CN1576780A - 位置测量装置的探测单元 - Google Patents

位置测量装置的探测单元 Download PDF

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CN1576780A
CN1576780A CNA2004100632328A CN200410063232A CN1576780A CN 1576780 A CN1576780 A CN 1576780A CN A2004100632328 A CNA2004100632328 A CN A2004100632328A CN 200410063232 A CN200410063232 A CN 200410063232A CN 1576780 A CN1576780 A CN 1576780A
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B·法尔金格
H·格肖斯曼
S·汤多夫
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Dr Johannes Heidenhain GmbH
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    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428Error prevention
    • G01D5/24433Error prevention by mechanical means
    • G01D5/24442Error prevention by mechanical means by mounting means
    • GPHYSICS
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • G01D5/34723Scale reading or illumination devices involving light-guides
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • G01D5/34753Carriages; Driving or coupling means
    • GPHYSICS
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Abstract

在用于对于一个刻度尺(1)进行光电探测的位置测量装置的一个探测单元中,一个固定器(5)在一个支座(3)的一个凹槽(4)中沿着探测距离A的方向纵向引导并可以全面旋转地进行支撑。在固定器(5)获得调节之后该固定器材料融合连接地固定在支座(3)上。

Description

位置测量装置的探测单元
技术领域
本发明涉及一种根据权利要求1的前序部分的一个位置测量装置的一个探测单元。
背景技术
在US 4,593,194中说明了一个用于光电探测一个刻度尺的所述类型的探测单元。这个探测单元由一个固定器组成,在该固定器上一个光源、一个透镜、一个探测板以及一个探测器阵列相互对齐地固定住。这样一种固定器可相对简单地进行制造,并使安装在它上面的构件可自动化地进行固定。
对于刻度尺的正确的探测必要的是,探测板与刻度尺的探测距离根据点阵参数进行精确地调节。此外必要的是,探测板的探测点阵的角度位置相应于匹配于刻度尺点阵的分度线的要求进行调节。
这里根据US 4,593,194,所述固定器设有一个管状的延长段,该延长段插入到一个作为支座的圆柱形的轴颈上。所述固定器在该轴颈上是可推移的,这样探测距离是可调节的,并且此外所述固定器可以围绕着该轴颈在一个水平面中旋转,这样莫阿条纹-角度(Moiré-Winkel)的调节是可能的。在成功的调节之后所述固定器通过粘合而固定在该轴颈上。
在该方案中不利的是,所述轴颈只能在一个水平面中旋转,此外延长段扩大了探测单元的结构尺寸。
在EP 0 548 848 A1中、在图13A和13C中说明了一个长度测量装置的一个探测单元,其中一个包括一个光源、一个透镜以及一个点阵的构件在一个支座的凹槽中相对于探测单元的其他的构件是可自由调节的。调节后所述构件组通过螺栓紧固在支座上,并通过胶粘剂来保证此固定。
通过在凹槽内部的螺栓而产生的传力连接的固定是费事的,并在通常情况下导致失调(Dejustage)。此外用于胶粘剂的粘合缝隙是相对过大的,这对于固定和长时间稳定性产生不利的影响。
发明内容
本发明的任务是完成一种探测单元,借助于该单元可以使构造实现小型化,并可以进行灵活的调节,其中在调节后所述构件是可以持续稳定的并可简单固定的。
这个任务是通过具有权利要求1的特征的探测单元来解决的。
有利的实施形式在从属权利要求中给出。
附图说明
本发明的优点以及细节在下面的根据附图的实施例的说明中给出。
附图示出:
图1一个带有一个根据本发明的探测单元的长度测量装置的分解示意图;
图2根据图1的组装状态下的长度测量装置的纵剖面;
图3长度测量装置的探测单元区域的俯视图;
图4放大示出的探测单元的固定器的纵剖面;
图5固定器的第一透视图;
图6固定器的第二透视图;
图7一个探测板。
具体实施方式
本发明的实施例借助于图1到图7进行说明。本发明的说明借助于所述长度测量装置来进行,本发明也可以类似地安装在角度测量装置中。
图1示出了一个根据本发明构造的长度测量装置的空间分解示意图,图2示出了在组装状态下的所述长度测量装置。这个长度测量装置包括一个带有分度101的线性的刻度尺1以及一个为了进行位置测量而相对于刻度尺1沿着测量方向X可推移的探测单元2。在相对推移时探测单元2按照已知的方式对于刻度尺1进行光电探测,并产生用于对于两个相互移位的构件进行定位的与位置有关的电的探测信号,其中安装有长度测量装置的构件可以是任意的形式,例如它可以是一个机床的构件、一个电动机的构件或者是平版印刷的仪器的构件。其中分度101可以是一个增量的或者是一个单道或多道地进行编码的模型。
为了进行精确地位置测量,必要的是使探测单元2以一个固定的恒定的探测距离A探测刻度尺1的分度101。为了保证如此进行探测,探测单元2经过滑移元件或滚动元件31以已知的方式在刻度尺1自身上或在刻度尺1的支座上沿测量方向X精确地平行于刻度尺1地引导。
探测单元2由一个支座3组成,该支座具有一个用于可调节地容纳一个固定器5的凹槽4。在固定器5上一个光源6、一个作为辐射形成机构的透镜7和一个探测板8相互对齐地进行安装。为了自动地安装光源6,该光源可咬合到插座9中,并再次固定到固定器5上。代替一个透镜7,也可以安装一个透镜列或者菲涅耳透镜的形式的辐射形成机构。
凹槽4的表面10、11形成了一个导向机构,在该导向机构上固定器5沿着探测距离A的方向-也就是垂直于待探测的分度101的平面E-可滑动地移位。所述导向面10的一个是一个圆柱面,该圆柱面一方面平行于探测距离A的方向延伸,另一方面弯曲成圆弧形,其中圆弧的轴线平行于探测距离A的方向地延伸。固定器5的一个对应地弯曲的表面12紧贴在支座3的所述导向面10上。这个表面12是一个具有一个相应于导向面10的曲率半径的凸出弯曲的柱面,就如在图5中放大示出的那样。
为了使固定器5的表面12无间隙地相互挤压到支座3的导向面10上,将一个弹簧元件13对置于弯曲的圆柱形的表面12地设置在固定器5上(图6)。这个弹簧元件13是一个在固定器5上成型的弹性的簧片,该簧片具有一个在其上形成的球形的突起14,该突起用于弹性地支承在支座3的凹槽4的另一个导向面11上。所述另一个导向面11是一个V或U形的槽11,该槽沿着探测距离A的方向延伸,并形成了用于突起14的线性导向机构。所以突起14是一个用于固定器5的导向元件。
固定器5也如此用于相对于刻度尺1的角度位置的调节:该固定器在凹槽中各方面、也就是围绕所有三个旋转轴线是可旋转的。莫阿条纹-角度的调节、也是固定器5在一个平行于平面E的平面内并围绕平行于探测距离A延伸的旋转轴线D1的旋转在所示出的实施例中可以特别精确地进行。这里在图7中示出的探测板8的探测分度801朝向分度101对齐。旋转轴线D1经过球形的突起14的中心点,并与透镜7的光学轴线O远离地进行设置,这样实现了对于回转运动的支撑。所以支座3的导向面10的圆弧的曲率半径大于光学轴线O与所述导向面10之间的距离。表面12的曲率半径至少尽可能地相应于突起14的中心点和在支座3上的导向面10之间的距离。表面12至少以示出的方式进行弯曲,此外该表面也可以在其他的方向上进行弯曲,特别是具有一个其半径与到旋转轴线D1的距离相应的球面。这个标称半径的偏差是非关键的,因为通过弹簧元件13一方面保证突起14与槽11有预应力地保持接触,并且另一方面使得弯曲的表面12与导向面10至少部分地保持接触。
所以固定器5在每个调节位置中在凹槽4内部在几个点111、112、113上接触到支座3。这些点111、112、113在进行调节后可以通过材料融合连接-特别是钎焊、粘合或者通过焊接无力地但稳定地将固定器5固定在在支座3上。粘合可以保证没有或者只形成微小的粘合裂缝,这是具有优点的:具有粘接剂的缺陷(Quellen)不会造成失调。熔接或者熔解是特别有利的,尤其是当固定器5和支座3由塑料制成、例如由玻璃纤维加强的聚碳酸酯制成时用激光束进行焊接是有利的。
就如已经说明的,固定器5在每个调节位置中在凹槽4内在几个点111、112、113上接触到支座3。这些点111、112、113以有利的方式空间地分布在凹槽4的周围,就如图3所示出的。点的概念包括了直线以及平面部位,这样在相互间隔的平面部位111、112、113上形成所述材料融合连接。
在支座3的凹槽4中固定器5的已说明的调节特别是如此实现的:固定器5具有用于一个调节工具的作用面90,所述工具作用在该作用面上。该调节工具尤其是一个根据探测单元15的瞬时的探测信号所控制的操纵机(机器人),该操控机在所述作用面90上包围住固定器5。这里作用面90从支座3的凹槽4中凸出来。
在示出的实施例中在支座3上固定一个检测单元15。这个检测单元15可以是一个带有光电接收器的印制电路板,该电路板可替换地设计为结构化的检测器阵列,其中所述检测器阵列同时形成所述探测板。检测单元15也可以以没有示出的方式安装在固定器5上。

Claims (11)

1.一个位置测量装置的用于在一个固定的距离A中对于一个刻度尺(1)进行光电探测的探测单元,该探测单元具有一个支座(3),在该支座上一个包括一个光源(6)、一个辐射形成机构(7)和一个探测板(8)的一个固定器(5)是可调节的,其特征在于,支座(3)具有一个带有导向面(10、11)的凹槽(4),在该导向面上固定器(5)可沿探测距离A的方向推移并可以全面旋转地引导,这如此来实现:固定器(5)在多个点(111、112、113)处紧贴在支座(3)的导向面(10、11)上;固定器(5)在获得调节后固定在支座(3)的所述点(111、112、113)上。
2.根据权利要求1的探测单元,其特征在于,固定器(5)在支座(3)的所述点(111、112、113)上材料融合连接地进行固定,特别是进行粘接、焊接或者钎焊。
3.根据权利要求2的探测单元,其特征在于,固定器(5)和支座(3)由塑料制成,固定器(5)在所述点(111、112、113)处焊接在支座(3)上。
4.根据权利要求1的探测单元,其特征在于,固定器(5)在预加载荷的情况下紧贴在导向面(10、11)上。
5.根据权利要求4的探测单元,其特征在于,所述预加载荷是通过一个布置在固定器(5)上的弹簧元件(13)引起的。
6.根据权利要求1的探测单元,其特征在于,一方面导向面(10)被弯曲成圆形,其中圆弧的轴线D1平行于探测距离A的方向延伸,并且该轴线形成了一条旋转轴线D1,围绕该旋转轴线固定器(5)是可旋转的。
7.根据权利要求6的探测单元,其特征在于,辐射形成机构是一个具有一条光学轴线(0)的透镜(7),导向面(10)的圆弧的半径大于光学轴线(0)和导向面(10)之间的距离。
8.根据权利要求6的探测单元,其特征在于,导向面(10)另一方面平行于探测距离A的方向延伸并因此形成一个圆柱面。
9.根据权利要求6的探测单元,其特征在于,固定器(5)具有一个紧贴在导向面(10)上的表面(12),该表面具有和导向面(10)相同的圆弧形的弯曲部分。
10.根据权利要求6的探测单元,其特征在于,支座(3)的另一个导向面(11)由一个沿着探测距离A的方向延伸的槽(11)构成,固定器(5)的一个通过弹簧元件(13)预加载荷的导向元件(14)嵌入到该槽(11)中。
11.根据权利要求10的探测单元,其特征在于,导向元件(14)具有一个球形弯曲的表面,该导向元件的曲率中心经过旋转轴线D1,固定器(5)围绕该旋转轴线是可旋转的。
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