CN1261283C - Workpiece conveying robot - Google Patents
Workpiece conveying robot Download PDFInfo
- Publication number
- CN1261283C CN1261283C CNB021457794A CN02145779A CN1261283C CN 1261283 C CN1261283 C CN 1261283C CN B021457794 A CNB021457794 A CN B021457794A CN 02145779 A CN02145779 A CN 02145779A CN 1261283 C CN1261283 C CN 1261283C
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- Prior art keywords
- mentioned
- manipulator
- workpiece
- cam disc
- arm
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/002—Arms comprising beam bending compensation means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A work-carrying robot is capable of decreasing stroke in z-axial direction, reducing costs, and is capable of being used in a vacuum. A deflection correcting mechanism 4 consists of a cam plate 41 whose upper face 41a changes its height position along its circumference direction, a movable block 43 which integrally rotates with a pulley 2f and is rotatable around a horizontal shaft 44 of the pulley 2f side, and a cam follower 42, fixed to the movable block 43, for rolling in a circumference direction on a cam plate upper face 41a along with the rotation of the pulley 2f. While a hand 1 holding a work moves forward and backward, the movable block 43 rotates around the horizontal shaft 44 to keep the hand 1 in a horizontal state by rolling the cam follower 42 on the cam plate upper face 41a in a circumference direction. In addition, a vertical displacement quantity at a tip end of the arm generated by the deflection of the arm itself and so on is corrected to always keep a constant height by a vertical axis (z axis) of a robot main body.
Description
Technical field
The present invention relates to transport the large-size glass substrate of liquid crystal indicator and plasma display plate (PDP) and semiconductor and transport robot with the workpiece of workpiece such as large-scale single-chip.
Background technology
Transport among the machine people at the workpiece that transports the big workpiece of weight such as large-size glass substrate, when manipulator extend, on manipulator, produce deflection loading workpiece on the manipulator owing to torque load.
Therefore, workpiece in the past transports among the machine people, for example, on the root (root) of manipulator, the adjustment bolt is set, the elevation angle that bolt is adjusted manipulator is adjusted in operation in advance, and manipulator is set with becoming level when making manipulator be elongated to most advanced (terminal location in the actual use field).
Also have, employed workpiece transports robot in atmosphere, the deflection correction axle according to motor is set, with the deflection of corresponding manipulator on the root of manipulator.
But, the workpiece that screw bolt-type is adjusted in above-mentioned use transports robot, manipulator moves to during the terminal location from the initial end position, because the change manipulator front end of torque load will resemble the picture circular arc and move, therefore, be loaded on the manipulator workpiece with disturb easily as each groove in the box that transports the place of this workpiece and device stage etc. and gateway scope etc.Therefore,, in advance the height setting of spacing between each groove and gateway scope is got very roomyly, follow, need to strengthen the stroke of the Z-direction (above-below direction) of robot in this in order to avoid such interference.
In addition, the workpiece of above-mentioned use motor type transports robot, when cost is high, owing to be difficult to effective countermeasure is taked in the degassing that comes from motor and distribution thereof in a vacuum and the processing of motor distribution etc., has the out of use problem of present situation.
The objective of the invention is to, solve above-mentioned workpiece like that in the past and transport the existing problem of robot, in the stroke that can reduce Z-direction, provide the reduction that to seek cost, and the workpiece that can use in a vacuum transports robot.
In addition, transport robot for workpiece, so-called scalar type robot (for example, when having the 2nd arm and the 1st arm and manipulator, built-in belt pulley and Timing Belt or steel band, rotatable phase on the horizontal plane of the rotatable phase on the horizontal plane of the 2nd arm and the 1st arm and the 1st arm and manipulator changes, manipulator advances on the horizontal linear track, the robot that retreats) and straight ejector half robot (for example, when slip foundation level straight line moves on immobilizing foundation, the robot that the manipulator horizontal linear moves on the slip basis) by known to the common people, the present invention can both be suitable for for any robot.
Summary of the invention
Workpiece of the present invention transports robot, it is characterized in that, will with the advancing and retreat interlock, make above-mentioned manipulator be maintained at root one side that only is arranged on above-mentioned manipulator of level of the manipulator that is keeping workpiece according to the deflection correction mechanism of mechanical realization.
Workpiece of the present invention transports robot, workpiece at scalar type transports among the machine people, it is characterized in that, the deflection correction mechanism is set, this deflection correction mechanism has: be fixed on the cam disc of shell upper face side of the leading section of the 1st arm, top height and position along the circumferential direction changes; Be fixed on the moveable block of manipulator root,, and can rotate around the trunnion axis of this belt pulley side with the rotation that becomes one of the belt pulley of the leading section of above-mentioned the 1st arm; Be fixed on the Cam Follower on the above-mentioned moveable block, the rotation that is accompanied by above-mentioned belt pulley is rotated to circumferencial direction on above-mentioned cam disc; The manipulator that is keeping workpiece advance and back-off period between, above-mentioned Cam Follower is by rotating to circumferencial direction on above-mentioned cam disc, above-mentioned moveable block is rotated around above-mentioned trunnion axis, makes above-mentioned manipulator maintain level.Also have,, use the last lower shaft (Z axle) of robot, carry out the correction of upper and lower displacement by indicating the sagging individual difference of this arm in advance by the correction of the displacement of the height of the above-below direction of the sagging cause of arm.
Workpiece of the present invention transports robot, transports among the machine people at the workpiece of straight ejector half, and it is characterized in that the deflection correction mechanism is set, and this deflection correction mechanism has: be fixed on the top cam disc on the basis of sliding, top height and position along the circumferential direction changes; The directly moving manipulator basis of direction forwards, backwards on can be on above-mentioned slip basis; Be fixed on the moveable block of the root of manipulator, can rotate around the trunnion axis on above-mentioned slip basis; Be fixed on the Cam Follower on the above-mentioned moveable block, be accompanied by above-mentioned slip basis directly move on above-mentioned cam disc on forwards, backwards direction rotate; The manipulator that is keeping workpiece advance and back-off period between, above-mentioned Cam Follower by on above-mentioned cam disc forwards, backwards direction rotate, above-mentioned moveable block is rotated around above-mentioned trunnion axis, makes above-mentioned manipulator maintain level.Also have,, use the last lower shaft (Z axle) of robot, carry out the correction of upper and lower displacement by indicating the sagging individual difference of this arm in advance by the correction of the displacement of the height of the above-below direction of the sagging cause of arm.
Description of drawings
Fig. 1 is suitable for routine scalar type workpiece as the present invention to transport the vertical view of the major part of robot.
Fig. 2 is the side view of conceptive expression uniform machinery people's major part.
Fig. 3 is the side view of deflection correction mechanism.
Fig. 4 is the front view of deflection correction mechanism.
Fig. 5 is the vertical view of deflection correction mechanism.
Fig. 6 transports the vertical view of the major part of robot as other straight ejector half workpiece that are suitable for example of the present invention.
Fig. 7 is the side view of conceptive expression uniform machinery people's major part.
Fig. 8 is the rearview of conceptive expression uniform machinery people's major part.
The specific embodiment
Embodiments of the invention are described below with reference to the accompanying drawings.
Fig. 1 is suitable for routine scalar type workpiece as the present invention to transport the vertical view of the major part of robot, and Fig. 2 is the side view of conceptive expression uniform machinery people's major part.
Expression respectively in Fig. 1 and Fig. 2, the 1st, the manipulator of the workpiece that weight such as loading large-size glass substrate are big, the 2nd, leading section 2a is attached at the 1st arm of the root 1a of manipulator 1, the 3rd, leading section 3a is attached at the 2nd arm of the root 2b of the 1st arm 2, the root 3b of the 2nd arm 3 with can move and can link to Z-direction (above-below direction) to the not shown board of θ direction of principal axis (circumferencial direction on the horizontal plane) rotation.As everyone knows, the 2nd arm the 3, the 1st arm 2 and manipulator 1 are by not shown driving mechanism (belt pulley, Timing Belt or steel band etc.), with point shown in Figure 10 is the fixed position, the state Sm of state Ss that represents with solid line from Fig. 1 and Fig. 2 through representing with chain-dotted line Fig. 1 and Fig. 2, the state Se displacement of representing with double dot dash line in Fig. 1 and Fig. 2, manipulator 1 advances at the rectilinear orbit from the position, top to terminal location.Also have, well-known, the 2nd arm the 3, the 1st arm 2 and manipulator 1, also to above-mentioned opposite state displacement, manipulator 1 retreats into the position, top from terminal location on the same rectilinear orbit with above-mentioned advancing the time.
On the bond sites of manipulator 1 and the 1st arm 2, a deflection correction mechanism 4 according to mechanical realization is set, and this deflection correction mechanism 4 is used to revise manipulator 1 deflection of generation when advancing and retreat because on the 2nd arm the 3, the 1st arm 2 of moment load and the manipulator 1 of loading workpiece.
The deflection correction mechanism 4 of Gou Chenging like this, during keeping the manipulator 1 of workpiece to advance to terminal location from the position, top, because the moment load produces the deflection of angle of depression direction on the 2nd arm the 3, the 1st arm 2 and manipulator 1, the deflection of this angle of depression direction advances to terminal location according to manipulator 1 from the position, top and little by little increases.Therebetween, Cam Follower 42 rotates to circumferencial direction on the 41a on cam disc 41, and owing to the height and position that forms the top 41a of cam disc 41 little by little rises, the height and position of Cam Follower 42 little by little rises as described above.Be accompanied by the rising of the height and position of such Cam Follower 42, moveable block 43 is rotated around trunnion axis 44, acts on the direction that its leading section 1b is risen for manipulator 1, in other words, makes the direction of the elevation angle increase of manipulator 1.Thereby the increase at the elevation angle of such manipulator 1 offsets with the deflection of the angle of depression direction of the 2nd arm the 3, the 1st arm 2 and manipulator 1, and manipulator 1 is kept level during advancing.Have again, because the upper and lower displacement amount at the front end of arm that the deflection of arm self etc. take place by robot body's last lower shaft (Z axle), revises it usually with keeping certain height.
In addition, the manipulator 1 that is keeping workpiece with above-mentioned retreat into the position, top from terminal location on the contrary during, carry out action opposite when advancing with above-mentioned manipulator 1, manipulator 1 similarly is maintained at level when advancing.
Fig. 3～Fig. 5 has represented the deflection correction mechanism 4 of conceptive expression among Fig. 2 particularly, and Fig. 3 is the side view of deflection correction mechanism, and Fig. 4 is the front view of deflection correction mechanism, and Fig. 5 is the vertical view of deflection correction mechanism.
In Fig. 3～Fig. 5 respectively the expression: 1 is manipulator, and 1a is the root of manipulator 1, and 2 is the 1st arm, and 2a is the leading section of the 1st arm 2, and 2c is the shell of leading section 2a, 2d be shell 2c above.
As shown in Figures 3 and 4, be provided with fixed axis 2e, on this fixed axis 2e, set movable belt pulley 2f free to rotately in the inside of shell 2c.Set up 2g such as Timing Belt or steel band at movable belt pulley 2f, 2g such as this Timing Belt or steel band also are erected on the fast pulley of root side not shown in the figures of the 1st arm 2.
As shown in Figures 3 and 4, on the shell 2c of the leading section 2a of the 1st arm 2, on the 2d, fixing lid 45.On the shell of the inside of lid 45, on the 2d, fixing cam disc holding member 46, on this cam disc holding member 46, as shown in Figure 4, fixing cam disc 41 with adjusting screw 47 by cam disc.Cam disc is parts of the posture of inching cam disc 41 with adjusting screw 47.Cam disc 41 forms circular, and the height and position of the top 41a of this cam disc 41 forms along the circumferential direction and changes.That is, the top 41a of cam disc 41 when manipulator 1 is positioned at terminal location and Cam Follower 42 position contacting, forms height and position and rises gradually continuously when manipulator 1 is positioned at the position, top and Cam Follower 42 position contacting.
In the inside of lid 45, as shown in Figure 3, accommodating the trunnion axis holding member 48 of the movable belt pulley 2f that is fixed on the 1st arm 2.This trunnion axis holding member 48 as shown in Figure 5, has the bearing portion 49 that keeps trunnion axis 44 with rotating freely.On the both ends of trunnion axis 44,, fixing moveable block 43 as Fig. 3～shown in Figure 5.Moveable block 43 can be rotated around trunnion axis 44.On moveable block 43, as shown in Figure 4, fixing fine setting monoblock 52 with adjusting bolt 50 by Cam Follower.On fine setting monoblock 52, fixing the Cam Follower 42 that can on circular cam disc 41, rotate to circumferencial direction on the 41a.Cam Follower is the fine setting monoblock 52 of postures adjust to(for) moveable block 43 with adjusting bolt 50, the parts of the height and position of inching Cam Follower 42.
On moveable block 43, fixing the root 1a of manipulator 1.
In the deflection correction mechanism 4 that constitutes like this, during keeping the manipulator 1 of workpiece to advance to terminal location from the position, top, Cam Follower 42 rotates to circumferencial direction on the 41a on cam disc 41, owing to the height and position that forms the top 41a of cam disc 41 little by little rises, the height and position of Cam Follower 42 little by little rises as described above.Be accompanied by the rising of the height and position of such Cam Follower 42, moveable block 43 is rotated around trunnion axis 44, acts on the direction that its leading section 1b is risen for manipulator 1, in other words, makes the direction of the elevation angle increase of manipulator 1.Thereby the increase at the elevation angle of such manipulator 1 offsets with the deflection of the angle of depression direction of the 2nd arm the 3, the 1st arm 2 and manipulator 1, and manipulator 1 is kept level during advancing.
Also have, the manipulator 1 that is keeping workpiece with above-mentioned retreat into the position, top from terminal location on the contrary during, carry out action opposite when advancing with above-mentioned manipulator 1, manipulator 1 similarly is maintained at level when advancing.In addition, advance gradually according to manipulator 1, the height and position of manipulator 1 little by little descends owing to deflection, this height and position can be revised by the board of controlling the height and position that can adjust Z-direction (above-below direction), while can make manipulator 1 keep same height to keep level usually.
As discussed above, scalar type workpiece according to the present invention transports robot, during keeping the manipulator 1 of the big workpiece of weight to advance to terminal location from the position, top, owing to can maintain level, the worry that has not had each groove in workpiece and box that transports the place as it and device stage etc. and gateway scope etc. to disturb.The spacing between will each groove and the height setting of gateway scope get very roomy, therefore, can get the travel settings of the Z-direction (above-below direction) of robot very little.
Also have, deflection correction mechanism 4 is owing to only according to the structure of machinery, compare with the deflection correction mechanism that uses the motor type, when cost reduces, can suppress because motorless in a vacuum the generation of the degassing etc., even also can fully use in a vacuum.
Fig. 6 transports the vertical view of the major part of robot as other straight ejector half workpiece that are suitable for example of the present invention, and Fig. 7 is the side view of conceptive expression uniform machinery people's major part, and Fig. 8 is the rearview of conceptive expression uniform machinery people's major part.
Expression respectively in Fig. 6～Fig. 8,1 for loading the manipulator of the big workpiece of weight such as large-size glass substrate, and 11 be board outstanding from robot body portion, that can move and can rotate to θ direction (circumferencial direction on the horizontal plane) to Z-direction (above-below direction).On board 11, fixing the tabular immobilizing foundation 12 in long four directions with the level binding.On immobilizing foundation 12, disposing slip basis 15 with immobilizing foundation 12 roughly the same flat shapes by being combined in straight line guiding groove 14,14 in the pair of right and left track 13,13 along its length.Sliding above the basis 15, by being combined in straight line guiding groove 17, the 17 configuration manipulators 1 in the pair of right and left track 16,16 along its length.(say closely between manipulator 1 and straight line guiding groove 17,17 and insert and put deflection correction mechanism 6 described later).As everyone knows, slide basis 15 and manipulator 1 by not shown driving mechanism (belt or rack-and-pinion etc.), the state Sm that the state Ss that represents with solid line from Fig. 6 and Fig. 7 represents with chain-dotted line through Fig. 6 and Fig. 7, to the state Se displacement that Fig. 6 and Fig. 7 represent with double dot dash line, manipulator 1 advances at the rectilinear orbit from the position, top to terminal location.Also have, well-known, slide basis 15 and manipulator 1, also to above-mentioned opposite state displacement, manipulator 1 retreats into the position, top from terminal location on the same rectilinear orbit with above-mentioned advancing the time.
On the bond sites on the manipulator 1 and the basis 15 of sliding, deflection correction mechanism 6 according to mechanical realization only is set, this deflection correction mechanism 6 be used to revise loading workpiece manipulator 1 when advancing and retreat because the deflection of the angle of depression direction that on immobilizing foundation 12, slide basis 15 and manipulator 1, produces of moment load.
Deflection correction mechanism 6 has the manipulator basis 61 of the pair of right and left that is fixed on straight line guiding groove 17,17, and the track 16,16 of the pair of right and left on this straight line guiding groove 17,17 and the basis 15 of sliding combines.The manipulator basis 61 of pair of right and left is bonded by trunnion axis 62.Setting moveable block 63 on trunnion axis 62, moveable block 63 can be rotated around trunnion axis 62 free to rotately.Sliding above the basis 15, fixing the cam disc 64 of elongated along its length.Cam disc 64, height and position of 64a forms according to rising gradually before the place ahead and then continuously above it.Fixing the Cam Follower 65 that can on cam disc 64, rotate on the 64a on the moveable block 63.On moveable block 63, fixing the root 1a of manipulator 1.
In the deflection correction mechanism 6 that constitutes like this, during keeping the manipulator 1 of workpiece to advance to terminal location from the position, top, Cam Follower 65 rotates towards the place ahead on the 64a on cam disc 64, owing to the height and position that forms the top 64a of cam disc 64 little by little rises, the height and position of Cam Follower 65 little by little rises as described above.Be accompanied by the rising of the height and position of such Cam Follower 65, moveable block 63 is rotated around trunnion axis 62, acts on the direction that its leading section 1b is risen for manipulator 1, in other words, makes the direction of the elevation angle increase of manipulator 1.Thereby the increase at the elevation angle of such manipulator 1 offsets with the deflection of the angle of depression direction of immobilizing foundation 12, slide basis 15 and manipulator 1, and manipulator 1 is kept level during advancing.Have again and since the deflection on the basis 15 self of sliding etc. take place in the upper and lower displacement amount of basic front end of sliding, by robot body's last lower shaft (Z axle), it is revised usually with keeping certain height.
Also have, the manipulator 1 that is keeping workpiece with above-mentioned retreat into the position, top from terminal location on the contrary during, carry out action opposite when advancing with above-mentioned manipulator 1, manipulator 1 similarly is maintained at level when advancing.In addition, defer to manipulator 1 and advance the height and position of manipulator 1 gradually because deflection and little by little descending, this height and position can be revised by the board 11 of controlling the height and position that can adjust Z-direction (above-below direction), while can make manipulator 1 keep same height to keep level usually.
As discussed above, straight ejector half workpiece according to the present invention transports robot, during keeping the manipulator 1 of the big workpiece of weight to advance to terminal location from the position, top, owing to can maintain level, the worry that has not had each groove in workpiece and box that transports the place as it and device stage etc. and gateway scope etc. to disturb.The spacing between will each groove and the height setting of gateway scope get very roomy, therefore, can get the travel settings of the Z-direction (above-below direction) of robot very little.
Also have, deflection correction mechanism 6 is owing to only according to the structure of machinery, compare with the deflection correction mechanism that uses the motor type, when cost reduces, can suppress because motorless in a vacuum the generation of the degassing etc., even also can fully use in a vacuum.
According to the present invention, when the stroke that can make Z-direction reduces, can seek the reduction of cost, and can use in a vacuum.
Claims (2)
1. a workpiece transports robot, the workpiece that is scalar type transports robot, it is characterized in that, the deflection correction mechanism is set, this deflection correction mechanism has: be fixed on the cam disc of shell upper face side of the leading section of the first arm, top height and position along the circumferential direction changes; Be fixed on the moveable block of the root of manipulator,, and can rotate around the trunnion axis of this belt pulley side with the rotation that becomes one of the belt pulley of the leading section of above-mentioned the first arm; Be fixed on the Cam Follower on the above-mentioned moveable block, the rotation that is accompanied by above-mentioned belt pulley is rotated to circumferencial direction on above-mentioned cam disc; The manipulator that is keeping workpiece advance and back-off period between, above-mentioned Cam Follower is by rotating to circumferencial direction on above-mentioned cam disc, above-mentioned moveable block is rotated around above-mentioned trunnion axis, makes above-mentioned manipulator maintain level.
2. a workpiece transports robot, is that the workpiece of straight ejector half transports robot, it is characterized in that, the deflection correction mechanism is set, and this deflection correction mechanism has: be fixed on the top cam disc on the basis of sliding, top height and position along the circumferential direction changes; The directly moving manipulator basis of direction forwards, backwards on can be on above-mentioned slip basis; Be fixed on the moveable block of the root of manipulator, can rotate around the trunnion axis on above-mentioned slip basis; Be fixed on the Cam Follower on the above-mentioned moveable block, be accompanied by above-mentioned slip basis directly move on above-mentioned cam disc on forwards, backwards direction rotate; The manipulator that is keeping workpiece advance and back-off period between, above-mentioned Cam Follower by on above-mentioned cam disc forwards, backwards direction rotate, above-mentioned moveable block is rotated around above-mentioned trunnion axis, makes above-mentioned manipulator maintain level.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP331431/2001 | 2001-10-29 | ||
| JP2001331431A JP3908005B2 (en) | 2001-10-29 | 2001-10-29 | Work transfer robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1418056A CN1418056A (en) | 2003-05-14 |
| CN1261283C true CN1261283C (en) | 2006-06-28 |
Family
ID=19147012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021457794A Expired - Fee Related CN1261283C (en) | 2001-10-29 | 2002-10-17 | Workpiece conveying robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3908005B2 (en) |
| KR (1) | KR20030035978A (en) |
| CN (1) | CN1261283C (en) |
| TW (1) | TW564207B (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4524132B2 (en) * | 2004-03-30 | 2010-08-11 | 東京エレクトロン株式会社 | Vacuum processing equipment |
| EP1645513A3 (en) * | 2004-09-21 | 2006-04-19 | Philip Morris Products S.A. | Modular packing assembly |
| JP2006110662A (en) * | 2004-10-14 | 2006-04-27 | Toshiba Mach Co Ltd | Industrial robot |
| JP4903027B2 (en) * | 2006-01-06 | 2012-03-21 | 東京エレクトロン株式会社 | Substrate transport device and substrate support |
| WO2009072199A1 (en) | 2007-12-05 | 2009-06-11 | Hirata Corporation | Substrate conveying apparatus and method of controlling the apparatus |
| JP5178432B2 (en) * | 2008-09-26 | 2013-04-10 | 日本電産サンキョー株式会社 | Industrial robot |
| CN102528793A (en) * | 2010-12-15 | 2012-07-04 | 沈阳新松机器人自动化股份有限公司 | End effector overturnable mechanism for carrying plate-shaped workpiece |
| KR101609775B1 (en) | 2014-03-24 | 2016-04-06 | 주식회사 로보스타 | Pitch variable type robot |
| CN106706455A (en) * | 2017-03-01 | 2017-05-24 | 扬州金威环保科技有限公司 | Sweeping brush wear degree monitoring system of movable type sweeping machine |
| US11198216B2 (en) | 2018-06-19 | 2021-12-14 | Kawasaki Jukogyo Kabushiki Kaisha | Horizontal articulated robot |
| CN110948517A (en) * | 2018-09-26 | 2020-04-03 | 沈阳新松机器人自动化股份有限公司 | Non-equidistant feeding device for robots |
| CN110948512B (en) * | 2018-09-26 | 2022-07-26 | 沈阳新松机器人自动化股份有限公司 | Tilt-swing compensation type direct-drive vacuum robot |
| CN110948511B (en) * | 2018-09-26 | 2022-07-26 | 沈阳新松机器人自动化股份有限公司 | Alternative marching type robot feedway |
| CN110948518B (en) * | 2018-09-26 | 2022-08-02 | 沈阳新松机器人自动化股份有限公司 | Material receiving and sending device for cleaning robot |
| JP7412208B2 (en) * | 2020-02-17 | 2024-01-12 | 東京エレクトロン株式会社 | Conveyance device, processing system and conveyance method |
-
2001
- 2001-10-29 JP JP2001331431A patent/JP3908005B2/en not_active Expired - Fee Related
-
2002
- 2002-09-27 TW TW091122247A patent/TW564207B/en active
- 2002-10-17 CN CNB021457794A patent/CN1261283C/en not_active Expired - Fee Related
- 2002-10-28 KR KR1020020065789A patent/KR20030035978A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030035978A (en) | 2003-05-09 |
| JP2003136442A (en) | 2003-05-14 |
| JP3908005B2 (en) | 2007-04-25 |
| TW564207B (en) | 2003-12-01 |
| CN1418056A (en) | 2003-05-14 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060628 Termination date: 20091117 |