CN1564316A - Carriage and transfer gear used same - Google Patents
Carriage and transfer gear used same Download PDFInfo
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- CN1564316A CN1564316A CN 200410007967 CN200410007967A CN1564316A CN 1564316 A CN1564316 A CN 1564316A CN 200410007967 CN200410007967 CN 200410007967 CN 200410007967 A CN200410007967 A CN 200410007967A CN 1564316 A CN1564316 A CN 1564316A
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Abstract
Holding frame is composed of a main holding piece, an assistant holding piece and multiple set pieces. Main holding piece possesses a main holding face. The assistant holding piece pivoted on the main holding piece possesses an assistant holding face. The assistant holding piece includes first part and second part positioned at two sides of pivoted place. The assistant holding piece is suitble to motion between first position and second position. When being at first position, the second part is higher than the main holding face. set pieces are arranged on main holding face, and some of set pieces is arranged on the assistant holding face. Features are: moving the holding frame out of working space does not make set pieces on assistant holding piece touch base plate causing deflection od base plate or bringing base plate out of the working space. Thus, the invention insures production efficiency of plane display.
Description
Technical field
The present invention relates to a kind of bracing frame (Holder) and use the connecting gear of this bracing frame, particularly relate to a kind of connecting gear that is suitable for supporting the bracing frame of a substrate and uses this bracing frame.
Background technology
At improving rapidly of multimedia society, be indebted to the tremendous progress of semiconductor element (Semiconductordevice) or man-machine display device mostly.With regard to the man-machine display device, have that high image quality, space availability ratio are good, the flat-panel screens of low consumpting power, advantageous characteristic such as radiationless becomes the main flow in market gradually.
In the manufacturing process of most of flat-panel screens, all can on a substrate, carry out for example thin film deposition (Thin film deposition), little shadow (photolithography) and etching various processing procedures such as (Etching).With the micro-photographing process is example, and it mainly comprises photoresistance coating (Photoresist coating), exposure (Exposure), develop (Development) removes processing procedures such as (Photoresist stripping) with photoresistance.For carrying out above-mentioned all kinds of processing procedure, in advanced at present automation flat-panel screens production plant, dispose various process apparatus mostly simultaneously.
With micro-photographing process equipment is example, it is that substrate is placed on the bracing frame, by a mechanical arm (Robot) bracing frame is moved in the working cavity (Operatingchamber) of micro-photographing process equipment together with substrate again, and shift out bracing frame after substrate is placed in holder (Chuck) on the substrate holder.
See also illustrated in figures 1 and 2ly, Fig. 1 is the illustrative view of the bracing frame turnover working cavity of existing conventional process equipment, and the top view of Fig. 2 when to be the bracing frame of Fig. 1 be placed in substrate in the working cavity.Bracing frame 100 is made of with a plurality of locating piece 130 strutting piece 110.Strutting piece 110 has a supporting surface 112, and locating piece 130 is four corners that are equipped on the supporting surface 112 of strutting piece 11O.When a substrate 50 was placed on the supporting surface 112 of strutting piece 110, substrate 5O promptly can be subjected to the restriction of locating piece 130 and can not produce moving horizontally.
Then, bracing frame 100 is along direction D1 substrate 50 to be sent in the working cavity.The central authorities of the substrate holder 60 in the working cavity are equipped with a holder 62.When bracing frame 100 when direction D1 enters working cavity, the height of bracing frame 100 is that the end face that is higher than holder 62 collides holder 62 to avoid substrate 5O.After bracing frame 100 arrives the location, promptly descend, and substrate 5O is stayed on the holder 62 along direction D2.
Seeing also shown in Figure 3ly, is the profile of Fig. 2 along I-I ' line.Please consult Fig. 1～3 simultaneously, because substrate 50 thickness are minimum, so when substrate 50 during only in the central partly by holder 62 supports, the periphery of substrate 50 will be subjected to gravity effect and sagging.Afterwards, bracing frame 100 promptly leaves working cavity along direction D3.But, sagging because the periphery of substrate 50 is subjected to gravity effect, thus when bracing frame 100 when direction D3 leaves working cavity, the locating piece 130 on the bracing frame 100 blocks the periphery of substrate 50 with regard to regular meeting, and makes substrate 50 produce skew or quilt is taken out of working cavity.
From the above, owing to cause the skew of substrate easily or base plate strip gone out working cavity in its design of existing known bracing frame, not only cause the damage of substrate easily and increase cost, more need extra step that substrate is placed in the working cavity again and expend tediously long man-hour.So, how to solve the above-mentioned existing existing shortcoming of known bracing frame, with the production capacity that improves flat-panel screens and reduce cost, just become the problem that needs to be resolved hurrily.
This shows that above-mentioned existing bracing frame still has many defectives, and demands urgently further being improved.In order to solve the defective of existing bracing frame, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but does not see always that for a long time suitable design finished by development, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that above-mentioned existing bracing frame exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, actively studied innovation, in the hope of the bracing frame of founding a kind of new structure and the connecting gear of using this bracing frame, can improve existing bracing frame, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the defective that existing bracing frame exists, and a kind of bracing frame of new structure is provided and uses the connecting gear of this bracing frame, even technical problem to be solved is when making it be suitable for guaranteeing that substrate bends, substrate still can break away from bracing frame easily and can not be interfered, thereby be suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of bracing frame according to the present invention proposes is suitable for supporting a substrate, and this bracing frame comprises: a main strutting piece has a main supporting surface; A strutting piece, be hubbed on this main strutting piece, this time strutting piece has supporting surface one time, and this time strutting piece is to divide into a first and a second portion, it lays respectively at the both sides of the pivot part of this time strutting piece and this main strutting piece, this time strutting piece is suitable for moving between a primary importance and a second place, and wherein this second portion is to be higher than this main supporting surface when this primary importance; And most locating pieces, be equipped on respectively on this main supporting surface of this main strutting piece on this time supporting surface with this first of this time strutting piece.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid bracing frame, the pivoting angle of wherein said strutting piece are less than 90 degree.
Aforesaid bracing frame, wherein said main strutting piece has more a bottom surface and a breasting face, this bottom surface is corresponding to this main supporting surface, and this breasting face is between the pivot part of this time strutting piece and this bottom surface, and the angle of this bottom surface and this breasting face is less than 90 degree.
Aforesaid bracing frame, it more comprises a resetter, this resetter is to be equipped between this main strutting piece and this time strutting piece.
Aforesaid bracing frame, wherein said resetter comprise compression spring (Compressionspring), and an end of this resetter is to be connected on this main strutting piece.
Aforesaid bracing frame, wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this time strutting piece.
Aforesaid bracing frame, wherein said resetter comprise torsional mode spring (Torsionspring), and those resetters are the pivot parts that are equipped on this time strutting piece.
Aforesaid bracing frame, the two ends of wherein said resetter are connected to this time strutting piece and this main strutting piece respectively.
Aforesaid bracing frame, wherein said locating piece has a guiding face respectively, in order to guide this substrate between those locating pieces.
Aforesaid bracing frame, wherein said strutting piece are in the application of force that is subjected to this substrate and after pivoting, this time supporting surface is and this main supporting surface coplane.
The object of the invention to solve the technical problems also adopts following technical scheme to realize.A kind of connecting gear according to the present invention proposes is suitable for transmitting a substrate, and this connecting gear comprises: a substrate holder; One holder is equipped on this substrate holder, provides support in order to the central authorities at this substrate; One bracing frame is placed on this holder it in order to support this substrate and to move this substrate, and this bracing frame comprises: a main strutting piece has a main supporting surface; A strutting piece, be hubbed on this main strutting piece, this time strutting piece has supporting surface one time, and this time strutting piece is to divide into a first and a second portion, it lays respectively at the both sides of the pivot part of this time strutting piece and this main strutting piece, this time strutting piece is suitable for moving between a primary importance and a second place, and wherein this second portion is to be higher than this main supporting surface when this primary importance; And most locating pieces, be equipped on respectively on this main supporting surface of this main strutting piece on this time supporting surface with this first of this time strutting piece.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid connecting gear, the pivoting angle of wherein said strutting piece are less than 90 degree.
Aforesaid connecting gear, wherein said main strutting piece has more a bottom surface and a breasting face, this bottom surface is corresponding to this main supporting surface, and this breasting face is between the pivot part of this time strutting piece and this bottom surface, and the angle of this bottom surface and this breasting face is less than 90 degree.
Aforesaid connecting gear, wherein said bracing frame more comprises a resetter, this resetter is to be equipped between this main strutting piece and this time strutting piece.
Aforesaid connecting gear, wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this main strutting piece.
Aforesaid connecting gear, wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this time strutting piece.
Aforesaid connecting gear, wherein said resetter comprises the torsional mode spring, and this resetter is the pivot part that is equipped on this time strutting piece.
Aforesaid connecting gear, the two ends of wherein said resetter are connected to this time strutting piece and this main strutting piece respectively.
Aforesaid connecting gear, wherein said locating piece has a guiding face respectively, in order to guide this substrate between those locating pieces.
Aforesaid connecting gear, wherein said strutting piece are in the application of force that is subjected to this substrate and after pivoting, this time supporting surface is and this main supporting surface coplane.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
The present invention proposes a kind of bracing frame, is suitable for supporting a substrate.This bracing frame is made of a main strutting piece, strutting piece and a plurality of locating piece.
Main strutting piece has a main supporting surface.Inferior strutting piece is to be hubbed on the main strutting piece.Inferior strutting piece has supporting surface one time.Inferior strutting piece is to divide into one first part and one second part, and it lays respectively at the both sides of the pivot part of time strutting piece and main strutting piece.Inferior strutting piece is suitable for moving between a primary importance and a second place.Wherein, second is to be higher than main supporting surface when primary importance partly.A plurality of locating pieces are on the inferior supporting surface that is equipped on respectively on the main supporting surface of main strutting piece with the first of time strutting piece.
In the present embodiment, the pivoting angle of inferior strutting piece for example is less than 90 degree.Main strutting piece for example has more a bottom surface and a breasting face.The bottom surface is corresponding to main supporting surface, and breasting face is between the pivot part and bottom surface of inferior strutting piece, and the angle of bottom surface and breasting face is less than 90 degree.Bracing frame for example more comprises a resetter, and it is equipped between main strutting piece and time strutting piece.Resetter for example is compression spring (Compression spring), and an end of resetter is to be connected on the main strutting piece or on the inferior strutting piece.Perhaps, resetter for example is torsional mode spring (Torsion spring), and resetter is the pivot part that is equipped on time strutting piece.The two ends of resetter for example are connected to time strutting piece and main strutting piece respectively, in order to the pivoting angle that limits time strutting piece so that its spend less than 90.Each locating piece for example has a guiding face respectively, in order to guide substrate between the locating piece.Inferior strutting piece is in the application of force that is subjected to substrate and after pivoting, inferior supporting surface for example is and main supporting surface coplane.
Based on above-mentioned purpose, the present invention more proposes a kind of connecting gear, is suitable for transmitting a substrate.This connecting gear mainly is that the bracing frame by a substrate holder, a holder and last embodiment is constituted.Holder is to be equipped on the substrate holder, provides support in order to the central authorities at substrate.Bracing frame is in order to supporting substrate and moving substrate it to be placed on the holder, and the thin bilge construction of bracing frame is with last
The bracing frame of embodiment is identical.
In sum, because after substrate left bracing frame, inferior strutting piece promptly can pivot and make locating piece be lower than main supporting surface, so bracing frame of the present invention can be guaranteed bracing frame when leaving working cavity, substrate can supported touch and produces displacement.
By technique scheme, the present invention has following advantage at least: bracing frame of the present invention and use the connecting gear of this bracing frame, be that main strutting piece and time strutting piece are adopted the design of separate type pivot, therefore can guarantee that bracing frame is when leaving working cavity, locating piece on the inferior bracing frame can not touch substrate, can not cause the skew of substrate or base plate strip is gone out working cavity, minimizing needs the chance of shut-down because of the substrate displacement, and then improve the production capacity of flat-panel screens and reduce production costs, have the value on the industry really.
In sum, the bracing frame of special construction of the present invention and use the connecting gear of this bracing frame, even when being suitable for guaranteeing that substrate bends, substrate still can break away from bracing frame easily and can not be interfered.It has above-mentioned many advantages and practical value, and in like product, do not see have the similar structures design to publish or use and really genus innovation, no matter it all has bigger improvement on the structure of product or function, have large improvement technically, and produced handy and practical effect, and more existing bracing frame has the multinomial effect of enhancement, thus be suitable for practicality more, and have the extensive value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, below with preferred embodiment of the present invention and conjunction with figs. describe in detail as after.
Description of drawings
Fig. 1 is the illustrative view of the bracing frame turnover working cavity of existing conventional process equipment.
Fig. 2 is the top view of the bracing frame of Fig. 1 when being placed in substrate in the working cavity.
Fig. 3 is along the profile of I-I ' line among Fig. 2.
Fig. 4 is the top view of bracing frame according to an embodiment of the invention.
Fig. 5 is the enlarged drawing of regional A among Fig. 4.
Fig. 6 A is along the profile of II-II ' line among Fig. 5.
Fig. 6 B is the profile after removing on the substrate self-supporting frame with Fig. 6 A.
Fig. 7 is the part sectioned view that adopts the bracing frame of torsional mode spring.
Fig. 8 is the schematic diagram of connecting gear of the present invention.
50: substrate 60: the substrate holder
62: holder 100: bracing frame
110: strutting piece 112: supporting surface
130: locating piece 200: bracing frame
210: main strutting piece 212: main supporting surface
214: breasting face 216: bottom surface
220: inferior strutting piece 220a: first partly
220b: second part 222: inferior supporting surface
224: axle 230 is pivoted: locating piece
232: guiding face 240,240a: resetter
300: connecting gear 310: the substrate holder
320: holder A: zone
D1, D2, D3, D4: direction
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, bracing frame that foundation the present invention is proposed and its concrete structure of connecting gear, feature and the effect thereof of using this bracing frame, describe in detail as after.
See also Fig. 4 and shown in Figure 5, Fig. 4 is the top view of bracing frame according to an embodiment of the invention, and Fig. 5 is the enlarged drawing of the regional A of Fig. 4.Bracing frame 200 is to be suitable for supporting a substrate 50.Bracing frame 200 is made of a main strutting piece 210, at least one time strutting piece 220 (being example with two at this) and a plurality of locating piece 230.
Main strutting piece 210 has a main supporting surface 212.Inferior strutting piece 220 is pivoted axle 224 with one and is hubbed at the edge of main strutting piece 210.Each time strutting piece 220 all has supporting surface 222 one time.Each time strutting piece 220 is to divide into one first partly 220a and one second 220b partly, and the 220a of first is the both sides that lay respectively at the pivot part of each inferior strutting piece 220 and main strutting piece 210 with second portion 220b.Inferior strutting piece 220 is suitable for motion between a primary importance (as shown in Figure 6A) and a second place (shown in Fig. 6 B).Wherein, second partly 220b be higher than main supporting surface 212 and have at least partly that zone is storing place that is positioned at substrate 50, and inferior strutting piece 220 is suitable for being subjected to pivoting as the time spent of substrate 50 at its second part 220b.A plurality of locating pieces 230 are to be equipped on respectively on the main supporting surface 212 of main strutting piece 210, and on the inferior supporting surface 222 of the first part 220a of inferior strutting piece 220.The equipping position of locating piece 230 is the edges corresponding to substrate 50, and therefore when substrate 50 placed on the strutting piece 200, substrate 50 will be restricted between each locating piece 230, and can not exceed the scope of strutting piece 200.
Seeing also shown in Fig. 6 A, is along the profile of II-II ' line among Fig. 5.When substrate 50 was placed on the bracing frame 200, substrate 50 can be pushed down the second part 220b of time strutting piece 220, made that time strutting piece 220 is that rotating shaft pivots with the axle 224 that is pivoted.At this moment, the locating piece 230 that is equipped on time supporting surface 222 just can stop substrate 50, reaches the function of location to avoid it to be subjected to displacement.Simultaneously, inferior supporting surface 222 for example is and main supporting surface 212 coplanes
Seeing also shown in Fig. 6 B, is the profile after removing on the substrate self-supporting frame of Fig. 6 A.When not putting substrate 50 on the bracing frame 200, inferior strutting piece 220 will rotate because of the relation of gravity, make the locating piece 230 on the first part 220a that is equipped on time supporting surface 222 be lower than main supporting surface 212, the second part 220b of inferior supporting surface 222 then can be higher than main supporting surface 212.
See also Fig. 6 B and shown in Figure 7, Fig. 7 is the part sectioned view that adopts the bracing frame of torsional mode spring.This bracing frame 200 for example more comprises at least one resetter 240,240a, and this resetter 240,240a are equipped between main strutting piece 210 and time strutting piece 220.Resetter 240,240a for example are in order to guarantee that after substrate 50 leaves bracing frame 200 inferior strutting piece 220 can rotate so that locating piece 230 is lower than main supporting surface 212.Resetter 240 for example is the compression spring, and the one end for example is to be connected in 210 (shown in the solid line parts of resetter 240 among Fig. 6 B) on the main strutting piece, or is connected on time strutting piece 220.Perhaps, resetter 240a for example is the torsional mode spring, and its equipping position for example is on the axle 224 that is pivoted (as shown in Figure 7).Certainly, resetter 240,240a are not the necessary member of strutting piece 200 of the present invention.
See also shown in Fig. 6 B; the pivoting angle of time strutting piece 220 for example is less than 90 degree in the present embodiment; after can guaranteeing that so then substrate 50 is placed in bracing frame 200, the second part 220b of inferior strutting piece 220 is subjected to the substrate application of force, and time strutting piece 220 is rotated with direction D4.Desire to make the means of the pivoting angle of time strutting piece 220 less than 90 degree, for example comprise that the main strutting piece 210 of design makes it have a breasting face 214, breasting face 214 is between a bottom surface 216 of the be pivoted axle 224 and the main strutting piece 210 of inferior strutting piece 220, and the angle of bottom surface 216 and breasting face 214 is less than 90 degree.So, can utilize breasting face 214 and restriction time strutting piece 220, make its pivoting angle less than 90 degree.Perhaps, also the two ends of resetter 240 can be connected to time strutting piece 220 and main strutting piece 210 (solid line as resetter 240 among Fig. 6 B adds shown in the dotted line part) respectively, to limit the pivoting angle of time strutting piece 220 by the length of resetter 240.Certainly, the resetter 240a of Fig. 7 also can be used for limiting the pivoting angle of time strutting piece 220.
In addition, each locating piece 230 for example has a guiding face 232 respectively, makes its easier being positioned between each locating piece 230 in order to guiding substrate 50.The hardness of locating piece 230 for example is the hardness less than substrate 50, and the hardness of inferior strutting piece 220 is for example also less than the hardness of substrate 50, to avoid scratch substrate 50.In addition, the height of locating piece 230 for example is the thickness greater than substrate 50, to bring into play maximum locating effect.
See also Fig. 6 A, 6B and shown in Figure 8, Fig. 8 is the schematic diagram of connecting gear of the present invention.Connecting gear 300 is that the bracing frame 200 by a substrate holder 310, a holder 320 and last embodiment is constituted.Holder 320 is to be equipped on the substrate holder 310, and holder 320 for example is the vacuum adsorption type holder.Bracing frame 200 is in order to supporting substrate 50, and moving substrate 50 is placed on the holder 320 it.
When bracing frame 200 moving substrates 50, be located at the location of holder 320 tops, bracing frame 200 promptly can descend and support with the holder of substrate 50 being transferred on the substrate holder 310 320.At this moment, because the minimum and holder 320 of substrate 50 thickness only partly provides support in the central, so substrate 50 makes its periphery sagging with regard to bending easily.But bracing frame 200 is after transferring to substrate 50 holder 320 supports, and inferior strutting piece 220 promptly can pivot and make locating piece 230 for example be lower than main supporting surface 212.So, when bracing frame 200 when then leaving substrate holder 310, even the periphery of substrate 50 is sagging, locating piece 230 still can not touch substrate 50 and make it produce displacement.
And, when substrate 50 was placed on the bracing frame 200, inferior strutting piece 220 promptly can be subjected to the application of force of substrate 50 and pivot, and makes locating piece 230 be higher than main supporting surface 212, and inferior supporting surface 222 for example with main supporting surface 212 coplanes, with the positioning function of performance locating piece 230 pairs of substrates 50.
In sum, bracing frame of the present invention and using in the connecting gear of this bracing frame, be that main strutting piece and time strutting piece are adopted the design of separate type pivot, therefore can guarantee that bracing frame is when leaving working cavity, locating piece on the inferior bracing frame can not touch substrate, reducing because of the substrate displacement needs the chance of stopping work, and then the production capacity of raising flat-panel screens and reducing production costs.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (20)
1, a kind of bracing frame is suitable for supporting a substrate, it is characterized in that this bracing frame comprises:
One main strutting piece, it has a main supporting surface;
A strutting piece, be hubbed on this main strutting piece, this time strutting piece has supporting surface one time, and this time strutting piece is to divide into a first and a second portion, it lays respectively at the both sides of the pivot part of this time strutting piece and this main strutting piece, this time strutting piece is suitable for moving between a primary importance and a second place, and wherein this second portion is to be higher than this main supporting surface when this primary importance; And
Most locating pieces are equipped on respectively on this main supporting surface of this main strutting piece on this time supporting surface with this first of this time strutting piece.
2, bracing frame according to claim 1, the pivoting angle that it is characterized in that wherein said strutting piece are less than 90 degree.
3, bracing frame according to claim 1, it is characterized in that wherein said main strutting piece has more a bottom surface and a breasting face, this bottom surface is corresponding to this main supporting surface, this breasting face is between the pivot part of this time strutting piece and this bottom surface, and the angle of this bottom surface and this breasting face is less than 90 degree.
4, bracing frame according to claim 1 is characterized in that it more comprises a resetter, and this resetter is to be equipped between this main strutting piece and this time strutting piece.
5, bracing frame according to claim 4 it is characterized in that wherein said resetter comprises compression spring (Compression spring), and an end of this resetter is to be connected on this main strutting piece.
6, bracing frame according to claim 4 it is characterized in that wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this time strutting piece.
7, bracing frame according to claim 4 it is characterized in that wherein said resetter comprises torsional mode spring (Torsion spring), and those resetters is the pivot parts that are equipped on this time strutting piece.
8, bracing frame according to claim 4 is characterized in that the two ends of wherein said resetter are connected to this time strutting piece and this main strutting piece respectively.
9, bracing frame according to claim 1 is characterized in that wherein said locating piece has a guiding face respectively, in order to guide this substrate between those locating pieces.
10, bracing frame according to claim 1 is characterized in that wherein said strutting piece is in the application of force that is subjected to this substrate and after pivoting, this time supporting surface is and this main supporting surface coplane.
11, a kind of connecting gear is suitable for transmitting a substrate, it is characterized in that this connecting gear comprises:
One substrate holder;
One holder is equipped on this substrate holder, provides support in order to the central authorities at this substrate;
One bracing frame is placed on this holder it in order to support this substrate and to move this substrate, and this bracing frame comprises:
One main strutting piece has a main supporting surface;
A strutting piece, be hubbed on this main strutting piece, this time strutting piece has supporting surface one time, and this time strutting piece is to divide into a first and a second portion, it lays respectively at the both sides of the pivot part of this time strutting piece and this main strutting piece, this time strutting piece is suitable for moving between a primary importance and a second place, and wherein this second portion is to be higher than this main supporting surface when this primary importance; And
Most locating pieces are equipped on respectively on this main supporting surface of this main strutting piece on this time supporting surface with this first of this time strutting piece.
12, connecting gear according to claim 11, the pivoting angle that it is characterized in that wherein said strutting piece are less than 90 degree.
13, connecting gear according to claim 11, it is characterized in that wherein said main strutting piece has more a bottom surface and a breasting face, this bottom surface is corresponding to this main supporting surface, this breasting face is between the pivot part of this time strutting piece and this bottom surface, and the angle of this bottom surface and this breasting face is less than 90 degree.
14, connecting gear according to claim 11 is characterized in that wherein said bracing frame more comprises a resetter, and this resetter is to be equipped between this main strutting piece and this time strutting piece.
15, connecting gear according to claim 14 is characterized in that wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this main strutting piece.
16, connecting gear according to claim 14 it is characterized in that wherein said resetter comprises the compression spring, and an end of this resetter is to be connected on this time strutting piece.
17, connecting gear according to claim 14 it is characterized in that wherein said resetter comprises the torsional mode spring, and this resetter is the pivot part that is equipped on this time strutting piece.
18, connecting gear according to claim 14 is characterized in that the two ends of wherein said resetter are connected to this time strutting piece and this main strutting piece respectively.
19, connecting gear according to claim 11 is characterized in that wherein said locating piece has a guiding face respectively, in order to guide this substrate between those locating pieces.
20, connecting gear according to claim 11 is characterized in that wherein said strutting piece is in the application of force that is subjected to this substrate and after pivoting, this time supporting surface is and this main supporting surface coplane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100079679A CN1315171C (en) | 2004-03-23 | 2004-03-23 | Carriage and transfer gear used same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100079679A CN1315171C (en) | 2004-03-23 | 2004-03-23 | Carriage and transfer gear used same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1564316A true CN1564316A (en) | 2005-01-12 |
| CN1315171C CN1315171C (en) | 2007-05-09 |
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ID=34477667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100079679A Expired - Fee Related CN1315171C (en) | 2004-03-23 | 2004-03-23 | Carriage and transfer gear used same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1315171C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110205599A (en) * | 2019-07-15 | 2019-09-06 | 云谷（固安）科技有限公司 | Substrate placing stage and evaporated device |
| CN113071900A (en) * | 2020-01-03 | 2021-07-06 | 显示器生产服务株式会社 | Substrate conveying device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0152324B1 (en) * | 1994-12-06 | 1998-12-01 | 양승택 | Semiconductor wafer carrier apparatus |
| JPH10175733A (en) * | 1996-12-18 | 1998-06-30 | Hitachi Ltd | Wafer carrier mechanism |
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2004
- 2004-03-23 CN CNB2004100079679A patent/CN1315171C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110205599A (en) * | 2019-07-15 | 2019-09-06 | 云谷（固安）科技有限公司 | Substrate placing stage and evaporated device |
| CN113071900A (en) * | 2020-01-03 | 2021-07-06 | 显示器生产服务株式会社 | Substrate conveying device |
| CN113071900B (en) * | 2020-01-03 | 2022-08-26 | 显示器生产服务株式会社 | Substrate conveying device |
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| CN1315171C (en) | 2007-05-09 |
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