564207 〜 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（1 ) 【發明所屬技術領域】 本發明係關於一種用K搬送液晶顯示裝置及電漿顯示 面板（PDP)等大型玻璃基板及半導體用大型晶圓等工件 之工件搬送用機器人。 【Μ注之技術】 在用Κ搬送大型玻璃基板等較重工件之工件搬送機器 人中*裝有工件的手部在伸長時，會因力矩負載而在手部 上產生彎曲的情形。 所Κ，Κ往的工件搬送用機器人之設定係為：例如在 手部的基部（根部）設有調整螺栓*並預先操作調整螺栓 來調整手部的仰角，使手部在伸長到最大的前進位置（實 際使用區域之終點位置）時，手部可維持水平的狀態。 又，大氣中使用的工件搬送用機器人則在手部的根部 上設置利用馬達轉動調整的彎曲修正軸，來因應手部的彎 曲〇 【發明所欲解決之問題】 然而，使用上逑調整螺栓的工件搬送用機器人，在手 部從起點位置移動至終點位置之期間，手部的前端會因力 矩負載的變化而產生描畫弧線式的動作，所W裝載於手部 的工件極容易與作為搬送目的地的匣子及裝置平台等的各 開槽及閘門開口等發生相互干擾的情形。因此，為7避免 此種干擾的發生，則必須增加各開槽間的間距及閛門口間 的開口高度，從而*也必須增加機器人在Ζ軸方向（上下 方向）的行程。 (請先閱讀背面之注意事項再填寫本頁) 0 --線- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 564207 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（2 ) 此外，上述使用馬達轉動調整的工件搬送用機器人， 不僅成本高，而且在真空中欲對來自馬達及由配線類的外 來氣體或馬達配線處理等採取有效的因應對策實有困難， 因此會產生在實際上無法使用之問題。 本發明係有鑒於上述之K往工件搬送用機器人的問題 而開發者，其目的在提供一種可減少Z軸方向的行程，同 時亦得K降低成本，且可在真空中使用的工件搬送用機器 人0 此外*工件搬送用機器人中，所謂的水平多關節型的 機器人（例如：具備第2臂、第1臂及手部，同時內設有 皮帶輪及同步皮帶或鋼帶等，且藉由第2臂與第1臂在水平 面上的轉動相位及第1臂與手部在水平面上的轉動相位之 變化*而在水平直線軌道上前進後退的機器人），以及直 線動作型機器人（例如：滑動底座水平直線移動於固定底 座上之同時，手部亦水平直線移動於滑動底座上之機器人 )雖為已知，但本發明係為了適用於任何一種機器人而設 .計者。 【解決課題之手段】 本發明之工件搬送用機器人的特徵為：在上述手部的 基部側設有僅由機械式構造形成的彎曲修正機構，而該彎 曲修正機構係可連動於保持有工件之手部的前進及後退， 將上述手部維持在水平狀態。 本發明之工件搬送用機器人，係在水平多關節.型的工 件搬送機器人中設有彎曲修正機構，而該彎曲修正機構係 -5 一 (請先閱讀背面之注意事項再填寫本頁) 0 一H°J· -線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 564207 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（3 ) 具備：凸輪板，固定於第1臂之前端部的匣子上面側，且 其上面的高度位置係可沿圓周方向而變化；活動塊，固定 於手部的基部，而與上逑第1臂前端部的皮帶輪呈一體地 轉動，同時可繞著該皮帶輪側的水平軸轉動；及凸輪從動 件，固定於上述活動塊，且可隨著上述皮帶輪的轉動而在 上述凸輪板的上面朝圓周方向轉動，而保持有工件的手部 在前進及後退期間，可藉由凸輪從動件在上述凸輪板的上 面朝圓周方向轉動，而使上逑活動塊繞著上逑水平軸轉動 ，令上述手部維持在水平狀態。此外，因臂部的下垂所生 之上下方向的高度位移係可藉由預先指示該臂部下垂的個 體差異，而使用機器人的上下軸（Z軸）來進行上下位移 的修正。 本發明之工件搬送用機器人，係在直線動作型的工件 搬送機器人中設有彎曲修正機構，而該彎曲修正機構係具 備：凸輪板，固定在滑動底座的上面，且該凸輪板上面的 高度位置係沿著前後方向而變化；手部底座I可在上述滑 動底座的上面朝前後方向直線動作；活動塊，固定於手部 的基部•且繞著上述手部底座的水平軸轉動；及凸輪從動 件*固定於上逑活動塊，且可隨著上述皮帶輪的直線動作 ，而在上述凸輪板的上面朝前後方向轉動，於保持有工件 的手部在前進及後退期間•可藉由凸輪從動件在上_述凸輪 板的上面朝前後方向轉動，而使上述活動塊繞著上述水平 軸轉動，令上逑手部維持在水平狀態。此外，因臂部的下 垂所生之上下方向的高度位移係可藉由預先指示之該臂部 一6- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂------I-- (請先閱讀背面之注意事項再填寫本頁) 564207 A7 經濟部智慧財產局員工消費合作社印製 _B7五、發明說明（4 ) 下垂的個體差異，而使用機器人的上下軸（Z軸）來進行 上下位移的修正。 【發明之實施型態】 K下，參佐圖面說明本發明之實施型態。 第1圖係本發明之水平多關節型工件搬送用機器人應 用例之的主要部分俯視圖。 第2圖係概念式地表示該機器人主要部分的側視圖。 第1圖及第2圖中，1係用以叠裝有大型玻璃基板等 重量較大的大型工件之手部，2 係在手部1的基部la上連 結有前端部2 a之第1臂，3係在第1臂2的基部2 b上連结 有前端部3a之第2臂，而第2臂3的基部3b又連结有可朝 Z軸方向（上下方向）移動且可朝0軸方向（水平面的圓 周方向）旋轉之未圖示機台。如眾所週知，第2臂3、第1 臂2及手部1係藉由未圖示的驅動機構（皮帶輪、同步皮 帶、或網帶等），以第1圖所示的點〇為固定位置，而從 第1圖及第2圖之實線所示的狀態Ss，經由第1圖及第2 圖之一點鏈線所示的狀態Sffl，位移至第1圖及第2圖之兩 點鐽線所示的狀態Se，且手部係在起點位置朝向终點位置 的直線軌道上前進。此外，如眾所週知，第2臂3、第1臂 2及手部1亦可進行與上述相反方向的位移，即，手部1 可在终點位置朝向起點位置之與前進時相同的直線軌道上 後退。 在手部1及第1臂2的連结部位設有僅由機槭式.構％ 形成的彎曲修正機構4，裝有工件的手部1 在前進及後退 (請先閱讀背面之注意事項再填寫本頁) -------訂-11!1!線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 564207 A7 B7 五、發明說明（5 ) 時，第2臂3、第1臂2及手部1因力矩負載而產生的彎曲 可用該彎曲修正機構4予Μ修正。 彎曲修正機構4 具有凸輪板41，其可固定於第1臂2 的前端部2 a之匣子2c的上面2d側。該凸輪板41之上面41a 係以其高度位置可Μ順沿圓周方向而變化之方式形成。亦 即，在手部1位於起點位置時，該凸輪板41之上面41a與 後逑之凸輪從動件42相接觸的位置開始，至手部1位於終 點位置時，該凸輪板41之上面41a與凸輪從動件42相接觸 的位置，其高度位置會連續的逐漸升高。手部1的基部la 上固定有活動塊43。該活動塊4 3在與第1臂2的前端部2 a之 皮帶輪（未圖示）圼一體地轉動，同時亦繞著上述皮帶輪 側的水平軸4 4轉動。此外，活動塊4 3上固定有凸輪從動件 42。該凸輪從動件42會隨著上述皮帶輪的轉動，而在凸輪 板41的上面41a朝圓周方向轉動。 經濟部智慧財產局員工消費合作社印製 H.----i!^——0sil (請先閲讀背面之注意事項再填寫本頁)564207 ~ Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) [Technical Field of the Invention] The present invention relates to a large glass substrate such as a liquid crystal display device and a plasma display panel (PDP) carried by K. And workpiece transfer robots for large wafers for semiconductors. [M-note technology] Among workpiece transfer robots that carry large workpieces such as large glass substrates with K, when the hand with the workpiece is extended, the hand may be bent due to moment load. The setting of the workpiece transport robot to K, K is: for example, the base (root) of the hand is provided with an adjustment bolt * and the adjustment bolt is operated in advance to adjust the elevation angle of the hand, so that the hand is extended to the maximum forward Position (the end position of the actual use area), the hand can maintain a horizontal state. In addition, a workpiece transfer robot used in the atmosphere is provided with a bending correction shaft that is adjusted by motor rotation at the root of the hand to respond to the bending of the hand. [Problems to be Solved by the Invention] During the movement of the hand-moving robot from the starting position to the end position, the front end of the hand will draw an arc-shaped action due to the change in moment load. The workpiece loaded on the hand is extremely easy to be used for carrying purposes. Each slot in the ground box, device platform, etc., and the gate opening may interfere with each other. Therefore, in order to avoid this kind of interference, it is necessary to increase the spacing between the slots and the height of the openings between the door openings, so that the stroke of the robot in the Z-axis direction (up and down direction) must also be increased. (Please read the notes on the back before filling out this page) 0 ----This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 564207 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the Invention (2) In addition, the above-mentioned robot for workpiece transfer using motor rotation adjustment is not only costly, but also requires effective measures to be taken in a vacuum against foreign gas from the motor and wiring, or motor wiring processing. Difficulties cause problems that cannot be used in practice. The present invention was developed in view of the above-mentioned K-to-workpiece transfer robot, and its purpose is to provide a work-transferring robot that can reduce the stroke in the Z-axis direction while also reducing K and can be used in a vacuum. 0 In addition * Among the robots for workpiece transfer, the so-called horizontal articulated robot (for example, it has a second arm, a first arm, and a hand, and is equipped with a pulley, a timing belt, or a steel belt. The rotation phase of the arm and the first arm on the horizontal plane and the change of the rotation phase of the first arm and the hand on the horizontal plane *, the robot moving forward and backward on the horizontal linear track, and the linear motion robot (for example: sliding base level While the robot is moving linearly on the fixed base, the hand is also moving horizontally and linearly on the sliding base) Although the robot is known, the present invention is designed to be applicable to any kind of robot. [Means for solving the problem] The robot for transferring a workpiece according to the present invention is characterized in that a bending correction mechanism formed of only a mechanical structure is provided on the base side of the hand, and the bending correction mechanism can be linked to a workpiece holding the workpiece. The forward and backward movements of the hands keep the hands horizontal. The workpiece transfer robot of the present invention is provided with a bending correction mechanism in a horizontal multi-joint type workpiece transfer robot, and the bending correction mechanism is -5 (please read the precautions on the back before filling this page) 0 1 H ° J · -line · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 564207 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (3) Have: , Fixed to the upper side of the box at the front end of the first arm, and the height position of the upper box can be changed in the circumferential direction; the movable block is fixed to the base of the hand, and is the same as the pulley at the front end of the upper arm of the upper arm Rotate integrally while rotating around the horizontal axis on the side of the pulley; and cam followers are fixed to the movable block and can rotate on the cam plate in the circumferential direction as the pulley rotates, keeping it During the forward and backward movement of the hand with the workpiece, the cam follower can be rotated on the upper surface of the cam plate in a circumferential direction, so that the upper movable block can be rotated about the upper horizontal axis, so that The hands are kept horizontal. In addition, the vertical displacement caused by the sag of the arm can be corrected by using the vertical axis (Z-axis) of the robot to indicate the individual difference of the sag of the arm in advance. The workpiece transfer robot of the present invention is provided with a bending correction mechanism in a linear action type workpiece transfer robot, and the bending correction mechanism is provided with a cam plate fixed on the upper surface of the sliding base and a height position on the cam plate. The hand base I can move linearly on the upper surface of the sliding base in the forward and backward direction; the movable block is fixed to the base of the hand and rotates about the horizontal axis of the hand base; The moving part * is fixed to the upper movable block, and can be rotated in the forward and backward direction on the upper surface of the cam plate in accordance with the linear movement of the pulley. During the forward and backward movement of the hand holding the workpiece, it can be driven by the cam. The moving member rotates on the upper surface of the cam plate in the front-rear direction, so that the movable block rotates around the horizontal axis, so that the upper hand is maintained in a horizontal state. In addition, the height displacement in the up and down direction due to the sag of the arm can be determined in advance by the arm. 6- This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) --- ----------------- Order ------ I-- (Please read the precautions on the back before filling this page) 564207 A7 Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Print _B7 V. Description of the Invention (4) Individual differences in sagging, and use the robot's vertical axis (Z axis) to correct the vertical displacement. [Implementation Mode of the Invention] Below K, the reference drawing illustrates the implementation mode of the invention. Fig. 1 is a plan view of a main part of an application example of a horizontal articulated workpiece transfer robot according to the present invention. Fig. 2 is a side view conceptually showing the main part of the robot. In Fig. 1 and Fig. 2, 1 is a hand for stacking a large workpiece with a large weight such as a large glass substrate, and 2 is a first arm connected to the front end 2 a of the base 1 a of the hand 1 3, is connected to the second arm of the front end 3a to the base 2b of the first arm 2, and the base 3b of the second arm 3 is connected to the Z axis (up and down direction) and can move toward 0 A machine (not shown) that rotates in the axial direction (the circumferential direction of the horizontal plane). As is well known, the second arm 3, the first arm 2 and the hand 1 are fixed at a point 0 shown in FIG. 1 by a driving mechanism (pulley, timing belt, or mesh belt, etc.) not shown in the figure. From the state Ss shown by the solid line in FIG. 1 and FIG. 2, the state Sffl shown by the point chain line in FIG. 1 and FIG. 2 is shifted to the two-point 鐽 line in FIG. 1 and FIG. 2. The state Se is shown, and the hand is advancing on a straight track from the starting position toward the ending position. In addition, as is well known, the second arm 3, the first arm 2, and the hand 1 can also be displaced in the opposite direction to the above, that is, the hand 1 can be on the same linear track as the forward position when the end position is toward the starting position. Back. At the connection part of the hand 1 and the first arm 2 is provided a bending correction mechanism 4 formed only by the machine maple structure. The hand 1 with the workpiece is moved forward and backward (please read the precautions on the back before (Fill in this page) ------- Order -11! 1! The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 564207 A7 B7 5. When the invention is described (5), the The bending caused by the moment load of the two arms 3, the first arm 2, and the hand 1 can be corrected by the bending correction mechanism 4. The bending correction mechanism 4 includes a cam plate 41 that can be fixed to the upper surface 2d side of the box 2c of the front end portion 2a of the first arm 2. The upper surface 41a of the cam plate 41 is formed so that its height position can be changed in the circumferential direction. That is, when the hand 1 is at the starting position, the upper surface 41a of the cam plate 41 contacts the cam follower 42 of the rear cymbal, and when the hand 1 is at the end position, the upper surface 41a of the cam plate 41 The position of the contact with the cam follower 42 gradually increases gradually. A movable block 43 is fixed to a base la of the hand 1. The movable block 4 3 rotates integrally with a pulley (not shown) 圼 of the front end portion 2 a of the first arm 2 and also rotates about a horizontal axis 44 on the pulley side. In addition, a cam follower 42 is fixed to the movable block 43. The cam follower 42 rotates in a circumferential direction on the upper surface 41a of the cam plate 41 in accordance with the rotation of the pulley. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs H .---- i! ^ ---- 0sil (Please read the precautions on the back before filling this page)
如此構成的彎曲修正機構4*在保持有工件的手部1從 起點位置朝終點位置前進之期間，第2臂3、第1臂2及 手部1會因力矩負載而產生俯角方向的彎曲，且該俯角方 向的彎曲會隨著手部1從起點位置朝終點位置前進而逐漸 變大。在此期間*凸輪從動件4 2可在凸輪板41的上面41a 朝圓周方向轉動，且如上所述，該凸輪從動件42的高度位 置係随著凸輪板41之上面41a的高度位置逐漸上升升高 。隨著該凸輪從動件42之高度位置的上升，活動塊43 會 繞著水平軸44轉動，且會朝著使前端部lb上升之方向，換 言之，會朝著使手部1的仰角變大之方向作用於手部1 。 -8 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 564207 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（6) 而且，此種手部1之仰角的變大會與第2 臂3、第1臂2 及手部1之俯角方向的彎曲相互抵消，故手部1 在前進期 間可維持在水平狀態。此外，因臂部本身的彎曲等而在臂 部部前端所形成的上下位移量係可藉由機器人本身的上下 軸（Z軸）來進行修正，使臂部得K經常保持在固定的高 度。 又，保持有工件的手部1從終點位置反向後退至起點 位置之期間，則進行與上逑手部1前進時相反的動作，且 手部1係與前進時同樣地可維持在水平狀態。 第3圖至第5圖係將第2圖之彎曲修正機構4的概念 圖加K具體的顯示，第3圖係彎曲修正機構的側視圖，第 4圖係彎曲修正機構的正視圖，第5圖係彎曲修正機構的 俯視圖。 第3圖及第5圖中，1係手部、la係手部1的基部、 2係第1臂、2a係第1臂的前端部、2c係前端部2a的匣子 、2 d係匣子2 c的上面。 如第3圖及第4圖所示，在匣子2c的內部設有固定軸 2e，而在該固定軸2 e上可轉動自如地安裝有可動皮帶輪2f 。在可動皮帶輪2f上繞掛有同步皮帶或鋼帶2 g等，且該同 步皮帶或鋼帶2 g等亦繞掛於第1臂2之未圖示的基部側固定 皮帶輪。 如第3圖及第4圖所示，在第1臂2的前端部2 a之匣 子2c的上面2d上，固接有覆蓋體45。在覆蓋體45内部，，上 面2d上固設有凸輪板保持構件46，且如第4圖所示，該凸 -9- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) -.The bending correction mechanism 4 * configured in this way causes the second arm 3, the first arm 2 and the hand 1 to bend in the depression angle due to a moment load while the hand 1 holding the workpiece advances from the starting position to the end position. And the curvature in the depression angle direction gradually increases as the hand 1 advances from the starting position to the ending position. During this period, the cam follower 42 can turn in the circumferential direction on the upper surface 41a of the cam plate 41, and as described above, the height position of the cam follower 42 gradually follows the height position of the upper surface 41a of the cam plate 41 Rise up. As the height of the cam follower 42 rises, the movable block 43 will rotate around the horizontal axis 44 and will move in a direction that raises the front end portion lb, in other words, it will increase the elevation angle of the hand 1 The direction acts on the hand 1. -8-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 564207 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) Moreover, such hand 1 The change in elevation angle and the bending in the depression angle direction of the second arm 3, the first arm 2, and the hand 1 cancel each other, so the hand 1 can be maintained in a horizontal state during the forward movement. In addition, the amount of vertical displacement formed at the front end of the arm due to the bending of the arm itself can be corrected by the robot's vertical axis (Z axis), so that the arm's K is always maintained at a fixed height. In addition, while the hand 1 holding the workpiece reverses backward from the end position to the starting position, it performs the reverse operation when the upper hand 1 moves forward, and the hand 1 can be maintained in a horizontal state in the same way as when it is advanced. . 3 to 5 show the conceptual diagram of the bending correction mechanism 4 in FIG. 2 with K, and FIG. 3 is a side view of the bending correction mechanism. FIG. 4 is a front view of the bending correction mechanism. The figure is a plan view of the bending correction mechanism. In FIGS. 3 and 5, the 1-series hand, the 1-series base 1, the 2-series first arm, the 2a-series front end portion, the 2c-series front portion 2a box, and the 2 d-series box 2 The top of c. As shown in Figs. 3 and 4, a fixed shaft 2e is provided inside the box 2c, and a movable pulley 2f is rotatably mounted on the fixed shaft 2e. A timing belt, a steel belt 2 g, etc. are wound around the movable pulley 2f, and the synchronous belt or a steel belt 2 g is also wound around a not-shown base side fixed pulley on the first arm 2. As shown in Figs. 3 and 4, a cover 45 is fixed to the upper surface 2d of the box 2c of the front end portion 2a of the first arm 2. As shown in Figs. Inside the cover 45, a cam plate holding member 46 is fixed on the top 2d, and as shown in FIG. 4, the convex -9- This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) ) (Please read the notes on the back before filling this page)-.
I i_^i ί ϋ n I in ϋ I ϋ I ϋ n l n n n ϋ n ϋ n n ϋ— n I l n I n ϋ I 564207 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（7 ) 輪板保持構件4 6藉由凸輪板用調整螺絲47固定有凸輪板 41。該凸輪板用調整螺絲47係用以施行凸輪板41姿勢的微 調者。凸輪板4 1係形成圓環狀，且該凸輪板41的上面41a 之高度位置係Μ順沿圓周方向而變化之方式形成。亦即， 該凸輪板41之上面41a從手部1位於起點位置，而與後逑 之凸輪從動件42相接觸的位置開始，至手部1位於终點位 置，而與凸輪從動件42相接觸的位置為止，其高度位置會 連續的逐漸升高。 如第3圖所示，在覆蓋體4 5的內部，收容有固接於第 1臂2的可動皮帶輪2f之水平軸保持構件48。如第5圖所 示，該水平軸保持構件4 8具有可轉動自如地保持水平軸44 之軸承部49。如第3圖至第5圖所示，在水平軸44的兩端 部上固設有活動塊43。活動塊4 3可繞著水平軸4 4轉動。如 第4圖所示，在活動塊43上藉由凸輪從動件用調整螺栓50 固定有微調整塊52。在微調整塊5 2上固定有凸輪從動件42 ，該凸輪從動件42可在凸輪板41的上面41 a朝圓周方向轉 動。凸輪從動件用調整螺栓50—方面可調整微調塊52相對 於活動塊43的姿勢，一方面亦可微調凸輪從動件42的高度 位置。 手部1的基部la係固定在活動塊43上。 如上所述地構成的彎曲修正機構4中，保持有工件的 手部1從起點位置朝終點位置前進之期間，凸輪從動件42 係在凸輪板41的上面41a朝圓周方向轉動，且如上所述， 該凸輪從動件42的高度位置會隨著凸輪板41之上面41a的 -10- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)I i_ ^ i ί I n I in ϋ I ϋ I ϋ nlnnn ϋ n ϋ nn ϋ — n I ln I n ϋ I 564207 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (7) Wheel board The holding member 46 is fixed to the cam plate 41 by a cam plate adjusting screw 47. The cam plate adjusting screw 47 is used for fine adjustment of the posture of the cam plate 41. The cam plate 41 is formed in an annular shape, and the height position of the upper surface 41a of the cam plate 41 is formed so as to change in the circumferential direction. That is, the upper surface 41 a of the cam plate 41 starts from the position where the hand 1 is located at the starting position and contacts the cam follower 42 of the rear cymbal, until the hand 1 is located at the end position and contacts the cam follower 42. Up to the point of contact, the height position will gradually increase. As shown in Fig. 3, a horizontal shaft holding member 48 fixed to the movable pulley 2f of the first arm 2 is housed inside the cover 45. As shown in FIG. 5, the horizontal shaft holding member 48 has a bearing portion 49 that rotatably holds the horizontal shaft 44. As shown in FIGS. 3 to 5, movable blocks 43 are fixed to both ends of the horizontal shaft 44. The movable block 4 3 can rotate about the horizontal axis 4 4. As shown in FIG. 4, a fine adjustment block 52 is fixed to the movable block 43 by an adjustment bolt 50 with a cam follower. A cam follower 42 is fixed to the fine adjustment block 52, and the cam follower 42 can rotate on the upper surface 41a of the cam plate 41 in the circumferential direction. The cam follower adjusting bolt 50 can adjust the position of the fine adjustment block 52 relative to the movable block 43 on the one hand, and finely adjust the height position of the cam follower 42 on the other. The base la of the hand 1 is fixed to the movable block 43. In the bending correction mechanism 4 configured as described above, while the hand 1 holding the workpiece advances from the start position to the end position, the cam follower 42 is attached to the upper surface 41a of the cam plate 41 and rotates in the circumferential direction, as described above. As mentioned above, the height position of the cam follower 42 will follow the upper surface 41a of the cam plate 41-10- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the note on the back first (Fill in this page again)
564207 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（8 ) 高度位置逐漸上升而升高。隨著該凸輪從動件42之高度位 置的上升，活動塊43會繞著水平軸44轉動，且會朝著使前 端部lb上升之方向，換言之，會使手部1的仰角變大之方 向而作用於手部1。而且，此種手部1之仰角的變大會與 第2臂3、第1臂2及手部1之俯角方向的彎曲相互抵消 ，故手部1在前進期間可維持在水平狀態。 又，保持有工件的手部1從终點位置反向後退至起點 位置之期間，則可進行與上逑手部1前進時相反的動作， 且手部1係與前進時同樣地可維持在水平狀態。此外，隨 著手部1的前進，手部1的高度位置雖然會因彎曲而逐漸 下降，然而該高度位置可藉由Z軸方向（上下方向）的高 度位置得以調整機台來進行修正，因此可令手部1經常保 持在相同的高度位置，並維持在水平狀態。 如上所述，根據本實施型態之水平多顒節型的工件搬 送用機器人，因為保持有較重的工件之手部1在前進及後 退時，手部1可維持水平狀態，因此工件與作為搬送目的 地的匣子及裝置平台等的開槽及閘門開口等發生相互干擾 的情形會變少，而不需增加各開槽間的間距及閘門開口間 的高度，故可縮小機器人在Z軸方向（上下方向）的行程。 此外，因為彎曲修正機構4係僅由機械式構造所形成 ，與使用馬達轉動的彎曲修正機構相比較，機械構造的成 本較低，另一方面，由於不具備馬達，可抑制在真空中發 生外來氣體等情形，故真空中亦可充分應用。 … 第6圖係本發明其他應用例之直線動作型工件搬送機 -11- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) - · --線· 564207 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（9 ) 器人的主要部分之俯視圖，第7圖係概念式地表示該機器 人主要部分之側視圖，第8圖係概念式地表示該機器人主 要部分之背視圖。 第6圖至第8圖中，1係用K裝載大型玻璃基板等重 量較大的工件之手部，11係由機器人本體部突出，可朝Z 軸方向（上下方向）移動，且可朝Θ軸方向（水平面的圓 周方向）旋轉之機台。在機台11上，Μ水平狀態連接固定 有長四角板狀的固定底座12。在固定底座12的上面，藉著 與順沿長度方向之左右一對導軌13、13相扣合的線型導件 14、14，裝設有與固定底座12呈大致相同的水平狀滑動底 座15。在滑動底座15的上面，藉著與順沿長度方间之左右 一對導軌16、16相扣合的線型導件17、17，裝設有手部1 。（嚴格而言，手部1及線型導件17、17之間介裝有後逑之 彎曲修正機構6)。如眾所週知，滑動底座15及手部1， 可藉由未圖示之驅動機構（皮帶、或齒條及小齒輪），而 從第6圖及第7圖之實線所示的狀態Ss，經由第6圖及第 .7圖之一點鐽線所示的狀態Sia，位移至第6圖及第7圖之 兩點鏈線所示的狀態Se*且手部係在起點位置朝向終點位 置的直線軌道上前進。此外，如眾所週知，滑動底座15及 手部1亦可進行與上逑栢反方向的位移，即，手部1可在 與前進時相同的直線軌道上由終點位置朝向起點位置後退。 在手部1及滑動底座15的連结部位設有僅由機械式構 造形成的彎曲修正機構6，當裝有工件的手部1在前進及，後 .:·..，… 退期間，固定底座12、滑動底座15、及手部1因力矩負載 -12- (請先閱讀背面之注意事項再填寫本頁)564207 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (8) The height position gradually rises and rises. As the height of the cam follower 42 rises, the movable block 43 will rotate around the horizontal axis 44 and will move in a direction that raises the front end portion lb, in other words, will increase the elevation angle of the hand 1 Instead, it acts on the hand 1. Moreover, such a change in the elevation angle of the hand 1 and the bending in the depression angle direction of the second arm 3, the first arm 2, and the hand 1 cancel each other, so the hand 1 can be maintained in a horizontal state during the forward movement. In addition, during the period when the hand 1 holding the workpiece moves backward from the end position to the starting position, it can perform the reverse operation when the upper hand 1 moves forward, and the hand 1 can be maintained at the same time as the forward movement. Horizontal state. In addition, as the hand 1 advances, although the height position of the hand 1 gradually decreases due to bending, the height position can be corrected by adjusting the height position of the Z-axis direction (up and down direction), so it can be corrected Keep the hand 1 always at the same height position and keep it horizontal. As described above, according to the horizontal multi-section type workpiece transport robot according to this embodiment, the hand 1 can maintain the horizontal state when the hand 1 holding a heavy workpiece moves forward and backward, so the workpiece and the Slots and gate openings of boxes and device platforms at the destination of transportation will be less likely to interfere with each other. There is no need to increase the gap between the slots and the height of the gate openings, so the robot can be reduced in the Z axis direction. (Up and down direction) stroke. In addition, since the bending correction mechanism 4 is formed only by a mechanical structure, the cost of the mechanical structure is lower than that of a bending correction mechanism that is rotated by a motor. On the other hand, the absence of a motor can suppress the occurrence of foreign matter in a vacuum. Gas, etc., so it can be fully applied in vacuum. … Figure 6 is a linear action type workpiece conveyer for other application examples of the present invention-11- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling in this (Page)-·-Line · 564207 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (9) Top view of the main part of the robot, Figure 7 conceptually shows the side of the main part of the robot View, FIG. 8 is a rear view conceptually showing the main part of the robot. In Figures 6 to 8, the 1 series uses K to load large workpieces, such as large glass substrates, and the 11 series protrudes from the main body of the robot. It can move in the Z-axis direction (up and down direction) and can move toward Θ. The machine rotates in the axial direction (the circumferential direction of the horizontal plane). On the machine table 11, a long rectangular plate-shaped fixing base 12 is connected and fixed in the horizontal state. On the upper surface of the fixed base 12, a horizontal sliding base 15 which is substantially the same as the fixed base 12 is provided with linear guides 14 and 14 engaged with a pair of left and right guide rails 13 and 13 along the longitudinal direction. On the upper surface of the sliding base 15, a hand 1 is provided with linear guides 17, 17 which are engaged with a pair of left and right guide rails 16, 16 along the lengthwise direction. (Strictly speaking, the bending correction mechanism 6 for the rear heel is interposed between the hand 1 and the linear guides 17, 17). As is well known, the sliding base 15 and the hand 1 can be driven from the state Ss shown by the solid lines in FIG. 6 and FIG. 7 through a driving mechanism (belt, or rack and pinion) not shown. The state Sia shown by a dotted line in Figs. 6 and .7 is shifted to the state Se * shown by the two-point chain line in Figs. 6 and 7 and the hand is a straight line from the starting position to the ending position. Go on track. In addition, as is well known, the sliding base 15 and the hand 1 can also be displaced in the opposite direction from the upper cypress, that is, the hand 1 can move backward from the end position toward the start position on the same linear track as when advancing. A bending correction mechanism 6 formed only by a mechanical structure is provided at a connection portion of the hand 1 and the sliding base 15. When the hand 1 with a workpiece is moved forward and backward....... Base 12, sliding base 15, and hand 1 due to moment load -12- (Please read the precautions on the back before filling this page)
本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 564207 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（10) 而產生的俯角方向的彎曲可用該彎曲修正機構4予κ修正。 彎曲修正機構6具有固定於線型導件17、17之左右一 對手部底座61，且該線型導件17、17係與滑動底座15上之 左右一對導軌16、16相扣合。該左右一對之手部底座61係 藉著水平軸62相互連结，且在該水平軸62上設有可轉動自 如的活動塊63，而該活動塊6 3係可繞著水平軸62轉動。在 滑動底座15的上面固定有順沿長度方向之長形凸輪板64。 該凸輪板64之上面64a的高度位置係隨著向前方前進而逐 漸升高。在活動塊6 3上固定有可在凸輪板64的上面64a轉 動的凸輪從動件65，且手部1的基部la係固定在活動塊63 上。 如上所述地構成的彎曲修正機構6,在保持有工件的 手部1從起點位置朝终點位置前進期間，凸輪從動件6 5會 在凸輪板64的上面64a朝前方轉動*且如上所述，該凸輪 從動件65的高度位置係隨著凸輪板64之上面64a的高度位 置逐漸上升而升高。隨著該凸輪從動件65之高度位置的上 升，活動塊63會繞著水平軸62轉動，且會朝著使該前端部 lb上升之方向，換言之，朝著使手部1的仰角變大之方向 而作用於手部1。而且，此種手部1仰角的變大畲與固定 底座12、滑動底座15及手部1之俯角方向的彎曲相互抵消 ，使手部1在前進期間可維持在水平狀態。此外\因滑動 底座15本身的彎曲等而在滑動底座的前端所形成的上下位 移量係可藉由機器人本身的上下軸（Z軸）來進行修正， 使之得Μ經常保持在固定的高度。 -13- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 564207 A7 B7 五、發明說明（11 ) 又，在保持有工件的手部1從終點位置反向後退至起 點位置之期間，則可進行與上逑手部1前進時相反的動作 ，且手部1係與前進時同樣地可維持在水平狀態。此外， 隨著手部1的前進，手部1的高度位置雖然會因彎曲而逐 漸下降，然而該高度位置可藉由Z軸方向（上下方向）的 高度位置得K調整之機台11來進行修正*因此可令手部1 經常保持在相同的高度位置，並維持在水平狀態。 如上所述，根據本實施型態之直線動作型的工件搬送 用機器人，因為保持有較重工件之手部1在前進及後退時 ，手部1可維持水平狀態*因此工件與作為搬送目的地的 匣子及裝置平台等的開槽及閘門開口等發生相互干擾的倩 形會變少，而不需增加各開槽間的間距及閘門開口間的高 度，故可縮小機器人在Z軸方向（上下方向）的行程。 此外，因為彎曲修正機構6僅由機械式構造所形成， 與使用馬達轉動的彎曲修正機構相比較，機械構造的成本 較低，另一方面，由於不具備馬達，可抑制在真空中發生 外來氣體等情形，故真空中亦可充分應用。 【發明的效果】 根據本發明，可使Z軸方向的行程減少，同時降低成 本低，而且亦可在真空中使用。 【圖面之簡單說明】 第1圖係本發明水平多關節型的工件搬送用機器人應 用例之主要部分的俯視圖。 -14- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 564207 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (10) The bend in the depression angle direction can be corrected by this bend The mechanism 4 corrects κ. The bending correction mechanism 6 has a pair of hand bases 61 fixed to the left and right linear guides 17 and 17, and the linear guides 17 and 17 are aligned with a pair of left and right guide rails 16 and 16 on the sliding base 15. The left and right hand bases 61 are connected to each other by a horizontal axis 62, and a rotatable movable block 63 is provided on the horizontal axis 62, and the movable block 6 and 3 can be arranged horizontally. The shaft 62 rotates. On the upper surface of the sliding base 15, an elongated cam plate 64 along the length direction is fixed. The height position of the upper surface 64a of the cam plate 64 is gradually raised as it moves forward. On the movable block 63 A cam follower 65 that is rotatable on the upper surface 64a of the cam plate 64 is fixed, and the base la of the hand 1 is fixed to the movable block 63. The bending correction mechanism 6 configured as described above is held by the hand holding the workpiece. Part 1 from the starting position to the ending position During the advance, the cam follower 65 will rotate forward on the upper surface 64a of the cam plate 64 *, and as described above, the height position of the cam follower 65 is gradually increased as the height position of the upper surface 64a of the cam plate 64 rises. As the height position of the cam follower 65 rises, the movable block 63 will rotate about the horizontal axis 62, and will move in a direction to raise the front end portion lb, in other words, toward the hand 1 The direction in which the elevation angle becomes larger acts on the hand 1. In addition, such an increase in the elevation angle of the hand 1 and the bending in the depression angle direction of the fixed base 12, the sliding base 15, and the hand 1 cancel each other, so that the hand 1 is moving forward. It can be maintained in a horizontal state during the period. In addition, the amount of vertical displacement formed on the front end of the sliding base due to the bending of the sliding base 15 itself can be corrected by the robot's vertical axis (Z-axis) to make it M Always keep it at a fixed height. -13- (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Employees ’Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed 5642 07 A7 B7 V. Description of the invention (11) During the backward movement of the hand 1 holding the workpiece from the end position to the starting position, it is possible to perform the reverse motion when the upper hand 1 moves forward, and the hand The 1 series can be maintained in a horizontal state as in the forward direction. In addition, as the hand 1 advances, the height position of the hand 1 gradually decreases due to bending, but the height position can be adjusted in the Z-axis direction (up and down direction). The height position of K is adjusted by the machine 11 adjusted by K *. Therefore, the hand 1 can always be maintained at the same height position and maintained in a horizontal state. As described above, according to the linear motion type workpiece conveyance of this embodiment With a robot, because the hand 1 holding a heavy workpiece can move forward and backward, the hand 1 can maintain a horizontal state *. Therefore, the workpiece interferes with the slotting of the box, the device platform, etc., and the opening of the gate. The shape of the shape will be reduced, without increasing the gap between the slots and the height between the gate openings, so that the robot's stroke in the Z axis direction (up and down direction) can be reduced. In addition, since the bending correction mechanism 6 is formed only by a mechanical structure, the cost of the mechanical structure is lower than that of a bending correction mechanism that is rotated by a motor. On the other hand, the absence of a motor can suppress the generation of foreign gases in a vacuum. And other situations, so it can be fully applied in vacuum. [Effects of the Invention] According to the present invention, the stroke in the Z-axis direction can be reduced, at the same time, the cost can be reduced, and it can also be used in a vacuum. [Brief description of the drawing] Fig. 1 is a plan view of a main part of an application example of a horizontal multi-joint type workpiece transfer robot according to the present invention. -14- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)
· ϋι ^^1 ϋ -^ϋ n m · ·1 11 —al i_i βϋ· I ϋ I —ϋ ϋ n n n n I I mmmMmm ·ϋ n n an Hi ·ϋ I a— n I 11 ϋ I 564207 五、 經濟部智慧財產局員工消費合作社印製 A7 __ 發明說明（12 ) 第2圖係概念式地表示該 第3圖係彎曲修正機構的 第4圖係彎曲修正機構的 第5圖係彎曲修正機構的 第6圖係本發明直線動作 應用例的主要部分之俯視圖。 第7圖係概念式地表示該 第8圖係概念式地表示該 【符號說明】 1 ...手部 1 a · · ·基部 2.. .第1臂 3...第2臂 2a、3a、lb·.·前端部 2 c . . . E 子 2 e ...固定軸 2g...同步皮帶或鋼帶 11.. .機台 13、16...導軌 15 ...滑動底座 41a、64a···上面 43、63 . ·.活動塊 45 ...覆蓋體 47.. .調整螺絲 4 9 ...軸承部 52.…微調整塊 -15 機器人之主要部分的側視圖。 側視圖。 俯視圖。 俯視圖。 型的工件搬送機器人之其他 機器人主要部分之側視圖。 機器人主要部分之背視圖。 2b、3b. · ·基部 2 d ...上面 2f ...皮帶輪 4、6.…彎曲修正機構 12. ··固定底座 14、17...線型導件 41、 64...凸輪板 42、 65...凸輪從動件 4 4、6 2 ·..水平軸 4 6...凸輪板保持構^件 48.…水平軸保持構件 5IK ·.調整螺栓 6 1 . · ·手部底座 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）· Ϋι ^^ 1 ϋ-^ ϋ nm · · 1 11 —al i_i βϋ · I ϋ I —ϋ ϋ nnnn II mmmMmm · ϋ nn an Hi · ϋ I a— n I 11 ϋ I 564207 5. Intellectual Property of the Ministry of Economic Affairs A7 printed by the Bureau ’s Consumer Cooperatives __ Description of the invention (12) Figure 2 conceptually shows the 3rd figure of the bending correction mechanism. The 4th figure is the bending correction mechanism. The 5th figure is the 6th bending system. A plan view of a main part of a linear motion application example of the present invention. Figure 7 conceptually shows this Figure 8 conceptually shows the [Description of Symbols] 1 ... hand 1 a · · · base 2... 1st arm 3 ... 2nd arm 2a, 3a, lb ··· front end 2 c... E sub 2 e ... fixed shaft 2g ... timing belt or steel belt 11... Machine table 13, 16 ... guide rail 15 ... sliding base 41a, 64a ... Upper 43, 63 ... Moving block 45 ... Cover 47 ... Adjusting screw 4 9 ... Bearing 52 ... Fine adjustment block-15 Side view of the main part of the robot. Side view. Top view. Top view. Side view of the main part of the robot for other types of workpiece transfer robots. Back view of the main part of the robot. 2b, 3b. · · Base 2 d ... Upper 2f ... Pulleys 4, 6 ... Bending correction mechanism 12. · Fixed base 14, 17 ... Linear guide 41, 64 ... Cam plate 42 , 65 ... cam follower 4 4, 6 2 · .. horizontal shaft 4 6 ... cam plate holding member 48 .... horizontal shaft holding member 5IK ·. Adjustment bolt 6 1 · · · hand base (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)