CN101255859B - Subtense wimble structure micro-driver driven by titanium adnic alloy membrana as well as preparing method - Google Patents
Subtense wimble structure micro-driver driven by titanium adnic alloy membrana as well as preparing method Download PDFInfo
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- CN101255859B CN101255859B CN200710160511XA CN200710160511A CN101255859B CN 101255859 B CN101255859 B CN 101255859B CN 200710160511X A CN200710160511X A CN 200710160511XA CN 200710160511 A CN200710160511 A CN 200710160511A CN 101255859 B CN101255859 B CN 101255859B
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Abstract
The present invention provides a micro actuator with chordal conical structure driven by three elements of Ti, Ni and Cu shape memory alloy film and preparation method thereof. The shape memory alloy film employs sputtering mode deposition and MEMS technique to finish stripe resistance design. The upper and lower structure of micro actuator is produced by Si etching process and realized bonding weld. The micro actuator comprises an upper body (2) acting as pressure pump, a lower body (3) acting as valve, a driving cavity (4) acted as pressure pump formed by the upper body (2) and the lower body (3), a valve expanding duct (5) and constricted tube (6) with single flow direction valve formed when the lower body (3) processing the driving cavity (4) are connected with a water inlet pipe (7) and an outlet pipe (8) respectively. The micro actuator with chordal conical structure has three elements of Ti Ni Cu/Si shape memory alloy driving film (1). The present invention is widely used in fields of fluid micro transmission, integrated system cooling and microchemical analysis.
Description
Technical field:
The present invention relates to a kind of performer of MEMS microfluid system, be specifically related to a kind of string wimble structure microdrive that adopts the driving of ternary TiNiCu marmem film and preparation method thereof.
Background technique:
Microdrive is the important symbol of microfluid system development level as the performer of MEMS microfluid system.It is widely used in aspects such as the transmission of medicine trace, the injection of fuel trace, cell separation, integrated electronic cooling and microchemical analysis.Therefore the research of microdrive is an emphasis of micromachined system always, also is the major limitation bottleneck of microfluid system practical application simultaneously.Because the output of the flow of microdrive is the to-and-fro motion through drive membrane; The volume and the variation in pressure that cause pump chamber in the micro-system realize; So the driving force of drive membrane has directly determined the microdrive performance index, promptly the deformation degree of drive membrane, response frequency have fundamental influence to the work of microdrive.At present, the drive form of drive membrane have that shape memory effect driving, piezoelectricity, static, electromagnetism, hot gas are moving, heat flow and bimetallic effect etc.Wherein, hot gas is moving, bimetallic effect belongs to low frequency and drives, and its shortcoming is that the driving flow is less; Piezoelectric constant, static, electromagnetism belong to high-frequency drive, although it is bigger to produce flow, its shortcoming is that required operating voltage is corresponding higher; Use the coupling difficulty; For example, at the paper " Bimetallic Actuated Micropump " that Yang Yue, Zhou Zhaoying and the Ye Xiongying etc. of " Chinese journal of scientific instrument " Tsing-Hua University delivered in 1996, it is 20V that the bimetal of their development drives the micropump driving voltage; Driver frequency is merely 5Hz, and output flow is 36 μ l/min.And the people such as R.Zengerle and A.Richter that go up Fraunhofer Institute for Solid Technology (IFT) at " Micro ElectroMechanical Systems " published thesis in 1992 " A micro membrane pumpwith electrostatic actuation "; The electrostatic driving micro pump of report; The operating voltage height is 170V, is unfavorable for using.Marmem has good drive performance because of it, becomes the first-selected driving material of microdrive spare in recent years.For example on " Sensors and Actuators " publication; The paper " Characteristics and fabrication of NiTi/Sidiaphragm micropump " that people such as the Xu Dong of Shanghai Communications University delivered in calendar year 2001; The binary TiNi marmem of report drives Micropump, and output flow is 340ml/min.But binary TiNi alloy phase height receives composition influence very big, and yield rate is low in the preparation process; Simultaneously, martensite and austenitic phase transition temperature are respectively about 25 °, 75 °, and phase transformation sluggishness big (Δ T≤50 ℃) causes driver frequency lower, makes to use to be restricted.
Summary of the invention:
The purpose of this invention is to provide design, the making of preparation method that a kind of TiNiCu/Si marmem drives film, string wimble structure Micropump and realize the string wimble structure microdrive that shape memory alloy film drives the employing ternary TiNiCu marmem film of the good driving of Micropump.Marmem drives film and adopts the sputter mode to be deposited on the upper body into driver, and completion bar shaped resistive arrangement is beneficial to drive.The upper and lower body structure of microdrive adopts the preparation of Si etching technics, and realizes the bonding welding.Play the upper body 2 of pressure pump effect and the lower body 3 of valve body effect and be processed into actuator chamber 4 with pressure pump effect; Lower body 3 is processed valve body expanding duct 5 and collapsible tube 6 with single flow valves in processing actuator chamber 4; The valve body expanding duct aligns with outlet conduit 8 with intake pipe 7 respectively with collapsible tube and is connected, and the string wimble structure microdrive that ternary TiNiCu/Si marmem driving film 1 is housed can be accomplished the driving function of fluid under the effect of electric current.
Above-mentioned purpose realizes through following technological scheme:
A kind of string wimble structure microdrive that adopts ternary TiNiCu marmem film to drive, its composition comprises: can play the upper body of pressure pump effect and the lower body of valve body effect, described upper body and lower body are processed into the actuator chamber with pressure pump effect; Described lower body is processed valve body expanding duct and collapsible tube with single flow valves in the processing actuator chamber; Described valve body expanding duct aligns with outlet conduit with intake pipe respectively with collapsible tube and is connected, and ternary TiNiCu/Si marmem is housed on the described string wimble structure microdrive drives film.The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives, it also comprises the TiNiCu alloy firm resistor stripe that is used for connecting the electrode of external drive power supply and is used for producing driving pressure.
The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives; The structure of described upper and lower body adopts the anisotropic etch process corrosion back preparation of the micromachined of silicon (Si) through silicon (Si), and utilizes the bonding techniques welding fabrication.
The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives; Described expanding duct and collapsible tube are to utilize the anisotropy rot etching technique of silicon Si to make; The osculum end of its string conical pipe is of a size of 20～30 μ m, and its tapering is demarcated with string conical pipe two wall flat-cut wire clamp angles, and taper value is 10 °～15 °; The radian of tube wall string is 4～5 times of determined arcs of actuator chamber diameter circle of diameter, and tube wall exterior string wall and actuator chamber wall are tangent; Pipe range 1800～2000 μ m.
The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives, described actuator chamber are to adopt the anisotropic etch process of silicon Si after overetching, to obtain, and the thickness of its upper body actuator chamber silicon fiml is 10～12 μ m.
The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives; Described driving film is the concurrent sputter simultaneously of Ti 55.4%, Ni44.6% and fine copper target for adopting TiNi target atom percentage; The film growth thickness is the driving film of 30 μ m on circular silicon fiml actuator chamber; And 750 ℃ of annealing one hour, the control of copper content was controlled through the sputtering voltage on the copper target in the film.
The string wimble structure microdrive that above-mentioned employing ternary TiNiCu marmem film drives carries out graphical treatment to driving film, under the protection of optical resist, utilizes the corrosive liquid composition to be: the parts by weight of HF are 15%, HNO
3Parts by weight be 15%, H
2O
2Parts by weight be 2%, H
2The parts by weight of O are 68%, with film be etched into thick be 30 μ m, wide be the ring-type strip structure of 70～80 μ m, the resistor stripe spacing is 20～30 μ m.
This technological scheme has following beneficial effect:
1. the present invention is owing to adopted above measure, and compared with prior art, preparation process is simple, and driver frequency is high, output flow is big, flow rate controllability is strong, low in energy consumption, the life-span is long, volume is little, cost is low characteristics.In addition; The micromachining technology that the present invention adopts is compatible mutually with the semiconductor planar process engineering; Can realize with other little detections and micro control unit and circuit integrated; Be adapted to produce in enormous quantities, can be widely used in micrometeor system field, be specially adapted to the cooling aspect of super large intergrated circuit and high-power components.
2. TiNiCu/Si of the present invention drives film and drives with binary TiNi alloy etc. other and drive film driving mode and compare, and its remarkable advantages is exactly that its driver frequency is high, under the pulsed drive current effect, can obtain bigger output.Adopt magnetron sputtering TiN iCu to drive film as driving material; Solved the combination force problem between material, silica-base film and the electrode well; After up to ten thousand to-and-fro motion, do not produce peel off, cracking phenomena; Be combined with semiconductor planar technology simultaneously, be beneficial to integrated design and batch process and make.
3. advantages such as the present invention has structure and technology is simple, volume is little, and it is strong to have controllability, and output flow is big and low in energy consumption can be widely used in many-sided fields such as micro-amounts of liquids transmission, cell separation and integrated system cooling.
Description of drawings:
Accompanying drawing 1 is to adopt the TiNiCu drive membrane to drive the side cross-sectional view of string awl microdrive;
Accompanying drawing 2 is plan structure schematic representation of the ternary TiNiCu marmem drive membrane after the etching;
Accompanying drawing 3 is A-A sectional drawings of accompanying drawing 1.
Embodiment of the present invention:
Embodiment 1:
Formation of the present invention comprises: ternary TiNiCu drives the preparation of film and the making of string awl pump, and ternary TiNiCu/Si marmem drives the implementation that film 1 and lower body 3 three parts of the upper body 2 that can play the pressure pump effect and valve body effect are accomplished the MEMS microfluid system jointly.Wherein upper body 2 and lower body 3 are processed into the actuator chamber 4 with pressure pump effect; Lower body 3 is processed valve body expanding duct 5 and collapsible tube 6 with single flow valves in processing actuator chamber 4; Expanding duct 5 aligns and is connected with intake pipe 7, outlet conduit 8 respectively with collapsible tube 6; As drive membrane 1 its employing TiNiCu driving form of film that shape memory effect drives, its formation comprises the TiNiCu alloy firm resistor stripe 10 that is used for connecting the electrode 9,11 of external drive power supply and is used for producing driving pressure.
TiNiCu alloy firm resistor stripe 10 is under the effect of the driving power of electrode 9,11; Utilize the shape memory effect of alloy firm to produce contraction and uphold; The TiNiCu drive membrane produces crooked deformation; Cause the variation of the volume and the pressure of actuator chamber 4, under the cooperation of expanding duct 5 and collapsible tube 6, force liquid to flow in 7,8 in water-in and water-out pipeline.
The working principle of this invention is; Utilize the shape memory effect of TiNiCu drive membrane 1, when electric current was added on the marmem resistor stripe, ohm heat of generation made marmem changed mutually to austenite by martensitic phase; Alloy deformation produces drive membrane and moves upward; Make the pressure in the actuator chamber 4 with pressure pump effect reduce, through the difference of following two expanding ducts 5 of micro-dimension and the pressure drop coefficient of collapsible tube 6 appearance, expanding duct 5 sucks liquid from intake pipe 7; When otherwise the square wave drive electric current was cancelled, the marmem temperature reduced, alloy phase by austenite in opposite directions martensitic phase change its shape recovered; Drive membrane 1 and upper body 2 downward return motions; Actuator chamber 4 internal pressures increase, and collapsible tube 6 is to outlet conduit 8 directed drains, therefore; Along with cyclical movement is done in TiNiCu drive membrane 1 and upper body 2 under the square wave action of electric signals, liquid just constantly is drawn into through intake pipe 7 and is pumped out through outlet conduit 8.The range of flow of the microdrive of this invention can be according to the different demands of different user, through to TiNiCu drive membrane 1 with shrink
The size design of pipe and expanding duct 5,6 confirms that after this design size was confirmed, the flow of this microdrive was in certain fine setting scope, and the electric current and the frequency that also can further be applied on the TiNiCu drive membrane 1 through change are regulated.
Embodiment 2:
Making method of the present invention is following:
The preparation that TiNiCu/Si drives film is to accomplish through magnetron sputtering technique.Adopting TiNi target atom percentage is the concurrent sputter simultaneously of Ti 55.4%, Ni44.6% and fine copper target; The film growth thickness is the driving film of 30 μ m on circular silicon fiml actuator chamber; The control of copper content is controlled through the sputtering voltage on the copper target in the film, anneals one hour to obtain the martensitic structure phase at 750 ℃.For realizing that film has good driving force; The film of preparation should possess: Ti, Ni, each element of Cu are evenly distributed; Atom percent is Ti 50%, Ni (44 ± x) %,
, wherein x≤5%; Change sluggish temperature Δ T≤25 ° between alloy firm austenite and the martensite mutually, to realize that film has higher driver frequency.For realizing that electricity drives, the film for preparing is carried out graphical treatment, (composition is: HF (15%)/HNO under the protection of optical resist, to utilize corrosive liquid
3(15%)/H
2O
2(2%)/H
2O (68%)) the film etching is become the ring-type resistor stripe of thick 30 μ m, wide 70-80 μ m, the resistor stripe spacing is 20-30 μ m.
The making of the actuator chamber 4 of upper body 2 is that the reverse side at semiconductor [100] silicon (Si) sheet carries out etching; Anisotropy rot etching technique in the employing micromachined technology is to required silicon (Si) film thickness 10～12 μ m; Forming the expanding duct of circular drives chamber 4 lower bodies 3 and the making of collapsible tube 5,6 is the micromachined that adopts silicon (Si) equally, forms string conical pipe shape through etching process, and the osculum end of its string conical pipe is of a size of 20～30 μ m; Its tapering is demarcated with string conical pipe two wall flat-cut wire clamp angles; Taper value is 10 °～15 °, and the radian of tube wall string is 3～4 times of determined radians of actuator chamber diameter circle of diameter, and tube wall exterior string wall and actuator chamber wall are tangent; Pipe range 1800～2000 μ m.Become water-in and water-out pipeline 7,8 with same processes, its pipe diameter is generally 1000 μ m.Bonding adopts the Si-Au-Si bonding techniques between upper body 2 and the lower body 3, at the front of lower body 3 plating layer of Au metallic film, only the metallic film at the position that needs bonding is kept with photoetching and chemical corrosion method then, and remaining part all is corroded.At last with upper and lower body 2,3 alignment, be put into then and get final product solder bonds after reaching eutectic temperature in the sintering furnace.
Embodiment 3:
Monnolithic case of the present invention is of a size of 12mm * 8mm * 3mm; Wherein the dimensional thickness of TiNiCu/Si driving film 1 is that 30 μ m, maximum diameter are the annulus bar of 4mm; 9, the 11 lead-in wire electrodes in the joint, two ends of TiNiCu/Si driving film 1 are used for joining with driving power, and driving power adopts square wave; Operating voltage 5V, frequency range 30～120Hz.
Carry out fluid trace when transmitting when this microdrive is used in, the liquid and the intake pipe 7 that do not have chemical reaction with silicon join, and outlet conduit 8 connects the liquid collecting terminal.Under the effect of driving power, TiNiCu/Si drives the volume that film 1 changes actuator chamber 4, make pump inside and outside have pressure reduction.Liquid not cracked ends intake pipe 7 is drawn into, and is pumped out through outlet conduit 8 again, finally reaches the purpose that microdrive is carried and controlled liquid.
The preparation process that TiNiCu/Si drives film 1 is:
Adopt TiNi target (atom percent is Ti 55.4%, Ni44.6%) and the concurrent sputter simultaneously of fine copper target, the film growth thickness is the driving film of 30 μ m on circular silicon fiml actuator chamber, and the control of copper content is controlled through the sputtering voltage on the copper target in the film.750 ℃ of annealing one hour.The film of preparation should possess: Ti, Ni, each element of Cu are evenly distributed; Atom percent is Ti 50%, Ni (44 ± x) %,
, wherein x≤5%;
(composition is: HF (15%)/HNO under the protection of optical resist, to utilize corrosive liquid
3(15%)/H
2O
2(2%)/H
2O (68%)) the film etching is become ring-type resistor stripe 10 and the resistor stripe pin 9,11 of thick 30 μ m, wide 70-80 μ m, the resistor stripe spacing is 20-30 μ m.Connect outer fuse in vacuum evaporation on the resistor stripe pin under the mask protective condition after preparing the aluminium film.
The making of the actuator chamber 4 of upper body 2 and lower body 3 structures is to adopt the corrosion of the anisotropy rot etching technique of silicon to process.Upper body [1] and the bonding between the lower body [2] with identical actuator chamber structure adopt the Si-Au-Si bonding; At lower body 2 positive plating Au; Thickness is 1 μ m, with photoetching and chemical corrosion method the metallic film that only needs the bonding zone is kept then, and all the other all are corroded.At last with upper and lower body 1,2 alignment, get final product bonding after being placed on the inherent 650 ℃ of temperature of sintering furnace.
Claims (6)
1.
a kind of string wimble structure microdrive that adopts ternary titanium ambrose alloy marmem film to drive; Its composition comprises: can play the upper body of pressure pump effect and the lower body of valve body effect, it is characterized in that: described upper body and lower body are processed into the actuator chamber with pressure pump effect; Described lower body is processed and is had valve body expanding duct and the collapsible tube of single current to valve action in the processing actuator chamber; Described valve body expanding duct aligns with outlet conduit with intake pipe respectively with collapsible tube and is connected, and ternary TiNiCu/Si marmem is housed on the described string wimble structure microdrive drives film.
2.
is characterized in that according to the string wimble structure microdrive that the described employing ternary of claim 1 titanium ambrose alloy marmem film drives: described ternary TiNiCu/Si marmem drives film and comprises the TiNiCu alloy firm resistor stripe that is used for connecting the electrode of external drive power supply and is used for producing driving pressure.
3.
are according to the string wimble structure microdrive of claim 1 or 2 described employing ternary titanium ambrose alloy marmem films drivings; It is characterized in that: the structure of described upper and lower body adopts the anisotropic etch process corrosion back preparation of the micromachined of silicon through silicon, and utilizes the bonding techniques welding fabrication.
4.
are according to the string wimble structure microdrive of claim 1 or 2 described employing ternary titanium ambrose alloy marmem films drivings; It is characterized in that: described expanding duct and collapsible tube are to utilize the anisotropy rot etching technique of silicon to make; The osculum end of the string conical pipe of described expanding duct and collapsible tube is of a size of 20 ~ 30 μ m; The tapering of string conical pipe is demarcated with string conical pipe two wall flat-cut wire clamp angles; Taper value is 10 ° ~ 15 °, and the radian of tube wall string is 4 ~ 5 times of determined arcs of actuator chamber diameter circle of diameter, and tube wall exterior string wall and actuator chamber wall are tangent; Pipe range 1800 ~ 2000 μ m.
5. the string wimble structure microdrive that drives of
employing ternary titanium ambrose alloy according to claim 1 and 2 marmem film; It is characterized in that: described actuator chamber is to adopt the anisotropic etch process of silicon after overetching, to obtain, and the thickness of its upper body actuator chamber silicon fiml is 10 ~ 12 μ m.
6. the string wimble structure microdrive that drives of
employing ternary titanium ambrose alloy according to claim 3 marmem film; It is characterized in that: described driving film is TiNi target and the concurrent sputter simultaneously of fine copper target of Ti 55.4%, Ni44.6% for adopting atom percent; The film growth thickness is the driving film of 30 μ m on circular silicon fiml actuator chamber; And 750 ℃ of annealing one hour, the control of copper content was controlled through the sputtering voltage on the copper target in the film.
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| CN200710160511XA CN101255859B (en) | 2007-03-02 | 2007-12-19 | Subtense wimble structure micro-driver driven by titanium adnic alloy membrana as well as preparing method |
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| CN200710071822.9 | 2007-03-02 | ||
| CN200710071822 | 2007-03-02 | ||
| CN200710160511XA CN101255859B (en) | 2007-03-02 | 2007-12-19 | Subtense wimble structure micro-driver driven by titanium adnic alloy membrana as well as preparing method |
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| CN101255859B true CN101255859B (en) | 2012-06-27 |
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| CN102136394B (en) * | 2010-12-10 | 2013-04-03 | 哈尔滨工业大学 | Temperature control microswitch for memory alloy with hooked wide temperature area and manufacturing method thereof |
| CN108757406A (en) * | 2018-04-27 | 2018-11-06 | 安徽铜陵科力阀门有限责任公司 | Utilize memory alloy driven Micropump |
| WO2020104994A1 (en) * | 2018-11-23 | 2020-05-28 | Hnp Mikrosysteme Gmbh | Sealing structure for a transport device having a shape-memory alloy |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1054119A (en) * | 1989-12-27 | 1991-08-28 | 精工爱普生株式会社 | Micro-pump and manufacture method thereof |
| CN1542277A (en) * | 2003-06-04 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Gas pressure type microfluid transport method and device therefor |
| WO2004094821A2 (en) * | 2003-04-22 | 2004-11-04 | The Regents Of The University Of California | Micromembrane shape memory alloy pump |
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2007
- 2007-12-19 CN CN200710160511XA patent/CN101255859B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1054119A (en) * | 1989-12-27 | 1991-08-28 | 精工爱普生株式会社 | Micro-pump and manufacture method thereof |
| WO2004094821A2 (en) * | 2003-04-22 | 2004-11-04 | The Regents Of The University Of California | Micromembrane shape memory alloy pump |
| CN1542277A (en) * | 2003-06-04 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Gas pressure type microfluid transport method and device therefor |
Non-Patent Citations (2)
| Title |
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| 丁桂甫，徐东，赵小林.镍钛合金形状记忆薄膜的化学刻蚀.《微细加工技术》.1999,(第3期), * |
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