WO2001048532A3 - Integrated planar optical waveguide and shutter - Google Patents
Integrated planar optical waveguide and shutter Download PDFInfo
- Publication number
- WO2001048532A3 WO2001048532A3 PCT/US2000/032164 US0032164W WO0148532A3 WO 2001048532 A3 WO2001048532 A3 WO 2001048532A3 US 0032164 W US0032164 W US 0032164W WO 0148532 A3 WO0148532 A3 WO 0148532A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- waveguide
- input waveguide
- output
- optical signal
- trench
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001549126A JP2003524801A (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
CA002392467A CA2392467A1 (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
AU55146/01A AU5514601A (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
EP00993213A EP1232411A2 (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
KR1020027006590A KR20020064908A (en) | 1999-11-23 | 2000-11-22 | Integrated Planar Optical Waveguide and Shutter |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16714099P | 1999-11-23 | 1999-11-23 | |
US60/167,140 | 1999-11-23 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2001048532A2 WO2001048532A2 (en) | 2001-07-05 |
WO2001048532A3 true WO2001048532A3 (en) | 2002-04-11 |
WO2001048532A9 WO2001048532A9 (en) | 2002-05-23 |
Family
ID=22606102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2000/032164 WO2001048532A2 (en) | 1999-11-23 | 2000-11-22 | Integrated planar optical waveguide and shutter |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1232411A2 (en) |
JP (1) | JP2003524801A (en) |
KR (1) | KR20020064908A (en) |
CN (1) | CN1461420A (en) |
AU (1) | AU5514601A (en) |
CA (1) | CA2392467A1 (en) |
TW (1) | TW521163B (en) |
WO (1) | WO2001048532A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7103245B2 (en) | 2000-07-10 | 2006-09-05 | Massachusetts Institute Of Technology | High density integrated optical chip |
GB0203343D0 (en) | 2002-02-13 | 2002-03-27 | Alcatel Optronics Uk Ltd | Micro opto electro mechanical device |
US6934427B2 (en) | 2002-03-12 | 2005-08-23 | Enablence Holdings Llc | High density integrated optical chip with low index difference waveguide functions |
CN115291325A (en) * | 2022-08-12 | 2022-11-04 | 福建中科晶创光电科技有限公司 | Manufacturing method of ridge waveguide |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5393371A (en) * | 1989-12-18 | 1995-02-28 | Litton Systems, Inc. | Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates |
EP0747745A1 (en) * | 1995-06-07 | 1996-12-11 | AT&T IPM Corp. | Self-aligned mechanical optical switch |
JPH09218317A (en) * | 1996-02-09 | 1997-08-19 | Hoya Corp | Tapered waveguide and optical waveguide element using the same |
WO1998012589A1 (en) * | 1996-09-20 | 1998-03-26 | Ascom Tech Ag | A fiber optic circuit switch and a process for its production |
EP0902538A2 (en) * | 1997-09-10 | 1999-03-17 | Lucent Technologies Inc. | Article comprising a light-actuated micromechanical photonic switch |
EP0926853A2 (en) * | 1997-12-23 | 1999-06-30 | Lucent Technologies Inc. | Article comprising a wavelength selective add-drop multiplexer |
EP0935149A2 (en) * | 1998-02-04 | 1999-08-11 | Hewlett-Packard Company | Switching element having an expanding waveguide core |
EP0961150A2 (en) * | 1998-06-01 | 1999-12-01 | Lucent Technologies Inc. | Micro-opto-electromechanical devices and method therefor |
-
2000
- 2000-11-22 TW TW089124834A patent/TW521163B/en not_active IP Right Cessation
- 2000-11-22 WO PCT/US2000/032164 patent/WO2001048532A2/en not_active Application Discontinuation
- 2000-11-22 AU AU55146/01A patent/AU5514601A/en not_active Abandoned
- 2000-11-22 EP EP00993213A patent/EP1232411A2/en not_active Withdrawn
- 2000-11-22 CA CA002392467A patent/CA2392467A1/en not_active Abandoned
- 2000-11-22 CN CN00818483A patent/CN1461420A/en active Pending
- 2000-11-22 JP JP2001549126A patent/JP2003524801A/en active Pending
- 2000-11-22 KR KR1020027006590A patent/KR20020064908A/en not_active Application Discontinuation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5393371A (en) * | 1989-12-18 | 1995-02-28 | Litton Systems, Inc. | Integrated optics chips and laser ablation methods for attachment of optical fibers thereto for LiNbO3 substrates |
EP0747745A1 (en) * | 1995-06-07 | 1996-12-11 | AT&T IPM Corp. | Self-aligned mechanical optical switch |
JPH09218317A (en) * | 1996-02-09 | 1997-08-19 | Hoya Corp | Tapered waveguide and optical waveguide element using the same |
WO1998012589A1 (en) * | 1996-09-20 | 1998-03-26 | Ascom Tech Ag | A fiber optic circuit switch and a process for its production |
EP0902538A2 (en) * | 1997-09-10 | 1999-03-17 | Lucent Technologies Inc. | Article comprising a light-actuated micromechanical photonic switch |
EP0926853A2 (en) * | 1997-12-23 | 1999-06-30 | Lucent Technologies Inc. | Article comprising a wavelength selective add-drop multiplexer |
EP0935149A2 (en) * | 1998-02-04 | 1999-08-11 | Hewlett-Packard Company | Switching element having an expanding waveguide core |
EP0961150A2 (en) * | 1998-06-01 | 1999-12-01 | Lucent Technologies Inc. | Micro-opto-electromechanical devices and method therefor |
Non-Patent Citations (5)
Title |
---|
BISHOP D J ET AL: "OPTICAL MEMS ANSWER HIGH-SPEED NETWORKING REQUIREMENTS", ELECTRONIC DESIGN, PENTON PUBLISHING, CLEVELAND, OH, US, vol. 47, no. 7, 5 April 1999 (1999-04-05), pages 85 - 86,88,90,92, XP000902756, ISSN: 0013-4872 * |
GILES C R ET AL: "A SILICON MEMS OPTICAL SWITCH ATTENUATOR AND ITS USE IN LIGHTWAVE SUBSYSTEMS", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 5, no. 1, January 1999 (1999-01-01), pages 18 - 25, XP000823383, ISSN: 1077-260X * |
KAZUO HOGARI ET AL: "ELECTROSTATICALLY DRIVEN MICROMECHANICAL 2 X 2 OPTICAL SWITCH", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, vol. 30, no. 10, 1 April 1991 (1991-04-01), pages 1253 - 1257, XP000202072, ISSN: 0003-6935 * |
MAGEL G A ET AL: "PHOSPHOSILICATE GLASS WAVEGUIDES FOR PHASED-ARRAY RADAR TIME DELAY", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 1703, 20 April 1992 (1992-04-20), pages 373 - 378, XP000199263 * |
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 12 25 December 1997 (1997-12-25) * |
Also Published As
Publication number | Publication date |
---|---|
WO2001048532A2 (en) | 2001-07-05 |
CA2392467A1 (en) | 2001-07-05 |
EP1232411A2 (en) | 2002-08-21 |
TW521163B (en) | 2003-02-21 |
WO2001048532A9 (en) | 2002-05-23 |
AU5514601A (en) | 2001-07-09 |
CN1461420A (en) | 2003-12-10 |
KR20020064908A (en) | 2002-08-10 |
JP2003524801A (en) | 2003-08-19 |
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