CN1423115A - Hard coating hardness measuring method - Google Patents
Hard coating hardness measuring method Download PDFInfo
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- CN1423115A CN1423115A CN 02155018 CN02155018A CN1423115A CN 1423115 A CN1423115 A CN 1423115A CN 02155018 CN02155018 CN 02155018 CN 02155018 A CN02155018 A CN 02155018A CN 1423115 A CN1423115 A CN 1423115A
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Abstract
First, the technique of the tiny mechanics probe is adopted to carry out the first step of the indentation detecting of the composite body of the coating layer/basal body. In the indentation detecting, the load is applied to the indenter, making the deformation zone in front of the indenter expand to the basal body. The varying relation between the indentation load and the indentation depth is recorded. Based on the change of the indentation depth, the hardness of the compoiste body of the coating layer/basal body under the loaded condition is calculated out. Further, the varying curve between the hardness and the indentation load is made. The second step of the indentation detecting is carried out under the coating layer without the influence of the deformation of the basal body. The invention possesses the features of the accuracy and reliable.
Description
Technical field
What the present invention relates to is a kind of coating measuring method, and particularly a kind of measuring method of hard coat hardness belongs to the material properties test field.
Technical background
In the prior art on metal material and wimet tool and mould the plating solid-ceramic coating can improve the crudy and the serviceable life of tool and mould, thereby in machining industry, be used widely.In the quality assessment of hard coat, the hardness of accurately measuring coating is significant, but, because hard coat has the characteristics of hardness height (greater than 15GPa) and thin thickness (1 μ m-10 μ m), make the measurement of its hardness very difficult, its difficult point is mainly reflected in the loading of pressing in of hardness test and selects: too small loading of pressing in can make the gained data disperse very much because of the disturbance of specimen surface roughness and surveying instrument itself, excessive loading of pressing in then can make the distorted area of pressure head front end be diffused into the lower base material of hardness and make the measured value distortion.Find that through retrieval measuring technique in the past is to adopt to measure coating thickness in advance, then adopt the control compression distance to come the reliability of indirect control survey less than a certain proportion of way of coating thickness document.To this ratio, initial author SundgrcnJ.E and Hentzell H.T.G are at A review of present state of art in hard coatings grownfrom the vapor phase (vapour deposition hard coat state of the art summary) J.Vac.Sci.Technol. (A), 1986,4 (5): proposing in 2259-2279 one literary composition should be less than 1/5 of coating thickness.Then having the scholar to propose this ratio again should be less than 1/10 and 1/15.In the recent period, author Stan Veprek is at The searchfor novel supcrhard materials (novel superhard material exploration) J.Vac.Sci.Technol. (A), 1999,17 (5): in 2401-2420 one literary composition even propose this ratio and should could guarantee accuracy that hard coat is measured less than 1/20.Thereby, for adopt the control pressure head to the compression distance of coating with the technology that obtains reliable hardness number imperfection still, and adopt this method also need know the definite thickness of coating in advance.To the further retrieval and the analysis of document, still do not find identical with theme of the present invention or similar bibliographical information so far.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of measuring method of hard coat hardness is provided, it is the hardness measurement of 1 μ m-10 μ m hard coat that measuring method of the present invention has been solved at thickness, the measurement of hard coat is not being known measure the hardness of coating accurately, reliably under the definite thickness condition of this coating.
The present invention is achieved by the following technical solutions, the load that adopts the micro mechanics probe technique at first coating/substrate complex to be enough to make pressure head front end distorted area expand to base material is carried out the first step and is pressed into detection, and loading of pressing in and pressure head are pressed into the variation relation of profile depth in the meter record process of press in, and then the variation by compression distance, calculate the coating/hardness of base material complex under loaded condition, and make the change curve of coating/base material complex stand under load hardness with loading of pressing in.Because in process of press in, sample progressively expands to base material in the distorted area of pressure head front end from coating, thereby can go out the initial platform area that forms a high rigidity of coating/base material complex hardness because of the coating of high rigidity with than the mRNA differential display mRNA of base material on hardness of soft in the curve of loading of pressing in coating stand under load hardness, the hardness number influence that is subjected to the base material distortion then progressively descends.From carrying out second step of little load and be pressed into detection, and then obtain the coating hardness value that pressure head front end distorted area instrument is limited to choose high rigidity platform area loading of pressing in the upper curve.
The mechanics probing needle equipment that the present invention adopts should 1mN to the 100mN scope at least continuously, load step by step, and the degree of depth of continuous recording loaded load and pressure head pressing in sample.The resolution of pressure head on compression distance should reach ± 2nm.Pressure head adopts diamond to make, and its shape can adopt various existing hardness penetrator types, as Vickers pressure head, Nu Shi pressure head etc.High rigidity platform area loading of pressing in is that pressure head only limits to loading of pressing in the coating in pressure head front end deformation district when being pressed into.
There are notable difference in coating and base material on hardness be to adopt the present invention that hard coat is carried out the precondition that hardness is accurately measured.The hardness of considering hard coat is usually greater than 15GPa, and base material adopts various metals usually, as high-speed steel, and stainless steel etc., its hardness adopts measuring method of the present invention can obtain the exact value of coating hardness usually less than 10GPa; For the hardness measurement of hardness number up to hard coat on the cemented carbide base material of 10-20GPa, then require coating that higher hardness is arranged, the difference of hardness of coating and base material is reached more than the 5GPa, can adopt measuring method of the present invention.
The present invention has substantive distinguishing features and marked improvement, it is the technical barrier of 1 μ m-10 μ m hard coat hardness measurement that invention has solved thickness, not knowing to measure the hardness of coating accurately, reliably under the definite thickness condition of this coating, can be widely used in the coating that coating hardness is higher than 15Gpa.The present invention carries out in the time of can making the hardness measurement of hard coat do not known definite thickness in advance, and have accurately, reliable characteristics.
Embodiment
The first step of big load is pressed into detection to adopt the micro mechanics probe technique at first to carry out enough to coating/substrate complex, the first step is pressed into and adopts the load that is enough to make pressure head front end distorted area expand to base material to carry out, guaranteeing that sample expands to base material range in the distorted area of pressure head front end, this point can reduce by the hardness of coating/base material complex when the big loading of pressing in to be confirmed.Loading of pressing in and pressure head are pressed into the variation relation of profile depth in the meter record process of press in, and then the variation by compression distance, calculate the coating/hardness of base material complex under loaded condition, the loading of pressing in that provides by mechanics probing needle and the loading curve of compression distance, calculate the change curve of coating/base material complex stand under load hardness with loading of pressing in, and make the change curve of coating/base material complex stand under load hardness, thereby can determine that coating/base material complex base material when pressure head is pressed into does not produce the loading of pressing in scope of distortion from the high rigidity platform area on the curve with loading of pressing in.Because in process of press in, sample progressively expands to base material in the distorted area of pressure head front end from coating, thereby can go out the initial platform area that forms a high rigidity of coating/base material complex hardness because of the coating of high rigidity with than the mRNA differential display mRNA of base material on hardness of soft in the curve of loading of pressing in coating stand under load hardness, the hardness number influence that is subjected to the base material distortion then progressively descends.Second step was pressed into to detect and chooses the big load of the first step and be pressed into and detect the base material of determining loading of pressing in scope indeformable, that front end deformation district only limited in the coating when pressure head was pressed into and carry out, thereby by the process of measurement of prior art, obtained the hardness number of hard coat.
Claims (4)
1. the measuring method of a hard coat hardness, it is characterized in that, the load that adopts the micro mechanics probe technique at first coating/substrate complex to be enough to make pressure head front end distorted area expand to base material is carried out the first step and is pressed into detection, loading of pressing in and pressure head are pressed into the variation relation of profile depth in the meter record process of press in, and then the variation by compression distance, calculate the coating/hardness of base material complex under loaded condition, and make the change curve of coating/base material complex stand under load hardness with loading of pressing in, from carrying out little second step of load and be pressed into detection to choose high rigidity platform area loading of pressing in the upper curve.
2. the measuring method of this hard coat hardness according to claim 1 is characterized in that, the resolution of pressure head on compression distance is ± 2nm that pressure head is a diamond.
3. the measuring method of this hard coat hardness according to claim 2 is characterized in that, indenter shape is Vickers pressure head or Nu Shi pressure head.
4. the measuring method of this hard coat hardness according to claim 1 is characterized in that, described high rigidity platform area loading of pressing in is that pressure head only limits to loading of pressing in the coating in front end deformation district when being pressed into.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02155018 CN1216280C (en) | 2002-12-19 | 2002-12-19 | Hard coating hardness measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02155018 CN1216280C (en) | 2002-12-19 | 2002-12-19 | Hard coating hardness measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1423115A true CN1423115A (en) | 2003-06-11 |
| CN1216280C CN1216280C (en) | 2005-08-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 02155018 Expired - Fee Related CN1216280C (en) | 2002-12-19 | 2002-12-19 | Hard coating hardness measuring method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142280A (en) * | 2013-10-16 | 2014-11-12 | 河南富耐克超硬材料股份有限公司 | Method for detecting hard coating quality |
| CN104568622A (en) * | 2014-08-15 | 2015-04-29 | 南京汉旗新材料科技有限公司 | Method for measuring powder hardness |
| CN107607422A (en) * | 2017-08-30 | 2018-01-19 | 苏州昌田机械设备制造有限公司 | A kind of coating for metal surfaces hardness-testing device |
| CN108240943A (en) * | 2016-12-24 | 2018-07-03 | 青海大学 | A kind of method with nano impress detection cold rolled metal thin plate normal strain uniformity |
| CN109115639A (en) * | 2018-08-16 | 2019-01-01 | 哈尔滨工业大学 | A kind of superhard material nano hardness measurement method considering pressure head flexible deformation |
-
2002
- 2002-12-19 CN CN 02155018 patent/CN1216280C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142280A (en) * | 2013-10-16 | 2014-11-12 | 河南富耐克超硬材料股份有限公司 | Method for detecting hard coating quality |
| CN104142280B (en) * | 2013-10-16 | 2016-08-10 | 富耐克超硬材料股份有限公司 | A kind of method detecting hard coat quality |
| CN104568622A (en) * | 2014-08-15 | 2015-04-29 | 南京汉旗新材料科技有限公司 | Method for measuring powder hardness |
| CN108240943A (en) * | 2016-12-24 | 2018-07-03 | 青海大学 | A kind of method with nano impress detection cold rolled metal thin plate normal strain uniformity |
| CN107607422A (en) * | 2017-08-30 | 2018-01-19 | 苏州昌田机械设备制造有限公司 | A kind of coating for metal surfaces hardness-testing device |
| CN109115639A (en) * | 2018-08-16 | 2019-01-01 | 哈尔滨工业大学 | A kind of superhard material nano hardness measurement method considering pressure head flexible deformation |
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| Publication number | Publication date |
|---|---|
| CN1216280C (en) | 2005-08-24 |
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