CN1587916A - Micro flow sensor - Google Patents
Micro flow sensor Download PDFInfo
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- CN1587916A CN1587916A CN 200410068975 CN200410068975A CN1587916A CN 1587916 A CN1587916 A CN 1587916A CN 200410068975 CN200410068975 CN 200410068975 CN 200410068975 A CN200410068975 A CN 200410068975A CN 1587916 A CN1587916 A CN 1587916A
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- flow sensor
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Abstract
A micro flow sensor belongs to measuring apparatus and instrument technical field, comprising two parts of sensing element which is a thin stick made of metal or semiconductor with rectangular section and detecting element which is installed on one end of the sensing element and covered by insulating coating with its electric signal brought out by outgoing line wire. The micro flow sensor has the following advantages: 1) simulating structure of simulate lateral line pilus structure of aquatic animal, its structure is simple and easily to be used in micro electromechanical system (MEMS) to do integrated manufacture. 2) only cold-contact to detected fluid whose biochemical stability will not be destroyed.
Description
Technical field
The present invention relates to measure the device of flow, belong to the surveying instrument field of instrumentation technology.
Background technology
The progress of MEMS (micro electro mechanical system) (MEMS) technology and biochip technology that contemporary biotechnology causes after entering the seventies in 20th century, propose how under miniature scale, to carry out the problem that flow is accurately measured, particularly along with minute vehicle in recent years, developing rapidly of fluid motion MEMS (micro electro mechanical system) such as miniature underwater robot and miniature medical robot, traditional universal flow sensor such as differential pressure flow sensor, hot blast line formula flow sensor, volumetric flow sensor, ultrasonic flow sensor, turbine flow transducer, coriolis flow sensor and fluid oscillation flow sensor etc. are measured because size can't be applied to the flow velocity (amount) of MEMS (micro electro mechanical system) more greatly.The micro flow sensor that solves MEMS (micro electro mechanical system) now mainly is miniature hot-wire flow sensor, but because hot-wire transducer requires sensor to be heated to uniform temperature, can destroy the biochemical stability of fluid like this, can't satisfy the flow measurement of medical science and chemistry.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structurely, the pressure loss is little, the harmless and high micro flow sensor of measuring accuracy of convection cell biochemical stability.
Micro flow sensor of the present invention is by sensing element, and detecting element two parts are formed, and said sensing element is the thin bar of metal material, and its cross section is a rectangle, and the length of side is 10 μ m to 1mm, highly is between the 500 μ m to 100mm.Said detecting element is placed in an end of said sensing element, and the electric signal that detecting element records is drawn by extension line.Said detecting element can be the compliance detecting element, piezoelectric detection element, capacitive detection element, inductive detecting element, magnetic detection element.Cover coatings after detecting element is placed on the sensing element and carry out insulation processing.
Description of drawings
Fig. 1 is the structural representation of micro flow sensor of the present invention;
Fig. 2 is the another kind of structural representation of micro flow sensor of the present invention
Fig. 3 is a working state schematic representation of the present invention
Fig. 4 is an another kind of working state schematic representation of the present invention
Fig. 5 is the circuit diagram of embodiment 1
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, sensing element 1 is thin bar, and detecting element 2 is placed in an end of sensing element 1, detecting element 2 Single detecting element 2-1,2-2 outwards draw lead-in wire 4,5, and single detecting element 2-1,2-2 and output lead 4,5 are through covering Coatings carries out insulation processing.
As shown in Figure 2,1 one-tenth of sensing element is L shaped, and an end 1-1 of sensing element stretches into internal fluid, sensing element 1 in addition The upper potting of one end 1-2 detecting element 2, single detecting element 2-1, the 2-2 of detecting element 2 outwards draws lead-in wire 4,5, and be single Individual detecting element 2-1,2-2 and output lead 4,5 all carry out insulation processing through covering coatings.
The course of work of the present invention is as follows: sensor is installed in the surface of fluid line wall or moving object (microrobot, minute vehicle), and sensing element 1 axis normal of sensor is in main flow direction.Fluid will produce a pressure stable when flowing and act on sensing element 1, and the stress that detecting element assembly 2 records sensing element 1 is converted into signal and is input to secondary instrument by output lead 4,5, and converting through secondary instrument to obtain corresponding flow/speed value.
The present invention compared with prior art has the following advantages:
1, the structure of this Sensor Analog Relay System aquatic animal lateral line system cilium is come structure sensor, and it is simple in structure, is easy to use MEMS (micro electro mechanical system) (MEMS) technology and carries out integrated manufacturing.
2, this sensor only touches the biochemical stability that can not destroy detected fluid with cold joint is arranged by fluid.
3, this sensor is easy to application integration technology and is configured to the flow rate information that is used to measure distribution than larger area sensor array, is specially adapted to minute vehicle, the air speed of MEMS (micro electro mechanical system) such as miniature underwater robot and biomedical engineering or the measurement of flow velocity.
Embodiment
Embodiment 1:
As shown in Figure 3, the L shaped thin bar that the sensing element 1 of this sensor is made by metal material or semiconductor material, its cross section is a rectangle, the length of side is 0.1mm * 2mm, and crossbeam 1-1 is of a size of 50mm, highly is 2mm, detecting element 2 is made up of two foil gauge 2-1 and 2-2, be placed in an end of sensing element, be connected to half-bridge, foil gauge 2-1,2-2 is by extension line 4,5 draw, and connect into testing circuit by Fig. 5, the R among Fig. 5
0Be fixed resistance, R is a foil gauge, and foil gauge 2-1, detecting element that 2-2 forms and extension line thereof cover with insulating material and carry out insulation processing.
Embodiment 2:
As shown in Figure 4, the thin bar of I font that the sensing element 1 of this sensor is made by metal material or semiconductor material, its cross section is a rectangle, the length of side is 0.1mm * 2mm, length is 30mm, detecting element 2 is made up of two piezoelectric ceramics 2-1 and 2-2, and piezoelectric ceramics 2-1 and 2-2 are drawn by extension line 4, and detecting element that piezoelectric ceramics 2-1 and 2-2 form and extension line thereof all cover with insulating material and carry out insulation processing.
Claims (5)
1. micro flow sensor, it is characterized in that: by sensing element, detecting element two parts are formed, said sensing element is the thin bar of metal material, and being of a size of its cross section is rectangle, and the length of side is 10 μ m to 1mm, length is between the 500 μ m to 100mm, said detecting element is placed in an end of said sensing element, and the electric signal that detecting element records is drawn by extension line, covers coatings after detecting element is placed on the sensing element and carries out insulation processing.
2. according to the said micro flow sensor of claim 1, it is characterized in that said detecting element is the piezoelectric detection element.
3. according to the said micro flow sensor of claim 1, it is characterized in that said detecting element is the compliance detecting element.
4. according to the said micro flow sensor of claim 1, it is characterized in that described sensing element is the I font, its cross section is a rectangle, and the length of side is 10 μ m to 1mm, and length is between the 500 μ m to 100mm.
5. according to the said micro flow sensor of claim 1, it is characterized in that the described sensing element of described sensing element is L shaped, its cross section is a rectangle, and the length of side is 10 μ m to 1mm, and crossbeam is of a size of between the 500 μ m to 100mm, highly is between the 500 μ m to 100mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410068975 CN1587916A (en) | 2004-07-15 | 2004-07-15 | Micro flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410068975 CN1587916A (en) | 2004-07-15 | 2004-07-15 | Micro flow sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1587916A true CN1587916A (en) | 2005-03-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410068975 Pending CN1587916A (en) | 2004-07-15 | 2004-07-15 | Micro flow sensor |
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| CN (1) | CN1587916A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385208C (en) * | 2005-05-11 | 2008-04-30 | 浙江大学 | Electrochemical micro flow measurement method and electrochemical micro flow sensor |
| CN106017777A (en) * | 2016-06-28 | 2016-10-12 | 河北工业大学 | Artificial lateral line array type pressure gradient sensor |
| CN107036657A (en) * | 2017-05-19 | 2017-08-11 | 重庆大学 | A kind of magnetic, power cilium biomimetic sensor and preparation method thereof |
| CN108918906A (en) * | 2018-07-27 | 2018-11-30 | 北京航空航天大学 | A kind of flow sensor and preparation method thereof |
| WO2020153835A1 (en) | 2019-01-21 | 2020-07-30 | Berkin B.V. | Micro-coriolis mass flow sensor with strain measurement devices |
-
2004
- 2004-07-15 CN CN 200410068975 patent/CN1587916A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385208C (en) * | 2005-05-11 | 2008-04-30 | 浙江大学 | Electrochemical micro flow measurement method and electrochemical micro flow sensor |
| CN106017777A (en) * | 2016-06-28 | 2016-10-12 | 河北工业大学 | Artificial lateral line array type pressure gradient sensor |
| CN107036657A (en) * | 2017-05-19 | 2017-08-11 | 重庆大学 | A kind of magnetic, power cilium biomimetic sensor and preparation method thereof |
| CN107036657B (en) * | 2017-05-19 | 2019-08-16 | 重庆大学 | A kind of preparation method of magnetic, power cilium biomimetic sensor |
| CN108918906A (en) * | 2018-07-27 | 2018-11-30 | 北京航空航天大学 | A kind of flow sensor and preparation method thereof |
| WO2020153835A1 (en) | 2019-01-21 | 2020-07-30 | Berkin B.V. | Micro-coriolis mass flow sensor with strain measurement devices |
| NL2022423B1 (en) | 2019-01-21 | 2020-08-18 | Berkin Bv | Micro-Coriolis mass flow sensor with resistive readout. |
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