CN1482657A - Resin solidifying system - Google Patents
Resin solidifying system Download PDFInfo
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- CN1482657A CN1482657A CNA03153094XA CN03153094A CN1482657A CN 1482657 A CN1482657 A CN 1482657A CN A03153094X A CNA03153094X A CN A03153094XA CN 03153094 A CN03153094 A CN 03153094A CN 1482657 A CN1482657 A CN 1482657A
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Abstract
Resin curing system to correspond to a low cost and space saving to a tape having the different strength of 'stiffness'. The resin curing system includes a first to a third tracks (L1 to L3) to heat the tape (12), a resin curing apparatus (63) to deliver the tape (12) carried out heat curing treatment by passing through the tracks (L1 to L3) from a first tape exit (34), and a tape wind-up apparatus (64) by which the tape (12) delivered from the first tape exit (34) is led from a first tape entrance (41) to wind to a wind-up reel (44). Further the resin curing apparatus (63) includes a second tape exit (132) enabling a delivery of the tape (12) to the exterior after running on the first truck (L1) except the first tape exit (34). Also the tape wind-up apparatus (64) includes a second tape entrance (141) enabling a lead-in of the tape (12) delivered from a second tape exit (132) except the first tape entrance (41).
Description
Affiliated technical field
The present invention relates to make the resin hot curing of encapsulation usefulness such as the semiconductor chip that is installed on the belt, simultaneously with the roll of tape after this hot curing around resin solidifying system.
Prior art
In order to be installed in the sealings such as semiconductor chip on the belt, can adopt the belt heating that will apply epoxy resin and so on thermosetting resin, the resin solidifying system that application of resin is solidified.
This resin solidifying system is that main composition partly assembles with package system shown in Figure 4.The structure of this package system can be made of tape supply unit 1, packaging system 2, resin solidification device 3, tape wind-up apparatus 4 if roughly divide.
Tape supply unit 1 is made of cushioning strip winding reel 15, a plurality of deflector roll 16 and the guide 17 of belt supply spool 14, coiling cushioning strip 13.Above-mentioned belt supply spool 14 is will the long ribbon shape belt 12 of many semiconductor chips 11 (with reference to the circular frame A shown in the dotted line among the figure) be installed, and has under the state of cushioning strip 13 in clamping between the belt 12 separately to remain the cylinder shape.
This tape supply unit 1 makes the belt 12 that remains on the belt supply spool 14 separate with cushioning strip 13, and the cushioning strip 13 after the separation is reeled by cushioning strip winding reel 15.On the other hand, belt 12 supplies to the packaging system 2 of next process under the state shown in frame of broken lines A.
Packaging system 2 has deliver to sending into roller 21 and apply the jockey pulley 22 of tension force on belt 12 of the place ahead (arrow a direction) from the belt 12 of this tape supply unit 1, also has the encapsulation 23 of carrying out the thermosetting resin encapsulation for the semiconductor chip 11 that is installed in these belt 12 surfaces simultaneously.
This resin solidification device 3 and tape wind-up apparatus 4 are referred to herein as resin solidifying system, regard to this resin solidifying system down and are illustrated.
The heating furnace 30 of the resin solidification device 3 of one of this resin solidifying system inscape has the structure that is called so-called 3 sections stoves.Promptly be: as can be seen from Figure 4,2 that send by packaging system, as to have applied resin belt 12, by the guiding of 2 guide rail 31a, 31b being arranged on the belt 12 direction of advance left and right sides (with reference to the circular frame B shown in the dotted line among the figure), advance towards horizontal direction (arrow a direction).
In the drawings among the circular frame B shown in the dotted line, expressed the heater 151 that is located on this heating furnace 30 as the heater means that heats, will be from the thermal diffusion plate 152 of the thermal diffusion of this heater 151, will shine the heat reflection plate 153 at belt 12 back sides by the heat of thermal diffusion plate 152 diffusions effectively.The operation passage L1～L3 of this heater 151, thermal diffusion plate 152, heat reflection plate 153 the along the 1st to the 3rd and to be provided be indubitable.But, in this just represents in the drawings the circular frame B shown in the dotted line.
Then, belt 12 is by the 1st reverse roll 32 counter-rotatings of the 1st belt reversing device, and by the guiding of guide rail 31a, 31b, (arrow b direction) advances specifically in the opposite direction, again by the 2nd reverse roll 33 counter-rotatings as the 2nd belt reversing device.Belt 12 after the counter-rotating is advanced towards horizontal direction (arrow a direction) by the guiding of guide rail 31a, 31b, delivers to tape wind-up apparatus 4 from belt outlet 34.
Tape wind-up apparatus 4 has following parts: export the belt introducing port 41 that 34 subtends are provided with the belt of resin solidification device 3, to be sent to the place ahead by the belt 12 that this belt introducing port 41 imports, and what have actuating force sends into roller 42, to send into the guide 43 of the belt 12 direction guiding down that roller 42 sends into by this, will by this guide 43 down the belt 12 of direction guiding have the winding reel 44 of reeling under the state that sags, detect the quantity detection sensor 45 that sags of these belt 12 amounts of sagging, and with winding reel 44 coiling belts 12 time, for the cushioning strip of supplying with the cushioning strip 46 of avoiding direct overlapping usefulness between the belt 12 is supplied with spool 47.
Except these inscapes, several deflector rolls 48 that lead for the operation of belt 12 and cushioning strip 46 to be set also as required.The quantity detection sensor 45 that sags is formed by 2 components of photo-electric conversion P1, P2 with light-sensitive element R1, the R2 of its pairing in this example.
Like this, when the heating furnace 30 of resin solidification device 3 is plural number section (at this moment being 3 sections stoves) structure, can heat fully for the resin that applies.Therefore, enter the stage of tape wind-up apparatus 4 from resin solidification device 3, resin can reach the state of curing really.Resin solidifying system shown in Fig. 4 is the example that COF (Chip On Film) belt is adopted in expression.In addition, often use TAB (TapeAutmated Bonding) belt that device aperture is arranged.No matter these adopted belts are that COF belt and TAB all are belts of rigidity strong (muscles and bones is arranged).
The 1st reverse roll 32 and the 2nd reverse roll 33 have the structure that separately Zhou Duan (roll surface) only contacts the belt both ends, for the resin that is installed in the semiconductor chip 11 on the belt 12 and is applied by packaging system 2, the Zhou Duan of this 1st and the 2nd reverse roll 32,33 is discontiguous.The 1st reverse roll 32 particularly, the resin of semiconductor chip 11 and coating during by the 1st reverse roll 32 for inboard (contacting sides of holding in 32 weeks of the 1st reverse roll), so must have the structure that only contacts belt 12 both ends.
Invent problem to be solved
When the structure of heating furnace 30 3 sections stoves as shown in Figure 4 of resin solidification device 3, as mentioned above, in the 1st operation passage L1 and the 3rd operation passage L3, belt 12 is to move under the state that makes progress of the installed surface at semiconductor chip 11, but semiconductor chip 11 moves under downward state in the 2nd operation passage L2.Fig. 5 has shown this situation.Fig. 5 (A) is the sectional view from operation passage L1 of the 1st shown in tape wind-up apparatus 4 one side Fig. 4 and the 3rd operation passage L3 part, and Fig. 5 (B) is the sectional view from the operation of the 2nd shown in tape wind-up apparatus 4 one side Fig. 4 passage L2 part.
As can be seen from Figure 5: along the direction of advance of belt 12, the two ends, the left and right sides of belt 12 are to support that by guide rail 31a, 31b belt 12 is moved by the guiding of this guide rail 31a, 31b respectively.
Like this, among operation passage L1～L3 of the from the 1st to the 3rd, belt 12 its ends are supported by guide rail 31a, 31b.But, as carry out the used belt 12 of the TCP that the heat treated object considers (intermediate products and the finished product that comprise the intermediate products that adopt TAB and finished product, COF) at this, its thickness is about 70 μ m, as this kind belt 12 is thicker, and its rigidity is also big, be so-called " muscles and bones " strong belt.Therefore, even only supporting under the state at its two ends, also can produce hardly because sagging of caused Widths such as the weight of semiconductor chip 11 and heating can move reposefully by two guide rail 31a, 31b.
The resin solidification device 3 of this class formation is develop for " muscles and bones " strong belt 12 uses as mentioned above, and when adopting " muscles and bones " strong belt 12, the resin solidification device 3 of this class formation has sufficient function, can carry out good hot curing processing.
But, if with this resin solidification device 3 for the TCP that adopts " muscles and bones " weak belt 12, for example adopt the COF of " muscles and bones " weak belt 12 to carry out the hot curing processing, then variety of issue can take place.Promptly be: the thickness of this COF belt 12 is strip of 20 μ m～40 μ m often, and the belt thickness strong with " muscles and bones " (about 70 μ m) is compared, and has only the thickness about half, and its rigidity is little, sags easily.
Therefore, handle, then, might come off from guide rail 31a, 31b because the weight of semiconductor chip 11 and heating etc. are easy to generate sagging of Width if the belt 12 usefulness resin solidification device 3 shown in Figure 4 that this " muscles and bones " is weak carries out hot curing.Countermeasure as this problem, considered following structure: in the 1st to the 3rd separately operation passage L1～L3, between left and right rail 31a, 31b, is provided with from the supporter of direction support belt 12 down along separately operation passage, Yi Bian belt 12 support member thus, Yi Bian move.
Owing to be provided with such supporter, even " muscles and bones " weak belt 12 also can prevent sagging of its Width reliably, avoid belt 12 to come off from guide rail 31a, 31b, can stably move.
In the 2nd operation passage L2, because the installed surface of the semiconductor chip 11 of belt 12 is in the state with supporter side subtend, the loop distribution face of belt 12 contacts with supporter with semiconductor chip 11, might damage loop distribution and semiconductor chip 11.
COF often is called the resin coating of " owing full " (under fill).This coating method is not the semiconductor chip 11 whole coating ground application of resin that will be installed on the belt 12, but the method for the application of resin of the side surface part of the semiconductor chip 11 on belt 12 (full week or part) as one is write down.The resin of coating flow into owing to capillarity in the space between the surface of the bottom surface of semiconductor chip 11 and belt 12.Semiconductor chip 11 is securely fixed on the belt 12.
As mentioned above, being assembled in resin solidification device 3 Fig. 4 package system, the past, is to be used for belt 12 certain thickness, the strong belt 12 of what is called " muscles and bones " that its rigidity is also big to be arranged and the solidification equipment of exploitation.
Therefore, if this resin solidification device is directly used in the TCP of the belt a little less than uses " muscles and bones ", above-mentioned and so on variety of issue can take place then.
But, COF for the belt a little less than the resin coating of carrying out " owing full ", the employing " muscles and bones " simultaneously, if construct the package system of the resin solidification device that adopts this class COF special use, from using this package system to produce the semiconductor device aspect, then need to prepare respectively can with corresponding package system separately.And, also needing to be used to be provided with the space of device separately, this is at cost and be provided with and have many wastes aspect the space.
Therefore, the objective of the invention is to provide a kind of and only " muscles and bones " of using so far strong belt is improved through the tape wind-up apparatus that this resin solidification device carries out resin solidification processing belt with resin solidification device and coiling, just can be used in the resin solidifying system of rigidity belt little, that promptly so-called " muscles and bones " is weak.
Be used to solve the means of problem
Resin solidifying system of the present invention is made of resin solidification device and tape wind-up apparatus.The resin solidification device is made up of following part again: the 1st heating region that the thermosetting resin that applies on belt for employing resin applying device heats, will be by the direction conveying opposite of the belt court of this 1st heating region, the 2nd heating region that heats simultaneously with the 1st heating region, to will pass out to outer the 1st belt outlet of heating furnace by the belt of this 3rd heating region by the direction conveying opposite of the belt court of this 2nd heating region, the 3rd heating region that heats simultaneously with the 2nd heating region.Tape wind-up apparatus be the roll of tape that will send from the 1st belt outlet around device.In order to reach above-mentioned purpose of the present invention, in the resin solidification device, be provided with the belt that to come from the 1st heating region and pass out to the 2nd belt outlet outside the heating furnace; In tape wind-up apparatus, be provided with and the belt of sending from the 1st belt outlet is delivered to the 1st of winding reel send into roller and will deliver to the 2nd of winding reel from the belt that the outlet of the 2nd belt is sent and send into roller.
Like this, resin solidification device of the present invention just is provided with 2 belt outlets, that is: having moved a plurality of operation passages carries out hot curing processing back, belt is passed out to the 1st belt outlet of outside and has only moved the 2nd belt outlet that the 1st operation passage carries out hot curing processing back, belt passed out to the outside.Thereby can optionally use any one outlet wherein, can carry out corresponding hot curing according to the difference of belt character and handle.
In addition, other inventive point is in this resinoid cure system, be provided with the 1st operation passage at the 1st heating region, the two ends, the left and right sides that this 1st operation passage has on its direction of advance are supported 2 guide rails of belt and are located at the supporter that passes through the belt of the 1st operation passage between these 2 guide rails, from supported underneath.
Like this, after only having moved this 1st operation passage and carrying out hot curing and handle, send belt from the outlet of the 2nd belt and carry out the hot curing processing, belt is owing to have supporter from supported underneath, even so adopt the belt of rigidity little (" muscles and bones " is weak), can not produce sagging of Width yet, the trouble that comes off from guide rail can not take place, can stably move.In addition, belt is when this 1st operation passage operation, if the semiconductor installed surface is moved towards upside, then the existence of supporter can not exert an influence to semiconductor chip and belt the inside.
In addition, between the 1st operation passage and the outlet of the 2nd belt, be preferably formed as the operation passage that extends the 1st operation passage.
If form such structure, then belt is when the outlet of the 2nd belt is sent, and this belt can run to the 2nd belt exit from the 1st operation passage reliably.
In addition, be provided with above-mentioned belt with the 1st operation passage operation and import the reversing device of above-mentioned the 2nd heating region and this reversing device when being roller, this roller preferably will be with the mounting structure that can change its installation site, be installed on the roller installed part, thereby belt in the 1st operation passage operation back when the outlet of the 2nd belt is sent, make on the operation passage of Zhou Duancong belt of roller to break away from.
After adopting such structure, when the 2nd belt outlet was sent, the Zhou Duan of roller just can not contact on the belt that is in operation with belt, and the Zhou Duan of roller can not damage semiconductor chip or damage belt surface, and belt can be moved reposefully.
In the resin solidification device, how the 1st belt outlet and the outlet of the 2nd belt are selected, and be decided by the belt kind of hot curing process object, select the outlet of the 1st belt during the big belt of rigidity, preferably select the 2nd belt to export during the little belt of rigidity.
Like this, the hot curing that can carry out the variety classes belt is handled.This resin solidification device is assembled in package system, just can on 1 resin solidification device, carries out for the hot curing treatment process of the belt of variety classes and character.
Selecting the belt of the 2nd belt outlet, is the TCP usefulness with the little belt of rigidity, and its thickness is preferably 20 μ m～50 μ m.
Like this, adopting as thin as a wafer, the TCP of belt handles with regard to adopting resin solidification device commonly used in the past to carry out hot curing.
Being preferably in the 1st belt outlet and the 2nd belt exports to be respectively equipped with and opens and closes lid freely.
Like this, do not use substrate on one side to send mouth and just can block, thereby make the heat in the resin solidification device avoid leaking waste, can reduce the variations in temperature in the resin solidification device, the temperature control action is become conveniently.In addition, can also prevent the intrusion of outside dust.
Tape wind-up apparatus imported export the above-mentioned belt that either party sends from the 1st belt outlet or the 2nd belt after, preferably the belt that will import is reeled with winding reel under the state of the regulation amount of sagging that maintenance is controlled by same datum.
After adopting such structure, the coiling of the belt after the hot curing processing finishes just can carry out under the situation of not damaging belt.And the belt of import is by the amount of sagging of same datum control regulation, so that the structure of control device also just becomes is uncomplicated, and the control of the amount of sagging has also made things convenient for.
Inventive point except foregoing invention point is: be in the state that keeps the regulation amount of sagging in order to make belt, be provided with the amount of the sagging detection means that detects the belt amount of sagging, it promptly is the amount of sagging detection means with a plurality of a plurality of speculums that are subjected to light, light-emitting component and match with it, according to the signal that comes from this amount of sagging detection means, carry out the drive controlling of winding reel, the amount of sagging is reached in the predefined scope.
Like this, can make the amount of sagging often remain on optimum state, on the belt after heat treated finishes not in addition inappropriate power, also can too not sag, can under the state that keeps the best amount of sagging, carry out coiling action.In addition, owing to utilized speculum, photo detector and light-emitting component can be configured in the same side, the electric wire that connects photo detector and light-emitting component is installed easily, the laying amount of electric wire also can reduce simultaneously, makes inside become succinct.
Example of the present invention
Below, be illustrated for the example of resin solidifying system of the present invention.
Fig. 1 is the figure that the package system of the resin solidifying system of having assembled relevant the invention process form is described.If the structure of this package system is roughly divided, then the package system with shown in Figure 4 is the same, is to be made of tape supply unit 1, resin applying device 2, the resin solidification device 63 that constitutes resin solidifying system and tape wind-up apparatus 64.
The resin solidifying system of this example, be for belt rigidity big (" muscles and bones " is strong) and need the existing resin solidifying system (resin solidification device 3 among Fig. 4 and tape wind-up apparatus 4) of TCP (general, the TAB) usefulness of fully heating to improve, thereby also can be used for the resin solidifying system of belt rigidity little (" muscles and bones " is weak).
Therefore, tape supply unit 1 shown in Figure 1, resin sealing apparatus 2 can be the same with the explanation of Fig. 4, so give the symbol identical with Fig. 4 to its composed component separately, its explanation is also just omitted or is oversimplified, and then explains detailedly for the resin solidification device 63 and the tape wind-up apparatus 64 that constitute resin solidifying system of the present invention.In addition, constitute in the composed component of this resin solidification device 63 and tape wind-up apparatus 64, then give identical symbol with identical part shown in Figure 4.
This resin solidification device 63 is the same with resin solidification device 3 shown in Figure 4, and its heating furnace 30 has the structure of 3 sections stoves, forms the 1st operation passage L1, the 2nd operation passage L2, the 3rd operation passage L3.And, for TCP, adopt above-mentioned the 1st operation passage L1, the 2nd operation passage L2, the 3rd operation passage L3 with " muscles and bones " strong belt, heated with former identical 3 sections stoves of what is called.But,, can adopt 1 section stove of what is called of the 1st operation passage L1 to heat for TCP with " muscles and bones " weak belt.
In order to realize this target, resin solidification device 63 and tape wind-up apparatus 64 have the structure of following explanation.In addition, the width of used belt 12 is 70mm in this example, and when having the TCP of " muscles and bones " strong belt, its thickness is 70 μ m, and when belt was " muscles and bones " weak belt, its thickness was 20 μ m～50 μ m.
At first be illustrated for resin solidification device 63.
The structure of the heating furnace 30 of this resin solidification device 63 as mentioned above, have 3 sections heating regions that constitute by the 1st heating region Z1, the 2nd heating region Z2, the 3rd heating region Z3, form the 1st operation passage L1, form the 2nd operation passage L2, form the 3rd operation passage L3 at the 1st heating region Z1 respectively at the 3rd heating region Z3 at the 2nd heating region Z2, in operation passage L1～L3 of the above-mentioned the 1st to the 3rd, equally with the past be provided with 2 guide rail 31a, 31b, support the two ends of belts 12 by these 2 guide rail 31a, 31b.
In this example, among operation passage L1～L3 of the 1st to the 3rd, the 1st operation passage L1 goes up and be provided with supporter 131 between 2 guide rail 31a, 31b, and this supporter 131 supports the belt 12 of the 1st operation passage L1 operation from following direction.(with reference to circular frame B shown in dotted lines in Figure 1)
In the 1st operation passage L1, on the extended line of the 1st operation passage L1 and in the place ahead (the place aheads of belt 12 directions of advance), be provided with and prolong operation passage L1 ' as the 1st reverse roll 32 of the 1st belt reversing device.When this prolongation operation passage L1 ' is provided with from 2 guide rail 31a, 31b being located at the 1st operation passage L1 and be present between this guide rail 31a, the 31b supporter 131 separately terminal part E1 the spacing distance of regulation is arranged.
And, this prolongation operation passage L1 ' is provided with 2 guide rail 31a, 31b and supporter 131 (with reference to the circular frame C that dotted line enclosed among the figure), and these structural elements will extend near near the side wall portion (side wall portion of tape wind-up apparatus 64 sides) of resin solidification device 63 respectively.
And the side wall portion at the resin solidification device 63 relative with the terminal part E2 of 2 guide rail 31a, 31b constitute prolonging operation passage L1 ' and supporter 131 is provided with belt outlet 132.Promptly be: when this resin solidifying system used " muscles and bones " weak belt 12, " muscles and bones " weak belt 12 was sent from belt outlet 132 by prolonging operation passage L1 ' from the 1st operation passage L1 beginning.
Be located between guide rail 31a, the 31b supporter 131 as previously mentioned, when using " muscles and bones " weak belt 12, in service as TCP at the 1st operation passage, mainly play preventing owing to the weight of semiconductor chip 11 and heating cause the effect of sagging on the Width.Prevent that thus belt 12 from coming off from guide rail 31a, 31b.
Like this, this resin solidification device 63 is provided with the outlet of 2 belts, that is: the belt outlet of sending mouthful 34 that is oppositely arranged with the 3rd operation passage L3 terminal part of the belt 12 after handling as hot curing; The belt that the terminal part E2 subtend of the prolongation operation passage L1 ' that disposes with moving the operation passage of passage L1 extension with conduct on the extending channel of the 1st operation passage L1 with the 1st is provided with exports 132.Below, will be called the 1st belt outlet 34 with the 3rd belt outlet 34 that moves the terminal part subtend setting of passage L3, will export 132 with the belt of the terminal part E2 subtend setting that prolongs operation passage L1 ' and be called the 2nd belt outlet 132.
In the 1st belt outlet the 34 and the 2nd belt outlet 132, be respectively equipped with and open and close lid 133,134 freely, when the 1st belt outlet the 34 and the 2nd belt outlet 132 is not used, just can the 1st belt outlet the 34 and the 2nd belt outlet 132 be blocked with lid 133,134 separately.
It is the reasons are as follows.That is: in this resin solidifying system, when the TCP with " muscles and bones " strong belt 12 (promptly using the strong belt 12 of TCP, " muscles and bones " that makes by manufacture methods such as COF or TAB), the operation passage L1～L3 of employing the from the 1st to the 3rd carries out hot curing to be handled, and the belt 12 after hot curing is handled is sent from the 1st belt outlet 34.In addition, when using the weak belt 12 of the TCP, " muscles and bones " that make by manufacture methods such as COF or TAB, operation is carried out hot curing and is handled on the 1st operation passage L1, and the belt 12 after this hot curing is handled is sent from the 2nd belt outlet 132 through prolonging operation passage L1 '.Like this, in this resin solidifying system, " muscles and bones " power according to the belt of hot curing process object, can only use under either party situation in the 1st belt outlet the 34 or the 2nd belt outlet 132, if there is not lid 133,134, then obsolete side's belt outlet then can be in open state, and the heat of resin solidification device 63 inside will be escaped, variations in temperature is violent, thereby causes temperature control complicated.
This lid 133,134 can be as shutter up and down or the switching that horizontally slips, and also can be to open and close as the rotation circular arc with the door that hinge is installed.
Prolong between the operation passage L1 ' at the 1st operation passage L1 and its, have the 1st reverse roll 32.The 1st reverse roll 32 in the resin solidification device 63 of this example, when " muscles and bones " strong belt 12, its in week roll surface of end be present in and link the 1st operation passage L1 and it prolongs on the operation passage of operation passage L1 '.On the other hand, for " muscles and bones " weak belt 12, when adopting this resin solidification device 63, carry out the transition to prolongation operation passage L1 ' from the 1st operation passage L1 and exist the week end of belt 12, the 1 reverse rolls 32 had better not be in the state of contact belt 12.This is because the 1st reverse roll 32 is the rollers that do not have actuating force, if its week end is in state of contact belt 12, then can hinder the operation of belt 12, makes the belt can not even running.
Therefore, belt 12 moves passage L1 ' through prolonging, when moving through the 2nd belt outlet 132, adopts the structure that prevents the 1st reverse roll 32 contact belts 12 again from the 1st operation passage L1.The 1st embodiment that discharge belts 12 from the 2nd belt outlet 132 are: the 1st reverse roll 32 will be with the installing mechanism that can change its installation site, be installed on the roller installed part, thereby the Zhou Duanneng of the 1st reverse roll 32 is broken away from from linking the 1st operation passage L1 and prolonging the operation passage that moves passage L1 '.This roller installing mechanism can have various considerations, as follows as its structure of example: on pillar 135 as the roller installed part that the 1st reverse roll 32 is installed, be provided with the slotted hole (slotted hole of above-below direction) 136 that the 1st reverse roll 32 central shaft 32a are installed, by with fixing on the optional position of installation site in this slotted hole 136 of the 1st reverse roll 32 central shaft 32a, just can change its (the 1st reverse roll 32) installation site.
The 2nd embodiment (diagram is omitted) that discharges belt 12 from the 2nd belt outlet 132 is: the 1st reverse roll 32 dresses take off and are mounted freely on the roller installed part, and the 1st reverse roll 32 grades have from installing the structure of easy accessibility.In this embodiment, setting heater with prolonging the field shown in the operation passage L1 ', this heater is an infrared heater, specifically is ceramic heater or reheater etc.This heater is the soaking length for the 1st operation passage L1 that lengthens.At first dismantle the heater etc. that is equipped on reverse roll 32 and prolongs the operation passage to the switching of 1 section stove, then, will be assembled in the field that prolongs operation passage L1 ' with identical heater 151, thermal diffusion plate 152, heat reflection plate 153, guide rail and supporter shown in Figure 4.In addition, heater 151, thermal diffusion plate 152, heat reflection plate 153, guide rail and supporter can be assembled into parts, change with parts.
In the 1st embodiment, as TCP with " muscles and bones " strong belt 12, when the operation passage L1～L3 that adopts the from the 1st to the 3rd carries out the hot curing processing, need reverse by the 1st reverse roll 32, so the 1st reverse roll 32 is fixing after the determining positions in slotted hole 136 with its central shaft 32a, its week is held be in the position that contact the 1st moves passage L1.In addition, as TCP with " muscles and bones " weak belt 12, when only adopting the 1st operation passage L1 and prolonging operation passage L1 ', because of not needing the 1st reverse roll 32, the 1st reverse roll 32 axle 32a therein is fixing after the determining positions in slotted hole 136, makes to hold in its week from linking the 1st operation passage L1 to break away from the line that prolongs operation passage L1 '.
Resin solidification device 63 also is provided with various essential inscapes certainly as the resin solidification device except above-mentioned inscape.But therefore these key elements have also just been omitted in diagram not having special necessity aspect explanation the present invention.
Below, be illustrated for tape wind-up apparatus 64.
This tape wind-up apparatus 64 has following each inscape: export belt introducing port 41 (being referred to as the 1st belt introducing port 41) that 34 subtends are provided with and export the belt introducing port 141 (being referred to as the 2nd belt introducing port 141) that 132 subtends are provided with the 2nd belt of resin solidification device 63 with the 1st belt of resin solidification device 63, to send into roller 42 (be referred to as the 1st and send into roller 42) from what the belt 12 that the 1st belt introducing port 41 imports was delivered to the place ahead and had an actuating force, to send into the guide 43 (being referred to as the 1st guide 43) that belt 12 that roller 42 sends here leads downwards by the 1st, to send into roller 142 (be referred to as the 2nd and send into roller 142) from what the belt 12 that the 2nd belt introducing port 141 imports was delivered to the place ahead and had an actuating force, to send into the guide 143 (being referred to as the 2nd guide 143) that belt 12 that roller 142 sends here leads downwards by the 2nd, by the 1st or the 2nd belt introducing port 41, reel when the belt that either party the belt introducing port in 141 imports is held the state that the sags winding reel 44 of this belt 12, detect the quantity detection sensor 145 that sags of the state that sags of this belt 12, cushioning strip that supply with cushioning strip 46 is supplied with spool 47 in order not make between the belt 12 directly overlapping by winding reel 44 coiling belts 12 time.
Except above-mentioned inscape, be provided with several guide rollers 48 that the operation of belt 12 and cushioning strip 46 is led etc. as required.In addition, also be provided with many other inscapes, but these key elements there be not special necessity aspect explanation the present invention, have therefore just omitted diagram.
The above-mentioned quantity detection sensor 145 that sags is made of following key element: for the amount of sagging that can detect belt at the state in 3 stages, have luminous respectively and be subjected to 3 components of photo-electric conversion (the 1st components of photo-electric conversion PR1, the 2nd components of photo-electric conversion PR2, the 3rd components of photo-electric conversion PR3) of two kinds of functions of light, and form pairing and 3 mirror M 1, M2, the M3 of subtend configuration with these the 1st to the 3rd components of photo-electric conversion PR1, PR2, PR3.Each components of photo-electric conversion PR1, PR2, PR3 accept self the light by mirror M 1, M2, M3 reflection separately, and will give and signal processing part not shown in the figures from the signal of these components of photo-electric conversion PR1, PR2, PR3 output.Therefore, this signal processing part detects the amount of sagging of belt 12, and according to this amount of sagging winding reel 44 is controlled.
Below, be illustrated with reference to Fig. 2 for the coiling of controlling belt 12 according to the amount of sagging of belt 12.Fig. 2 is that the part of sagging of taking out the sag quantity detection sensor 145 and the belt 12 of the tape wind-up apparatus 64 among Fig. 1, schematic diagram and Fig. 1 same section after the amplification just give same-sign.
Among the above-mentioned the 1st to the 3rd components of photo-electric conversion PR1～PR3 and 3 mirror M 1 corresponding, M2, the M3 with it, the 1st components of photo-electric conversion PR1 and be arranged on epimere with the mirror M 1 of its pairing, the 2nd components of photo-electric conversion PR2 and be arranged on the stage casing with the mirror M 2 of its pairing, the 3rd components of photo-electric conversion PR3 and be arranged on hypomere with the mirror M 3 of its pairing.
At this moment, the amount of sagging as belt 12, with the bottom (giving the symbol of 12a) of sagging of belt 12 at the 2nd components of photo-electric conversion PR2 that is arranged on the stage casing be arranged on and be the only amount of sagging between the 3rd components of photo-electric conversion PR3 of hypomere, the position surpasses the words of the 3rd components of photo-electric conversion PR3 that is arranged on hypomere if sag, then its amount of sagging is too much, if be present in than the high position of the 2nd components of photo-electric conversion PR2 that is arranged on the stage casing, then the amount of sagging is very few.
The 1st components of photo-electric conversion PR1 has the function of limiter, can detect some unusual generation.This class unusual all stop to reel etc. if any winding reel 44 unusual.
In this example, if belt 12 be present in components of photo-electric conversion PR1～PR3 of the 1st to the 3rd and and the mirror M 1～M3 of its pairing between words, the light that the from the 1st to the 3rd components of photo-electric conversion PR1, PR2, PR3 send just can not arrive on the mirror M 1, M2, M3 of pairing respectively, the light that components of photo-electric conversion PR1, PR2, PR3 self send just can not return, and the from the 1st to the 3rd components of photo-electric conversion PR1～PR3 output shows the signal that belt 12 exists; On the contrary, components of photo-electric conversion PR1, PR2 separately, when the light that PR3 sends returns, then output shows the signal that does not have belt 12.
Whether belt 12 is present between separately components of photo-electric conversion PR1, PR2, PR3 and mirror M 1, M2, the M3, be actually and how much judge with the light quantity returned, when the light quantity that turns back to separately components of photo-electric conversion PR1, PR2, PR3 is predefined limiting value when above, just be judged as not have belt 12.Show as when not having belt 12 here " light returns ", show as " light does not return " when having belt 12.
The object lesson of controlling for the amount of sagging of this belt 12 is illustrated.Shown in Fig. 2 (A), when the bottom of belt 12 12a was in the state of the 3rd components of photo-electric conversion PR3 below, the light that sends from the 3rd components of photo-electric conversion PR3 did not return, and just can be judged as belt 12 and sag at least to the 3rd components of photo-electric conversion PR3.
That is to say, if the light that sends from the 3rd components of photo-electric conversion PR3 does not turn back to self, just can be judged as belt 12 and sag at least below the 3rd components of photo-electric conversion PR3, it is too much to be judged as the amount of sagging, thereby carry out the control of winding reel 44, the coiling amount of belt 12 is increased.
After carrying out such coiling control, the amount of sagging of belt 12 just tails off.Then, belt is if reach the state shown in Fig. 2 (B), and the light that the 2nd components of photo-electric conversion PR2 sends turns back to self, and the bottom 12a that just can be judged as belt 12 is positioned at the above position of the 2nd components of photo-electric conversion PR2.At this moment, the quantitative change of sagging that is judged as belt 12 is few, and in order to increase the amount of sagging, the coiling that stop substrate winding reel 44 drives.
That is to say, in this example, state shown in Fig. 2 (C) (the bottom 12a of belt 12 is in the state between the 3rd components of photo-electric conversion PR3 and the 2nd components of photo-electric conversion PR2) is the only belt amount of sagging, and the drive controlling of winding reel 44 is exactly to reach such amount of sagging.
The 1st components of photo-electric conversion PR1 is that the coiling at aforesaid winding reel 44 stops when unusual, in order to tail off unusually with the amount of sagging of belt 12 time can be corresponding and be provided with.For example, if when the bottom 12a of belt 12 shown in Fig. 2 (D), reaches than the higher position of the 1st components of photo-electric conversion PR1, then the light that self sends just turns back on the 1st components of photo-electric conversion PR1.
At this moment, signal processing part is judged as unusually, for example at this moment if there is winding reel 44 to carry out coiling action, just promptly stops this coiling action.In addition, also can consider to drive before the winding speed of drive unit of winding reel 44 and the resin solidification device 63 belt 12 of operations carries and has stagnation etc. unusual, just can consider to stop whole package system, or unusual means take place, for example send abnormality detection sound with buzzer etc. with report, perhaps come display abnormality with light flash.
Below, be illustrated for the method for operation and the action thereof of the resin solidifying system (resin solidification device 63 and tape wind-up apparatus 64) of the invention process form of this class formation.This resin solidifying system is to be assembled in as shown in Figure 1 the package system as the main composition key element.
At first, in having assembled the package system of this resin solidifying system, when using big (" muscles and bones " the is strong) belt 12 of rigidity, be by 3 sections stoves of resin solidification device 63, promptly carry out heat treated by the 1st operation passage L1, the 2nd operation passage L2, the 3rd operation passage L3.
Therefore, at this moment as the last stage operation of starting resin solidification device 63, be to make belt 12 lead to the 2nd operation passage L2 with the counter-rotating of the 1st reverse roll 32 from the 1st operation passage L1.Use the counter-rotating of the 2nd reverse roll 33 (the 2nd belt reversing device) to make belt 12 again, then its leading section is sent from belt outlet 34 by the 3rd operation passage L3.Then send into roller 42, sag towards the below, then its leading section is contained on the winding reel 44 along the 1st guide 43 by the 1st of tape wind-up apparatus 64.This a succession of operation is undertaken by operating personnel.
When the TCP with " muscles and bones " strong belt 12 being carried out hot curing and handle, when promptly carrying out hot curing and handle, be located at the lid 134 that the 2nd belt exports 132 sides and be in closed condition by operation passage L1～L3 of the 1st～the 3rd.
Carried out after the aforesaid operations, the heating furnace 30 of resin solidification device 63 begins to heat action, and belt 12 is heated when moving in the 1st operation passage L1, the 2nd operation passage L2, the 3rd operation passage L3, and the resin of coating is handled by hot curing.Handle for adopting heating to carry out hot curing, owing to do not have direct relation with main points of the present invention, so this explanation has just been omitted.
At this moment the action of sending into of belt 12 is to send into roller 42 and to be located at and send into that roller 21 undertakies by synchronous rotation in the packaging system 2 by being located at the 1st in the tape wind-up apparatus 64.
In tape wind-up apparatus 64, by the belt 12 that resin solidification device 63 is sent here, carry towards the below by the 1st guide 43, under the state that sags that keeps ormal weight, be wound on the winding reel 44.
Under this operate condition, tape wind-up apparatus 64 by components of photo-electric conversion PR1～PR3 of the 1st～the 3rd and with the mirror M 1～M3 of its pairing, the amount of sagging of carrying out above-mentioned belt 12 detects, and carries out the control of coiling action according to the detected amount of sagging.
In this example, when regular event, control winding reel 44 is between the 3rd components of photo-electric conversion PR3 and the 2nd components of photo-electric conversion PR2 amount of sagging of belt 12 as previously mentioned.If the amount of sagging of belt 12 is in the taller position than the 1st components of photo-electric conversion PR1 for a certain reason, this is unusual, promptly stop the coiling of winding reel 44, or sends the action of report abnormal signal and so on.
On the other hand, in package system shown in Figure 1, when using little (" muscles and bones " the is weak) belt 12 of rigidity, resin solidification device 63 is as long as 1 section stove, promptly be only carry out hot curing by the 1st operation passage L1 to handle.
Therefore, at this moment operate as the last stage of starting resin solidification device 63, as shown in Figure 3, belt 12 is moved passage L1 ' by the 1st operation passage L1 and prolongation, its leading section is sent from the 2nd belt outlet 132, send into roller 142 by the 2nd of tape wind-up apparatus 64 then, sag towards the below, again its front end is contained on the winding reel 44 along the 2nd guide 143.At this moment this type of initial operation is undertaken by the operator.
Therefore, when " muscles and bones " weak belt 12, belt 12, is sent from the 2nd belt outlet 132 by prolonging operation passage L1 ' from the 1st operation passage L1, enters tape wind-up apparatus 64 then, does not need the 1st reverse roll 32.
At this moment, if the 1st reverse roll 32 is in original position (all end in contact of the 1st reverse roll 32 link the 1st operation passage L1 and prolong the position of the operation passage of operation passage L1 '), then belt 12 just can not move reposefully, so the 1st reverse roll 32 will change the installation site, its week is held from the operation passage of belt 12 break away from.As previously mentioned, this can be with the dismounting of the 1st reverse roll 32, or on the slotted hole 136 of the pillar 135 that the 1st reverse roll 32 is installed, and top in this slotted hole 136 is adjusted in the installation site of the 1st reverse roll 32.
When like this only carrying out the hot curing processing, be located at the lid 133 that the 1st belt in the resin solidification device 63 exports 34 places and do not use, be in closed condition with the 1st operation passage L1.
Carried out behind the aforesaid operations, resin solidification device 63 begins to carry out hot curing to be handled, and belt 12 is heated when the operation of the 1st operation passage L1 place, and the resin of coating is handled by hot curing.Here use the TCP of " muscles and bones " weak belt 12, as the occasion of COF, only just make resin solidification by the 1st operation passage L1.The enforcement that hot curing is handled will be selected to send into speed with regulation corresponding belt heating time.
At this moment belt 12 send into action, send into by what be located at that the 2nd on the tape wind-up apparatus 64 send into roller 142 and be located at packaging system 2 sides that roller 21 undertakies by synchronous rotation.
In the 1st operation passage L1 and prolongation operation passage L1 ', about be provided with supporter 131 between two guide rail 31a, 31b, with the inside (downside) of these supporter 131 support belts 12, even also can not producing, " muscles and bones " weak belt do not sag, can move reposefully.On this 1st operation passage L1, belt 12 is that the installed surface at semiconductor chip 11 moves under the state of upside, so worry that supporter 131 can damage semiconductor chips 11 or damage belt surface.
In tape wind-up apparatus 64, belt 12 sends into roller 142 by the 2nd and the 2nd guide 143 is carried towards the below, is wound on the winding reel 44 under the state that keeps the regulation amount of sagging.Sending into the action that roller 142 is carried out to winding reel 44 from the 2nd, promptly is the detection according to the amount of sagging, the action of control winding reel 44, with aforementioned to send into roller 42 from the 1st identical to the action of winding reel 44, for this action herein just omission illustrated.
As mentioned above, resin solidification device 63 sides are provided with 2 belt outlets in this example: the one, and resin solidification device up to now the existing the 1st～the 3rd moves passage L1～L3 and from the 3rd operation passage L3 belt 12 is passed out to outside the 1st belt outlet 34; It two is to be provided with the prolongation operation passage L1 ' that prolongs the 1st operation passage L1, belt 12 directly can be passed out to the 2nd outside belt from this prolongations operation passage L1 ' simultaneously and export 132.The structure that is resin solidification device 63 can be selected to use or use as 1 section stove as 3 sections stoves.
Therefore, according to belt 12, can select 3 sections stoves and 1 section stove arbitrarily as process object.For example; When using " muscles and bones " strong belt 12, this resin solidification device 63 uses as 3 sections stoves, and when using the belt 12 a little less than " muscles and bones ", this resin solidification device 63 uses as 1 section stove.At this moment, on the 1st operation passage L1 and prolongation operation passage L1 ', about be provided with supporter 131 between 2 guide rail 31a, 31b, " so even muscles and bones " weak belt 12, can be and cause and can not come off sagging of Width yet from guide rail 31a, 31b because of the weight of semiconductor chip 11 and heating etc. yet.Supporter 131 also can be provided in from belt width central authorities by two of end except the central authorities one that are provided in belt 12 width sentence.
The 1st reverse roll 32 can change its installation site easily, when employing the 1st operation passage L1 carries out the hot curing processing with prolongation operation passage L1 ', the 1st reverse roll 32 is in the position that breaks away from from the operation passage of belt 12, and therefore the existence of the 1st reverse roll 32 does not hinder the operation of belt.
On the other hand, in tape wind-up apparatus 64 sides, for can be corresponding to the structure of above-mentioned resin solidification device 63, belt introducing port as the belt of accepting to send from resin solidification device 63 12, the 1st belt introducing port 41 that had been provided with except the past, also be provided with when resin solidification device 63 uses as 1 section stove, export 132 the 2nd corresponding belt introducing ports 141 with the 2nd belt of resin solidification device 63 sides.
For the above-mentioned the 1st and the 2nd belt introducing port 41,141, be provided with the 1st and the 2nd and send into roller 42,142 and the guide 43,143 of belt 12 guiding below as sending into roller.And, no matter be the belt 12 that imports from which belt introducing port 41,141, below under the state that keeps sagging, reel with winding reel 44.In addition, have the quantity detection sensor 145 that sags of this amount of sagging of supervision, can keep the suitable amount of sagging.
Above-mentioned example is the suitable example of the present invention.But the present invention is as long as can there be the example of various distortion in the scope of unconventional its claim not.For example, in the aforesaid example, operation passage L1～L3 of the 1st～the 3rd is at the operation passage of separately Duan Zhongwei level.But above-mentioned L1～L3 is not defined as the level run passage in section separately, and for example operation passage L1～L3 separately also can form the zigzag operation passage with regulation gradient in section separately.
In above-mentioned example, 3 sections stove hot curing processing sequences of resin solidification device 63 are from the order of hypomere (the 1st operation passage L1) to epimere, but also can be in contrast, from the hot curing processing sequence of epimere to hypomere.At this moment, the belt of sending from packaging system 2 12 at first enters epimere (this is decided to be the 1st operation passage L1), later on successively towards next section (from the 2nd operation passage L2 to the 3 operation passage L3) operation, in order to realize the present invention, be provided with as previously mentioned at the 1st operation passage L1 of epimere that the illustrated such prolongation operation passage L1 ' of example and the 2nd belt export 132, tape wind-up apparatus 64 also can have corresponding structure.In addition, prolonging operation passage L1 ' is the operation passage that directly prolongs in the horizontal direction from the 1st operation passage L1 in aforementioned example, but also can not be horizontal direction, for example tilt upward or operation passage that the below tilts to prolong.
In aforesaid example, be that example with 3 sections stoves is illustrated as the heating furnace 30 of the resin solidification device 63 that constitutes resin solidifying system.But,, can be suitable for as long as be not limited to the heater that 3 sections stoves have the resin solidification device of plural number section (being not only 3 sections, 5 sections and so on odd number, also can be the even number section).When being the even number section, in case the belt 12 that will discharge from the resin solidification device during the heating furnace 30 by this resin solidification device, needs the operation passage of getting back to the tape wind-up apparatus side.
In aforesaid example, when 3 sections stoves are used as 1 section stove, make the 1st reverse roll 32 move to the top, but also can be with the fixed-site of the 1st reverse roll 32.At this moment, make the height of the 2nd belt outlet 132 be lower than the height of the 1st operation passage L1, do not contacting the 1st reverse roll 32 from belt 12 between the outlet 132 of the 1st operation passage L1 to the 2 belts.For example, when using as 1 section stove, the supporter 131 that will prolong operation passage L1 ' is arranged to tilt downwards along with export 132 towards the 2nd belt, like this, exporting between 132 from the 1st operation passage L1 to the 2 belts, belt 12 just can not contact or not contact substantially the 1st reverse roll 32.In addition, when using, can consider to make the 1st operation passage L1 to shift to the below, move passage L1 shape in line thereby will prolong operation passage L1 ' and the 1st as 1 section stove; When using, can consider the 1st operation passage L1 is shifted to the top as 3 sections stoves.
The quantity detection sensor 145 that sags is made of the speculum of the 1st～the 3rd components of photo-electric conversion PR1～PR3 and pairing therewith, but also can be as the past, is made of light-emitting component and the photo detector that matches therewith.In addition, detection means is not limited to 3 sections yet.
The switching of hop count also can not be the power of " muscles and bones " intensity of belt 12, but considers any one party or the both sides of employed resin kind and amount of resin, thereby decision is 3 sections operation passages or 1 section operation passage.In addition, also can consider " muscles and bones " intensity and the employed resin of belt 12, or the coating method of considering resin is selected 3 sections operation passages or 1 section operation passage.When handling the TAB belt, supporter 131 is shifted to the below, avoid near the resin the device aperture with the belt the inside to contact.On the other hand, when handling " muscles and bones " weak COF belt, also supporter 131 can be risen, get back to original position.In addition, the position of supporter 131 can change to hypomere, stage casing, three positions of epimere at the kind of belt 12, or position that can stepless adjustment supporter 131 above-below directions.
In above-mentioned example, be that the occasion of 70mm is described for the width of the belt 12 that is used in TAB and COF, but the width of belt is not limited thereto.At this moment, can change the guide rail width of guiding belt 12, thus belt 12 that can corresponding various width.
In above-mentioned example, be that the TCP that adopts TAB has been described as example with the strong belt 12 of what is called " muscles and bones ", be that the TCP that adopts the COF that owes full has been described as example with the weak belt 12 of what is called " muscles and bones ".But the belt 12 that can use in resin solidifying system of the present invention is not limited to these, and TAB is with also there being " muscles and bones " weak in the belt, and COF is with also there being " muscles and bones " strong in the belt, the belt 12 that can use corresponding to various TCP.
The shape of belt outlet is the approximate rectangular of horizontal 100mm * vertical 15mm.The 1st belt outlet the 34 and the 2nd belt outlet 132 can be identical shaped, also can be difformity.Guide rail is provided in the two ends, the left and right sides of belt outlet 34,132, and extends to outside the heating furnace 30.The 1st belt introducing port 41 and the 2nd belt introducing port 141 also can merge 1 belt introducing port is set except being provided with respectively.
The size of the winding radius of belt supply spool 14 and belt winding reel 44 (radius when beginning to reel belt, be rolled onto the least radius of the belt on the spool) can not be created in the permanent deformation that becomes problem in the practicality with electric wiring and be advisable.But, in tape supply unit 1 and tape wind-up apparatus 4, belt is sagged, the conveyer belt period of the day from 11 p.m. to 1 a.m simultaneously, the belt radius of curvature that produces as if sagging owing to belt is littler than the winding radius of spool, and the electric wiring that then is equipped on the belt produces permanent deformation sometimes.Therefore, in tape supply unit and the tape wind-up apparatus, owing to belt sags the belt radius of curvature that produces can not be littler than the winding radius of spool.
On the other hand, because the resin-sealed belt of tape wind-up apparatus 64 winding parts, so the crooked of the boundary zone of resin-sealed electric wiring and the unencapsulated electric wiring of resin becomes big easily, the electric appliance wiring that is equipped on belt is easy to generate permanent deformation.Therefore, in tape wind-up apparatus 64, compare with tape supply unit 1, owing to the radius of curvature that sagging of belt produces will be amplified.
Do not dwindle following belt to sag in the mechanism of radius of curvature of generation, can consider to enlarge deflector roll the interval, amplify the mechanism of belt radius of curvature or consider the sagging limiting mechanism of belt, thereby dwindle belt the amount of sagging, make belt excessively not hang down into the below.The former needs big space shown in the tape wind-up apparatus 4 of Fig. 1, it is big that this sampling device becomes.The latter need improve sending into the coiling control precision and carrying out the conveying of belt continually and stop of belt, and belt space back and forth reduces, the advantage of equipment miniaturization but have.
In tape wind-up apparatus 4 of the present invention, belt sag mechanism except Fig. 1 and the mechanism that hangs down into the below shown in Figure 3, also can be the sagging limiting mechanism of belt.The sagging limiting mechanism of belt is by the 1st belt outlet 34 belts of sending, and directly delivers to winding reel 44 from sending into roller 42.Therebetween, in the radius of curvature of belt was not less than the scope of belt winding radius of winding reel 44, belt had slightly and sags.During the coiling belt,, then can make damaged products, so the tension force that will control beyond the belt deadweight is not added on the belt if on belt, act on bigger external force.The belt of being sent by the 2nd belt outlet is from sending into roller 142 and deliver to winding reel 44 and above-mentionedly similarly reeling.
The sagging limiting mechanism of this type of belt does not limit the heating furnace of 1 section stove and 3 sections stove assemblings, is that 1 section stove or 3 sections stoves are all effective.After adopting this mechanism, the size of tape supply unit and tape wind-up apparatus can be dwindled, and the total length of packaging system can shorten.
Furnace bottom or furnace roof that heat reflection plate 153 can be used as stainless steel metals such as (as the SUS304) composition of minute surface replace.If the end, sidewall and top in the stove are minute surface, then except can cutting down constitutional detail (heat reflection plate and erecting tools etc.), also has the advantage that can evenly heat coated resin at short notice.Especially during 3 sections stoves, coated resin just must be cured to not the degree of peeling off from belt or semiconductor chip before reverse roll 32 crooked belts 12.It is the 1st heating region that the belt of 3 sections stoves of measurement is sent into speed (being directly proportional with the productivity of package system).If the end, sidewall and top in the stove are minute surface, then Tu Fu resin is subjected to uniform heating up and down at the 1st heating region, reaches set point of temperature at short notice.Like this, just can shorten the length of the 1st heating region, and shorten the total length of package system.The end, sidewall and top in the stove is the heating furnace that minute surface is not limited to 1 section stove and 3 sections stove assemblings, is that 1 section stove or 3 sections multi-stage ovens such as stove are all effective.
The invention effect
As mentioned above, resin solidifying system of the present invention is for the different belt of " muscles and bones " intensity, as long as 1 Just can carry out packaging process and later thermosetting treatment process in the individual system, so use the enterprise of such system Can stabilize equipment investment, and can also effectively utilize the space is set.
The accompanying drawing simple declaration
Shown in Figure 1 is the invention process form, assembled the whole pie graph of the package system of resin solidifying system of the present invention.
Fig. 2 is in the coiler device of explanation resin solidifying system shown in Figure 1, according to the belt amount of sagging control roll of tape around figure.
Fig. 3 is in the whole formation of package system shown in Figure 1, the belt operation conditions when the resin solidification device only carries out the hot curing processing with the 1st operation passage and the key diagram of its action.
Fig. 4 is the whole pie graph of package system in the past.
Fig. 5 is the key diagram that the belt running status and the 2nd of operation passage of the 1st among Fig. 4 and the 3rd operation passage is moved the belt running status of passage.
The explanation of symbol
1 tape supply unit
2 packaging systems
11 semiconductor chips
12 belts
23 encapsulation
21 send into roller
22 tensioning rollers
30 heating furnaces
31a, 31b guide rail
32 the 1st reverse rolls (belt reversing device)
33 the 2nd reverse rolls
The outlet of 34 the 1st belts
131 supporters
The outlet of 132 the 2nd belts
133,134 lids
41 the 1st belt introducing ports
42 the 1st send into roller
43 the 1st guides
44 winding reels
63 resin solidification devices (a resin solidifying system part)
64 tape wind-up apparatus (a resin solidifying system part)
141 the 2nd belt introducing ports
142 the 2nd send into roller
143 the 2nd guides
145 quantity detection sensors that sag
L1 the 1st operation passage
L2 the 2nd operation passage
L3 the 3rd operation passage
L1 ' prolongs the operation passage
(to the operation passage of the 1st operation passage L1 extension)
Z1 the 1st heating region
Z2 the 2nd heating region
Z3 the 3rd heating region
Claims (9)
1. resin solidifying system, its formation comprises resin solidification device and tape wind-up apparatus, the composition of wherein above-mentioned resin solidification device has following each one, that is: to adopting the resin applying device to be coated in the 1st heating region that the thermosetting resin on the belt heats, to carry towards the direction opposite by the above-mentioned belt of this 1st heating region with the 1st heating region, the 2nd heating region that heats simultaneously, to carry by the above-mentioned belt court of this 2nd heating region direction opposite with the 2nd heating region, the 3rd heating region that heats simultaneously, and will pass out to outer the 1st belt outlet of heating furnace by the above-mentioned belt of this 3rd heating region; The above-mentioned belt that above-mentioned tape wind-up apparatus is reeled and sent by above-mentioned the 1st belt outlet; In addition, above-mentioned resin solidification device also is provided with the above-mentioned belt that will come from above-mentioned the 1st heating region and passes out to outer the 2nd belt outlet of above-mentioned heating furnace, and above-mentioned tape wind-up apparatus also is provided with to be delivered to the 1st of winding reel with the above-mentioned belt of being sent by above-mentioned the 1st belt outlet and send into roller and will deliver to the 2nd of above-mentioned winding reel by the above-mentioned belt that above-mentioned the 2nd belt outlet is sent and send into roller.
2. resin solidifying system as claimed in claim 1, it is characterized in that being provided with the 1st operation passage at aforementioned the 1st heating region, this 1st operation passage has two ends, the left and right sides on its direction of advance and supports 2 guide rails of aforementioned belt and be located between these 2 guide rails and from the supporter of supported underneath by the aforementioned belt of this 1st operation passage.
3. resin solidifying system as claimed in claim 1 or 2 is characterized in that between aforementioned the 1st operation passage and the outlet of aforementioned the 2nd belt, is formed with the operation passage that aforementioned the 1st operation passage is extended.
4. resin solidifying system as claimed in claim 1, it is characterized in that being provided with the reversing device that the aforementioned belt of aforementioned the 1st operation passage of passing by is imported aforementioned the 2nd heating region, and when this reversing device is roller, this roller installing mechanism that can change its installation site, be installed on the roller installed part, thereby in aforementioned the 1st operation passage operation back, when aforementioned the 2nd belt outlet is sent, make on the operation passage of the aforementioned belt of Zhou Duancong of above-mentioned roller to break away from aforementioned belt.
5. resin solidifying system as claimed in claim 1, it is characterized in that in the aforementioned resin solidification equipment, how to select its 1st belt outlet and the outlet of the 2nd belt, belt kind by the hot curing process object decides, select aforementioned the 1st belt outlet during the big belt of its rigidity, select aforementioned the 2nd belt outlet during the little belt of its rigidity.
6. resin solidifying system as claimed in claim 5 is characterized in that selecting the belt of aforementioned the 2nd belt outlet is to have the little TCP usefulness of belt rigidity, and its thickness is 20 μ m～50 μ m.
7. resin solidifying system as claimed in claim 1 is characterized in that being respectively equipped with in outlet of aforementioned the 1st belt and the outlet of aforementioned the 2nd belt and opens and closes lid freely.
8. resin solidifying system as claimed in claim 1, it is characterized in that aforementioned tape wind-up apparatus is after having imported the aforementioned belt of sending from either party of outlet of aforementioned the 1st belt or the outlet of aforementioned the 2nd belt, the belt of this importing under the state that keeps by the regulation amount of sagging of same datum control, is reeled with winding reel.
9. resin solidifying system as claimed in claim 8, it is characterized in that in order to make aforementioned belt be in the state that keeps the regulation amount of sagging, be provided with the amount of the sagging detection means that detects the aforementioned belt amount of sagging, promptly be have a plurality of be subjected to light, light-emitting component and with the amount of the sagging detection means of a plurality of speculums of its pairing, and according to the signal that comes from this amount of sagging detection means, carry out the drive controlling of aforementioned winding reel, the aforementioned amount of sagging is reached in the predefined scope.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002231995 | 2002-08-08 | ||
| JP2002231995 | 2002-08-08 | ||
| JP2003175934 | 2003-06-20 | ||
| JP2003175934A JP4245417B2 (en) | 2002-08-08 | 2003-06-20 | Resin curing system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1482657A true CN1482657A (en) | 2004-03-17 |
| CN1320618C CN1320618C (en) | 2007-06-06 |
Family
ID=32095375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB03153094XA Expired - Fee Related CN1320618C (en) | 2002-08-08 | 2003-08-07 | Resin solidifying system |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4245417B2 (en) |
| CN (1) | CN1320618C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100576479C (en) * | 2004-04-08 | 2009-12-30 | 菲科公司 | Be used for the method and apparatus of feeding encapsulating material to mould cavity |
| CN1960621B (en) * | 2005-11-02 | 2010-10-13 | 爱立发株式会社 | Circuit board supplying device, circuit board rolling device, circuit board processing system, circuit board supplying method and circuit board rolling method |
| CN101085435B (en) * | 2006-06-06 | 2012-08-22 | 爱立发株式会社 | Resin coating system |
| CN112289728A (en) * | 2020-11-03 | 2021-01-29 | 谭秀美 | Semiconductor epoxy resin encapsulation equipment |
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|---|---|---|---|---|
| JP4526319B2 (en) * | 2004-07-30 | 2010-08-18 | 大日本印刷株式会社 | Sheet heating device |
| JP5172117B2 (en) * | 2006-08-03 | 2013-03-27 | アスリートＦａ株式会社 | Resin coating system |
| KR101186692B1 (en) | 2010-12-09 | 2012-09-27 | 주식회사 루셈 | ACP Curing apparatus for use in a Bonding Appliance for bonding semiconductor chips with Anisotropic Conductive Paste |
| TWI554406B (en) * | 2011-07-22 | 2016-10-21 | 住友電木股份有限公司 | Apparatus and process for producing laminated sheet |
| KR101555319B1 (en) * | 2014-06-18 | 2015-09-25 | 대은산업(주) | Heating apparatus and apparatus for producing strapping band include the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3704217A1 (en) * | 1986-02-21 | 1987-09-03 | Reinmann & Cie Lara | Process for producing porous moulded articles from fluoropolymers |
| CN1025489C (en) * | 1991-02-09 | 1994-07-20 | 倪明忠 | Goods elevator for building |
-
2003
- 2003-06-20 JP JP2003175934A patent/JP4245417B2/en not_active Expired - Fee Related
- 2003-08-07 CN CNB03153094XA patent/CN1320618C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100576479C (en) * | 2004-04-08 | 2009-12-30 | 菲科公司 | Be used for the method and apparatus of feeding encapsulating material to mould cavity |
| CN1960621B (en) * | 2005-11-02 | 2010-10-13 | 爱立发株式会社 | Circuit board supplying device, circuit board rolling device, circuit board processing system, circuit board supplying method and circuit board rolling method |
| CN101085435B (en) * | 2006-06-06 | 2012-08-22 | 爱立发株式会社 | Resin coating system |
| CN112289728A (en) * | 2020-11-03 | 2021-01-29 | 谭秀美 | Semiconductor epoxy resin encapsulation equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4245417B2 (en) | 2009-03-25 |
| JP2004122753A (en) | 2004-04-22 |
| CN1320618C (en) | 2007-06-06 |
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