CN1461420A - Integrated planar optical waveguide and shutter - Google Patents
Integrated planar optical waveguide and shutter Download PDFInfo
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- CN1461420A CN1461420A CN00818483A CN00818483A CN1461420A CN 1461420 A CN1461420 A CN 1461420A CN 00818483 A CN00818483 A CN 00818483A CN 00818483 A CN00818483 A CN 00818483A CN 1461420 A CN1461420 A CN 1461420A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
Abstract
An optical switch having an input waveguide and two output waveguides separated by and disposed around a trench. The input waveguide and a first output waveguide have respective optical paths defined by their respective cores; those optical paths (and cores) being aligned or coaxial with each other. Those waveguides are also separated by a trench having a medium provided therein that has a refractive index different from that of the waveguides. The input waveguide and first output waveguide are separated by a distance insufficient to affect the transmission characteristics of an optical signal propagating from the input waveguide to the first output waveguide, even though the optical signal experiences different refractive indices as it propagates from the input waveguide to the first output waveguide. The input waveguide and a second output waveguide are arranged generally on the same side of the trench such that an optical signal passing from the input waveguide to the second output waveguide does not completely traverse the trench. Thus, even though an optical signal passing from the input waveguide to either of the first or second output waveguide encounters different refractive indices, the distance over which the optical signal must travel between the waveguides is small enough so as to not affect the optical transmission characteristics of that signal.
Description
Technical field
The present invention relates to switch on and off the optical switch of light path between input waveguide and the output waveguide.
Background technology
Optical switch is critical elements in optic network, is used for determining and controlling the path of optical signal transmission.Usually, optical signalling (here intersect and use term " light signal " and " optical signalling ", be intended to do to explain widely, refer to visible light, infrared light, ultraviolet light and similar light) is conducted along light path by waveguide, and described light path is limited by described waveguide core usually.It is propagated along different light paths so that it no longer along duct propagation, perhaps propagates optical signalling once more may to need or wish the blocking light signal, promptly by different waveguide core.Light signal may need light signal by a kind of medium transmission from a waveguide to the transmission of another waveguide, and the refractive index of this medium may different with the refractive index of waveguide (described waveguide has substantially the same refractive index usually).If known light signal by having different refractivity material (medium) might cause the transport property of signal to change.For example, light signal is delivered to and has second refractive index materials from having first refractive index materials because the speed that signal is propagated in each medium is different and to small part because the refractive index separately of material may cause in light signal that undesirable is moved.In addition, may not produce reflected signal owing to matching at two dielectric interface polarization fields.As employed here, term " medium " is done to explain widely, and is comprised vacuum.
This light signal reflection is undesirable, and semaphore has reduced because through-put power is reflected, so cause the transmission signals loss.In addition, reflected signal may back be propagated along the direction of light source, and this is also referred to as the optical echo loss.The optical echo loss is undesirable especially, because can make the optical signal source instability like this.
If two kinds of materials (or medium) have roughly the same refractive index, when light signal when a kind of material propagates into another kind of material, its transport property does not have significant change.Solve the unmatched scheme of refractive index and relate to the use index-matching fluid.Common usage in optical switch is to fill the material that a kind of refractive index is substantially equal to waveguide index in the groove between at least two waveguides.Like this, when light signal by described groove during from a duct propagation to another waveguide without any tangible variations in refractive index.
An example of this scheme can be seen in the WO00/25160 international patent application.This application has been described a kind of switch that uses collimation matching fluid (collimation matching fluid) between light path in the cavity of (being between the waveguide), so that the optical property of maintained switch.Use index-matching fluid to produce a series of new problems, comprise the response time decline that to reveal and may cause switch owing to on-off element resistance of motion in liquid.
In addition, has the loss of insertion in the time of between light signal is by groove and waveguide.Also have a problem to be because the uncontinuity of waveguide I/O face and groove causes the optical echo loss.Usually, when light signal by groove when transmission direction is transmitted, it will run into the input face of waveguide, because the physical characteristics (for example reflectivity, verticality, waveguide material etc.) of this face may cause the reflecting part (according to luminous power) of light signal to be propagated go back (being the reverse direction of the direction of propagation) by described groove.Obviously this is undesirable.
Size also is the problem that always exists in design, manufacturing and the structure of optical element (i.e. device, circuit and system).Obviously the optical element that is desirable to provide reduced size consume smaller power, and work efficiency is higher so that optical devices, circuit and system can make more compactly.
Summary of the invention
The present invention relates to a kind of optical switch, have an input waveguide and an output waveguide, separately and be positioned at around the groove by groove.Input waveguide and output waveguide have the light path separately that their cores separately limit; These light paths (and core) are aligned with each other or coaxial usually.Have the refractive index medium different in the described groove with the refractive index of waveguide.Therefore can avoid backreflection, because input waveguide and output waveguide are separated a segment distance, this distance is not enough to influence the transport property along the light signal of propagating from the input waveguide to the output waveguide, even light signal different refractive index of process when propagating from the input waveguide to the output waveguide.Like this, even the light signal that propagates into output waveguide from input waveguide must pass through described groove fully, the distance that light signal must pass through between waveguide is enough little, so that does not influence the optical transmission property of signal.
Therefore the present invention includes the architectural feature of element and the arrangement of combination and parts, these will illustrate in this manual.Scope of the present invention will be pointed out in claims.
Brief Description Of Drawings
Accompanying drawing is not drawn in proportion, and is just illustrative, and wherein similar reference number is represented similar elements in several accompanying drawings, wherein:
Fig. 1 is the top view of the optical switch of formation according to the present invention;
Fig. 2 A and 2B are the sectional views that two embodiment of optical switch cut open along the line 2-2 among Fig. 1;
Fig. 3 is the sectional view that the waveguide of optical switch is cut open along the line 3-3 among Fig. 1;
Fig. 4 is as one according to the electric heating actuator of the part of optical switch of the present invention
The cross-sectional top view of embodiment;
Fig. 5 is as one according to the electrostatic actuator of the part of optical switch of the present invention
The top plan view of embodiment;
Fig. 6 is the top plan view of conduct according to another embodiment of the electrostatic actuator of the part of optical switch of the present invention;
Fig. 7 is the connection top plan view partly of the tapering part of waveguide shown in Figure 1;
Fig. 8 A and 8B have described optical switch component according to an embodiment of the invention; And
Fig. 9 A and 9B illustrate the local side view cutaway drawing according to optical switching part structure of the present invention and outer member and web member that utilizes flint glass and monolithic manufacturing technology to make respectively.
The detailed description of most preferred embodiment of the present invention
The present invention relates to a kind of optical switch, have an input waveguide and an output waveguide, separately and be positioned at around the groove by groove.Input waveguide and output waveguide have the light path separately that their cores separately limit; These light paths (and core) are aligned with each other or coaxial.These waveguides also by described groove separately, have the refractive index medium different with the refractive index of waveguide in the described groove.The input and output waveguide is separated a segment distance, and this distance is not enough to influence the transport property that propagates into the light signal of output waveguide from input waveguide, even light signal different refractive index of process when propagating from the input waveguide to the output waveguide.Therefore, even the light signal that propagates into output waveguide from input waveguide must pass completely through described groove, the distance that light signal must pass through between waveguide is enough little, so that does not influence the optical transmission property of signal.
That is to say that though groove is enough big, allow the shutter of limited thickness is placed in the groove, groove also should be as far as possible little, so that reduce the diffraction of light in trench gap.
Now in detail with reference to the accompanying drawings, and at first with reference to figure 1, the optical switch 1 that constitutes according to one embodiment of the invention has been described.Optical switch of the present invention 1 is preferably by the semiconductor of silicon-dioxide-substrate (SiO for example
2) and other weak restriction optical waveguides formations.Also can use other semiconductor, such as for example GaAs and InP.In addition, it is to provide in order to illustrate that following waveguide constitutes, rather than the limitative examples of the embodiment of the invention; The present invention also can use other waveguide shapes and structure, and these also fall in scope of the present invention and the essence.
Fig. 1 has described 1 * 1 switch.Switch 1 comprises input waveguide 3 and output waveguide 5, is arranged on around the groove 15 and by groove 15 to separate.The cross section of output waveguide 5 also is the illustrative example of input waveguide 3, and is shown in Figure 3, describes below and also is applicable to input waveguide 3 with reference to output waveguide 5.Waveguide 5 utilizes semiconductor fabrication well known in the art and method to make, and therefore needn't describe in detail here.Waveguide 5 comprises the core 7 that is deposited on the under-clad layer 9b, and described under-clad layer 9b is deposited on SiO
2(just as an example, also can use silicon or quartz substrate) in the substrate 13.
Top covering 9a is deposited on core 7 tops and surrounds core 7, so that form the flush type waveguiding structure.
Waveguide 3,5 can form by selecting to have the various materials of wishing optical property.Though preferably optical switch 1 of the present invention is produced on silicon-dioxide-substrate (SiO
2) on the flat board, but also can use other to have the semiconductor of wishing optical property.For example, core 7 can comprise germanium-doped silica, and last under-clad layer 9a and 9b can comprise thermal silicon dioxide or mix the boron phosphide silica glass.This flat board is connected good and various refractive index contrast (0.35% to 1.10%) can be provided with optical fiber.As non-limitative example, other operable flat boards comprise SiO
xN
y, polymkeric substance or their combination.Also can use other series of products of sowing such as indium phosphide or arsenicization.
Continuation is with reference to figure 3, and the refractive index contrast of core 7 can be in about 0.35% to 0.70% scope, and more preferably, refractive index can be in about 0.35% to 0.55% scope, so that be coupled better with output optical fibre.Core 7 can be a rectangle, and lateral thickness is about 3-10 μ m, and width is about 3-15 μ m.More preferably, core 7 is squares, and lateral thickness is about 6-8 μ m, and width is about 6-14 μ m.The last under-clad layer 9a and the 9b of contiguous core 7 can be that about 3-18 μ m is thick, and it is thick more preferably to be approximately 15 μ m, because same reason, the thickness of core can be in about 7 to 8 mu m ranges.When selecting the size of final core and covering, should notice making that horizontal diffraction is low and the misalignment permissible error is big.
And these sizes provide with way of example, rather than restrictive.
The present invention can be used for weak restriction waveguide and strong restriction waveguide.At present, be preferred for weak restriction waveguide.
Refer again to Fig. 1, the core 7 of input waveguide 3 limits along the light path 2 of the longitudinal length direction of waveguide.The light path 8 that light path 2 cores 7 common and by output waveguide 5 limit is coaxial.Non-right alignment is determined with the angle that forms between the vertical direction of light signal propagation direction and the input waveguide-trench interface on the one hand, determines with the length of groove on the other hand, will explain as the back.Therefore, can think input waveguide 3 and output waveguide 5 be arranged to each other aim at or coaxial light path on registration, the feasible like this light quantity maximum that is transferred to output waveguide 5 from input waveguide 3.
On-off element 130 is switched on or switched off the photo-signal channel between input waveguide 3 and the output waveguide 5.On-off element 130 comprise the shutter 17 that is arranged in the groove 15 with by being connected 10 and the actuator 33 that is coupled of shutter 17, described connection 10 is used to select mobile shutter 17, will describe in detail as the back.The present invention has considered the different embodiment of actuator 33, as non-limitative example, comprises electroheating type, electrostatic and piezo-electric type, below to wherein each all is described in detail.
Shutter 17 is preferably made by light and hard material, such as silicon dioxide, polymkeric substance, metal or dielectric material.Shutter 17 can be the film shutter.Can make such inferior quality rigidity shutter 17 respond the electric signal fast moving, for example in the position shown in the figure 1 and between the second place (not shown), wherein be blocked from the light signal of input waveguide 3 outputs in position shown in Figure 1, prevent and treat it and enter output waveguide 5, be positioned at the light path outside at described second place shutter 17, so that pass groove 15 and enter output waveguide 5 from the light signal of input waveguide 3 outputs.
If desired, at least one surface 140 of shutter 17, high-reflecting film can be set, preferably should the surface facing to the output end face 21 of input waveguide 3.This rete uses gold to form high reflecting surface 29 on surface 140, and this reflecting surface reflected light does not produce distortion (about 95% reflectivity), and for for example telecommunication, data communication and spectrum of use, in fact with Wavelength-independent.Term " end face " is meant the end of waveguide.
Continuation is with reference to figure 1, and the rear portion 28 of shutter 140 is the plated with gold film in a similar manner.Such rete can make switch 7 be operated in alternate mode, and adjusts the input signals that is transmitted to waveguide 3 from waveguide 5.
The height of shutter 17 is h
s, at that rate, be enough to block fully or reflected light.Will be understood that the height of shutter 17 should be greater than the thickness t of core 7 in order to block incident optical signal fully
cPreferably make the length l of shutter 17
sMinimum move to the required mobile distance of the second place from primary importance, so also reduced shutter 17 immigrations and shift out needed electric power in the light path, and improved the speed of switch 1 so that reduce shutter 17.And, in order to block incident optical signal fully, the length l of shutter 17
sShould be greater than the width w of core 7
cThe width w of shutter 17
cInfluence the insertion loss in the reflected light path.Specifically, thin shutter 17 can reduce the insertion loss.
It is wide that groove 15 can be approximately 8-40 μ m.It is wide that more preferably groove is approximately 12-20 μ m.
It is thick that shutter can be approximately 1-8 μ m, approximately 10-100 μ m height, approximately 10-100 μ m length.Shutter can be made by any enough hard and light material.Best, it is long that shutter can be approximately 20-70 μ m.More preferably, it is thick that shutter is approximately 2 μ m, approximately 30-40 μ m height, approximately 30-40 μ m length.Shutter is preferably also made by silicon, and as previously mentioned, preferably reflecting surface is made by gold (gold).
Continuation is with reference to figure 1, input waveguide 3 from light source 100 receiving optical signals (for example WDM, DWDM, UDWDM etc.) and core 7 along light path 2 propagating optical signals.Light signal by output end face 21 from input waveguide 3 outgoing and enter groove 15.Position according to shutter 17, light signal or pass that groove 15 is propagated and by input end face 21, enter output waveguide 5, perhaps arrive rete 29 and in this reflection or absorbed (if not having rete) by the surface 140 of shutter 17 and have only in the previous case, the core 7 that light signal will continue to propagate and be output waveguide 5 guides along the light path of this waveguide.
Continuation is with reference to figure 1, and the actuator 33 of on-off element 130 is controlled shutters 17 moving between first and second positions.(for example along be parallel to or perpendicular to the plane of the bottom surface 150 of groove 15) in fact can be in any direction gone up and moved to shutter 17, can prevent or allow light signal to enter output waveguide 5 as long as move.For example, Fig. 1 and 2 A has described first embodiment of on-off element 130, has shutter 17, and shutter 17 usually can be along the plane on the plane, bottom surface 150 that is parallel to groove 15 with usually by moving on the direction shown in the arrow A (Fig. 1).
Another embodiment is shown in Fig. 2 B, and wherein shutter 17 usually can be along perpendicular to the plane of the bottom surface 150 of groove 15 with usually by moving on the direction shown in the arrow B.The moving direction of shutter 17 is not a key, as long as shutter 17 can move in and out the light path 2 that limits between input waveguide 3 and the output waveguide 5.When being arranged in light path 2, light signal will or absorb by shutter 17 reflections, not enter in the output waveguide 5.When being positioned at light path 2 outsides, light signal will pass groove 15 and enter output waveguide 5.Actuator 133 mobile shutters 17 can respond the control signal that is input to actuator 133.This signal can be electricity, light, machinery or any other signal that in fact can cause actuator 133 responses.
The electric heating actuator is being known in the art, and therefore is not described in detail.In order to realize purpose of the present invention, should be appreciated that and to use any electric heating actuator that is enough to change its size according to the heat energy that is applied (will be understood that described heat energy can be produced by the electric energy that is applied).Using an advantage of electric heating actuator is that such actuator can be the enclosed type device, promptly keeps its position, and does not need to apply continuously energy.This means that in case switch to one of two positions, actuator will remain on this position, up to being switched to another position if suitably design.
Be applicable to that illustrative electric heating enclosed type actuator 233 of the present invention is shown in Figure 4.This actuator 233 comprises flexible member 34, at end points 35,35 ' be fixedly attached on the wall in chamber 37.The size in chamber 37 is enough to allow flexible member 34 to move.Also be provided with well heater 39, the position is very near flexible member 34.When starting well heater 39, flexible member 34 heating are also expanded.Because the end of element is at end points 35,35 ' fixing, thus element 34 can not expand simply so that end points outwards moves.On the contrary, will produce compression stress along the length direction of element.These stress increase up to reaching certain level, are enough to make the position change that causes element 34 to the position shown in the reference character D.Like this, when making well heater 39 heating (for example, utilizing the electric current by the contact chip (not shown)), flexible member 34 also will be heated and be forced between environment position (C represents with reference symbol) and the bending position (representing with reference character D) and move.In addition, flexible member 34 itself also can be a well heater.
Can also use electrostatic actuator to select mobile shutter 17.The advantage of electrostatic actuator comprises that operating speed is fast, energy loss is low and system's heating is minimum.It is shown in Figure 5 to be used for one type of electrostatic actuator 333 of the present invention.This actuator 333 comprise electrode 41,41 ', be positioned on the apparent surface of the piezoelectric element of making by a kind of material 43, when applying electric field in the above, described material go up to expand in one dimension direction (being width or length direction) at least.Therefore, by electrode 41,41 ' on apply electric signal, produce electric field, piezoelectric element 43 will expand on direction shown in the arrow E, cause shutter 17 to move.
May have only an actuator to be not enough to make shutter 17 to move needed amount.This can proofread and correct by the piezo-activator 433 with a plurality of zigzag tooths 45 is provided, and is as shown in Figure 6 all.These teeth are connected on the support 20 in the actuator 433, move to undesirable one side be used to prevent tooth 45.When on the electrode that electric signal is applied to actuator 433 during (not shown), as shown in Figure 6, end points 47 reflects the displacement of each tooth 45 in the total displacement amount on direction shown in the arrow F.Because the displacement of end points 47 be each tooth displacement and, so shutter 17 can be realized big amount of movement.Such electrostatic actuator 433 may need to apply big voltage, may be at the 100V order of magnitude, so that shutter 17 is realized desirable moving.Though described voltage magnitude height only needs very miniwatt, is negligible because flow through the electric current of electrostatic actuator 433.
Refer again to Fig. 1, each waveguide 3 and 5 has the dependent index of refraction of being determined by the material that constitutes waveguide core 7, and is definite by the material that constitutes waveguide core 7 to small part.Waveguide 3 and 5 dependent index of refraction roughly are equal to each other, and are approximately 1.45 for silicon dioxide platform numerical value.The medium 120 that is filled in the groove 15 also has the possibility dependent index of refraction different with waveguide index.For example, if medium is an air, its refractive index is 1.00.When the light signal refractive index that process is different in communication process, some characteristic of signal may be owing to different refractivity changes.For example, when the light signal refractive index that process is different in communication process, part optical signals (according to luminous power) may be reflected back into input waveguide along light path 2.Reflected signal may be propagated and get back to light source and cause flashing fixed.And when light signal propagated into the material with second different refractivity from having first refractive index materials, light signal may produce item and move.In some cases, this is desirable result.For optical switch, when along the different elements propagating optical signal that constitutes switch and when being switched, preferably the optical characteristics of light signal does not produce any marked change.
Do not wish consequence for what overcome that different refractivity produces, the present invention controls the distance between the input end face 21 of the output end face 21 of input waveguide 3 and output waveguide 5, so that the distance of lightray propagation is too short, so that refringence is not enough to the characteristic of light signal is produced any marked change.Therefore, even light signal passes completely through groove 15, (from input waveguide 3 to output waveguide 5), light signal not can owing to medium and waveguide separately refringence be subjected to any significant adverse effect.
Another aspect of the present invention compensation when between the material of light signal at different refractivity by the time optical echo that produces lose.For example refringence may cause part optical signals (according to luminous power) to be reflected and broadcast to passback along input waveguide light path 2.Reflected signal may reflect back into optical signal source unfriendly, and may make its instability.By with respect to corresponding waveguide light path inclination output end face 21 (for example seeing Fig. 1), any reflected signal is conducted to covering 9a or 9b, leaves waveguide core 7, thereby prevents that reflected light from disturbing by input waveguide 3 conduction and the light signal propagated in input waveguide 3.In one embodiment of the invention, output end face 21 can be arranged on about 5 ° to 10 ° angle, preferably is approximately 6 °-8 °, penetrates the light loss that is fed back in the waveguide (being optical echo loss (0RL)) for minimum so that make to return in waveguide/trench interface.Be under 6 ° the best-case, for departing from 0.2 μ m (for the groove of 5.0 μ m) to 1.7 μ m (for the groove of 35 μ m) scope of above-mentioned right alignment.
In another aspect of the present invention, can further make the optical echo loss minimum by coated with antireflection film (not shown) on Waveguide end face 21.Antireflecting film can be the single or multiple lift structure.Such rete can be reduced to the reflectivity on waveguide-trench interface below 1% from 3.5% in big wavelength coverage.The material that forms the antireflecting film rete is identical with material that is used for thin film technique and thickness with thickness.For example, the best individual layer antireflecting film rete between SiO 2 waveguide and the groove is 1.204 in the refractive index of 1.55 mum wavelengths, and thickness is 322nm.
In another embodiment, in conjunction with utilizing inclined end face and the antireflecting film can be so that optical echo loss is minimum.
Another aspect of the present invention relates to and is used for propagates light and forms the waveguide 3 of switch 1 and 5 shape.According to this aspect of the invention, shown in Fig. 1 and 7, conical neck 51 is set on one of waveguide 3 and 5 at least, so that duct width becomes small cross sections in the position 49 away from groove 15.Conical neck 51 helps reducing the optical diffraction in the groove.Just as non-limitative example, in the zone of groove 15, duct width can be in about 5-15 mu m range.This width position 49 a long way off can narrow in about 4-10 mu m range.Should be appreciated that these sizes are illustrative, other sizes also will fall in scope of the present invention and the essence.
When light signal conical neck 51 formation when waveguide 3 and 5 is propagated and guide by them seamlessly transit.The light of conical neck 51 restricted passage duct propagations, the waveguide optical principle according to known also greatly reduces transition loss, otherwise will produce transition loss between light is by the waveguide of different size the time.This is with the generation decay forms sharp contrast from a width waveguide abrupt transition to the different in width waveguide.
Concrete condition according to giving device can be used various taperings.
Can utilize the assembling of flip-chip manufacturing technology according to switch of the present invention, shown in Fig. 8 A and 8B.In the flip-chip manufacture process, waveguide 3 and 5 and groove 15 be formed on the chip, shutter 17 and actuator 33 are formed on another chip.Before assembling, two chiop directionals are toward each other and align so that the appropriate section of chip toward each other, engages then.
Perhaps, in another embodiment of the present invention, can form on-off element 130 and waveguide 3 and 5 formation optical switches 1 by monolithic.In such embodiments, utilize now known or back with the conductor etching technology and the process choice deposition of research and remove the different layers material, the different piece of optical switch 1 is formed in the single substrate 13.An advantage of monolithic manufacturing is need not aim at different elements before engaging two substrates.
Below with reference to Fig. 9 A and 9B, illustrate respectively that flint glass and monolithic form according to optical switch 1 of the present invention.Two figure also illustrate being connected of optical switch 1 and external optical element, such as for example optical fiber 67, so that waveguide core 7 is connected with fiber cores 65 optics.Each optical fiber 67 is supported by fluting element 69, and utilizes fiber cover 63 to be fixed on the position.On-off element below cloche 61 protections.Also can use the additive method fixed fiber, perhaps use other light paths.
A difference between two kinds of manufacturing technologies is to be positioned at the waveguide top for flint glass on-off element 130, and for the monolithic tagmeme in substrate 13.
Should be appreciated that the present invention is not limited to angle described here, material, shape and size, but by description predetermined angle, material, shape or the size of claims.
Therefore, though provide and described new feature of the present invention in the mode that is applied to most preferred embodiment, but should be appreciated that those of ordinary skill in the art can carry out various omissions, substitute and change the form and the details of disclosed invention, and do not break away from spirit of the present invention.Therefore, the present invention will be only limited to claims institute restricted portion.
Should be appreciated that claims are intended to cover all situations in all the general and concrete features of the present invention described herein and the scope of the invention,, we can say that all situations in the scope of the invention falls into claims according to the language narration.Particularly, the present invention should not be interpreted as being limited to size disclosed herein, ratio or layout.
Claims (20)
1. an optical switch is used to be switched on or switched off the photo-signal channel from light source, and this optical switch comprises:
First waveguide with dependent index of refraction, this first waveguide is along the common first waveguide light path direct light signal that is limited by the longitudinal axis of this first waveguide;
Second waveguide with dependent index of refraction, this second waveguide limits and the common second waveguide light path direct light signal coaxial with the longitudinal axis of described first waveguide along the common longitudinal axis by this second waveguide;
Described first and second waveguides are separated by groove, and this groove has the medium that possesses dependent index of refraction;
Be arranged in this groove and have the shutter on surface; And
Be connected to the actuator of this shutter, be used to make described shutter between the primary importance and the second place, to move, in this primary importance, pass described groove and propagate in described second waveguide from the light signal of described first waveguide, in this second place, arrive the surface of described shutter and be prevented from entering described second waveguide from the light signal of described first waveguide;
The dependent index of refraction of described first and second waveguides is substantially the same, and it is different with the dependent index of refraction of described medium, this first and second waveguide is separated a segment distance, and light signal is not subjected to described first and second waveguides and the different influence of medium refraction index on this distance.
2. optical switch according to claim 1, the separated distance of wherein said first and second waveguides is not more than about 8-40 μ m.
3. optical switch according to claim 2, the separated distance of wherein said first and second waveguides is not more than about 12-20 μ m.
4, optical switch according to claim 1, wherein said actuator are the electric heating actuators.
5. optical switch according to claim 1, wherein said actuator are one of them of piezo-activator or electrostatic actuator.
6. optical switch according to claim 1, wherein said groove has the degree of depth of substantial constant.
7. optical switch according to claim 1, wherein said groove has variable depth.
8. optical switch according to claim 1, wherein said first waveguide has the end face facing to described groove, light signal goes out to inject described groove by this end face from this first waveguide, described second waveguide has the end face facing to this groove, and light signal leaves described groove by this end face and enters described second waveguide.
9. optical switch according to claim 8, wherein at least one faces toward the waveguide light path inclination of the end face of described groove with respect to it.
10. optical switch according to claim 9, wherein at least one described end slope is between about 6 ° to 10 °.
11. the optical switch of stating according to Claim 8, each in wherein said first and second Waveguide end faces tilts with respect to corresponding waveguide light path.
12. optical switch according to claim 11, each in wherein said first and second Waveguide end faces with respect to the angle of corresponding waveguide axis between about 6 ° to 10 °.
13. optical switch according to claim 1, wherein said groove has the surface, and wherein makes described shutter move along described surface between described first and second positions along the straight line that is parallel to described surface usually.
14. optical switch according to claim 1, wherein said groove has the surface, and wherein makes described shutter along the straight line that usually intersects with described surface and mobile between described first and second positions.
15. optical switch according to claim 1, wherein said first waveguide has: first width; Than the second narrow width of this first width; Facing to the end face of described groove, light signal goes out to inject this groove by this end face from described first waveguide; And the conical transition zone that connects described first and second width, this first width is arranged on described end face.
16. according to the described optical switch of claim l, wherein said second waveguide has: first width; Than the second narrow width of this first width; Facing to the end face of described groove, light signal leaves this groove by this end face and enters described second waveguide; And the conical transition zone that connects described first and second width, this first width is arranged on described end face.
17. optical switch according to claim 1, the roomy 2 μ m that are about of wherein said shutter, length at about 20 μ m between the 70 μ m.
18. according to the described optical switch of claim l, wherein said actuator is the enclosed type device.
19. the method for a switching optical path in optical switch, this light signal is transfused to the input end face that waveguide guided and went out to inject from the end face of this input waveguide output waveguide, the light path coaxial that light path that described input waveguide limits and described output waveguide limit, in this input waveguide and the output waveguide, the two has mutually the same basically dependent index of refraction, described input waveguide and output waveguide are arranged on the both sides of groove, in this groove, be provided with medium, this medium has the dependent index of refraction different with the dependent index of refraction of waveguide, this method comprises the steps, promptly input waveguide and output waveguide are separated a segment distance, light signal is not subjected to the influence of medium and waveguide different refractivity on this distance.
20. method according to claim 19, wherein the width of groove and is determined the separately distance of input waveguide and output waveguide greatly between 12-20 μ m.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16714099P | 1999-11-23 | 1999-11-23 | |
| US60/167,140 | 1999-11-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1461420A true CN1461420A (en) | 2003-12-10 |
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ID=22606102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00818483A Pending CN1461420A (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP1232411A2 (en) |
| JP (1) | JP2003524801A (en) |
| KR (1) | KR20020064908A (en) |
| CN (1) | CN1461420A (en) |
| AU (1) | AU5514601A (en) |
| CA (1) | CA2392467A1 (en) |
| TW (1) | TW521163B (en) |
| WO (1) | WO2001048532A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115291325A (en) * | 2022-08-12 | 2022-11-04 | 福建中科晶创光电科技有限公司 | Manufacturing method of ridge waveguide |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7103245B2 (en) | 2000-07-10 | 2006-09-05 | Massachusetts Institute Of Technology | High density integrated optical chip |
| GB0203343D0 (en) | 2002-02-13 | 2002-03-27 | Alcatel Optronics Uk Ltd | Micro opto electro mechanical device |
| US6934427B2 (en) | 2002-03-12 | 2005-08-23 | Enablence Holdings Llc | High density integrated optical chip with low index difference waveguide functions |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5393371A (en) * | 1989-12-18 | 1995-02-28 | Litton Systems, Inc. | Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates |
| US5623564A (en) * | 1995-06-07 | 1997-04-22 | Lucent Technologies Inc. | Self-aligned mechanical optical switch |
| JP3488776B2 (en) * | 1996-02-09 | 2004-01-19 | Ｈｏｙａ株式会社 | Tapered waveguide and optical waveguide device using the same |
| WO1998012589A1 (en) * | 1996-09-20 | 1998-03-26 | Ascom Tech Ag | A fiber optic circuit switch and a process for its production |
| US6075239A (en) * | 1997-09-10 | 2000-06-13 | Lucent Technologies, Inc. | Article comprising a light-actuated micromechanical photonic switch |
| US5974207A (en) * | 1997-12-23 | 1999-10-26 | Lucent Technologies, Inc. | Article comprising a wavelength-selective add-drop multiplexer |
| US5960131A (en) * | 1998-02-04 | 1999-09-28 | Hewlett-Packard Company | Switching element having an expanding waveguide core |
| US5995688A (en) * | 1998-06-01 | 1999-11-30 | Lucent Technologies, Inc. | Micro-opto-electromechanical devices and method therefor |
-
2000
- 2000-11-22 CN CN00818483A patent/CN1461420A/en active Pending
- 2000-11-22 KR KR1020027006590A patent/KR20020064908A/en not_active Application Discontinuation
- 2000-11-22 CA CA002392467A patent/CA2392467A1/en not_active Abandoned
- 2000-11-22 TW TW089124834A patent/TW521163B/en not_active IP Right Cessation
- 2000-11-22 EP EP00993213A patent/EP1232411A2/en not_active Withdrawn
- 2000-11-22 AU AU55146/01A patent/AU5514601A/en not_active Abandoned
- 2000-11-22 WO PCT/US2000/032164 patent/WO2001048532A2/en not_active Application Discontinuation
- 2000-11-22 JP JP2001549126A patent/JP2003524801A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115291325A (en) * | 2022-08-12 | 2022-11-04 | 福建中科晶创光电科技有限公司 | Manufacturing method of ridge waveguide |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001048532A9 (en) | 2002-05-23 |
| WO2001048532A2 (en) | 2001-07-05 |
| EP1232411A2 (en) | 2002-08-21 |
| JP2003524801A (en) | 2003-08-19 |
| TW521163B (en) | 2003-02-21 |
| KR20020064908A (en) | 2002-08-10 |
| AU5514601A (en) | 2001-07-09 |
| CA2392467A1 (en) | 2001-07-05 |
| WO2001048532A3 (en) | 2002-04-11 |
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