CN1614738A

CN1614738A - Dynamic position coding method

Info

Publication number: CN1614738A
Application number: CN 200310103484
Authority: CN
Inventors: 蔡东宏; 王祥麟; 黄再志; 林显清; 洪学毓
Original assignee: Minsheng Science & Technology Co Ltd
Current assignee: Chongyue Science and Technology Co., Ltd.
Priority date: 2003-11-07
Filing date: 2003-11-07
Publication date: 2005-05-11

Abstract

The invention includes following steps: the first crystal grain is picked up and is tested as first class; the first exclusive container corresponding to the first class and first crystal grain is pointed; the first class and first crystal grain is put into the first exclusive container. The invention can shorten the distance of taking and putting crystal grain by picking up device.

Description

The position dynamic coding method

Technical field

The invention belongs to semiconductor making method, particularly a kind of position dynamic coding method.

Background technology

Known crystal grain fetching process, mean the exclusive container of pre-defined each grade crystal grain, all crystal grains is taken out from a wafer again and put into the exclusive container of its grade (BIN), wherein each crystal grain all has a plurality of integrated circuit elements, and has several crystal grain to be arranged in rectangular array on the wafer.

As shown in Figure 1, crystal grain fetching process system picks up crystal grain 1 in the known techniques from the fixed position of wafer 2.The mode of picking up can shift out wafer 2 with crystal grain via pick device 3.Pick device can be mechanical arm.Wafer 2 can be supported by the wafer platform, by the position that the wafer platform moves wafer, makes mechanical arm and the wafer platform crystal grain that will desire to be removed that relatively moves take out from wafer, wafer is moved on to the container of placing under the crystal grain (BIN) 4 again.The known taking and putting crystalline grain method of this kind can move to the tram with wafer at an easy rate for the big wafer of size, but develop along with science and technology is fast-developing, it is big that the size of wafer becomes, it is closeer more that crystal grain becomes, different crystal grain grade distribution distances are wider, make crystal grain be placed on the tram to become complicated and difficult if desire correct mobile wafer with the design of traditional wafer platform collocation mechanical arm, except considering the restriction of equipment, the accuracy that crystal grain picks and places also faces test.

As shown in Figure 2, pick up the flow process of placing crystal grain with known wafer and be all crystal grains classification on the test wafer at first, and classification is divided into several successives, for example the first estate to the 12 grades; Then specify N container for placing the exclusive container of N grade crystal grain, for example first container is placed the first estate crystal grain; Afterwards, rotating wafer makes N grade crystal grain be positioned at the pick device below; Then pick up N grade crystal grain and be positioned over the affiliated container of N grade crystal grain; Judging at last whether crystal grain has picked up finishes, if having picked up all crystal grains then finishes to pick up the crystal grain process, if not, subsequent pick-up crystal grain process finishes up to picking up.Picked up in the crystal grain process by above-mentioned known techniques, crystal grain grade distribution is wider on wafer, then can have problems such as the excessive or mobile difficulty of pick device moving range, even has the dead angle that can't arrive.

Summary of the invention

The purpose of this invention is to provide that a kind of displacement, moving range that shortens the pick device taking and putting crystalline grain is little, crystal grain picks and places simply, pick and place that the position is accurate, efficient is high, improve the position dynamic coding method of crystal grain fetching process.

The present invention includes following steps:

Pick up first crystal grain;

Testing first crystal grain is the first estate;

Appointment is corresponding to the first exclusive container of the first estate first crystal grain; To put into the first exclusive container for first crystal grain of the first estate.

Wherein:

To also comprise the steps: for after first crystal grain of the first estate puts into the first exclusive container

Pick up second crystal grain;

Testing second crystal grain is second grade;

Appointment is corresponding to the second exclusive container of second grade, second crystal grain; To put into the second exclusive container for second crystal grain of second grade.

Second grade of second crystal grain is same as the first estate.

The second exclusive container is same as the first exclusive container.

Picking up the action that picks and places of first crystal grain and second crystal grain picks up with first mechanical arm and second mechanical arm.

The method of test crystal grain is the yield test.

The yield test obtains the crystal grain defect level, and defect level is divided into crystal grain several grades that comprise the first estate and second grade according to this.

Grade represents that mode can be natural number.

Because the present invention at first picks up arbitrary crystal grain; Then crystal grain is tested, and defined the grade of crystal grain according to the crystal grain test result; The crystal grain that will define again after the grade is put into container, and definition is simultaneously put into the grade of crystal grain container after the definition grade for placing the exclusive container of corresponding grade crystal grain; Continue to pick up crystal grain afterwards up to all crystal grains being put into its exclusive container, only can finish the die pick put procedure fast by the method at the exclusive container of actual die distribution tier definition, further shorten the displacement of pick device taking and putting crystalline grain, effectively solve the excessive and complicated problems too of pick device moving range, and make that the crystal grain fetching process is more accurate and efficient is higher, thereby reach purpose of the present invention.

Description of drawings

Fig. 1, pick and place schematic diagram for known crystal grain.

Fig. 2, place the crystal grain flow chart for known picking up.

Fig. 3, for flow chart of the present invention.Definition and corresponding grade

Embodiment

The present invention is applicable to the die pick put procedure.As shown in Figure 3, the present invention includes following steps:

Step 1

Pick up N crystal grain

At first pick up N crystal grain; Utilize pick device to pick up the crystal grain action, pick device can be mechanical arm.

Step 2

Test N crystal grain grade

Test N crystal grain grade, the method of test crystal grain can be the yield test, the yield test result can pick out the defect level of the crystal grain defective number that is covered with integrated circuit, and according to this defect level as classification foundation, crystal grain is divided into several grades, and grade represents that mode can be natural number, integer or percentage of defects.

Step 3

Judge whether the crystal grain grade has exclusive container

Judge whether the crystal grain grade has an exclusive container,, N crystal grain is put into the exclusive container of N of corresponding grade if exclusive container is arranged; If do not have, then get the M container and be defined as the exclusive container of crystal grain with N crystal grain same levels, wherein M is a natural number.

Step 4

Judge whether crystal grain in addition

The pick device return also judges whether crystal grain in addition, if do not have, then finishes to pick up, if having, repeating step one is to the step 4 subsequent pick-up.

Illustrate, at first pick up first crystal grain; Test the first crystal grain grade, supposing to record grade is grade one; Judge whether corresponding to grade one crystal grain to be the exclusive container of the first exclusive container,,, then get first container and be defined as the exclusive container of crystal grain of corresponding crystal grain grade if do not have if having and then first crystal grain is put into the first exclusive container; Judge whether crystal grain in addition afterwards again,, finish up to picking and placeing if having then to return picks up N crystal grain step.

Comprehensive above-mentioned explanation, the present invention need not preestablish the exclusive container of each grade crystal grain, only define needed exclusive container again at actual die distribution grade, can effectively improve the crystal grain fetching process, therefore finish the die pick put procedure fast, can shorten pick device displacement really, more can effectively solve the excessive and complicated problems too of pick device moving range, make that the crystal grain fetching process is accurate and efficient is higher, further reach and effectively pick up the purpose of placing crystal grain.

In sum, fill part and demonstrate position dynamic coding method of the present invention all dark well-off progressive of executing on purpose and effect, have the value of industry, and be present new invention not seen before on the market, the system that meets patent of invention fully, file an application in the whence in accordance with the law.

Claims

1, a kind of position dynamic coding method, it is used for the die pick put procedure, it is characterized in that it comprises the steps:

Pick up first crystal grain;

Testing first crystal grain is the first estate;

2, position dynamic coding method according to claim 1 is characterized in that described will also comprising the steps: for after first crystal grain of the first estate puts into the first exclusive container

Pick up second crystal grain;

Testing second crystal grain is second grade;

3, position dynamic coding method according to claim 2 is characterized in that second grade of described second crystal grain is same as the first estate.

4, position dynamic coding method according to claim 2 is characterized in that the described second exclusive container is same as the first exclusive container.

5, position dynamic coding method according to claim 1 and 2 is characterized in that the described action that picks and places of picking up first crystal grain and second crystal grain picks up with first mechanical arm and second mechanical arm.

6, position dynamic coding method according to claim 1 and 2, the method that it is characterized in that described test crystal grain are the yield test.

7, position dynamic coding method according to claim 6 it is characterized in that described yield test obtains the crystal grain defect level, and defect level is divided into crystal grain several grades that comprise the first estate and second grade according to this.

8, position dynamic coding method according to claim 7 is characterized in that described grade represents that mode can be natural number.