CN1423308A - Base-board drying device and method for drying base-board using same - Google Patents
Base-board drying device and method for drying base-board using same Download PDFInfo
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- CN1423308A CN1423308A CN02152421A CN02152421A CN1423308A CN 1423308 A CN1423308 A CN 1423308A CN 02152421 A CN02152421 A CN 02152421A CN 02152421 A CN02152421 A CN 02152421A CN 1423308 A CN1423308 A CN 1423308A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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Abstract
The present invention provided an energy-efficient substrate dryer that dries a substrate efficiently by reducing air consumption, and also to provide a drying method using the device. A prismatic air knife nozzle 4 for blowing air over a surface 2a of a substrate 2 is arranged with a longitudinal direction slantingly crossing a substrate feed direction. The air knife nozzle 4 is divided into a first and a second air jet chamber 4c and 4d, and flow controllers 6a and 6b are disposed to control air quantities jetted by the first and second air jet chambers 4c and 4d. When the second air jet chamber 4d faces a trailing corner 2c of the substrate 2, the flow controllers 6a and 6b increase the air quantity for a blow jetted by the second air jet chamber 4d and stop an air jet by the first air jet chamber 4c.
Description
Technical field
The present invention relates to air knife carrying out the dried base plate drying device and use it to carry out dry method at the substrate that drenches after the processing that cleans etc., particularly about control effectively specific air consumption and efficiently dry substrate substrate drying device and use this device to carry out dry method.
Background technology
In the past, on the manufacturing line of liquid-crystal apparatus etc., in photo-mask process etc., that repeatedly cleans etc. drenched processing, and carrying out will carrying out repeatedly after this drenches processing at every turn substrate dewater and dry.Dewatering and drying means has various methods, but handle and the method for drying process as substrate is drenched during transporting with streamline continuously, is the drying method for substrate of usefulness air knife described as follows.
Figure 15 is a substrate drying device vertical view in the past.In addition, Figure 16 is the profile of the 15-15 of Figure 15.
In the drying method for substrate that utilizes air knife in the past, utilized as Figure 15 and substrate drying device 50 shown in Figure 16.In this substrate drying device 50, in the 50a of its cabin, be provided with the conveying roller 52 that is supporting substrate 51 both sides and be used to transport side by side, this conveying roller 52 is driven by the motor 53 that is located at 50a outside, cabin, and the substrate 51 that drenches after the processing is carried in the 50a of cabin.
And, in the 50a of the cabin of substrate drying device 50, as shown in figure 16, be provided with the state that leaves specified altitude from substrate surface 51a respectively in the face of the air knife nozzle 54 of each surperficial 51a configuration of substrate 51.This air knife nozzle 54 is flat column, and as shown in figure 15, its length direction (E direction among the figure) is the incline direction that inclination predetermined angular y intersects with the carriage direction (x direction among the figure) of substrate 51, promptly along z direction configuration among the figure.On air knife nozzle 54, formed slit 54a at its front end edge length direction, and this slit 54a subtend substrate surface 51a.
In the substrate drying device in the past 50 that so constitutes, the air 56 that ejects from the slit 54a of air knife nozzle 54 is directed onto and drenches residual after the processing and have on the substrate surface 51a of liquid 55, liquid 55 is dispersed and makes the surperficial 51a drying of substrate 51 with this.
But, in above-mentioned substrate drying device 50 in the past, as shown in figure 15, in order to remove the liquid 55 on the substrate 51 better, air knife nozzle 54 is configured on the z direction that the carriage direction x with respect to substrate 51 tilts.That is,, shorten displacement, can carry out the drying of substrate 51 effectively in the face of near the liquid 55 the both ends of air knife nozzle 54 with the method that air knife nozzle 54 is disposed at incline direction z.
At this moment, liquid 55 on the substrate surface 51a, because of the air 56 that blows out from air knife nozzle 54, not to substrate 51 carriage directions but move along the direction vertical with the incline direction z of configuration air knife nozzle 54, at last, the liquid 55 that disperses outside the surface of substrate 51 focuses on the dry last bight 51b that finishes of substrate 51.
Therefore, because in fact when using this substrate drying device 50, the liquid 55 that residues in bight 51b is dispersed and make substrate 51 bone dries, and must spray than the liquid 55 of bight 51b and the big air jet forces of active force between the substrate 51, so in the surperficial 51a of substrate 51, though use flow proportional A[L/min], for example use 200[L/min] air of (when gap size is 538 * 0.1mm) can be dry, but with being far longer than this flow proportional A[L/min] flow proportional B[L/min] (A＜B), for example use 400[L/min] air spray to the complete surperficial 51a of substrate 51.
Therefore, on the substrate drying device that utilizes air knife 50 in the past, for the liquid 55 that residues in substrate 51 bight 51b being dispersed and making substrate 51 bone dries, just need consume unnecessary air being far longer than air, spraying to all surfaces 51a of substrate 51 to the required air capacity of the surperficial 51a inner drying of substrate 51.
So the present invention proposes according to so in the past situation, its purpose is to provide a kind of specific air consumption and can dry efficiently substrate controlled effectively, and the high substrate drying device of energy-saving efficiency and with the method for its dry substrate.
Summary of the invention
The substrate drying device of finishing in order to achieve the above object of the present invention, have: the substrate conveyer that transports the substrate that the surface speckles with liquid, configuration and the air knife nozzle make drying substrates to the substrate surface injection air with the substrate opposite that transports with this substrate conveyer, control is from the air capacity controlling organization of the air emitted dose of air knife nozzle, it is characterized in that: the air knife nozzle, be divided into a plurality of air jet chambers that face substrate surface respectively, and, this air capacity controlling organization, according to the relative position of air knife nozzle, adjust injection air amount respectively from each air jet chamber with the substrate that is transported.
By such formation, can individually adjust from the injection air amount of a plurality of air jet chamber, and, the air of optimal dose is ejected into substrate surface, may command specific air consumption and dry efficiently substrate according to the relative position of air knife nozzle and substrate.
Concrete is: the air knife nozzle is the shape of column, and its length direction tilts to the substrate carriage direction and is provided with across, in a plurality of air jet chamber, be provided with each air jet in the face of substrate surface, these a plurality of air jets, be arranged in the length direction of air knife nozzle, under this state, when the bight at the dry end of the substrate that is transported during in the face of any one air jet in a plurality of air jet chamber, the air capacity controlling organization, only increase the air capacity of spraying, the liquid that remains in this bight is dispersed with this from the air jet chamber that faces with the bight.
According to such structure, owing to only increase air mass flow ground ejection air to the bight, substrate rear of the air mass flow of the more ejections of needs, and in the face of the substrate that does not need so much ejection air mass flow, spray air in right amount, can adjust the air capacity that ejects to substrate partly, so can control specific air consumption effectively.
At this moment, also can stop never to face the air jet chamber injection air in the above-mentioned bight of substrate with the air capacity controlling organization.
According to such structure, owing to, spray so can more effectively control unwanted air only from air jet chamber ejection air in the face of the bight, rear of substrate.
In addition, during transporting substrate, preferably stop from the air injection of the air jet chamber of leaving in the face of the substrate surface position by the air capacity controlling organization.Like this, owing to be not limited to the bight, rear of substrate, can begin in drying to the process that finishes, not carry out never air jet chamber injection air in the face of substrate surface from substrate, so can effectively utilize air, and can control specific air consumption extremely effectively, to reach the purpose that improves efficiency.
And the air capacity controlling organization can have a plurality of air supply valves that are connected respectively with a plurality of air jet chamber.With this, the air that switches each air jet chamber easily sprays.
In addition, a plurality of air jet chamber, preferably by being separated along the length direction of air knife nozzle and the dividing plate that is disposed in the air knife nozzle, and, this dividing plate is movably, can move according to the zone in the face of the substrate that transports, and scalable is in the face of the volume of the air jet chamber of substrate, also the available air volume controlling organization changes the air capacity that ejects from the air jet chamber that faces substrate according to the zone in the face of substrate.
According to such structure, because can be according to the size that changes the air jet chamber that faces substrate in the face of the zone of substrate with dividing plate, and can eject the air of corresponding surface from this air jet chamber to the optimum flow in the zone of substrate, so can more critically adjust and spray optimum air capacity, and can more effectively utilize air, specific air consumption is controlled at Min..
And, be preferably in assigned position with respect to the air knife nozzle, be provided for detecting the air knife nozzle and the transducer substrate relative position.Like this, according to the information by the correlative positional relation of the air knife nozzle of sensor and substrate, the air capacity controlling organization can be adjusted the air capacity of spraying from each air jet chamber.
In addition, the drying method for substrate of finishing for achieving the above object of the present invention, be to use the drying method for substrate of aforesaid substrate drying device, it is characterized in that: the mode that the direction that a plurality of air jets that are provided with in the face of each substrate of a plurality of air jet chamber tilt to intersect with edge and substrate carriage direction is arranged, the air knife nozzle face is disposed to substrate, and transport this substrate with the aforesaid substrate conveyer, under this state, in substrate transports, when each chamber of a plurality of air jet chamber in the face of the surface of substrate in the time, eject the air that the liquid on the substrate surface is dispelled aequum from each chamber of a plurality of air jet chamber.Then, when in a plurality of air jet chamber any one in the face of the bight, rear at the end of the drying that in substrate transports, becomes substrate and remaining air jet chamber when leaving in the face of the position of substrate surface, make from the air increase emitted dose of spraying by the air capacity controlling organization in the face of the air jet chamber in bight, substrate rear, in order to dispel the liquid that residues in this bight, rear, and the air that stops remaining air jet chamber sprays.
According to such drying method for substrate, for the air that sprays suitable flow proportional in the face of the substrate that there is no need a large amount of air mass flows, then, when in a plurality of air jet chamber any one during in the face of bight, rear at substrate, only the air that increases air mass flow is sprayed in the bight, rear of the substrate of the more air mass flows of needs, never do not face the air jet chamber injection air of substrate simultaneously, so can control specific air consumption effectively.
And, meanwhile, be preferably in transporting when beginning of substrate, when in a plurality of air jet chamber any one in the face of as the bight, the place ahead of the dry forefront of substrate and remaining air jet chamber when leaving in the face of the position on aforesaid substrate surface, eject in order to dispel the air of the liquid requirement that residues in this bight, the place ahead from air jet chamber in the face of bight, the place ahead, and, stop to spray from the air of remaining air jet chamber.
According to such drying method for substrate, owing to be not limited to the bight, rear, can begin to the process that finishes, not carry out never facing the air jet chamber injection air of substrate surface in drying from substrate, so can more effectively utilize air, and can control specific air consumption extremely effectively, can dry efficiently substrate.
In addition, the drying method for substrate of the present invention of other that finish for achieving the above object, be to use the drying method for substrate of aforesaid substrate drying device dry substrate, it is characterized in that: be provided with dividing plate movably, transport substrate by the substrate conveyer, in the transporting of substrate, can be according to moveable partition board in the face of the zone of this substrate that is transported, and one side adjusting range is to the volume of the air jet chamber of substrate, change the air capacity that ejects from this air jet chamber that meets the substrate regions of facing with the air capacity controlling organization on one side, and from this air jet chamber injection air.
According to such drying method for substrate, owing to can face the size of the air jet chamber of substrate on one side according to the area change of facing substrate with dividing plate, on one side according to the air that ejects optimal dose in the face of the zone of substrate from the air jet chamber that faces substrate, so can more critically adjust the air capacity of spraying the optimum substrate, and specific air consumption is controlled at Min..
Description of drawings
Fig. 1 is the substrate drying device vertical view of the embodiment of the invention 1.
Fig. 2 is the air knife nozzle stereogram of the substrate drying device of the embodiment of the invention.
Fig. 3 be Fig. 1 along 3-3 line profile.
Fig. 4 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 1, the ideograph of this drying means one technical process.
Fig. 5 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 1, the ideograph of this drying means one technical process.
Fig. 6 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 1, the ideograph of this drying means one technical process.
Fig. 7 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 1, the ideograph of this drying means one technical process.
Fig. 8 is the substrate drying device vertical view of the embodiment of the invention 2.
Fig. 9 is the air knife nozzle stereogram of the substrate drying device of the embodiment of the invention 2.
Figure 10 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 2, the ideograph of this drying means one technical process.
Figure 11 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 2, the ideograph of this drying means one technical process.
Figure 12 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 2, the ideograph of this drying means one technical process.
Figure 13 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 2, the ideograph of this drying means one technical process.
Figure 14 is the drying method for substrate that is used for illustrating at the substrate drying device that uses the embodiment of the invention 2, the ideograph of this drying means one technical process.
Figure 15 is a substrate drying device vertical view in the past.
Figure 16 is along the profile of 15-15 line among Figure 15.
Among the figure: 1,10, the 50-substrate drying device, 2, the 51-substrate, bight, 2c-rear, 3-transports roller portion, and 4,11-air knife nozzle, 4b, 12a, 12b-dividing plate, 4c-the 1st air jet chamber, 4d-the 2nd air jet chamber, 4e, 11d-air jet, 5a, 5b, 14a, 14b, 14c-air supply pipe, 6a, 6b, 15-flow controller, 7,8,9,16, the 17-transducer, 51b-bight, 54-air knife nozzle.
Embodiment
(embodiment 1)
Below, the embodiment 1 of the substrate drying device that present invention will be described in detail with reference to the accompanying.Fig. 1 is the substrate drying device vertical view of the embodiment of the invention 1.Fig. 2 is the air knife nozzle stereogram of the substrate drying device of the present embodiment seen of the arrow C direction from Fig. 1.Fig. 3 is along the profile of 3-3 line among Fig. 1.
Substrate drying device of the present invention, for example, be set at the after-stage of the cleaning step on the continuous manufacturing streamline of photo-mask process etc., and drench substrate after handling to what in this cleaning step, clean etc., be transported on the streamline in the device and carry out continuous drying.
The substrate drying device 1 of the embodiment of the invention 1 as shown in Figure 1, in the 1a of cabin, is provided with support side by side and transports the both end sides of the substrate 2 that comes and with its a plurality of roller portions 3 that transport that transport from cleaning step.This transports roller portion 3, is driven by the motor 1b on the exterior lateral sides that is located at cabin 1a, and the substrate 2 that drenches after the processing is transported in the 1a of cabin.
And, in the 1a of the cabin of substrate drying device 1, as shown in Figure 1 to Figure 3, be provided with the state that leaves specified altitude from substrate surface 2a, the air knife nozzle 4 of facing substrate surface 2a configuration.This air knife nozzle 4 is flat column, and be configured in its length direction (F direction among the figure) with respect to the carriage direction (directions X among the figure) of substrate 2 tilt regulation angle Y and with its incline direction that intersects, promptly dispose along the Z direction among the figure.
In addition, in general, air knife nozzle 4 is arranged on the both sides of substrate 2, but following describing upper face side.
The air knife nozzle 4 in the present embodiment particularly, central authorities of portion within it are formed with the dividing plate 4b with side 4a configured in parallel, and form the 1st 4c of air jet chamber and the 2nd 4d of air jet chamber that is divided into two with this dividing plate 4b.
In addition, dividing plate 4b also can be positioned at the middle position of air knife nozzle 4, and also can and have a style of one's own with air knife nozzle 4 formation one.And, can also dispose a plurality of dividing plate 4b and form three above air jet chambers.
At the front end of air knife nozzle 4, be provided with the slot-shaped air jet 4e that forms along its length direction, this air jet 4e also is provided with in the face of substrate 2 along the incline direction Z of the substrate 2 that is transported.
Particularly, the air jet 4e of present embodiment is divided into the 1st air jet 4e1 and the 2nd air jet 4e2 by dividing plate 4b with being divided into two, and the 1st and the 2nd air jet 4e1,4e2 are given the 4c of each the 1st and the 2nd air jet chamber, 4d respectively.
In addition, air jet 4e in the present embodiment is slot-shaped, but the present invention is not limited thereto, also can be along its length direction F formation a plurality of apertures side by side.At this moment also can be divided into two groups to a plurality of apertures, and distribute to each 4c of air jet chamber, 4d with dividing plate 4b.
On the side of the 1st 4c of air jet chamber, connecting and be used at air fed air supply pipe 5a under the pressurized state that does not have illustrated compressor, in the 1st 4c of air jet chamber.And, between the 1st 4c of air jet chamber and no illustrated compressor, dispose the flow controller 6a of the air mass flow that control supplies with by air supply pipe 5a in the 1st 4c of air jet chamber.
At this, as flow controller 6a, preferably normally used air supply valve, but the air supply valve that preferred use can open and close automatically flexibly.With this air supply valve, it carries out the switching that air sprays easily.
The 1st 4c of air jet chamber like this adjusts the air capacity of spraying by flow controller 6a, and sprays an amount of air from the 1st air jet 4e1.
Equally, on the side of the 2nd 4d of air jet chamber, connecting be used for from the state that do not have illustrated compressor pressurizes, in the 2nd 4d of air jet chamber air fed air supply pipe 5b.And, between the 2nd 4d of air jet chamber and no illustrated compressor, dispose the flow controller 6b of the air mass flow that control supplies with by air supply pipe 5b in the 2nd 4d of air jet chamber.
This flow controller 6b, also the same with flow controller 6a, be normally used air supply valve.
The 2nd 4d of air jet chamber like this adjusts the air capacity of spraying by flow controller 6b, and sprays an amount of air from the 2nd air jet 4e2.
And in the 1a of the cabin of substrate drying device 1, the edge part 4f1 in the face of the side 4f of the substrate carriage direction rear side of the 1st 4c of air jet chamber disposes the 1st transducer 7 that is used to detect 2 pairs of air knife nozzle 4 relative positions of substrate that are transported.
In addition, in the face of with the side 4f opposition side 4g of the 1st 4c of air jet chamber, dispose the 2nd transducer 8 that is used to detect 2 pairs of air knife nozzle 4 relative positions of substrate.
Equally, in the face of with the side 4h of the substrate carriage direction front side of the 2nd 4d of air jet chamber, dispose the 3rd transducer 9 that is used to detect 2 pairs of air knife nozzle 4 relative positions of substrate.
The optical profile type of any laser etc. or the detector of ultrasonic type all are applicable to the 1st, the 2nd and the 3rd transducer 7,8,9.And these transducers 7,8,9 preferably are configured on the afore mentioned rules position in the 1a of cabin.
And, detect the substrate 2 that is transported position with respect to air knife nozzle 4 with these transducers 7,8,9, flow controller 6a, 6b then move according to these detected data, and control is from the air capacity of corresponding with it respectively the 1st and the 2nd 4c of air jet chamber, 4d injection.
As the substrate drying device 1 of the present embodiment of above formation, be that the dry as follows substrate that drenches after the processing is done 2 device.Fig. 4 to Fig. 7 is the ideograph that is used to illustrate the method for substrate drying device 1 dry substrate 2 that uses the embodiment of the invention 1.
At first, as shown in Figure 4, the substrate that drenches after the processing does 2, continues to use the carriage direction that transports roller sections 3, promptly directions X is admitted in the 1a of cabin among the figure.Subsequently, in a single day the 1st transducer 7 detects substrate 2, flow controller 6a just according to the data adjustment of this detection from there not being the suitableeest flow of illustrated compressor compressed and supplied air in flow controller 6a, and the 1st air jet 4e1 of this air of having adjusted flow from the 1st 4c of air jet chamber sprayed to substrate surface 2a by air supply pipe 5a.
At this moment, the flow proportional of the air that sprays from the 1st air jet 4e1 is that the liquid (drop) on bight, the place ahead 2b of substrate 2 is dispelled necessary flow proportional A/2[l/min], for example 100[l/min].
And,, spray so suppressed unnecessary air owing to do not carry out from the air injection of the 2nd 4d of air jet chamber that leaves in the face of substrate 2 positions.
In addition, the numerical value 100[l/min of above-mentioned concrete flow proportional], be the gap size of jet 4e that the 1st and the 2nd air jet 4e1,4e2 the are added up numerical value when being 538 * 0.1mm.Below, exemplify the numerical value of concrete flow proportional, all be numerical value with the air knife nozzle of this gap size.
Below, as shown in Figure 5, in a single day the 2nd transducer 8 detects substrate 2, flow controller 6b is just similarly according to the data adjustment of this detection the suitableeest flow from compressor compressed and supplied air, and by air supply pipe 5b this air of adjusting behind flow sprayed to substrate surface 2a from the 2nd air jet 4e2 of the 2nd 4d of air jet chamber.
At this moment, the flow proportional of the air that sprays from the 2nd air jet 4e2 is that half regional liquid of the whole surperficial 2a of substrate is dispelled necessary A/2[l/min], for example 100[l/min].
And, owing to spray A/2[l/min from each air jet 4e1,4e2 of the 1st and the 2nd of the 1st and the 2nd the 4c of air jet chamber, 4d], for example 100[l/min] the air of flow proportional, consequently, these air emitted dose additions, the necessary flow proportional A[l/min of bottom line that the liquid in the whole surperficial 2a of substrate is dispelled exactly], for example 200[l/min] air be ejected into substrate surface 2a.
In addition,, use for the liquid (drop) 55 of the bight 51b at the dry end that remains in substrate 51 is dispelled with in the past substrate drying device 50 than Duo a lot of flow proportional B[l/min to the air capacity A of all surfaces of substrate 51], for example 400[l/min] the air injection.And in the present embodiment, suppose the identical of the travelling speed of substrate and in the past substrate drying device 50, and just can be the necessary flow proportional A of the bottom line that dispels substrate surface 2a, for example 200[l/min] to surperficial 2a integral spray.Therefore, according to present embodiment, can suppress specific air consumption effectively.
Below as shown in Figure 6, the 2nd 4d of air jet chamber is in the face of bight, the rear 2c of substrate 2, and when the detection of the 2nd transducer 8 finishes, flow controller 6a is just according to the data action of this detection and stop to spray from the air of the 1st 4c of air jet chamber, flow controller 6b action simultaneously also increases air mass flow from the 2nd 4d of air jet chamber, and from the 2nd air jet 4e2 eject the liquid (drop) on bight, the rear 2c of substrate 2 dispel the B/2[l/min of necessary flow proportional], for example 200[l/min] air.
In addition, air knife nozzle 54 in the past is not because nozzle is separated, so need flow proportional B[l/min with the nozzle total length that the liquid (drop) on bight, the rear 51b of substrate 51 is dispelled], for example need 400[l/min].But, in the present embodiment, when the travelling speed of supposition substrate is identical with in the past substrate drying device 50, only with half the 2nd 4d of air jet chamber injection air of nozzle total length, so can the liquid (drop) on the 2c of bight, rear be dispelled, and the jet power that makes unit length is an equality strength, and its above-mentioned necessary flow proportional is B/2[l/min], for example 200[l/min] get final product.Therefore, according to present embodiment, the air capacity of its bight 2c injection rearward also is that necessary irreducible minimum gets final product.
So, according to present embodiment, owing to adjusted the air capacity of spraying partly to substrate 2, so can suppress specific air consumption effectively.In addition, in the present embodiment, there is no need to be provided with in addition auxiliary air and spray and use nozzle in order only to increase the air capacity that bight, rear 2c is sprayed, just can be with simple structural adjustment air capacity.
And,,, spray so can control unnecessary air effectively owing to stopped never spraying in the face of the air of the 1st 4c of air jet chamber of bight, rear 2c according to present embodiment.
At last, as shown in Figure 7, after the detection of the 3rd transducer 9 finished, flow controller 6b was just according to the data action of this detection and stop air injection from the 2nd 4d of air jet chamber.
Like this, in the present embodiment, drench substrate 2 after the processing with air knife nozzle 4 dryings.
As mentioned above, drying method for substrate according to substrate drying device 1 dry substrate that uses the embodiment of the invention 1, can individually adjust the air capacity of spraying by flow controller 6a, 6b from the 1st and the 2nd 4c of air jet chamber, 4d, and spray to substrate surface 2a according to the position of air knife nozzle 4 relative substrates 2 air with optimal dose, but the utmost point is controlled specific air consumption and dry efficiently substrate effectively.
Detailed is, according to present embodiment, as Fig. 5 and shown in Figure 6, because all surfaces 2a to the substrate 2 that do not need a large amount of air mass flows sprays an amount of air, subsequently, when the 2nd 4d of air jet chamber faces bight, the rear 2c of substrate 2, the flow of the air jet chamber 4d injection air of increase from the 2nd also only ejects the air with powerful jet power to this bight, rear 2c, simultaneously never in the face of the 1st the 4c of the air jet chamber injection air of substrate rear bight 2c, so do not utilize air lavishly and controlled specific air consumption effectively, can dry efficiently substrate.
Meanwhile, in the present embodiment, as shown in Figure 4, because when transporting of substrate 2 begins, spray for the liquid (drop) on the 2B of bight, the place ahead being dispelled the air of necessary minimum ratio to the bight, the place ahead of substrate 2 2b from the 1st 4c of air jet chamber, and stop to spray from the air of the 2nd the 4d of air jet chamber, so begin to the overall process that finishes to control specific air consumption extremely effectively never in the face of the air jet chamber of substrate surface 2a carries out the injection of air in drying from substrate 2.
(embodiment 2)
Below, the embodiment 2 of the substrate drying device that present invention will be described in detail with reference to the accompanying.Fig. 8 is the substrate drying device vertical view of the embodiment of the invention 2.Fig. 9 is the air knife nozzle stereogram of the arrow C direction from Fig. 8 when seeing the substrate drying device of present embodiment.
Below, in the substrate drying device 10 of embodiments of the invention 2, as the conveyer that transports substrate 2 transport roller sections 3, identical with the structure of embodiment 1, its explanation of Therefore, omited.
In the 10a of the cabin of substrate drying device 10, the air knife nozzle 11 of flat column is configured to its length direction along Fig. 9 medium dip direction Z and in the face of substrate 2.Particularly, the air knife nozzle 11 of present embodiment, portion within it is provided with and can moves along its length, and with the 1st dividing plate 112a and the 2nd dividing plate 12b of side 11a configured in parallel.
In addition, each dividing plate 12a, the 12b the 1st and the 2nd is installed with cylinder mechanism 13a, the 13b that is made of piston from the two ends of air knife nozzle 11.This cylinder mechanism 13a, 13b, to parallel with the length direction of air knife nozzle 11, promptly the I direction moves among the figure, and the 1st and the 2nd dividing plate 12a, 12b move with cylinder mechanism 13a, 13b's.At this moment, in air knife nozzle 11, separate and the formation air 11b of jet chamber with the 1st and the 2nd dividing plate 12a, 12b.
In addition, at the front end of air knife nozzle 11, be provided with the air injection slit 11c that forms along its length direction, this air sprays with slit 11c also to be separated by the 1st dividing plate 12a and the 2nd dividing plate 12b, and forms air jet 11d.And this air jet 11d divides equally the 11b of air jet chamber.
Air jet 11d, the 11b of air jet chamber that follows volume-variation separate with the 1st dividing plate 12a and the 2nd dividing plate 12b and change its opening size, spray the air of ormal weight.
On a side of air knife nozzle 11, as shown in Figure 9, it is connecting abreast along its length and is being used for handle from there be not the 1st air supply pipe 14a, the 2nd air supply pipe 14b and the 3rd air supply pipe 14c that illustrated compressor compressed and supplied air is supplied with in nozzle.
In addition, between air knife nozzle 11 and no illustrated compressor, dispose the flow controller 15 of the air mass flow that control supplies with from these air supply pipe 14a, 14b of the 1st, the 2nd and the 3rd and 14c in the 11b of air jet chamber.
At this, are devices as flow controller 15, but preferably are provided with the air supply valve that can open and close flexibly automatically with normally used air supply valve.By being set, this air supply valve can make the switching of air injection become easy.
This flow controller 15, the air capacity that adjustment is sprayed in the 11b of air jet chamber, and, by the switching of the no illustrated air supply valve of interior dress, select only air supply pipe among the 1st, the 2nd and the 3rd air supply pipe 14a, 14b and the 14c, and carry air to the 11b of air jet chamber.
In the 10a of the cabin of substrate drying device 10,, be provided with and be used to detect the substrate 2 that is transported the 1st transducer 16 with respect to the position of air knife nozzle 11 in the face of the peripheral portion 11al of the side 11a of the substrate carriage direction rear side that constitutes air knife nozzle 11.
In addition, in the face of with the side 11e of the side 11a opposition side of air knife nozzle 11, be provided with and be used to detect 2nd transducer 17 of substrate 2 with respect to the position of air knife nozzle 11.
And, the 1st and the 2nd transducer 16,17, its structure also transducer 7,8,9 with embodiment 1 is the same.
Subsequently, detect position with these transducers 16,17 to the air knife nozzle 11 of the substrate 2 that is transported, and, flow controller 15 according to this detected data from the 1st, the 2nd and the 3rd air supply pipe 14a, 14b and 14c select only air supply pipe, and adjust by the air capacity of this air supply pipe from the 11b of air jet chamber injection.
The substrate drying device 10 of present embodiment is the device that is used for the following substrate after drenching processing of drying as constituted above.Figure 10 to Figure 14 is the ideograph that is used to illustrate substrate 2 drying means of the substrate drying device 10 that uses the embodiment of the invention 2.
At first, drench the substrate 2 after the processing, continue to use the carriage direction X that transports roller portion 3 and be admitted in the 10a of cabin.Subsequently, as shown in figure 10, in a single day the 1st transducer 16 detects substrate 2, cylinder mechanism 13a, 13b just according to the data of this detection respectively in figure the I direction begin to move, and form the 11b of air jet chamber that meets in the face of the size of the zoning of substrate surface 2a with dividing plate 12a, 12b.
Meanwhile, flow controller 15 is selected the 1st air supply pipe 14a, and sprays the air of the only flow proportional in the 2b zone, bight, the place ahead that meets substrate surface 2a by this air supply pipe 14a.
And, substrate 2 continue advance, cylinder mechanism 13a, 13b also move with dividing plate 12a, 12b along I direction among the figure with the fixing speed with respect to the substrate travelling speed, and according to the volume in the face of the area change air 11b of jet chamber in the substrate surface 2a.Meanwhile, as shown in figure 11, flow controller 15 is according to the detection of 17 pairs of substrates of the 2nd transducer, and adjustment is suitable for the air in the face of the flow proportional in the zone of substrate surface 2a most, and adjusted air is ejected from the 11b of air jet chamber by only air supply pipe.
At this moment, flow controller 15 is selected the only air supply pipe that is connected with the 11b of air jet chamber from air supply pipe 14a, 14b, 14c, for example selects the 2nd air supply pipe 14b of Figure 11.
Like this, as shown in figure 12, during substrate 2 was transported, according in the face of the zone of substrate surface 2a, the volume of the mobile change air 11b of jet chamber by dividing plate 12a, 12b also sprayed corresponding to the air in the face of the flow proportional in the zone of substrate surface 2a from the 11b of air jet chamber.
At this, when each dividing plate 12a, 12b move to the most external in the air knife nozzle 11, and the whole air 11b of jet chamber is when facing substrate surface 2a, the flow proportional A[l/min that sprays from the 11b of air jet chamber], for example be 200[l/min].
In addition, the selection of the air supply pipe of flow controller 15, also can select the air supply pipe that is connected with the 11b of air jet chamber that has changed volume, and be not limited to and from above-mentioned a plurality of air supply pipes, select an air supply pipe, certainly from a plurality of air supply pipes, select a plurality of air supply pipes that are connected with the 11b of air jet chamber.
Subsequently, as shown in figure 13, in case the detection of the 2nd transducer 17 finishes, then flow controller 15 actions and an air from the 11b of air jet chamber injection are increased to the liquid (drop) on bight, the rear 2c of substrate 2 are dispelled necessary flow proportional, and eject by the 3rd air supply pipe 14c.
At this moment, for the liquid (drop) on the 2c of bight, rear is dispelled, the flow proportional that sprays from the 11b of air jet chamber is done the adjustment of following amount.That is, in substrate drying device in the past,, must be with air knife nozzle total length L flow proportional B[l/min for the liquid (drop) that dispels the substrate bight], for example 400[l/min] air spray from the air knife nozzle.But, in the substrate drying device 10 of present embodiment, for having the liquid in substrate bight (drop) is dispelled with its same units length jet power, under the supposition substrate travelling speed situation identical with the substrate travelling speed of in the past substrate drying device 50, the total length of air knife nozzle length direction is made as L, the total length of the 11b of air jet chamber length direction is made as m, then use B * m/L[l/min] (m＜L), 400 * m/L[l/min for example] (flow proportional of m＜L) gets final product the specific air consumption of having controlled compared with the past.
At last, as shown in figure 14, when air knife nozzle 11 when leaving in the face of the position of substrate 2, flow controller 15 moves on to the adjustment end mode, and stops to spray from the air of the 11b of air jet chamber.
Detailed is, when after the detection of substrate 2 through the 1st transducer 16 that the substrate travelling speed is transported in accordance with regulations, through the stipulated time time, the no illustrated drive control part that has stored the program of not facing air knife nozzle 11 position orders is with regard to control flows amount controller 15.Therefore, one through the stipulated time, and flow controller 15 just is in end mode.
Like this, in the present embodiment, the substrate 2 that drenches after the processing with 11 pairs at air knife nozzle carries out drying.
As mentioned above, according to the substrate drying device 10 that uses the embodiment of the invention 2 the drying method for substrate of drying substrates, because with the 1st and the 2nd dividing plate 12a, 12b, according to the size of facing the 11b of air jet chamber of substrate 2 in the face of the area change of substrate 2, and spray the air capacity that is suitable for most in the face of the zone of substrate 2 from the 11b of this air jet chamber, so can more critically adjust and spray the air capacity that is suitable for substrate 2 most, and Min. ground control specific air consumption.
(invention effect)
As explained in detail above, according to the present invention, can individually adjust the air capacity of spraying from a plurality of air jet chamber, and the relative position of substrate is sprayed the air of optimal dose according to the air knife nozzle to substrate surface, can control specific air consumption and dry efficiently substrate effectively, the drying means that the substrate drying device of high energy efficiency can be provided and use it.
Claims (10)
1. substrate drying device has:
Transport the substrate that the surface speckles with liquid the substrate conveyer,
With the configuration of the substrate opposite that transports by described substrate conveyer and to described substrate surface injection air and to this substrate carry out dry air knife nozzle,
Control is characterized in that from the air capacity controlling organization of the air emitted dose of described air knife nozzle ejection:
Described air knife nozzle is divided into a plurality of air jet chamber that faces described substrate surface respectively,
Described air capacity controlling organization according to the relative position of described air knife nozzle with the described substrate that is transported, is adjusted the air capacity of spraying from each described air jet chamber respectively.
2. substrate drying device according to claim 1 is characterized in that:
Described air knife nozzle is a columnar shape, and its length direction is provided with across along described substrate carriage direction inclination,
Be provided with each air jet in the face of described substrate surface in described a plurality of air jet chamber, these a plurality of air jets are arranged on the length direction of described air knife nozzle,
During when the bight at the end of the drying of the described substrate that is transported, in the face of any one the described air jet in described a plurality of air jet chamber, described air capacity controlling organization, only increase the air capacity of spraying, so that the liquid that remains in this bight is dispersed from the described air jet chamber that faces with described bight.
3. substrate drying device according to claim 2 is characterized in that:
Stop never air jet chamber injection air with the described bight opposite face of described substrate by described air capacity controlling organization.
4. substrate drying device according to claim 1 is characterized in that:
Stop from facing the air jet chamber injection air that described substrate surface position is left certainly by described air capacity controlling organization.
5. substrate drying device according to claim 1 is characterized in that:
Described air capacity controller has a plurality of air supply valves that are connected respectively with described a plurality of air jet chamber.
6. substrate drying device according to claim 1 is characterized in that:
Described a plurality of air jet chamber, the dividing plate that is disposed in the air knife nozzle by the length direction along described air knife nozzle is separated,
Described dividing plate is movably, and can move according to zone in the face of the described substrate that is transported, scalable is faced the volume of the air jet chamber of described substrate, and can change the air capacity of spraying from the face of the air jet chamber of this substrate according to the zone in the face of described substrate by described air capacity controlling organization.
7. substrate drying device according to claim 1 is characterized in that:
At assigned position, be provided with the transducer that is used to detect described air knife nozzle and described substrate relative position with respect to described air knife nozzle.
8. drying method for substrate, be to use the drying method for substrate of the described substrate drying device of claim 1, it is characterized in that: a plurality of air jets that are provided with on the opposite of each described substrate of described a plurality of air jet chamber, the mode of arranging with the direction that tilts to intersect along described substrate carriage direction disposes described air knife nozzle and described substrate subtend, and transport described substrate by described substrate conveyer, when in described substrate transports, each chamber of described a plurality of air jet chamber in the face of described substrate the surface in the time, spray for the liquid on the described substrate surface being dispelled the air of aequum from each chamber of described a plurality of air jet chamber, then, in described a plurality of air jet chamber any one is in the face of the bight, rear at the end of the drying that becomes described substrate in described substrate transports, and when remaining air jet chamber is left from the position of facing described substrate surface, by described air capacity controlling organization, make from the air that sprays in the face of the described air jet chamber in bight, described rear and increase emitted dose, so that dispel the liquid that residues in this bight, rear, stop simultaneously from described remaining air jet chamber injection air.
9. drying method for substrate according to claim 8 is characterized in that:
When transporting of described substrate begins, when in described a plurality of air jet chamber any one in the face of in the bight, the place ahead of the dry forefront that becomes described substrate and remaining air jet chamber when leaving in the face of the position of described substrate surface, make from spraying in the face of the described air jet chamber in bight, described the place ahead in order to dispelling the air of the liquid institute necessary amount on bight, described the place ahead, and stop from described remaining air jet chamber injection air.
10. drying method for substrate, be to use the drying method for substrate of the described substrate drying device of claim 6, it is characterized in that: described dividing plate is set movably, transport described substrate by described substrate conveyer, in the transporting of described substrate, can move described dividing plate according to zone in the face of this substrate that is transported, and one side adjusting range is to the volume of the described air jet chamber of described substrate, change the air capacity that ejects from this air jet chamber that meets in the face of described substrate regions by described air capacity controlling organization on one side, and from this air jet chamber injection air.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001361001 | 2001-11-27 | ||
| JP2001-361001 | 2001-11-27 | ||
| JP2001361001A JP3868804B2 (en) | 2001-11-27 | 2001-11-27 | Substrate drying apparatus and substrate drying method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1423308A true CN1423308A (en) | 2003-06-11 |
| CN1225009C CN1225009C (en) | 2005-10-26 |
Family
ID=19171727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021524211A Expired - Fee Related CN1225009C (en) | 2001-11-27 | 2002-11-27 | Base-board drying device and method for drying base-board using same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3868804B2 (en) |
| KR (1) | KR100452803B1 (en) |
| CN (1) | CN1225009C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100362625C (en) * | 2005-03-30 | 2008-01-16 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN102435058A (en) * | 2011-07-08 | 2012-05-02 | 友达光电股份有限公司 | Drying equipment, photoresist removing equipment and drying method |
| CN103758771A (en) * | 2013-12-31 | 2014-04-30 | 河南安彩高科股份有限公司 | Fan device and method for glass drying |
| CN107957183A (en) * | 2016-10-18 | 2018-04-24 | 上村工业株式会社 | Drying device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100684048B1 (en) * | 2005-03-15 | 2007-02-16 | 주식회사 디엠에스 | Apparatus for jetting fluid |
| JP4907468B2 (en) * | 2007-08-16 | 2012-03-28 | 東京エレクトロン株式会社 | Cleaning device and cleaning method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0536660A (en) * | 1991-07-30 | 1993-02-12 | Tokyo Electron Ltd | Substrate drying device |
| JPH0735478A (en) * | 1993-07-20 | 1995-02-07 | Shimada Phys & Chem Ind Co Ltd | Air knife device |
| KR19980060366U (en) * | 1997-03-10 | 1998-11-05 | 구자홍 | Air Knife Cleaning / Drying Equipment |
| KR100507567B1 (en) * | 2000-06-27 | 2005-08-17 | 주식회사 포스코 | Air knife for removing wet oil from strip |
| KR100366552B1 (en) * | 2001-03-20 | 2002-12-31 | 주식회사 디엠에스 | Air knife dryer |
-
2001
- 2001-11-27 JP JP2001361001A patent/JP3868804B2/en not_active Expired - Fee Related
-
2002
- 2002-11-07 KR KR10-2002-0068651A patent/KR100452803B1/en not_active IP Right Cessation
- 2002-11-27 CN CNB021524211A patent/CN1225009C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100362625C (en) * | 2005-03-30 | 2008-01-16 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN102435058A (en) * | 2011-07-08 | 2012-05-02 | 友达光电股份有限公司 | Drying equipment, photoresist removing equipment and drying method |
| CN102435058B (en) * | 2011-07-08 | 2014-06-11 | 友达光电股份有限公司 | Drying equipment, photoresist removing equipment and drying method |
| CN103758771A (en) * | 2013-12-31 | 2014-04-30 | 河南安彩高科股份有限公司 | Fan device and method for glass drying |
| CN103758771B (en) * | 2013-12-31 | 2016-08-17 | 河南安彩高科股份有限公司 | A kind of blower fan apparatus being dried for glass and method |
| CN107957183A (en) * | 2016-10-18 | 2018-04-24 | 上村工业株式会社 | Drying device |
| CN107957183B (en) * | 2016-10-18 | 2021-12-31 | 上村工业株式会社 | Drying device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030043639A (en) | 2003-06-02 |
| KR100452803B1 (en) | 2004-10-14 |
| CN1225009C (en) | 2005-10-26 |
| JP2003161578A (en) | 2003-06-06 |
| JP3868804B2 (en) | 2007-01-17 |
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