CN1618120A - Vertical heat treatment device - Google Patents
Vertical heat treatment device Download PDFInfo
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- CN1618120A CN1618120A CNA028279166A CN02827916A CN1618120A CN 1618120 A CN1618120 A CN 1618120A CN A028279166 A CNA028279166 A CN A028279166A CN 02827916 A CN02827916 A CN 02827916A CN 1618120 A CN1618120 A CN 1618120A
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- heater
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- processing apparatus
- vertical heat
- heat processing
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- 238000010438 heat treatment Methods 0.000 title claims description 66
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 238000012545 processing Methods 0.000 claims description 33
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 239000004809 Teflon Substances 0.000 claims description 9
- 229920006362 Teflon® Polymers 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000012423 maintenance Methods 0.000 abstract description 8
- 238000009434 installation Methods 0.000 abstract description 3
- 238000007669 thermal treatment Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 210000002683 foot Anatomy 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60B—VEHICLE WHEELS; CASTORS; AXLES FOR WHEELS OR CASTORS; INCREASING WHEEL ADHESION
- B60B33/00—Castors in general; Anti-clogging castors
- B60B33/08—Ball castors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Resistance Heating (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- General Preparation And Processing Of Foods (AREA)
Abstract
Vertical thermal treatment equipment capable of facilitating maintenance operation such as the replacement of a heater element and increasing a maintainability, comprising a treatment container (4) for storing a large number of treated bodies (W) for heat-treating, a tubular heater (6) covering the periphery of the treatment container (4), a heater installation part (7) for installing the heater (6), and a casing (11) for storing the heater (6) so that the heater (6) can be maintained from one side, the heater (6) further comprising a plurality of heater elements (31) installed so as to be individually replaced, the heater installation part (7) further comprising a rotation supporting mechanism (40) for rotatably supporting the heater.
Description
Technical field
The present invention relates to vertical heat processing apparatus.
Background technology
In the manufacturing of semiconductor device, for example have various heat treated operations such as imposing for example oxidation, diffusion, CVD, annealing on the semiconductor wafer at handled object, use the vertical heat processing apparatus that once to heat-treat many pieces of wafers as one of annealing device that is used to carry out these operations.
At this vertical heat processing apparatus, be equipped with and accommodate many pieces of wafers when being used for heat treated container handling, the tubular heater that covers around this container handling is set.Traditional heater is provided with heating element week and constitutes in the tubular heat-insulating material.
Yet, at above-mentioned vertical heat processing apparatus,, under the situation that produces faults such as heating element variation or broken string, can not only change heating element because heating element and heat-insulating material are integrally formed, there are the so-called necessary all problems of heater of changing.On the other hand, also propose to be equipped with the equipment of a plurality of heating elements that can individually change as heater, yet, usually at vertical heat processing apparatus, for the structure of safeguarding from basket one side of accommodating heater, and the heating element that is positioned at basket opposite side (opposition side) is changed or the situation of upkeep operation such as maintenance under, having so-called operability is the problem of the non-constant of maintainability.
Summary of the invention
The present invention considers the premises and does, and its objective is the upkeep operation that the replacing that can carry out heating element easily etc. is provided, and seeks to improve the vertical heat processing apparatus of maintainability.
In order to achieve the above object, being characterized as of vertical heat processing apparatus of the present invention, be equipped with following parts, that is: accommodate a plurality of handled objects and be used for heat treated container handling, with the tubular heater around this container handling of covering, with the heater that this heater is set portion is set and can accommodates the basket of above-mentioned heater with safeguarding from a side; Above-mentioned heater has a plurality of heating elements that can individually change, and the rotation supporting mechanism that rotatable support heater is set in the portion is set at above-mentioned heater.
According to the present invention, under the situation of upkeep operations such as the heating element that is positioned at vertical heat processing apparatus basket opposite side is changed, make the heater rotation, make maintenance position come a side in the basket, can carry out attended operation easily, seek to improve maintainability.
Vertical heat processing apparatus of the present invention can have the fixed part that the rotation of the heater of rotatably supporting by above-mentioned rotation supporting mechanism is fixed.According to the present invention, can heater not fixed like that with the predetermined angular rotation by fixed part.
Vertical heat processing apparatus of the present invention, above-mentioned rotation supporting mechanism can have the Lift Part of the above-mentioned heater of lifting and rotatably support the holding components of above-mentioned heater.According to the present invention, can heater be risen or decline by Lift Part, can support heater by holding components.In view of the above, can lift heater, rotatably support, fall heater, fixedly rotation.
Vertical heat processing apparatus of the present invention, above-mentioned Lift Part are screw type Lift Part or fluid pressure type Lift Part, and above-mentioned holding components can be made of spheroid, roller, any of low friction parts that contain teflon.According to the present invention, can lift the big heater of weight by simple structure, rotation seeks to improve maintainability easily.
According to vertical processing unit of the present invention, above-mentioned holding components is configured on the same circumference, the preferred ring-type guide groove that engages with above-mentioned holding components that is provided with on the bottom of above-mentioned heater.According to the present invention, heater circumferentially reliably and is easily rotated along it, seek to improve maintainability.
Vertical heat processing apparatus of the present invention is characterized by, be equipped with following parts, that is: accommodate a plurality of handled objects, be used for heat treated container handling, with the tubular heater around this container handling of covering, with the heater that this heater is set portion is set and can accommodates the basket of above-mentioned heater with safeguarding from a side; Above-mentioned heater has a plurality of heating elements that can individually change, the rotation supporting mechanism that rotatable support heater is set in the portion is set at above-mentioned heater, above-mentioned heater is equipped with a plurality of heating elements on the interior week of the tubular nappe of water-cooling structure, the portion of terminal of each heating element connects nappe, outstanding to periphery, be connected with connector.According to the present invention, connect nappe and outstanding with the portion of terminal of heating element to periphery, the rotation supporting mechanism with heater adapts, and the maintenance of heating element replacing etc. is become easily, seeks to improve maintainability.
Vertical heat processing apparatus of the present invention is provided with the connector holding components on the outer peripheral face of the nappe of above-mentioned heater, preferred fixing above-mentioned connector on above-mentioned connector holding components.Vertical annealer device of the present invention is provided with the connector holding components on the outer peripheral face of the nappe of above-mentioned heater, can be fixed the fixture of above-mentioned connector and above-mentioned heating element portion of terminal on the holding components of above-mentioned connector.
According to the present invention, on the connector holding components, fixed connector or connector and fixture fixed makes the portion of terminal of taking out or installing heating element become easy.
Vertical heat processing apparatus of the present invention, it is characterized by, on the outer peripheral face of the nappe of above-mentioned heater, be provided with from the flatly outstanding substantially ring-type connector holding components of above-mentioned heater radius vector outward direction, on above-mentioned connector holding components, fix the fixture of above-mentioned connector or above-mentioned heating element portion of terminal.According to the present invention, radially foreign side is flatly outstanding substantially to heater from the outer peripheral face of the nappe of heater because make the connector holding components, so the operation that can easily take out, install the portion of terminal fixture that is fixedly coupled device or heating element.
Description of drawings
Fig. 1 is the longitudinal section that the vertical heat processing apparatus of embodiments of the present invention is shown.
Fig. 2 illustrates the summary sectional view that rotation supporting mechanism constitutes.
Fig. 3 illustrates the amplification sectional view that the jack parts constitute.
Fig. 4 is the ground plan of jack parts.
Fig. 5 illustrates by rotating the amplification sectional view that supporting mechanism rotatably supports heater, passes through the formation of fixed part fixed heater.
Fig. 6 is the summary sectional view that the rotation supporting mechanism formation with roller is shown as holding components.
Fig. 7 is the summary sectional view that the rotation supporting mechanism formation with teflon is shown as holding components.
Embodiment
Below, embodiments of the present invention are described in detail in detail with reference to the accompanying drawings.Fig. 1 is the longitudinal section that the vertical heat processing apparatus of embodiments of the present invention is shown.Fig. 2 illustrates the summary sectional view that rotation supporting mechanism (assembly is supported in rotation) constitutes.Fig. 3 illustrates the amplification sectional view that the jack parts constitute, and Fig. 4 is the ground plan of jack parts.At Fig. 2, left-half illustrates the stationary state of heater, and right half part illustrates the state that the jack parts hold up heater.
At Fig. 1, the 1st, vertical heat processing apparatus, this vertical heat processing apparatus have and form peripheral basket 11, accommodate handled object above in this basket 11, and for example semiconductor wafer W is provided for implementing for example vertical heat treatment furnace 2 of oxidation processes of predetermined processing.This heat-treatment furnace 2 is mainly by constituting with lower member, promptly with the container handling of bottom as the lengthwise of fire door 3 openings, for example quartzy system reaction tube 4, with open and close these reaction tube 4 fire doors 3, liftable lid 5, according to cover be provided with like that around the above-mentioned reaction tube 4, reaction tube (stove) 4 inner control can be heated to for example 300-1200 ℃ heater 6 of set point of temperature.
In above-mentioned basket 11, also as shown in Figure 2,, flatly be provided for being provided with the base plate (heater is provided with portion) 7 of for example SUS system of the reaction tube 4 that constitutes heat-treatment furnace 2 or heater 6 through pallet 29.Be formed on the base plate 7 from below insert the peristome 7a of reaction tube 4 upward.Above-mentioned heater 6 can be accommodated from a side of basket 11 with safeguarding.Be provided for carrying out the service port 11a that heater is safeguarded on a side of basket 11, this service port 11a is usually by not shown lid obturation.
Reaction tube 4 is for example quartzy systems, and (embodiment) formed by mono-layer tube in illustrated example.On the bottom of this reaction tube 4, form export-oriented flange portion 4a, by this flange portion 4a being remained on the bottom of base plate 7 by flange holding member 8, reaction tube 4 from below insert the peristome 7a of logical base plate 7 upward state keep.In order to clean etc., reaction tube 4 takes out downwards from base plate 7.
On the flange portion 4a of reaction tube 4, be provided with a plurality of gas introduction tubes 9 of handling in gas or the Clean-indifferent gas importing reaction tube 4.The pipe arrangement of gas supply system is connected with these gas introduction tubes 9.The top of reaction tube 4 is undergauge gradually, forms L font exhaust outlet 10 at this top, the vacuum pump of the control of can reducing pressure in being connected with reaction tube 4 on this exhaust outlet 10 or the pipe arrangement (omit and illustrate) with gas extraction system of pressure-control valve etc.
On the position below going back than the base plate in the above-mentioned basket 11 7, the heat treatment that is provided with on lid 5 is moved in (loading) heat-treatment furnace (being reaction tube 4) 2 with mounting cabin 16, take out of (unloading) from heat-treatment furnace 2, perhaps be provided for carrying out the operation field (loading area) 12 of wafer W 11 transfers of mounting cabin.12 are provided with and should carry out the moving into of mounting cabin 16, take out of and make lid 5 carry out the elevating mechanism 13 of lifting in this operation field.
Above-mentioned lid 5 for example is the SUS system, and through a plurality of buffer gears, for example spring 14, keeps on holding plate 15, and this holding plate 15 is connected with above-mentioned elevating mechanism 13.Lid 5 constitutes like this, so as with the openend butt of fire door 3, airtight fire door 3.In the lower central portion of lid 5, be provided for making the mounting cabin rotating mechanism 20 of mounting cabin 16 rotations.
Above-mentioned mounting cabin 16 for example is quartzy system, outfit is with lower member, that is: support for example many pieces of diameter 300mm mounting cabin main bodys 17 of the wafer W of 75-100 piece of degree for example of heavy caliber with the empty standard width of a room in an old-style house of level, above-below direction every multistage, with the foot 18 of a pillar that is connected with the rotating shaft 20 that is used to make this mounting cabin main body along the rotating mechanism 20 of wafer Zhou Fangxiang rotation; Form these mounting cabin main body 17 and foots 18.In above-mentioned foot 18, form flange portion 19, this flange portion 19 and the rotary shaft of rotating mechanism 20 are linked with screw.
Fixing fire door heating arrangements 21 on above-mentioned lid 5 as the fire door attemperator.This fire door heating arrangements 21 is mainly by constituting with lower member, that is: according to covering above the lid 5 the ring-type overlay 22 of mounting like that, with on this overlay 22, erect a plurality of pillars 23 that are provided with appropriate interval along Zhou Fangxiang, with the planar heating resistor 24 that on the upper end of these pillars 23, flatly hang to be provided with, at many pieces that are provided with on pillar 23 with appropriate interval below this heating resistor 24 2 pieces of insulation boards 25 for example.
Above-mentioned overlay 22, pillar 23 and insulation board 22 for example are quartzy systems, by avoiding having corrosive processing gas pickling above the overlay 22 protection lids 5.The through hole 26 of foot's 18 perforations of the flange portion 19 that comprises mounting cabin 16 is set on above-mentioned heating resistor 24 and insulation board 25.Connect airtightly from holding plate 15 under the state of lid 5, be provided for conducting and power to the conduction pipe 27 of the cable of above-mentioned heating resistor 24.On above-mentioned overlay 22, on the illustrated example dual be provided with cover around the above-mentioned flange portion 19 and above ring-type hide heat lid 28.These hide heat lid 28 for example is quartzy the system, is divided into 2 half formation like that according to loading and unloading easily.
On the other hand, above-mentioned heater 6 mainly is made of following parts, that is: the nappe 30 of the tubular preferably drum shape of water-cooling structure and change a plurality of heating elements 31 that ground is provided with in that the interior Zhou Shangke of this nappe 30 is single.Nappe 30 has the base plate 30a of ring-type integratedly, has the top plate portion 30b of ring-type in the upper end in the bottom.Give prominence to the exhaust outlet 10 of reaction tubes 4 from the peristome 32 of this top plate portion 30b central authorities.Nappe 30 preferences are the SUS system in this way.Be provided for the circulating water flowing road 33 of cold water, ground such as helical form for example on nappe 30.
Heating element 31 is by by enrolling the carbon fiber bundle as resistance heater with elongate shape, and its is enclosed in quartz ampoule and the carbon heater that forms constitutes, and has portion of terminal 34 at two ends.Use following parts as heating unit 31, that is: the main heating element 31a that the above-below directions in week are provided with in the nappe 30, the top heating element 31b that is provided with the top in week in nappe 30, lower heating element 31c that is provided with the bottom in week in nappe 30 and the top heating element 31d that on the peristome 32 of top plate portion 30b, is provided with.Top heating element 31b is the shape that crawls and forms, and lower heating element 3 1c and top heating element 31d shape in the shape of a spiral form.
Each heating element 31 is provided in the interior week of nappe 30, and it is outstanding to periphery that the portion of terminal 34 of each heating element 31 radially connects nappe, is connected with connector 35.On the upper and lower of the outer peripheral face of above-mentioned nappe 30, the protruding Edge shape of ring-type parts (connector holding components) 36 are set, when installation is used for the connector 35 of splicing ear portion 34 on these flange shape parts 36, the fixture 37 of part midway that is used to support fixed terminal portion 34 is installed.Connector 35 is electrically connected power supply through cable 38.
When being positioned at the upkeep operations such as heating element replacing of basket 11 opposite sides, in order to make heater 6 rotations, come a side (service port 11a one side) in the basket 11 so that make maintenance place, to carry out upkeep operation easily, the rotation supporting mechanism (assembly is supported in rotation) 40 that rotatably supports heater 6 is set on the base plate 7 that portion is set as heater.This rotation supporting mechanism 40 is made of following parts, that is: jack-up falls a plurality of for example 4 screw type jack parts 41 of heater 6 bottoms (base plate 30a's is following) and rotatably is supported in the spheroid 42 (holding components) of the bottom of the heater 6 that the top of each jack parts 41 rotatably is provided with.
On said base plate 7, in the tubular upper end of engaging flange portion 44, the cave portion 47 of the lifting moving of the spheroid support sector 45 that allows to comprise spheroid 42 is set.Above-mentioned spheroid support sector 45 is arranged on the leading section (upper end) of leading screw portion 43, and under the spheroid 42 parts state outstanding from the upper end of this spheroid support sector 45, spheroid 42 rotations are supported in the spheroid support sector 45 freely.What form on above-mentioned bracket part 44 that spheroid 42 do not accommodate the spheroid support sector 45 that comprises spheroid 42 highlightedly above base plate 7 accommodates recess 48.Also above-mentioned jack parts 41 can be set often, also can only when safeguarding heater 6, install and use.
In order to make heater 6 along its all direction (around the axle center) rotation stably and support rotationally, above-mentioned jack parts 41 (are correctly said, the spheroid 42 of holding components) is configured on the same circumference that axle center with heater 6 is the center (promptly with the concentric circle of heater on), the ring-type guide groove 50 of above-mentioned jack parts 41 spheroids 42 of engaging is set in the bottom of heater 6.This guide groove 50 with the concentric circle of heater 6 on form annularly.Guide groove 50 is the groove that is in the shape of the letter V of cross section preferably.
Above-mentioned heater 6 is fixed on the base plate 7 by the fixed screw 51 that is screwed into from the below usually, when safeguarding, takes out by heater 6 fixed screw 51, also can make leading screw 43 rotations of jack parts 41 by throw, make 6 of heaters hold up specified altitude h and get final product from base plate 7.In view of the above, can easily rotate heater.Among Fig. 1, the 39th, should heater top cover with exhaust outlet 10 between peristome 32 and screening hot material setting, be divided into 2 half hitch structures with ring-type.
When changing the safeguarding of heating element 31, take out reaction tubes 4 from base plate 7, in heater 6, choose downwards, move to other place.And, for example promptly: when introducing row and change, because in the behind of heater 6, so hand is difficult to touch the operability extreme difference with the heating element of the opposition side of the service port 11a of basket 11 to the left side of Fig. 1.
Therefore, take out the standing screw 51 of fixed heater 6 on base plate 7, the jack parts 41 of the rotation supporting mechanism 40 by constituting heater 6, jack-up heater 6 (carrying on).At this moment, on the holding section 43a of the lower end of the leading screw portion 43 that constitutes jack parts 41, block the turning tool of screw wrench etc., make 43 rotations of leading screw portion, make leading screw portion 43 rise to move by screw transmission effect and get final product.In view of the above, the spheroid of jack component upper ends engages with heater 6 bottom guide groove 50, and the bottom of jack-up heater 6 can make the big heater of weight 6 jack-up from the base plate 7 easily.
Operate whole jack parts 41, heater 6 is flatly risen, by manually making heater 6 rotations, so that make the heating element 31 in Fig. 1 left side come the service port 11a on right side.Owing to be equipped with spheroid 42 on the top of jack parts 41, so can be smoothly and easily make heater 6 rotations.Make the heating element 31 that to change come the right side of Fig. 1, the portion of terminal 34 of this heating element 31 is taken out from flange shape 36 fixture 37 and connector 35, make this heating element 31 in heater 6, be that take out the inboard of nappe 30, and, also can be replaced by new heating element, like this, can easily carry out maintenances such as heating element replacing.
According to the vertical heat processing apparatus 1 that forms from above formation, outfit is with lower member, that is: be used for the reaction tube 4 of heat treated container handling as accommodating many pieces of wafer w, with the tubular heater 6 around this reaction tube 4 of covering, with the base plate 7 (heater is provided with portion) that this heater 6 is set with can accommodate the basket 11 of above-mentioned heater 6 from a side with safeguarding; Because above-mentioned heater 6 has a plurality of heating elements 31 that can individually change, on said base plate 7, the rotation supporting mechanism 40 that supports heater rotationally is set, so when the upkeep operation that the heating element 31 that is positioned at basket 11 opposite sides is changed etc., heater 6 is rotated, so that the side in the basket 11 is come in maintenance place, can easily carry out operation, seek to improve maintainability.
In this case, above-mentioned heater 6 is equipped with a plurality of heating elements 31 on the interior week of the tubular nappe 30 of water-cooling structure, and the portion of terminal 34 of each heating element 31 connects nappe 30, and is outstanding to periphery, is connected with connector 35.As shown in Figure 1, flange shape parts 36 flatly extend along the radially foreign side of heater 6 substantially from the outer peripheral face of nappe 30, because proper alignment has the fixture 37 of connector 35 and heating element in its surface, so pass through outwards to take out portion of terminal 34 in the outside of nappe 30, can take out heating element 31 from the inboard of nappe 30 at an easy rate from connector 35.With the easiness of this taking-up with to be equipped with the rotation supporting mechanism of heater 6 relevant, the maintenance of the replacing etc. of heating element 31 is become easily, seek to improve maintainability.
Because a plurality of screw type jack parts 41 of heater 6 bottoms are fallen by above-mentioned rotation supporting mechanism 40 by rise, the spheroid 42 that rotatably is supported in the bottom of the heater 6 that the top of each jack parts 41 is provided with rotationally constitutes, so can rise the big for example heater about 340kg 6 of weight with simple structure, easily rotate, seek to improve maintainability.In addition, above-mentioned jack parts 41 are configured on the same circumference, owing to the ring-type guide groove 50 that engages with the spheroid 42 of above-mentioned jack parts 41 is set on the bottom of heater 6,, seeks to improve maintainability so heater 6 is reliably easily rotated along its all direction.
Secondly, set forth other execution mode of the present invention.
Execution mode in Fig. 1～4, the bottom of falling heater 6 can be risen in rotation supporting mechanism 40, when turning round usually, leading screw portion 43 is descended, fixed heater 6 shown in the left-half of Fig. 2, carry out that heating element 31 is changed etc. safeguard the time, rise leading screw portion 43, heater 6 is rotated.
In contrast, the present invention makes the structure of not lifting rotation supporting mechanism, supports heater 6 always on the one hand, on the other hand, is running well maybe must safeguard the time, rotation that can fixed heater 6.One example of fixed part of the rotation of fixed heater 6 is shown at Fig. 5.
At Fig. 5, on the base plate 30a of nappe 30 and base plate 7, a plurality of holes that can mate are set, under the state that makes regulation hole coupling, insert the base plate 30a and the base plates 7 of logical nappes 30 as the bolt 60 of fixed part.At Fig. 5, rotation supporting mechanism 40 be can lifting spheroid 42 structure, yet, yet rotation supporting mechanism 40 also can be the structure of rotatable support heater 6 not lifting holding componentss.At Fig. 5, with bolt 60, bolt 60 is inserted lead to the hole that on the base plate 30a of nappe 30 and base plate 7, is provided with, yet fixed part can be the fixed part arbitrarily that those of ordinary skills can do as fixed part.For example, also can between the base plate 30a of nappe 30 and base plate 7, squeeze into wedge-shaped member.
Execution mode in Fig. 1～4 rotatably supports the holding components of the bottom of heater 6 to be formed by spheroid 42.
As long as holding components can be supported heater 6 rotatably, then those of ordinary skills can make the replacement device that can at random make.For example holding components can make roller 61 as shown in Figure 6.At this moment, guide groove 62 to roller 61 guiding preferably is set on the bottom surface of the base plate 30a of nappe 30.In addition, holding components can make low friction means 63 as shown in Figure 7.Can use for example teflon (Teflon) 63 as low friction parts.Around teflon 63 preferably remains on by support, end face preferably with the bottom surface butt of the base plate 30a of nappe 30.Even in this case, the guide groove 64 that teflon 63 is led is set preferably also on the bottom surface of base plate 30a.
At above each execution mode, support that rotatably (spheroid 42, roller 61, teflon 63 are arranged on the top of the Lift Part (leading screw portion 43) of lifting heater integratedly for the holding components of heater., (teflon 63 and Lift Part (leading screw portion 43) can make single parts to holding components for spheroid 42, roller 61.At this moment, holding components is rotatably supported heater 6, and Lift Part can lifting heater 6.
At above each execution mode, jack parts 41 are the very heavy parts of screw type that are made of leading screw portion 43 and bracket part 44, yet, also can be by fluid pressure type, for example oil pressure carries out the mechanism of lifting to elevating mechanism.
Execution mode in Fig. 1～4, support the connector holding components of connector 37 to form by collar flange parts 36, yet the connector holding components can make arbitrary shape, for example around the nappe of heater 6 to the radially plate of outstanding arbitrary shape of heater.
More than rely on accompanying drawing that embodiments of the present invention have been described in detail in detail, yet the present invention is not limited to above-mentioned execution mode, not breaking away from the point range of wanting of the present invention, can carry out all design alterations etc.For example, also can constitute like this,, carry out CVD processing, DIFFUSION TREATMENT, annealing in process so that outside oxidation processes as annealing device.As above-mentioned mounting cabin material also can be for example carborundum or polysilicon (Si) etc. except that quartz.Except that semiconductor wafer, also can be for example LCD substrate or quartz etc. as handled object.The duplex of pipe and outer tube in reaction tube also can make.As the fire door heat preservation component also can be heat-preservation cylinder.
Claims (9)
1, a kind of vertical heat processing apparatus is characterized by, and has:
Accommodate a plurality of handled objects, be used for heat treated container handling;
Cover the tubular heater of this container handling;
The heater that this heater is set is provided with portion; With
Can accommodate the basket of described heater from a side with safeguarding,
Described heater has a plurality of heating elements that can individually change,
Be provided with the rotation supporting mechanism that rotatably supports heater in the described heater portion of setting.
2, vertical heat processing apparatus according to claim 1 is characterized by,
Has the fixed part that the rotation of the heater rotatably supported by described rotation supporting mechanism is fixed.
3, vertical heat processing apparatus according to claim 1 is characterized by,
Described rotation supporting mechanism has the Lift Part of the described heater of lifting; Rotatably support the holding components of described heater.
4, vertical heat processing apparatus according to claim 3 is characterized by,
Described Lift Part is screw type Lift Part or fluid pressure type Lift Part, and described holding components is formed by spheroid, roller, any of low friction means that contain teflon.
5, vertical heat processing apparatus according to claim 3 is characterized by,
Described holding components disposes on same circumference, and the ring-type guide groove that engages with described holding components is set on described heater base.
6, a kind of vertical heat processing apparatus is characterized by, and has:
Accommodate a plurality of handled objects, be used for heat treated container handling;
Cover this container handling tubular heater on every side;
The heater that this heater is set is provided with portion; With
Can accommodate the basket of described heater from a side with safeguarding,
Described heater have can single replacing a plurality of heating elements, in the described heater portion of setting the rotation supporting mechanism that rotatably supports heater is set,
Described heater is equipped with a plurality of heating elements on the interior week of the tubular nappe of water-cooling structure, the portion of terminal of each heating element connects nappe and gives prominence to periphery, is connected with connector.
7, vertical heat processing apparatus according to claim 6 is characterized by,
On the nappe outer peripheral face of described heater, the connector holding components is set, on described connector holding components, fixes described connector.
8, vertical heat processing apparatus according to claim 6 is characterized by,
On the nappe outer peripheral face of described heater, the connection holding components is set, on described connector holding components, fixes the fixture of described connector and described heating element portion of terminal.
9, vertical heat processing apparatus according to claim 6 is characterized by,
The ring-type connector holding components of flatly giving prominence to substantially to foreign side from described heater radius vector is set on the nappe outer peripheral face of described heater, on described connector holding components, fixes described connector or/and the fixture of described heating element portion of terminal.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP109921/2002 | 2002-04-12 | ||
| JP2002109921A JP4132932B2 (en) | 2002-04-12 | 2002-04-12 | Vertical heat treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1618120A true CN1618120A (en) | 2005-05-18 |
| CN1309028C CN1309028C (en) | 2007-04-04 |
Family
ID=29243213
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU022958061U Expired - Fee Related CN2600455Y (en) | 2002-04-12 | 2002-11-29 | Vertical heat treatment device |
| CNB028279166A Expired - Fee Related CN1309028C (en) | 2002-04-12 | 2002-11-29 | Vertical heat treatment device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU022958061U Expired - Fee Related CN2600455Y (en) | 2002-04-12 | 2002-11-29 | Vertical heat treatment device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4132932B2 (en) |
| KR (1) | KR100882635B1 (en) |
| CN (2) | CN2600455Y (en) |
| TW (1) | TWI256691B (en) |
| WO (1) | WO2003088339A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846451A (en) * | 2009-03-24 | 2010-09-29 | 台湾积体电路制造股份有限公司 | The rotatable and tunable heaters that is used for semiconductor furnace |
| CN101207006B (en) * | 2006-12-22 | 2010-11-03 | 东京毅力科创株式会社 | Vertical type heat processing apparatus and vertical type heating method |
| CN102016119B (en) * | 2008-09-04 | 2012-11-21 | 东京毅力科创株式会社 | Heat treatment apparatus |
| CN110819376A (en) * | 2019-11-20 | 2020-02-21 | 中国石油大学(华东) | Petroleum distillation experimental apparatus convenient to operation |
| CN115323358A (en) * | 2021-05-10 | 2022-11-11 | 皮考逊公司 | Substrate processing apparatus and method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5571223A (en) * | 1993-06-22 | 1996-11-05 | Scapa Group Plc | Roller apparatus |
| JPH08281844A (en) * | 1995-04-13 | 1996-10-29 | Uchida Seisakusho:Kk | Single-faced corrugated cardboard manufacturing apparatus |
| JP4510661B2 (en) * | 2005-02-14 | 2010-07-28 | 日本電信電話株式会社 | Oxidation furnace equipment |
| CN103899920A (en) * | 2014-03-20 | 2014-07-02 | 上海华力微电子有限公司 | Water leakage detection method for furnace pipe |
| CN109682215A (en) * | 2019-01-10 | 2019-04-26 | 浙江晶盛机电股份有限公司 | A kind of lifting for silicon carbide furnace drop-bottom mates structure and its application method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5637153A (en) * | 1993-04-30 | 1997-06-10 | Tokyo Electron Limited | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus |
| US5820366A (en) * | 1996-07-10 | 1998-10-13 | Eaton Corporation | Dual vertical thermal processing furnace |
| JP3587280B2 (en) * | 1997-03-03 | 2004-11-10 | 東京エレクトロン株式会社 | Installation method of vertical heat treatment device and heater with casters |
| JP3404674B2 (en) * | 2000-01-21 | 2003-05-12 | 株式会社真空技研 | Ultra high temperature heat treatment equipment |
-
2002
- 2002-04-12 JP JP2002109921A patent/JP4132932B2/en not_active Expired - Fee Related
- 2002-11-28 TW TW091134645A patent/TWI256691B/en not_active IP Right Cessation
- 2002-11-29 WO PCT/JP2002/012548 patent/WO2003088339A1/en active Application Filing
- 2002-11-29 KR KR1020047010063A patent/KR100882635B1/en not_active IP Right Cessation
- 2002-11-29 CN CNU022958061U patent/CN2600455Y/en not_active Expired - Fee Related
- 2002-11-29 CN CNB028279166A patent/CN1309028C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101207006B (en) * | 2006-12-22 | 2010-11-03 | 东京毅力科创株式会社 | Vertical type heat processing apparatus and vertical type heating method |
| CN102016119B (en) * | 2008-09-04 | 2012-11-21 | 东京毅力科创株式会社 | Heat treatment apparatus |
| CN101846451A (en) * | 2009-03-24 | 2010-09-29 | 台湾积体电路制造股份有限公司 | The rotatable and tunable heaters that is used for semiconductor furnace |
| US8536491B2 (en) | 2009-03-24 | 2013-09-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Rotatable and tunable heaters for semiconductor furnace |
| US9105591B2 (en) | 2009-03-24 | 2015-08-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Rotatable and tunable heaters for semiconductor furnace |
| CN110819376A (en) * | 2019-11-20 | 2020-02-21 | 中国石油大学(华东) | Petroleum distillation experimental apparatus convenient to operation |
| CN115323358A (en) * | 2021-05-10 | 2022-11-11 | 皮考逊公司 | Substrate processing apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200305226A (en) | 2003-10-16 |
| JP4132932B2 (en) | 2008-08-13 |
| KR20040099261A (en) | 2004-11-26 |
| KR100882635B1 (en) | 2009-02-06 |
| JP2003303781A (en) | 2003-10-24 |
| CN2600455Y (en) | 2004-01-21 |
| TWI256691B (en) | 2006-06-11 |
| WO2003088339A1 (en) | 2003-10-23 |
| CN1309028C (en) | 2007-04-04 |
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