CN1499179A - Chemical treating tank with indicator for liquid level in outer trough - Google Patents
Chemical treating tank with indicator for liquid level in outer trough Download PDFInfo
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- CN1499179A CN1499179A CNA021506191A CN02150619A CN1499179A CN 1499179 A CN1499179 A CN 1499179A CN A021506191 A CNA021506191 A CN A021506191A CN 02150619 A CN02150619 A CN 02150619A CN 1499179 A CN1499179 A CN 1499179A
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- water jacket
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- pretreatment solution
- treating tank
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Abstract
A crossover pipe device is added to external trough making chemical treatment liquid possible to pass through the said crossover pipe. Based on principle of connectivity, liquid level of chemical treatment liquid in the crossover pipe is same as the liquid level in the external trough. Thus, the liquid level in the external trough can be observed through visual mode. When liquid level sensor induces unusual condition of nitrogen gas, visual method can be used instead of complex steps to check level of chemical treatment liquid.
Description
Technical field
The present invention relates to the wet process treatment facility in the manufacture of semiconductor, particularly relate to wet process treatment facility with liquid level indication.
Background technology
In the manufacture of semiconductor, employed wet process (wetprocessing) is cleaned (wafer cleaning) and wet etching (wet etching) based on wafer.And the equipment that is used for carrying out wet process promptly can be described as chemical-treating facility (wet bench), generally can comprise chemical treating tank (chemical bath), ablution groove (rinsing bath), with dry slot (dryer bath) etc.And the liquid level detecting sensor that is used for the wet process chemical treating tank at present has two big classes, and one is static capacity sensor (static capacitor sensor), and another is nitrogen level sensor (N
2Levelsensor).Wherein, the static capacity sensor is applied to deposit chemicals with crystal generation or the chemical treating tank of operating mostly under room temperature, for example deposit buffered oxide etch agent (buffer oxide etching; BOE) chemical treating tank, nitrogen level sensor are then applicable to the chemical treating tank of all patterns.
Figure 1 shows that the chemical-treating facility synoptic diagram that generally has the nitrogen level sensor.See also Fig. 1, wherein, chemical treating tank 10 can be divided into inside groove 12 and water jacket 14, and wafer 16 is promptly handled in the inside groove 12 that fills with chemical pretreatment solution 18.And chemical pretreatment solution 18 can constantly be sent in the inside groove 12 by pipeline, too much chemical pretreatment solution 18 will overflow and flow in the water jacket 14 discharges again, and via pump (pump) 26, well heater (heater) 28, and filtrator (filter) 30 after, loop back in the inside groove 12.General chemical treating tank 10 can't be found out the wherein height of chemical pretreatment solution 18 from appearance, and the nitrogen level sensor promptly is a principle of utilizing the groove internal pressure to change, detects the level change of chemical pretreatment solution.For instance, when the chemical pretreatment solution in the water jacket 14 18 rises to liquid level 22 by liquid level 20, the nitrogen pressure of input also can change thereupon, therefore by the air pressure that can observe out in the calibration gauge 24 in the chemical treating tank 10 at that time, or the height of the chemical pretreatment solution that contrasts 18 at that time.
When the nitrogen level sensor detects the liquid level position of abnormal chemical pretreatment solution 18, can send the warning signal, therefore must stop all related hardware equipment, for example pump 26 or well heater 28 etc., the actual state of reaffirming board is to guarantee safety.But, hardware device stop also to cause change on the product specification, for example the rate of etch of wafer 16 changes or causes the residual etc. of surface chemistry thing.In addition, after board is answered a pager's call, the more necessary processing operation of readjusting the nitrogen level sensor or changing chemical pretreatment solution again.
But, according to general chemical treating tank 10, because how many bubble sizes in nitrogen source end 32 and the chemical treating tank 10 all can influence the testing result of nitrogen level sensor with, causes the maloperation of nitrogen level sensor easily, and send wrong warning signal.And because the processing operation after answering a pager's call needs to carry out under the state of shutting down, the erroneous judgement of nitrogen level sensor will cause the production time reduction of board and the waste of chemical pretreatment solution 18.
Summary of the invention
At above-mentioned the deficiencies in the prior art, the object of the present invention is to provide a kind of chemical treating tank of water jacket liquid-level indicator type, it is easily with the actual liquid level state in the visual judgement chemical treating tank water jacket, and the board stability of increase chemical-treating facility.
For achieving the above object, the chemical treating tank of water jacket liquid-level indicator type of the present invention comprises: an inside groove: be connected in a water jacket of inside groove, so as to depositing the chemical pretreatment solution that overflows inside groove; And, be linked to a connecting tube device of water jacket, so as to can observe the liquid level position of chemical pretreatment solution with visual type by the connecting tube device.Above-mentioned connecting tube device has several liquid levels and indicates, and comprising: overflow liquid level indication, the indication of circulation liquid level, with cross low liquid level indication etc., the purposes of having nothing in common with each other.In addition, above-mentioned connecting tube device can be by transparent poly-fluothane oxygen (polyfluro-alkoxy; PFA) constitute, so as to constituting the connecting tube device of transparent and chemically-resistant treating fluid.
The chemical treating tank of water jacket liquid-level indicator type of the present invention also can connect an intake line and an output pipe, discharges chemical pretreatment solution so as to importing chemical pretreatment solution in inside groove and by water jacket.In addition, also can between output pipe and intake line, be connected pump, well heater and filtrator, so as to will pressurize, heat and filter after chemical pretreatment solution, loop back in the inside groove.
Utilize the chemical treating tank of water jacket liquid-level indicator type of the present invention, can reduce chemical-treating facility when the machine number of times, therefore have the advantage that reduces subsequent treatment time and chemical cost amount, concerning the wafer manufacturing, can improve board production time and qualification rate and reduce cost.
Brief Description Of Drawings
In order further to understand technological means and the effect thereof that the present invention takes for the predetermined purpose of realization, see also following detailed description and accompanying drawing about the specific embodiment of the invention, yet appended accompanying drawing only provides reference and explanation usefulness, is not to be used for the present invention is limited.
In the accompanying drawing,
Fig. 1 is the chemical-treating facility synoptic diagram of general tool nitrogen level sensor;
Fig. 2 is general chemical pretreatment solution abnormity processing flow chart of steps;
Fig. 3 is the chemical-treating facility synoptic diagram of water jacket liquid-level indicator type of the present invention; And
Fig. 4 is a chemical pretreatment solution abnormity processing flow chart of steps of the present invention.
Embodiment
General chemical-treating facility as shown in Figure 1, when the nitrogen level sensor is sensed the nitrogen unusual condition and when extinguishing, the hardware device of all the other wet process, for example pump 26 also can stop with well heater 28 thereupon.This is that temperature is too high with well heater 28 empty burnings because the water jacket 14 of avoiding chemical treating tank 10 under the low excessively situation of chemical pretreatment solution 18 liquid levels, causes pump 26 idle running, and then threatens the security of chemical-treating facility, even breaking out of fire.And generally handle the unusual step of the said equipment as shown in Figure 2, and at first carry out step 100, board is switched to manual mode (manual mode).Then, carry out step 102 and step 104, open the chemical treating tank lid, and judge with visual whether the liquid level of chemical pretreatment solution in the water jacket is in one suitably highly.If the chemical pretreatment solution in the water jacket has a suitable liquid level, then carry out step 106, adjust nitrogen pressure so that sensor can normally show.If it is low or unusual that the chemical pretreatment solution in the water jacket is crossed, then carry out step 108, change chemical pretreatment solution again and confirm its height.
But when carrying out above-mentioned steps, must shut down with confirm in the chemical treating tank liquid level normally whether, add to be difficult for confirming liquid level by the chemical treating tank top, and cause following point easily: (1) loss board utilizes the time; (2) increase board number when machine; (3) increase is to the processing time of abnormal problem; (4) the frequency height of liquid level abnormal problem.Therefore, the invention provides a kind of chemical treating tank of water jacket liquid-level indicator type, to improve above-mentioned shortcoming.
Fig. 3 is the chemical-treating facility synoptic diagram of water jacket liquid-level indicator type of the present invention.See also Fig. 3, chemical treating tank 50 is divided into inside groove 52 and water jacket 54, and chemical pretreatment solution can inject inside groove 52 by intake line, and wafer 56 promptly carries out wet process in inside groove 52 handles.Wherein, water jacket 54 is connected on the side of inside groove 52, when the chemical pretreatment solution in the inside groove 58 too much overflows inside groove, promptly can flow in the water jacket 54 on one side, is discharged by output pipe again.And the present invention increases by a connecting tube device 66 at water jacket 54, make the chemical pretreatment solution 58 in the water jacket 54 negotiable to connecting tube device 66, by connecting pipe principle, the liquid level of chemical pretreatment solution 58 in the connecting tube device 66 can be identical with chemical pretreatment solution 58 liquid levels in the water jacket 54.The present invention utilizes the material of chemically-resistant treating fluid, for example employed poly-fluothane oxygen (polyfluro-alkoxy in a preferred embodiment of the present invention; PFA), make transparent connecting tube device 66, therefore utilize visual type, can observe the liquid level position of chemical pretreatment solution 58 by connecting tube device 66.
In addition, the present invention also on the connecting tube device several liquid levels of installing indicate, for example overflow liquid level indication 68, circulation liquid level indication 70, with cross low liquid level indication 72.Concentration abnormality or the protection during as the supply valve fault of intake line when wherein, the installing of overflowing liquid level indication 68 can prevent to change chemical pretreatment solutions 58 because of chemical treating tank 50; And after the installing of circulation liquid level indication 70 can be used for chemical treating tank 50 and change chemical pretreatment solution 58, the liquid level that activates before pump 60 and the well heater 62 was confirmed; And the affirmation liquid level of the installing of crossing low liquid level indication 72 when can be used for chemical treating tank 50 and discharging chemical pretreatment solution 58, to avoid phenomenons such as pump 60 idle running or well heater 62 empty burnings.
Because general chemical-treating facility all has a transparent window 74, make the operator can observe the operation of wafer Manufacturing Status and mechanical arm in the equipment by transparent window 74.Therefore, in wet process, utilize the chemical treating tank of water jacket liquid-level indicator type of the present invention, when extinguishing, can carry out treatment step as Fig. 4 if the nitrogen level sensor is sensed the nitrogen unusual condition.See also Fig. 4, when unusual generation, carry out step 150 earlier, by board transparent window 74, whether the liquid level of the chemical pretreatment solution 58 in the visual connecting tube device 66 is positioned on the mark of circulation liquid level indication 70.If the liquid level of chemical pretreatment solution 58 still is positioned on the mark of circulation liquid level indication 70, represent that promptly abnormality alarm is the maloperation of nitrogen level sensor, therefore carry out step 152, adjust nitrogen pressure, sensor can normally be shown.If the liquid level of chemical pretreatment solution 58 is not positioned on the mark of circulation liquid level indication 70, represent the liquid level generation unusual condition of chemical pretreatment solution 58, therefore carry out step 154, change chemical pretreatment solution 58 again, and confirm its height.
The chemical treating tank of water jacket liquid-level indicator type of the present invention is not limited in and connects said pump, well heater and filter for installation, and other all can be applicable among the present invention according to product and processing procedure devices needed.In addition, every chemical pretreatment solution of using connecting pipe principle, tool flowability also all can be applicable to the invention is not restricted to this among the present invention.
Utilize the chemical treating tank of water jacket liquid-level indicator type of the present invention; no matter when utilizing nitrogen level sensor or other device to detect liquid level to take place unusually; all can utilize visual type; liquid level condition in situation about need not shut down judges the chemical treating tank water jacket can omit existing complicated inspection step like this to save many times.Therefore, the chemical treating tank of using water jacket liquid-level indicator type of the present invention can increase the production time of board, reduces the use amount of working as the machine number of times and saving chemical pretreatment solution, can improve board throughput rate and reduce the cost that wafer is made.
Understand as the person skilled in the art, the above only is preferred embodiment of the present invention, is not in order to limit claim of the present invention; Other does not break away from the equivalence change of being finished under the disclosed design or modifies, and all should be included in the described claim.
Claims (7)
1, a kind of chemical treating tank of water jacket liquid-level indicator type comprises at least:
One inside groove;
One water jacket is connected in this inside groove, so as to depositing a chemical pretreatment solution that overflows this inside groove; And
One connecting tube device is linked to this water jacket, so as to can be observed a liquid level position of this chemical pretreatment solution by this connecting tube device with visual type.
2, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 1, wherein said connecting tube device have a plurality of liquid levels and indicate, and these liquid levels signs comprise at least:
One overflows the liquid level indication;
The indication of one circulation liquid level; And
One crosses low liquid level indication.
3, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 1, wherein said connecting tube device is made by transparent poly-fluothane oxygen,, and the connecting tube device of anti-this chemical pretreatment solution transparent so as to constituting.
4, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 1 also comprises having an intake line that is connected in this inside groove, so as to importing this chemical pretreatment solution, and has an output pipe that is connected in this water jacket, so as to discharging this chemical pretreatment solution.
5, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 4, also comprise have the pump that is connected in this output pipe and this intake line, a well heater, with a filtrator, after making that this chemical pretreatment solution of this water jacket is discharged by this output pipe, filter via this pump pressurization, this heater heats and this filtrator, can loop back in this inside groove by this intake line.
6, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 1 also comprises connecting a nitrogen level sensor to detect this liquid level position of this chemical pretreatment solution.
7, the chemical treating tank of water jacket liquid-level indicator type as claimed in claim 1 is for being used to comprise semiconductor wet process such as clean step of wafer and wet etch step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021506191A CN1499179A (en) | 2002-11-05 | 2002-11-05 | Chemical treating tank with indicator for liquid level in outer trough |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021506191A CN1499179A (en) | 2002-11-05 | 2002-11-05 | Chemical treating tank with indicator for liquid level in outer trough |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1499179A true CN1499179A (en) | 2004-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA021506191A Pending CN1499179A (en) | 2002-11-05 | 2002-11-05 | Chemical treating tank with indicator for liquid level in outer trough |
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| CN (1) | CN1499179A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102194666A (en) * | 2011-04-06 | 2011-09-21 | 天津市环欧半导体材料技术有限公司 | Electric control system of corrosion converting machine |
| CN103526205A (en) * | 2013-10-18 | 2014-01-22 | 上海和辉光电有限公司 | Wet etching device |
| CN104576435A (en) * | 2013-10-11 | 2015-04-29 | 宁夏琪凯节能设备有限公司 | Energy-saving environment-friendly washing tank |
| CN105838851A (en) * | 2016-04-09 | 2016-08-10 | 福建尚锟齿轮箱制造有限公司 | Heat treatment technology for automobile transmission gears |
| CN110783230A (en) * | 2018-07-30 | 2020-02-11 | 台湾积体电路制造股份有限公司 | Wet bench and chemical treatment method using the same |
-
2002
- 2002-11-05 CN CNA021506191A patent/CN1499179A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102194666A (en) * | 2011-04-06 | 2011-09-21 | 天津市环欧半导体材料技术有限公司 | Electric control system of corrosion converting machine |
| CN102194666B (en) * | 2011-04-06 | 2012-08-22 | 天津市环欧半导体材料技术有限公司 | Electric control system of corrosion converting machine |
| CN104576435A (en) * | 2013-10-11 | 2015-04-29 | 宁夏琪凯节能设备有限公司 | Energy-saving environment-friendly washing tank |
| CN103526205A (en) * | 2013-10-18 | 2014-01-22 | 上海和辉光电有限公司 | Wet etching device |
| CN105838851A (en) * | 2016-04-09 | 2016-08-10 | 福建尚锟齿轮箱制造有限公司 | Heat treatment technology for automobile transmission gears |
| CN105838851B (en) * | 2016-04-09 | 2018-05-22 | 福建尚锟齿轮箱制造有限公司 | A kind of automobile gearbox gear heat treatment process |
| CN110783230A (en) * | 2018-07-30 | 2020-02-11 | 台湾积体电路制造股份有限公司 | Wet bench and chemical treatment method using the same |
| CN110783230B (en) * | 2018-07-30 | 2022-11-25 | 台湾积体电路制造股份有限公司 | Wet bench and chemical treatment method using the same |
| US11532493B2 (en) | 2018-07-30 | 2022-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wet bench and chemical treatment method using the same |
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