CN1573279A - Figure checking device - Google Patents
Figure checking device Download PDFInfo
- Publication number
- CN1573279A CN1573279A CNA2004100384667A CN200410038466A CN1573279A CN 1573279 A CN1573279 A CN 1573279A CN A2004100384667 A CNA2004100384667 A CN A2004100384667A CN 200410038466 A CN200410038466 A CN 200410038466A CN 1573279 A CN1573279 A CN 1573279A
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- CN
- China
- Prior art keywords
- image
- liquid
- light
- tab
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M1/00—Substation equipment, e.g. for use by subscribers
- H04M1/02—Constructional features of telephone sets
- H04M1/0202—Portable telephone sets, e.g. cordless phones, mobile phones or bar type handsets
- H04M1/0206—Portable telephones comprising a plurality of mechanically joined movable body parts, e.g. hinged housings
- H04M1/0208—Portable telephones comprising a plurality of mechanically joined movable body parts, e.g. hinged housings characterized by the relative motions of the body parts
- H04M1/0235—Slidable or telescopic telephones, i.e. with a relative translation movement of the body parts; Telephones using a combination of translation and other relative motions of the body parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M1/00—Substation equipment, e.g. for use by subscribers
- H04M1/02—Constructional features of telephone sets
- H04M1/0202—Portable telephone sets, e.g. cordless phones, mobile phones or bar type handsets
- H04M1/0206—Portable telephones comprising a plurality of mechanically joined movable body parts, e.g. hinged housings
- H04M1/0208—Portable telephones comprising a plurality of mechanically joined movable body parts, e.g. hinged housings characterized by the relative motions of the body parts
- H04M1/0225—Rotatable telephones, i.e. the body parts pivoting to an open position around an axis perpendicular to the plane they define in closed position
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- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
To automatically inspect a pattern by transmitted light, without recognizing it erroneously, even when a layer having fine unevenness such as an adhesive layer is formed on a substrate. A TAB tape 5 is fed from a feed reel 11, and is applied with a liquid such as water and alcohol in a liquid applying part 2 to be conveyed to an inspection part 1. In the inspection part 1, the TAB tape 5 is irradiated with an illumination light from a transmission illumination means 1a, the light transmitted through the pattern of an inspection object in the TAB tape 5 is input into an image receiving means 1b, and the pattern formed in the TAB tape 5 is image-picked up. The pattern imaged by the image receiving means 1b is transmitted to a control part 4 to be image-processed, and the processed image is compared with a master pattern for inspection to determine quality. An image having no spot and no unevenness caused by irregular reflection is obtained, because the pattern is image-picked up under the condition where the liquid is applied on the adhesive layer of the TAB tape 5.
Description
Technical field
The present invention relates to a kind of image checking mehtod and device, particularly be with irradiating illumination light to the TAB of loading regime (TapeAutomated Bonding), and with camera head take TAB with on the figure of the integrated circuit (IC) that forms etc., the image checking mehtod and the device that automatically carry out visual examination.
Background technology
In order to adapt to highly integrated and requirement high-density installation, semiconductor element just develops towards many pinizations and pin miniaturization direction.Owing to help this many pinizations and miniaturization, therefore adopted make semi-conductor chip with film like TAB with on the method that links to each other of many pins of being provided with.
A structure example of TAB band has been shown among Fig. 7.
TAB is with 101, on the resin film (film) 102 of thick about 20～150 μ m (most 25～75 μ m), wide about 35～165mm, except the both sides of the edge portion that is formed with through hole 103, all the bonding agent 104 of thick about 10～15 μ m of coating shown in Fig. 7 (a) posts metal formings 105 such as Copper Foil shown in Fig. 7 (b) on bonding agent 104.
Process this metal forming 105 with exposure method and etching method, shown in Fig. 7 (c), form circuit figures 106.At this moment, do not remove 104 layers of bonding agents, keep intact.
Figure 8 shows that the TAB that formed figure is with 101 example.
In Fig. 8, inner blank rectangular is the peristome (デ バ イ ス ホ one Le device aperture) 110,111st of mounting semiconductor chip, the wired circuit figure.
Such TAB with 101 manufacturing process in owing to be necessary to check whether (check) wired circuit figure is correctly formed, so use image inspecting device.
Image inspecting device is with 101 to throw light on for the TAB check with illumination light, with the state (outward appearance) of camera head or visual inspection mode testing circuit figure, and compares with reference pattern, judges whether the figure that forms is qualified.In recent years, also adopted automatic checking device, it is in advance at the storage portion stores reference pattern of testing fixture control part, and will be compared with the reference pattern of storage by the side circuit figure that camera head is taken, and whether automatically judge qualified.
In the method to TAB band irradiating illumination light, the method for using catoptrical method and using transmitted light is arranged in order to take figure.
Use catoptrical method, be top (forming a side of figure) irradiating illumination light from the TAB band, and the picture of the circuitous pattern that the reflected light from the reflection of TAB band forms from the observation of irradiating illumination direction of light, for example take with imaging apparatus, carry out Flame Image Process then.
For example disclosedly in patent documentation 1 (TOHKEMY 2000-182061 communique) used catoptrical image inspecting device.
What above-mentioned patent documentation 1 was put down in writing is to the irradiates light of being with that has formed figure by lighting device,, carry out Flame Image Process by computing machine then and detect the defective of figure by the band of the position of lighting device lighting and export to computing machine by the CCD camera.
On the other hand, use the method for transillumination, throw light on from the below (with the opposite side of a side that forms figure) of TAB band, take the circuitous pattern picture that forms by the transmitted light that sees through the TAB band by the imaging apparatus that is arranged on TAB band top (side opposite) with irradiating illumination light one side.
Compare with using catoptrical method, use the method for transmitted light to be more suitable for the figure inspection.Its reason below is described.
As shown in Figure 9, as can be known when metal formings such as etching Copper Foil form figure, the section of the figure that is formed in echelon, the size of the upside width a of figure and the width b of downside is compared, the width b broad of downside.Well-known this is because etching solution causes to the diffusion and the speed of etched inside past tense from the surface of Copper Foil.
When checking such figure, if use reflected light as illumination light, then imaging apparatus is caught the light by the wiring figure surface reflection, and the part beyond this is dark.
Therefore, shown in Figure 10 (a), even wiring figure in downside and adjacent pattern short circuit, what the image that is taken reflected also is the normal figure of not short circuit.Therefore let slip unacceptable product sometimes.
On the other hand, if use transmitted light, then imaging apparatus is caught the light that sees through resin film, and the part outside this is dark.
Therefore, shown in Figure 10 (b), if wiring figure in downside and adjacent pattern short circuit, the image that then is taken reflects is abnormal graph because of the short circuit chap, therefore can detect unacceptable product.
But, when using transmitted light, following problem is arranged.As mentioned above, on the resin film that forms the TAB band, be useful on the bond layer of bonded metal paper tinsel, after forming figure, also remain on the resin film.
Knownly peel off bond layer surface behind the Copper Foil, have that countless number μ mm's is concavo-convex with engraving method.Initial adhesive surface is smooth.But, for the back side at Copper Foil form a plurality of by anchor lock effect the microspike of firm bonding usefulness, so it is transferred the surface at bonding agent.
If the bonding agent after allowing illumination light see through Copper Foil to peel off then owing to make the illumination light diffuse reflection and by the diffusion deepening by Copper Foil back side transfer printing concavo-convex, produces the spot and the spot of black on the image of being taken by CCD camera etc.
If under such spot and the visible state of spot, carry out Flame Image Process, then sometimes when spot and spot are near the figure, it can be handled as the part of wiring, at testing fixture during with the reference pattern comparison, think it is to connect up slightlyer by mistake, and judge that product is defective.
In addition, spot and spot near the non-figure are identified as dust sometimes, and are judged to be substandard product.Though be not unacceptable product so in fact, and that device is judged to be is defective, this situation was called detection.
If carry out transillumination,, thereby be difficult to use in practice the figure automatic checking device that adopts transmitted light then owing to detection took place for small concavo-convex spot that causes and spot by such bond layer.During indirect illumination,, therefore can not produce such problem when taking because the bond layer that mirrors is dark.
Summary of the invention
The present invention proposes in order to solve above-mentioned prior art problems point, even its objective is to form on substrate has the so small concavo-convex layer of bond layer, detection can not take place yet, can use transmitted light to carry out the figure self-verifying.
In the substrate surface application of liquid that has formed the wiring figures,, from a side opposite substrate is thrown light on, and take with camera head with being provided with camera head one side for this substrate.And, the figure of the substrate image that will take by camera head and in advance the reference pattern of storage compare and check.
As mentioned above, by applying device liquid is coated in the surface of the substrate bonding agent layer of checking, and makes it homogeneous immersion, the concavo-convex of bond layer buried by this liquid.Therefore,, then buried by liquid, even therefore carrying out transillumination also seldom produces diffuse reflection owing to the concavo-convex of bond layer if in aforesaid liquid volatilization (drying substrates) before, carry out transillumination and take figure.Therefore, also be difficult on the image of shooting produce spot and spot, thereby do not cause therefrom the thicker mistake of wiring is discerned can prevent from detection.
Because of the liquid coating is difficult to produce the reasons are as follows of spot and spot on image:
Light is during by the different medium interface of refractive index, produces refraction accordingly according to the refractive index of 2 media that form the interface with to the incident angle at interface.
Shown in Fig. 2 (a), among the transillumination light, be example with the composition that becomes an angle of 90 degrees incident with substrate, the light direct beam of the part of no concave-convex passes through.But, incide the light of jog, owing to the concavo-convex incident angle that makes changes, produce refraction.Diffuse reflection that Here it is.
The difference of the refractive index of the medium at formation interface is big more, and the refraction of light is big more, and the composition of the light of direct projection is few more.Therefore, the refracted portion of light, promptly concavo-convex part deepening.In view of the above, jog and no concave-convex part are arranged, the illumination light of transmission produces luminance difference, thereby forms spot and spot.
On the other hand, above the bonding agent, coating refractive index ratio air is big, than the little liquid of bonding agent, for example when alcohol and water, shown in Fig. 2 (b), on the interface of liquid and bonding agent, though produce diffuse reflection same as described above, but because the refractive index of alcohol and water and bonding agent is poor, difference than the refractive index of air and bonding agent is little, so the refraction of light also diminishes, and that the composition of the light of direct projection becomes is many.
The refractive index of air is about 1, and alcohol is about 1.36, and water (pure water) is about 1.33, the refractive index of bonding agent, if considering its kind is a kind of of resin, then therefore resins such as acryl resin (ア Network リ Le) and polycarbonate think that with it be same level in 1.5～1.6 scope.And, even produce refraction at the interface of liquid and air, because this face is smooth and can not produce diffuse reflection.
Therefore, compare with the existing situation that bonding agent and air directly contact, the diffuse reflection when having applied liquid is few, when therefore taking it, can obtain the few image of spot and spot.
Application of liquid as mentioned above, and at control part the graph image of shooting is compared to check with the reference pattern of storage in advance.
Because not spot and the spot that causes because of diffuse reflection, so the mistake identification to connecting up thicker that does not cause therefrom can prevent detection.
Be coated in the liquid refractive index on aforesaid substrate surface, the refractive index of resin that cans be compared to most substrate surface is little, and bigger than the refractive index of air, as aforesaid liquid, for example, can water or alcohol.If water or alcohol then because viscosity is not too big, therefore can soaks into substrate equably, nor can apply bad influence to substrate.
Description of drawings
Fig. 1 represents the structure example of the image inspecting device of the embodiment of the invention.
Fig. 2 is illustrated in irreflexive appearance of the light of the substrate jog when not applying with application of liquid on the substrate.
Other structure example of Fig. 3 express liquid coating portion.
Luminance Distribution characteristic during the image of the TAB band that Fig. 4 represents is existing, receive by image receiving means during uncoated liquid.
Luminance Distribution characteristic when Fig. 5 represents to receive the image of the TAB band applied liquid by image receiving means.
Fig. 6 is illustrated in as the TAB that checks object with a part that goes up the inspection figure that forms.
Fig. 7 represents a structure example of TAB band.
Fig. 8 has represented to form the example of the TAB band of figure.
Fig. 9 represents metal formings such as etching Copper Foil and the section of formed figure when forming figure.
The figure of Figure 10 defective figure that to be explanation cross as the illumination light hourglass with reflected light.
Embodiment
Fig. 1 represents the structure example of the image inspecting device of the embodiment of the invention.And, below be that the situation of TAB band is illustrated, but the present invention can also be applicable to the inspection of the various substrates that carry out with transillumination light except being applicable to the TAB band with regard to aforesaid substrate.
The image inspecting device of present embodiment, shown in figure, by constituting with the lower part: tape transport 10, form with 5 send spool 11 and take-up reel 12 etc. by transmitting TAB; Liquid coating portion 2 is being with application of liquid on 5 from sending the TAB that spool 11 sends; Inspection portion 1 is with 5 irradiating illumination light and takes figure to TAB; Labeling section 3 adds mark on defective figure; Control part 4 is compared the figure of taking with the test pattern as benchmark, and judges that whether qualified product is, and the action of control inspection portion 1, labeling section 3 and tape transport 10.
The formation of inspection portion 1 has transmission illuminator 1a and camera head 1b, this transmission illuminator 1a is with 5 to throw light on from rear side to TAB, between this camera head 1b is arranged on across TAB with 5 positions relative with transmission illuminator 1a on, utilize to see through TAB and the figure of the circuit that forms on 5 at TAB etc. is taken with 5 illumination light.
Transmission illuminator 1a selects to be suitable for to export the light source of transmission TAB with the light of 5 wavelength; Camera head 1b is ccd video camera (or camera) or the ccd linear sensor (line sensor) that the wavelength of illumination light is had light sensitivity (being subjected to photo sensitivity).
When using ccd linear sensor as camera head 1b, make ccd linear sensor and transmission illuminator 1a at TAB with 5 the enterprising line scanning of the figure of checking, thereby obtain TAB with 5 general image.
For the diffuse reflection (irregular reflection) that reduces adhesive surface, being coated in TAB must be bigger than air (1) with the liquid refractive index on 5 surfaces, also little than bonding agent (for example 1.5～1.6).In addition, owing to must enter in adhesive surface small concavo-convex, therefore preferably viscosity is low.In addition, check be over after, when being rolled onto substrate on the take-up reel immediately, if high-volatile liquid, the liquid that has applied can be dry, then very convenient at once.
For the above reasons, the water (pure water) of alcohol type, the refractive index about 1.33 of refractive index about 1.36 is fit to.In the present embodiment, used 1-methylpropanol (isopropyl alcohol).
And the structure of liquid coating portion 2 is not limited to said structure, also can make liquid such as alcohol become the spray shape to spray to be coated to TAB to be with on 5, as shown in Figure 3.
In addition, if desired, also can be between inspection portion 1 and labeling section 2, being provided with as shown in Figure 1 blows makes the exsiccator 6 of alcohol drying, so that the liquid of coating is with 5 to be dried before being winding on the take-up reel 12 at TAB.
Check as described below by above-mentioned testing fixture to the figure that the TAB band carries out.
TAB is with 5 to send by sending spool 11, and is sent to liquid coating portion 2.In liquid coating portion 2, TAB is immersed in the liquid (alcohol) that is stored in the container with 5.
The TAB that is immersed in the liquid (alcohol) is with 5, is sent to inspection portion 1, and becomes and check that object stops on the position that available camera head 1b takes.Then, before the alcohol volatilization that is coated in the surface, from transmission illuminator 1a irradiating illumination light, seeing through becomes the TAB that checks object and incides image receiving means 1b with the light of 5 figure (inspection figure), and takes and be formed on TAB with the figure on 5.
And when using ccd linear sensor as camera head 1b, by not shown scanister, transmission illuminator 1a, camera head 1b scan on the fore-and-aft direction as the paper of figure, and obtain the general image of checking figure.
Owing to applied under the state of liquid (alcohol) on 5 bond layer at TAB, take TAB with on the figure that forms, so the concavo-convex of adhesive surface buried, thereby can obtain not having the spot that causes because of diffuse reflection and the image of spot.
The figure that is photographed by camera head 1b is sent to control part 4 and carries out Flame Image Process.
In the storage part of control part 4, the storage test pattern (reference pattern) that is used to check in advance, the figure that control part 4 will be taken by camera head 1b and this test pattern that is used to check compare judge whether qualified.The above-mentioned test pattern that is used to check can be to take actual product as certified products in advance with ccd video camera, makes based on the figure that this is taken then, also can be made by cad data.
And the decision method that whether qualified figure is has proposed the whole bag of tricks now, can select the decision method that is fit in these methods.
To TAB with on each figure carry out above-mentioned whether qualified judgement, in case the result of above-mentioned inspection be judged as TAB with on figure defective, then TAB with on the position of defective figure just be stored in the control part 4, when this figure is moved to labeling section 3, implement the mark of painted or perforation etc., be rolled into take-up reel 12 then.
Luminance Distribution performance plot when Fig. 4 represents that existing not application of liquid just receives the image of TAB band with image receiving means 1b.Fig. 5 represent present embodiment receive the image of the TAB band applied liquid (use alcohol) with camera head 1b the time the Luminance Distribution performance plot, the position on the transverse axis presentation video, the longitudinal axis is represented brightness.
Fig. 6 is illustrated in TAB with a part (wiring figure) that goes up the inspection figure that forms, Fig. 4, Fig. 5 represent with camera head 1b receive wiring figure shown in Figure 6 and with the direction of wiring figure quadrature on (arrow with Fig. 6 is represented) Luminance Distribution characteristic the when image of reception is carried out rectilinear scanning, Fig. 4, Fig. 5 represent to check the Luminance Distribution characteristic of same position on the figure.
Use the light source of led light source (wavelength 850nm), and diffuser plate is set at the exit portal of led light source as transmission illuminator 1a.And, with ccd linear sensor take to see through TAB with on the light of inspection figure.
" line " part shown in Figure 4 is that wiring figure, " blank " part are resin film (the concavo-convex part that has applied bonding agent are arranged).As Fig. 4, shown in Figure 5, because light does not see through, " line " part of therefore taking is dark; Because printing opacity, " blank " of therefore taking part is bright.
When throwing light under ccd linear sensor as the conventional example, as shown in Figure 4, the brightness of blank parts is roughly fluctuateed in 60～80 scope, and the brightness of spot part diminishes.
Like this, under the situation of conventional example, because the brightness of blank parts has deviation, therefore thereby above-mentioned image is being carried out Flame Image Process when carrying out self-verifying, for example with brightness 80 mutually the part of specific luminance 60 be taken secretly, although transmission illumination light in fact, it is thicker also dark part mistake may to be identified as wiring.
In contrast, as present embodiment during application of liquid, become level and smooth owing to entering alcohol in adhesive surface concavo-convex, therefore as shown in Figure 5, luminance difference (luminance difference of light and shade) is roughly below 10, and the influence of spot becomes and almost do not have, and the brightness of blank parts becomes much at one.Therefore, above-mentioned image is carried out Flame Image Process when carrying out self-verifying, can distinguish line and blank exactly, can eliminate flase drop and survey.
The effect of invention
As mentioned above, in the present invention, because on bonding dose of layer surface of the substrate that checks, Therefore application of liquid even carry out illumination based on transmitted light, also can reduce at bonding dose of layer The diffuse reflection of jog.
Therefore, do not produce spot and spot on the captured image, what therefore do not cause is right Therefore the mistake identification of connecting up thicker can prevent detection.
Claims (4)
1. image inspecting device, it is made a video recording to the substrate that has formed the wiring figures by imaging apparatus, and checks automatically, it is characterized in that having:
Applying device at aforesaid substrate surface applied liquid;
The camera head that the substrate that has applied aforesaid liquid is made a video recording;
From a side opposite with being provided with camera head one side, the lighting device that aforesaid substrate is thrown light on; And
The control part that the figure of the substrate image that will be taken by camera head and the reference pattern of storage are in advance compared and checked.
2. image inspecting device as claimed in claim 1 is characterized in that: be coated in the liquid refractive index on aforesaid substrate surface, less than the refractive index of the resin of substrate surface, greater than the refractive index of air.
3. image inspecting device as claimed in claim 2 is characterized in that: aforesaid liquid is water or alcohol.
4. image checking mehtod is made a video recording to the substrate of the figure that formed wiring etc. by imaging apparatus, and is automatically checked, it is characterized in that having following operation:
The 1st operation in the substrate surface application of liquid;
Throw light on by the light that sees through aforesaid substrate, and the 2nd operation that above-mentioned wiring figures is made a video recording; And
The figure of above-mentioned shooting is compared with the reference pattern of storage in advance, and the 3rd operation of checking.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003162333A JP2004361329A (en) | 2003-06-06 | 2003-06-06 | Method and device for inspecting pattern |
| JP2003162333 | 2003-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1573279A true CN1573279A (en) | 2005-02-02 |
| CN100395518C CN100395518C (en) | 2008-06-18 |
Family
ID=34054510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100384667A Expired - Fee Related CN100395518C (en) | 2003-06-06 | 2004-04-28 | Figure checking device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2004361329A (en) |
| KR (1) | KR100769797B1 (en) |
| CN (1) | CN100395518C (en) |
| TW (1) | TWI272379B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389691A (en) * | 2017-09-22 | 2017-11-24 | 铜陵市三盛电子有限公司 | A kind of metallized film precision detection system of capacitor |
| CN107607535A (en) * | 2017-09-22 | 2018-01-19 | 铜陵市三盛电子有限公司 | A kind of metallized film accuracy checking method of capacitor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101112710B1 (en) * | 2011-03-17 | 2012-03-15 | 주식회사 아이스피 | Instrument for inspecting the outside of panels and inspecting method using the same |
| JP6411856B2 (en) * | 2014-10-17 | 2018-10-24 | 株式会社日立製作所 | Oil leak detection device and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG76564A1 (en) * | 1998-11-30 | 2000-11-21 | Rahmonic Resources Pte Ltd | An apparatus and method to transport inspect and measure objects and surface details at high speeds |
| KR20020008488A (en) * | 2000-07-20 | 2002-01-31 | 강준구 | Nutritional agent for plant utilizing microorganism and preparation method thereof |
| JP4548912B2 (en) * | 2000-08-11 | 2010-09-22 | パナソニック株式会社 | Transparent liquid inspection apparatus, transparent liquid application apparatus, transparent liquid inspection method, and transparent liquid application method |
-
2003
- 2003-06-06 JP JP2003162333A patent/JP2004361329A/en active Pending
-
2004
- 2004-03-11 TW TW093106511A patent/TWI272379B/en not_active IP Right Cessation
- 2004-04-07 KR KR1020040023729A patent/KR100769797B1/en not_active IP Right Cessation
- 2004-04-28 CN CNB2004100384667A patent/CN100395518C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107389691A (en) * | 2017-09-22 | 2017-11-24 | 铜陵市三盛电子有限公司 | A kind of metallized film precision detection system of capacitor |
| CN107607535A (en) * | 2017-09-22 | 2018-01-19 | 铜陵市三盛电子有限公司 | A kind of metallized film accuracy checking method of capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200508598A (en) | 2005-03-01 |
| CN100395518C (en) | 2008-06-18 |
| KR20040108539A (en) | 2004-12-24 |
| KR100769797B1 (en) | 2007-10-25 |
| TWI272379B (en) | 2007-02-01 |
| JP2004361329A (en) | 2004-12-24 |
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Granted publication date: 20080618 Termination date: 20100428 |