TWI245681B - Clamp device and vertical direction drive positioner equipped with tilt function having same - Google Patents

Abstract

The object of the present invention is to provide a clamp device that is free of positional deviation for acceleration in horizontal direction or downward direction, while performing translation and tilt operation along the vertical direction. The solution of the present invention is three sets of combination of ball (13-15) placed on support components (107-109), and clamp shafts (16-18) having a lower portion forming bearing portions (16-1 to 18-1) for the balls with the bearing portions urging upper portions of the balls. The clamp shaft includes: the bearing portions, and shafts (16-2 to 18-2) extending from the top. On the support component side, a frame (104-106) for keeping the combination of the balls and the clamp shafts in a state of extending upwards in rockable manner is provided, and belleville springs (101-106) are provided between the bearing portions and the frames for urging the bearing portions downwards.

Description

1245681 ⑴ 玖, description of the invention [Technical field to which the invention belongs] The present invention 'relates to a vertical-direction driving and positioning device with a tilt function having a drive function in a vertical direction, that is, a Z-axis direction, and a tilt-that-tilt function. [Prior art] The proposed two-axis (vertical) driving device used for positioning platforms, etc., is a combination of three driving mechanisms, and can support those supported bodies, such as a mounting table or suction. A disc or the like is given a parallel motion in the vertical direction (for example, Patent Document 1). This is because although a dynamic jig (ie, a Kelvin jig) is used, it is a positioning device. When the horizontal or downward acceleration above a certain size is actuated, the upper object may deviate. Hereinafter, description will be made with reference to FIGS. 4 to 6. (1) Kelvin fixtures are three balls 22, 23, and 24 mounted on the bottom of the upper mounting table 20 through the shaft as shown in Fig. 4 (a). A triangular pyramid (or conical) recess 25 on the upper surface of 21, a v-shaped v-groove 26 on the cross section 6, and a plane 27 are in contact with each other, and the surface of the upper mounting table 20 can be relatively opposed to the surface of the lower mounting table 21. Position it. However, as shown in Fig. 4 (b), there may be a case where all three balls are in contact with the V grooves 26 'in three groups formed on the upper surface of the lower stage 2 1 ". (2) This Kelvin fixture, As shown in Figure 4 (a), the -5- (2) 1245681 of the recess 25

The apex of the pyramid is located on the extension line of the V-groove 26 in the axial direction. As a result, the "one side", for example, the upper mounting table 2 to which the ball is fixed, even if the interval between the three balls is enlarged (narrowed) due to thermal expansion (or contraction), or the lower mounting table 21 is thermally expanded (or contracted). ), As shown in FIG. 5, the ball 22 that is in contact with the triangular conical recess 25 may be used as a fixed point, and the ball 23 that is in contact with the V groove 26 may be moved in the axial direction of the V groove 26 to be in contact with the plane. The ball 24 can be moved to the determined position from the relative positional relationship of the triangular pyramid-shaped concave portion 25 and the v-groove 26. However, in the case of Fig. 4 (b), the V grooves 26 of the three groups cross at one point and have the same functions as those of Fig. 4 (a).

(3) The recessed portion 'uses the surface on which the groove is provided as the lower side and the surface on which the balls are fixed as the upper side, and supports the upper side on the lower side in each clamp portion and applies horizontal acceleration on the lower side. In this case, as shown in FIG. 6 (a), the friction force μ · F 1 (μ is the friction coefficient) generated by the weight of the upper side supported by the clamp portion formed by the V groove 26 and the ball 23 is shown. The action is used to maintain the relative positions of the upper and lower sides when the horizontal acceleration on the lower side is small. However, when the horizontal force F2 generated by a large horizontal acceleration α is actuated on the lower side, the component force F2 '(the component force along the plane direction of the V groove 26) exceeds the frictional force μ. F1, the upper part The side position will deviate. Alternatively, as shown in Fig. 6 (b), when the whole is moved downward by an acceleration? 1 exceeding the acceleration due to gravity, the upper side cannot follow the lower side and move away. Therefore, in order to provide greater friction, the upper and lower sides are connected by a spring or the like to apply an additional load. [Patent Document 1] Japanese Patent Laid-Open No. 10-79344 (Page 2, No. 9 -6-(3) 1245681

[Summary of the invention] (Problems to be solved by the present invention)

However, in the two-axis (vertical) positioning device, three sets of two-axis drive mechanisms are used to support the upper side (for example, a rotary mounting table), and tilting is required in addition to the two-axis parallel movement. In this regard, if the upper and lower joints are constituted by the aforementioned Kelvin jig, a tilting operation with a tilt can be performed. However, when the Z axes of the three groups are set on a positioning table (XY mounting table) in the horizontal direction, for the reason (3) above, if the positioning table in the horizontal direction moves with a large acceleration, the upper part The side will deviate. In order to prevent the upper and lower sides from being connected by a spring or the like, load sharing is applied to the Z-axis driving mechanism, so that the capacity of the Z-axis driving mechanism needs to be increased. In addition, the larger the driving amount (stroke) in the Z-axis direction, the more the load generated by the spring increases. Here, an object of the present invention is to provide a dynamic jig (so-called Kelvin jig) that can perform simultaneous and tilting movements in the vertical (Z-axis) direction, and can act even when the acceleration is horizontal or downward. The clamping device does not deviate from the position. Another object of the present invention is to provide a vertical-direction drive positioning device with a tilt function having the above-mentioned holding device. (Means for Solving the Problems) According to the present invention, a gripping device can be provided, including a plurality of (4) 1245681 sets: a ball provided on a support member, and a receiving portion having the ball at a lower portion and the Combination of the receiving shaft abutting the upper clamp shaft of the ball 'The aforementioned clamping shaft is composed of the receiving portion and a shaft portion extending upward from the receiving portion, and the shaft portion may be swung toward the support member side. A bracket for holding the combination of the ball and the clamp shaft is fixed in a state protruding upward, and a disc spring for urging the receiving portion downward is provided between the receiving portion and the bracket.

In the clamping device of the present invention, the combination of the ball and the clamp shaft is three groups, and the first ball of the first group is housed in a concave portion of a pyramid or a cone provided on the first support member, and the second The second ball of the group is accommodated in a V-groove extending in a predetermined direction in which a second support member is provided in advance, and the third ball of the third group is provided on a plane of the third support member.

In the clamping device of the present invention, the combination of the ball and the clamp shaft is three groups, and the first ball of the first group is accommodated in a first V groove provided in the first support member, and the second Two balls are accommodated in the 2V groove provided in the second support member, and the third ball of the third group is accommodated in the 3 V groove provided in the third support member. The aforementioned first to third support members are The extension lines of the first to third V grooves are configured to cross at one point. The above-mentioned clamping device, in a first aspect, is a structure in which the shaft portions of the first to third groups are respectively mounted on the same upper member, and the support members of the first to table 3 are independently moved up and down, respectively. , So that the upper member can move up and down and tilt. In the second aspect of the above clamping device, the shaft portions of the first to third groups are respectively mounted on the same upper member, and at the same time, the first to third members of the first to eight members (-8) (5) 1245681 are formed by One common support member. According to the present invention, it is possible to provide a vertical-direction driving and positioning device with a tilt function, and a staggered-direction driving and positioning device with a tilt function having a clamping device such as the patent application scope item 4, which is characterized by: The first to eighth driving mechanisms in which the first to third supporting members move up and down are provided on the base member.

In the vertical drive positioning device with a tilt function according to the present invention, the first to third drive mechanisms are sliding wedge mechanisms. [Embodiment] With reference to Figs. 1 to 3, preferred embodiments of a holding device of the present invention and a vertical direction driving and positioning device with a tilt function using the holding device according to the present invention will be described.

Fig. 1 shows an embodiment in which the holding device of the present invention is realized by improving the Kelvin jig. Among the three sets of jigs constituting the Kelvin jig, Fig. 1 (a) shows a concave portion of a pyramid such as a triangular cone (or a concave portion of a cone) 107a and the ball 13 accommodated in it. The first group, the first figure (b) shows the second group consisting of the v-groove 108a and the ball 14 housed therein. The first group (c) shows the flat surface and the ball 1 5 The third group. Except for the structure of the portion where the ball is provided, the first to third groups have the same structure. The first jig 10 of FIG. 1 (a) includes a recess (hereinafter referred to as a recess) formed by a cone (or a pyramid) formed on the first jig 10; [07a's first support member 107, and a housing The first in the recess 107a! Ball 1 3, and a receiving portion 1 6_ 1 having a ball 1 3 at the lower portion, and a shaft portion 1 6 · 2 extending upwardly by -9- (6) 1245681, and abutting the receiving portion 1 6-1 against the ball 1 3 The upper clamp shaft 16 and the bracket 10 fixed to the first support member 107 for holding the combination of the ball 1 3 and the clamp shaft 16 in a state where the shaft portion 16-2 may swing upward may be projected upwards, and Between the upper side of the receiving portion 16-1 and the inner surface side of the bracket 104, the disk spring 10 for pressing the receiving portion 1 6-] downwards is pressed].

The second jig 11 as shown in FIG. 1 (b) includes a second supporting member 108 having a V groove 10 8 a formed thereon, and a second ball 14 housed in the V groove 10 8 a. And a receiving part 17-1 having a ball 14 in the lower part and a shaft part 1 7-2 extending upward and abutting the receiving part 1 7-1 on the upper part of the ball 14 and a fixture shaft 17 fixed to the second The support member 108 holds the combination of the ball 14 and the clamp shaft 17 in a state where the shaft portion 17-2 is swingably protruded upward, and the bracket 105 is located on the upper side of the receiving portion 17-1 and the inner surface of the bracket 105. The disc spring 102 for pressing the receiving portion 17-1 downward between the sides.

As shown in FIG. 1 (c), the third jig 12 includes a third support member 109, a third ball 15 provided on the upper surface, that is, a plane, a receiving portion 18-1 having the ball 15 at the lower portion, and The upper extending shaft portion 18-2 and the receiving portion 1 8-1 abut the upper part of the clamp shaft 18 of the ball 15 and the third support member 109 is fixed to swing the shaft portion 18-2 upward. The bracket 106 for holding the combination of the ball 15 and the clamp shaft 18 in the protruding state, and the receiving portion 18-1 is pushed downward between the upper side of the receiving portion 18-1 and the inner surface side of the bracket 106. Used of a disc spring 103. Bearing section 6-1 ~ 1 8-1, all form a pyramid or cone on the lower side -10- 1245681

The recessed part and receive the valley ball 13 ~ 15 in this recessed part. In addition, the brackets 104 to 106 are on the upper side of the brackets. In order to swing through the shaft portions 1 6-2 to 1 8 · 2 as possible, they are provided with openings having a larger diameter than the shaft portions ~ 18-2. The structure of the plate member 'This plate member has a pressing function of pressing the disc spring receiving portion against the spring, and gives the load required by the bracket. In terms of grids, in order to allow relative movement of the brackets, the spring-pressed openings are formed larger than the diameter of the shaft portion and the movement distance of the relative movement to allow relative movement with tilting motion. In addition, a member capable of giving the load required by the disc spring is installed, and a member which does not exceed the elastic limit of the spring even if the clamp shaft is inclined is used.

In the case of using a three-set clamp unit as described above, for example, the shaft portion 16 · 2 to 18-2 is mounted on an upper member 110 as a clamped member. On the one hand, these lower members 1 1 1, 1 1 2, 1 1 3 will also be mounted on the supporting members 1 07 to 10 9 by one member. However, the second jig 11 is an extension of the V-groove I08a formed in the second support member 108, and it is a structure of the apex of the recess 107a which intersects the first support member 107 formed in the first jig 10. Of course, the supporting members 107 to 109 may be formed of a single member from the beginning. In addition, if the supporting members 107 to 109 are composed of a single member, and the first to third V grooves are formed at one point on the upper surface of this member, it is of course possible to provide the same as in FIG. 4 (b). Functional clamping device. In any case, the first to third clamps 10 to 12 of the holding device constituted by these structures have the same functions as those in Fig. 4 (a) or Fig. 4 (b), respectively. The side and the upper side are rigid structures, so that they will not deviate from each other even if the horizontal direction or the downward acceleration action of -11-(8) 1245681. On the other hand, when three sets of jigs shown in Figs. 1 (a) to 1 (c) are used: 0 ~ 1 2 When a vertical direction driving positioning device with a tilt function is configured, the lower members of each group 1 1 1 to 1 1 3 can be independently driven by the Z-axis driving mechanism in the vertical direction. For the Z-axis drive mechanism, for example, a sliding wedge method shown in Fig. 2 can be used. Fig. 2 shows a case where the Z-axis driving mechanism 40 is applied to the first jig 10, but the same mechanism can be used for any of the second and third jigs 11 and 12. In FIG. 2, the Z-axis driving mechanism 40 includes a horizontally moving block 61 capable of sliding horizontally on the base member 50 and having an inclined surface on the upper side, and a horizontal movement corresponding to this on the lower side. The inclined surface of the inclined surface of the block 61 is a vertically movable block 62 that can be moved up and down by the horizontal movement of the horizontally moving block 61, and a motor 63 serving as a drive source for moving the horizontally moved block 61. And a cylinder 64 that applies a pressing force to the horizontally moving block 61 in a horizontal direction. The horizontally moving block 61 has a sliding member 6 1-1 on the lower surface side, and at least one horizontal guide member 50-1 provided on the base member 50 can slide. The horizontally moving block 61 is provided with at least one guide member 61-2 on the inclined surface. On the one hand, a sliding member 62-1 of the slidable guide member 61-2 is provided in the inclined surface of the vertically moving block 62. The base member 50 is provided with a block body 50-2 corresponding to the inside of the vertically moving block body 62 and extending upwards. A vertical movement block 62 side of the block body 50-2 is provided with a • 12- (9) 1245681 Guide member 50-3 extending up and down. Further, a sliding member 6 2-2 of a slidable guide member 50-3 is provided on the inside of the vertical moving block 62. Between the output shaft of the motor 63 and the horizontally moving block 61, there is provided a worm shaft mechanism 65 for converting the rotational movement of the output shaft into a horizontal movement.

With the above structure, if the motor 63 is rotated in one direction, it will transform into a horizontal movement and move the horizontally moving block 61 horizontally to the right in FIG. 2. As a result, the vertically moving block 62 will be upward. mobile. On the other hand, if the motor 63 is rotated in the opposite direction, it will be transformed into a horizontal movement so that the horizontally moving block 61 moves horizontally in the left direction in Fig. 2. As a result, the vertically moving block 62 moves downward.

However, the cylinder 64 is used for the following reasons. Due to the upper member 1 10 and the workpiece placed thereon and other loads, forces in the vertical direction will act on the vertically moving block 62, and other horizontal components will act on the horizontally moving block 61. In order to make this horizontal component sufficient for the output of the motor 63 and requiring a high output motor, the horizontal component can be received by the horizontal moving block 61 which abuts the output shaft 64-1 of the cylinder 64, The output of the motor 63 is reduced. In any case, the three sets of jigs 10 to 12 combining two-axis drive mechanisms 40, 70, and 80 having the above-described structure are arranged on the base member 50 as shown in FIG. Of course, also in this case, for the second jig 11, the extension line of the V groove 108 8 a formed in the second support member 10 is the same as that of the first support member 107 formed in the first jig 10. The apex of the recessed part 107a is comprised so that it may cross | intersect. On the other hand, when the Z-axis driving and positioning device is formed into a pattern as shown in FIG. 4 (b), “all three sets of jigs are provided with FIG. 1 · (10) 1245681 (b) on the display V The grooves 108a are formed independently of each jig and driven by the z-axis drive mechanism. Of course, in this case, the three sets of jigs also make the extensions of the three V-grooves intersect at one point. In any case, the upper members 1 10 of the three groups of jigs 10 to 12 are the same part material, and the movements of the three groups of jigs 10 to 12 in the vertical direction can be made to move in parallel. If there is a difference in the amount of movement, tilting can be performed.

As described above, it is possible to provide a dynamic jig (so-called Kelvin jig) that can be rigid, and can perform simultaneous and tilting movements in the Z-axis direction, and has no position deviation even with acceleration action in the horizontal or downward direction. Functional Z-axis drive positioning device. The above z-axis driving mechanism is only an example, and is not limited to the sliding wedge method, and may be realized by a known driving mechanism such as a cylinder or a worm shaft. In addition, a structure in which the positional relationship between the upper side and the lower side is reversed depending on the situation may be used.

However, by setting the three-axis vertical-direction driving and positioning device on the χ-axis stage or γ-axis stage of the χ · γ platform as described above, a platform device capable of moving in the 3-axis direction of X-Y-Z can be constructed. In this case, the base member 50 is an X-axis mounting table or a γ-axis mounting table. (Effects of the Invention) {Apparel_The present invention can provide an upper and a lower side of a dynamic jig, a so-called Kelvin jig, and rigidity, and can perform Z-axis parallel it and tilt tilt and movement. The Z-axis drive positioning device with tilt function, which does not deviate from acceleration in the horizontal direction or in the downward direction, is set to -14- (11) 1245681. Furthermore, according to the present invention, it is possible to provide a vertical-direction drive positioning device with a tilt function provided with the clamping device. [Brief description of the drawings] [FIG. 1] A cross-sectional view for explaining three sets of jigs constituting a clamping device according to the present invention.

[Fig. 2] A side view showing a structure in the case where the Z-axis driving mechanism is combined with the jigs of each group in Fig. 1 to form a vertical-direction driving positioning device. [Fig. 3] A plan view showing an arrangement drawing of each group in a case where a combination of the jig and Z-axis driving mechanism of Fig. 2 is used to constitute a vertical direction driving positioning device.

[Fig. 4] A diagram for explaining two examples of a conventional Kelvin jig. [Fig. 5] A view explaining the effect of absorbing a deviation in the conventional Kelvin jig in accordance with the thermal expansion of a supporting member. [Fig. 6] A diagram for explaining a problem in a case where a horizontal acceleration and a downward acceleration are applied to a conventional Kelvin jig. [Illustration of figure number] α 'Acceleration PF1 Friction force F2' Component force F 2 Horizontal force 10 Fixture-15- (12) 1245681 11 Fixture 1 2 Fixture 13 Ball 14 Ball 15 Ball 16 Fixture shaft 16- 1 Receiving portion 16- 2 Shaft section 17 Fixture shaft 17-1 Receiving section \ 1 · 2 Shaft section 18 Fixture shaft 1 8-1 Receiving section 1 8 _ 2 Shaft section 20 Upper mounting table 2 1 Lower mounting table 2 1, 'Lower mounting table 22 Ball 23 Ball 24 ball 25 recess 26 V groove 26 丨 V groove 27 plane

-16- (13) 1245681 40 2-axis drive mechanism 4 0 Z-axis drive mechanism 40 Z-axis drive mechanism 5 0 Base member 50-1 guide member 50-2 block body 50-3 guide member

6 1 Horizontally moving block 6 1-1 Slide member 61-2 Guide member 62 Vertically move block 62-1 Slide member 62-2 Slide member 63 Motor

64 cylinder 6 4-I output shaft 6 5 worm shaft mechanism 1 0 1 disc spring 102 disc spring 103 disc spring 1 04 bracket 105 bracket 106 bracket 10 7 support member -17- (14) (14) 1245681 1 〇 7 a recess 1 〇8 support member 1 0 8 a V groove 109 support member 110 upper member 111 lower member

-18-

Claims (1)

(1) 1245681 Pickup and patent application scope 1 A gripping device characterized by comprising a plurality of arrays: a ball provided on a support member, and a receiving portion having the ball at a lower portion and abutting the receiving portion against the ball The combination of the upper clamp shaft is composed of the receiving portion and a shaft portion extending upward from the receiving portion, and is fixed in a state in which the shaft portion may be swung upwardly in the support member side. A bracket for holding a combination of the ball and the clamp shaft is provided with a disc bow early spring for urging the receiving portion downward between the receiving portion and the bracket. 2 · The clamping device according to item 1 of the patent application scope, wherein the combination of the ball and the clamp shaft is three groups, and the ball of the first group is housed in a pyramid provided on the first support member or In the conical recess, the second ball of the second group is housed in a V-groove extending in a predetermined direction in which a second support member is provided, and the third ball of the third group is provided on a plane of the third support member. 3. The clamping device according to item 1 of the scope of the patent application, wherein the combination of the ball and the clamp shaft is three groups, and the first ball of the first group is housed in a first V groove provided on the first support member. The second ball of the second group is accommodated in the second V groove provided in the second supporting member, and the third ball of the third group is accommodated in the third V groove provided in the third supporting member. The third support member is configured by crossing the extension lines of the first to third V grooves at one point. 4. The clamping device according to the second or third item of the patent application, wherein the shafts of the first to third groups are respectively installed on the same upper member, the same as -19 · (2) 1245681. Each of the first to third support members may be independently moved up and down, so that the upper member can be moved up and down and tilted. 5. The clamping device according to item 2 or 3 of the scope of patent application, wherein the shafts of the first to third groups are respectively mounted on the same upper member, and at the same time, the first to third support members are replaced by 1 It consists of a common support member. 6 · —A vertical direction drive positioning device with a tilt function, with The vertical driving positioner with a tilt function of the holding device according to item 4 of the patent application is characterized in that the first to third driving mechanisms for moving the first to third supporting members up and down are provided on On the base member. 7. The vertical direction drive positioning device with tilt function according to item 6 of the scope of patent application, wherein the first to third drive mechanisms are sliding wedge mechanisms. -20-