CN1447031A - Device and method enabling noise minimization of blower filter - Google Patents

Device and method enabling noise minimization of blower filter Download PDF

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Publication number
CN1447031A
CN1447031A CN02122661.XA CN02122661A CN1447031A CN 1447031 A CN1447031 A CN 1447031A CN 02122661 A CN02122661 A CN 02122661A CN 1447031 A CN1447031 A CN 1447031A
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CN
China
Prior art keywords
filter unit
fan filter
air
guide plate
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN02122661.XA
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Chinese (zh)
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CN100436836C (en
Inventor
李荣唐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anglo German Singapore Ltd.
Original Assignee
COORDINATION INDUSTRIES Ltd
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Filing date
Publication date
Application filed by COORDINATION INDUSTRIES Ltd filed Critical COORDINATION INDUSTRIES Ltd
Priority claimed from PCT/SG1997/000040 external-priority patent/WO1999011984A1/en
Publication of CN1447031A publication Critical patent/CN1447031A/en
Application granted granted Critical
Publication of CN100436836C publication Critical patent/CN100436836C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08Centrifugal pumps
    • F04D17/16Centrifugal pumps for displacing without appreciable compression
    • F04D17/165Axial entry and discharge
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/42Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4226Fan casings
    • F04D29/4246Fan casings comprising more than one outlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/663Sound attenuation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24Means for preventing or suppressing noise
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/007Ventilation with forced flow

Abstract

The present invention is a system of geometric guides and baffles for directing and diffusing the external air drawn from a fan blower before distributing the flow evenly to the outlet of a fain filter unit. This arrangement not only reduces the turbulence within a fan filter unit but also maintains the particle count of air drawn through the same system. Furthermore, the present invention is implemented in dimensions substantially similar to that of the fan blower. As such, the present invention minimises noise of a fan filter unit even in confined clean room facility.

Description

Make the apparatus and method of the noise minimization of fan filter unit
Technical field
The present invention relates to make device and a kind of method of the noise minimization that air flow arrangement produces.Particularly, the present invention relates to the system of the noise that fan filter unit produced of a kind of minimizing in the indoor cleaning facility.
Technical background
Usually, for guaranteeing the quality of output, modern production and testing apparatus will be controlled at the airborne particulate of circuit in the indoor cleaning facility.No matter be wafer dies, LD laser vision disc or disk drive device all need effective fan filter unit, so not only can make the content of middle particulate in clean room keep acceptable level, and the air that the workman breathed also can circulate.
Yet this powerful fan filter unit can produce great noise.As everyone knows, can along conduit or in this fan filter unit the lining reduce the noise that this blower wheel is produced with soundproof material.Yet through certain hour, thereby fiber on this soundproof material or particulate will leave from its surface and can pollute this indoor cleaning facility.
In the enclosed space such as the wafer manufacture factory of a multi-story, the problem relevant with the content of particulate in the indoor cleaning facility will be more serious.For enclosed space, the present invention estimates that the height of ceiling board will be less than 3 meters.Because the height in space is lower, the noise that produces from fan filter unit will be remarkable especially.
Summary of the invention
An object of the present invention is to make the noise minimization that fan filter unit produces and do not increase the fraction of particle of the indoor cleaning facility that links to each other with this device.
Another object of the present invention is the noise minimization that fan filter unit is produced, and needn't remove existing blower wheel in the indoor cleaning facility of sealing, and, preferably without any traditional soundproof material.
The present invention is the system of the guide way and the guide plate of a geometry, in order to the outside air that guided before the outlet that reposefully air-flow is distributed to fan filter unit and diffusion is sucked by blower wheel.This device not only can reduce turbulent flow and the minimise loss of pressure in the fan filter unit, also can keep the uniformity of air-distribution when discharging from same system.Moreover, the present invention who is realized, its size is close substantially with the size of this blower wheel.Therefore, even under the low situation of the heights of ceilings of clean room, the noise minimization that the present invention also can make fan filter unit produce.
According to a kind of fan filter unit provided by the invention, it comprises that at least one is placed in a blower wheel on the substrate, a top casing that is connected on this substrate and has an air inlet openings, with be connected to the side casings that this top casing is used to seal this fan filter unit, described side casings also comprises an exhaust outlet, this blower is used for sucking air from air inlet openings, and from the exhaust outlet exhausting air; It is characterized in that this fan filter unit has: be placed on the described substrate in this fan filter unit and round described blower wheel in order to receive at least one pair of curved guide way (shaped guides) of the gas of discharging from here; Whereby, for the fan filter unit that does not have curved guide way, this device can guide flowing of air with the turbulent flow that reduces, thereby can make the noise that sends from this fan filter unit be reduced to minimum and need not adopt traditional soundproof material, and the pollutant from this soundproof material can be inducted in the air stream by fan filter unit at passage with air streams contact.
This curved guide way can constitute a pair of air-flow path, and it has a neck, and the width of air-flow path obviously reduces to produce unidirectional basically air-flow in each air-flow path herein.
At least one pair of can be set is arranged in the fan filter unit and at the diffusion guide plate of an opening of described a pair of curved guide way, is used for spreading from here this air-flow.At least one pair of also can be set be arranged in the described fan filter unit and the guiding guide plate of contiguous described diffusion guide plate, be used to guide the air-flow under described substrate.At last, can further include " V " shape guide plate that is arranged on the substrate downside, in order to the air-flow that distributes equably, not compare with the fan filter unit of V-arrangement guide plate with having curved guide way, diffusion guide plate, guiding guide plate, flowing of air is directed with the turbulent flow that reduces.
This curved guide way can be connected with described substrate with a plurality of clips, and should diffusion guide plate can and the surface of described side casings with the angle setting between 30 ° and 60 °, preferably 45 ° of this angles
This guiding guide plate can be basic that tilt or be straight basically than lower limb.
This curved guide plate can be the S shape with crooked end vis-a-vis substantially.Preferably the radius of curvature of an end of each curved guide plate greater than the radius of curvature of the other end to form a flat S shape at this end.
This diffusion guide plate can be a porous, and this guiding guide plate can be curved.
Description of drawings
Fig. 1 is one and shows that the present invention is assembled into the right side perspective exploded view (not display filter) of the part of a fan filter unit.
Fig. 2 is the positive view of the filter of a system that shows among the present invention how much guide waies and guide plate in the lump and a fan filter unit.
Fig. 3 is the top plan view of curved guide way of the present invention and curved guide plate in the A-A section that is presented at emphatically among Fig. 2.
Fig. 4 is the view of another embodiment corresponding to Fig. 3.
Fig. 5 demonstrates the position of measurement gas flow velocity in this fan filter unit.
Fig. 6 is a chart, is used for relatively having and do not have the average gas flow velocity of the fan filter unit of apparatus of the present invention in whole blower wheel power supply (with a hertz metering) scope.
Fig. 7 is a chart, is used for relatively having and do not have the noise level of the fan filter unit of apparatus of the present invention, and it measures place is 1 meter position under the outlet port of this device.
Embodiment
Be used for making a kind of device and a kind of method of the noise minimization that fan filter unit produces to be described below.In the following description, in order thoroughly to understand the present invention, a lot of concrete parts such as guide way and guide plate etc. have been proposed.To other example, for make the present invention clear for the purpose of, then will not show with the well-known component such as conduit that link to each other with this fan filter unit such as the motor that is used for this blower wheel.
Fig. 1 is one and shows that the present invention is assembled into the right side perspective exploded view (not display filter) of the part of a fan filter unit 10.This fan filter unit comprises 12, one top casing of a blower wheel 16 and the corresponding side casings 22 that is installed on the substrate 14.This blower wheel is bearing on this substrate by a fixed block 20 on this substrate bottom surface.Do not demonstrate among the figure but neededly for the normal operation of this fan filter unit 10 be one and be installed in and be used to this blower wheel that the motor of rotating power is provided below this blower wheel 12.
This fan filter unit sucks air outside from as shown in Figure 2 an air intlet 18 independently, and by exhaust port 19 with its discharge.A filter 32 of installing at this exhaust port place is in order to remove bigger particulate or dirt.When the circulation or during circulated gases, the noise that this device produced is troublesome but effectively in the indoor cleaning facility of this fan filter unit.Habitually practise in the industry at the inner surface lining of this blower filter with such as sponge, the PVC foam, or soundproof material such as glass fibre makes this fan filter unit sound insulation.Unfortunately, through after a while, such soundproof material is easy to pollute the indoor cleaning facility, because its surperficial particulate is removed and is imported in the air-flow that flows through this fan filter unit.Under the ignorant situation of operator in this clean room, this fan filter unit has become pollution sources.In the meantime, from the indoor cleaning facility such as wafer dies, products such as CD or CD drive are with contaminated.
Again with reference to figure 1, be arranged on the key position of this fan filter unit according to how much guide waies of the present invention, make the noise minimization of generation from this device and can contaminated stream do not cross the air of this device.Guide plate also can be provided with along the path of air-flow.The present invention includes and be installed in this blower wheel curved guide way 24 of at least one cover on every side.One cover diffusion guide plate 26 and guiding guide plate 28 can be set, and in order to diffusion and the guiding gas from this curved guide way 24, if desired, diffusion guide plate 26 can be a porous; And guiding guide plate 28 can be curved.Can also be provided with in order to gas be distributed to equably this filter 20 and be positioned at a V-arrangement guide plate 30 below this blower wheel.
Fig. 3 is the top view plane view of curved guide way 24 of the present invention in the A-A section that is presented at emphatically among Fig. 2.This curved guide way 24 is shaped as the gas and the guiding gas that can receive discharge from this blower wheel 12 (shown in the single-point circle) and overlaps diffusion guide plate 26 with the more turbulent flow of minimum number to one.The most handy metallic material manufacturing of this curved guide way, the bounced-back-role of this material should make setter be easy to this guide way is enclosed between a lot of clips 36 that are provided with on this substrate 14.This guide way 24 can be a serpentine as shown in Figure 3, and relative curve end 19,21 is arranged; Or 21 radius of curvature is more greatly a flat serpentine in the end as shown in Figure 4.The embodiment of Fig. 4 provides more open flows feature, but provides less control.
This diffusion guide plate 26 is between 30 ° and 60 ° with respect to the angle of side casings, preferably 45 °.Each diffusion guide plate 26 can be sheet metal and porose array.In a preferred form of the invention, the diameter in this hole is 3.3 millimeters, and the interval in hole approximately is 50% of this size.This diffusion guide plate 26 is arranged to above-mentioned given angle with the air-flow of diffusion from this curved guide way 24.Each diffusion guide plate 26 is the sheet metal of above-mentioned form preferably, porose (not shown) on it.There is an interval 31 its back.Some air-flows contact and are deflected down with the sheet metal of guide plate 26.Some air-flows will be by its hole.The big young pathbreaker decision in hole when air during by these holes whether with slack-off.Because the interval 31 of guide plate 26 back, will increase to the air pressure in the hole of strong part is the same at air-flow in the air pressure in 31 at interval.This will force air is not the hole of so strong guide plate 26 by air-flow.Soundproof material or other materials can be arranged at interval reducing in 31, thereby reduce noise at the turbulent flow in 31 at interval.
Lower limb near diffusion guide plate 26 also is provided with guiding guide plate 28 under it, be used for guiding again the air-flow below the substrate.Guiding guide plate 28 can be straight, or is curved as shown in the figure.Though guiding guide plate 28 has the front edge of straight line, the present invention recommends the straight front edge 35 that tilts, shown in Fig. 2,3,4.
In Fig. 3, the setting of curved guide plate 24, diffusion guide plate 26 and guiding guide plate 28 is to be symmetrical about 180 ° running shaft being positioned at blower 12 centers.
This V-arrangement guide plate 30 is arranged on below the fixed block of this blower wheel 12, before by the exhaust outlet 19 of this fan filter unit 10 gas being discharged, in order to the air-flow that distributes equably.
Just as can be seen, two curved guide plates 24 form two air-flow paths 23, shift to diffusion guide plate 26 by their air.This air-flow path 23 has a narrow neck 25, and it is formed by the curved section of guide plate 24, and this curved section forms a projection 33, and it is significantly near (promptly less at interval) impeller assembly 12.25 pairs of air-flows of this neck produce a contraction, thereby form a high-pressure air district at this neck 25.Air will be from high-pressure spray to low pressure, thereby this forces all air to enter this two passages 23, so that make air stream have very strong one-way.This will reduce turbulent flow significantly.So, noise reduces significantly, and the efficient of air stream increases.In Fig. 4, the outlet of passage 23 is bigger, thereby less to the direction control of whole air-flow, but has increased the efficient of air-flow.
Fig. 6 is a chart, is used for (measuring with hertz) in the scope that blower wheel is adjusted the average gas flow velocity that relatively has and do not have the fan filter unit of device of the present invention.The mean velocity of air-flow be measure at 15 diverse locations of this fan filter unit and be shown among Fig. 5 respectively.With reference to figure 6 as can be known, has the mean velocity of fan filter unit of apparatus of the present invention than there not being the higher and more steady of apparatus of the present invention.Obviously the pressure loss of fan filter unit that has apparatus of the present invention is than there not being the little of apparatus of the present invention.Therefore, as time goes by, can obtain sizable energy saving.
Last and the most important thing is that Fig. 7 is a chart, be used for relatively having and do not have the noise level of the fan filter unit of apparatus of the present invention, it measures place is 1 meter position under the outlet port of this device.When 1 meter position measurement below fan filter unit, the noise ratio when the invention enables this fan filter unit operation does not have device of the present invention much smaller.
Though specifically described the present invention referring to figs. 1 to 7, and emphasis is device and a kind of method of the noise minimization that produces from fan filter unit of introduce making, but should be understood that these figure use for graphical illustration should not limit the present invention with it.In addition, be clear that very that apparatus and method of the present invention can be used in a lot of applications that need to reduce noise.Can expect that under the prerequisite that does not break away from described the spirit and scope of the present invention, those of ordinary skill in the art can make a lot of changes and improvements.

Claims (15)

1. fan filter unit, comprise that at least one is arranged on a blower wheel on the substrate, a top casing that is connected on the described substrate and has an air inlet openings, with be connected to described top casing in order to seal the side casings of described fan filter unit, described side casings also has an exhaust outlet, this blower is used for sucking air from air inlet openings, and from the exhaust outlet exhausting air; It is characterized in that: described fan filter unit has:
Be arranged on the described substrate in the described fan filter unit and round described blower wheel in order to receive at least one pair of curved guide way of the gas of discharging from here;
Whereby, for the fan filter unit that does not have curved guide way, described device can guide flowing of air with the turbulent flow that reduces, thereby traditional soundproof material that can make the noise that sends from described fan filter unit be reduced to minimum and not need to contact, and the pollutant from this soundproof material can be inducted in the air stream by fan filter unit with airflow path.
2. fan filter unit as claimed in claim 1, it is characterized in that: described curved guide way is a pair of air-flow path with neck, width at this neck place air-flow path obviously reduces, to produce unidirectional substantially air-flow in each air-flow path.
3. fan filter unit as claimed in claim 1 or 2, it is characterized in that: be provided with at least one pair of and be arranged in the described blower filtrating equipment and, be used for spreading this air-flow from described curved guide way at the diffusion guide plate in an outlet port of described curved guide way.
4. as each described fan filter unit in the claim 1 to 3, it is characterized in that: be provided with at least one pair of and be arranged in the described blower filtrating equipment and the guiding guide plate of contiguous described diffusion guide plate, be used to guide the air-flow below the described substrate.
5. fan filter unit as claimed in claim 4 also comprises the V-arrangement guide plate of the downside that at least one is arranged on described substrate being used for distributing equably air-flow; Flowing of this air for the fan filter unit that does not have curved guide way, a pair of diffusion guide plate, a pair of guiding guide plate and a V-arrangement guide plate, can be directed with the turbulent flow that reduces.
6. as each described fan filter unit in the claim 1 to 5, it is characterized in that: described curved guide way is connected with described substrate with a plurality of clips.
7. as the fan filter unit described in the claim 1 to 6 each, it is characterized in that: described diffusion guide plate is arranged to angle between 30 ° and 60 ° with respect to the surface of described side casings.
8. fan filter unit as claimed in claim 7 is characterized in that: described angle is 45 °.
9. fan filter unit as claimed in claim 5 is characterized in that: the tilting basically than low edge of described guiding guide plate.
10. fan filter unit as claimed in claim 5 is characterized in that: the described guiding guide plate between the corner be straight line basically than low edge.
11. the fan filter unit as described in the claim 1 to 10 each is characterized in that: this curved guide way is the S shape that relative crooked end is arranged basically.
12. fan filter unit as claimed in claim 11 is characterized in that: the radius of curvature of an end of each curved guide way is greater than the radius of curvature of the other end, to form a flat S shape at this end.
13. as the fan filter unit described in the claim 3 to 5 each, it is characterized in that: this diffusion guide plate is a porous.
14. as the fan filter unit described in the claim 4 to 5 each, it is characterized in that: this guiding guide plate is curved.
15. fan filter unit, comprise a substrate, a top casing that is connected on the described substrate and has an air inlet openings, with one be connected to described top casing in order to seal the side casings of described fan filter unit, described side casings has an exhaust outlet, blower wheel by this base plate supports is used for sucking outside air from air inlet openings, and from the exhaust outlet exhausting air; It is characterized in that: described fan filter unit has:
A. in described fan filter unit and around at least one pair of how much guide way of described blower wheel, in order to receiving the gas of discharging from blower wheel, and with air through the amount of turbulence directed outwards outlet of air-flow path with minimum; Whereby,
B. compare with the fan filter unit that does not have how much guide waies, this air stream has the turbulent flow of minimizing; With
C. can make the traditional soundproof material that makes a noise and be reduced to minimum and do not need to contact from described fan filter unit, and the pollutant from this soundproof material can be inducted in the air stream by fan filter unit with airflow path.
CNB02122661XA 1997-09-03 1997-09-03 Device and method enabling noise minimization of blower filter Expired - Lifetime CN100436836C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SG1997/000040 WO1999011984A1 (en) 1997-09-03 1997-09-03 A method and apparatus for minimising noise from fan filter unit
SGPCT/SG97/00040 1997-09-03

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN98106068A Division CN1102206C (en) 1997-09-03 1998-03-02 Method and apparatus for minimising noise from fan filter unit

Publications (2)

Publication Number Publication Date
CN1447031A true CN1447031A (en) 2003-10-08
CN100436836C CN100436836C (en) 2008-11-26

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Application Number Title Priority Date Filing Date
CNB02122661XA Expired - Lifetime CN100436836C (en) 1997-09-03 1997-09-03 Device and method enabling noise minimization of blower filter

Country Status (7)

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EP (1) EP1378669A1 (en)
CN (1) CN100436836C (en)
CA (1) CA2302177A1 (en)
DE (1) DE69727322T2 (en)
HK (1) HK1019629A1 (en)
MY (1) MY111326A (en)
TW (1) TW375760B (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI487558B (en) * 2012-08-03 2015-06-11 Ping Fa Hung Foam-type snow machine improved
CN107795514A (en) * 2017-11-29 2018-03-13 莱克电气股份有限公司 A kind of centrifugal blower with blade wheel structure
CN108386889A (en) * 2018-05-31 2018-08-10 广东美的厨房电器制造有限公司 Range hood
CN112166255A (en) * 2018-05-31 2021-01-01 英国质谱公司 Desk type time-of-flight mass spectrometer
CN113685373A (en) * 2020-05-19 2021-11-23 宁波方太厨具有限公司 Method for selecting air inlet ring of fan system
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11848187B2 (en) 2018-05-31 2023-12-19 Micromass Uk Limited Mass spectrometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073563A1 (en) * 2004-01-30 2005-08-11 Farmer Controls Plc Electric fan
US9752794B2 (en) 2013-12-23 2017-09-05 3M Innovative Properties Company Curvilinear sound absorber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3065684A (en) * 1958-05-22 1962-11-27 Cortland N O'day Air distributor
US4023472A (en) * 1974-06-04 1977-05-17 Ciba-Geigy Corporation Apparatus for producing a laminar flow
US4560395A (en) * 1984-04-17 1985-12-24 Environmental Air Control, Inc. Compact blower and filter assemblies for use in clean air environments
DE3438710C2 (en) * 1984-10-23 1986-11-27 Wilhelm Gebhardt Gmbh, 7112 Waldenburg Roof fan
US6030186A (en) * 1997-09-03 2000-02-29 Kyodo-Allied Industries Pte, Ltd. Method and apparatus for minimizing noise from fan filter unit

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI487558B (en) * 2012-08-03 2015-06-11 Ping Fa Hung Foam-type snow machine improved
CN107795514A (en) * 2017-11-29 2018-03-13 莱克电气股份有限公司 A kind of centrifugal blower with blade wheel structure
CN107795514B (en) * 2017-11-29 2024-03-26 莱克电气股份有限公司 Centrifugal fan with impeller structure
CN112166255B (en) * 2018-05-31 2022-11-25 英国质谱公司 Desk type time-of-flight mass spectrometer
CN112166255A (en) * 2018-05-31 2021-01-01 英国质谱公司 Desk type time-of-flight mass spectrometer
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11848187B2 (en) 2018-05-31 2023-12-19 Micromass Uk Limited Mass spectrometer
US11879470B2 (en) 2018-05-31 2024-01-23 Micromass Uk Limited Bench-top time of flight mass spectrometer
CN108386889B (en) * 2018-05-31 2024-03-08 广东美的厨房电器制造有限公司 Fume exhaust fan
CN108386889A (en) * 2018-05-31 2018-08-10 广东美的厨房电器制造有限公司 Range hood
CN113685373A (en) * 2020-05-19 2021-11-23 宁波方太厨具有限公司 Method for selecting air inlet ring of fan system
CN113685373B (en) * 2020-05-19 2022-11-01 宁波方太厨具有限公司 Method for selecting air inlet ring of fan system

Also Published As

Publication number Publication date
TW375760B (en) 1999-12-01
MY111326A (en) 1999-11-30
DE69727322T2 (en) 2004-11-25
CA2302177A1 (en) 1999-03-11
HK1019629A1 (en) 2000-02-18
CN100436836C (en) 2008-11-26
DE69727322D1 (en) 2004-02-26
EP1378669A1 (en) 2004-01-07

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