CN1583541A - Microdriver with multilayer drivnig membrane structure and manufacturing method thereof - Google Patents
Microdriver with multilayer drivnig membrane structure and manufacturing method thereof Download PDFInfo
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- CN1583541A CN1583541A CN 200410013779 CN200410013779A CN1583541A CN 1583541 A CN1583541 A CN 1583541A CN 200410013779 CN200410013779 CN 200410013779 CN 200410013779 A CN200410013779 A CN 200410013779A CN 1583541 A CN1583541 A CN 1583541A
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Abstract
A microdriver with multi-layer drive membrane structure is composed of an upper body consisting of driving cavity, water inlet tube, and water outlet tube, a lower body consisting of two expansion tubel shrinking tube unit, and a multi-layer drive membrane Si/SiO2/Ti/PZT/Cr/Au. Its preparing process is also disclosed.
Description
Technical field
The present invention relates to a kind of employing Si/SiO
2Microdrive of/Ti/Pt/PZT/Cr/Au multilayer driving membrane structure and preparation method thereof.
Background technique
The micrometeor system is the important branch of MEMS, has become popular research field in recent years.Microdrive is the important symbol of micro-flow system development level as the performer of an important micro-flow system.It is widely used in aspects such as the transmission of medicine trace, the injection of fuel trace, cell separation, integrated electronic cooling and microchemical analysis, and therefore, the research of microdrive is an emphasis of micromachined system always.Because being the to-and-fro motion by drive membrane, the flow control of microdrive causes that the volume of pump chamber and variation in pressure realize, so the size of the driving force of drive membrane and displacement have directly determined the quality of microdrive performance index, promptly the deformation degree of drive membrane, response frequency have fundamental influence to the work of microdrive.At present, the driving principle of drive membrane have that piezoelectricity, static, electromagnetism, hot gas are moving, heat flow, bimetallic effect and shape memory effect driving etc.Wherein, hot gas is moving, bimetallic effect, shape memory effect drive and belong to low frequency and drive, and its shortcoming is that to drive flow less; Piezoelectric constant, static, electromagnetism belong to high-frequency drive, although it is also bigger to produce flow, its shortcoming is that required operating voltage is corresponding higher.For example, the paper of delivering in 1996 at Yang Yue, the Zhou Zhaoying of " Chinese journal of scientific instrument " Tsing-Hua University and Ye Xiongying etc. " Bimetallic Actuated Micropump ", it is 20V that the bimetal of their development drives the micropump driving voltage, and driver frequency only is 5Hz, and output flow is 36 μ l/min.And go up people such as the R.Zengerle of Fraunhofer Institute for Solid Technology (IFT) and A.Richter published thesis in 1992 " A micro membrane pump withelectrostatic actuation " at " Micro Electro Mechanical Systems ", the electrostatic driving micro pump of report, the operating voltage height is 170V, is unfavorable for using.
Summary of the invention
The purpose of this invention is to provide a kind of employing Si/SiO
2Microdrive of/Ti/Pt/PZT/Cr/Au multilayer driving membrane structure and preparation method thereof.
Formation of the present invention comprises: the lower body [2] that can play the upper body [1] of pressure pump effect and valve body effect has reached the Si/SiO that has of driving action
2The multilayer drive membrane [3] of/Ti/Pt/PZT/Cr/Au.Wherein upper body [1] is processed into actuator chamber [4] with pressure pump effect and is used to transmit liquid and intake pipe that is connected lower body [2] [5] and outlet conduit [6]; Lower body [2] is made the valve body with the one-way valve that is equivalent to the valveless type structure; Expanding duct/collapsible tube [7], [8] also align with water-in and water-out pipeline [5], [6] respectively and are connected (seeing accompanying drawing 1); Its employing of multilayer drive membrane [3] that produces driving force as piezoelectric type has Si/SiO
2/ Ti/Pt/PZT/Cr/Au multilayer drives the membrane structure form, and its formation comprises upper electrode [9], bottom electrode [11] and ground electrode [12] that is used for connecting the external drive power supply and the pzt thin film [10] that is used for producing driving pressure.
Pzt thin film [10] is placed on the centre of upper electrode [9] and bottom electrode [11], under the effect of the driving power of upper and lower electrode [9], [11], utilize the inverse piezoelectric effect of pzt thin film [10] to produce contraction and uphold, make pzt thin film produce crooked deformation, cause the volume of actuator chamber [4] and the variation of pressure, forcing liquid between water-in and water-out pipeline [5], [6], to flow under the cooperation of expanding duct/collapsible tube [7], [8].
The working principle of this invention is, utilize multilayer drive membrane [3] piezoelectric effect produced moves upward, make the pressure in the actuator chamber [4] with pressure pump effect reduce, the difference of the pressure drop coefficient that occurs by expanding duct/collapsible tube [7] under micro-dimension, [8], expanding duct/collapsible tube [7] sucks liquid from intake pipe [5]; Otherwise multilayer drive membrane [3] moves downward, and actuator chamber [4] internal pressure increases, and expanding duct/collapsible tube [8] is to the directed drain of outlet conduit [6].Therefore, along with multilayer drive membrane [3] is done cyclical movement under the effect of power electricity, liquid just constantly is drawn into and passes through outlet conduit [6] by intake pipe [5] and is pumped out.The range of flow of the microdrive of this invention can be according to the different demands of different user, by the size design of multilayer drive membrane [3] and expanding duct/collapsible tube [7], [8] is determined, after this design size is determined, the flow of this microdrive is in certain fine setting scope, and also the voltage and the frequency that can further be applied on the multilayer drive membrane [3] by change regulated.
Making method of the present invention is as follows:
The making of the actuator chamber [4] of upper body [1] is that the reverse side at semiconductor [100] silicon (Si) sheet carries out etching, adopts anisotropy rot etching technique in the micromachined technology to required silicon (Si) film thickness 4～8 μ m, forms actuator chamber [4]; Form water-in and water-out pipelines [5], [6] with same technology, its pipe diameter is generally 1000 μ m.
Expanding duct/the collapsible tube [7] of lower body [2], the making of [8] are the micromachined that adopts silicon (Si) equally, form the conical pipe shape by etching process, and the osculum end of its conical pipe is of a size of 30～50 μ m, and its tapering is 5 °～18 °; Pipe range 3000～3500 μ m.
Bonding adopts the Au-Si bonding techniques between upper body [1] and the lower body [2], at the front of lower body [2] plating layer of Au metallic film, only the metallic film at the position that needs bonding is kept with photoetching and chemical corrosion method then, and remaining part all is corroded.With upper and lower body [1], [2] alignment, water-in and water-out pipeline [5], [6] are aimed at respectively with expanding duct/collapsible tube [7], [8] at last, be put into then and get final product solder bonds after reaching eutectic temperature in the sintering furnace.
The technology of multilayer drive membrane [3] is made:
At first select silicon (Si) sheet of twin polishing for use, carry out two-sided oxidation and generate silica (SiO
2) isolation layer, positive adopt CVD (Chemical Vapor Deposition) method to generate polysilicon to make ground electrode [12] at it again, on this base, generate silicon dioxide insulating layer with chemical vapor deposition once more and be used for insulation; The making that is placed on the bottom electrode [11] above the ground electrode [12] is to adopt interchange or magnetically controlled DC sputtering technology priority splash-proofing sputtering metal Ti and Pt to finish; The making of pzt thin film [10] is finished by utilization sol-gel preparation process.At first adopting with acetic acid and propyl alcohol is that the concentration that solvent is prepared is the Pb of 0.4mol/L
1.1(Zr
0.53Ti
0.47) O
3Colloidal sol.Through repeatedly revolving embrane method with PZT sol-gel certain thickness pzt thin film of formation on bottom electrode [11], be placed on the sintering that carries out 500～600 ℃ in the sintering furnace then, make the PZT crystallization, simultaneously for to prevent that the PZT sol-gel that is lost in of sintering process Pb from adding excessive about 10% lead, in the HCl/HF corrosive liquid, carry out the pzt thin film etching then, obtain needed shape.On pzt thin film [10], evaporate Au at last behind the first sputter Cr and form upper electrode [9].Just made by above-mentioned technological process and to have had Si/SiO
2The multilayer drive membrane [3] of/Ti/Pt/PZT/Cr/Au structure.
The microdrive of piezoelectric type generally adopts piezoelectricity chip or piezoelectric blocks formula, and the contrary piezoelectric property that its principle also is based on piezoelectric material is as driving force.Piezoelectric film driver of the present invention is compared with other Piezoelectric Driving mode, and its remarkable advantages is exactly its energy density height, when not being very high, just can obtain bigger output at driving voltage.Adopted the PZT laminated film as driving material, solved the combination force problem between piezoelectric material, silica-base film and the electrode well, after up to ten thousand vibrations, do not produce and peel off phenomenon, combine better with semiconductor planar technology simultaneously, be beneficial to batch process and make.Multilayer drive membrane [3] forms the eutectic principle with the Au-Si that combining of upper and lower body [1], [2] utilized at a certain temperature it is carried out bonding, with the sputter gold thin film as bonding agent, the accurate thickness of controlling diaphragm, the additional volumes that has reduced actuator chamber [4] as far as possible increases, and has improved the reliability of bonding.
The present invention has been owing to adopted above measure, compared with prior art, has structure and preparation process is simple, and output flow is big, driver frequency is high, flow rate controllability is strong, low in energy consumption, the life-span is long, volume is little, cost is low characteristics.In addition, the micromachining technology that the present invention adopts is compatible mutually with the semiconductor planar process engineering, easily and other little detections and micro control unit and circuit integrated, be adapted to produce in enormous quantities, can be widely used in fields such as the transmission of medicine trace, the injection of fuel trace, cell separation, intergrated circuit cooling and microchemical analysis, be specially adapted to the cooling aspect of high-power components and super large intergrated circuit.
Description of drawings
Fig. 1 adopts the side cross-sectional view of the microdrive of multilayer driving membrane structure
Embodiment
Monnolithic case of the present invention is of a size of 13mm * 6mm * 3mm, wherein multilayer drive membrane [3] is of a size of 3mm * 3mm * 0.8 μ m, in multilayer drive membrane [3], draw three lead-in wire electrodes respectively from upper and lower electrode [9], [11] and ground electrode [12], be used for joining with driving power, driving power adopts square wave, operating voltage 5V, frequency range 50～3000Hz.
When this microdrive was used in the transmission of medicine trace, the soup and the intake pipe [5] that do not have chemical reaction with silicon joined, and outlet conduit [6] connects required drug delivery place.Under the effect of driving power, multilayer drive membrane [3] changes the volume of actuator chamber [4], make pump inside and outside have pressure reduction.Drug solution not cracked ends intake pipe [5] is drawn into, and is pumped out through outlet conduit [6] again, finally reaches the purpose that microdrive is carried and controlled medicine.
Has Si/SiO
2The preparation process of the multilayer drive membrane [3] of/Ti/Pt/PZT/Cr/Au is:
Selecting twin polishing thickness for use is the Si sheet in 300 μ mP type [100] crystal orientation, and generating thickness in two-sided oxidation is 1～2 μ m silicon dioxide insulating layer.Adopt CVD (Chemical Vapor Deposition) method to generate the polysilicon ground electrode [12] of thickness 0.3～0.5 μ m in the front, chemical vapor deposition generation thickness is the silicon dioxide insulating layer of 0.5～1 μ m once more.Adopt magnetically controlled DC sputtering priority splash-proofing sputtering metal Ti and Pt as bottom electrode [11], thickness is 0.1～0.3 μ m.Piezoelectric material PZT layer adopts the sol-gel technology preparation, at first adopt and repeatedly revolve embrane method reaches the PZT sol-gel regulation on bottom electrode [11] thickness 0.3～0.5 μ m, 500～600 ℃ of sintering in sintering furnace then, make the PZT crystallization, in the HCl/HF corrosive liquid, carry out the etching of pzt thin film then, obtain the figure of needed pzt thin film [10].Evaporation Au forms upper electrode [9] behind the last first sputter Cr, and its thickness is 0.1～0.3 μ m.So just formed Si/SiO
2The multilayer drive membrane [3] that/Ti/Pt/PZT/Cr/Au constitutes.
The making of the actuator chamber [4] of upper body [1] and import and export pipeline [5], [6] is carried out from Si sheet reverse side etching, and the anisotropy rot etching technique of employing silicon corrodes thickness 4～8 μ m to the Si film, promptly makes.Bonding between upper body [1] and the lower body [2] adopts the Au-Si bonding, and at the positive plating of lower body [2] Au, thickness is 1～2 μ m, with photoetching and chemical corrosion method the metallic film that only needs the bonding zone is kept then, and all the other all are corroded.At last with upper and lower body [1], [2] alignment, get final product bonding after being placed on 600～650 ℃ of temperature in sintering furnace inherence.
Advantages such as the present invention has structure and technology is simple, volume is little, and it is strong to have controllability, and output flow is big and low in energy consumption can be widely used in many-sided fields such as the medicine trace transmits, the injection of fuel trace, cell separation.
Claims (4)
1. microdrive that adopts the multilayer driving membrane structure and preparation method thereof is characterized in that it comprises: the upper body [1] with actuator chamber [4] and water-in and water-out pipeline [5], [6] structure; Have the lower body [2] of expanding duct/collapsible tube [7], [8] structure and have Si/SiO
2/ Ti/Pt/PZT/Cr/Au multilayer drive membrane [3], the structure of its upper and lower body [1], [2] then adopts the anisotropic etch process corrosion back preparation of the micromachined of silicon (Si) through silicon (Si), and utilize the bonding techniques welding fabrication of Au-Si, the structure of its multilayer drive membrane [3] be on the basis of upper body [1], adopt chemical vapor deposition, interchange or direct magnetic control low-pricedly to penetrate respectively, collosol and gel revolves film and the preparation of vacuum evaporation thin-film technique.
2. microdrive of employing multilayer driving membrane structure as claimed in claim 1 and preparation method thereof, it is made up of the upper electrode that is arranged in order [9], pzt thin film [10], bottom electrode [11] and ground electrode [12] to it is characterized in that multilayer drive membrane [3]; It has Si/SiO
2The making method of the multilayer drive membrane [3] of/Ti/Pt/PZT/Cr/Au is to carry out oxidation to generate silica (SiO on silicon (Si) sheet in [100] crystal orientation two-sided
2) isolation layer, adopt CVD (Chemical Vapor Deposition) method to generate polysilicon then in the front and make ground electrode [12], and generate silica (SiO with chemical vapor deposition once more in the above
2) isolation layer; Adopt interchange or magnetically controlled DC sputtering priority splash-proofing sputtering metal Ti and Pt to make bottom electrode [11]; Adopt sol-gel preparation process's the embrane method PZT sol-gel that proportioning is good that repeatedly revolves to go up formation pzt thin film layer at bottom electrode [11], be placed on then and carry out 500～600 ℃ of sintering in the sintering furnace, make the PZT crystallization, for the PZT sol-gel that is lost in that prevents sintering process Pb adds excessive lead (Pb), in corrosive liquid, carry out pzt thin film again and be etched into pzt thin film [10]; Evaporation Au makes upper electrode [9] after pzt thin film [10] is gone up first sputter Cr at last.
3. microdrive of employing multilayer driving membrane structure according to claim 1 and preparation method thereof, the preparation that it is characterized in that actuator chamber [4] is to adopt the anisotropic etch process of silicon (Si) to obtain after overetching, and the thickness of its actuator chamber [4] silicon fiml is 4～8 μ m.
4. microdrive of employing multilayer driving membrane structure according to claim 1 and preparation method thereof, it is characterized in that utilizing the osculum of the conical pipe of expanding duct/collapsible tube [7] that the anisotropy rot etching technique of silicon (Si) makes, [8] to be of a size of 30～50 μ m, tapering is 5 °～18 °, pipe range 3000～3500 μ m.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410013779 CN1583541B (en) | 2004-05-27 | 2004-05-27 | Microdriver with multilayer driving membrane structure and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410013779 CN1583541B (en) | 2004-05-27 | 2004-05-27 | Microdriver with multilayer driving membrane structure and manufacturing method thereof |
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| CN1583541A true CN1583541A (en) | 2005-02-23 |
| CN1583541B CN1583541B (en) | 2010-09-29 |
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| CN 200410013779 Expired - Fee Related CN1583541B (en) | 2004-05-27 | 2004-05-27 | Microdriver with multilayer driving membrane structure and manufacturing method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101937128A (en) * | 2010-07-19 | 2011-01-05 | 北京理工大学 | MEMS micro-lens driven by three piezoelectric cantilever beams and manufacturing method thereof |
| CN102046121A (en) * | 2008-04-04 | 2011-05-04 | 3M创新有限公司 | Wound dressing with micropump |
| CN101432223B (en) * | 2006-04-28 | 2011-11-16 | 电子微系统公司 | Process for collective manufacturing of small volume high precision membranes and cavities |
| CN104373324A (en) * | 2014-10-11 | 2015-02-25 | 北京联合大学 | Valveless piezoelectric pump with side parabola conical flow pipe |
| CN104500373A (en) * | 2014-10-11 | 2015-04-08 | 北京联合大学 | Concatenation type valve-less piezoelectric pump of reducing pipe |
| CN107050581A (en) * | 2015-12-08 | 2017-08-18 | 弗劳恩霍夫应用研究促进协会 | For fluid to be entered to the free jet dosing system being fed into skin or below skin |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466932A (en) * | 1993-09-22 | 1995-11-14 | Westinghouse Electric Corp. | Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases |
| DE4422743A1 (en) * | 1994-06-29 | 1996-01-04 | Torsten Gerlach | Micropump |
| ATE218194T1 (en) * | 1996-12-11 | 2002-06-15 | Gesim Ges Fuer Silizium Mikros | MICROEJECTION PUMP |
| JP3629405B2 (en) * | 2000-05-16 | 2005-03-16 | コニカミノルタホールディングス株式会社 | Micro pump |
| CN1232728C (en) * | 2003-04-11 | 2005-12-21 | 华中科技大学 | Valve less thin film driving micro pump |
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2004
- 2004-05-27 CN CN 200410013779 patent/CN1583541B/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101432223B (en) * | 2006-04-28 | 2011-11-16 | 电子微系统公司 | Process for collective manufacturing of small volume high precision membranes and cavities |
| CN102046121A (en) * | 2008-04-04 | 2011-05-04 | 3M创新有限公司 | Wound dressing with micropump |
| US10653823B2 (en) | 2008-04-04 | 2020-05-19 | 3M Innovative Properties Company | Wound dressing with micropump |
| CN101937128A (en) * | 2010-07-19 | 2011-01-05 | 北京理工大学 | MEMS micro-lens driven by three piezoelectric cantilever beams and manufacturing method thereof |
| CN104373324A (en) * | 2014-10-11 | 2015-02-25 | 北京联合大学 | Valveless piezoelectric pump with side parabola conical flow pipe |
| CN104500373A (en) * | 2014-10-11 | 2015-04-08 | 北京联合大学 | Concatenation type valve-less piezoelectric pump of reducing pipe |
| CN107050581A (en) * | 2015-12-08 | 2017-08-18 | 弗劳恩霍夫应用研究促进协会 | For fluid to be entered to the free jet dosing system being fed into skin or below skin |
| CN107050581B (en) * | 2015-12-08 | 2020-07-28 | 弗劳恩霍夫应用研究促进协会 | Free jet dosing system for feeding a fluid into or under the skin |
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Granted publication date: 20100929 Termination date: 20140527 |