521163 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 發明領域： 本發明係有關於一種光切換器，用於在輸入故導 出波導之間容許或阻擔光的通行。 發明背景：521163 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Invention Description (Field of the Invention: The present invention relates to an optical switch for allowing or blocking the passage of light between input and output waveguides. Background of the invention :
光切換器為光學網路中的重要元件，其係用於判K 及控制光學訊號的傳遞路徑。在典型的情況下，伞义 π子訊 號（「光訊號」及「光學訊號」等用語係有意廣義地被角” 釋和指稱為可見光、紅外光與紫外光及其相似者）係由/ 於光學路徑上的波導來引導’而該光學路徑通常係由 導核心所界定。有時可说需要或必須阻擔光學訊號，使 其不會沿著波導行進，或者需要重導光學訊號，使其1 著不同的光學路徑行進，亦即通過不同的波導核心。去 光學訊號從一波導傳輸至另一波導時，該光學訊號可能 需要通過一介質，且該介質的折射率不同於該等波導的 折射率（該等波導通常具有大致相同的折射率）。吾人已 知’當光學訊號通過具有不同折射率的材料（介質）時， 此光學訊號的傳輸特徵即可能產生變化。例如，當一光 學訊號從具有弟一折射率的材料通過具有第二折射率的 材料時，由於通過個別材料的速度差異，以及至少部分 由於該等材料個別的折射率的緣故，使得該光學訊號可 能會引發非吾人所期望的相位偏移。此外，在兩介質之 界面上的極化場不相配可能會產生反射訊號。在此使用 的「介質」一詞係有意廣義地被解釋且包括真空在内。 第3頁 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公髮） < 裝--------訂-------w I P崎先閱讀背面^/、注意事項再填寫本頁) 521163 A7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 吾人不希望見到此類光學訊號的反射，因為 的反射昼會降低傳輸功率，因而造成傳輸訊號的 除此之外，被反射的訊號可能會返回光學源而造 的光返回損耗。光返回損耗應儘量加以避免，因 使光學訊號源不穩定。 若兩種材料（即介質）的折射率大致相等，則 訊號從其中一種材料通過另一種材料時，該光學 傳輸特彳玫將不會產生顯著的變化。折射率不相配 方案涉及一種折射率相配流體。在使用光切換器 系會在兩個以上的波導之間的溝槽充填一種材料 種材料的折射率與該等波導的折射率大致相等。 當光學訊號從一波導通過溝槽而到達另一波導時 經歷的折射率並不會有顯著的變化。 上述解決方案的例子之一可參照國際專利申 W0 00/25 1 60號。前揭專利申請案描述一種切換 在光學路徑之間（亦即波導之間）的腔室中使用對 流體’以維持切換器的光學性能。使用折射率相 時’將會引發新的問題，其中包括流體溢 換元件在流體中的阻力所造成的切換回應時卜 J 、、、泪 象。 此外，當光學訊號通過溝槽與波導之間時， 歷光學損耗。另一個必須考量的問題係在於，由 入/輸出面與溝槽的不連續性所造成的返回損耗。 言，當一光學訊號通過溝槽並沿著傳遞方向行進 第4頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 該訊號 4貝耗。 成所謂 為它會 當光學 訊號的 的解決 時，通 ’而該 因此， ，其所 請案第 器，其 準相配 配流體 由於切 減等現 其將經 波導輸 一般而 時，其 I'— —d J裝--------訂-------Mi I (請先閱讀背面之注咅？事項再填寫本頁) ^1163 ^1163 五、 經濟部智慧財產局員工消費合作社印製 A7 發明說明（） 將會遇到一波導之輸入面，並且由於該輸入 柯 < 物埋牿 的緣故（如反射率、垂直性、波導的材料等 導至女爸分 子讯號會有一部份反射而通過該溝槽（亦即 ^ rS 4 W傳遞太 叼相反的方向）。此種情況顯然並非吾人樂於見到者乃 在光學元件（裝置、電路及系統）的設計、 Ά L ι造和建 彝上’尺寸大小亦為持續考量的一環。很顯然地，五 希望能夠提供一種較小型的光學元件，以便. 人 ^ 、疋學袈置、 氣路及系統能夠被製造成更密集、電能消耗較心 ^ 乂 ’同時 運作更有效率。 目的及概诫： 本發明係針對一種光切換器，其具有一輸入波導及 一輸出波導，並由一溝槽加以分開，且配置於該溝槽。 圍。輸入波導與輸出波導分別具有由各自的核心所界定 的光學路徑·，該等光學路徑（及核心）大致彼此對準或2 幸由。溝槽當中具有介質’且該介質之折射率不同於該等 波導之折射率。由於輸入波導及輸出波導分開的距離並 不會影響光學訊號從輸入波導傳遞到輸出波導的傳輸特 性；因此，即使當光學訊號從輸入波導傳遞到輸出波導 時將經歷不同的折射率，其仍可避免發生背向反射。因 此，即使從輸入波導通過輸出波導的光學訊號必須完全 穿過溝槽，該光學訊號在波導之間必須行經的距離仍然 足夠小，而不會影響该訊號的光學傳輸特性。 本發明所包含的結構特徵、元件之組合以及零件之 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公釐） ii—·—^----裝--------訂------- (請先閱讀背面之注音P事項再填寫本頁) 521163 A7 B7 五、發明說明（ 發 本 時 同 示 例 以 。 加明 而指 容來 内圍 的 t* 露利 揭專 所請 此中 在由 由藉 藉將 將圍 ， 範 置之 己 月 S 咿 明 說 單 簡 式 圖 ， 元 示的 例似 於類 用表 僅代 且係 ’ 字 製 繪 例 比 照 依 必 未 其當 ， 圖 中視 」p_f 式種 圖多 在在 中 其 文 召Γ 日C 參 同 目 才 勺 白 中 件第第 構 所 明 發 本 據 根 係 其 圖 視 上 之 器 換 切 光 為 圖 第 3 ， 示 圖 顯 視 其 面 圖 剖 視 的 側 -2面 2 ·， 剖 線例的 直施 3 之實3 圖兩線 1 之直 第器之 著換圖 沿切1 為光第 圖示著 2B顯沿 其為 圖Optical switch is an important component in optical networks. It is used to determine K and control the transmission path of optical signals. Under typical circumstances, the umbrella π sub-signals (the terms such as "optical signal" and "optical signal" are intentionally broadly interpreted by angles "and referred to as visible light, infrared light, ultraviolet light, and the like) are due to / due to The optical path is guided by a waveguide, and the optical path is usually defined by the guiding core. Sometimes it can be said that it is necessary or necessary to block the optical signal so that it does not travel along the waveguide, or it is necessary to redirect the optical signal so that 1 travels along different optical paths, that is, through different waveguide cores. When an optical signal is transmitted from one waveguide to another, the optical signal may need to pass through a medium, and the refractive index of the medium is different from that of the waveguides. Refractive index (These waveguides usually have approximately the same refractive index.) I know that when an optical signal passes through a material (medium) with a different refractive index, the transmission characteristics of this optical signal may change. For example, when an optical signal When a signal passes from a material with a first refractive index to a material with a second refractive index, the speed of passing the individual materials is Because of the individual refractive index of these materials, the optical signal may cause a phase shift that is not expected by us. In addition, the mismatch of the polarized fields at the interface between the two media may generate a reflection signal. Used here The term "medium" is intentionally interpreted broadly and includes vacuum. Page 3 This paper size is applicable to China National Standard (CNS) A4 specifications (21〇X 297 issued) < Packing -------- Order ------- w IP Qi first read the back ^ / (Notes, please fill out this page again) 521163 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (I do not want to see reflections of such optical signals, because the reflection day will reduce the transmission power, which will cause transmission signals In addition, the reflected signal may return to the optical source and cause light return loss. The light return loss should be avoided as much as possible because the optical signal source is unstable. If the refractive index of the two materials (ie, the medium) is roughly Equal, when the signal passes from one material to the other, the optical transmission characteristics will not change significantly. The refractive index mismatch scheme involves a refractive index matching fluid. When using an optical switch system, The trenches between the above waveguides are filled with one material. The refractive index of the material is approximately equal to the refractive index of these waveguides. The refractive index experienced when an optical signal passes from one waveguide through the trench to another waveguide There will be no significant changes. One example of the above solution can be referred to International Patent Application No. WO 00/25 1 60. The previous patent application describes a cavity that switches between optical paths (that is, between waveguides) The use of the fluid in the chamber to maintain the optical performance of the switch. When using the refractive index phase, new problems will be caused, including the response time of the switching caused by the resistance of the fluid overflow element in the fluid. In addition, optical loss is experienced when an optical signal passes between the trench and the waveguide. Another issue that must be considered is the return loss caused by the discontinuity between the input / output plane and the trench. In other words, when An optical signal passes through the groove and travels in the direction of transmission. Page 4 The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). The signal consumes 4 ounces. It is said that it will be an optical signal. When it is resolved, it should be, therefore, its requested device, its quasi-matching fluid due to cuts, etc., will now be transmitted through the waveguide, and its I '-—d J installed ------ --Order ------- Mi I (Please read the note on the back? Matters before filling out this page) ^ 1163 ^ 1163 V. Printed by A7 of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, A7 Invention Description () You will encounter a waveguide input surface, and due to the input Ke's reasons (such as reflectivity, perpendicularity, waveguide material, etc. leading to the daughter ’s molecular signal will partially reflect and pass through the groove (that is, ^ rS 4 W is transmitted in the opposite direction) ). This situation is obviously not what I am happy to see, but the size, size, and construction of optical components (devices, circuits, and systems) are also a part of continuous consideration. Obviously, five possible to provide a desired optical element smaller so. Al ^, Cloth School Buddhist monk's robe set, pneumatic system can be manufactured and denser than the core power consumption ^ qe 'while operating more efficiently. Purpose and general remarks: The present invention is directed to an optical switch, which has an input waveguide and an output waveguide, is separated by a groove, and is disposed in the groove. Around. The input waveguide and the output waveguide each have an optical path defined by their respective cores, and these optical paths (and cores) are approximately aligned with each other or fortunately. There is a dielectric 'in the trench, and the refractive index of the dielectric is different from that of the waveguides. Because the separation distance between the input waveguide and the output waveguide does not affect the transmission characteristics of the optical signal from the input waveguide to the output waveguide; therefore, even when the optical signal will experience different refractive indices when passed from the input waveguide to the output waveguide, it can still Avoid back reflections. Therefore, even if the optical signal from the input waveguide through the output waveguide must completely pass through the trench, the distance that the optical signal must travel between the waveguides is still small enough without affecting the optical transmission characteristics of the signal. The structural features, the combination of components, and the paper size of the parts are applicable to the national standard (CNS) A4 specification (210 X 297 mm) ii — · — ^ ---- installation ------ --Order ------- (Please read the phonetic P on the back before completing this page) 521163 A7 B7 V. Description of the invention Luli Jiefang invited the borrower to borrow the money, Fan Zhizhi Jiyue S 咿 Ming said a simple diagram, the example shown is similar to the class table only and is based on the wording drawing example It is not appropriate, the p_f type of picture is often called in its text, Γ, C, and the same name. It is clear that the structure of the middleware is based on the structure of the picture. Figure 3, the figure shows the side view of the top view-2 surface 2 ·, the example of the section line of the direct application 3 of the real 3 Figure 2 of the two lines of the straight device of the book along the cut 1 is the light diagram Shows 2B display along it as a picture
及 A 做 係 其 圖 視 上 面 剖 的 例 施 實 ;一 導之 波器 的動 器致 換熱 切 電 光為 圖 4 第 做 係 其 圖 視 上 ; 面 分 剖 部的 一 例 的施 器實 換一 切之 光器 之動 明致 發電 本靜 為為 圖 5 第 係 其 圖 視 上 面 ; 立口 分的 部仞 一 施 的實 器 一 換另 切之 光器 之動 明致 發電 本靜 為為 圖 6 第 _[|丨秦裝--------訂-------Ί#· (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 的 件 部 形 的 ;導 分波 部之 一 圖 勺 1 白 器第 換示 切顯 光其 之 ， 明圖 發視 本上 為一 做為 圖 7 第 切 光 之 例 施 實 1 之 明 發 本 據 根 繪 描 ; 圖 分8B 部第 合及 1 圖 A 8 第 第And A are shown in the above example. The actuator-induced heat transfer of a guided wave device is shown in Figure 4. The figure is shown in Figure 4. The example of the surface section is replaced by everything. The movement of the light device is as shown in Figure 5. The top view of the figure is shown above; the part of the stand is replaced with a real device, and the movement of the light device is changed as shown in Figure 6. _ [| 丨 Qinzhuang -------- Order ------- Ί # · (Please read the precautions on the back before filling out this page) Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs The shape of the light guide is shown in Figure 1. One of the white-light devices is shown in Figure 1. The clear picture is shown as the first example in Figure 7. Drawing; Figure 8B Part 1 and Figure A 8 Part 1
件 !切 的第光 器及之 換圖明 A 發利 本別 據分 根係 示 件 顯 部 其構 ， 結 圖該 視， 側件 J®、邵 剖構 分結 部 的 為器 換 圖 ΒThe first part of the light source and the change of the picture are shown in Figure A. The profit is based on the root part of the display part of the structure, and the structure should be viewed.
6 6-P 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 521163 A7 B7 五、發明說明（） 發明詳細說明： 本發明係針對一種光切換器，其具有一輸入波導及 一輸出波導，並由一溝槽加以分開，且配置於該溝槽周 圍。輸入波導與輸出波導分別具有由各自的核心所界定 的光學路徑；該等光學路徑（及核心）大致彼此對準或同 軸。該等波導亦由溝槽加以分開，且溝槽當中具有介質， 該介質之折射率不同於該等波導之折射率。由於輸入波 導及輸出波導分開的距離並不會影響光學訊號從輸入波 導傳遞到輸出波導的傳輸特性；因此，即使當光學訊號 從輸入波導傳遞到輸出波導時將經歷不同的折射率，光 學訊號的傳輸特性仍不會受到影響。因此，即使從輸入 波導通過任一輸出波導的光學訊號必須完全穿過溝槽， 該光學訊號在波導之間必須行經的距離仍然足夠小，而 不會影響該訊號的光學傳輸特性。 換言之，雖然溝槽的大小可讓厚度有限的反射擋板 放置在溝槽的内部，但溝槽應儘可能地縮小，以減少在 溝槽間隙中產生光的繞射現象。 現在請參照圖式，首先參照第1圖，其描繪根據本 發明之一實施例所建構的光切換器1。本發明之光切換 器1最好係由以矽為主的半導體（如二氧化矽）以及對光 產生弱局限作用的波導所建構而成。其它半導體，如砷 化鎵（GaAs)與磷化錮（InP)等亦可使用。此外，以下所描 述的波導結構僅為本發明之非限定的實施例；其它的波 第8頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) ,#裝-------丨訂-------I'MW. 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（ 導幾何結構及架構亦不脫 m , 不脫離本發明的精神及範固。 弟1圖係描繪一種j】 、士，音 切換器。切換器1句人a 波導3及輸出波導5，並由 、 &輪入 -7Γ JL4L· /毒才曰1 5加以分開’且耐啦 〜溝槽周圍。第3圖顯 配置於 入冰，替， 則出波導5的剖面，其介4 波導3的範例。以下針 、為輸 輪Λ^ ， 討幸則出波導5的說明亦谪$ 糕入波導3。波導5係 丌遏用於 ., 上 自知的半導體製造技術戶斤漆 而成，在此將不詳細說明。 珩所建構 〇1 /皮導5含有沉積於下舍 9b的核心7，而下包覆屛 匕覆層 p, ^ A 曰 則沉積在一基材13上（u & 限疋的例子而言，基材 上（以非 J為矽基材或石英基材）。 上包覆層9a係沉積於枋 、 夂万、核心7的上方及周園 一埋入的波導結構。 _以形成 波導3、5可由多種不同的材料來製成，而只需 光學性質符合五人的— 、 田 口人的而求即可。雖然本發明之光切換器^ 最好係以二氧化矽為主的平A ^ J二q 丁口加以建構，但吓可使用其 它具有所需光學性質的半導體。例如，核心7可包含摻 雜鍺的矽’而上包覆層9a及下包覆層9b可包含熱二氧 化矽或硼磷矽玻璃（BPSG)。此種平台可提供光纖的良好 耦合以及寬廣的折射率反差（〇35%至11〇%)。以非限定 例子而吕’其它同樣可使用的平台包括si〇xNx、聚合物 或其組合物。此外’其它諸如磷化銦或砷化鎵等體系亦 可使用。 凊繼續參照第3圖，核心7之折射率反差的範圍約 在0.35%至0.70%之間，而其範圍最好約在0.35〇/〇至 〇· 5 5%之間，以容許高度耦合至輸出光纖。核心7可為矩 第9頁 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公釐） . - ^ ^ 裝--------訂---- Γ%先閱讀背面之注意事項再填寫本頁) # 163 2 56 6-P This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 521163 A7 B7 5. Description of the invention () Detailed description of the invention: This invention is aimed at An optical switch has an input waveguide and an output waveguide, is separated by a groove, and is arranged around the groove. The input waveguide and the output waveguide each have optical paths defined by their respective cores; these optical paths (and cores) are approximately aligned or coaxial with each other. The waveguides are also separated by trenches, and there is a dielectric in the trenches, the refractive index of the medium is different from the refractive index of the waveguides. Because the separation distance between the input waveguide and the output waveguide does not affect the transmission characteristics of the optical signal from the input waveguide to the output waveguide; therefore, even when the optical signal passes from the input waveguide to the output waveguide, it will experience different refractive indices. Transmission characteristics remain unaffected. Therefore, even if the optical signal from the input waveguide through any of the output waveguides must completely pass through the groove, the distance that the optical signal must travel between the waveguides is still small enough without affecting the optical transmission characteristics of the signal. In other words, although the size of the trench allows the reflective baffle with a limited thickness to be placed inside the trench, the trench should be as small as possible to reduce the phenomenon of light diffraction in the trench gap. Referring now to the drawings, first to FIG. 1, which depicts an optical switch 1 constructed according to an embodiment of the present invention. The optical switch 1 of the present invention is preferably constructed of a silicon-based semiconductor (such as silicon dioxide) and a waveguide that has a weak limitation on light. Other semiconductors, such as gallium arsenide (GaAs) and gadolinium phosphide (InP), can also be used. In addition, the waveguide structure described below is only a non-limiting embodiment of the present invention; other waves Page 8 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the back Please fill in this page again for the matters needing attention), # 装 ------- 丨 Order ------- I'MW. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, A7. The architecture also does not depart from m, and does not depart from the spirit and scope of the present invention. Figure 1 depicts a j, j, and tone switcher. The switcher 1 is a waveguide 3 and an output waveguide 5, and the & wheel Into -7Γ JL4L · / drugs are separated by 15 'and around the groove. Figure 3 shows the arrangement of the ice into the ice, instead, the section of the waveguide 5 is shown, which is an example of the 4 waveguide 3. The following pin In order to lose the wheel Λ ^, fortunately, the description of the waveguide 5 is also not included in the waveguide 3. The waveguide 5 series is used for the semiconductor manufacturing technology of self-known semiconductor manufacturing technology, which will not be described in detail here. The 珩 1 / piddle 5 contains a core 7 deposited on the lower shed 9b, and the lower cladding layer p, ^ A is deposited on Material 13 (u & limited example, on a substrate (non-J is a silicon substrate or quartz substrate). The upper cladding layer 9a is deposited on and around the core 7 and the core 7 The waveguide structure embedded in the garden. _ To form the waveguides 3 and 5 can be made of a variety of different materials, and only the optical properties of five people-and Taguchi people are required. Although the optical switch of the present invention ^ It is best to use flat silicon dioxide as the main material. ^ J diq Dingkou to construct, but it is possible to use other semiconductors with the required optical properties. For example, the core 7 may contain germanium-doped silicon. The cladding layer 9a and the lower cladding layer 9b may include thermal silicon dioxide or borophosphosilicate glass (BPSG). Such a platform can provide good coupling of the optical fiber and a wide refractive index contrast (035% to 11%). Non-limiting example, but Lu's other platforms that can also be used include SiOxNx, polymers or combinations thereof. In addition, other systems such as indium phosphide or gallium arsenide can also be used. 凊 Continue referring to Figure 3, Core 7 The refractive index contrast ranges from about 0.35% to 0.70%, and its range is preferably about 0.35 〇 / 〇 to 0.5 5%, to allow a high degree of coupling to the output fiber. Core 7 can be the moment page 9 This paper size applies Chinese National Standard (CNS) A4 specifications (21〇X 297 mm). -^ ^ Install -------- Order ---- Γ% Read the precautions on the back before filling in this page) # 163 2 5
五、發明說明（ 經濟部智慧財產局員工消費合作社印製 間進行光學訊號的切換，用以容許或阻擒 過。切換元件1 3 0包含@ y 1 ^唬的通 t於溝槽15當中的擋板17 及-藉由連結器1〇而連接於擒板17的致’以 讓擒板17能夠進行選擇性的移動，以下將切細說^便 本發明已考量到致動哭3 3沾々從 ^ 里判级勁印33的各種不同實施例， 的例子而耳，其包括電熱式、靜電式及壓電式等，、疋 將會針對各種致動器加以說明。 ’以下 擔板"最好係由重量輕且堅硬的材料所製成，諸力 珍、聚合物、金屬或介電材料。播板17可為薄膜擒板： 如上述之重量輕且堅硬的…7可致使進行快速移 動’以便在如第旧所示之第一位置與第二位置(未 之間回應電子訊號；在第—位置時，從輸入波導3輸出 的光學訊號將會被阻擋而無法進入輸出波導5，而在第 二位置時，擋板17會在光學路徑之外而使得從輸入波導 3輸出的光學訊號將會通過溝槽15並進入輸出波導^。 在薄膜擋板1 7可鍍上金屬膜29而用於阻擋光。因 此泫切換备與波長供關，亦即兩通訊窗波段（丨3 1 〇奈米 1 550奈米波段）皆被同一切換器所涵蓋。薄膜擋 板1 7並不需要非常平坦或朝向精確的垂直方向，只要能 夠阻擋波導3與波導5之間的光學路徑即可。 若有需要’可在擋板17的至少一表面14〇上鍍上高 反射塗層，表面140最好係面對輸入波導3之輸出面 2 1。使用金可在表面1 4 0上提供高反射面2 9，如此即可 使光產生反射而不會發生形變（約95%的反射），且對於 第11頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 丨^ ：—-^裝— {請先閱讀背面之注音？事項再填寫本頁〕 訂— #· 521163 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 如通信、'貝料通訊及光譜分析應用等而言，其“ 口 /、*乎與汝 長無關。「面」一詞係指波導的終端。 凊繼績參照第1圖’擔板14 0的背面2 8亦可 、、 、T以相同 的方式鍍上金的塗層。此種塗層可讓切換器7 "" 上逑的 另一種模式進行運作，並可調節從波導5行進到波導 之輸入訊號的傳輸。 可能發生的情況是’高度為&的擋板1 7足以將光 完全限制或反射。吾人當可得知，若要將内送的光學訊 號完全阻擋，擒板1 7的高度必須大於核心7的厚度t c。 擋板1 7的長度/ s最好縮小，以縮短擋板1 7從第一位置 移動到第二位置的距離，如此亦可降低將擋板1 7移入及 移出光學路徑所需的電量，並提昇切換器1的速率。再 次地’為了要完全阻擋内送的光學訊號，擋板1 7的長度 /s必須大於核心7的寬度。擋板17的寬度W會影響 反射光路徑中的插入損耗。更詳細而言，較薄的擋板1 7 可降低插入損耗。 溝槽的寬度約8至4 0微米。以較佳的情況而言，溝 槽的寬度約1 2至2 0微米。 擋板的厚度約為1至8微米，高度約1 0至1 〇 〇微米， 而長度約為1 〇至1 〇 〇微米。擋板可由足夠硬且重量輕的 材料所製成。以較佳的情況而言，擂板的長度約2 0至7 0 微米。以更佳的情況而言，擋板的厚度約2微米，高度 約3 0至4 0微米’而長度約為3 〇至4 0微米。如上所述， 擋板最好亦由矽所製成，較佳的反射面則可由金製成。 第12頁 本紙張尺錢㈣目公釐） I! ^ 裝--------訂--- C請先閱讀背面之注音？事項再填寫本頁) # 521163 經濟部智慧財產局員工消費合作社印製 Α7 Β7 五、發明說明（） 請繼續參照弟1圖’輸入波導3可接收來自光學訊 號源100的光學訊號（如分波多工（WDM)、高密度分波多 工（DWDM)及超高密度分波多工（UDWDM)等訊號），並將 該光學訊號導引到核心7且沿著光學路徑2。光學訊號 會經由輸出面2 1而離開輸入波導3，並進入溝槽1 5。依 擋板1 7的位置而定，該光學訊號將會通過溝槽1 5並經 由輸入面21而進入輸出波導5，或是照射到擋板17的 表面1 4 0的塗層2 9而被反射或被吸收（若無塗層）。只有 在前者情況下，該光學訊號才會繼續由輸出波導5的核 心7導引而沿著波導的光學路徑行進。 請繼續參照第1圖’切換元件1 3 0的致動器3 3係控 制擋板1 7在第一及第二位置之間的移動。基本上，擔板 1 7可沿著任何方向移動（例如沿著平行或垂直於溝槽1 5 之底面1 5 0的平面），只要移動的結果可使光學訊號能夠 被容許或阻擋進入輸出波導5即可。例如，第丨圖及第 2 A圖描繪切換元件1 3 0的第一實施例，該切換元件具有 一擋板丨7,該擔板可沿著大致平行於溝槽15之底面15〇 的平面移動，此方向係以箭號A來表示（第1圖）。 另一實施例係描缯·於第2B圖’其中擋板丨7係沿著 大致垂直於溝槽15之底面15〇的平面移動，此方向係以 箭號B來表示。擋P的移動方向並非關鍵，只要擋板 1 7能夠在由輸入波導3及輸出波導5所界定的光學路徑 2當中移入及移出即可。當處於光學路徑2中時，光學 訊號將會反射離開擔板17或被其吸收，而不會進入輸出 第13頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I.---：---T---Φ ^--------訂------- (請先閱讀背面之注咅？事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 521163 A7 B7 五、發明說明（） 波導5。當處於光學路徑2之外時’光學訊號將會穿過 溝槽1 5而進入輸出波導5。擋板17由致動器13 3所引 發的移動可利用回應輸入致動器1 3 3的控制訊號來達 成。此種訊號可為電子式、光學式、機械式，或任何其 它能夠使致動器1 3 3有所回應的訊號。 致動器1 3 3係藉由連結器1 1 〇而與擋板1 7接合，並 用於將擋板1 7移入及移出光學路徑2。雖然任何適當的 致動器皆可用於實施本發明’但使用電熱或機電型式的 致動器較佳。 電熱致動器係習知者，在此不再加以詳述。以本發 明而言，當可了解的是’任何電熱致動器皆可使用，只 要其足以回應熱能的加入而改變尺寸大小即可（如吾人 所了解，熱能可由電能產生）。使用電熱致動器的優點係 在於此種致動器可為閂鎖型式的元件；亦即，此種致動 器可維持其位置而不需持續加入能量。因此，閂鎖型式 的致動器將會維持在兩位置的其中之一，直到被切換至 另一位置為止。 第4圖係描繪一種適用於本發明的電熱閂鎖型致動 器2 3 3。致動器2 3 3包含可彎曲構件3 4，其緊密地固定 在空腔3 7之壁面的端點3 5、3 5，。空腔3 7的大小及形狀 可容許可彎曲構件3 4移動。此外，致動器2 3 3另包含加 熱器3 9，其位於較接近可彎曲構件3 4的位置。當加熱 器3 9被驅動時，可彎曲構件3 4會升溫及擴張。由於構 件的端點係緊密固定在端點3 5、3 5，，構件3 4不止會擴 第14貰 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I!秦裝I! —訂------- 1# (請先閱讀背面之注意事項再填寫本頁) 521163 Α7V. Description of the Invention (The Intellectual Property Bureau of the Ministry of Economic Affairs ’employee consumer cooperatives switch between optical signals to allow or block over. The switching element 1 3 0 contains @ y 1 ^ 的 通 t in the groove 15 The baffle 17 and-are connected to the pallet 17 by a connector 10 so that the pallet 17 can be selectively moved, which will be explained in detail below. The present invention has considered the actuation cry 3 3判 I will judge the various embodiments of the graded seal 33 from the examples, and the ears include electric, electrostatic, and piezoelectric, etc., and 疋 will be described for various actuators. 'The following stretcher & quot It is best to be made of light and hard materials, such as Lizhen, polymer, metal or dielectric materials. The seeding plate 17 can be a thin film pallet: as light and hard as above ... 7 can cause Quickly move 'in order to respond to the electronic signal between the first position and the second position as shown in the oldest; in the first position, the optical signal output from the input waveguide 3 will be blocked from entering the output waveguide 5 , And in the second position, the baffle 17 will be in the optical path The optical signal output from the input waveguide 3 will pass through the groove 15 and enter the output waveguide ^. A metal film 29 can be plated on the thin-film baffle 17 to block light. Therefore, the switching device is connected to the wavelength, and That is, both communication window bands (丨 3 1 0 nm 1 550 nm band) are covered by the same switch. The thin film baffle 17 does not need to be very flat or oriented in a precise vertical direction, as long as it can block the waveguide 3 and the waveguide The optical path between 5 is sufficient. If necessary, a highly reflective coating can be plated on at least one surface 14o of the baffle 17, preferably the surface 140 faces the output surface 21 of the input waveguide 3. Use gold A highly reflective surface 2 9 can be provided on the surface 1 4 0, so that the light can be reflected without distortion (about 95% of the reflection), and the Chinese national standard (CNS) A4 is applied to the paper size on page 11. Specifications (210 X 297 mm) 丨 ^ ： ——- ^ 装 — {Please read the phonetic on the back? Matters before filling out this page] Order— # · 521163 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Descriptions (e.g. communications, 'shell communications and spectral analysis In terms of applications, its "mouth /, * has nothing to do with Ru Chang. The term" face "refers to the terminal of the waveguide. 凊 Refer to Figure 1 for the back of the stretcher 14 0 2 8,,, T A gold-plated coating is applied in the same way. This coating allows another mode of switch 7 " " to operate and adjusts the transmission of the input signal from waveguide 5 to the waveguide. It may happen The situation is that the baffle 17 with a height of & is sufficient to completely limit or reflect the light. I should know that to completely block the incoming optical signal, the height of the pallet 17 must be greater than the thickness of the core 7 tc. The length of the baffle 17 is preferably reduced to shorten the distance of the baffle 17 from the first position to the second position. This can also reduce the power required to move the baffle 17 into and out of the optical path. , And increase the speed of switch 1. Again, in order to completely block the incoming optical signal, the length / s of the baffle 17 must be greater than the width of the core 7. The width W of the baffle 17 affects the insertion loss in the reflected light path. In more detail, the thinner bezel 17 reduces the insertion loss. The width of the trench is about 8 to 40 microns. In a preferred case, the width of the trench is about 12 to 20 microns. The baffle has a thickness of about 1 to 8 micrometers, a height of about 10 to 1000 micrometers, and a length of about 10 to 100 micrometers. The bezel can be made of a sufficiently hard and lightweight material. In a preferred case, the length of the grate plate is about 20 to 70 microns. More preferably, the baffle has a thickness of about 2 microns, a height of about 30 to 40 microns' and a length of about 30 to 40 microns. As mentioned above, the baffle is also preferably made of silicon, and the preferred reflecting surface is made of gold. P.12 The paper ruler is a few centimeters in millimeters) I! ^ Install -------- Order --- C Please read the phonetic notation on the back? Please fill in this page again for details) # 521163 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention () Please continue to refer to Figure 1 'Input waveguide 3 can receive optical signals from optical signal source 100 (such as sub-wave multi- (WDM), high-density demultiplexing (DWDM), and ultra-high-density demultiplexing (UDWDM) signals, etc., and directs the optical signal to the core 7 and along the optical path 2. The optical signal leaves the input waveguide 3 through the output surface 21 and enters the trench 15. Depending on the position of the baffle 17, the optical signal will pass through the groove 15 and enter the output waveguide 5 through the input surface 21, or be coated on the surface 1 4 0 of the baffle 17 and be coated by 9 Reflected or absorbed (if uncoated). Only in the former case will the optical signal continue to be guided by the core 7 of the output waveguide 5 and travel along the optical path of the waveguide. Please refer to FIG. 1 again. The actuator 3 3 of the switching element 1 30 controls the movement of the shutter 17 between the first and second positions. Basically, the stretcher 17 can move in any direction (for example, along a plane that is parallel or perpendicular to the bottom surface 15 of the groove 15), as long as the result of the movement allows the optical signal to be allowed or blocked into the output waveguide 5 is fine. For example, FIG. 丨 and FIG. 2A depict a first embodiment of the switching element 130. The switching element has a baffle. The stretcher can be along a plane substantially parallel to the bottom surface 15 of the groove 15. Movement, this direction is indicated by arrow A (Figure 1). Another embodiment is described in FIG. 2B, where the baffle plate 7 is moved along a plane substantially perpendicular to the bottom surface 15 of the groove 15, and this direction is indicated by an arrow B. The moving direction of the stop P is not critical, as long as the baffle 17 can move in and out of the optical path 2 defined by the input waveguide 3 and the output waveguide 5. When in the optical path 2, the optical signal will reflect off the absorption plate 17 or be absorbed by it, but will not enter the output. Page 13 This paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I .---: --- T --- Φ ^ -------- Order ------- (Please read the note on the back? Matters before filling out this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the employee consumer cooperative 521163 A7 B7 V. Description of the invention () Bird 5. When outside the optical path 2, the 'optical signal will pass through the trench 15 and enter the output waveguide 5. The movement of the shutter 17 by the actuator 13 3 can be achieved by using a control signal of the actuator 1 3 3 in response to the input. This signal can be electronic, optical, mechanical, or any other signal that enables the actuator 1 3 3 to respond. The actuator 1 3 3 is engaged with the baffle plate 17 by a connector 1 10 and is used to move the baffle plate 17 into and out of the optical path 2. Although any suitable actuator can be used to implement the present invention ', it is preferred to use an electrothermal or electromechanical type actuator. The electrothermal actuator is a known person and will not be described in detail here. For the purposes of the present invention, it is understood that 'any electrothermal actuator can be used as long as it is sufficient to change the size in response to the addition of thermal energy (as I understand, thermal energy can be generated by electrical energy). The advantage of using an electrothermal actuator is that it can be a latch-type element; that is, it can maintain its position without the need to continuously add energy. Therefore, the latch-type actuator will remain in one of two positions until it is switched to the other position. Fig. 4 depicts an electric latch type actuator 2 3 3 suitable for use in the present invention. The actuator 2 3 3 includes a flexible member 34 which is tightly fixed to the end points 35, 35 of the wall surface of the cavity 37. The size and shape of the cavity 37 allows the flexible member 34 to move. In addition, the actuator 2 3 3 further includes a heater 39 which is located closer to the bendable member 34. When the heater 39 is driven, the bendable member 34 rises and expands. Because the end point of the component is tightly fixed at the end points 3, 5, 3, the component 3 4 will not only expand the 14th. This paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) I! —Order ------- 1 # (Please read the notes on the back before filling this page) 521163 Α7
經濟部智慧財產局員工消費合作社印製 張而使端點向外偏移，壓喻處 ,,u^r ^ I、'菊應力亦將會沿著構件的長度 屋生。此等應力會增加，直到 ^ . q其達到足以致使構件34 變其位置的程度為止，即如圖 - 口琥予兀d所表示者。因此， 菖加熱器3 9被驅動進行加哉去 逆仃加热時（籍由通過接點的電流 圖示）），可彎曲構件34亦將會 ^ ^ 曰开/皿，並致使在鄰近位置 (圖號元C所表示者）與彎曲 > 、 1置（圖唬子tlD所表示者、 之間移動。在另一種情況下 Γ 構件34本身可為加熱器。 靜電致動器亦可用於撰摆a 、選擇性地移動擋板1 7。靜電致 動器的優點包括高操作速率、低 卞 他月匕f涓耗以及較少的系 統升溫。第5圖係描繪一種；高田、人1々 "種通用於本發明之靜電致動器 333。致動器3 3 3包含位於壓電元件43相反兩邊的電極 41、41’’用於製造該等電極的材料可在電場作用於電極 41及41’時，至少沿著一方向（即寬度或長度方向）擴張。 壓電元件43因而可被致使沿著箭號E所指示的方向擴 張，並造成擋板1 7移動。 僅使用單一致動為可能不足以讓調諧元件丨5達到 所需的移動f。如第6圖所示，此情況可透過提供具有 若干叉錯指狀物4 5的壓電致動器4 3 3而得以調整。此等 指狀物係連接於致動器43 3當中的支撐物2〇，該支撐物 係用於避免指狀物4 5的一邊產生移動。當電子訊號作用 於第ό圖所示之致動器433的電極時（未圖示），端點47 在箭號F方向的總位移將會反映出所有指狀物* 5所累積 的位移。由於端點47的位移為各個指狀物之位移的總 和，因此擋板1 7可達到可觀的移動量。此種靜電致動器 第15頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1'—：—^—-HP* 裝·-------訂------- (請先閱讀背面之注意事項再填寫本頁} 521163 A7 B7 五、發明說明（ 在另一實施例中，光返回損耗可使用傾斜界面入 反射塗層之組合而加以縮減。 元 本發明之另一技術態樣係有關用於在切換 器 或導出光的波導3、5的形狀。根據本發明在此方面 術態樣，以及如第1圖及第7圖所示，錐形頸區 域 導入 之技 而在 少位於波導3、5其中之一，使得波導寬度逐漸變小 距離溝槽15遠端位置49變成較小的截面。錐 7項區域 5 1有助於減少溝槽中的光繞射現象。以非限定 〜日]例予而 言，在溝槽15當中，波導的寬度約5至15微米。> * 度在遠端位置4 9逐漸縮小的範圍約4至1 〇微米 * 當可了解，該等尺寸大小僅用以舉例說明，亦 、 、 彳史用其 它的尺寸而不脫離本發明的精神及範圍。 當光學机號由波導3、5導引而行進時，錐米 域 5 1係提供平順的傳輸功能。錐形頸區域5 1係以 學的原理而將通過波導的光限制住，並且在光通過< 大小的波導時’錐形頸區域5 1可顯著降低傳輪損耗同 照之下，當光在不同寬度的波導之間進行迅 時，即可能發生衰減現象。 波導光 同 對 速的傳輪 (請先閱讀背面之注意事項再填寫本頁) -^--------訂---- «· 經濟部智慧財產局員工消費合作社印製 各種錐形長度及錐形比例皆可運用，並取決於安裝 時的特別考量而定。 本發明之光切換器1可整體形成或利用反裝晶片 (flip-chip)製造技術加以組合，後者概括描繪於第8a圖 及第8B圖。在反裝晶片製造技術中，波導器3、5及溝 槽15係利用習知的半導體製程技術（如沉積、敍刻等）而 第18頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公璧） 521163 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（） 整體形成於—晶片t，^；执 卵片上而擒板17及致動器33則形成於 另卵片。在組裝 < 珂，兩晶片係彼此面對並加以調準， 以使得該等晶片的對應部分彼此相對，然後再將晶片加 以接合。 在另一種情況下，在本發明之另一實施例中，光切 換器1可以整體的方式形成切換元件130與波導3、5。 在此實她例巾’光切換器j的各個部分係以習知或此後 毛展的半導體蝕刻技術及製程，並以透過選擇性沉積及 移除不同的材料層而形成於單一基材13上。以整體方式 製造的優點之一係在於其不需要在兩基材進行接合之前 配準不同的元件。 接著請參照第9A圖及第9B圖，其分別描繪以反裝 晶片及整體方式所形成的本發明之光切換器1。兩圖式 亦描繪光切換器1與外部光學元件（如光纖67)的連接， 使得波導核心7以光學的方式連接於光纖核心65。各個 光纖6 7係由溝狀構件6 9支撐，並利用光纖蓋6 3加以固 定。玻璃蓋61係用於保護下方的切換元件。此外，亦可 利用其它方式來固定光纖，或利用其它光學途徑。 兩種製造技術的差異之一係在於切換元件1 3 0的位 置：在反裝晶片技術中，切換元件係在波導之上；在整 體製造技術中，切換元件係在基材1 3當中。 應了解的是，本發明不應被限定於在此所描述的角 度、材料、形狀或大小，而角度、材料、形狀或大小應 以申請專利範圍所陳述者為準。 第19頁 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐） 1·---^---^----裝--------訂-------1 >^w (請先閱讀背面之注意事項再填寫本頁) 521163 A7 B7 五、發明說明（） 因此，雖然本發明已藉由其較佳實施例而加以例示 及詳細說明其新穎技術特徵，當可了解的是，熟習此項 技術者可針對本發明進行形式或内容上的刪除、替換及 修改，而不脫離本發明之精神。因此，本發明之範圍僅 由所附之申請專利範圍所界定。 此外，應了解的是，下列申請專利範圍意指包含在 此所描述之本發明的所有通用及特定的特徵，且本發明 之範圍取決於語"I*的所有陳述可視為在該範圍之内。特 別是，本發明不應受限於在此所揭露的尺寸大小、比例 或排列方式。 (請先閱讀背面之注意事項再填寫本頁) 裝 #· 經濟部智慧財產局員工消費合作社印製 第20頁 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed Zhang and shifted the endpoints outward. At the analogy, u ^ r ^ I and 'Ju' stress will also grow along the length of the component. These stresses will increase until ^ .q reaches a level sufficient to cause the component 34 to change its position, as shown in Fig. Therefore, when the 菖 heater 39 is driven to perform reverse heating (by the current shown through the contact), the flexible member 34 will also be opened / dish and caused to be in an adjacent position ( The figure number element C) and the bending >, 1 set (the figure represents t1D, move between. In another case, the Γ member 34 itself can be a heater. An electrostatic actuator can also be used to write Pendulum a and selectively move the baffle plate 17. The advantages of electrostatic actuators include high operating speed, low energy consumption, and less system warming. Figure 5 depicts one; Takada, Ren 1々 " A kind of electrostatic actuator 333 commonly used in the present invention. The actuator 3 3 3 includes electrodes 41, 41 on opposite sides of the piezoelectric element 43. The materials used to make these electrodes can be applied to the electrode 41 in an electric field. And 41 ', expand in at least one direction (ie, width or length). The piezoelectric element 43 can thus be caused to expand in the direction indicated by arrow E and cause the baffle 17 to move. Use only a single uniform The behavior may not be enough to make the tuning element 5 reach the required movement f. As shown in Fig. 6, this situation can be adjusted by providing a piezoelectric actuator 4 3 3 having a plurality of cross-finger fingers 45. These fingers are connected to a support in the actuator 43 3 20, the support is used to avoid the movement of one side of the finger 4 5. When the electronic signal is applied to the electrode of the actuator 433 shown in the figure (not shown), the end point 47 is on the arrow The total displacement in the F direction will reflect the accumulated displacement of all fingers * 5. Since the displacement of the end point 47 is the sum of the displacements of the individual fingers, the baffle 17 can reach a considerable amount of movement. Electrostatic actuator page 15 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 1'—: — ^ —- HP * Packing · ------- Order ---- --- (Please read the notes on the back before filling out this page} 521163 A7 B7 V. Description of the invention (In another embodiment, the light return loss can be reduced by using a combination of inclined interface and reflective coating. Another aspect of the invention relates to the shape of the waveguides 3, 5 for switching light in or out of the switch. According to the invention, As shown in Figures 1 and 7, the introduction of the tapered neck region is located in one of the waveguides 3 and 5, so that the width of the waveguide becomes gradually smaller and the distance 49 from the distal end of the trench 15 becomes smaller. The cross section of the cone 7 items 51 1 helps to reduce the light diffraction phenomenon in the trench. For example, the width of the waveguide in the trench 15 is about 5 to 15 micrometers. ≫ * Degrees are gradually reduced in the range of 4 to about 10 microns at the distal position. * As can be understood, these dimensions are for illustration only, and other dimensions are used without departing from the spirit and scope of the present invention. range. When the optical number is guided by the waveguides 3 and 5, the cone-shaped domain 5 1 series provides smooth transmission functions. The conical neck region 5 1 confines the light passing through the waveguide on the principle of learning, and the conical neck region 5 1 can significantly reduce the transmission loss when the light passes through a waveguide having a size of < Attenuation may occur between waveguides of different widths. Flywheel with the same speed (please read the precautions on the back before filling this page)-^ -------- Order ---- «· Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs printed various cones Both shape length and taper ratio can be used, and it depends on special considerations during installation. The optical switch 1 of the present invention can be formed integrally or combined using flip-chip manufacturing technology, the latter of which is generally depicted in Figs. 8a and 8B. In the flip-chip manufacturing technology, the waveguides 3, 5 and the trench 15 are based on the conventional semiconductor process technology (such as deposition, engraving, etc.). (210 X 297 gong) 521163 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 V. Description of the invention () The whole is formed on the wafer t, ^; the spatula 17 and the actuator 33 are formed on the other egg sheet. During assembly < Ke, the two wafers are facing each other and aligned so that the corresponding parts of the wafers are opposite each other, and then the wafers are bonded. In another case, in another embodiment of the present invention, the optical switch 1 may form the switching element 130 and the waveguides 3 and 5 in an integrated manner. Here is an example where each part of the optical switch j is formed on a single substrate 13 by the conventional or later hair development semiconductor etching technology and process, and by selectively depositing and removing different material layers. . One of the advantages of manufacturing in one piece is that it does not require registering different components before the two substrates are joined. Next, please refer to FIG. 9A and FIG. 9B, which respectively depict the optical switch 1 of the present invention, which is formed by flip-chip mounting and integrated mode. The two figures also depict the connection of the optical switch 1 to an external optical element (such as the optical fiber 67), so that the waveguide core 7 is optically connected to the optical fiber core 65. Each optical fiber 67 is supported by a groove-shaped member 69, and is fixed by an optical fiber cover 63. The glass cover 61 is used to protect the switching element below. In addition, other methods can be used to fix the optical fiber, or use other optical approaches. One of the differences between the two manufacturing technologies is the position of the switching element 130. In the flip-chip technology, the switching element is above the waveguide; in the overall manufacturing technology, the switching element is within the substrate 13. It should be understood that the invention should not be limited to the angles, materials, shapes or sizes described herein, but the angles, materials, shapes or sizes should be those stated in the scope of the patent application. Page 19 This paper size applies to China National Standard (CNS) A4 (21 × 297 mm) 1 · --- ^ --- ^ ---- installation -------- order --- ---- 1 > ^ w (Please read the notes on the back before filling this page) 521163 A7 B7 V. Description of the invention () Therefore, although the present invention has been exemplified and explained in detail by its preferred embodiment For its novel technical features, it can be understood that those skilled in the art can delete, replace and modify the form or content of the present invention without departing from the spirit of the present invention. Therefore, the scope of the present invention is only defined by the scope of the attached patent application. In addition, it should be understood that the following patent application scope is intended to encompass all common and specific features of the invention described herein, and that the scope of the invention depends on all statements of " I * which may be considered within the scope of this scope Inside. In particular, the present invention should not be limited to the size, proportion or arrangement disclosed herein. (Please read the precautions on the back before filling this page.) 装 # · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Page 20 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)