CN1526534A - Laminatea compression moulding apparatus and method - Google Patents
Laminatea compression moulding apparatus and method Download PDFInfo
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- CN1526534A CN1526534A CNA200410007073XA CN200410007073A CN1526534A CN 1526534 A CN1526534 A CN 1526534A CN A200410007073X A CNA200410007073X A CN A200410007073XA CN 200410007073 A CN200410007073 A CN 200410007073A CN 1526534 A CN1526534 A CN 1526534A
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Abstract
This laminating press device includes a base conveying mechanism which is equipped with a pair of an upper and a lower film belt 7 and 8. The paired film belts 7 and 8 can run longitudinally while holding the base 8 with a film-like material retained thereon in between and carry the base 8 into and out of a pressing part due to their traveling under applied longitudinal tension. In addition, the device includes an upper and a lower pressurizing block 10 and 11 for pinching and pressurizing the base at the pressing part, and tension applying means 24 and 25 for applying a crosswise tension to the paired film belts 7 and 8 are installed at the upper and lower pressurizing blocks 10 and 11 respectively.
Description
Technical field
The present invention relates to a kind of be used for by to the heating of film shape material and substrate and pressurization, with film shape material lamination, be embedded in substrate, and/or make the lamination pressure setting and the vacuum lamination apparatus of the film shape material planarization on the substrate.
Background technology
On the used for printed circuit substrate, can produce concavo-convex and hole on the surface because of forming reasons such as conductive pattern.When the film shape material of the insulating materials of film shape and photosensitive material and so on is sticked on the surface that is such substrate, if with common laminating machine, then be easy to residual bubble in the recess of substrate surface and hole, the result often causes the generation of substandard products.
To this, such purposes has been adopted the vacuum lamination pressure setting that in a vacuum film shape material is sticked on substrate surface.
Before with the vacuum lamination pressure setting, film shape material is maintained on the substrate surface and is pressed lightly.This operation is to carry out with common laminating machine.
In the past, general widely used vacuum lamination pressure setting had by the vacuum chamber that case member constituted up and down that can be sealed and matched mutually at pressing part.A pair of pressurizing block about the configuration in vacuum chamber.Maintain the substrate of film shape material on the surface, to be maintained at the state between a pair of film conveyer belt up and down, with respect to transporting being transported between a pair of pressurizing block up and down of pressing part.A pressurizing block is fixed on the inboard of a case member, has heater.Another pressurizing block is fixed on the up-down drive device, has heater equally.
After substrate was inserted into up and down between a pair of pressurizing block, case member was sealed and matched mutually and constitutes vacuum chamber up and down.On one side the gas of internal vacuum chamber is being discharged, substrate is to remain on the state on the film conveyer belt, by the heating of the heater on the pressurizing block about being located at simultaneously.Because of the heat of heater, with the film shape material softening on the substrate.
Substrate is after being heated to the temperature of regulation, and quilt pressurizing block is up and down pushed.
Maintain the substrate of film shape material on the surface, be sandwiched in up and down between the pressurizing block and pressurized, softening film shape material almost sticks on the male and fomale(M﹠F) of substrate in intimate contact.
Pressurizing block adds pressure surface and can make with the flat board of elastomer or rigid body up and down.
In this vacuum lamination pressure setting in the past, the following problem that must solve is arranged.
In the past, tightened owing to be used to transport a pair of film conveyer belt up and down of substrate, thereby be subjected to along the tension force of film conveyer belt length direction.Specifically,, batch the film conveyer belt with another roller on the roller that the film conveyer belt is rolled out, to have applied the state of rotational resistance, just to the length direction of film conveyer belt, be that the substrate carriage direction applies tension force.
Yet only the length direction to the film conveyer belt applies tension force, is easy to take place on the film conveyer belt ' vertically fold '.In addition, the film conveyer belt is easy to produce local ' relaxing ' because of heating is affected when being heated by heater together with substrate.
Produce under the state of ' vertically fold ' and ' relaxing ' like this at the film conveyer belt, if by pressurizing block up and down under heated state to the substrate pressurization, then the surface of the film shape material on substrate just forms and results from ' wrinkling ' concavo-convex of film conveyer belt.This just to the tight contact of the film shape material on the substrate, imbed fully and having an even surface generation hinders.This is first problem that the present invention will solve.
In vacuum lamination apparatus in the past, also also has the problem of the required solution of the following stated from other viewpoint.
In the past, the general vacuum lamination apparatus that generally uses roughly was divided into two classes.One class is the vacuum lamination apparatus of the dividing plate (diaphragm) formed as pressing mechanism, by elastomer, and another kind of is to be to add the vacuum lamination apparatus that pressure surface is the increased pressure board of level and smooth rigid body as pressing mechanism, use.
Use the vacuum lamination apparatus of dividing plate, have the vacuum chamber of forming by the case member up and down that can be sealed and matched mutually.
The film shape material that is temporarily fixed is remained in the substrate on surface,, under the state that is maintained between this conveyer belt, be transported, be inserted into up and down between a pair of pressurizing block by a pair of film conveyer belt up and down.The pressure surface that adds of a pressurizing block is made up of elastomer, is fixed on the inboard of a case member and has heater.
Another pressurizing block is to be installed in and to add on the pressure surface by having dividing plate that flexual elastomer forms, to be fixed in the inboard of another case member, to have heater equally.
After inserting substrate between a pair of pressurizing block, case member is sealed and matched mutually and constitutes vacuum chamber up and down.
, substrate is remained on the state of film conveyer belt, heat simultaneously the internal vacuum chamber decompression of bleeding on one side by the heater on the pressurizing block about being located at.By the heat of heater, the film shape material on the softening substrate.
After substrate is heated to set point of temperature, makes the above-mentioned dividing plate of forming by elastomer, stretch to orientation substrate by gas pressure.Maintain the substrate of film shape material on the surface, in adding between the pressure surface by the outer surface that is installed in a dividing plate that form, that trail of the elastomer on the heat block and another pressurizing block of forming by elastomer equally, clamp and pressurized by a pair of film conveyer belt, the thin-film material that has softened closely sticks on the male and fomale(M﹠F) on the substrate.
On the other hand, use to add the vacuum lamination apparatus that pressure surface is the increased pressure board of level and smooth rigid body, have the vacuum chamber of forming by the case member up and down that can be sealed and matched mutually at pressing part.
In vacuum chamber, dispose a pair of pressurizing block up and down.The substrate that maintains film shape material on the surface passes through a pair of film conveyer belt up and down, is transported being transported into and transporting between a pair of pressurizing block up and down with respect to pressing part with the state that remains on therebetween.A pressurizing block is fixed on the inboard of a case member and has heater.Another pressurizing block is fixed on has heater too on the up-down drive device.
The pressurization of pressurizing block is that the even surface of the flat board by rigid body forms up and down.
After substrate being inserted up and down between a pair of pressurizing block, case member is sealed and matched mutually and constitutes vacuum chamber up and down.
After decompression that internal vacuum chamber is bled, up and down pressurizing block is approaching mutually by being made by up-down drive device, under therebetween substrate remains on state on the film conveyer belt, by the heater heating that is located on the pressurizing block up and down.By the heat of heater, the film shape material on the softening substrate.
After the substrate that maintains film shape material on the surface is heated to set point of temperature, pressurizing block is further approaching up and down to be made by up-down drive device, be sandwiched in up and down between the pressurizing block and pressurized by a pair of film conveyer belt, its result, the film shape material that has softened is closely sticked on the male and fomale(M﹠F) of substrate.
Critical function as this vacuum lamination apparatus is, can realize following 2 points with high production efficiency,, in the recess that gets deeply stuck in and hole of substrate surface, imbeds film shape material and residual bubble not that is; Consider influence, make having an even surface of film shape material after imbedding subsequent handling.
Yet, used the vacuum lamination apparatus in the past of dividing plate, owing to can not regulate the opportunity of bleed decompression and substrate and film shape material heating in the vacuum chamber on the structure, therefore film shape material is just softening under the situation that does not also have abundant exhaust, thereby has the high shortcoming of possibility of residual bubble.
In addition, because all add pressure surface and all are made of elastomer, so on the surface of the film shape material after imbedding substrate, can produce concavo-convex cause uneven because of substrate surface, because the other operation that has an even surface that makes need be set, so increased the cost of device, the device maximization that also becomes is difficult to the problem that realizes with high productivity ratio thereby have.
And, because be to make the dividing plate of forming by elastomer stretch pressing mode, so, because of elastomeric intensity can not apply enough plus-pressures, also have and be difficult to film shape material is imbedded the recess that gets deeply stuck in and the shortcoming in the hole, this point also also has room for improvement.
On the other hand, the vacuum lamination apparatus that adopts level and smooth increased pressure board also there is the shortcoming that needs improvement.That is, the structure of pressurizeing with the level and smooth face of the flat board of rigid body is because pressure can not be applied to the recess of substrate, so be difficult to film shape material is imbedded recess and non-entrapped air pockets.
To this, another problem to be solved by this invention (the 2nd problem) provide a kind of film shape material is imbedded in the recess that gets deeply stuck in and the hole equably and not entrapped air pockets and can make film shape material after imbedding have an even surface, small-sized and cheap have large-duty vacuum lamination apparatus.
Summary of the invention
In order to solve above-mentioned the 1st problem, according to the present invention, provide a kind of laminater, be to be used at lamination on the substrate, to imbed film shape material or the film shape material on the substrate is carried out the laminater of planarization; Have:
Pressing part;
The substrate conveyer, have a pair of film conveyer belt up and down that is formed that substrate a pair of film conveyer belt, that will maintain film shape material on the surface up and down remains on therebetween and can moves along length direction, be used for being subjected to moving and making described substrate be transported into and transport with respect to described pressing part along the tension force limit of length direction by making this a pair of film transmit band edge;
Upside and downside pressurizing block, it is in order to clamp the substrate that is transported into by described substrate conveyer and pressurization and to be arranged on described pressing part;
Tension-applying mechanism, it is used for applying to described a pair of film conveyer belt at described pressing part at least the tension force of transverse direction.
Described tension-applying mechanism can comprise by apply the hold assembly of the tension force of transverse direction from the edges at two ends portion of the described a pair of film conveyer belt of above-below direction clamping, to this film conveyer belt.
Described hold assembly, be the rubber-like parts that are installed in the edges at two ends portion of described upside and downside pressurizing block respectively, and can be out of shape, along with described upside and downside pressurizing block mutually near and the described film conveyer belt of clamping, then by described upside and downside pressurizing block further near and described film conveyer belt is applied power to transverse direction foreign side.
Be installed in the hold assembly on the described upside pressurizing block, have downwards and the part of extending to foreign side from the edges at two ends portion of described upside pressurizing block, be installed in the hold assembly on the described downside pressurizing block, have upward and the part of extending to foreign side from the edges at two ends portion of described downside pressurizing block.
Described hold assembly can be made by elastomeric material.
In addition,, also provide a kind of laminater according to the present invention,
Constitute vacuum chamber by upside and downside case member, and vacuum chamber is configured in described pressing part, this vacuum chamber, can obtain decompression state by making this upside and downside case member be sealed and matched mutually and discharge gas inside, and the peristome that can use by the gateway that this upside and downside case member is separated from each other form substrate
Described upside and downside pressurizing block are configured in the described vacuum chamber.
In addition,,, provide a kind of vacuum lamination apparatus, be to be used on substrate lamination, to imbed film shape material, and the film shape material on the substrate carried out the vacuum lamination apparatus of planarization according to the present invention in order to solve the 2nd problem; Have:
Vacuum chamber, it has the upside and the downside case member that can be sealed and matched mutually and separate;
Driving mechanism, it is used to make described upside and downside case member to be sealed and matched mutually and separates;
The mechanism of decompressor, it is used for being reduced pressure in the 1st space that surrounded by described upside and downside case member, in the described vacuum chamber;
The substrate conveyer, the a pair of film conveyer belt up and down that it has that the substrate that is formed flexual up and down a pair of film conveyer belt, will maintains film shape material on the surface remains on therebetween and can move along length direction is used for by making this a pair of film conveyer belt move, make described substrate to be transported into and to transport with respect to described vacuum chamber through being formed at the described upside and the peristome between the downside case member that are in released state;
Upside and downside pressure-producing part, it is formed the upside that is located in the described vacuum chamber and downside pressure-producing part and brings the pressure surface that adds of described substrate of clamping and pressurization to be formed by level and smooth rigid body by being used for transmitting by described a pair of film;
Driving mechanism, be used to make among this upside and the downside pressure-producing part at least one near and leave another;
Heating arrangements is used for described substrate and the heating of described film shape material;
Enclose mechanism, its be formed be located at the inclosure mechanism in the described vacuum chamber and be used for by around described substrate, make described a pair of film conveyer belt mutually closely contact form the enclosure space that described substrate is enclosed between the described a pair of film conveyer belt;
Pressure differential produces mechanism, and it is used for making in described vacuum chamber the pressure of described enclosure space outside to be higher than pressure inside.
The described driving mechanism that is used to that described upside and downside case member are sealed and matched mutually and separates and being used to make among described upside and the downside pressure-producing part at least one near and described driving mechanism of leaving another, be to distinguish different mechanism independent and action.
Described inclosure mechanism comprises being used for clamping described a pair of film conveyer belt and making it mutually the closely a pair of clamping device of contact from above-below direction.
When above-below direction was clamped described a pair of film conveyer belt, at least one of this a pair of clamping device applied outside tension force to the described film conveyer belt integral body in the described enclosure space at described a pair of clamping device.
Also of described a pair of clamping device can be made of the rubber-like parts, with another of described a pair of clamping device, by constituting with face with described flexible parts subtend.
Perhaps, with the both sides of described a pair of clamping device, all constitute by the rubber-like parts.
Have described flexible parts, be configured to surround described substrate around ring-type, and, have towards described a pair of film conveyer belt and expand outwardly and the part of extending.
Also among the described a pair of clamping device at least one can be located on described upside or the downside pressure-producing part.
Also can with among the described a pair of clamping device described at least one and be provided with the described upside of this at least one clamping device or downside pressure-producing part described add pressure surface and by with this pressurization in the face of to the 2nd space that outer surface surrounded of described film conveyer belt and the path that described the 1st space in the described vacuum chamber is communicated with, be arranged on the described upside or downside pressure-producing part that is provided with described at least one clamping device.
In addition,, provide a kind of vacuum lamination method, be to be used on substrate lamination, to imbed film shape material, and the film shape material on the substrate carried out the vacuum lamination method of planarization according to the present invention; Have:
Make film shape material overlap on the substrate and be temporarily fixed at process on this substrate;
With the temporary fixed described substrate that described film shape material arranged remain on flexual up and down between a pair of film conveyer belt, move and described substrate be transported to the process of transporting of assigned position along length direction by making this a pair of film conveyer belt;
Be reduced to the process of authorized pressure at described assigned position, with the ambient pressure of described substrate;
Described film shape material and described substrate are heated to together the process of set point of temperature;
In the environment that is depressurized, by make around the described substrate described up and down a pair of film conveyer belt mutually closely contact form described substrate and enclosed into this process of the enclosure space between a pair of film conveyer belt up and down;
Be higher than internal pressure by the pressure that makes this enclosure space outside, the process of utilizing described up and down a pair of film conveyer belt that the temporary fixed described substrate that described film shape material arranged is pressurizeed;
The surface by being formed in described substrate and the back side respectively the subtend setting a pair of pressure-producing part and be a pair of pressure-producing part that level and smooth rigid body is formed by respectively adding pressure surface, be situated between by the process of described substrate of described a pair of film conveyer belt clamping and pressurization.
Also can further have:, once more the pressure of described enclosure space outside is reduced to the process of authorized pressure in the described process of described substrate being pressurizeed with by being between described a pair of pressure-producing part that level and smooth rigid body the is formed described process of coming described substrate is pressurizeed by the described pressure surface that adds by described flexual up and down a pair of film conveyer belt.
Description of drawings
Fig. 1 is the side view of the 1st embodiment of laminater of the present invention, and what got is local length direction section.
Fig. 2 is the profile of the effect of the hold assembly of tension-applying mechanism among the 1st embodiment of stage ground signal laminater of the present invention, is from the being seen figure of the length direction of film conveyer belt.
Fig. 3 is the side view of the 2nd embodiment of laminater of the present invention, and what got is local section.
Fig. 4 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, and what got is part section.
Fig. 5 is the profile from the arrow portion of Fig. 4 along the direction of arrow.
Fig. 6 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, is the figure of the initial process of the stage signal process of film shape material being imbedded substrate, and what got is part section.
Fig. 7 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, is the figure in the 2nd stage of the stage signal process of film shape material being imbedded substrate, and what got is part section.
Fig. 8 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, is the figure in the 3rd stage of the stage signal process of film shape material being imbedded substrate, and what got is part section.
Fig. 9 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, is the figure in the 3rd stage of the stage signal process of film shape material being imbedded substrate, and what got is part section.
Figure 10 is the detailed side view of vacuum layer splenium among the 2nd embodiment of laminater of the present invention, is the figure in the 4th stage of the stage signal process of film shape material being imbedded substrate, and what got is part section.
Figure 11 is the detailed side view of vacuum layer splenium among other the embodiment of laminater of the present invention, and what got is part section.
Figure 12 is the detailed side view of vacuum layer splenium among another embodiment of laminater of the present invention, and what got is part section.
Figure 13 is the profile along vacuum layer splenium in the additional embodiments of the being seen laminater of the present invention of direction shown in the arrow portion of Fig. 4.
Among the figure: 1-vacuum chamber, 2-upper housing parts, 3-downside case member, 4-back-up block, 5-downside support component, 6-pillar, 7,12-drive unit, 8-substrate, 9-peristome, 10-upside pressurizing block, 11-downside pressurizing block, 13-bar, 14-sealing mechanism, 15-film conveyer belt rolls out portion, 16-film conveyer belt reeling end, 17-upside film conveyer belt, 18-downside film conveyer belt, 19,20-roller path, 21-roller, 22-upside pressurizing block edges at two ends portion, 23-downside pressurizing block edges at two ends portion, the peripheral portion of 23a-downside pressurizing block, 24-upside hold assembly, 24a-upside hold assembly is part on one side, 24b-upside hold assembly another side part, 25-downside hold assembly, 25a-downside hold assembly is part on one side, 25b-downside hold assembly another side part, 25 '-hold assembly, 26,27-hole, 28,29-the 2 space, 30-enclosure space, P-pressing part, S-the 1st space, V-vacuum layer splenium.
The specific embodiment
Followingly the embodiments of the invention that are used to solve above-mentioned the 1st problem are described with reference to Fig. 1 and Fig. 2.
Fig. 1 is the side view of the vacuum lamination pressure setting of the present invention the 1st embodiment, and shown is the section of length direction part.
Pressing part P at vacuum pressurizing device is provided with vacuum chamber 1.Vacuum chamber 1 is made up of upper housing parts 2 and downside case member 3.Upper housing parts 2 are installed on the back-up block 4.In addition, be provided with downside support component 5 as base at the P of vacuum pressing portion, back-up block 4 and downside support component 5 interconnect by the upper end being fixed on the pillar 6 that is fixed on the downside support component 5 on the back-up block 4, with the lower end.
Below the downside case member 3 of another parts that form vacuum chamber 1, drive unit 7 as air cylinder device is installed with axle.Drive unit 7 is formed for the driving mechanism that makes upper housing parts 2 and downside case member 3 be sealed and matched mutually and separate.
In case downside case member 3 is risen by the driving of above-mentioned drive unit 7, the surrounding edge portion of upper housing parts 2 and downside case member 3 cooperates with regard to mutual sealing, and vacuum chamber 1 inside just is in sealing state.Under this state,, just can make in the vacuum chamber 1 to be in decompression state in case discharge inner air from the exhaust outlet (not shown) that is located on the vacuum chamber 1.On the other hand, in case with above-mentioned drive unit 7 downside case member 3 is descended, case member 2,3 is separated from each other up and down, the peristome of using with regard to the gateway that forms substrate 89.
In vacuum chamber 1, dispose and be used for upside pressurizing block 10 and the downside pressurizing block 11 that the clamping substrate heats and pressurizes.Upside pressurizing block 10 has heating plate (not shown), is installed on the upper housing parts 2.In the side of upside pressurizing block 10, promptly, add the pressure surface side, be equipped with and become the increased pressure board (not shown) of level and smooth rigid body as the Surface Machining that adds pressure surface at substrate 8.
On downside support component 5, be provided with the drive unit 12 of hydraulic cylinder device and so on, downside pressurizing block 11 is arranged on the upper end of the bar 13 of the drive unit 12 that runs through downside case member 3 and extend out.Owing between downside case member 3 and bar 13, be provided with sealing mechanism 14,, become the structure of the mechanical seal that can keep vacuum chamber 1 under the state of sealing downside case member 3 so bar 13 just runs through and extends.By making drive unit 12 action, can make upside pressurizing block 10 and downside pressurizing block 11 relatively near and leave.
Front and back at the pressing part P of vacuum lamination apparatus dispose the film conveyer belt and roll out portion 15 and film conveyer belt reeling end 16.The film conveyer belt rolls out portion 15 and film conveyer belt reeling end 16 is used for keeping betwixt rolling out and batching of substrate 8 and a pair of film conveyer belt 17 up and down that transports and 18.Film conveyer belt 17 and 18 is configured to run through upside and downside case member 2 and 3 and is in and is separated from each other and the vacuum chamber 1 of opening-wide state and extending.The substrate 8 that maintains film shape material on the surface by roller path 19 from an operation transport the film conveyer belt to and roll out portion 15, be placed between film conveyer belt 17 and 18.Rolling out portion 15 at the film conveyer belt has been applied under the state of rotational resistance, by batching action at film conveyer belt reeling end 16, the limit is given and the film conveyer belt 17 and 18 that moves along the suitable tension force limit of length direction, just the substrate 8 that remains between this film conveyer belt can be moved in the vacuum chamber 1 from peristome 9.Equally, substrate 8 can be transported from vacuum chamber 1.The substrate 8 that is transported is sent to next operation through roller path 20.Roll out between portion 15 and the film conveyer belt reeling end 16 at the film conveyer belt, be provided with a plurality of rollers 21 in position as film conveyer belt guiding.Like this, film conveyer belt 17,18, film conveyer belt roll out portion 15, roller 21 and film conveyer belt reeling end 16, the substrate conveyer that the substrate 8 that just is formed for maintaining film shape material from the teeth outwards is transported into and transports with respect to pressing part P.
Below, structure and the action that is installed in the tension-applying mechanism on the pressurizing block 10 and 11 up and down among the 1st embodiment of the present invention is described based on Fig. 2.From Fig. 2 of the length direction finding figure of film conveyer belt, shown is respectively in conduct: the state that pressurizing block is left mutually about (a) being; (b) be pressurizing block approaching state mutually up and down; (c) for pressurizing block up and down further near and clamp the state that substrate pressurizes.Under the state of Fig. 2 (a), remain on the substrate 8 between the film conveyer belt 17,18, between the pressurizing block up and down 10,11 of pressing part P.Inboard in the edges at two ends portion separately 22,23 of up and down pressurizing block 10,11 is equipped with by the hold assembly of making as the elastomeric material of rubber and so on 24,25.Preferably make hold assembly 24,25 on the roughly total length of the edges at two ends portion 22,23 of pressurizing block 10,11, in crossing over the length range of substrate 8, extend at least.Hold assembly 24,25 has on transverse direction the cross sectional shape to the V of external-open font.One side part 24a, the 25a of hold assembly 24,25 are on pressurizing block 10,11 about being installed in level, so another side part 24b, 25b extend with respect to horizontal tilt.Specifically, be installed in the another side part 24b of the hold assembly 24 on the upside pressurizing block 10, reach foreign side downwards from the edges at two ends portion of upside pressurizing block 10 and extend, the another side part 24b that is installed in the hold assembly 25 on the downside pressurizing block 11 reaches foreign side upward from the edges at two ends portion of downside pressurizing block 10 and extends.
Have the illustrated V shaped sections shape of traversing its total length continuously though hold assembly 24,25 can be made, wish at another side part 24b, 25b interrupted (otch) notch to be set at least.
In Fig. 2 (b), when pressurizing block 10,11 up and down mutually near the time, the leading edge of another side part 24b, the 25b of hold assembly 24,25 just clamps film conveyer belt 17,18 from above-below direction.
And shown in Fig. 2 (c), from clamping substrate 8 during the pressurization, another side part 24b, the 25b of the hold assembly made from elastomeric material 24,25 is towards separately one side part 24a, 25a distortion in pressurizing block 10,11 up and down.At this moment, another side part 24b, 25b to be clamping the state of film conveyer belt 17,18, gives tension force with transverse direction to this film conveyer belt.
As the elastomeric material that constitutes hold assembly 24,25, also can use rubber material in addition.
Make hold assembly 24,25 have elasticity, except can constituting all with elastomeric material as mentioned above, also can be with spring hinge part 24a, 25a and another side part 24b, 25b link together on one side.In this case, on one side part 24a, 25a yes elastomeric material, another side part 24b, 25b are unnecessary to be constituted with elastomeric material.
In above-mentioned the 1st embodiment, constitute the tension-applying mechanism that film conveyer belt 17,18 is applied transverse direction tension force with the hold assembly 24,25 that is installed on the pressurizing block 10,11 up and down, the driving force of pressurizing block is used to apply tension force, but is not limited thereto.Can be provided with and the irrelevant tension-applying mechanism of pressurizing block, also can utilize other drive source that is used to apply tension force.
In addition, or not can not apply the tension force of transverse direction to the film conveyer belt in wideer scope only in the scope of pressing part yet.
According to the 1st embodiment of the present invention that illustrates here, because the transverse direction to the film conveyer belt also applies tension force, so can suppress the generation of ' vertically fold ' and ' relaxing ' in the film conveyer belt, therefore, can prevent the concavo-convex formation of the film shape material surface on the substrate that they cause, make film shape material have enough good tight contact and imbedibility, can make the planarization accurately of film shape material simultaneously for substrate.
Secondly, with reference to Fig. 3 to Figure 14, the embodiments of the invention that are used to solve above-mentioned the 2nd problem are illustrated.
Fig. 3 is the side view of the vacuum lamination apparatus of the present invention the 2nd embodiment, and shown is local length direction section.
Vacuum lamination apparatus has vacuum layer splenium V, and V is provided with vacuum chamber 1 at the vacuum layer splenium.Vacuum chamber 1 is made up of upper housing parts 2 and downside case member 3.Be connected the exhaust outlet (not shown) on the exhaust apparatus (not shown) that is used to make inside be in decompression state and be connected air supply opening on the feeder (not shown) that is used to discharge decompression state being provided with on the vacuum chamber 1.Exhaust outlet and exhaust apparatus constitute the mechanism of decompressor together.Upper housing parts 2 are installed on the back-up block 4.In addition, be provided with the downside support component 5 as base on vacuum layer splenium V, back-up block 4 and downside support component 5 interconnect by the upper end being fixed on the pillar 6 that is fixed on the downside support component 5 on the back-up block 4, with the lower end.
Below the downside case member 3 of the opposing party's parts that form vacuum chamber 1, drive unit 7 as air cylinder device and so on is installed with axle.Drive unit 7 is formed for the driving mechanism that makes upper housing parts 2 and downside case member 3 be sealed and matched mutually and separate.
In case downside case member 3 is driven by above-mentioned drive unit 7 and rises, the circumference of upper housing parts 2 and downside case member 3 just is sealed and matched, and vacuum chamber 1 inside just is in sealing state.Under this state,, just can make by case member 2,3 vacuum chambers that surrounded 1 interior space (the 1st space) S (with reference to Fig. 7) up and down to be in decompression state when the exhaust outlet on being located at vacuum chamber 1, when discharging inner air by exhaust apparatus.On the other hand, when downside case member 3 was descended, case member 2,3 was separated from each other up and down, the peristome 9 that the gateway of formation substrate 8 is used.
In vacuum chamber 1, dispose upside pressurizing block 10 and downside pressurizing block 11.These are pressurizing block the 10, the 11st up and down, is used for bringing the pressure-producing part that clamps substrate and pressurization by a pair of film transmission described later.
Be provided with the drive unit 12 as hydraulic cylinder device and so on downside support component 5, downside pressurizing block 11 is installed in the upper end of the bar 13 of the drive unit 12 that runs through downside case member 3 and extend.Owing between downside case member 3 and bar 13, be provided with sealing mechanism 14,, become the structure of the sealing that can keep vacuum chamber 1 so bar 13 runs through downside case member 3 and extends under sealing state.By making drive unit 12 action, upside pressurizing block 10 and downside pressurizing block 11 can be relatively near and leave.
Drive unit 7 can be made the different mechanism of action independently of each other with drive unit 12.
On the vacuum layer splenium V of vacuum lamination apparatus, dispose the film conveyer belt and roll out portion 15 and film conveyer belt reeling end 16.The film conveyer belt rolls out portion 15 and film conveyer belt reeling end 16 is used for keeping betwixt rolling out and batching of substrate 8 and a pair of film conveyer belt 17 up and down that transports and 18.Film conveyer belt 17 and 18 is configured to be separated from each other and the state opened runs through vacuum chamber 1 and extend at upside and downside case member 2 and 3.The temporary fixed substrate 8 that film shape material is arranged on the surface is transported to the film conveyer belt by roller path 19 from a last operation and rolls out portion 15, and is placed between film conveyer belt 17 and 18.Rolling out portion 15 at the film conveyer belt is applied under the state of rotational resistance, by batching action at film conveyer belt reeling end 16, can apply the film conveyer belt 17 and 18 that suitable tension force edge length direction moves in the limit, will remain on substrate 8 between this film conveyer belt, transport in the vacuum chamber 1 by peristome 9.Equally, substrate 8 can be transported from vacuum chamber 1.Transported the substrate 8 that comes and be transported to next operation by roller path 20.Roll out between portion 15 and the film conveyer belt reeling end 16 at the film conveyer belt, be provided with a plurality of rollers 21 in place for film conveyer belt guiding.Like this, film conveyer belt 17,18, film roll out portion 15, roller 21 and film reeling end 16 and have just formed the substrate 8 that is used for maintaining film shape material on the surface and be transported into the substrate that transports with respect to vacuum layer splenium V and transport structure.
Below, with Fig. 4 and Fig. 5 the apparatus structure of the present invention the 2nd embodiment is described.
Fig. 4 is the side view of vacuum layer splenium among the present invention the 2nd embodiment, and what got is local section.
In addition, shown in Figure 5 is profile along the arrow portion of Fig. 4.
As shown in Figure 5, in the inboard of the peripheral portion 23a of downside pressurizing block 11, the downside hold assembly of making by the elastomeric material of for example rubber-like 25 surround substrate 8 around, around installing in full week of the peripheral portion 23a of downside pressurizing block 11 with ring-type.Equally, in the inboard of the peripheral portion 22a of upside pressurizing block 10, the downside hold assembly of making by the elastomeric material of for example rubber-like 24 surround main substrate 8 around, full week (with reference to Fig. 4) is installed around the peripheral portion 22a of upside pressurizing block 10 with ring-type.In the present embodiment, hold assembly up and down 24,25 about being located at respectively in vacuum chamber 1 on the pressurizing block 10,11 is configured for by a pair of film conveyer belt 17,18 is closely contacted mutually the inclosure mechanism of the enclosure space 30 (with reference to Fig. 8) of formation inclosure substrate 8 between a pair of film conveyer belt 17,18.
In addition, pressurizing block 10,11 up and down respectively by the scope that hold assembly 24,25 surrounds up and down in, be provided with and run through at least one hole 26,27 of pressurizing block 10,11 up and down respectively.Hole 26,27 constitute can with by hold assembly 24,25, pressurizing block 10,11, respectively with the pressurization of pressurizing block 10,11 in the face of to the space that outer surface surrounded (the 2nd space) 28,29 (with reference to Fig. 8) of film conveyer belt 17,18 and the path that the 1st space S in the vacuum chamber 1 is communicated with.
Secondly, the action of the 2nd embodiment of the present invention is described based on Fig. 6 to Figure 10.Fig. 6 to Figure 10 is the side view of vacuum layer splenium among the 2nd embodiment of the present invention, and what got is local section.
At first, case member 2,3 separates up and down, by substrate gateway peristome 9, to maintain the substrate 8 of film shape material on the surface, by a pair of film conveyer belt 17,18, to remain on state therebetween, be transported into the assigned position (Fig. 6) between the pressurizing block up and down 10,11 in vacuum chamber 1.
Secondly, downside case member 3 rises by the driving of drive unit (being equivalent to the drive unit 7 among Fig. 3), be sealed and matched between the surrounding edge portion of upper housing parts 2 and downside case member 3, after making vacuum chamber 1 inside be in sealing state, the pressure (Fig. 7) that the 1st space S in the vacuum chamber 1 reduces pressure to and stipulates by exhaust gear (not shown) exhaust.
Then, make downside pressurizing block 11 rise to the position of regulation by drive unit (being equivalent to the drive unit 12 among Fig. 3).
Owing to upside hold assembly 24 and downside hold assembly 25 are installed around the 22a of external margin portion of upside pressurizing block 10 and downside pressurizing block 11, the full girth of 23a respectively, under this state, form the space 28 that upside pressurizing block 10, upside hold assembly 24 and upside film conveyer belt 17 are surrounded respectively, and the space 29 that surrounded of downside pressurizing block 11, downside hold assembly 25 and downside film conveyer belt 18 and the enclosure space 30 between the film conveyer belt 17,18 up and down.
Like this, by hole 26,27 with the 2nd space 28,29 that the 1st space S in the vacuum chamber 1 is communicated with in pressure, rise to authorized pressure equally with pressure in the 1st space S, become with the interior pressure of enclosure space 30 and compare relative higher pressure.Therefore, hole 26,27 and feeder and air supply opening are formed in and are used to make the higher pressure differential of pressure ratio pressure inside of enclosure space 30 outsides to produce mechanism in the vacuum chamber 1.
By in the 2nd space 28,29 and the pressure differential in the enclosure space 30, the substrate 8 that maintains film shape material is just by film conveyer belt 17,18 is pressurized up and down.
At this moment, pressurize owing to pressing by the air that uses pliability film conveyer belt 17,18, not as by the pressurization of the flat board of rigid body, making the pressure propagation direction, so can make film shape material can not form bubble (Fig. 9) along concavo-convex the imbedding of substrate only to a direction but to all directions.
And, make with drive unit that up and down pressurizing block 10,11 is approaching, the add pressure surface level and smooth by the increased pressure board of the rigid body on the pressurizing block 10,11 about being installed in clamps substrate 8 and pressurization, the planarization operation can be set in addition also can make film shape material surface planarization (Figure 10).
In addition, clamp substrate 8 during the pressurization in pressurizing block 10,11 up and down, the upside hold assembly of being made by elastomeric material 24 and another side part 24b, the 25b of downside hold assembly 25 are out of shape towards one side part 24a, 25a respectively.
For this reason, another side part 24b, 25b are to clamp the state of film conveyer belt 17,18, can all give and outside tension force the film conveyer belt in enclosure space 30, like this, just can be suppressed on the film conveyer belt ' vertically fold ' and ' relaxing ' are taken place.
Its result when pressurizeing with pressurizing block, can make the having an even surface of film shape material more reliably.
In addition, as the state of Fig. 8, be out of shape towards one side part 24a, 25a respectively by the upside hold assembly 24 made by elastomeric material and another side part 24b, the 25b of downside hold assembly 25, as mentioned above the film conveyer belt is given and outside tension force, the film conveyer belt stretches up and down, the gap smaller of film conveyer belt about can making, film conveyer belt itself is pushed film shape material to substrate up and down.Its result can improve the tight contact of film shape material and substrate, makes with the heat conduction of film shape material better, makes film shape material softening quickly, thereby enhances productivity.
As the elastomeric material that constitutes hold assembly 24,25, can use rubber material in addition.In addition, as long as can form the 2nd space 28,29 and enclosure space 30, also can adopt hold assembly 25 ' with section shape as shown in figure 12.And hold assembly can not be to give shape with outside tension force to the film conveyer belt, also can be as Figure 11 and only be installed in as shown in Figure 12 on the upside pressurizing block or on the downside pressurizing block.Hold assembly only is being installed in one of them occasion of pressurizing block up and down, is replacing the clamping device of the hold assembly of another side, just constituted by face with the pressurizing block of the hold assembly subtend on one side.
In illustrated embodiment, hold assembly 24,25 is installed at least one of pressurizing block 10,11 up and down, utilize the driving force of pressurizing block,, but be not limited thereto forming the 2nd space 28,29 and enclosure space 30 by film conveyer belt clamping up and down.Also can be provided with in addition and pressurizing block sealing mechanism irrelevant, that be used to form the 2nd space 28,29 and enclosure space 30.
In addition, produce pressure differential in order to make between the 2nd space 28,29 and the enclosure space 30, can be in addition import forced air from the outside of vacuum chamber 1 in the 2nd space 28,29, those skilled in the art also can select to make other the suitable mechanism that produces pressure differential between the 2nd space 28,29 and the enclosure space 30 arbitrarily.
In addition, in the above-described embodiments, be that full week and disposing of the external margin portion of pressurizing block describes up and down with hold assembly continued circling up and down, as long as make in the 2nd space 28,29 and the enclosure space 30 and can keep the time of lasting necessary scope and the force value of necessary scope, just needn't require to seal completely, can dispose hold assembly up and down with discontinuous state ring-type as shown in Figure 13.
In vacuum lamination method of the present invention,, that film shape material is overlapping and be temporarily fixed on the substrate 8 at first as the preparatory stage.This process can use common laminating machine to carry out.
Secondly, the substrate 8 that will maintain temporary fixed film shape material on the surface is put into flexual up and down between a pair of film conveyer belt 17,18.The film conveyer belt 17,18 that keeps substrate 8 is betwixt moved along length direction, substrate 8 is transported to assigned position (Fig. 6) in the vacuum chamber 1 by peristome 9.
Then, downside case member 3 is risen and make it to be sealed and matched, make the 1st space S of vacuum chamber 1 inside be in sealing state (Fig. 7) with upper housing parts 2 by drive unit.Then, by exhaust gear the 1st space S is carried out exhaust.Like this, the pressure that substrate 8 surrounding environment is reduced pressure to stipulate.
Under the state that the 1st space S is depressurized, make downside pressurizing block 11 rise to assigned position by drive unit, make it with upside pressurizing block 10 near (Fig. 8).Like this, hold assembly up and down 24,25 about being located at respectively on the pressurizing block 10,11 just clamps film conveyer belt 17,18 up and down around substrate 8, make it closely contact mutually, at the enclosure space 30 that forms hermetic sealing substrate 8 up and down between a pair of film conveyer belt 17,18, simultaneously, also the heater by being equipped with on pressurizing block 10,11 up and down is heated to set point of temperature with substrate 8 with film shape material.
After will being maintained at the film shape material heating on the substrate 8 and fully softening, by supplying with air in certain amount from air supply opening to the 1st space S of vacuum chamber 1 by feeder, the pressure of the 1st space S of vacuum chamber 1 rises to authorized pressure.Its result is situated between by being located at hole 26,27 on the pressurizing block 10,11 up and down with the 2nd space 28,29 of the 1st space S connection, also rise to the force value identical with the 1st space S.Like this, pressure ratio enclosure space 30 pressure inside of enclosure space 30 outsides are higher, and the temporary fixed substrate 8 that film shape material arranged is with regard to by a pair of film conveyer belt 17,18 up and down and pressurized (Fig. 9).Pressurize owing to pressing by the air that has adopted pliability film conveyer belt 17,18, the pliability film conveyer belt 17,18 that is pressed just is deformed into the concaveconvex shape of substrate 8, can be to the film shape material on the substrate 8 from all directions propagation pressure.Its result, film shape material is embedded in the hole of substrate 8 and recess and not residual bubble.
At last, further rise by making downside pressurizing block 11, can utilize the increased pressure board that is located at the rigid body on the pressurizing block 10,11 up and down respectively level and smooth add pressure surface, being situated between clamps substrate 8 and pressurization (Figure 10) by film conveyer belt 17,18.Issuable, the concaveconvex shape on the outer surface of film shape material of pressurization by 17,18 pairs of substrates 8 of pliability film conveyer belt in the last process, just by the increased pressure board of rigid body level and smooth add pressure surface by this process pressurization and planarization.
Like this, the operation that other are not set just can be carried out the planarization of the film shape material surface on the substrate 8.
In addition, utilize 17,18 pairs of processes that substrate pressurizes of a pair of film conveyer belt and utilize up and down that pressurizing block 10,11 clamps between the process of substrate 8 and pressurization in that the pressure ratio pressure inside by making enclosure space 30 outsides is higher, reduce pressure the once again process of authorized pressure of the pressure that makes enclosure space 30 outsides also can be set.Like this, owing to become still less, can make the flatness on lamination rear film surface higher between the air between pressurizing block 10,11 and the film shape material up and down.
Claims (17)
1. laminater is to be used at lamination on the substrate, to imbed film shape material or the film shape material on the substrate is carried out the laminater of planarization, it is characterized in that having:
Pressing part;
The substrate conveyer, have a pair of film conveyer belt up and down that is formed that substrate a pair of film conveyer belt, that will maintain film shape material on the surface up and down remains on therebetween and can moves along length direction, be used for being subjected to moving and making described substrate be transported into and transport with respect to described pressing part along the tension force limit of length direction by making this a pair of film transmit band edge;
Upside and downside pressurizing block, it is in order to clamp the substrate that is transported into by described substrate conveyer and pressurization and to be arranged on described pressing part;
Tension-applying mechanism, it is used for applying to described a pair of film conveyer belt at described pressing part at least the tension force of transverse direction.
2. laminater according to claim 1 is characterized in that, described tension-applying mechanism comprises by apply the hold assembly of the tension force of transverse direction from the edges at two ends portion of the described a pair of film conveyer belt of above-below direction clamping, to this film conveyer belt.
3. laminater according to claim 2, it is characterized in that, described hold assembly, be the rubber-like parts that are installed in the edges at two ends portion of described upside and downside pressurizing block respectively, and can be out of shape, along with described upside and downside pressurizing block mutually near and the described film conveyer belt of clamping, then by described upside and downside pressurizing block further near and described film conveyer belt is applied power to transverse direction foreign side.
4. laminater according to claim 3, it is characterized in that, be installed in the hold assembly on the described upside pressurizing block, have downwards and the part of extending to foreign side from the edges at two ends portion of described upside pressurizing block, be installed in the hold assembly on the described downside pressurizing block, have upward and the part of extending to foreign side from the edges at two ends portion of described downside pressurizing block.
5. laminater according to claim 3 is characterized in that described hold assembly can be made by elastomeric material.
6. according to any described laminater in the claim 1 to 5, it is characterized in that, constitute vacuum chamber by upside and downside case member, and vacuum chamber is configured in described pressing part, this vacuum chamber, can obtain decompression state by making this upside and downside case member be sealed and matched mutually and discharge gas inside, and the peristome that can use by the gateway that this upside and downside case member is separated from each other form substrate
Described upside and downside pressurizing block are configured in the described vacuum chamber.
7. vacuum lamination apparatus is to be used on substrate lamination, to imbed film shape material, and the film shape material on the substrate is carried out the vacuum lamination apparatus of planarization, it is characterized in that having:
Vacuum chamber, it has the upside and the downside case member that can be sealed and matched mutually and separate;
Driving mechanism, it is used to make described upside and downside case member to be sealed and matched mutually and separates;
The mechanism of decompressor, it is used for being reduced pressure in the 1st space that surrounded by described upside and downside case member, in the described vacuum chamber;
The substrate conveyer, the a pair of film conveyer belt up and down that it has that the substrate that is formed flexual up and down a pair of film conveyer belt, will maintains film shape material on the surface remains on therebetween and can move along length direction is used for by making this a pair of film conveyer belt move, make described substrate to be transported into and to transport with respect to described vacuum chamber through being formed at the described upside and the peristome between the downside case member that are in released state;
Upside and downside pressure-producing part, it is formed the upside that is located in the described vacuum chamber and downside pressure-producing part and brings the pressure surface that adds of described substrate of clamping and pressurization to be formed by level and smooth rigid body by being used for transmitting by described a pair of film;
Driving mechanism, be used to make among this upside and the downside pressure-producing part at least one near and leave another;
Heating arrangements is used for described substrate and the heating of described film shape material;
Enclose mechanism, its be formed be located at the inclosure mechanism in the described vacuum chamber and be used for by around described substrate, make described a pair of film conveyer belt mutually closely contact form the enclosure space that described substrate is enclosed between the described a pair of film conveyer belt;
Pressure differential produces mechanism, and it is used for making in described vacuum chamber the pressure of described enclosure space outside to be higher than pressure inside.
8. vacuum lamination apparatus according to claim 7, it is characterized in that, the described driving mechanism that is used to that described upside and downside case member are sealed and matched mutually and separates and being used to make among described upside and the downside pressure-producing part at least one near and described driving mechanism of leaving another, be to distinguish different mechanism independent and action.
9. vacuum lamination apparatus according to claim 7 is characterized in that, the described close mechanism of going into comprises being used for clamping described a pair of film conveyer belt and making it mutually the closely a pair of clamping device of contact from above-below direction.
10. vacuum lamination apparatus according to claim 9, it is characterized in that, when above-below direction was clamped described a pair of film conveyer belt, at least one of this a pair of clamping device applied outside tension force to the described film conveyer belt integral body in the described enclosure space at described a pair of clamping device.
11. vacuum lamination apparatus according to claim 9 is characterized in that, of described a pair of clamping device is made of the rubber-like parts, and another of described a pair of clamping device is by constituting with the face with described flexible parts subtend.
12. vacuum lamination apparatus according to claim 9 is characterized in that, the both sides of described a pair of clamping device are made of the rubber-like parts.
13. vacuum lamination apparatus according to claim 11 is characterized in that, has described flexible parts, be configured to surround described substrate around ring-type, and, have towards described a pair of film conveyer belt and expand outwardly and the part of extending.
14., it is characterized in that at least one among the described a pair of clamping device is located on described upside or the downside pressure-producing part according to any described vacuum lamination apparatus in the claim 9 to 13.
15. vacuum lamination apparatus according to claim 14, it is characterized in that, can with among the described a pair of clamping device described at least one and be provided with the described upside of this at least one clamping device or downside pressure-producing part described add pressure surface and by with this pressurization in the face of to the 2nd space that outer surface surrounded of described film conveyer belt and the path that described the 1st space in the described vacuum chamber is communicated with, be arranged on the described upside or downside pressure-producing part that is provided with described at least one clamping device.
16. a vacuum lamination method is to be used on substrate lamination, to imbed film shape material, and the film shape material on the substrate is carried out the vacuum lamination method of planarization, it is characterized in that having:
Make film shape material overlap on the substrate and be temporarily fixed at process on this substrate;
With the temporary fixed described substrate that described film shape material arranged remain on flexual up and down between a pair of film conveyer belt, move and described substrate be transported to the process of transporting of assigned position along length direction by making this a pair of film conveyer belt;
Be reduced to the process of authorized pressure at described assigned position, with the ambient pressure of described substrate;
Described film shape material and described substrate are heated to together the process of set point of temperature;
In the environment that is depressurized, by make around the described substrate described up and down a pair of film conveyer belt mutually closely contact form described substrate and gone into into this process of the enclosure space between a pair of film conveyer belt up and down by close;
Be higher than internal pressure by the pressure that makes this enclosure space outside, the process of utilizing described up and down a pair of film conveyer belt that the temporary fixed described substrate that described film shape material arranged is pressurizeed;
The surface by being formed in described substrate and the back side respectively the subtend setting a pair of pressure-producing part and be a pair of pressure-producing part that level and smooth rigid body is formed by respectively adding pressure surface, be situated between by the process of described substrate of described a pair of film conveyer belt clamping and pressurization.
17. vacuum lamination method as claimed in claim 16, it is characterized in that, also have:, once more the pressure of described enclosure space outside is reduced to the process of authorized pressure in the described process of described substrate being pressurizeed with by being between described a pair of pressure-producing part that level and smooth rigid body the is formed described process of coming described substrate is pressurizeed by the described pressure surface that adds by described flexual up and down a pair of film conveyer belt.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003057434 | 2003-03-04 | ||
| JP2003057434A JP2004262207A (en) | 2003-03-04 | 2003-03-04 | Laminating press device |
| JP2003276582A JP2005035239A (en) | 2003-07-18 | 2003-07-18 | Vacuum lamination device and method |
| JP2003276582 | 2003-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1526534A true CN1526534A (en) | 2004-09-08 |
Family
ID=34315581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA200410007073XA Pending CN1526534A (en) | 2003-03-04 | 2004-02-27 | Laminatea compression moulding apparatus and method |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20040078590A (en) |
| CN (1) | CN1526534A (en) |
| TW (1) | TW200422165A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101665018A (en) * | 2008-09-04 | 2010-03-10 | 北川精机株式会社 | Vacuum pressurizing device |
| CN102099192A (en) * | 2008-05-15 | 2011-06-15 | 迈雅太阳能解决方案有限公司 | Laminating device for laminating components |
| CN103847096A (en) * | 2012-11-29 | 2014-06-11 | 米卡多机器贩卖株式会社 | Vacuum heating pressure sealing molding apparatus and method thereof |
| CN104520977A (en) * | 2012-10-12 | 2015-04-15 | 新东工业株式会社 | Depressurizing jig and method for pressurizing object by using depressurizing jig |
| CN105643917A (en) * | 2016-02-29 | 2016-06-08 | 广东思沃精密机械有限公司 | Heating method suitable for non-flat panel to which film is attached |
| CN105773893A (en) * | 2014-12-24 | 2016-07-20 | 陈子忠 | Improved structure of carrier tape stabilization mechanism and carrier tape forming stabilization method |
| CN111376566A (en) * | 2018-12-27 | 2020-07-07 | 倍科有限公司 | Laminated substrate manufacturing apparatus, laminated substrate production line, and laminated substrate manufacturing method |
| CN112606519A (en) * | 2020-12-08 | 2021-04-06 | 安徽信盟装备股份有限公司 | Laminating machine |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140145449A (en) * | 2013-06-13 | 2014-12-23 | 주식회사 선익시스템 | Pressure module and apparatus for stretching substrate |
| KR102206594B1 (en) * | 2014-02-21 | 2021-02-02 | 주식회사 선익시스템 | Pressure module and apparatus for stretching substrate |
| KR101877771B1 (en) * | 2016-12-29 | 2018-08-07 | 주식회사 에스에프에이 | Vacuum laminator |
| TWI775083B (en) | 2020-05-26 | 2022-08-21 | 毅力科技有限公司 | Vacuum lamination system and vacuum lamination method |
-
2004
- 2004-02-13 TW TW93103521A patent/TW200422165A/en unknown
- 2004-02-27 CN CNA200410007073XA patent/CN1526534A/en active Pending
- 2004-03-03 KR KR1020040014393A patent/KR20040078590A/en not_active Application Discontinuation
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102099192A (en) * | 2008-05-15 | 2011-06-15 | 迈雅太阳能解决方案有限公司 | Laminating device for laminating components |
| CN101665018B (en) * | 2008-09-04 | 2013-10-23 | 北川精机株式会社 | Vacuum pressurizing device |
| CN101665018A (en) * | 2008-09-04 | 2010-03-10 | 北川精机株式会社 | Vacuum pressurizing device |
| CN104520977B (en) * | 2012-10-12 | 2018-05-18 | 新东工业株式会社 | Depressurize the pressure method of fixture and the pressurized object using decompression fixture |
| CN104520977A (en) * | 2012-10-12 | 2015-04-15 | 新东工业株式会社 | Depressurizing jig and method for pressurizing object by using depressurizing jig |
| CN103847096B (en) * | 2012-11-29 | 2018-06-29 | 米卡多机器贩卖株式会社 | Heating in vacuum pressurization building mortion and heating in vacuum pressurization manufacturing process |
| CN103847096A (en) * | 2012-11-29 | 2014-06-11 | 米卡多机器贩卖株式会社 | Vacuum heating pressure sealing molding apparatus and method thereof |
| CN105773893A (en) * | 2014-12-24 | 2016-07-20 | 陈子忠 | Improved structure of carrier tape stabilization mechanism and carrier tape forming stabilization method |
| CN105643917B (en) * | 2016-02-29 | 2018-01-02 | 广东思沃精密机械有限公司 | Suitable for the heating means for the non-formation plate material for being pasted with film |
| CN105643917A (en) * | 2016-02-29 | 2016-06-08 | 广东思沃精密机械有限公司 | Heating method suitable for non-flat panel to which film is attached |
| CN111376566A (en) * | 2018-12-27 | 2020-07-07 | 倍科有限公司 | Laminated substrate manufacturing apparatus, laminated substrate production line, and laminated substrate manufacturing method |
| CN111376566B (en) * | 2018-12-27 | 2022-03-15 | 倍科有限公司 | Laminated substrate manufacturing apparatus, laminated substrate production line, and laminated substrate manufacturing method |
| CN112606519A (en) * | 2020-12-08 | 2021-04-06 | 安徽信盟装备股份有限公司 | Laminating machine |
| CN112606519B (en) * | 2020-12-08 | 2023-08-04 | 安徽信盟装备股份有限公司 | Laminating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040078590A (en) | 2004-09-10 |
| TW200422165A (en) | 2004-11-01 |
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