CN1424571A - Method for measuring refractive index of transparent material and interferometer thereof - Google Patents
Method for measuring refractive index of transparent material and interferometer thereof Download PDFInfo
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- CN1424571A CN1424571A CN 02159100 CN02159100A CN1424571A CN 1424571 A CN1424571 A CN 1424571A CN 02159100 CN02159100 CN 02159100 CN 02159100 A CN02159100 A CN 02159100A CN 1424571 A CN1424571 A CN 1424571A
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Abstract
A method for measuring refractive index of transparent material and its interferometer are mainly characterized by that the material to be measured is made into a combined flat plate sample formed from two symmetrical prisms, and then placed on one arm of Mach-Zehnder interferometer to produce two-way interference, one is Mach-Zehnder interference, and another is equal-thickness interference formed from two light-passing surfaces of combined flat plate sample, one of the combined flat plate samples is fixed, and another is moved horizontally along fixed block, and at the same time the variable quantity m of two-way interference fringe in the moving process can be precisely measured1And m2(ii) a Using n-1/[ 1-2 (m)1/m2)]And calculating the refractive index of the material to be measured. The invention has the advantages ofThe points are as follows: the refractive index measurement precision reaches 10－5～10－6(ii) a The use of an goniometer is avoided during the testing process; in the moving process of the sample, the direction of the light beam is not changed, and interference is not damaged; the refractive index is related to the fringe variation only; factors influencing the measurement accuracy are reduced; the upper limit of the measured refractive index is up to 2.7, and the refractive index of the material from ultraviolet to infrared can be measured.
Description
Technical field:
The present invention is relevant with transparent material, particularly a kind of measuring method of refractive index of transparent materials and interference measuring instrument thereof.
Background technology:
The classical instrument of measuring refractive index of transparent materials has Abbe refractometer, V prismatic refraction rate instrument and minimum deviation horn cupping refractometer.Abbe refractometer measuring accuracy is not high, is up to 10
-4, V prismatic refraction rate instrument measuring accuracy is up to 10
-5, more than two kinds of devices owing to the index-matching fluid reason not the energy measurement refractive index be higher than 1.8 material, minimum deviation horn cupping refractometer measuring accuracy height to 10
-6, but need precision up to 2 " angular instrument.Publication number is the refractivity measuring apparatus using interference method that 1077533 patent proposes, and is to adopt improved Michelson interferometer, and by rotating sample to predetermined angular, the recorded fringe variable quantity obtains the detected materials refractive index.This analyzer measuring accuracy can reach 10
-5, but there is following shortcoming in this analyzer:
1. this analyzer needs to rotate sample in test process, and this needs the high precision angle-measuring instrument just can reach its measuring accuracy.
2. this analyzer changes optical path difference by rotating sample, need rotate very that wide-angle just can obtain a large amount of striped variable quantities, to reach its measuring accuracy.But cause that beam deflection is very big, may destroy its interference.
3. to influence the factor of measuring accuracy a lot of for this analyzer, and for example the error of thickness of sample, optical source wavelength, rotational angle and striped variable quantity etc. all can influence the measuring accuracy of this analyzer.
Summary of the invention:
The technical problem to be solved in the present invention is to overcome the difficulty of above-mentioned prior art aspect the measurement refractive index of transparent materials, and a kind of measuring method of refractive index of transparent materials is provided, and on this basis, provides a kind of refractive index of transparent materials interference measuring instrument.
Technical solution of the present invention is as follows:
Refractive index of transparent materials measuring method of the present invention comprises the following steps:
1). detected materials is made the assembled flat sample that two symmetric prisms are formed;
2). this assembled flat sample is placed on mach-zehnder interferometer one arm, produce two-way and interfere, the one tunnel is that mach-zehnder is interfered, and another road is the equal thickness interference that assembled flat sample two logical light faces form;
3). in the assembled flat sample one is fixing, and another piece is along the assigned direction translation time, two-way change of interference fringes amount m in the micrometric measurement moving process
1And m
2
4). utilize following formula to calculate the refractive index of detected materials:
The refractive index of transparent materials interference measuring instrument of setting up according to said method comprises LASER Light Source, collimation lens, first semi-transparent semi-reflecting lens, first photelectric receiver, first diaphragm, first polaroid, sample stage, first total reflective mirror, data acquisition system (DAS), computing machine, second photelectric receiver, second diaphragm, second semi-transparent semi-reflecting lens, second total reflective mirror, its position relation is as follows: the laser that LASER Light Source is sent becomes directional light through collimation lens, incide first semi-transparent semi-reflecting lens, be divided into two-beam, wherein transmitted light beam reflexes to second semi-transparent semi-reflecting lens by the assembled flat sample through first total reflective mirror; Folded light beam reflexes on second semi-transparent semi-reflecting lens through second total reflective mirror, forms mach-zehnder and interferes, and the interference fringe via hole diameter incides on the photelectric receiver less than the diaphragm of fringe-width; When transmitted light beam incides on the assembled flat sample, two logical light faces at this sample produce reflection respectively, the folded light beam on two sides produces equal thickness interference through first semi-transparent semi-reflecting lens, interference fringe is by first diaphragm of aperture less than fringe-width, incide on first photelectric receiver, the interference fringe variable quantity that first photelectric receiver and second photelectric receiver receive carries out data processing through data acquisition system (DAS) input computing machine.
Between first semi-transparent semi-reflecting lens and assembled flat sample, also be provided with first polaroid, between first semi-transparent semi-reflecting lens and second total reflective mirror, also be provided with second polaroid, to adapt to the needs that utilize the refractive index of transparent materials interference measuring instrument to measure the anisotropic transparent material.
Described assembled flat sample is the two identical samples that formed along the diagonal line cutting by a rectangle sample, and with the whole reprocessing of two tangent planes polishing back glue one-tenth, heat then sample separation is formed, and require flatness＜0.5 of two logical light faces, smooth finish PIII, the depth of parallelism after the combination≤10 ".Its lap is with No. 320 sand milling light, all rib chamfering 0.5mm.
The refractive index of transparent materials interference measuring instrument can be divided into following four parts as its formation of complete surveying instrument:
First module: the LASER Light Source of configuration multiwavelength laser;
Second module: comprise interferometer combined, the combined sample frame of above-mentioned light path and drive the stepper motor of assembled flat sample motion;
Three module: the data acquisition system (DAS) of photelectric receiver, low noise direct current amplifier, data acquisition and Flame Image Process;
Four module: computing machine and process control thereof, data acquisition, Flame Image Process and Data Management Analysis software
Technique effect of the present invention is as follows:
1. apparatus of the present invention refractive index of transparent materials measuring accuracy reaches 10
-5～10
-6
The present invention in test process without angular instrument;
3. in the sample moving process, beam direction does not change, and can not destroy interference;
4. refractive index is only relevant with the striped variable quantity, and the factor that influences measuring accuracy is less;
5. survey the refractive index upper limit and reach 2.7, can measure from ultraviolet to infrared material refractive index.
Below in conjunction with accompanying drawing invention is described further.
Description of drawings:
The light channel structure synoptic diagram of Fig. 1-interference measuring instrument of the present invention.
Fig. 2-sample processing synoptic diagram of the present invention.
Embodiment:
See also Fig. 1 earlier, Fig. 1 is a refractive index of transparent materials interference measuring instrument light channel structure synoptic diagram of the present invention.As seen from the figure, refractive index of transparent materials interference measuring instrument of the present invention comprises LASER Light Source 1, collimation lens 2, first semi-transparent semi-reflecting lens, 3, the first photelectric receivers, 4, the first diaphragms 5, first polaroid 6, sample 7, the first total reflective mirrors 8, data acquisition system (DAS) 9, computing machine 10, interpretation software 11, second photelectric receiver, 12, the second diaphragms, 13, the second semi-transparent semi-reflecting lens 14, second total reflective mirror, 15, the second polaroids 16.The laser beam that LASER Light Source 1 produces, behind collimation lens 2, become directional light, incide first semi-transparent semi-reflecting lens 3, be divided into two-beam, wherein transmitted light beam reflexes to second semi-transparent semi-reflecting lens 14 by testing sample 7 through first total reflective mirror 8, folded light beam reflexes on second semi-transparent semi-reflecting lens 14 through second total reflective mirror 15, the formation mach-zehnder is interfered, and the interference fringe via hole diameter incides on second photelectric receiver 12 less than second diaphragm 13 of fringe-width; When transmitted light beam incides on the sample 7, two logical light faces at sample 7 produce reflection respectively, and the folded light beam on two sides produces equal thickness interference through first semi-transparent semi-reflecting lens 3, interference fringe incides on first photelectric receiver 4 by first diaphragm 5 of aperture less than width of fringe.During measurement, along one 701 in the slow mobile example of the direction of arrow in the sample among Fig. 17, another piece 702 of fixed sample, cause that the interference fringe that two-way is interfered changes, photelectric receiver 4 and 12 receives the striped variable quantity, through data acquisition system (DAS) 9, input computing machine 10 obtains striped variable quantity m
1And m
2, adopt interpretation software 11, according to formula
Can calculate the refractive index of testing sample, wherein n is the material refractive index, m
1And m
2It is the striped variable quantity that two-way is interfered.
When measuring anisotropic material, add first polaroid 6 and second polaroid 16 respectively at two arms of interference measuring instrument.
Utilize the different wavelength of laser light source, can measure material from ultraviolet near infrared refractive index, thereby obtain chromatic dispersion and Abel's number of material.Assembled flat sample 7 process technologies require as follows:
1, as shown in Figure 2 rectangle sample is cut into identical two 701,702 along diagonal line, and become integral body to process by Fig. 2 technical requirement again two tangent planes polishing back optical cement; Heat then and make sample separation.
2, two logical light surface evenness N＜0.5, smooth finish PIII, the combination back depth of parallelism≤10 ";
3, No. 320 sand milling hairs of its lap, all rib chamferings are 0.5mm.
The formation of refractive index of transparent materials interference measuring instrument of the present invention will comprise four modules: dispose first module that various wavelength (as 532,650,1060nm etc.) laser is formed the multi-wavelength measuring system; Comprise interferometer combined, the combined sample frame of light path shown in Figure 1 and second module that stepper motor is formed main body as instrument; Adopt photelectric receiver, low noise direct current amplifier, data acquisition and Flame Image Process to form the 3rd module of instrument; Process control, data acquisition, Flame Image Process and Data Management Analysis software and computer are formed the four module of system.
As long as the assembled flat sample is placed in the light path, and the interference fringe rank is transferred near null field, is driven sample 701 by the computer control step motor and slowly move along 702 prism inclined-planes.Periodic electrical signal is sent into computing machine and is carried out fringe count and identification, calculates measurement result at last.As long as interferometer is put into and finely tuned to sample, all the other work can all be finished by computer control in the whole measurement.
Claims (5)
1, a kind of measuring method of refractive index of transparent materials is characterized in that this method comprises the following steps:
1) detected materials is made the assembled flat sample that two symmetric prisms form;
2) this assembled flat sample is placed on mach-zehnder interferometer one arm, produce two-way and interfere, the one tunnel is that mach-zehnder is interfered, and another road is the equal thickness interference that assembled flat sample two logical light faces form;
3) in the assembled flat sample is fixing, and another piece is along the assigned direction translation time, two-way change of interference fringes amount m in the micrometric measurement moving process
1And m
2
4) utilize following formula to calculate the refractive index of detected materials:
2, the refractive index of transparent materials interference measuring instrument of refractive index of transparent materials measuring method according to claim 1, it is characterized in that it comprises LASER Light Source (1), collimation lens (2), first semi-transparent semi-reflecting lens (3), first photelectric receiver (4), first diaphragm (5), first polaroid (6), sample stage (7), first total reflective mirror (8), data acquisition system (DAS) (9), computing machine (10), second photelectric receiver (12), second diaphragm (13), second semi-transparent semi-reflecting lens (14), second total reflective mirror (15), its position relation is as follows: the laser that LASER Light Source (1) is sent becomes directional light through collimation lens (2), incide first semi-transparent semi-reflecting lens (3), be divided into two-beam, wherein transmitted light beam reflexes to second semi-transparent semi-reflecting lens (14) by assembled flat sample (7) through first total reflective mirror (8); Folded light beam reflexes on second semi-transparent semi-reflecting lens (14) through second total reflective mirror (15), forms mach-zehnder and interferes, and the interference fringe via hole diameter incides on second photelectric receiver (12) less than second diaphragm (13) of fringe-width; When transmitted light beam incides on the assembled flat sample (7), two logical light faces at this sample (7) produce reflection respectively, the folded light beam on two sides produces equal thickness interference through first semi-transparent semi-reflecting lens (3), interference fringe is by first diaphragm (5) of aperture less than fringe-width, incide on second photelectric receiver (4), the interference fringe variable quantity that first photelectric receiver (4) and second photelectric receiver (12) receive carries out data processing through data acquisition system (DAS) (9) input computing machine (10).
3, refractive index of transparent materials interference measuring instrument according to claim 2, it is characterized in that between first semi-transparent semi-reflecting lens (3) and assembled flat sample (7), also being provided with first polaroid (6), between first semi-transparent semi-reflecting lens (3) and second total reflective mirror (15), also be provided with second polaroid (16).
4, refractive index of transparent materials interference measuring instrument according to claim 2, it is characterized in that described assembled flat sample (7) is the two identical samples that formed along the diagonal line cutting by a rectangle sample, and with the whole reprocessing of two tangent planes polishing back glue one-tenth, heat then sample separation is formed, flatness＜0.5 of two logical light faces, smooth finish PIII, the depth of parallelism after the combination≤10 "; its lap is with No. 320 sand milling light, all rib chamfering 0.5mm.
5,, it is characterized in that its formation can be divided into following four parts according to claim 2 or 3 or 4 described refractive index of transparent materials interference measuring instruments:
First module: the LASER Light Source of configuration multiwavelength laser;
Second module: interferometer combined, combined sample frame and drive the stepper motor of assembled flat sample motion;
Three module: the data acquisition system (DAS) (9) of photelectric receiver (4,12), low noise direct current amplifier, data acquisition and Flame Image Process;
Four module: computing machine (10) and process control thereof, data acquisition, Flame Image Process and Data Management Analysis software.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021591008A CN1186620C (en) | 2002-12-31 | 2002-12-31 | Method for measuring refractive index of transparent material and interferometer thereof |
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|---|---|---|---|
| CNB021591008A CN1186620C (en) | 2002-12-31 | 2002-12-31 | Method for measuring refractive index of transparent material and interferometer thereof |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226101B (en) * | 2008-01-25 | 2010-06-16 | 宁波大学 | Measurer for optical glass stress optical coefficient and measuring method thereof |
| CN103267743A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | Measuring refractive index device and method thereof |
| CN103278475A (en) * | 2013-05-13 | 2013-09-04 | 清华大学 | Measuring device and method of transparent medium refractive index |
| CN107870160A (en) * | 2017-11-13 | 2018-04-03 | 西安工业大学 | A kind of measuring method of optical material face refractive index |
| CN109632706A (en) * | 2018-12-19 | 2019-04-16 | 南京信息职业技术学院 | Liquid refractive index measuring method based on equal-thickness interference moire fringes |
| CN110596043A (en) * | 2019-11-13 | 2019-12-20 | 南京南智先进光电集成技术研究院有限公司 | Nonlinear refractive index measuring device and method |
| CN110779693A (en) * | 2019-11-11 | 2020-02-11 | 四川大学 | Method for measuring refractive index of double-prism material |
| CN111044490A (en) * | 2019-12-18 | 2020-04-21 | 中山大学 | Method for measuring axial refractive index of anisotropic semiconductor optical film |
| CN112964635A (en) * | 2020-10-13 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | Chip detection method and system |
-
2002
- 2002-12-31 CN CNB021591008A patent/CN1186620C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226101B (en) * | 2008-01-25 | 2010-06-16 | 宁波大学 | Measurer for optical glass stress optical coefficient and measuring method thereof |
| CN103267743A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | Measuring refractive index device and method thereof |
| CN103267743B (en) * | 2013-04-08 | 2018-09-21 | 辽宁科旺光电科技有限公司 | A kind of apparatus for measuring refractive index and method |
| CN103278475A (en) * | 2013-05-13 | 2013-09-04 | 清华大学 | Measuring device and method of transparent medium refractive index |
| CN103278475B (en) * | 2013-05-13 | 2015-06-24 | 清华大学 | Measuring device and method of transparent medium refractive index |
| CN107870160A (en) * | 2017-11-13 | 2018-04-03 | 西安工业大学 | A kind of measuring method of optical material face refractive index |
| CN109632706A (en) * | 2018-12-19 | 2019-04-16 | 南京信息职业技术学院 | Liquid refractive index measuring method based on equal-thickness interference moire fringes |
| CN109632706B (en) * | 2018-12-19 | 2021-03-02 | 南京信息职业技术学院 | Liquid refractive index measuring method based on equal-thickness interference moire fringes |
| CN110779693A (en) * | 2019-11-11 | 2020-02-11 | 四川大学 | Method for measuring refractive index of double-prism material |
| CN110596043A (en) * | 2019-11-13 | 2019-12-20 | 南京南智先进光电集成技术研究院有限公司 | Nonlinear refractive index measuring device and method |
| CN111044490A (en) * | 2019-12-18 | 2020-04-21 | 中山大学 | Method for measuring axial refractive index of anisotropic semiconductor optical film |
| CN111044490B (en) * | 2019-12-18 | 2022-06-03 | 中山大学 | Method for measuring axial refractive index of anisotropic semiconductor optical film |
| CN112964635A (en) * | 2020-10-13 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | Chip detection method and system |
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| CN1186620C (en) | 2005-01-26 |
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