CN1389704A - 三轴移动传感器 - Google Patents
三轴移动传感器 Download PDFInfo
- Publication number
- CN1389704A CN1389704A CN02122165A CN02122165A CN1389704A CN 1389704 A CN1389704 A CN 1389704A CN 02122165 A CN02122165 A CN 02122165A CN 02122165 A CN02122165 A CN 02122165A CN 1389704 A CN1389704 A CN 1389704A
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- China
- Prior art keywords
- mover
- electrode
- opposite electrode
- moving
- ground floor
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/867666 | 2001-05-31 | ||
US09/867,666 US6504385B2 (en) | 2001-05-31 | 2001-05-31 | Three-axis motion sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1389704A true CN1389704A (zh) | 2003-01-08 |
CN1223825C CN1223825C (zh) | 2005-10-19 |
Family
ID=25350242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021221650A Expired - Fee Related CN1223825C (zh) | 2001-05-31 | 2002-05-31 | 三轴移动传感器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6504385B2 (zh) |
EP (1) | EP1262781A1 (zh) |
JP (1) | JP2003004481A (zh) |
CN (1) | CN1223825C (zh) |
Cited By (29)
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---|---|---|---|---|
CN1332179C (zh) * | 2003-12-23 | 2007-08-15 | 三星电机株式会社 | 配备有具有mems结构的电容补偿器的差分电容型mems传感器设备 |
CN1618722B (zh) * | 2003-07-31 | 2010-09-01 | 惠普开发有限公司 | 具有三晶片结构的微机电系统 |
CN101115675B (zh) * | 2004-12-06 | 2011-08-17 | Nxp股份有限公司 | 多传感器组件及其制造方法 |
CN1780732B (zh) * | 2003-04-29 | 2012-04-25 | 飞思卡尔半导体公司 | 向微机电传感器结构添加质量体的方法 |
CN102597699A (zh) * | 2009-08-04 | 2012-07-18 | 飞兆半导体公司 | 微机械惯性传感器器件 |
US8739626B2 (en) | 2009-08-04 | 2014-06-03 | Fairchild Semiconductor Corporation | Micromachined inertial sensor devices |
JP2014115282A (ja) * | 2012-12-05 | 2014-06-26 | Samsung Electronics Co Ltd | 触覚センサ |
US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
CN104380120A (zh) * | 2012-06-13 | 2015-02-25 | 株式会社电装 | 静电电容式物理量传感器 |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
US9006846B2 (en) | 2010-09-20 | 2015-04-14 | Fairchild Semiconductor Corporation | Through silicon via with reduced shunt capacitance |
WO2015078378A1 (zh) * | 2013-11-26 | 2015-06-04 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
US9062972B2 (en) | 2012-01-31 | 2015-06-23 | Fairchild Semiconductor Corporation | MEMS multi-axis accelerometer electrode structure |
US9069006B2 (en) | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
US9095072B2 (en) | 2010-09-18 | 2015-07-28 | Fairchild Semiconductor Corporation | Multi-die MEMS package |
US9094027B2 (en) | 2012-04-12 | 2015-07-28 | Fairchild Semiconductor Corporation | Micro-electro-mechanical-system (MEMS) driver |
US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
US9425328B2 (en) | 2012-09-12 | 2016-08-23 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
WO2019174243A1 (zh) * | 2018-03-14 | 2019-09-19 | 京东方科技集团股份有限公司 | 加速度传感器、电容检测电路及方法、加速度处理电路及方法、存储介质和电子设备 |
US10697994B2 (en) | 2017-02-22 | 2020-06-30 | Semiconductor Components Industries, Llc | Accelerometer techniques to compensate package stress |
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US7142500B2 (en) * | 2002-01-11 | 2006-11-28 | Hewlett-Packard Development Company, L.P. | Sensor with varying capacitance based on relative position between objects |
US7208809B2 (en) * | 2002-09-19 | 2007-04-24 | Nippon Telegraph And Telephone Corporation | Semiconductor device having MEMS |
JP3983638B2 (ja) * | 2002-09-24 | 2007-09-26 | ニッタ株式会社 | センサシート |
US6949938B2 (en) * | 2002-11-20 | 2005-09-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Prevention of robot damage via capacitive sensor assembly |
JP2004361388A (ja) * | 2003-05-15 | 2004-12-24 | Mitsubishi Electric Corp | 容量型慣性力検出装置 |
JP2007524841A (ja) * | 2003-07-01 | 2007-08-30 | タイアックス エルエルシー | 容量性位置センサー及び感知方法 |
US20050092085A1 (en) * | 2003-11-04 | 2005-05-05 | Shyu-Mou Chen | Solid-state gyroscopes and planar three-axis inertial measurement unit |
US7197928B2 (en) * | 2003-11-04 | 2007-04-03 | Chung-Shan Institute Of Science And Technology | Solid-state gyroscopes and planar three-axis inertial measurement unit |
US6981416B2 (en) * | 2003-11-21 | 2006-01-03 | Chung-Shan Institute Of Science And Technology | Multi-axis solid state accelerometer |
US7219033B2 (en) * | 2005-02-15 | 2007-05-15 | Magneto Inertial Sensing Technology, Inc. | Single/multiple axes six degrees of freedom (6 DOF) inertial motion capture system with initial orientation determination capability |
ITTO20050628A1 (it) * | 2005-09-15 | 2007-03-16 | St Microelectronics Srl | Dispositivo stabilizzatore di immagini, in particolare per l'acquisizione mediante un sensore di immagini digitali |
KR100951952B1 (ko) | 2005-10-25 | 2010-04-09 | 주식회사 케이티테크 | 모션 센서 |
US7258011B2 (en) * | 2005-11-21 | 2007-08-21 | Invensense Inc. | Multiple axis accelerometer |
CN1319892C (zh) * | 2005-11-30 | 2007-06-06 | 哈尔滨工业大学 | Mems高温压力传感器自动键合机 |
US7808061B2 (en) * | 2006-07-28 | 2010-10-05 | Hewlett-Packard Development Company, L.P. | Multi-die apparatus including moveable portions |
US20080030464A1 (en) * | 2006-08-03 | 2008-02-07 | Mark Sohm | Motion-based user interface for handheld |
US7333291B1 (en) | 2006-09-28 | 2008-02-19 | Hewlett-Packard Development Company, L.P. | System and method for reducing tracking noise in a tape drive |
US7851876B2 (en) * | 2006-10-20 | 2010-12-14 | Hewlett-Packard Development Company, L.P. | Micro electro mechanical system |
US7640805B2 (en) * | 2006-12-18 | 2010-01-05 | Akustica, Inc. | Proof-mass with supporting structure on integrated circuit-MEMS platform |
WO2008086537A2 (en) * | 2007-01-11 | 2008-07-17 | Analog Devices, Inc. | Aluminum based bonding of semiconductor wafers |
DE102007017209B4 (de) * | 2007-04-05 | 2014-02-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Inertialsensor zur Messung von Drehraten |
US20080290430A1 (en) * | 2007-05-25 | 2008-11-27 | Freescale Semiconductor, Inc. | Stress-Isolated MEMS Device and Method Therefor |
US7980145B2 (en) * | 2007-12-27 | 2011-07-19 | Y Point Capital, Inc | Microelectromechanical capacitive device |
US20090206846A1 (en) * | 2008-02-14 | 2009-08-20 | Sanchez Francisco J | Capacitor-based position sensor for vehicle |
US7938004B1 (en) | 2008-03-21 | 2011-05-10 | Brunsch Jr James P | Systems and methods for angular rate and position measurement |
US20110018561A1 (en) * | 2008-03-26 | 2011-01-27 | Hewlett-Packard Company | Capacitive sensor having cyclic and absolute electrode sets |
CN101726629B (zh) * | 2008-10-29 | 2012-07-18 | 原相科技股份有限公司 | 微机电元件、出平面传感器与微机电元件制作方法 |
US8183076B2 (en) * | 2008-11-13 | 2012-05-22 | Pixart Imaging Incorporation | Micro-electro-mechanical system device, out-of-plane sensor and method for making micro-electro-mechanical system device |
CN101865933A (zh) * | 2010-06-07 | 2010-10-20 | 瑞声声学科技(深圳)有限公司 | 差分电容式加速度传感器 |
US20120007597A1 (en) * | 2010-07-09 | 2012-01-12 | Invensense, Inc. | Micromachined offset reduction structures for magnetic field sensing |
US8656778B2 (en) | 2010-12-30 | 2014-02-25 | Rosemount Aerospace Inc. | In-plane capacitive mems accelerometer |
US8754694B2 (en) | 2012-04-03 | 2014-06-17 | Fairchild Semiconductor Corporation | Accurate ninety-degree phase shifter |
US8742964B2 (en) | 2012-04-04 | 2014-06-03 | Fairchild Semiconductor Corporation | Noise reduction method with chopping for a merged MEMS accelerometer sensor |
US9507399B2 (en) * | 2012-04-24 | 2016-11-29 | Analog Devices, Inc. | Accelerometer-controlled master power switch for electronic devices |
US9046547B2 (en) * | 2012-08-13 | 2015-06-02 | Pgs Geophysical As | Accelerometer having multiple feedback systems operating on a given proof mass |
WO2014120206A1 (en) * | 2013-01-31 | 2014-08-07 | Hewlett-Packard Development Company, L.P. | Sensor having particle barrier |
US20140260617A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Fully differential capacitive architecture for mems accelerometer |
US20140260618A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Force feedback electrodes in mems accelerometer |
CN104880574B (zh) * | 2013-07-30 | 2018-12-14 | 苏州固锝电子股份有限公司 | 三轴加速度传感芯片 |
CN103412146B (zh) * | 2013-07-30 | 2015-05-20 | 苏州固锝电子股份有限公司 | 电容式mems加速度传感器 |
US9785263B2 (en) * | 2013-08-22 | 2017-10-10 | Microchip Technology Incorporated | Touch screen stylus with force and/or angle sensing functionality |
CN104112069B (zh) * | 2014-07-04 | 2017-05-17 | 南京航空航天大学 | 基于微结构图像识别的纤维增韧复合材料各向异性导热系数预估方法 |
TWI510786B (zh) * | 2014-09-18 | 2015-12-01 | Kuei Ann Wen | 三軸加速度計 |
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US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
JP3399336B2 (ja) * | 1997-12-22 | 2003-04-21 | 株式会社豊田中央研究所 | 検出器 |
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-
2001
- 2001-05-31 US US09/867,666 patent/US6504385B2/en not_active Expired - Lifetime
-
2002
- 2002-05-08 JP JP2002132638A patent/JP2003004481A/ja active Pending
- 2002-05-30 EP EP02253812A patent/EP1262781A1/en not_active Withdrawn
- 2002-05-31 CN CNB021221650A patent/CN1223825C/zh not_active Expired - Fee Related
Cited By (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1780732B (zh) * | 2003-04-29 | 2012-04-25 | 飞思卡尔半导体公司 | 向微机电传感器结构添加质量体的方法 |
CN1618722B (zh) * | 2003-07-31 | 2010-09-01 | 惠普开发有限公司 | 具有三晶片结构的微机电系统 |
CN1332179C (zh) * | 2003-12-23 | 2007-08-15 | 三星电机株式会社 | 配备有具有mems结构的电容补偿器的差分电容型mems传感器设备 |
US8735198B2 (en) | 2004-12-06 | 2014-05-27 | Nxp, B.V. | Electromechanical sensor apparatus and methods with multisensing aspects |
CN101115675B (zh) * | 2004-12-06 | 2011-08-17 | Nxp股份有限公司 | 多传感器组件及其制造方法 |
CN102597699B (zh) * | 2009-08-04 | 2015-07-08 | 飞兆半导体公司 | 微机械惯性传感器器件 |
US8739626B2 (en) | 2009-08-04 | 2014-06-03 | Fairchild Semiconductor Corporation | Micromachined inertial sensor devices |
CN102597699A (zh) * | 2009-08-04 | 2012-07-18 | 飞兆半导体公司 | 微机械惯性传感器器件 |
US9856132B2 (en) | 2010-09-18 | 2018-01-02 | Fairchild Semiconductor Corporation | Sealed packaging for microelectromechanical systems |
US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
US9586813B2 (en) | 2010-09-18 | 2017-03-07 | Fairchild Semiconductor Corporation | Multi-die MEMS package |
US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
US9095072B2 (en) | 2010-09-18 | 2015-07-28 | Fairchild Semiconductor Corporation | Multi-die MEMS package |
US9455354B2 (en) | 2010-09-18 | 2016-09-27 | Fairchild Semiconductor Corporation | Micromachined 3-axis accelerometer with a single proof-mass |
US10050155B2 (en) | 2010-09-18 | 2018-08-14 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
US9006846B2 (en) | 2010-09-20 | 2015-04-14 | Fairchild Semiconductor Corporation | Through silicon via with reduced shunt capacitance |
US9062972B2 (en) | 2012-01-31 | 2015-06-23 | Fairchild Semiconductor Corporation | MEMS multi-axis accelerometer electrode structure |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
US9599472B2 (en) | 2012-02-01 | 2017-03-21 | Fairchild Semiconductor Corporation | MEMS proof mass with split Z-axis portions |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
US9069006B2 (en) | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
US9094027B2 (en) | 2012-04-12 | 2015-07-28 | Fairchild Semiconductor Corporation | Micro-electro-mechanical-system (MEMS) driver |
CN104380120B (zh) * | 2012-06-13 | 2016-11-09 | 株式会社电装 | 静电电容式物理量传感器 |
CN104380120A (zh) * | 2012-06-13 | 2015-02-25 | 株式会社电装 | 静电电容式物理量传感器 |
US9425328B2 (en) | 2012-09-12 | 2016-08-23 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
JP2014115282A (ja) * | 2012-12-05 | 2014-06-26 | Samsung Electronics Co Ltd | 触覚センサ |
WO2015078378A1 (zh) * | 2013-11-26 | 2015-06-04 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
US10697994B2 (en) | 2017-02-22 | 2020-06-30 | Semiconductor Components Industries, Llc | Accelerometer techniques to compensate package stress |
WO2019174243A1 (zh) * | 2018-03-14 | 2019-09-19 | 京东方科技集团股份有限公司 | 加速度传感器、电容检测电路及方法、加速度处理电路及方法、存储介质和电子设备 |
CN110275047A (zh) * | 2018-03-14 | 2019-09-24 | 京东方科技集团股份有限公司 | 加速度传感器、电容检测电路、加速度处理电路及方法 |
US11231440B2 (en) | 2018-03-14 | 2022-01-25 | Hefei Boe Optoelectronics Technology Co., Ltd. | Acceleration sensor, capacitance detection circuit and method, acceleration processing circuit and method, storage medium and electronic device |
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US20020180462A1 (en) | 2002-12-05 |
JP2003004481A (ja) | 2003-01-08 |
US6504385B2 (en) | 2003-01-07 |
EP1262781A1 (en) | 2002-12-04 |
CN1223825C (zh) | 2005-10-19 |
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