CN1533864A - Llamping device and vertical direction driving positioner with inclination function - Google Patents

Llamping device and vertical direction driving positioner with inclination function Download PDF

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Publication number
CN1533864A
CN1533864A CNA2004100313375A CN200410031337A CN1533864A CN 1533864 A CN1533864 A CN 1533864A CN A2004100313375 A CNA2004100313375 A CN A2004100313375A CN 200410031337 A CN200410031337 A CN 200410031337A CN 1533864 A CN1533864 A CN 1533864A
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China
Prior art keywords
mentioned
ball
supporting member
group
receiving portion
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Granted
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CNA2004100313375A
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Chinese (zh)
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CN1274462C (en
Inventor
平冈英一
富田良幸
内海和晴
小原达也
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/40Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using ball, roller or wheel arrangements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/42Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using T-, V-, dovetail-section or like guides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06Work-clamping means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00Work clamping
    • B23Q2703/02Work clamping means

Abstract

The object of the present invention is to provide a clamp device that is free of positional deviation for acceleration in horizontal direction or downward direction, while performing translation and tilt operation along the vertical direction. The solution of the present invention is three sets of combination of ball (13-15) placed on support components (107-109), and clamp shafts (16-18) having a lower portion forming bearing portions (16-1 to 18-1) for the balls with the bearing portions urging upper portions of the balls. The clamp shaft includes: the bearing portions, and shafts (16-2 to 18-2) extending from the top. On the support component side, a frame (104-106) for keeping the combination of the balls and the clamp shafts in a state of extending upwards in rockable manner is provided, and belleville springs (101-103) are provided between the bearing portions and the frames for urging the bearing portions downwards.

Description

The vertical direction of clamping device and band tilt function drives positioner
Technical field
The present invention relates to a kind of vertical direction with tilt function and drive positioner, have vertical direction, be Z-direction driving function and inclination angle, be tilt function.
Background technology
The drive unit of previously presented Z axle (vertically) direction as location objective table etc. is that 3 driving mechanisms are made up, make by support be supported the translation motion (as patent documentation 1) that body such as workbench or sucker etc. carry out above-below direction.
Though it is to use kinematics (kinematic) anchor clamps (so-called Kai Erfen anchor clamps), it is the device that is used to locate, and under the effect of horizontal acceleration more than the certain value or downward acceleration, the top object just might be offset.
Below, with reference to Fig. 4~Fig. 6 this device is described.
(1) shown in Fig. 4 (a), the structure of Kai Erfen (ケ Le PVC Application) anchor clamps is, lower surface in upper stages 20 is installed with 3 balls 22,23,24 by axle, become the V-shaped groove 26 of V font to contact with recess 25, the cross section of the triangle taper (or coniform) that forms at the upper surface of bottom workbench 21 respectively with plane 27, just can be, the surface of upper stages 20 is relatively positioned with respect to the surface of bottom workbench 21.Shown in Fig. 4 (b), also can make 3 balls all and bottom workbench 21 ' 3 groups of V-shaped grooves 26 ' contacted structure of forming of upper surface.
(2) if with regard to the structure of Fig. 4 (a), such Kai Erfen anchor clamps are that the pyrometric cone summit that makes recess 25 is positioned on the axially-extending line of V-shaped groove 26.Like this, even the face of a side, for example the upper stages 20 of that side that ball is fixing is because thermal expansion reasons such as (or contractions) makes 3 intervals between the ball widen (or narrowing down), perhaps bottom workbench 21 thermal expansions (or contraction), can both be as illustrated in fig. 5 the ball 22 that contacts with the recess 25 of triangle taper as fixing point, make the ball 23 that contacts with V-shaped groove 26 along the moving axially of V-shaped groove 26, make ball 24 with plane contact move to the position of determining by the relative position relation of the recess 25 of triangle taper and V-shaped groove 26.Under the occasion of Fig. 4 (b), because with 3 groups of V-shaped grooves 26 ' be configured to intersect at a bit, thereby can have and Fig. 4 (a) identical functions.
(3) in each clamping part, as the bottom, as top, by lower support top, horizontal acceleration acts on the bottom with the side of fixing each ball with the side that is provided with recess, groove.At this moment, shown in Fig. 6 (a), because the frictional force μ F that the top weight that support the clamping section that V-shaped groove 26 and ball 23 constitute causes 1The effect of (wherein, μ is a coefficient of friction), when the horizontal acceleration that acts on the bottom hour, the relative position of both sides just can be held up and down.But, the horizontal force F that is causing by bigger horizontal acceleration a 2When acting on the bottom, as its component F 2' (along the component of the surface direction of V-shaped groove 26) surpasses frictional force μ F 1The time, the skew on top can take place.Or shown in Fig. 6 (b), when integral body moved down with the acceleration a ' that surpasses acceleration of gravity, the bottom can not be followed in top, so that leave.Therefore, in order to apply bigger frictional force, just with both sides about the connections such as spring, to apply additional loading.
Patent documentation 1:
Japanese patent laid-open 10-79344 number (the 2nd page, Fig. 9)
, in the positioner of Z axle (vertically) direction, require sometimes, when it carries out the translation motion of Z-direction, also carry out inclination angle (inclination) and move with 3 groups of Z axle driving mechanisms supporting tops (such as rotary table).Relative therewith, if the combination of both sides makes above-mentioned Kai Erfen anchor clamps up and down, then can provide the tilting action of inclination.But when the positioning table (X-Y workbench) that these 3 groups of Z axles is arranged on horizontal direction was gone up, by above-mentioned (3) described reason, when with bigger acceleration the positioning table of horizontal direction being moved, top will be offset.When connecting up and down both sides in order to prevent this skew with spring etc., the loading of this part just is added on the Z axle driving mechanism, and this certainly will cause the capacity of Z axle driving mechanism to increase.And the driving amount (stroke) of Z-direction increases more, and then the loading that is caused by spring also increases more.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of clamping device, with kinematics anchor clamps (so-called Kai Erfen anchor clamps) rigidization, make it can carry out vertically (Z axle) direction translation and tilting action, and, even the acceleration effect of the horizontal direction of being subjected to or downward direction also can be eliminated the position skew.
Another object of the present invention provides a kind of vertical direction that is provided with the band tilt function of above-mentioned clamping device and drives positioner.
If employing the present invention then can provide a kind of clamping device, be provided with many groups by being placed on the combination that ball on the supporting member and clamp shaft are formed, this clamp shaft has the receiving portion of this ball in the bottom, and this receiving portion is contacted with the top of above-mentioned ball; Above-mentioned clamp shaft is made of above-mentioned receiving portion and the axial region that begins thus to extend upward; Fixing bearing in above-mentioned supporting member side, so that the tiltably outstanding up state of above-mentioned axial region, the combination that keeps above-mentioned ball and above-mentioned clamp shaft; Between above-mentioned receiving portion and above-mentioned bearing, be provided with this receiving portion bullet spring member downwards.
In clamping device of the present invention, the combination of above-mentioned ball and above-mentioned clamp shaft is 3 groups, and the 1st group the 1st ball is housed in the recess of being located on the 1st supporting member that is formed by pyramid or circular cone; The 2nd group the 2nd ball is housed in by predetermined direction and is arranged in the V-shaped groove on above-mentioned the 2nd supporting member with extending; The 3rd group the 3rd ball is placed on the plane of the 3rd supporting member.
Clamping device of the present invention can also make such structure, and the combination of above-mentioned ball and above-mentioned clamp shaft is 3 groups, and the 1st group the 1st ball is housed in the 1V shape groove that is arranged on the 1st supporting member; The 2nd group the 2nd ball is housed in the 2V shape groove that is arranged on the 2nd supporting member; The 3rd group the 3rd ball is housed in the 3V shape groove that is arranged on the 3rd supporting member, and above-mentioned the 1st~the 3rd supporting member has the extended line that makes above-mentioned the 1st~the 3V shape groove and intersects at the structure of a bit.
If employing the present invention, a kind of the 1st embodiment of above-mentioned clamping device then can be provided, above-mentioned the 1st~3rd group axial region is installed in respectively on the identical upper component, and, have the structure that above-mentioned the 1st~the 3rd supporting member can be moved up and down independently of one another, make above-mentioned upper component can carry out the action and the tilting action of above-below direction thus.
If employing the present invention then can provide a kind of the 2nd embodiment of above-mentioned clamping device, above-mentioned the 1st~3rd group axial region is installed in respectively on the identical upper component, and above-mentioned the 1st~the 3rd supporting member is made of a common supporting member.
If employing the present invention, then can provide a kind of vertical direction to drive positioner with tilt function, be provided with as the described clamping device of above-mentioned the 1st embodiment, on basal component, be provided with the 1st~the 3rd driving mechanism that above-mentioned the 1st~the 3rd supporting member is moved up and down.
The vertical direction that has tilt function provided by the invention drives in the positioner, is provided with the slide wedge mechanism as above-mentioned the 1st~the 3rd driving mechanism.
Description of drawings
Fig. 1 is the profile that explanation constitutes 3 groups of anchor clamps that the present invention relates to clamping device.
Fig. 2 represents that with 1 anchor clamps vertical direction drives the side view of the structure of positioner, this moment Z axle driving mechanism is combined to shown in Figure 1 respectively organizing and constitutes vertical direction driving positioner in the anchor clamps.
Fig. 3 each configuration vertical view of organizing when to be expression with the combination of anchor clamps shown in Figure 2 and Z axle driving mechanism constitute vertical direction and drive positioner.
Fig. 4 is the schematic diagram that is used to illustrate 2 examples of former Kai Erfen anchor clamps.
Fig. 5 is used for illustrating that former Kai Erfen anchor clamps absorb the schematic diagram of the effect of the skew that the thermal expansion by supporting member causes.
Fig. 6 is the schematic diagram that is used for illustrating the problem when former Kai Erfen anchor clamps apply the acceleration of the acceleration of horizontal direction and downward direction.
The specific embodiment
Below, illustrate that with reference to Fig. 1~Fig. 3 the vertical direction of the band tilt function of clamping device of the present invention and this clamping device of use drives the preferred forms of positioner.
Fig. 1 improves embodiment when realizing clamping device of the present invention to above-mentioned Kai Erfen anchor clamps.Constitute in 3 groups of anchor clamps of Kai Erfen anchor clamps recess (perhaps can be the recess that forms by the circular cone) 107a that Fig. 1 (a) expression is become by pyramid such as pyrometric cones and be housed in the 1st group of wherein ball 13 formations; Fig. 1 (b) expression is by V-shaped groove 108a and be housed in the 2nd group that wherein ball 14 constitutes; The 3rd group of constituting by plane and the ball 15 that is placed on it of Fig. 1 (c) expression.Except the structure of ball placement part, arbitrary group in the 1st group~the 3rd group all is same structure.
The 1st anchor clamps 10 shown in Fig. 1 (a) comprise: the 1st supporting member 107 forms recess (the being designated hereinafter simply as recess) 107a that is produced by circular cone (or pyramid) at upper surface; The 1st ball 13 is housed among the recess 107a; Clamp shaft 16 has the receiving portion 16-1 of ball 13 in the bottom, and has the axial region 16-2 that extends upward, and receiving portion 16-1 is contacted with the top of ball 13; Bearing 104 is so that be fixed on the state that the axial region 16-2 on the 1st supporting member 107 tiltably gives prominence to upward, the combination that keeps ball 13 and clamp shaft 16; Disc spring 101 is arranged between the inner face side of the upside of receiving portion 16-1 and bearing 104, with receiving portion 16-1 bullet downwards.
The 2nd anchor clamps 11 shown in Fig. 1 (b) comprise: the 2nd supporting member 108 forms V-shaped groove 108a at upper surface; The 2nd ball 14 is housed among the V-shaped groove 108a; Clamp shaft 17 is provided with the receiving portion 17-1 of ball 14 in the bottom, and, have the axial region 17-2 that extends upward, receiving portion 17-1 is contacted with the top of ball 14; Bearing 105 is so that be fixed on the state that the axial region 17-2 on the 2nd supporting member 108 tiltably gives prominence to upward, the combination that keeps ball 13 and clamp shaft 17; Disc spring 102 is arranged between the inner face side of the upside of receiving portion 17-1 and bearing 105, with receiving portion 17-1 bullet downwards.
The 3rd anchor clamps 12 shown in Fig. 1 (c) comprise: the 3rd supporting member 109; The 3rd ball 15, be placed on the 3rd supporting member 109 above, promptly place in the plane; Clamp shaft 18 is provided with the receiving portion 18-1 of ball 15 in the bottom, and has the axial region 18-2 that extends upward, and receiving portion 18-1 is contacted with the top of ball 15; Bearing 106 is so that be fixed on the state that the axial region 18-2 on the 3rd supporting member 109 tiltably gives prominence to upward, the combination that keeps ball 15 and clamp shaft 18; Disc spring 103 is arranged between the inner face side of the upside of receiving portion 18-1 and bearing 106, with receiving portion 18-1 bullet downwards.
Among receiving portion 16-1~18-1 any one, all side is provided with the recess that is formed by pyramid or circular cone in its lower section, and ball 13~15 is housed in this recess.And, in the bearing 104~106 any one, for axial region 16-2~18-2 can be inserted through obliquely, upper side at them all is provided with the tabular component mistake with opening also bigger than the diameter of axial region 16-2~18-2, this tabular component has makes disc spring be pressed on spring pressing function on the receiving portion, and the loading of necessity is applied on the bearing.Say closely,, will make displacement sum by the opening of pressing spring, so that allow with relatively moving that tilting action causes greater than axial region diameter and relative motion in order to provide relative motion to each bearing.In addition, the disc spring that can apply the loading that requires is installed, even use the clamp shaft run-off the straight also can not surpass the spring of the elastic region of spring.
When 3 groups of above-mentioned anchor clamps are used as a clamping device, for example axial region 16-2~18-2 is installed on the upper component 110 as clamped member.On the other hand, with regard to supporting member 107~109, the lower member 111,112,113 that they are installed is made of a member.And much less, the summit of the recess 107a that forms on the extended line of the V-shaped groove 108a that forms on the 2nd supporting member 108 in the 2nd anchor clamps 11 and the 1st supporting member 107 in the 1st anchor clamps 10 intersects.Certainly, also can constitute supporting member 107~109 with a member from the beginning.And, constituting supporting member 107~109 with member and at this formation above member the 1st~the 3V shape groove and they are intersected at when a bit, can provide a kind of and have and the clamping device of structure identical function shown in Fig. 4 (b), this is unquestionable.In any case, owing to have in the clamping device of these structures, the the 1st~the 3rd anchor clamps 10~12 all have respectively and structure identical functions shown in Fig. 4 (a) or the figure (b), lower side and upper side all form the structure of rigidization simultaneously, therefore, even the effect of horizontal direction or acceleration is downwards arranged, also can eliminate position skew each other.
On the other hand, when the vertical direction of using the 3 groups of anchor clamps 10~12 shown in Fig. 1 (a)~Fig. 1 (c) to constitute the band tilt functions drives positioner, has the structure that the lower member 111~113 that makes each group can drive independently along the vertical direction by each Z axle driving mechanism.
Z axle driving mechanism for example can use the structure of so-called slide wedge mode as shown in Figure 2.Situation when Fig. 2 has represented that Z axle driving mechanism 40 is used for the 1st anchor clamps 10, any of the 2nd, the 3rd anchor clamps 11,12 also used complete identical mechanism.
Among Fig. 2, Z axle driving mechanism 40 comprises: move horizontally piece 61, can slide by along continuous straight runs on basal component 50, side has the inclined plane in the above; Vertical movable block 62, side has the corresponding inclined plane, inclined plane that moves horizontally piece 61 with this below, can move up and down by moving horizontally moving horizontally of piece 61; Motor 63 moves horizontally the drive source that piece 61 moves and works as making; And cylinder 64, apply the signature power that pushes away of horizontal direction to moving horizontally piece 61.
Move horizontally piece 61 below side be provided with sliding component 61-1, this sliding component 61-1 can slide along the guide member 50-1 that is arranged on 1 horizontal direction on the basal component 50 at least.Move horizontally piece 61 and also on the inclined plane, be provided with 1 guide member 61-2 at least.On the other hand, on the inclined plane of vertical movable block 62, the sliding component 62-1 that can slide is being set on guide member 61-2.On basal component 50, also corresponding and extend ground upward slide 50-2 is being set with the back side of vertical movable block 62, in vertical movable block 62 sides of this slide 50-2 the guide member 50-3 of the above-below direction of extension along the vertical direction is being set.And, at the back side of vertical movable block 62 the sliding component 62-2 that can slide is being set on guide member 50-3.At the output shaft of motor 63 with move horizontally the ball screw framework 65 that is used for the gyration of output shaft is transformed into the motion of horizontal direction is being set between the piece 61.
Use aforesaid structure, when motor 63 when a direction is rotated, this rotation transformation is become the motion of horizontal direction, make to move horizontally the right direction of piece 61 in Fig. 2 and move horizontally, its result is moved upward vertical movable block 62.On the other hand, when motor 63 rotates in the opposite direction, this rotation transformation is become the motion of horizontal direction, make to move horizontally the left direction of piece 61 in Fig. 2 and move horizontally, its result moves vertical movable block 62 downwards.
Use cylinder 64 is the reasons according to the following stated.Because upper component 110 and be placed on workpiece on this upper component 110 sometimes and other loadings etc., the masterpiece of vertical direction is used on the vertical movable block 62, and the horizontal direction composition of this power acts on and moves horizontally on the piece 61.If this horizontal direction composition only relies on the power of motor 63 to overcome, just require to use high-power motor, so above-mentioned horizontal direction composition is that the output shaft 64-1 by making cylinder 64 contacts and accepts with moving horizontally piece 61, therefore just can reduce the power of motor 63.
In any case, made up 3 groups of anchor clamps 10~12 of the Z axial brake device 40,70,80 of said structure, be configured in as illustrated in fig. 3 on the basal component 50.Much less, under this occasion, the extended line that is formed on the V-shaped groove 108a on the 2nd supporting member 108 in the 2nd anchor clamps 11 certainly with the 1st supporting member 107 that is formed in the 1st anchor clamps on the summit of recess 107a intersect.On the other hand, when the Z axle drove positioner and has structure as Fig. 4 (b) shown type, 3 groups of anchor clamps all had the V-shaped groove 108a shown in Fig. 1 (b), make the structure that each anchor clamps are subjected to above-mentioned Z axle drive mechanism independently.Certainly, even under this occasion, the extended line that 3 groups of anchor clamps also are configured to 3 V-shaped grooves intersects at a bit.In any case, the upper component 110 in 3 groups of anchor clamps 10~12 is same members, if the amount of movement of the above-below direction of 3 groups of anchor clamps 10~12 all is set as identical, then becomes translation motion; Make amount of movement variant, then become tilting action.
As mentioned above, the present invention can provide a kind of Z axle with tilt function to drive positioner, make kinematic anchor clamps (so-called Kai Erfen anchor clamps) rigidization, can carry out the translation and the tilting action of Z-direction, and, even the acceleration effect of horizontal direction or above-below direction is arranged, also can eliminate the position skew.Above-mentioned Z axle driving mechanism is an example only, and the present invention is not limited to the mode of slide wedge, also can realize with known driving mechanism such as simple cylinder or ball-screw.
And, can also the position relation of upper side and lower side can be constituted upside down according to different situations.
As mentioned above, will drive positioner by 3 vertical direction that constitute and be arranged on the X-axis workbench or Y-axis workbench of X-Y objective table, just can constitute can be along 3 axially movable objective table devices such as X-Y-Z.At this moment, basal component 50 just becomes X workbench or Y-axis workbench.
If employing the present invention, a kind of clamping device can be provided, make kinematic anchor clamps, be upper side and the lower side rigidization in the so-called Kai Erfen anchor clamps, can carry out the translation and the tilting action of Z-direction, and, even the acceleration effect of horizontal direction or above-below direction is arranged, also can eliminate the position skew.
If employing the present invention can also provide a kind of vertical direction that the band tilt function of the clamping device with above-mentioned effect is being set to drive positioner.

Claims (7)

1. a clamping device is characterized in that,
Be provided with many groups by being placed on the combination that ball on the supporting member and clamp shaft are formed, this clamp shaft has the receiving portion of this ball in the bottom, and this receiving portion is contacted with the top of above-mentioned ball;
Above-mentioned clamp shaft is made of above-mentioned receiving portion and the axial region that begins thus to extend upward;
Fixing bearing in above-mentioned supporting member side, so that the tiltably outstanding up state of above-mentioned axial region, the combination that keeps above-mentioned ball and above-mentioned clamp shaft;
Between above-mentioned receiving portion and above-mentioned bearing, be provided with this receiving portion bullet spring member downwards.
2. clamping device as claimed in claim 1 is characterized in that,
The combination of above-mentioned ball and above-mentioned clamp shaft is 3 groups, and the 1st group the 1st ball is housed in the recess of being located on the 1st supporting member that is formed by pyramid or circular cone; The 2nd group the 2nd ball is housed in by predetermined direction and is arranged in the V-shaped groove on above-mentioned the 2nd supporting member with extending; The 3rd group the 3rd ball is placed on the plane of the 3rd supporting member.
3. clamping device as claimed in claim 1 is characterized in that,
The combination of above-mentioned ball and above-mentioned clamp shaft is 3 groups, and the 1st group the 1st ball is housed in the 1V shape groove that is arranged on the 1st supporting member; The 2nd group the 2nd ball is housed in the 2V shape groove that is arranged on the 2nd supporting member; The 3rd group the 3rd ball is housed in the 3V shape groove that is arranged on the 3rd supporting member, and above-mentioned the 1st~the 3rd supporting member has the extended line that makes above-mentioned the 1st~the 3V shape groove and intersects at the structure of a bit.
4. as claim 2 or 3 described clamping devices, it is characterized in that,
Above-mentioned the 1st~3rd group axial region is installed in respectively on the identical upper component, and, have the structure that above-mentioned the 1st~the 3rd supporting member can be moved up and down independently of one another, make above-mentioned upper component can carry out the action and the tilting action of above-below direction thus.
5. as claim 2 or 3 described clamping devices, it is characterized in that,
Above-mentioned the 1st~3rd group axial region is installed in respectively on the identical upper component, and above-mentioned the 1st~the 3rd supporting member is made of a common supporting member.
6. the vertical direction with tilt function drives positioner, is provided with clamping device as claimed in claim 4, it is characterized in that,
On basal component, be provided with the 1st~the 3rd driving mechanism that above-mentioned the 1st~the 3rd supporting member is moved up and down.
7. the vertical direction of band tilt function as claimed in claim 6 drives positioner, it is characterized in that,
Be provided with slide wedge mechanism as above-mentioned the 1st~the 3rd driving mechanism.
CNB2004100313375A 2003-03-27 2004-03-26 Llamping device and vertical direction driving positioner with inclination function Expired - Fee Related CN1274462C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003086932A JP4354722B2 (en) 2003-03-27 2003-03-27 Clamp device and vertical drive positioning device with tilt function provided with the same
JP200386932 2003-03-27

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CN1533864A true CN1533864A (en) 2004-10-06
CN1274462C CN1274462C (en) 2006-09-13

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KR (1) KR100541170B1 (en)
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JP4354722B2 (en) 2009-10-28
TW200422135A (en) 2004-11-01
TWI245681B (en) 2005-12-21

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