CN1576876A - 校准测试装置测试频道之校准装置及测试系统 - Google Patents
校准测试装置测试频道之校准装置及测试系统 Download PDFInfo
- Publication number
- CN1576876A CN1576876A CN200410071689.3A CN200410071689A CN1576876A CN 1576876 A CN1576876 A CN 1576876A CN 200410071689 A CN200410071689 A CN 200410071689A CN 1576876 A CN1576876 A CN 1576876A
- Authority
- CN
- China
- Prior art keywords
- contact
- contact area
- signal
- testing channel
- calibrating installation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 123
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000009434 installation Methods 0.000 claims description 118
- 230000008878 coupling Effects 0.000 claims description 39
- 238000010168 coupling process Methods 0.000 claims description 39
- 238000005859 coupling reaction Methods 0.000 claims description 39
- 238000000926 separation method Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims description 5
- 230000008676 import Effects 0.000 claims 1
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
- G01R31/3191—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10333101.8 | 2003-07-21 | ||
DE10333101A DE10333101B4 (de) | 2003-07-21 | 2003-07-21 | Kalibrierungseinrichtung für die Kalibrierung eines Testerkanals einer Testereinrichtung, Testersystem und Verfahren zum Kalibrieren eines Testerkanals |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1576876A true CN1576876A (zh) | 2005-02-09 |
CN100533170C CN100533170C (zh) | 2009-08-26 |
Family
ID=34111626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100716893A Expired - Fee Related CN100533170C (zh) | 2003-07-21 | 2004-07-21 | 校准测试装置测试频道之校准装置及测试系统 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7061260B2 (zh) |
CN (1) | CN100533170C (zh) |
DE (1) | DE10333101B4 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103675647A (zh) * | 2013-12-10 | 2014-03-26 | 中国船舶重工集团公司第七〇九研究所 | 一种基于集成电路标准样片的校准装置及方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10330043B4 (de) * | 2003-06-30 | 2007-09-27 | Infineon Technologies Ag | System und Kalibrierverfahren |
US7106081B2 (en) * | 2004-07-08 | 2006-09-12 | Verigy Ipco | Parallel calibration system for a test device |
DE102004057772B3 (de) * | 2004-11-30 | 2006-05-24 | Infineon Technologies Ag | Einsetzbare Kalibriervorrichtung |
KR100736680B1 (ko) * | 2006-08-10 | 2007-07-06 | 주식회사 유니테스트 | 반도체 소자 테스트 장치의 캘리브레이션 방법 |
ITMI20062497A1 (it) * | 2006-12-22 | 2008-06-23 | St Microelectronics Srl | Cartuccia di collaudo con generazione interna dei segnali di collaudo |
US7768278B2 (en) * | 2007-02-14 | 2010-08-03 | Verigy (Singapore) Pte. Ltd. | High impedance, high parallelism, high temperature memory test system architecture |
US20090085598A1 (en) * | 2007-09-28 | 2009-04-02 | Qimonda Ag | Integrated circuit test system and method with test driver sharing |
US8780959B2 (en) * | 2009-01-13 | 2014-07-15 | Intel Mobile Communications GmbH | Integrated transceiver loop back self test by amplitude modulation |
WO2012084028A1 (en) * | 2010-12-22 | 2012-06-28 | Verigy (Singapore) Pte. Ltd. | Calibration module for a tester and tester |
DE102012205943B4 (de) * | 2012-04-12 | 2021-07-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zum Kalibrieren einer Messeinrichtung |
CN104091329B (zh) * | 2014-06-25 | 2017-02-15 | 清华大学 | 一种ct图像的标定方法、装置和一种ct系统 |
CN114325542B (zh) * | 2021-11-23 | 2023-08-22 | 中国船舶重工集团公司第七0九研究所 | 集成电路测试系统直流信号校准板、校准装置及校准方法 |
CN114264996B (zh) * | 2021-11-30 | 2024-05-03 | 上海御渡半导体科技有限公司 | 一种ate设备dc校准有效性的检测方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4815469A (en) * | 1987-10-08 | 1989-03-28 | Siemens-Pacesetter, Inc. | Implantable blood oxygen sensor and method of use |
US5078136A (en) * | 1988-03-30 | 1992-01-07 | Nellcor Incorporated | Method and apparatus for calculating arterial oxygen saturation based plethysmographs including transients |
US4869254A (en) * | 1988-03-30 | 1989-09-26 | Nellcor Incorporated | Method and apparatus for calculating arterial oxygen saturation |
US6480733B1 (en) * | 1999-11-10 | 2002-11-12 | Pacesetter, Inc. | Method for monitoring heart failure |
US6409675B1 (en) * | 1999-11-10 | 2002-06-25 | Pacesetter, Inc. | Extravascular hemodynamic monitor |
DE10056882C2 (de) * | 2000-11-16 | 2003-06-05 | Infineon Technologies Ag | Verfahren zum Kalibrieren eines Testsystems für Halbleiterbauelemente und Testsubstrat |
KR100518546B1 (ko) * | 2002-12-13 | 2005-10-04 | 삼성전자주식회사 | 집적회로 패키지를 테스트하기 위한 테스트 보드 및 이를이용한 테스터 보정방법 |
US6911814B2 (en) * | 2003-07-01 | 2005-06-28 | Formfactor, Inc. | Apparatus and method for electromechanical testing and validation of probe cards |
US7092759B2 (en) * | 2003-07-30 | 2006-08-15 | Medtronic, Inc. | Method of optimizing cardiac resynchronization therapy using sensor signals of septal wall motion |
-
2003
- 2003-07-21 DE DE10333101A patent/DE10333101B4/de not_active Expired - Fee Related
-
2004
- 2004-07-20 US US10/894,942 patent/US7061260B2/en not_active Expired - Fee Related
- 2004-07-21 CN CNB2004100716893A patent/CN100533170C/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103675647A (zh) * | 2013-12-10 | 2014-03-26 | 中国船舶重工集团公司第七〇九研究所 | 一种基于集成电路标准样片的校准装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
US7061260B2 (en) | 2006-06-13 |
DE10333101A1 (de) | 2005-03-03 |
DE10333101B4 (de) | 2008-05-21 |
US20050046436A1 (en) | 2005-03-03 |
CN100533170C (zh) | 2009-08-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Munich, Germany Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: INFINEON TECHNOLOGIES AG |
|
TR01 | Transfer of patent right |
Effective date of registration: 20120926 Address after: Munich, Germany Patentee after: QIMONDA AG Address before: Munich, Germany Patentee before: Infineon Technologies AG |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160114 Address after: German Berg, Laura Ibiza Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: QIMONDA AG |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090826 Termination date: 20160721 |
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CF01 | Termination of patent right due to non-payment of annual fee |