 3 pi/2s.
Speckle image before the distortion in three direction deformation detection systems is represented that with same form four width of cloth speckle images are expressed as respectively: I
Ba, I
Bb, I
Bc, I
Bd, that is:
Speckle image after the distortion in three direction deformation detection systems is represented with same form the width of cloth speckle image that gather the distortion back is designated as I
A, that is:
In the formula, I
1(x, y) and I
2(x y) refers to the light intensity of thing light wave and reference light wave respectively; φ
B(x, y) and φ
R(x, y) refer to respectively thing light wave and reference light wave the position mutually; (x y) refers to be out of shape the phasic difference that causes to Δ φ.
Utilize " 4+1 " phase shift algorithm, formula (3), (4), (5), (6) are subtracted each other respectively with formula (7) respectively, then square, after being averaged, be expressed as respectively;＜I
FA 2,＜I
FB 2,＜I
FC 2,＜I
FD 2, that is:
<I
FA 2>＝<[I
Ba(x，y)-I
A(x，y)]
2>
≈4I
1(x，y)I
2(x，y){1-cos[Δφ(x，y)]}
(8)
<I
FB 2>＝<[I
Bb(x，y)-I
A(x，y)]
2>
≈4I
1(x，y)I
2(x，y){1+sin[Δφ(x，y)]}
(9)
<I
FC 2>＝<[I
Bc(x，y)-I
A(x，y)]
2>
≈4I
1(x，y)I
2(x，y){1+cos[Δφ(x，y)]}
(10)
<I
FD 2>＝<[I
Bd(x，y)-I
YA(x，y)]
2>
≈4I
1(x，y)I
2(x，y){1-sin[Δφ(x，y)]}
(11)
With formula (8), (9), (10), (11) utilize trigonometric function operation handle the phase Δ φ that puts in place (x, y), that is:
Δφ(x，y)＝atan2(I
FB 2-I
FD 2，I
FC 2-I
FA 2)?(12)
According to vertical direction position in the face mutually and deformation relationship:
In the formula, α is illumination beam and body surface normal angle, and v is the distortion of vertical direction in the face, and λ is an optical maser wavelength.The position phase and the deformation relationship of horizontal direction in the face:
In the formula, θ is illumination beam and body surface normal angle, and u is the distortion of horizontal direction in the face, and λ is an optical maser wavelength.
And mutually and deformation relationship from the position of face direction:
In the formula, α is illumination beam and body surface normal angle, and v is the distortion of vertical direction in the face, and w for the quantification system of equations that obtains 3 D deformation from the face direction is:
The collection of the deformation data of above-mentioned three directions and handle and all to pass through identical process: image on the target surface of ccd video camera 6 through CCD camera lens 8 from the testee beam reflected, and then image is transferred to computing machine 5 carries out data processing.
Claims (6)
1. measurement system for three-dimensional deformation based on splitting optical fiber, pass light and Phase Shifting System is formed by the image receiving system of a laser instrument (1) that light source is provided, a band ccd video camera (6) and beam split, it is characterized in that described beam split passes light and Phase Shifting System is one fen five type optical fibre light splitting biography light and Phase Shifting System.
2. the measurement system for three-dimensional deformation based on splitting optical fiber according to claim 1, it is characterized in that the structure that described one minute five type optical fibre light splitting passes light and Phase Shifting System is: the main fiber that comes from described laser instrument (1) connects one fen fiber coupler (4) input port of five through a fiber adjusting mount (3), the output port of fiber coupler (4) connects five bundle fiber optic taps (11,12,13,14,15) carry out beam split and pass light: a branch of branch optical fiber (11) is connected the image receiving system of described band ccd video camera (6), four bundle branch beams (12,13,14,15) output port is respectively placed one and is blocked switch (20,21,19,18), four bundle branch beams (12,13,14,15) output port is aimed at testee (22) respectively, two branch optical fibers (14 wherein, 15) by Phase Shifting System (23,24) fixing, Phase Shifting System (23,24) respectively paste a PZT phase-shifter (17 in respectively, 16), by PZT phase-shifter (17,16) expansion is moved, drive the branch optical fiber (14 of its stickup, 15) move, phase shift is introduced in the light beam.
3. the measurement system for three-dimensional deformation based on splitting optical fiber according to claim 2, the structure that it is characterized in that described Phase Shifting System (23,24) is: branch optical fiber (14,15) is fixed on the L type optical fiber fixed block (25), L type optical fiber fixed block (25) is pasted to become to be rigidly connected with PZT phase-shifter (16,17), then, PZT phase-shifter (16,17) is pasted to become to be rigidly connected with fiber support frame (26).Branch optical fiber (14,15) is not connected with PZT phase-shifter (16,17) with fiber support frame (26).PZT phase-shifter (16,17) is moved forward by driven promotion L type optical fiber fixed block (25), moves axially along optical fiber thereby make L type optical fiber fixed block (25) drive branch optical fiber (14,15), and phase shift is introduced in the branch optical fiber (14,15).
4. the measurement system for three-dimensional deformation based on splitting optical fiber according to claim 2 is characterized in that described no phase shift optical fiber fixed sturcture is: branch optical fiber (12,13) is directly fixed on the fiber support frame 26.
5. according to claim 1 or 2 or 3 described measurement system for three-dimensional deformation based on splitting optical fiber, the structure that it is characterized in that the image receiving system of described band ccd video camera is: from described laser instrument (1) outgoing beam through a microscope (2) and fiber adjusting mount (3), pass light by branch optical fiber (11), by spectroscope (7) beam split, spectroscope (7) places between ccd video camera (6) and the CCD camera lens (8) light beam after protecting bundle collimating mirror (10), blocking switch (9).
6. the measurement system for three-dimensional deformation based on splitting optical fiber according to claim 4 is characterized in that described ccd video camera (6) connects a computing machine (5).
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| CN200710038782A CN101033948B (en) | 2007-03-29 | 2007-03-29 | Measurement system for three-dimensional deformation based on splitting optical fiber |
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| CN200710038782A CN101033948B (en) | 2007-03-29 | 2007-03-29 | Measurement system for three-dimensional deformation based on splitting optical fiber |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101832760A (en) * | 2010-04-23 | 2010-09-15 | 清华大学 | Remote three-dimensional micro-deformation visual on-line monitoring method and system |
| CN110388884A (en) * | 2019-07-24 | 2019-10-29 | 中国科学院半导体研究所 | Structured Illumination three-dimensional measuring apparatus |
| WO2020029236A1 (en) * | 2018-08-10 | 2020-02-13 | 合刃科技（深圳）有限公司 | Vibration monitoring method and system |
| CN110986836A (en) * | 2019-10-30 | 2020-04-10 | 桂林电子科技大学 | High-precision roughness measuring device based on annular core optical fiber |
| CN111307075A (en) * | 2019-10-30 | 2020-06-19 | 桂林电子科技大学 | Roughness measuring device capable of identifying texture direction |
| CN111307076A (en) * | 2019-10-30 | 2020-06-19 | 桂林电子科技大学 | Multi-core optical fiber micro-nano graph identification device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0474389B1 (en) * | 1990-08-27 | 1995-02-22 | Sumitomo Electric Industries, Ltd. | Fiber-optic gyroscope |
| US6188483B1 (en) * | 1997-12-03 | 2001-02-13 | Dr. Ettemeyer Gmbh & Co. | Method and apparatus for determining deformation and elongation on curved bodies |
| CN1304817C (en) * | 2004-01-02 | 2007-03-14 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
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- 2007-03-29 CN CN200710038782A patent/CN101033948B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101832760A (en) * | 2010-04-23 | 2010-09-15 | 清华大学 | Remote three-dimensional micro-deformation visual on-line monitoring method and system |
| CN101832760B (en) * | 2010-04-23 | 2011-12-07 | 清华大学 | Remote three-dimensional micro-deformation visual on-line monitoring method and system |
| WO2020029236A1 (en) * | 2018-08-10 | 2020-02-13 | 合刃科技（深圳）有限公司 | Vibration monitoring method and system |
| CN111213040A (en) * | 2018-08-10 | 2020-05-29 | 合刃科技（深圳）有限公司 | Vibration monitoring method and system |
| CN110388884A (en) * | 2019-07-24 | 2019-10-29 | 中国科学院半导体研究所 | Structured Illumination three-dimensional measuring apparatus |
| CN110986836A (en) * | 2019-10-30 | 2020-04-10 | 桂林电子科技大学 | High-precision roughness measuring device based on annular core optical fiber |
| CN111307075A (en) * | 2019-10-30 | 2020-06-19 | 桂林电子科技大学 | Roughness measuring device capable of identifying texture direction |
| CN111307076A (en) * | 2019-10-30 | 2020-06-19 | 桂林电子科技大学 | Multi-core optical fiber micro-nano graph identification device |
| CN110986836B (en) * | 2019-10-30 | 2022-03-22 | 桂林电子科技大学 | High-precision roughness measuring device based on annular core optical fiber |
| CN111307075B (en) * | 2019-10-30 | 2022-03-25 | 桂林电子科技大学 | Roughness measuring device capable of identifying texture direction |
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| CN101033948B (en) | 2010-05-19 |
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