CN1328622C - Dual-feedback high-precision light-beam aiming control device - Google Patents
Dual-feedback high-precision light-beam aiming control device Download PDFInfo
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- CN1328622C CN1328622C CNB2005100098689A CN200510009868A CN1328622C CN 1328622 C CN1328622 C CN 1328622C CN B2005100098689 A CNB2005100098689 A CN B2005100098689A CN 200510009868 A CN200510009868 A CN 200510009868A CN 1328622 C CN1328622 C CN 1328622C
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Abstract
The present invention provides a light beam aiming and controlling device with double feedback and high accuracy, which relates to the technical field of laser control. The control data outputting end of 1 is connected with the control and input end of 2, the output end of 2 is connected with the control and input end of 3, and the detection signal outputting end of the deflection amount of the mirror surface of 3 is connected with the data inputting end of the deflection amount of the mirror surface of 1 through 11. Light beams output by 4 are reflected into the input end of 9 through the mirror surface end of 3, one part of the light beams are reflected and output by 9, and the other part of the light beams are transmitted by 9, are input into 10 through the output end of 9, are reflected to the input end of 8 through 10 and 9, are input into the input end of 7 through the output end of 8 after 8 transmission, are transmitted by 7, and are input into the input end of 6 through the output end of 7. The signal outputting end of 6 is connected with the signal inputting end of 5, and the data outputting end of 5 is connected with the image and data inputting end of 1. The present invention can control the deflection angle of two-dimensional deflection mirror reflection output beams with high accuracy, and the control error of the present invention is smaller than or equal to 0.5 murad.
Description
Technical field:
What the present invention relates to is the laser control technique field, specifically is a kind of dual-feedback high-precision light-beam aiming control device.
Background technology:
In the existing laser beam aiming control device, adopt the Piezoelectric Ceramic optical mirror to change the exit direction of light beam, the feedback unit of its closed-loop control is a micro-displacement sensor more.Because optical reflecting mirror is not a desirable rigid body, under the piezoelectric ceramics contractility drives deformation can take place, and then influence the yawing moment of light beam.In light-beam aiming control device, displacement transducer can only be measured the stroke of piezoelectric ceramics, can't measure the actual deflection amount of optical reflecting mirror.As seen, optical reflecting mirror deformation is the uncertain factor that influences the sighting device control accuracy, and existing apparatus is difficult to realize high precision light beam control, can not carry out real-time follow-up to the angle of incident laser light beam simultaneously.
Summary of the invention:
The purpose of this invention is to provide a kind of pair of feedback beam aiming control device.The present invention can solve the precision problem that influences control laser beam reflection angle because of the mirror surface deformation of two-dimensional deflection mirror.It comprises computing machine 1, deflecting mirror driver 2, two-dimensional deflection mirror 3, laser instrument 4, A/D converter 11; It also comprises image pick-up card 5, ccd video camera 6, convex lens 7, telescope 8, beam splitter 9, complete interior anti-prism 10; The deflecting mirror control data output terminal of computing machine 1 connects the control input end of deflecting mirror driver 2, the controlling and driving output terminal of deflecting mirror driver 2 connects the signal input end of two-dimensional deflection mirror 3, the mirror surface amount of deflection detection signal output terminal of two-dimensional deflection mirror 3 connects the signal input part of A/D converter 11, the data output end of A/D converter 11 connects the mirror surface amount of deflection data input pin of computing machine 1, the laser beam of laser instrument 4 outputs reflexes in the input end of beam splitter 9 through the minute surface end of two-dimensional deflection mirror 3, part light beam is through beam splitter 9 reflection outputs, another part light beam through the transmission of beam splitter 9 and be input to by the output terminal of beam splitter 9 complete in the anti-prism 10, again through complete interior anti-prism 10, beam splitter 9 reflexes in the input end of telescope 8, be input in the input end of convex lens 7 through the transmission of telescope 8 and by the output terminal of telescope 8, the transmission of planoconvex lens 7 also is input in the input end of ccd video camera 6 by the output terminal of convex lens 7, the image signal output end of ccd video camera 6 connects the picture signal input end of image pick-up card 5, and the view data output terminal of image pick-up card 5 connects the view data input end of computing machine 1.Principle of work: the part of the laser beam of laser instrument 4 outputs is by beam splitter 9 reflection back outputs, another part sees through beam splitter 9 after complete interior anti-prism 10, beam splitter 9 reflexes in the camera lens of ccd video camera 6, ccd video camera 6 is input to the two-dimensional coordinate data of laser beam in the computing machine 1 by image pick-up card 5, this computer-chronograph 1 is according to the two-dimensional coordinate data of laser beam, the mirror surface amount of deflection feedback data of two-dimensional deflection mirror 3, deflection angle to the mirror surface of two-dimensional deflection mirror 3 is controlled, and then controls the deflection angle of output laser beam.The present invention is when detecting the angle of incident laser light beam, its incident laser light beam incides in the camera lens of ccd video camera 6 by beam splitter 9, ccd video camera 6 is input to the two-dimensional coordinate data of incident laser light beam in the computing machine 1 by image pick-up card 5, makes computing machine 1 carry out real-time follow-up to the angle of incident laser light beam and detects.The deflection angle of the high-precision control two-dimensional deflection mirror reflection output beam of the present invention's energy, its departure≤0.5 μ rad also can be carried out real-time follow-up to the angle of incident laser light beam simultaneously, and it also has advantage simple in structure, that be easy to make.
Description of drawings:
Fig. 1 is an one-piece construction synoptic diagram of the present invention.
Embodiment:
In conjunction with Fig. 1 present embodiment is described, it is made up of computing machine 1, deflecting mirror driver 2, two-dimensional deflection mirror 3, laser instrument 4, image pick-up card 5, ccd video camera 6, convex lens 7, telescope 8, beam splitter 9, complete interior anti-prism 10, A/D converter 11; The deflecting mirror control data output terminal of computing machine 1 connects the control input end of deflecting mirror driver 2, the controlling and driving output terminal of deflecting mirror driver 2 connects the signal input end of two-dimensional deflection mirror 3, the mirror surface amount of deflection detection signal output terminal of two-dimensional deflection mirror 3 connects the signal input part of A/D converter 11, the data output end of A/D converter 11 connects the mirror surface amount of deflection data input pin of computing machine 1, the laser beam of laser instrument 4 outputs reflexes in the input end of beam splitter 9 through the minute surface end of two-dimensional deflection mirror 3, part light beam is through beam splitter 9 reflection outputs, another part light beam through the transmission of beam splitter 9 and be input to by the output terminal of beam splitter 9 complete in the anti-prism 10, again through complete interior anti-prism 10, beam splitter 9 reflexes in the input end of telescope 8, be input in the input end of convex lens 7 through the transmission of telescope 8 and by the output terminal of telescope 8, the transmission of planoconvex lens 7 also is input in the input end of ccd video camera 6 by the output terminal of convex lens 7, the image signal output end of ccd video camera 6 connects the picture signal input end of image pick-up card 5, and the view data output terminal of image pick-up card 5 connects the view data input end of computing machine 1.The model that deflecting mirror driver 2 is selected for use is the German PI P841.20 of company type piezoelectric ceramic actuator; What two-dimensional deflection mirror 3 was selected for use is the MPT-2JRL001 type piezoelectricity deflecting mirror (inbuilt displacement sensor) of rich real precise measurement and control company limited of Harbin Institute of Technology development; What laser instrument 4 was selected for use is the Xi'an match Piao Lin mechanical ﹠ electrical technology SP650-5G11 of research institute type parallel light tube (output wavelength 650nm, beam divergence angle 20 μ rad, output power 2.5mrad); What image pick-up card 5 was selected for use is the good permanent MPE-1000 of the company model C CD image pick-up card in Beijing; What ccd video camera 6 was selected for use is the MTV-1801 planar array type ccd video camera that Taiwan Min Tong company produces, and its important technological parameters is: spectral response range is that 400nm～1100nm, pixel number are that 795H * 596V, pixel dimension are that 10 μ rad, line frequency are that 15625Hz, field frequency are that 50Hz, detection sensitivity are 0.021x; The focal length of convex lens 7 is 10cm; What telescope 8 was selected for use is Kepler's type, and its bore is that 50mm, enlargement factor are 10; Beam splitter 9 is selected for use is that reflectivity is 95%, transmissivity is 5%, complete in anti-prism 10 effective aperture diameters be 50mm, A/D converter 11 is selected the PCI-9810 of ADLINK company model analog-to-digital conversion card for use, its acquisition precision is 12.
Claims (1)
1, two feedback beam aiming control device, it comprises computing machine (1), deflecting mirror driver (2), two-dimensional deflection mirror (3), laser instrument (4), A/D converter (11); It is characterized in that it also comprises image pick-up card (5), ccd video camera (6), convex lens (7), telescope (8), beam splitter (9), complete interior anti-prism (10); The deflecting mirror control data output terminal of computing machine (1) connects the control input end of deflecting mirror driver (2), the controlling and driving output terminal of deflecting mirror driver (2) connects the signal input end of two-dimensional deflection mirror (3), the mirror surface amount of deflection detection signal output terminal of two-dimensional deflection mirror (3) connects the signal input part of A/D converter (11), the data output end of A/D converter (11) connects the mirror surface amount of deflection data input pin of computing machine (1), the laser beam of laser instrument (4) output reflexes in the input end of beam splitter (9) through the minute surface end of two-dimensional deflection mirror (3), part light beam is through beam splitter (9) reflection output, another part light beam through the transmission of beam splitter (9) and be input to by the output terminal of beam splitter (9) complete in the anti-prism (10), again through complete interior anti-prism (10), beam splitter (9) reflexes in the input end of telescope (8), be input in the input end of convex lens (7) through the transmission of telescope (8) and by the output terminal of telescope (8), the transmission of planoconvex lens (7) also is input in the input end of ccd video camera (6) by the output terminal of convex lens (7), the image signal output end of ccd video camera (6) connects the picture signal input end of image pick-up card (5), and the view data output terminal of image pick-up card (5) connects the view data input end of computing machine (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100098689A CN1328622C (en) | 2005-03-31 | 2005-03-31 | Dual-feedback high-precision light-beam aiming control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100098689A CN1328622C (en) | 2005-03-31 | 2005-03-31 | Dual-feedback high-precision light-beam aiming control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1677170A CN1677170A (en) | 2005-10-05 |
| CN1328622C true CN1328622C (en) | 2007-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100098689A Expired - Fee Related CN1328622C (en) | 2005-03-31 | 2005-03-31 | Dual-feedback high-precision light-beam aiming control device |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102248301A (en) * | 2011-01-13 | 2011-11-23 | 苏州德龙激光有限公司 | Crystalline silicon solar cell drilling equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87210363U (en) * | 1987-07-25 | 1988-09-28 | 北京大学 | New light beam-deflecting apparatus |
| US6614948B2 (en) * | 2001-08-31 | 2003-09-02 | International Business Machines Corporation | Electrically switchable optical elements using wavelength locked feedback loops |
| CN1534329A (en) * | 2004-04-12 | 2004-10-06 | 哈尔滨工业大学 | Optical beam drifting amount fast feedback controlling type high precision laser aligning method and device |
-
2005
- 2005-03-31 CN CNB2005100098689A patent/CN1328622C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87210363U (en) * | 1987-07-25 | 1988-09-28 | 北京大学 | New light beam-deflecting apparatus |
| US6614948B2 (en) * | 2001-08-31 | 2003-09-02 | International Business Machines Corporation | Electrically switchable optical elements using wavelength locked feedback loops |
| CN1534329A (en) * | 2004-04-12 | 2004-10-06 | 哈尔滨工业大学 | Optical beam drifting amount fast feedback controlling type high precision laser aligning method and device |
Non-Patent Citations (3)
| Title |
|---|
| 漂移量反馈控制式激光准直方法 赵维谦 谭久彬 马洪文 邹丽敏，光学学报，第24卷第3期 2004 * |
| 激光光束特定方向准直方法与技术 赵维谦，谭久彬，邱丽荣，章雷，光电子·激光，第15卷第1期 2004 * |
| 激光光束特定方向准直方法与技术 赵维谦，谭久彬，邱丽荣，章雷，光电子·激光，第15卷第1期 2004;漂移量反馈控制式激光准直方法 赵维谦 谭久彬 马洪文 邹丽敏，光学学报，第24卷第3期 2004 * |
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| CN1677170A (en) | 2005-10-05 |
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