CN1329988C - 带有防静电二极管的金属化硅芯片及其制造工艺 - Google Patents
带有防静电二极管的金属化硅芯片及其制造工艺 Download PDFInfo
- Publication number
- CN1329988C CN1329988C CNB2005100870068A CN200510087006A CN1329988C CN 1329988 C CN1329988 C CN 1329988C CN B2005100870068 A CNB2005100870068 A CN B2005100870068A CN 200510087006 A CN200510087006 A CN 200510087006A CN 1329988 C CN1329988 C CN 1329988C
- Authority
- CN
- China
- Prior art keywords
- electrode
- antistatic diode
- silicon
- insulating barrier
- metallization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 216
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 216
- 239000010703 silicon Substances 0.000 title claims abstract description 216
- 238000001465 metallisation Methods 0.000 claims description 178
- 230000004888 barrier function Effects 0.000 claims description 102
- 229920002120 photoresistant polymer Polymers 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000009413 insulation Methods 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 description 22
- 241000218202 Coptis Species 0.000 description 5
- 235000002991 Coptis groenlandica Nutrition 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- 238000010923 batch production Methods 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 150000003376 silicon Chemical class 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100870068A CN1329988C (zh) | 2005-07-22 | 2005-07-22 | 带有防静电二极管的金属化硅芯片及其制造工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100870068A CN1329988C (zh) | 2005-07-22 | 2005-07-22 | 带有防静电二极管的金属化硅芯片及其制造工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1719609A CN1719609A (zh) | 2006-01-11 |
CN1329988C true CN1329988C (zh) | 2007-08-01 |
Family
ID=35931398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100870068A Expired - Fee Related CN1329988C (zh) | 2005-07-22 | 2005-07-22 | 带有防静电二极管的金属化硅芯片及其制造工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1329988C (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100459195C (zh) * | 2006-03-23 | 2009-02-04 | 财团法人工业技术研究院 | 可防止静电破坏的发光器封装结构及其制造方法 |
CN100452460C (zh) * | 2006-05-29 | 2009-01-14 | 金芃 | 通孔垂直结构的半导体芯片及其制造方法 |
CN100446288C (zh) * | 2006-08-01 | 2008-12-24 | 金芃 | 通孔垂直结构的半导体芯片及其制造方法 |
KR101189081B1 (ko) | 2010-12-16 | 2012-10-10 | 엘지이노텍 주식회사 | 웨이퍼 기판 접합 구조, 이를 포함하는 발광 소자 및 그 제조 방법 |
CN106981563B (zh) * | 2017-05-16 | 2023-11-14 | 广东工业大学 | 一种功率型紫外led器件 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11168235A (ja) * | 1997-12-05 | 1999-06-22 | Toyoda Gosei Co Ltd | 発光ダイオード |
JP2003304003A (ja) * | 2002-04-08 | 2003-10-24 | Citizen Electronics Co Ltd | 表面実装型発光ダイオード及びその製造方法 |
-
2005
- 2005-07-22 CN CNB2005100870068A patent/CN1329988C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11168235A (ja) * | 1997-12-05 | 1999-06-22 | Toyoda Gosei Co Ltd | 発光ダイオード |
JP2003304003A (ja) * | 2002-04-08 | 2003-10-24 | Citizen Electronics Co Ltd | 表面実装型発光ダイオード及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1719609A (zh) | 2006-01-11 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: INVENLUX OPTOELECTRONICS (CHINA) CO., LTD. Free format text: FORMER OWNER: JIN PENG Effective date: 20110311 Free format text: FORMER OWNER: PENG HUI |
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Free format text: CORRECT: ADDRESS; FROM: 100871 NO. 112, 33/F, YANDONGYUAN, PEKING UNIVERSITY, HAIDIAN DISTRICT, BEIJING TO: 314305 NO. 1, YINTAN ROAD, ECONOMIC DEVELOPMENT ZONE, DAQIAO NEW DISTRICT, HAIYAN COUNTY, ZHEJIANG PROVINCE |
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Effective date of registration: 20110311 Address after: 314305 No. 1, Silver Beach Road, economic development zone, Haiyan New District, Haiyan County, Zhejiang Patentee after: InvenLux Photoelectronics (China) Co., Ltd. Address before: 100871 Beijing Haidian District City 33 floor, No. 112 Yan Dong Yuan Peking University Co-patentee before: Peng Hui Patentee before: Jin Pi |
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Denomination of invention: Metallized silicon chip with antistantic diode Effective date of registration: 20130108 Granted publication date: 20070801 Pledgee: Pudong Development Bank of Shanghai, Limited by Share Ltd, Jiaxing branch Pledgor: InvenLux Photoelectronics (China) Co., Ltd. Registration number: 2013990000017 |
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Date of cancellation: 20130702 Granted publication date: 20070801 Pledgee: Pudong Development Bank of Shanghai, Limited by Share Ltd, Jiaxing branch Pledgor: InvenLux Photoelectronics (China) Co., Ltd. Registration number: 2013990000017 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Metallized silicon chip with antistantic diode Effective date of registration: 20130822 Granted publication date: 20070801 Pledgee: Haiyan Hangzhou Bay Bridge New Area Development Co., Ltd. Pledgor: InvenLux Photoelectronics (China) Co., Ltd. Registration number: 2013990000603 |
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Owner name: ZHEJIANG INVENLUX TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INVENLUX OPTOELECTRONICS (CHINA) CO., LTD. Effective date: 20150825 |
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Effective date of registration: 20150825 Address after: 314300, Jiaxing Province, Haiyan County, Zhejiang Economic Development Zone, Hangzhou Bay Bridge, New District, 01 provincial road, B7 Road East Patentee after: Zhejiang Invenlux Technology Co.,Ltd. Address before: 314305 No. 1, Silver Beach Road, economic development zone, Haiyan New District, Haiyan County, Zhejiang Patentee before: InvenLux Photoelectronics (China) Co., Ltd. |
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Date of cancellation: 20150813 Granted publication date: 20070801 Pledgee: Haiyan Hangzhou Bay Bridge New Area Development Co., Ltd. Pledgor: InvenLux Photoelectronics (China) Co., Ltd. Registration number: 2013990000603 |
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Granted publication date: 20070801 Termination date: 20200722 |
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