CN1319148A - Black ruthenium plating soluton - Google Patents
Black ruthenium plating soluton Download PDFInfo
- Publication number
- CN1319148A CN1319148A CN00801594A CN00801594A CN1319148A CN 1319148 A CN1319148 A CN 1319148A CN 00801594 A CN00801594 A CN 00801594A CN 00801594 A CN00801594 A CN 00801594A CN 1319148 A CN1319148 A CN 1319148A
- Authority
- CN
- China
- Prior art keywords
- black
- ruthenium
- soluton
- sulfocompound
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
5 ampere-hours/liter | 10 ampere-hours/liter | 15 ampere-hours/liter | 20 ampere-hours/liter | 25 ampere-hours/liter | 30 ampere-hours/liter | |
Embodiment 1 | Black film | Black film | Black film | Black film | Black film | Black film |
Embodiment 2 | Black film | Black film replenishes sulfuric acid oxyamine 5 and exempts from/liter | Black film replenishes sulfuric acid oxyamine 5 and exempts from/liter | Black film replenishes sulfuric acid oxyamine 5 and competes/liter | Black film replenishes sulfuric acid oxyamine 5 grams per liters | Black film replenishes sulfuric acid oxyamine 5 grams per liters |
Comparative example | Shallow black film | Add the subfuscous silver color film of urea 1.5 grams per liters | Add the subfuscous silver color film of urea 1.5 grams per liters | Add the subfuscous silver color film of urea 1.5 grams per liters | Add the dark brown membrane electroplating liquid of the lacklustre ash of urea 3 grams per liters muddiness | Add the dark brown membrane electroplating liquid of the lacklustre ash of urea 3 grams per liters muddiness |
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP219684/1999 | 1999-08-03 | ||
JP21968499A JP3302949B2 (en) | 1999-08-03 | 1999-08-03 | Black ruthenium plating solution |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1319148A true CN1319148A (en) | 2001-10-24 |
CN1193116C CN1193116C (en) | 2005-03-16 |
Family
ID=16739360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008015945A Expired - Fee Related CN1193116C (en) | 1999-08-03 | 2000-05-26 | Black ruthenium plating soluton |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3302949B2 (en) |
KR (1) | KR100392694B1 (en) |
CN (1) | CN1193116C (en) |
WO (1) | WO2001011113A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101675185B (en) * | 2007-03-28 | 2011-04-13 | 尤米科尔电镀技术有限公司 | Electrolyte and method for depositing decorative and technical layers of black ruthenium |
CN101684565B (en) * | 2009-08-10 | 2012-03-21 | 成都宏明双新科技股份有限公司 | Black ruthenium plating process |
CN104342731A (en) * | 2013-07-23 | 2015-02-11 | 深圳中宇昭日科技有限公司 | Ruthenium plating method for semiconductor molybdenum material |
CN106148896A (en) * | 2016-07-29 | 2016-11-23 | 成都立威讯科技有限公司 | A kind of method of the thick ruthenium of molybdenum substrate plating |
CN107021464A (en) * | 2017-06-07 | 2017-08-08 | 王晓波 | The method that ruthenium is plated on the synthetic method of a kind of [μ nitrogen is double (tetrachloro one is hydrated ruthenium)] sour potassium and electronic component surface |
CN109234757A (en) * | 2018-10-18 | 2019-01-18 | 任杰 | A kind of preparation method and application of uniform and stable ruthenium iridium bimetal-doped Ti electrode |
CN110965088A (en) * | 2019-08-27 | 2020-04-07 | 周大福珠宝金行(深圳)有限公司 | Ancient restoring process of gold and ancient restoring gold |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6911068B2 (en) * | 2001-10-02 | 2005-06-28 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
US6773573B2 (en) * | 2001-10-02 | 2004-08-10 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
US6736954B2 (en) * | 2001-10-02 | 2004-05-18 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
EP1308541A1 (en) * | 2001-10-04 | 2003-05-07 | Shipley Company LLC | Plating bath and method for depositing a metal layer on a substrate |
US6699385B2 (en) | 2001-10-17 | 2004-03-02 | Chevron U.S.A. Inc. | Process for converting waxy feeds into low haze heavy base oil |
CN101575694B (en) * | 2009-03-13 | 2011-04-20 | 宜兴市科兴合金材料有限公司 | Process for diffusing ruthenium on surface of molybdenum wafer with ultra-large diameter |
DE102011105207B4 (en) * | 2011-06-17 | 2015-09-10 | Umicore Galvanotechnik Gmbh | Electrolyte and its use for the deposition of black ruthenium coatings and coatings and articles obtained therefrom |
US10329683B2 (en) | 2016-11-03 | 2019-06-25 | Lam Research Corporation | Process for optimizing cobalt electrofill using sacrificial oxidants |
KR102313739B1 (en) * | 2019-08-23 | 2021-10-18 | 정광미 | Plating Solution Composition having Ruthenium and Method of plating using the same |
JP2023056187A (en) | 2021-10-07 | 2023-04-19 | Eeja株式会社 | PtRu ALLOY PLATING SOLUTION, AND PLATING METHOD OF PtRu ALLOY FILM |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06146055A (en) * | 1992-11-06 | 1994-05-27 | Japan Energy Corp | Ruthenium plating liquid |
JPH06146056A (en) * | 1992-11-06 | 1994-05-27 | Japan Energy Corp | Ruthenium plating liquid |
JPH06146054A (en) * | 1992-11-06 | 1994-05-27 | Japan Energy Corp | Ruthenium plating liquid |
JPH1150295A (en) * | 1997-07-28 | 1999-02-23 | Daiwa Kasei Kenkyusho:Kk | Plating bath |
DE19741990C1 (en) * | 1997-09-24 | 1999-04-29 | Degussa | Electrolyte for low-stress, crack-free ruthenium coatings |
-
1999
- 1999-08-03 JP JP21968499A patent/JP3302949B2/en not_active Expired - Lifetime
-
2000
- 2000-05-26 CN CNB008015945A patent/CN1193116C/en not_active Expired - Fee Related
- 2000-05-26 WO PCT/JP2000/003395 patent/WO2001011113A1/en active Application Filing
- 2000-05-26 KR KR10-2001-7004063A patent/KR100392694B1/en not_active IP Right Cessation
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101675185B (en) * | 2007-03-28 | 2011-04-13 | 尤米科尔电镀技术有限公司 | Electrolyte and method for depositing decorative and technical layers of black ruthenium |
CN101684565B (en) * | 2009-08-10 | 2012-03-21 | 成都宏明双新科技股份有限公司 | Black ruthenium plating process |
CN104342731A (en) * | 2013-07-23 | 2015-02-11 | 深圳中宇昭日科技有限公司 | Ruthenium plating method for semiconductor molybdenum material |
CN106148896A (en) * | 2016-07-29 | 2016-11-23 | 成都立威讯科技有限公司 | A kind of method of the thick ruthenium of molybdenum substrate plating |
CN106148896B (en) * | 2016-07-29 | 2019-10-15 | 泉州市宕存工业设计有限公司 | A kind of method that molybdenum base piece plates thick ruthenium |
CN107021464A (en) * | 2017-06-07 | 2017-08-08 | 王晓波 | The method that ruthenium is plated on the synthetic method of a kind of [μ nitrogen is double (tetrachloro one is hydrated ruthenium)] sour potassium and electronic component surface |
CN107021464B (en) * | 2017-06-07 | 2019-10-15 | 王晓波 | A kind of method of the synthetic method and electronic component surface plating ruthenium of [μ-nitrogen-is bis- (hydration of tetrachloro one ruthenium)] acid potassium |
CN109234757A (en) * | 2018-10-18 | 2019-01-18 | 任杰 | A kind of preparation method and application of uniform and stable ruthenium iridium bimetal-doped Ti electrode |
CN110965088A (en) * | 2019-08-27 | 2020-04-07 | 周大福珠宝金行(深圳)有限公司 | Ancient restoring process of gold and ancient restoring gold |
Also Published As
Publication number | Publication date |
---|---|
KR100392694B1 (en) | 2003-07-28 |
JP2001049485A (en) | 2001-02-20 |
WO2001011113A1 (en) | 2001-02-15 |
JP3302949B2 (en) | 2002-07-15 |
CN1193116C (en) | 2005-03-16 |
KR20010073198A (en) | 2001-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: NIPPON MINING AND METALS CO., LTD. Free format text: FORMER NAME OR ADDRESS: NIKKO MATERIALS CO. LTD |
|
CP03 | Change of name, title or address |
Address after: Tokyo, Japan, Japan Patentee after: Nippon Mining & Metals Co., Ltd. Address before: Tokyo, Japan, Japan Patentee before: Nikko Materials Company, Limited |
|
C56 | Change in the name or address of the patentee |
Owner name: JX NIPPON MINING + METALS CORP. Free format text: FORMER NAME: NIPPON MINING + METALS CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Patentee after: JX Nippon Mining & Metals Corporation Address before: Tokyo, Japan, Japan Patentee before: Nippon Mining & Metals Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050316 Termination date: 20160526 |