CN1610085A - Crystalline grain detecting and sorting apparatus and method thereof - Google Patents
Crystalline grain detecting and sorting apparatus and method thereof Download PDFInfo
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- CN1610085A CN1610085A CN 200310102326 CN200310102326A CN1610085A CN 1610085 A CN1610085 A CN 1610085A CN 200310102326 CN200310102326 CN 200310102326 CN 200310102326 A CN200310102326 A CN 200310102326A CN 1610085 A CN1610085 A CN 1610085A
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Abstract
The present invention is crystal grain testing and classifying apparatus and method. During semiconductor manufacture, crystal grain is tested on wafer and fast located without shifting crystal grain for several times. The method includes setting wafer containing at least one crystal grain on the first platform; elevating the locating shaft below the first platform to contact the crystal grain; testing the crystal grain with the probe set on the first manipulator; and sucking the crystal grain with the second manipulator and setting one the second platform. The apparatus include the first platform, the locating shaft set under the first platform with elevating contact, the first manipulator with probe, the second manipulator with sucking structure and the second platform.
Description
Technical field
The invention belongs to semiconductor-fabricating device and method, particularly a kind of crystal grain detects sorter and method thereof.
Background technology
Known crystal grain picks and places testing process, for referring to that crystal grain is taken out from wafer, is put into tray, begins in regular turn crystal grain to be taken out and be put into test platform from tray again.
As shown in Figure 1, the crystalline substance of known techniques picks and places testing process figure, at first crystal grain 20 is taken out from wafer 10, puts into tray 30; Utilizing pick-up method that crystal grain 20 is put into test platform from tray 30 taking-ups again tests.But crystal grain 20 is before test, through repeatedly moving, so before test, must position crystal grain 20 earlier, except Y direction location 41, also must locate 42, and in position fixing process, also must could begin to test through at least three pins (PIN) location through directions X.The moving of crystal grain, the location is miscellaneous, the crystal granules sorted detection efficiency is low.
Summary of the invention
The crystal grain that the purpose of this invention is to provide a kind of directly test on wafer, do not need repeatedly mobile crystal grain, locate crystal grain fast, improves the crystal granules sorted detection efficiency detects sorter and method thereof.
Crystal grain of the present invention detects sorting technique and comprises the steps:
Step 1
At least the wafer that has a crystal grain is arranged on first platform;
Step 2
Rise locating shaft down in first platform, so as to having supported crystal grain;
Step 3
By being arranged at probe test crystal grain on first mechanical arm;
Step 4
Drawing crystal grain by second mechanical arm inserts on second platform.
Crystal grain detection sorter of the present invention comprises sacrificial vessel first platform of the wafer setting of at least one crystal grain, locating shaft, first mechanical arm, be provided with second mechanical arm of drawing structure and second platform that is provided with for crystal grain; Locating shaft is located under first platform, and has the liftable end that supports; First mechanical arm is provided with probe.
Wherein:
Comprise at least one special container on second platform.
Test comprises the testing electrical property that detects crystal grain.
Comprise in the step 4 according to the step 3 test and insert the special container of classification in advance.
Step 1 also comprises carries out wafer in advance and is divided into crystal grain.
The blue film that step 1 also comprises cutting back wafer is set bursts apart.
Has at least one special container on second platform.
Test comprises the testing electrical property that detects crystal grain.
Crystal grain is according to the first mechanical arm probe test and insert the special container of classification in advance.
Wafer places before first platform, carries out the wafer cutting in advance to be divided into crystal grain.
Wafer places before first platform and carries out the wafer cutting to be divided into after the crystal grain, and blue film is burst apart.
Because the inventive method comprises: the wafer that will have a crystal grain at least is arranged on first platform; Rise locating shaft down in first platform, so as to having supported crystal grain; By being arranged at probe test crystal grain on first mechanical arm; Drawing crystal grain by second mechanical arm inserts on second platform.Device comprises sacrificial vessel first platform of the wafer setting of at least one crystal grain, locating shaft, first mechanical arm, be provided with second mechanical arm of drawing structure and second platform that is provided with for crystal grain; Locating shaft is located under first platform, and has the liftable end that supports; First mechanical arm is provided with probe.During classification and Detection, utilize locating shaft directly on wafer, to carry out the crystal grain test, do not need repeatedly mobile crystal grain, also do not need repeatedly positioning instant can finish the crystal grain test; The position axle makes crystal grain can locate fast simultaneously in taking-up, detects, and avoids repeatedly picking and placeing the miscellaneous process that causes the crystal grain resetting whereby, further improves crystal grain and picks and places efficient.Finish crystal grain fast and detect, reduce crystal grain and move number of times, more can avoid the preceding resetting of crystal grain test.Directly test on wafer, do not need repeatedly mobile crystal grain, fast locate crystal grain, improve the crystal granules sorted detection efficiency, thereby reach purpose of the present invention.
Description of drawings
Fig. 1, pick and place testing process figure for known crystal grain.
Fig. 2, be that crystal grain of the present invention detects sorter structural representation cutaway view.
Fig. 3, be that crystal grain of the present invention detects sorting technique process schematic diagram.
Fig. 4, be that crystal grain of the present invention detects the sorting technique flow chart.
Embodiment
The present invention is applicable to the detection classification that crystal grain takes out from wafer, can directly detect crystal grain in the crystal grain fetching process by crystal grain detection sorter of the present invention and method thereof, does not need repeatedly mobile crystal grain, can finish the crystal grain test.
As shown in Figure 2, crystal grain detection sorter of the present invention comprises first platform 60, locating shaft 61 and first mechanical arm 70.
Wafer 10 with at least one crystal grain 21 is arranged on first platform 60.
Locating shaft 61 is located on first platform 60, and has the liftable end 611 that supports.
First mechanical arm 70 is provided with probe 71.
After the supporting end 611 and can support crystal grain 21 of locating shaft 61, carry out testing electrical property through the 71 pairs of crystal grain of probe 21 on first mechanical arm 70, and crystal grain is inserted in the special container of classifying in advance on second platform according to the test result of probe 71 by lifting.
In addition, if when having two above crystal grain 20 on the wafer 10, wafer 10 is before being arranged at first platform 60, and wafer can cut in advance dividing crystal grain 20, and the blue film of putting on the crystal grain 11 is burst apart.
As shown in Figure 3, crystal grain detection sorter of the present invention more comprises second mechanical arm 80 and second platform 90.Second mechanical arm 80 is provided with and can picks up crystal grain and insert on second platform 90 absorption structure 81.
Second platform 90 has several can be for the special container (BIN) of crystal grain setting; Can pick up crystal grain 21 by the absorption structure 81 of second mechanical arm 80 and insert on second platform in 90 the special container through detecting the crystal grain finish.Special container more can be used to classification and contains different types of grains.
As shown in Figure 3, Figure 4, crystal grain detection sorting technique of the present invention comprises the steps:
Step 1
Wafer is arranged on first platform
At first on first platform 60 wafer 10 is set, wherein wafer 10 has a crystal grain 20 and blue film at least and covers 11, if when plural crystal grain 20 is arranged on the wafer 10, will carry out wafer 10 in advance and divide, and the blue film 11 that bursts apart, make that crystal grain 20 can be separated from one another.
Step 2
Supported crystal grain
Step 3
Test crystal grain
By being arranged at probe 71 test crystal grain 20 on first mechanical arm 70, test comprises the testing electrical property that detects crystal grain.
Step 4
Crystal grain is provided with on second platform
Draw crystal grain by second mechanical arm 80 and insert on second platform 90.Comprise at least one special container of classification in advance on second platform.
In sum, fill crystal grain carrying detection method all dark well-off progressive of executing on purpose and effect that part demonstrates the technology of the present invention, have the value of industry, and be present new invention not seen before on the market, the system that meets patent of invention fully, file an application in the whence in accordance with the law.
Claims (12)
1, a kind of crystal grain detects sorting technique, it is characterized in that it comprises the steps:
Step 1
At least the wafer that has a crystal grain is arranged on first platform;
Step 2
Rise locating shaft down in first platform, so as to having supported crystal grain;
Step 3
By being arranged at probe test crystal grain on first mechanical arm;
Step 4
Drawing crystal grain by second mechanical arm inserts on second platform.
2, crystal grain according to claim 1 detects sorting technique, it is characterized in that comprising at least one special container on described second platform.
3, crystal grain according to claim 1 detects sorting technique, it is characterized in that described test comprises the testing electrical property that detects crystal grain.
4, crystal grain according to claim 2 detects sorting technique, it is characterized in that comprising in the described step 4 according to the step 3 test inserting the special container of classification in advance.
5, crystal grain according to claim 1 detects sorting technique, it is characterized in that described step 1 also comprises to carry out wafer in advance and be divided into crystal grain.
6, crystal grain according to claim 1 detects sorting technique, it is characterized in that the blue film that described step 1 also comprises cutting back wafer is set bursts apart.
7, a kind of crystal grain detects sorter, it is characterized in that it comprises sacrificial vessel and first platform of the wafer setting of at least one crystal grain, locating shaft, first mechanical arm is arranged, be provided with second mechanical arm of absorption structure and supply second platform of crystal grain setting; Locating shaft is located under first platform, and has the liftable end that supports; First mechanical arm is provided with probe.
8, detect sorter according to crystal grain shown in the claim 7, it is characterized in that having at least one special container on described second platform.
9, detect sorter according to crystal grain shown in the claim 7, it is characterized in that described test comprises the testing electrical property that detects crystal grain.
10, according to Claim 8 shown in crystal grain detect sorter, it is characterized in that described crystal grain is according to the first mechanical arm probe test and insert the special container of classification in advance.
11, detect sorter according to crystal grain shown in the claim 7, it is characterized in that described wafer places before first platform, carry out the wafer cutting in advance to be divided into crystal grain.
12, detect sorter according to crystal grain shown in the claim 11, it is characterized in that described wafer places before first platform and carries out the wafer cutting to be divided into after the crystal grain, bursts apart to blue film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310102326 CN1610085A (en) | 2003-10-24 | 2003-10-24 | Crystalline grain detecting and sorting apparatus and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310102326 CN1610085A (en) | 2003-10-24 | 2003-10-24 | Crystalline grain detecting and sorting apparatus and method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1610085A true CN1610085A (en) | 2005-04-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200310102326 Pending CN1610085A (en) | 2003-10-24 | 2003-10-24 | Crystalline grain detecting and sorting apparatus and method thereof |
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| CN (1) | CN1610085A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829658A (en) * | 2010-04-16 | 2010-09-15 | 致茂电子(苏州)有限公司 | Quick sorting and arranging machine of crystalline grain and quick sorting and arranging method of crystalline grain |
| CN102101112A (en) * | 2009-12-18 | 2011-06-22 | 旺矽科技股份有限公司 | Light emitting diode wafer sorting method |
| CN102213680A (en) * | 2010-04-09 | 2011-10-12 | 久元电子股份有限公司 | Device and method for detecting luminous diode grain appearance |
| TWI548004B (en) * | 2015-04-30 | 2016-09-01 | Saul Tech Technology Co Ltd | Chip-arranged-and-orientated apparatus and method using the same |
| CN105983543A (en) * | 2015-02-04 | 2016-10-05 | 鸿劲科技股份有限公司 | Testing and sorting device for electronic elements |
| CN110376506A (en) * | 2019-07-17 | 2019-10-25 | 上海华虹宏力半导体制造有限公司 | A kind of test method of fragment chip |
| CN110578131A (en) * | 2019-10-18 | 2019-12-17 | 永固集团股份有限公司 | Laser chemical vapor deposition ceramic layer production line and production process for spherical part of lightning protection device |
| US11637039B2 (en) | 2019-09-19 | 2023-04-25 | Disco Corporation | Method of processing wafer, and chip measuring apparatus |
-
2003
- 2003-10-24 CN CN 200310102326 patent/CN1610085A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101112A (en) * | 2009-12-18 | 2011-06-22 | 旺矽科技股份有限公司 | Light emitting diode wafer sorting method |
| CN102101112B (en) * | 2009-12-18 | 2013-05-15 | 旺矽科技股份有限公司 | Light emitting diode wafer sorting method |
| CN102213680A (en) * | 2010-04-09 | 2011-10-12 | 久元电子股份有限公司 | Device and method for detecting luminous diode grain appearance |
| CN101829658A (en) * | 2010-04-16 | 2010-09-15 | 致茂电子(苏州)有限公司 | Quick sorting and arranging machine of crystalline grain and quick sorting and arranging method of crystalline grain |
| CN105983543A (en) * | 2015-02-04 | 2016-10-05 | 鸿劲科技股份有限公司 | Testing and sorting device for electronic elements |
| TWI548004B (en) * | 2015-04-30 | 2016-09-01 | Saul Tech Technology Co Ltd | Chip-arranged-and-orientated apparatus and method using the same |
| CN110376506A (en) * | 2019-07-17 | 2019-10-25 | 上海华虹宏力半导体制造有限公司 | A kind of test method of fragment chip |
| CN110376506B (en) * | 2019-07-17 | 2022-01-14 | 上海华虹宏力半导体制造有限公司 | Testing method of fragment chip |
| US11637039B2 (en) | 2019-09-19 | 2023-04-25 | Disco Corporation | Method of processing wafer, and chip measuring apparatus |
| US11901234B2 (en) | 2019-09-19 | 2024-02-13 | Disco Corporation | Method of processing wafer, and chip measuring apparatus |
| CN110578131A (en) * | 2019-10-18 | 2019-12-17 | 永固集团股份有限公司 | Laser chemical vapor deposition ceramic layer production line and production process for spherical part of lightning protection device |
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