CN1488569A - 玻璃衬底上全干法深刻蚀硅微机械加工方法 - Google Patents
玻璃衬底上全干法深刻蚀硅微机械加工方法 Download PDFInfo
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- CN1488569A CN1488569A CNA031432794A CN03143279A CN1488569A CN 1488569 A CN1488569 A CN 1488569A CN A031432794 A CNA031432794 A CN A031432794A CN 03143279 A CN03143279 A CN 03143279A CN 1488569 A CN1488569 A CN 1488569A
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- silicon
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 03143279 CN1262469C (zh) | 2003-09-05 | 2003-09-05 | 玻璃衬底上全干法深刻蚀硅微机械加工方法 |
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CN 03143279 CN1262469C (zh) | 2003-09-05 | 2003-09-05 | 玻璃衬底上全干法深刻蚀硅微机械加工方法 |
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CN1488569A true CN1488569A (zh) | 2004-04-14 |
CN1262469C CN1262469C (zh) | 2006-07-05 |
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CN 03143279 Expired - Lifetime CN1262469C (zh) | 2003-09-05 | 2003-09-05 | 玻璃衬底上全干法深刻蚀硅微机械加工方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1315719C (zh) * | 2004-06-17 | 2007-05-16 | 复旦大学 | 用于体硅微机械加工的局部光刻中的隔离装置 |
CN1325367C (zh) * | 2005-09-16 | 2007-07-11 | 中国电子科技集团公司第二十四研究所 | 一种mems传感器悬梁结构的制造方法 |
CN100396595C (zh) * | 2005-12-27 | 2008-06-25 | 北京大学 | 应用纳米压印和反应离子刻蚀术制备纳米悬臂结构的方法 |
-
2003
- 2003-09-05 CN CN 03143279 patent/CN1262469C/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1315719C (zh) * | 2004-06-17 | 2007-05-16 | 复旦大学 | 用于体硅微机械加工的局部光刻中的隔离装置 |
CN1325367C (zh) * | 2005-09-16 | 2007-07-11 | 中国电子科技集团公司第二十四研究所 | 一种mems传感器悬梁结构的制造方法 |
CN100396595C (zh) * | 2005-12-27 | 2008-06-25 | 北京大学 | 应用纳米压印和反应离子刻蚀术制备纳米悬臂结构的方法 |
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CN1262469C (zh) | 2006-07-05 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: TONGHUI ELECTRONICS Co.,Ltd. Assignor: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY Group Corp. Contract record no.: 2010130000064 Denomination of invention: Dry-process deep-etching silicon miero mechanical working method an glass substrate Granted publication date: 20060705 License type: Exclusive License Open date: 20040414 Record date: 20100825 |
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ASS | Succession or assignment of patent right |
Owner name: HEBEI MEITAI ELECTRONIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INST NO.13, CHINESE ELECTRONIC SCIENCE AND TECHNOLOGY GROUP CO Effective date: 20111024 |
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Effective date of registration: 20111024 Address after: 050051 Shijiazhuang cooperation Road, Hebei, No. 113 Patentee after: HEBEI MEITAI ELECTRONIC TECHNOLOGY CO.,LTD. Address before: 38, 113, cooperation Road, 050051, Hebei, Shijiazhuang Province Patentee before: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY Group Corp. |
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CX01 | Expiry of patent term |
Granted publication date: 20060705 |