CN1314976C - Universal test interface between device undr test and test head - Google Patents

Universal test interface between device undr test and test head Download PDF

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Publication number
CN1314976C
CN1314976C CNB02800678XA CN02800678A CN1314976C CN 1314976 C CN1314976 C CN 1314976C CN B02800678X A CNB02800678X A CN B02800678XA CN 02800678 A CN02800678 A CN 02800678A CN 1314976 C CN1314976 C CN 1314976C
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China
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connector
dut
plate
interface according
connectors
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Expired - Fee Related
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CNB02800678XA
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CN1494659A (en
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詹姆士·沃伦·弗雷姆
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Advantest Corp
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Advantest Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

In order to form a modular interface between a DUT board, which is housing devices under tests (DUT), to cables connected to a test head, a board spacer is provided that has an array of connectors. Each cable is connected to a respective connector, and the DUT board contains a corresponding array of connection points which are less than or equal to the number of connectors in the arrays on the board spacer. In this way, a common board spacer can be used to connect the cables to DUT boards housing different types of DUTs since the location of the connection points on the board spacer is known and kept constant. This interface allows a high speed and high fidelity connection between the test head and the devices on the DUTs for frequencies in excess of 50 MHz.

Description

Universal test interface between device under test and the measuring head
Technical field
The present invention relates to be used for the ATE (automatic test equipment) of testing integrated circuit components, the interface hardware that is specifically related to use in the ATE (automatic test equipment) is used for device under test is connected to measuring head so that carry out test.
Background technology
ATE (automatic test equipment) (being tester) is generally used for the manufacturing defect of semiconductor test and integrated circuit component (for example storer or logical circuit).Fig. 1 has shown the general expression of a tester.As shown in the figure, tester 1 has test body 10, and test body 10 is communicated by letter with measuring head 20.Measuring head 20 is communicated by letter with device under test (DUT) 60 by interface 30.DUT 60 is various integrated circuit components to be tested.In this way, can be rapidly and side by side test a plurality of DUT 60.In addition, after having tested one group of DUT60, use a handler 5 to introduce another group DUT 60 to test.
Shown in Fig. 2 and 3, on DUT plate 80, arrange a plurality of DUT 60.DUT plate 80 (being also referred to as slot plate, component interface plate and loading plate) is positioned on the corresponding board spacer 40, and board spacer 40 is placed on the spacing frame 50.Board spacer 40 is hollow to allow cable 70 to be connected to DUT plate 80.Each DUT 60 is connected to respective cable 70 by the through hole 83 that the tape welding in the DUT plate 80 connects liner, and its actual connection is at solder joint 82.Thus, each cable 70 is welded to DUT plate 80 respectively.
For a conventionally test device 1, in the time will testing a kind of DUT 60 of newtype, this new DUT 60 is moved to tester 1 and is connected to a test socket (not shown) by handler 5, finish the electrical connection between measuring head 20 and the new DUT 60.Carry out test then.After test is finished, by handler 5 DUT 60 is removed from test socket, and use handler 5 that the new DUT60 of a same type is installed in the test socket.
If test the DUT 60 of a newtype, must replace old DUT plate 80 and a new DUT plate 80 is inserted its position.The difference that this new DUT plate 80 will have this newtype of reflection DUT 60 connects needs.Thus, or must use a new interface module, or must be at different solder joint 82 welding cable again 70.In either case, cable 70 all will carry out custom fit with the different DUT plates 80 that are used for each newtype DUT 60 to be tested.In addition, when welding cable 70 again, each change of DUT 60 types all needs interface module (comprising board spacer 40) is partly or wholly dismantled, and cable 70 is welded to the corresponding solder joint 82 of new DUT plate 80, and interface is re-assemblied.On the other hand, when replacing whole interface module, be necessary for a large amount of interface modules of every type of DUT to be tested 60 deposits.
This welding manner is problematic, because the solder joint 82 that cable 70 is connected to DUT plate 80 will expend time in.When the density of DUT 60 and/or quantity increased, this problem was more serious.For example, modern tester can 128 DUT of outfit as many as, 60/ each measuring head 20, and the type change of jede Woche (even every day) DUT60 many times.Thus, each change for DUT to be tested 60 types, for the dismounting and the assembling of executive's interface and the customization welding that is used for cable 70 is connected to dissimilar DUT plates 80 all need plenty of time and expense, and increased the required time quantum of test DUT 60 significantly.
Shown in Fig. 4 A, a kind of scheme that solves this welding restriction is to utilize the spring-loaded pogo 100 that is placed on the corresponding pogo plate 110, for example the pogo plug of being made by Everett Charles.Pogo 100 comprises a contained spring, and the pad 90 on the first half bias voltage DUT plate 80 of this contained spring permission plug 100 forms a communication path to corresponding DUT 60 thus.Use this system, in the time will testing the DUT 60 of a newtype, needn't be welded to DUT plate 80 to cable 70.But make cable 70 keep being welded to pogo plate 110, and new DUT plate 80 is placed on the pogo plate 110, make the corresponding pad 90 of plug 100 bias voltages to form communication path.Thus, needn't change whole interface.
But along with quantity and the density of the DUT 60 that is tested increases, this scheme also has problem.Along with the density of the DUT 60 that is tested increases, more and more littler pogo 100 must be used so that be assembled in the space under the DUT plate 80.Along with pogo 100 diminishes, their become more rapid wears and be difficult to operation.In addition, along with pogo 100 diminishes, their stroke (being the distance that can vertically advance for bias voltage pad 90 in the tip of plug 100) reduces, and this means that DUT plate 80 and pogo plate 110 must make very flatly to guarantee being connected at all pads 90.This has increased the manufacturing cost of pogo plate 110 and DUT plate 80.And the use of pogo 100 itself is very expensive.Thus, when the density of DUT 60 and/or quantity increased, pogo 100 was not that an ideal of welding substitutes.
When DUT 60 is a logic element 65, shown in Fig. 4 B and 4C, has known and used connector 160 to carry out low concurrency test.For logic element, cable 70 is soldered in the daughter board in the connector 160.Connector 160 (for example Micopax connector of FCI manufacturing) is supported by connector support 180, and is connected to respective socket 170.Socket 170 is connected to logic card 150.In this way, be not directly cable 70 to be welded to logic card 150, but connector 160 is admitted by the socket 170 that is positioned on the logic card 150.Not all connector 160 all is used for every type the logic element 65 tested.
But known this structure is used for the low concurrency test of logic element 65, and needs to use 8 or more a plurality of connector 160/ each logic card 150.This structure is unsuitable for the test of the high density of DUT, high concurrency, especially when DUT is less device (for example memory device).In order to test these devices, the DUT plate is less, this overslaugh use a large amount of connectors 160.In addition, the spacing of the employed spacing frame of the handler 5 of mobile storage device (for example handler of Advantest M65XX and M67XX series) does not allow to use a large amount of connectors 160 so that test these devices.Therefore, for the high concurrency test of memory device (i.e. 32 or more devices time test), conventional connector layout is impossible.
Summary of the invention
An object of the present invention is to provide the connected system between a kind of device under test and the measuring head, it provides the reduction that can not cause signal quality to the security module connection of the device under test of High Data Rate.
Another object of the present invention provides the high density between a kind of device under test and the measuring head, upgradeable connected system.
Other purpose of the present invention and advantage will partly provide in the explanation of back, and partly can understand from this explanation, perhaps obtain by practice of the present invention.
Therefore, in order to realize these and other objects, one embodiment of the present of invention are used the interface between device under test (DUT) and the cable, and this interface comprises: first plate, have first connector array, and each first connector is connected to a respective cable; With second plate, keep this DUT and have a plurality of second connectors, each second connector is connected to this DUT and corresponding first connector, and wherein second number of connectors is less than first number of connectors.
According to another embodiment of the invention, first connector and second connector comprise the impedance connector of paired head connector and shielding control.
According to still a further embodiment, first connector and second connector comprise paired pad, connect to allow the plate-plate between first plate and second plate.
According to another embodiment of the invention, a kind of interface that is used for the high concurrency test of execute store spare comprises: first plate keeps one of them memory device and has a socket that is connected to this memory device; With a connector, be connected to respective cable and this socket to produce a communication path, wherein the combination of first plate and connector allows the high concurrency test of memory device.
According to still a further embodiment, a kind ofly be used for that the DUT on the DUT plate is connected to cable and comprise: a DUT plate with first quantity connector is pulled up with the respective cable that array keeps from the board spacer, and the 2nd a DUT plate with second quantity connector different with first quantity is inserted cable with the method for testing.
According to still a further embodiment, a kind ofly DUT on the DUT plate is connected to cable comprises: a DUT plate with a plurality of first pads that are connected to a DUT is removed from a board spacer with the plate pad that is connected to cable with the method for testing, wherein plate-plate of first pad of reply and the formation of plate pad is connected mutually, is used for first communication path of signal between a cable and the DUT with generation; And the 2nd DUT plate with a plurality of second pads that are connected to the 2nd DUT is placed on the board spacer connects to form a plate-plate, be used for the second communication path of signal between cable and the 2nd DUT with generation.
According to still a further embodiment, a kind ofly memory device on the DUT plate is connected to cable comprises: the DUT plate with first socket is pulled up from a connector that is connected to respective cable with the method for the high concurrency test of carrying out memory device; And the 2nd DUT plate with second socket inserted this connector to form the communication path between memory device and the cable, wherein the combination of the 2nd DUT plate and connector allows the high concurrency test of memory device.
Description of drawings
By below in conjunction with the accompanying drawing description of a preferred embodiment, can more clearly understand these and other objects of the present invention and advantage, in the accompanying drawings:
Fig. 1 shows the synoptic diagram that comprises the conventionally test device of communication between test body, measuring head, handler and the device under test (DUT);
Fig. 2 is the sectional view of the conventional welding junction that comprises board spacer and spacing frame between DUT plate and cable;
Fig. 3 is used for the cable of single DUT and the sectional view of the welding of the routine between the DUT plate;
Fig. 4 A is to use the DUT plate of the spring-loaded pogo that is installed on the daughter board and the sectional view of the conventional pogo interface between the cable;
Fig. 4 B is the sectional view of the conventional connector-jack interface between logic card and the cable;
Fig. 4 C is the conventional logic card backplan that shows the socket of radial array;
Fig. 5 A is to use the front cross sectional view of the interface according to an embodiment of the invention of impedance (SCI) connector that shields control;
Fig. 5 B is to use the sectional view of the interface according to an embodiment of the invention of SCI connector, demonstrates not use all SCI connectors;
Fig. 6 A is the top view of the array of the SCI connector on the board spacer according to an embodiment of the invention;
Fig. 6 B is the sectional view that shows the board spacer of the SCI connector that is arranged in an array hole according to an embodiment of the invention;
Fig. 7 shows the synoptic diagram that uses plug and socket cable to be connected to the interface in accordance with another embodiment of the present invention of DUT plate;
Fig. 8 is the connector cut-open view that shows the cable that is connected to PCB in accordance with another embodiment of the present invention;
Fig. 9 show to use the synoptic diagram of elastic body with the interface in accordance with another embodiment of the present invention that forms the conductive path between each pad.
Embodiment
Below with reference to the example in the accompanying drawing preferred embodiment of the present invention is described, similar label is represented similar components in institute's drawings attached.Embodiment is described to explain the present invention below with reference to accompanying drawing.
For one embodiment of the present of invention that Fig. 5 A shows in the 6B, the array of impedance (SCI) connector 220 of shielding control is disposed in the connector opening 249 in the board spacer 230.Each SCI connector 220 is connected to a cable 70, and cable 70 extends by the cable openings in the board spacer 230 247.The relative size that forms the cable openings 247 of array hole 245 and connector opening 249 has limited SCI connector 220 the moving of X, Y and Z direction, and prevents that SCI connector 220 is drawn in the interface.Array hole 245 is arranged to the part of the big array 240 on the board spacer 230.
In order to form the communication path between SCI connector 220 and the corresponding DUT 60, on DUT plate 280, arrange head 210 in groups.Each head 210 comprises head connector 215, and head connector 215 is paired plugs, and every pair of plug has a Signal plug and a ground pin.Connector 220 from a respective cable 70 is connected to a head connector 215.Shown in Fig. 5 A and 5B, head 210 is surface mounted to DUT plate 280, and is connected to the corresponding one or more DUT60 (depending on its structure) on the DUT plate 280.These heads 210 and SCI connector 220 form the communication path between cable 70 and the corresponding DUT 60 when being connected.
Usually, board spacer 230 has the array 240 of complete filling, this means that each array hole 245 in the array 240 all has corresponding SCI connector 220.Otherwise shown in Fig. 5 B, DUT plate 280 does not always need to use all SCI connectors 220, and according to the type of the DUT 60 that will test, only connects selected connector 220.Thus, for each SCI connector 220, can be with or without the head connector 215 of a correspondence.But,, the SCI connector 220 of a correspondence is arranged for each head connector 215.In this way, board spacer 230 formation are to the registered jack of a plurality of DUT plates 280.For the DUT 60 of each newtype that will test, only need to change DUT plate 280, make the head 210 that is used for this DUT plate 280 be connected to selected SCI connector 220.
As shown in the figure, SCI connector 220 is 2mm connectors, has a signal wire and a ground wire.This 2mm connector 220 can be a WL Gore 2mm EYEOPENER cable connector, or from the SCI connector of 3M, it is 1 * 22mm controlled impedance connector.Similarly, head 210 is surface mounting technique 2mm heads, and it allows to use 60-70 head connector 215 on each DUT plate 280.
Certainly, should be appreciated that, also might use between the signal wire and ground wire of identical connector 220, and/or have the connector 220 (being other spacing) of other distance between the signal wire of adjacent connector 220 and the ground wire.For example, might use connector 220 with 1.27mm spacing or 2.54mm spacing.
In addition,, should be appreciated that, can use through hole to connect though shown head 210 is surface mounted on the DUT plate 280.Although be also to be understood that not shownly in addition, head 210 and SCI connector 220 can be put upside down, and make head 210 be arranged in array 240, and SCI connector 220 are surface mounted on the DUT plate 280.In any case configuration, interface can both support to be higher than the high-speed and high fidelity signal of the frequency of 50MHz according to the preferred embodiment of the invention.
Fig. 7 and 8 shows an alternative embodiment of the invention.As shown in Figure 7, cable 70 is connected to connector 320, and connector 320 is inserted into socket 310.Socket 310 is installed to DUT plate 380, and DUT plate 380 keeps corresponding one or more DUT 60 (depending on its structure).DUT plate 380 is supported by spacing frame 50 by board spacer 300.
Usually, use screw, pull pin, a series of cam or similar bindiny mechanism that connector 320 is connected to socket 310.But,, also might construct a board spacer and support in array and keep connector 320 to become although not shown.
As shown in Figure 8, connector 320 comprises connector 322, and connector 322 is straddled installation (straddle-mount) and is connected to printed circuit board (PCB) (PCB) 323.310 pairs of connector 322 and sockets can be that a commercially available accessory is right, for example Micropax connector/socket of providing of FCI.
PCB 323 comprises inner lead 326, and inner lead 326 is formed into the communication path of corresponding cable 70.Cable 70 is connected to respective wire 326 by conventional method (for example welding).Use strain relief clamp clamp assembly 328 to support cable 70, strain relief clamp clamp assembly 328 is connected to the housing 324 that is used to protect this assembly.
Socket 310 also has inner tie point (not shown), and this inside tie point is connected to socket lead 315, and socket lead 315 leads to DUT 60.The quantity of inner tie point and associated tracks 315 can be equal to or less than the quantity of lead 326/ cable 70 of a corresponding connector 320, and this depends on needs how many cables 70 to test the DUT 60 of a particular type.In this way, identical connector 320 can be used for various DUT plates 380 (DUT plate 380 keeps dissimilar DUT 60), wherein provides different connections by the lead 326 that optionally is connected in the corresponding connector 320.
In addition, use this structure, can reduce the quantity of connector 320, make each DUT plate 380 use one or two connector 320.For DUT 60 are memory devices, and for space constraint overslaugh the situation of the use that connects of connector-socket, The above results is wished very much.For example, for a M65XX and M67XX Advantest handler, it can send 32 devices/each spacing frame (64 device AD types), but its spacing restriction overslaugh the use of conventional plug structure, this moment, above-mentioned interface was very useful.
For another embodiment of the present invention that Fig. 9 shows, board spacer 500 comprises the array of pad 510.Each pad 510 is connected to a respective cable 70.The array that the board spacer 480 of maintenance DUT 60 has a corresponding bonding pad 490.The quantity of pad 490 is less than or equal to the quantity of the pad 510 on the board spacer 500.Utilize elastic body 600 that DUT plate 480 is connected to board spacer 500, thereby allow signal to be delivered to pad 490 and to be delivered to corresponding DUT 60 from pad 510.Elastic body 600 can be the elastic body that is provided by Shin-Etsu or Fujipoly.Should be appreciated that, need not in all are used, all to use elastic body 60.
As an example, in order to use shown in Fig. 5 A dissimilar DUT 60 of interface testing according to the embodiment of the invention, the DUT plate 280 that is used for first kind DUT 60 is pulled up from board spacer 230, and the DUT plate 280 that is used for a newtype DUT 60 is inserted board spacer 230.The DUT plate 280 that is used for newtype DUT60 may have different the layout aspect the logarithm at the tip 215 of each head 210 shown in Fig. 5 A, perhaps may be arranged to not by with tip 215 complete filling of connector 220 as much.
Thus, according to a preferred embodiment of the invention, can use common board spacer or connectivity scenario, this allows to exchange in a tester and holds the DUT plate of dissimilar DUT and need not the cable rewiring and be connected to corresponding DUT on the DUT plate.Otherwise, can allow to use on the board spacer or the predetermined tie point of in connector, arranging be formed into the connection of cable.
Although shown and described a small amount of preferred embodiment of the present invention, it should be appreciated by those skilled in the art that under the condition that does not depart from the present invention's spirit and principle can change, scope of the present invention is defined by claim and equivalent thereof.
From as can be seen above-mentioned, according to the present invention, can provide the connected system between a kind of device under test and the measuring head, it provides the reduction that can not cause signal quality to the security module connection of the device under test of High Data Rate.

Claims (17)

1. the interface between device under test and the cable comprises:
First plate has first connector array, and each first connector is connected to a respective cable; With
Second plate keeps this device under test and has a plurality of second connectors, and each second connector is connected to this device under test and corresponding first connector, and wherein second number of connectors is less than first number of connectors.
2. interface according to claim 1, wherein each that forms between first and second connectors has been connected to form and has been used to have the communication path of the signal of 50MHz frequency at least.
3. interface according to claim 1, wherein
First connector comprises the impedance connector of a shielding control; With
Second connector comprises a head.
4. interface according to claim 1, wherein
First connector comprises a head; With
Second connector comprises the impedance connector of a shielding control.
5. interface according to claim 3, wherein first and second connectors comprise paired 2mm connector and head.
6. interface according to claim 4, wherein first and second connectors comprise paired 2mm connector and head.
7. interface according to claim 1, wherein second connector on described second plate with the array format layout of embarking on journey.
8. interface according to claim 7, wherein second connector is maintained in the respective array hole of the array in described second plate.
9. interface according to claim 8, wherein
First connector comprises a head; With
Second connector comprises the impedance connector of a shielding control.
10. interface according to claim 9, wherein each that forms between first and second connectors has been connected to form and has been used to have the communication path of the signal of 50MHz frequency at least.
11. interface according to claim 10, wherein first and second connectors have signal wire and ground wire, and the spacing between adjacent signals line and ground wire is equal to or less than 2.54mm.
12. interface according to claim 11, wherein first and second connectors comprise paired 2mm connector and head.
13. interface according to claim 11, wherein first and second connectors comprise paired 1.27mm connector and head.
14. interface according to claim 1, wherein first and second connectors comprise a plurality of pads, and pad is pooled together to be formed for the communication path of the signal from cable to corresponding device under test.
15. interface according to claim 14 further comprises the elastic body that is arranged between first and second connectors.
16. interface according to claim 15, wherein each that forms between first and second connectors has been connected to form and has been used to have the communication path of the signal of 50MHz frequency at least.
17. interface according to claim 16, wherein second connector on described second plate with the array format setting of embarking on journey.
CNB02800678XA 2001-03-15 2002-03-13 Universal test interface between device undr test and test head Expired - Fee Related CN1314976C (en)

Applications Claiming Priority (2)

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US09/808,009 US6552528B2 (en) 2001-03-15 2001-03-15 Modular interface between a device under test and a test head
US09/808,009 2001-03-15

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CN1494659A CN1494659A (en) 2004-05-05
CN1314976C true CN1314976C (en) 2007-05-09

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KR (1) KR20030024668A (en)
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AU (1) AU2002238862A1 (en)
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US20020130653A1 (en) 2002-09-19
US6822436B2 (en) 2004-11-23
WO2002075330A3 (en) 2003-12-04
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WO2002075330A2 (en) 2002-09-26
KR20030024668A (en) 2003-03-26

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