CN1424571A - Method for measuring refractive index of transparent material and interferometer thereof - Google Patents

Method for measuring refractive index of transparent material and interferometer thereof Download PDF

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CN1424571A
CN1424571A CN 02159100 CN02159100A CN1424571A CN 1424571 A CN1424571 A CN 1424571A CN 02159100 CN02159100 CN 02159100 CN 02159100 A CN02159100 A CN 02159100A CN 1424571 A CN1424571 A CN 1424571A
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refractive index
interference
sample
mirror
interferometer
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CN1186620C (en
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黄国松
李顺光
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

一种透明材料折射率的测量方法及其干涉测量仪，主要是将待测材料制成两块对称棱镜组成的组合平板样品，并将其置于马赫－陈德尔干涉仪一臂上，产生两路干涉，一路是马赫－陈德尔干涉，另一路是组合平板样品的两通光面形成的等厚干涉，组合平板样品中的一块固定，另一块沿固定块平移的同时，精密测定移动过程中两路干涉条纹的变化量m1和m2；利用n＝1/[1－2(m1/m2)]计算待测材料的折射率。本发明的优点是：折射率测量精度达10－5～10－6；在测试过程中避免使用测角仪；在样品移动过程中，光束方向不产生变化，不会破坏干涉；折射率只与条纹变化量有关；影响测量精度的因素减少；所测折射率上限达2.7，可测量从紫外到红外的材料折射率。

Figure 02159100

A method for measuring the refractive index of a transparent material and an interferometer thereof are provided. The method mainly comprises the following steps: making a composite flat sample composed of two symmetrical prisms from the material to be measured, and placing the composite flat sample on one arm of a Mach-Zendel interferometer to generate two interference paths, one of which is Mach-Zendel interference and the other is equal thickness interference formed by two light passing surfaces of the composite flat sample. One of the composite flat samples is fixed, and the other is translated along the fixed block, while the changes m1 and m2 of the two interference fringes during the movement are precisely measured; and the refractive index of the material to be measured is calculated using n=1/[1-2( m1 / m2 )]. The advantages of the invention are: the refractive index measurement accuracy reaches 10-5 to 10-6 ; the use of a goniometer is avoided during the test process; during the sample movement process, the direction of the light beam does not change and the interference is not destroyed; the refractive index is only related to the change amount of the fringes; the factors affecting the measurement accuracy are reduced; the upper limit of the measured refractive index reaches 2.7, and the refractive index of materials from ultraviolet to infrared can be measured.

Figure 02159100

Description

Refractive index of transparent materials measuring method and interference measuring instrument thereof
Technical field:
The present invention is relevant with transparent material, particularly a kind of measuring method of refractive index of transparent materials and interference measuring instrument thereof.
Background technology:
The classical instrument of measuring refractive index of transparent materials has Abbe refractometer, V prismatic refraction rate instrument and minimum deviation horn cupping refractometer.Abbe refractometer measuring accuracy is not high, is up to 10 -4, V prismatic refraction rate instrument measuring accuracy is up to 10 -5, more than two kinds of devices owing to the index-matching fluid reason not the energy measurement refractive index be higher than 1.8 material, minimum deviation horn cupping refractometer measuring accuracy height to 10 -6, but need precision up to 2 " angular instrument.Publication number is the refractivity measuring apparatus using interference method that 1077533 patent proposes, and is to adopt improved Michelson interferometer, and by rotating sample to predetermined angular, the recorded fringe variable quantity obtains the detected materials refractive index.This analyzer measuring accuracy can reach 10 -5, but there is following shortcoming in this analyzer:
1. this analyzer needs to rotate sample in test process, and this needs the high precision angle-measuring instrument just can reach its measuring accuracy.
2. this analyzer changes optical path difference by rotating sample, need rotate very that wide-angle just can obtain a large amount of striped variable quantities, to reach its measuring accuracy.But cause that beam deflection is very big, may destroy its interference.
3. to influence the factor of measuring accuracy a lot of for this analyzer, and for example the error of thickness of sample, optical source wavelength, rotational angle and striped variable quantity etc. all can influence the measuring accuracy of this analyzer.
Summary of the invention:
The technical problem to be solved in the present invention is to overcome the difficulty of above-mentioned prior art aspect the measurement refractive index of transparent materials, and a kind of measuring method of refractive index of transparent materials is provided, and on this basis, provides a kind of refractive index of transparent materials interference measuring instrument.
Technical solution of the present invention is as follows:
Refractive index of transparent materials measuring method of the present invention comprises the following steps:
1). detected materials is made the assembled flat sample that two symmetric prisms are formed;
2). this assembled flat sample is placed on mach-zehnder interferometer one arm, produce two-way and interfere, the one tunnel is that mach-zehnder is interfered, and another road is the equal thickness interference that assembled flat sample two logical light faces form;
3). in the assembled flat sample one is fixing, and another piece is along the assigned direction translation time, two-way change of interference fringes amount m in the micrometric measurement moving process 1And m 2
4). utilize following formula to calculate the refractive index of detected materials: n = 1 1 - 2 ( m 1 / m 2 )
The refractive index of transparent materials interference measuring instrument of setting up according to said method comprises LASER Light Source, collimation lens, first semi-transparent semi-reflecting lens, first photelectric receiver, first diaphragm, first polaroid, sample stage, first total reflective mirror, data acquisition system (DAS), computing machine, second photelectric receiver, second diaphragm, second semi-transparent semi-reflecting lens, second total reflective mirror, its position relation is as follows: the laser that LASER Light Source is sent becomes directional light through collimation lens, incide first semi-transparent semi-reflecting lens, be divided into two-beam, wherein transmitted light beam reflexes to second semi-transparent semi-reflecting lens by the assembled flat sample through first total reflective mirror; Folded light beam reflexes on second semi-transparent semi-reflecting lens through second total reflective mirror, forms mach-zehnder and interferes, and the interference fringe via hole diameter incides on the photelectric receiver less than the diaphragm of fringe-width; When transmitted light beam incides on the assembled flat sample, two logical light faces at this sample produce reflection respectively, the folded light beam on two sides produces equal thickness interference through first semi-transparent semi-reflecting lens, interference fringe is by first diaphragm of aperture less than fringe-width, incide on first photelectric receiver, the interference fringe variable quantity that first photelectric receiver and second photelectric receiver receive carries out data processing through data acquisition system (DAS) input computing machine.
Between first semi-transparent semi-reflecting lens and assembled flat sample, also be provided with first polaroid, between first semi-transparent semi-reflecting lens and second total reflective mirror, also be provided with second polaroid, to adapt to the needs that utilize the refractive index of transparent materials interference measuring instrument to measure the anisotropic transparent material.
Described assembled flat sample is the two identical samples that formed along the diagonal line cutting by a rectangle sample, and with the whole reprocessing of two tangent planes polishing back glue one-tenth, heat then sample separation is formed, and require flatness＜0.5 of two logical light faces, smooth finish PIII, the depth of parallelism after the combination≤10 ".Its lap is with No. 320 sand milling light, all rib chamfering 0.5mm.
The refractive index of transparent materials interference measuring instrument can be divided into following four parts as its formation of complete surveying instrument:
First module: the LASER Light Source of configuration multiwavelength laser;
Second module: comprise interferometer combined, the combined sample frame of above-mentioned light path and drive the stepper motor of assembled flat sample motion;
Three module: the data acquisition system (DAS) of photelectric receiver, low noise direct current amplifier, data acquisition and Flame Image Process;
Four module: computing machine and process control thereof, data acquisition, Flame Image Process and Data Management Analysis software
Technique effect of the present invention is as follows:
1. apparatus of the present invention refractive index of transparent materials measuring accuracy reaches 10 -5～10 -6
The present invention in test process without angular instrument;
3. in the sample moving process, beam direction does not change, and can not destroy interference;
4. refractive index is only relevant with the striped variable quantity, and the factor that influences measuring accuracy is less;
5. survey the refractive index upper limit and reach 2.7, can measure from ultraviolet to infrared material refractive index.
Below in conjunction with accompanying drawing invention is described further.
Description of drawings:
The light channel structure synoptic diagram of Fig. 1-interference measuring instrument of the present invention.
Fig. 2-sample processing synoptic diagram of the present invention.
Embodiment:
See also Fig. 1 earlier, Fig. 1 is a refractive index of transparent materials interference measuring instrument light channel structure synoptic diagram of the present invention.As seen from the figure, refractive index of transparent materials interference measuring instrument of the present invention comprises LASER Light Source 1, collimation lens 2, first semi-transparent semi-reflecting lens, 3, the first photelectric receivers, 4, the first diaphragms 5, first polaroid 6, sample 7, the first total reflective mirrors 8, data acquisition system (DAS) 9, computing machine 10, interpretation software 11, second photelectric receiver, 12, the second diaphragms, 13, the second semi-transparent semi-reflecting lens 14, second total reflective mirror, 15, the second polaroids 16.The laser beam that LASER Light Source 1 produces, behind collimation lens 2, become directional light, incide first semi-transparent semi-reflecting lens 3, be divided into two-beam, wherein transmitted light beam reflexes to second semi-transparent semi-reflecting lens 14 by testing sample 7 through first total reflective mirror 8, folded light beam reflexes on second semi-transparent semi-reflecting lens 14 through second total reflective mirror 15, the formation mach-zehnder is interfered, and the interference fringe via hole diameter incides on second photelectric receiver 12 less than second diaphragm 13 of fringe-width; When transmitted light beam incides on the sample 7, two logical light faces at sample 7 produce reflection respectively, and the folded light beam on two sides produces equal thickness interference through first semi-transparent semi-reflecting lens 3, interference fringe incides on first photelectric receiver 4 by first diaphragm 5 of aperture less than width of fringe.During measurement, along one 701 in the slow mobile example of the direction of arrow in the sample among Fig. 17, another piece 702 of fixed sample, cause that the interference fringe that two-way is interfered changes, photelectric receiver 4 and 12 receives the striped variable quantity, through data acquisition system (DAS) 9, input computing machine 10 obtains striped variable quantity m 1And m 2, adopt interpretation software 11, according to formula n = 1 1 - 2 ( m 1 / m 2 ) Can calculate the refractive index of testing sample, wherein n is the material refractive index, m 1And m 2It is the striped variable quantity that two-way is interfered.
When measuring anisotropic material, add first polaroid 6 and second polaroid 16 respectively at two arms of interference measuring instrument.
Utilize the different wavelength of laser light source, can measure material from ultraviolet near infrared refractive index, thereby obtain chromatic dispersion and Abel's number of material.Assembled flat sample 7 process technologies require as follows:
1, as shown in Figure 2 rectangle sample is cut into identical two 701,702 along diagonal line, and become integral body to process by Fig. 2 technical requirement again two tangent planes polishing back optical cement; Heat then and make sample separation.
2, two logical light surface evenness N＜0.5, smooth finish PIII, the combination back depth of parallelism≤10 ";
3, No. 320 sand milling hairs of its lap, all rib chamferings are 0.5mm.
The formation of refractive index of transparent materials interference measuring instrument of the present invention will comprise four modules: dispose first module that various wavelength (as 532,650,1060nm etc.) laser is formed the multi-wavelength measuring system; Comprise interferometer combined, the combined sample frame of light path shown in Figure 1 and second module that stepper motor is formed main body as instrument; Adopt photelectric receiver, low noise direct current amplifier, data acquisition and Flame Image Process to form the 3rd module of instrument; Process control, data acquisition, Flame Image Process and Data Management Analysis software and computer are formed the four module of system.
As long as the assembled flat sample is placed in the light path, and the interference fringe rank is transferred near null field, is driven sample 701 by the computer control step motor and slowly move along 702 prism inclined-planes.Periodic electrical signal is sent into computing machine and is carried out fringe count and identification, calculates measurement result at last.As long as interferometer is put into and finely tuned to sample, all the other work can all be finished by computer control in the whole measurement.

Claims (5)

1、一种透明材料折射率的测量方法，其特征在于该方法包括下列步骤：1. A method for measuring the refractive index of a transparent material, characterized in that the method comprises the following steps: 1)将待测材料制成两块对称棱镜形成的组合平板样品；1) The material to be tested is made into a combined flat sample formed by two symmetrical prisms; 2)将该组合平板样品置于马赫-陈德尔干涉仪一臂上，产生两路干涉，一路是马赫-陈德尔干涉，另一路是组合平板样品两通光面形成的等厚干涉；2) Place the combined flat sample on one arm of the Mach-Chendel interferometer to generate two-way interference, one is the Mach-Chendel interference, and the other is the equal-thickness interference formed by the two smooth surfaces of the combined flat sample; 3)组合平板样品中的一块固定，另一块沿指定方向平移的同时，精密测定移动过程中两路干涉条纹的变化量m1和m2；3) One of the combined plate samples is fixed, and the other one is translated along the specified direction, and the changes m 1 and m 2 of the two interference fringes during the movement process are accurately measured; 4)利用下式计算待测材料的折射率： n = 1 1 - 2 ( m 1 / m 2 ) 4) Use the following formula to calculate the refractive index of the material to be measured: no = 1 1 - 2 ( m 1 / m 2 ) 2、根据权利要求1所述的透明材料折射率测量方法的透明材料折射率干涉测量仪，其特征在于它包括激光光源(1)、准直透镜(2)、第一半透半反镜(3)、第一光电接收器(4)、第一光阑(5)、第一偏振片(6)、样品台(7)，第一全反镜(8)、数据采集系统(9)、计算机(10)、第二光电接收器(12)、第二光阑(13)、第二半透半反镜(14)、第二全反镜(15)，其位置关系如下：激光光源(1)发出的激光经准直透镜(2)成平行光，入射到第一半透半反镜(3)，分成两束光，其中透射光束通过组合平板样品(7)，经第一全反镜(8)反射到第二半透半反镜(14)；反射光束经第二全反镜(15)反射到第二半透半反镜(14)上，形成马赫-陈德尔干涉，干涉条纹经孔径小于干涉条纹宽度的第二光阑(13)入射到第二光电接收器(12)上；透射光束入射到组合平板样品(7)上时，分别在该样品(7)的两通光面产生反射，两面的反射光束经第一半透半反镜(3)产生等厚干涉，干涉条纹通过孔径小于干涉条纹宽度的第一光阑(5)，入射到第二光电接收器(4)上，第一光电接收器(4)和第二光电接收器(12)接收到的干涉条纹变化量经数据采集系统(9)输入计算机(10)进行数据处理。2. The transparent material refractive index interferometer of the transparent material refractive index measuring method according to claim 1, characterized in that it comprises a laser light source (1), a collimator lens (2), a first half mirror ( 3), the first photoelectric receiver (4), the first aperture (5), the first polarizer (6), the sample stage (7), the first total reflection mirror (8), the data acquisition system (9), Computer (10), the second photoelectric receiver (12), the second aperture (13), the second half mirror (14), the second total mirror (15), its positional relationship is as follows: laser light source ( 1) The emitted laser light is transformed into parallel light through the collimator lens (2), and is incident on the first half-mirror (3) to be divided into two beams of light, wherein the transmitted beam passes through the combined flat plate sample (7), and passes through the first total reflection Mirror (8) is reflected to the second half-mirror (14); the reflected light beam is reflected on the second half-mirror (14) through the second total reflection mirror (15), forming Mach-Chendel interference, interference The fringe is incident on the second photoelectric receiver (12) through the second aperture (13) whose aperture is smaller than the interference fringe width; Reflection occurs on the light surface, and the reflected light beams on both sides pass through the first half-mirror (3) to produce equal-thickness interference, and the interference fringes pass through the first diaphragm (5) whose aperture is smaller than the width of the interference fringes, and are incident on the second photoelectric receiver ( 4) above, the variation of the interference fringes received by the first photoelectric receiver (4) and the second photoelectric receiver (12) is input into the computer (10) through the data acquisition system (9) for data processing. 3、根据权利要求2所述的透明材料折射率干涉测量仪，其特征在于在第一半透半反镜(3)和组合平板样品(7)之间还设有第一偏振片(6)，在第一半透半反镜(3)和第二全反镜(15)之间还设有第二偏振片(16)。3. The transparent material refractive index interferometer according to claim 2, characterized in that a first polarizer (6) is also arranged between the first half mirror (3) and the combined flat plate sample (7) A second polarizer (16) is also arranged between the first half mirror (3) and the second total mirror (15). 4、根据权利要求2所述的透明材料折射率干涉测量仪，其特征在于所述组合平板样品(7)是由一矩形样品沿对角线切割而成的相同的两块样品，并将两切面磨光后胶成整体再加工，然后加温使样品分离而成的，两通光面的平整度＜0.5，光洁度PIII，组合后的平行度≤10″，其余面用320号砂磨光，所有棱倒角0.5mm。4. The transparent material refractive index interferometer according to claim 2, characterized in that the combined flat sample (7) is two identical samples cut from a rectangular sample along a diagonal line, and the two After the cut surface is polished, it is glued into a whole and then processed, and then heated to separate the sample. The flatness of the two-way smooth surface is less than 0.5, the smoothness is PIII, and the parallelism after combination is ≤10″. The rest of the surface is polished with 320 sand , all edges chamfered 0.5mm. 5、根据权利要求2或3或4所述的透明材料折射率干涉测量仪，其特征在于其构成可分为下列四个部分：5. The transparent material refractive index interferometer according to claim 2, 3 or 4, characterized in that its composition can be divided into the following four parts: 第一模块：配置多波长激光的激光光源；The first module: laser light source with multi-wavelength laser; 第二模块：组合干涉仪、组合样品架和驱动组合平板样品运动的步进电机；The second module: a combined interferometer, a combined sample holder and a stepper motor that drives the combined flat sample movement; 第三模块：光电接收器(4、12)、低噪声直流放大器、数据采集和图像处理的数据采集系统(9)；The third module: a photoelectric receiver (4, 12), a low-noise DC amplifier, a data acquisition system (9) for data acquisition and image processing; 第四模块：计算机(10)及其过程控制、数据采集、图像处理和数据处理分析软件。The fourth module: computer (10) and its process control, data acquisition, image processing and data processing and analysis software.
CNB021591008A 2002-12-31 2002-12-31 Method for measuring refractive index of transparent material and interferometer thereof Expired - Fee Related CN1186620C (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101226101B (en) * 2008-01-25 2010-06-16 宁波大学 An optical glass stress optical coefficient measuring instrument and its measuring method
CN103267743A (en) * 2013-04-08 2013-08-28 辽宁科旺光电科技有限公司 Measuring refractive index device and method thereof
CN103278475A (en) * 2013-05-13 2013-09-04 清华大学 Measuring device and method of transparent medium refractive index
CN107870160A (en) * 2017-11-13 2018-04-03 西安工业大学 A method for measuring the surface refractive index of optical materials
CN109632706A (en) * 2018-12-19 2019-04-16 南京信息职业技术学院 Liquid refractive index measuring method based on equal-thickness interference moire fringes
CN110596043A (en) * 2019-11-13 2019-12-20 南京南智先进光电集成技术研究院有限公司 Nonlinear refractive index measuring device and method
CN110779693A (en) * 2019-11-11 2020-02-11 四川大学 Method for measuring refractive index of double-prism material
CN111044490A (en) * 2019-12-18 2020-04-21 中山大学 Method for measuring axial refractive index of anisotropic semiconductor optical film
CN111323392A (en) * 2020-04-16 2020-06-23 中国科学院国家授时中心 Apparatus and method for rapid determination of refractive index of optical glass
CN112964635A (en) * 2020-10-13 2021-06-15 重庆康佳光电技术研究院有限公司 Chip detection method and system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101226101B (en) * 2008-01-25 2010-06-16 宁波大学 An optical glass stress optical coefficient measuring instrument and its measuring method
CN103267743A (en) * 2013-04-08 2013-08-28 辽宁科旺光电科技有限公司 Measuring refractive index device and method thereof
CN103267743B (en) * 2013-04-08 2018-09-21 辽宁科旺光电科技有限公司 A kind of apparatus for measuring refractive index and method
CN103278475A (en) * 2013-05-13 2013-09-04 清华大学 Measuring device and method of transparent medium refractive index
CN103278475B (en) * 2013-05-13 2015-06-24 清华大学 Measuring device and method of transparent medium refractive index
CN107870160A (en) * 2017-11-13 2018-04-03 西安工业大学 A method for measuring the surface refractive index of optical materials
CN109632706A (en) * 2018-12-19 2019-04-16 南京信息职业技术学院 Liquid refractive index measuring method based on equal-thickness interference moire fringes
CN109632706B (en) * 2018-12-19 2021-03-02 南京信息职业技术学院 Liquid refractive index measuring method based on equal-thickness interference moire fringes
CN110779693A (en) * 2019-11-11 2020-02-11 四川大学 Method for measuring refractive index of double-prism material
CN110596043A (en) * 2019-11-13 2019-12-20 南京南智先进光电集成技术研究院有限公司 Nonlinear refractive index measuring device and method
CN111044490A (en) * 2019-12-18 2020-04-21 中山大学 Method for measuring axial refractive index of anisotropic semiconductor optical film
CN111044490B (en) * 2019-12-18 2022-06-03 中山大学 Method for measuring axial refractive index of anisotropic semiconductor optical film
CN111323392A (en) * 2020-04-16 2020-06-23 中国科学院国家授时中心 Apparatus and method for rapid determination of refractive index of optical glass
CN112964635A (en) * 2020-10-13 2021-06-15 重庆康佳光电技术研究院有限公司 Chip detection method and system

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