CN1584495A - Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation - Google Patents

Abstract

A superprecise linear cylindricity standard apparatus of major-minor dual track structure in monitoring and compensating type based on laser transparent and reflecting combination is disclosed by the present invention according to action rule of reference motion error of track linear motion to measured result of cylindricity measuring device with utilizing laser beam as physical reference.

Description

Laser thoroughly, the anti-monitoring compensation linear movement reference device of cylindricity instrument that makes up

Technical field

The present invention relates to a kind of laser thoroughly, the anti-monitoring compensation linear movement reference device of cylindricity instrument that makes up, belong to the surface shape measuring technical field, be adapted to ultraprecise cylindricity measurement device especially.

Background technology

The continuous development of modern industry, particularly national defence sophisticated industry technology has proposed more and more higher requirement to the measurement of revolving body workpieces surface profile.For example, in ultraprecise processing and measuring process, usually reached 0.05 μ m as the circularity franchise after the static air pressure main shaft grinding of ultraprecises such as ultra-precision machine tool, litho machine turntable, laser direct writing equipment and ultraprecise test table equipment, cylindricity and right alignment franchise reach 0.2 μ m/100mm～0.5 μ m/100mm; The cylindricity of the inertia device armature spindle of widespread use in the field such as space flight, aviation and right alignment franchise are 0.3 μ m/100mm～0.8 μ m/100mm, and inertia device cylindricity of future generation and right alignment franchise will reach 0.1 μ m/100mm～0.5 μ m/100mm.Above-mentioned listed technical indicator all need be through accurately measuring, this just has higher requirement to the measuring accuracy of existing cylindricity measurement device, should reach 0.005 μ m as the roundness measurement uncertainty, cylindricity and coaxality measurement uncertainty should reach 0.1 μ m/100mm.

At present, existing cylindricity measurement device generally adopts apparatus structure as shown in Figure 1, and it mainly is made up of base 23, vertical main guide rail motion cover 19, rotary table 24, survey sensor 25 and measured workpiece 26.Vertical main guide rail cover 19 is as its rectilinear motion measuring basis, owing to be subjected to the restriction of processing technology and user mode, when the guide rail movement system vertical uses, the initial horizontal state that its processing detects is changed, be difficult to keep its original manufacturing and accuracy of detection, particularly kinematic accuracy requires height and under the big situation of movement travel, just seems particularly outstanding.Vertical rail is because the effect gravity of self when losing horizontal processing detected state, its vertical state often shows as integrally bending, present its guide rail rectilinear motion reference precision, can only reach the temporary transient Limiting Level about 0.1 μ m/100mm, it has become the biggest obstacle that restriction cylindricity measurement measurement device precision further improves.Traced sth. to its source two: one, the absolute precision level of rectilinear motion benchmark is than low order of magnitude of precision level of gyration benchmark, if consider the contribution of error separating technology again to revolution benchmark kinematic accuracy, low approximately two orders of magnitude of rectilinear motion reference precision level; The 2nd, the error of rectilinear motion benchmark is not had a cycle repdocutbility, is difficult to reduce the rectilinear motion error greatly by error separating technology.Therefore, how to reduce sensor rectilinear motion error and become the key point that improves cylindricity measurement measurement device precision.

Summary of the invention

The objective of the invention is in order to overcome the deficiency of existing cylindricity measurement device rectilinear motion benchmark technology, with the saturating anti-combination monitoring compensation technique of laser, the two guide rail craspedodrome technology of major-minor and isolated anti-interference Driving technique collection is one, with laser beam as physical standard, according to the action rule of guide rail rectilinear motion benchmark kinematic error to cylindricity measurement measurement device result, provide a kind of based on laser thoroughly, the anti-ultraprecise cylindricity linear movement reference device that makes up the two guide rail structures of monitoring compensation major-minor.

Technical solution of the present invention is: a kind of laser thoroughly, the anti-monitoring compensation linear movement reference device of cylindricity instrument that makes up, comprise main guide rail column 16, main guide rail cover 19, it is characterized in that this device also comprises:

Be parallel to that main guide rail overlaps the laser beam 10 of 19 direction of motion, is placed on along the semi-transparent semi-reflecting level crossing 6 on laser beam 10 directions successively, the laser-transmitting light beam that is placed on the detection main guide rail cover side-play amount that main guide rail puts to heart monitoring system 4, be placed on the saturating anti-monitoring system of guide rail movement error laser that the main guide rail cover angle shift photodetector system 13 on the semi-transparent semi-reflecting level crossing 6 folded light beam directions constitutes;

The secondary guide rail upright columns 17 that be arranged in parallel with main guide rail column 16, secondary guide rail sleeve 18, flexible link belt 15 are set on it are connected the two guide rail craspedodrome systems of major-minor that main guide rail cover 19 and secondary guide rail sleeve 18 constitute by pulley mechanism 14;

Direct-drive motor 22, precision lead screw 21, the decoupling zero drive-type feed screw nut bindiny mechanism 20 that links with secondary guide rail sleeve 18, be cemented in indication grating 8 on the secondary guide rail sleeve 18, isolated anti-interference driving and height-finding system that the high scale grating of the survey chi 9 that be arranged in parallel with secondary guide rail upright columns 17 constitutes.

For guaranteeing the original basic precision of main guide rail system, eliminate the disturbance that causes in the drive system motion process to the middle and high frequency of craspedodrome guide rail, make it avoid the interference of links such as drive system, vertical optical grating measuring system, the present invention has adopted the two guide rail structures and the isolated Driving technique of major and minor guide rail.Two guide rail structures make main guide rail kinematic system and secondary guide rail movement system be in quasi-balanced state, adopt micro-driving force just can realize smooth drive, reduce the driving load of motor, make major-minor motion guide rail system be in plateau.Simultaneously, motor-driven only produces Z and acts on the secondary guide rail to thrust driving link by no radial force spheroid contact, and vertical optical grating measuring system also acts on the secondary guide rail, " flexibility " by decoupling type between major and minor guide rail connects, and farthest reduces the interference to main guide rail cover 19.Because drive system and main guide rail system are isolated, dither in the micromotor is by the filter action of secondary guide rail air film, make its disturbance only have low-frequency component to the main guide rail cover, the random element of main guide rail system motion error is farthest suppressed, and establish prerequisite and basis for the monitoring to its kinematic error compensates.Two guide rail structures of the major and minor guide rail of cylindricity measurement device and isolated Driving technique are that the present invention is different from one of inventive point of prior art.

As previously mentioned, cylindricity measurement device main guide rail column 16 is because the effect gravity of self when losing horizontal processing detected state, and its vertical state often shows as integrally bending, also is subjected to the interference of various random quantitys simultaneously.The present invention draws θ by the mechanism of action of cylindricity measurement device linear motion guide rail kinematic error is analyzed _xAnd ε _yBe the basic of the single gauge head cylindricity instrument rectilinear motion error of influence.Proposed based on saturating, the anti-combination monitoring of laser compensation technique, this technology is utilized model solution again by the angle swing amount peace momentum of monitoring cylindricity measurement device guide rail specific direction, realizes the compensation of rectilinear motion benchmark kinematic error for this reason.Based on saturating, the anti-knockdown cylindricity measurement device rectilinear motion error laser monitoring compensation technique of laser, be two of the present invention's inventive point of being different from prior art.

After adopting above-mentioned technology, not only can monitor the systematic error of compensating motion guide rail in real time, its random motion error of monitoring compensation in real time makes cylindricity measurement device precision of rectilinear motion reach 30nm/100mm; 40nm/300mm; 50nm/500mm.

Description of drawings:

Fig. 1 is existing cylindricity instrument sensor construction synoptic diagram

Fig. 2 is the saturating anti-combination monitoring compensation linear movement reference device of cylindricity instrument structural representation of laser

Fig. 3 is a rectilinear motion error synoptic diagram

Fig. 4 is the saturating anti-combination monitoring compensation technique schematic diagram of laser

Fig. 5 is a drift value FEEDBACK CONTROL fiber optic collimator system pie graph

Fig. 6 is a horizontal direction drift value test experiments data plot

Fig. 7 is a vertical direction drift value test experiments data plot

Among the figure: 1 laser instrument, 2 single-mode fiber colimated light systems, 3 micrometric displacements are looked for middle worktable, 4 pairs of heart monitoring systems, 5 micrometric displacement monitoring sensors, 6 semi-transparent semi-reflecting level crossings, 7 quarter-wave plates, 8 indication gratings, 9 scale gratings, 10 laser beams, 11 polarization spectroscope PBS, 12 laser direction stabilising arrangements, 13 angle shift photodetector systems, 14 pulley mechanisms, 15 flexible link belts, 16 main guide rail columns, 17 secondary guide rail upright columns, 18 secondary guide rail sleeves, 19 main guide rail covers, 20 feed screw nut bindiny mechanisms, 21 precision lead screws, 22 direct-drive motors, 23 device pedestals, 24 rotary tables, 25 survey sensors, 26 measured workpieces, 27 beam expander devices, 28 fiber couplers, 29 collimating mirrors, 30 light beam two-dimension translational light microscopic mechanisms, 31 space corner mirror bodies, 32 computing machines, 33 spectroscope BS1,34 spectroscope BS2,35 4 quadrant detector QPD1 systems, 36 focusing objective lens, 37 4 quadrant detector QPD2 systems, 38 single-mode fibers collimation back horizontal direction curve, 39 drift value FEEDBACK CONTROL collimation back horizontal direction curve, 40 single-mode fibers collimation back vertical direction curve, 41 drift value FEEDBACK CONTROL collimation back vertical direction curve.

Embodiment

Below in conjunction with accompanying drawing to the present invention is based on laser thoroughly, anti-structure and the principle of work that makes up the monitoring compensation linear movement reference device of cylindricity instrument be elaborated:

The inventive system comprises the two guide rail craspedodrome systems of major-minor, the saturating anti-monitoring system of guide rail movement error laser, isolated anti-interference driving and height-finding system.

As shown in Figure 2, the two guide rail craspedodrome systems of major-minor comprise main guide rail column 16 and the secondary guide rail upright columns 17 perpendicular to erection seat 23, be provided with on the main guide rail column 16 on main guide rail cover 19, the secondary guide rail upright columns 17 secondary guide rail sleeve 18 is set, flexible link belt 15 couples together main guide rail column 16, main guide rail cover 19, secondary guide rail upright columns 17, secondary guide rail sleeve 18 by pulley mechanism 14.

The saturating anti-monitoring system of guide rail movement error laser comprises the high direction stable laser 1 that produces the reference laser light beam, single-mode fiber colimated light system 2, laser direction stabilising arrangement 12, be placed on the polarization spectroscope 11 on the laser direction stabilising arrangement outgoing beam direction, be parallel to main guide rail overlap 19 direction of motion z to laser beam 10, be placed on successively along the quarter-wave plate 7 on laser beam 10 directions, semi-transparent semi-reflecting level crossing 6, be placed on the laser-transmitting beam center monitoring system 4 of the detection guide rail sleeve side-play amount that main guide rail puts, be placed on the main guide rail cover angle shift photodetector system 13 on the folded light beam direction of semi-transparent semi-reflecting level crossing 6, wherein the beam center monitoring system 4, y micrometric displacement monitoring sensor 5 in cylindricity instrument sensor measurement direction is looked for looks for middle worktable 3 to link to each other with micrometric displacement.

Isolated anti-interference driving and height-finding system comprise direct-drive motor 22, precision lead screw 21, decoupling zero drive-type feed screw nut bindiny mechanism 20, indication grating 8, survey high scale grating chi 9.Decoupling zero drive-type feed screw nut bindiny mechanism 20 links with secondary guide rail sleeve 18, be used to drive secondary guide rail sleeve 18 along Z to moving, indication grating 8 is cemented on the secondary guide rail sleeve 18, grating 9 be arranged in parallel with secondary guide rail upright columns 17, indication grating 8 is formed height measuring devices with scale grating 9, be used to measure main guide rail cover 19 direction of motion z to height.

The course of work of apparatus of the present invention as shown in Figure 2, the laser that high direction stable laser 1 sends carries out elementary collimation through single-mode fiber colimated light system 2, again through 12 outgoing of laser direction stabilising arrangement be high directional stability laser beam 10, this laser beam is incided on polarization spectroscope PBS 11 light splitting surfaces as the physical standard light beam, through PBS 11 reflection and be parallel to guide rail movement direction z to folded light beam, see through quarter-wave plate 7, be radiated at and be cemented in semi-transparent on the motion guide rail, half antiplane mirror 6, turned back to quarter-wave plate 7 also is positioned at the PBS11 top through the light splitting surface irradiation of PBS 11 angle shift photodetector system 13 again by the reflected light of these semi-transparent semi-reflecting level crossing 6 reflections, be used to measure the main guide rail cover around the axial angle swing variable quantity of x θ _xLight beam through semi-transparent semi-reflecting level crossing 6 transmissions, shine main guide rail and overlap 19 laser heart monitoring system 4, look for middle worktable 3 to drive laser based on the micrometric displacement of piezoelectric ceramics PZT Driving technique to heart monitoring system and laser beam centering, its displacement is by y micrometric displacement monitoring sensor 5 monitorings in looking for, main guide rail overlaps in 19 motion processes, its y is obtained to micrometric displacement monitoring sensor 5 to component and y by the y of laser to heart monitoring system 4 to the translation amount, so just can obtain motion main guide rail cover 19 along y to translational movement ε _yThe main guide rail cover 19 angle swing variable quantity θ that wind perpendicular to the paper direction have been known _xWith along y to translational movement ε _y, pass through model solution again, with ε _yAnd θ _xInfluence value to the cylindricity measurement result is rejected from the cylindricity measurement result, finally realizes the detection and the compensation of ultraprecise cylindricity measurement device rectilinear motion error.

In the guide rail movement process, direct-drive motor 22 drives precision lead screw 21 and rotates, driving feed screw nut bindiny mechanism 20 moves upward, decoupling zero drive-type feed screw nut bindiny mechanism 20 links with secondary guide rail sleeve 18, be used to drive secondary guide rail sleeve 18 along Z to moving, owing to adopted the two guide rail craspedodrome systems of major-minor and made main guide rail cover rectilinear motion benchmark and secondary guide rail sleeve balance guide rail be in quasi-balanced state, adopt microkinetic can realize that just balance drives like this, reduce the driving load of motor, make movable body be in accurate plateau.Simultaneously, motor-driven adopts spheroid to contact with secondary guide rail sleeve 18 lower planes, only producing Z acts on the secondary guide rail to thrust driving link, vertical optical grating measuring system also acts on the secondary guide rail, " flexibility " steel wire by decoupling type between major and minor guide rail connects, farthest reduce interference, make its interference minimum the influence of cylindricity instrument survey sensor 25 to main guide rail cover 19.

Saturating anti-combination monitoring compensatory theory foundation of cylindricity instrument craspedodrome kinematic error laser and principle:

As shown in Figure 3, establishing main guide rail, to overlap 19 initial position coordinates be O-x _oy _oz _o, O is a true origin, z _oBe direction of motion.When main guide rail overlaps 19 along z _oWhen direction arrived a certain position from initial position, the coordinate system of object became O '-xyz, because the influence of object of which movement error, true origin O leaves desirable direction of motion z _oAxle arrives O ' (ε _x, ε _y, ε _z+ v _t) point.The rectilinear motion error of object in motion process can be decomposed at x _oAxle and y _oThe translation motion error ε that produces on the direction of principal axis _xAnd ε _y, respectively around three coordinate axis x _o, y _oAnd z _oRotation error θ _x, θ _yAnd θ _zAnd along z _oThe positioning error ε of axle motion _zSix kinematic errors.

Select that any 1 r is as the reference point on the main guide rail cover 19, the initial position coordinate before the motion is made as r (r _Xo, r _Yo, r _Zo), owing to be subjected to main guide rail to overlap 19 kinematic error θ _x, θ _y, θ _z, ε _x, ε _yAnd ε _zInfluence, the location point that arrives among coordinate system O '-xyz is r ' (r _x, r _y, r _z), its coordinate position is O-x with respect to initial coordinate _oy _oz _oRelation be equivalent to coordinate system O '-xyz and obtain around x, y and z coordinate axis three times rotations and along the translation of z axle, promptly at first around one-θ of x axle rotation _xThe angle gets middle coordinate system O '-xy ₁z ₁, again around one-θ of y axle rotation _yThe angle gets second coordinate system O '-x ₁y ₁z _o, again around one-θ of z axle rotation _zThe angle gets coordinate system O '-x _oy _oz _o, then along z _oThe axle translation obtains coordinate system O-x _oy _oz _o,

When coordinate system at x _oAxle, y _oProduce ε on the direction of principal axis _x, ε _yTranslation is along z _oDirection of principal axis produces ε _z+ v _tThe item translation, when promptly true origin moved on to O by O ', vector r ' was at O-x _oy _oz _oCan be expressed as in the coordinate system:

$\left[\begin{array}{c}{r}_{\mathrm{xo}}\\ r_{\mathrm{yo}}\\ r_{\mathrm{zo}}\end{array}\right]=\left[\begin{array}{ccc}1& {-\mathrm{\θ}}_z& {\mathrm{\θ}}_y\\ {\mathrm{\θ}}_z& 1& {-\mathrm{\θ}}_x\\ {-\mathrm{\θ}}_y& {\mathrm{\θ}}_x& 1\end{array}\right]\left[\begin{array}{c}{r}_x\\ r_y\\ r_z\end{array}\right]+\left[\begin{array}{c}{\mathrm{\ϵ}}_x\\ {\mathrm{\ϵ}}_y\\ {\mathrm{\ϵ}}_z+v_t\end{array}\right]--\left(1\right)$

Under the no kinematic error perfect condition, should arrive ideal position (r after the motion of r point _x, r _y, r _z+ v _t), then the deviation of kinematic error and ideal position is:

$\left[\begin{array}{c}{\mathrm{\Δr}}_{\mathrm{xo}}\\ {\mathrm{\Δr}}_{\mathrm{yo}}\\ {\mathrm{\Δr}}_{\mathrm{zo}}\end{array}\right]=\left[\begin{array}{c}{r}_{\mathrm{xo}}-r_x\\ r_{\mathrm{yo}}-r_y\\ r_{\mathrm{zo}}-r_z\end{array}\right]=\left[\begin{array}{ccc}0& -{\mathrm{\θ}}_z& {\mathrm{\θ}}_y\\ {\mathrm{\θ}}_z& 0& {-\mathrm{\θ}}_x\\ {-\mathrm{\θ}}_y& {\mathrm{\θ}}_x& 0\end{array}\right]\left[\begin{array}{c}{r}_x\\ r_y\\ r_z\end{array}\right]+\left[\begin{array}{c}{\mathrm{\ϵ}}_x\\ {\mathrm{\ϵ}}_y\\ {\mathrm{\ϵ}}_z\end{array}\right]--\left(2\right)$

With regard to rectilinear motion, z _oThe positioning error ε of direction _zDirectly record by displacement transducer, in the guide rail rectilinear motion error, can not consider this error, even ε _z=0, then following formula can be reduced to:

Formula has ε in (3) _x, ε _y, θ _x, θ _yAnd θ _zFive independent variables, if try to achieve this five variablees, necessary 5 independent equations of simultaneous, promptly on main guide rail cover 19, choose three different monitoring points, detect the side-play amount of they and perfect condition respectively, in its substitution equation 3, can obtain the every value of rectilinear motion error.

According to above-mentioned kinematic error model, as monitoring criteria, on the guide rail movement object, select r with the three beams of laser light beam consistent that is parallel to each other with the guide rail movement direction ₁, r ₂And r ₃3 as the monitoring point, and surveys with three 4 quadrant detector QPD and to put location status separately.When initial position, the three beams of laser beam center is overlapped with three QPD centers, like this when motion guide rail is mobile along the Z axle, three QPD just can record the shifting deviation Δ r of they and x, y axle respectively _Xoi, Δ r _YoiI=1,2,3, have according to formula (3):

Select r ₁Put as the reference coordinate initial point, i.e. r _X1=r _Y1=r _Z1=0, main guide rail overlaps 19 errors and promptly can be described as: r ₁The translation error ε of point on x, y coordinate _x, ε _yWith around r ₁The angular errors θ that point rotates _x, θ _yAnd θ _z, have this moment: r _X1=r _Y1=r _Z1=0

Finding the solution formula (5) system of equations gets:

Then main guide rail put arbitrfary point Q (kinematic error state z) can be expressed as for x, y:

ε wherein _x, ε _y, θ _x, θ _yAnd θ _zBy formula 6 decisions.

In the cylindricity measurement device, sensor is arranged as single gauge head method as shown in Figure 1 usually, and tested rotary work piece 26 places on the rotary table 24, and sensor 25 is positioned on the main guide rail cover 19.Single gauge head formula cylindricity measurement sensor measurement sensitive direction is made as y, and the guide rail movement error can be got by formula (7) the sensor measurement influence:

Δy＝ε _y-xθ _z+zθ _x (8)

During light path arrangement, be extended line and the motion guide rail monitoring point of sensor measurement line when crossing, can eliminate of the influence of guide rail angular errors fully measurement value sensor if make x=0, z=0.But in the ordinary course of things, because workpiece calibration position and sensor installation site difference cause z ≠ 0, then:

Δy＝ε _y+zθ _x (9)

In the guide rail movement error separating detected, three beam laser basic rack linearity monitoring methods are the θ of disengaging movement guide rail fully in theory _x, θ _y, θ _z, ε _x, ε _yFive kinds of kinematic errors should overlap with the three light beams center respectively with the strict keeping parallelism of guide rail movement direction, three QPD receiving plane center initial positions and keep directional stability vertical, three beams of laser itself detection sensitivity good, QPD high with direction of motion but its prerequisite is the three beams reference beam.From technical standpoint, satisfy above-mentioned condition, particularly satisfy three beams reference beam and the strict keeping parallelism of guide rail movement direction, be very difficult in actual adjustment.From formula 9 as can be seen: to the rectilinear motion benchmark monitoring system under this specific service condition of cylindricity instrument linear datum guide rail, five of the separation detection motion guide rail kinds of kinematic errors need only real-time separation detection θ fully _xAnd ε _y, can separate of the influence of compensating line motion benchmark kinematic error fully to cylindricity measurement measurement device precision.At this special requirement of cylindricity, proposed based on saturating, the trans cylindricity guiding error of laser detection method at this, be used for detecting in real time motion main guide rail cover θ _xAnd ε _yThe movable body error, obtain θ _xAnd ε _yThe telemechanical error is found the solution through modelling again, can obtain by the motion guide rail error theta _xAnd ε _yThe sensor errors that causes, and from sensor measurement, rejecting in real time, monitoring compensation when having realized the high-precision real of cylindricity guide rail movement error then.

Based on above-mentioned analysis, the present invention is directed to the concrete application feature of cylindricity measurement device rectilinear motion benchmark, propose a kind of laser beam of monitoring the saturating anti-combination of cylindricity measurement device rectilinear motion error and detected compensation method and technology.Saturating, the anti-combination monitoring of its light beam compensation technique principle during light path layout, reduces semi-transparent, half antiplane mirror 6 and laser to the distance between the heart detection system 4 as far as possible shown in 4.Worktable 3 linked with main guide rail cover 19 during micrometric displacement was looked for, detect y to translational movement to 4 of heart monitoring systems thereon, control micrometric displacement drive system, make QPD center centering reference laser light beam 10 center of energy all the time, the displacement of little driving is detected by high-precision micro displacement monitoring sensor 5, and the y of y in the corresponding guide rail sleeve motion process of side-play amount sum of its size and QPD is to the translation amount.According to the optical lever principle, H is big more to size, and the detection sensitivity of angle swing amount monitoring system is high more, if H is restricted to physical dimension, angular measurement sensor also can be designed to the critical angle angular measurement sensor based on principles of internal reflection, increases the measurement capability to guide rail angle swing amount.The high scale optical-mechanical system of the survey of H in the available Fig. 2 of size height records.

The concrete principle of saturating, the anti-combination monitoring of laser compensation technique as shown in Figure 4, high stable laser beam after the direction stabilized treatment is as the physics light beam, its light splitting surface reflection back of inciding polarization spectroscope PBS 11 is seen through quarter-wave plate 7, be radiated at the semi-transparent semi-reflecting level crossing 6 that is cemented on the motion guide rail, being turned back to quarter-wave plate 7 again by the reflected light of this mirror reflects also shines on the angle shift photodetector system 13 through the light splitting surface of PBS 11, be used to measure the main guide rail cover 19 angle swing variable quantities that wind perpendicular to the x direction of paper, shown in Fig. 4 a; Transmitted light shines the four-quadrant silicon photocell on the heart detection system 4, be used to measure main guide rail cover 19 along y to translational movement, shown in Fig. 4 b.During light path arrangement, can make H much larger than h, angle shift is reduced to minimum to the influence of horizontal shift like this, and simultaneously, H is very big, and the Δ x that the angle swing amount is caused changes greatly, can increase the detection sensitivity of angle swing amount.

At present, feed rod rod-type angle detection system accuracy of detection can reach 10 ^-8Rad magnitude, translational movement accuracy of detection can reach in the 10nm, can satisfy the accuracy requirement of reference model cylindricity instrument rectilinear motion error laser detection fully.And the drift value of laser beam self is generally 10 ^-4～10 ^-6The rad magnitude far can not satisfy reference beam and should reach 10 ^-7The collimation accuracy requirement of rad magnitude.To the demand of high directional stability reference laser light beam, in this invention, the fiber optic collimator system of stabilized lasers beam drift amount FEEDBACK CONTROL has been proposed when monitoring for satisfying reference model cylindricity instrument rectilinear motion error high-precision laser.

Its principle of compositionality is seen Fig. 5, the light beam of laser instrument 1 outgoing enters single-mode fiber 2 through beam expander 27 fiber couplers 28, single-mode fiber 2 and collimating mirror 29 carry out becoming directional light directive light beam two-dimension translational light microscopic mechanism 30 behind the elementary collimation, the light of translation light microscopic mechanism 30 outgoing is through space corner mirror body 31 directive spectroscope BS1 33 and spectroscope BS2 34, the rayed of BS1 reflection is used for the horizontal shift of detecting light beam in the heart in the QPD1 of 4 quadrant detector system 35, the light line focus object lens 36 of BS2 reflection focus on 4 quadrant detector system QPD2 37 centers, QPD2 is positioned on the focal plane of focusing objective len 36, is used for the angle drift value of detecting light beam.In the alignment procedure, computing machine 32 at first floats component according to the space two-dimensional angle of the detected laser beam of QPD1, controls two-dimentional driving mechanism rotational angle catoptron 31 and makes laser beam float the direction rotation that reduces to the angle, reduces the angle drift of laser beam.The value that QPD2 surveys is presented as that mainly the flat of laser beam floats, and its size can suppress by control bundle two-dimension translational light microscopic mechanism 30.In the beam drift amount FEEDBACK CONTROL colimated light system, QPD1 and light beam space horizontal shift control gear 30 constitute light beam space drift value feedback control system, the space horizontal shift of control bundle in real time.QPD2 and light constitute light beam space drift value feedback control system, the space angle shift of control bundle in real time through space corner mirror body 31.In the real-time FEEDBACK CONTROL alignment procedure of light beam, the space horizontal shift of laser beam and angle shift have been realized separation detection and the real-time FEEDBACK CONTROL of each self-forming, reduce intercoupling in the laser beam control procedure, improved light beam space drift value control accuracy and collimation efficient.

In the colimated light system, the S1557 model that the QPD detector selects for use Japanese HAMAMATSU company to produce, the live width of its right-angled intersection separator bar is 10 μ m.For reducing of the influence of right-angled intersection separator bar to the testing circuit precision, improve the resolving power of system simultaneously, the 1145P model that laser instrument selects for use U.S. JDS Uniphase company to produce, its emergent power is up to 35mW.The model that single-mode fiber selects for use U.S. MELLES GRIOT company to produce is the single-mode polarization maintaining fiber transmission system of 05FDS207, it is integrated in one coupled system, optical fiber and colimated light system, the efficient of coupling back outgoing beam is up to 65%, the diameter of outgoing beam is that the circularity of φ 0.7mm hot spot is better than 95%, and the eye point degree of stability is better than 1 μ rad/ ℃.Piezoelectric ceramic actuator select for use Chinese Academy of Sciences's Chengdu photoelectricity the telescopic piezoelectric ceramic driver, flexible scope be-6 μ m～+ 6 μ m, and itself and four tunnel Piezoelectric Driving power supplys and two-dimentional driving mechanism are matched, angled mirrors is controlled resolving power and is reached 2 * 10 ^-8Rad, effectively setting range reaches 20 * 10 ^-6Rad.Translation control mirror resolving power reaches 3nm, and range of control reaches 2000nm, and the focal length of condenser lens is selected f=150mm for use, and signals collecting and control card adopt and grind magnificent PCL813B.Be about the 500mm place in collimator distance, the collimation effect of collimation reference beam vertical direction and horizontal direction is tested.Test duration is 900s, gathers 40000 points altogether, and horizontal direction drift value test experiments data are seen Fig. 6, and Fig. 7 is seen in the test of vertical direction drift value.

Laser beam is behind the single-mode fiber collimation, and shown in curve among Fig. 6 38, outgoing beam reaches about 0.9 * 10 in the horizontal direction ^-6The collimation precision of rad; Shown in curve among Fig. 7 40, vertical direction reaches about 0.8 * 10 ^-6The collimation precision of rad.Light beam collimates through single-mode fiber, and after the drift value FEEDBACK CONTROL, shown in curve among Fig. 6 39, horizontal direction reaches about 0.6 * 10 again ^-7The collimation precision of rad; Shown in curve among Fig. 7 41, vertical direction reaches about 0.5 * 10 ^-7The collimation precision of rad.Find out that from experiment after beam drift amount feedback control compensation, the drift value of light beam obviously is inhibited, the collimation effect improves a magnitude.

Claims (4)

1. A laser thoroughly, the anti-monitoring compensation linear movement reference device of cylindricity instrument that makes up, comprise main guide rail column (16), main guide rail cover (19), it is characterized in that this device also comprises:

   The laser-transmitting light beam that be parallel to the laser beam (10) of main guide rail cover (19) direction of motion, be placed on along the semi-transparent semi-reflecting level crossing (6) on laser beam (10) direction successively, is placed on the detection main guide rail cover side-play amount that main guide rail puts to heart monitoring system (4), be placed on the saturating anti-monitoring system of guide rail movement error laser that the main guide rail cover angle shift photodetector system (13) on semi-transparent semi-reflecting level crossing (6) the folded light beam direction constitutes;

   The secondary guide rail upright columns (17) that be arranged in parallel with main guide rail column (16), secondary guide rail sleeve (18), flexible link belt (15) are set on it are connected the two guide rail craspedodrome systems of major-minor that main guide rail cover (19) and secondary guide rail sleeve (18) constitute by pulley mechanism (14);

   Direct-drive motor (22), precision lead screw (21), the decoupling zero drive-type feed screw nut bindiny mechanism (20) that links with secondary guide rail sleeve (18), be cemented in indication grating (8) on the secondary guide rail sleeve (18), isolated anti-interference driving and height-finding system that the high scale grating of the survey chi (9) that be arranged in parallel with secondary guide rail upright columns (17) constitutes.
2. 2. device according to claim 1 is characterized in that said laser-transmitting light beam is provided with the cylindricity instrument sensor measurement direction that drives based on piezoelectric ceramics (PZT) (y to) micrometric displacement to heart monitoring system (4) and looks for middle worktable (3) and y micrometric displacement monitoring sensor (5) in looking for.
3. 3. device according to claim 1 and 2 is characterized in that also comprising the system that produces the reference laser light beam that this system comprises high direction stable laser (1), single-mode fiber colimated light system (2), laser direction stabilising arrangement (12).
4. 4. device according to claim 1 is characterized in that also comprising the polarization spectroscope (10) that is placed on laser direction stabilising arrangement (12) the outgoing beam direction, is placed on quarter-wave plate (7) semi-transparent, half-reflecting mirror (6) top.

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