CN1305791C - Method for the production of a cylindrical quartz glass body having a low oh content - Google Patents
Method for the production of a cylindrical quartz glass body having a low oh content Download PDFInfo
- Publication number
- CN1305791C CN1305791C CNB038094622A CN03809462A CN1305791C CN 1305791 C CN1305791 C CN 1305791C CN B038094622 A CNB038094622 A CN B038094622A CN 03809462 A CN03809462 A CN 03809462A CN 1305791 C CN1305791 C CN 1305791C
- Authority
- CN
- China
- Prior art keywords
- soot body
- vitrifying
- treatment
- soot
- heating zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
- C03B2201/04—Hydroxyl ion (OH)
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
According to a previously known method for producing a cylindrical quartz glass body having a low OH content, first an elongate, porous soot body is produced on a rotating support by flame-hydrolyzing a silicon-containing compound and removing layers of SiO<SUB>2 </SUB>particles, whereupon said soot body is subjected to a dehydration treatment and is vitrified in a vitrification furnace. The aim of the invention is to create a simple method which is based on said method and makes it possible to produce a quartz glass cylinder having a low OH content while evenly distributing the OH concentration without additional technical complexity. Said aim is achieved by subjecting the soot body to a pretreatment in protective gas and/or a vacuum in the vitrification furnace following the dehydration treatment but prior to the vitrification thereof, the soot body being heated to a temperature ranging between 100 DEG C. and 1350 DEG C. in a heating area.
Description
The present invention relates to a kind of method of making low OH content cylindrical quartz glass body.This method is at first passed through the pyrohydrolysis and the SiO of silicon-containing compound
2The porous soot body (soot body) of the course formation of deposits elongation of particle on rotating carrier, described soot body be through processed, vitrifying in the vitrifying stove then.
This quartz-like vitreum for example is used to make fibre-optic precast billet.DE 196 49 935A1 have reported a kind of method of described type.In the method, the hollow cylinder blank (is made according to " OVD " method (outside vapor deposition (outside vapour deposition)) by porous silica glass.SiCl for this reason
4Pyrohydrolysis forms SiO
2Particulate, and with this SiO
2The particulate course is deposited on the support tube of its longitudinal axis rotation.Because this manufacture method makes soot body contain great amount of hydroxy group (OH yl).This shows as the height of optical fiber in its standard operation wavelength region and absorbs, and therefore must eliminate.For this carries out processed to the porous blank, it is hung vertically in the dehydration furnace from the anchor clamps that embed, and under high temperature, places atmosphere containing chlorine.The OH base is replaced by chlorine in this process.Subsequently, will put into the vitrifying stove that can vacuumize through the soot body of above-mentioned processing, and vitrifying forms transparent hollow cylinder silica glass in described stove.
The exsiccant soot body is being transferred to from dehydration furnace the process of vitrifying stove,, the diffusion of water must occurred owing to contain water in the air, thereby, the recontaminate of generation OH base.Usually be accompanied by OH base concentration and in the silica glass right cylinder that forms by the soot body vitrifying, axially reach the radial skewness.
For avoiding said circumstances, once there is suggestion in the associating stove and accessory, to carry out the dehydration and the vitrifying of soot body.Yet such Range structure is complicated and only can be in soot body dry or vitrifiedly optimize in a certain respect, and can not make two kinds of processing all reach optimum.These class methods have description in EP 0 170 249B1 and DE 100 05 051 A1.
In addition, once there was suggestion that a door is provided between dehydration furnace and vitrifying stove, handled stove (US 5,032,079 and WO 93/23341) so that the soot physical efficiency is directly transferred to another from a processing stove by the contact of this Men Buyu air.Yet this suggestion needs baroque instrument for solving later OH pollution problem.
US 5,330, and 548 A have reported a kind of method that is used to make optical fiber silica glass precast body, wherein adopt SiO in stove and accessory
2Soot body vitrifying, and in above-mentioned stove and accessory, handling, under 900 ℃～1200 ℃ reduced pressure (less than 10Pa) slough gas and subsequently in same stove and accessory in 1550 ℃ of vitrifyings.This method is not to be suitable for ad lib for the silica glass right cylinder of making low OH content.
Therefore the objective of the invention is to propose a kind of simple method, also realize the uniform distribution of OH base concentration simultaneously under the situation of no any great structural requirement, to realize the extremely low cylindrical manufacturing of silica glass of OH content.
The method of mentioning from introductory song; described target is to realize according to the present invention like this: after processed and before the vitrifying; soot body is carried out pre-treatment in the shielding gas of vitrifying stove and/or vacuum, be included in the heating zone soot body is heated to 100 ℃～1350 ℃.
In the inventive improvements to currently known methods, soot body is carried out pre-treatment in the process of the heating zone heating that the vitrifying furnace interior forms before vitrifying.In the vitrifying stove rare gas element is arranged, and produce and kept negative pressure therein.By the soot body surface temperature being brought up to more than 100 ℃ the efficient that improves this method below 1350 ℃, but to avoid producing the soot body dense sintering.Temperature in described upper range, the dense sintering of soot body can be avoided by shortening heat-up time.
Soot body is hollow cylinder of making according to the OVD method or the solid cylinder of making according to known VAD method (vapor axial deposition (vapor axial deposition)).The temperature of soot body is measured by pyrometer for example, and top temperature information is based on 0.98 emissivity factor.
Found can remove once more by pretreated mode for the recontaminate of the aforementioned dry soot body of crossing.Because the porousness of soot body, the OH base moves in the place ahead of heating wavefront (heating front) and breaks away from soot body, and the OH base discharges by being heated to 100 ℃ at least like this.For preventing that soot body from having purified zone and the water that discharges secondary response more, remove by washing or vacuumize with the protection air-blowing in these zones.Protection gas is the rare gas that does not contain OH substantially, or rare gas element (nitrogen).Described method can be carried out in the vitrifying stove, therefore can avoid complexity transhipment or the valve or the door of the known existing vitrifying stove of above-mentioned prior art.
This makes can be with the low silica glass right cylinder that arrives (wtppb) in ppb level and the ppb level scope of low cost production OH content.And, the product that this process is produced, its residual OH content has surprising uniform distribution, promptly simultaneously at the length direction (axial distribution) of quartz glass body and the uniform distribution of thickness direction (radial distribution).
The specific refractory power of silica glass improves slightly owing to chlorine.When silica glass is by chloride starting material, as SiCl
4Make, and porous " soot body " is when handling in atmosphere containing chlorine, must the special influence of paying attention to chlorine.The processed of soot body is carried out in halogen-containing atmosphere usually, in the particularly chloride atmosphere.This causes pretreated another advantage, i.e. pre-treatment helps the reduction of halogen concentration and the uniform distribution of the interior halogen of soot body, thereby reduces the influence of refractive index.
For the heating in the heating zone, soot body places the heating zone fully and therein its whole length direction is heated.Perhaps, this is a preferred process, and soot body places the heating zone, from the one end, and carries out ground, zone (zonenweise) heating therein.Heat regionally occur in vertical under the situation of the longitudinal axis, from following or above, in the heating zone that in the vitrifying district, forms.Soot body heat the escape that helps the OH base regionally, this OH base is because the porousness of soot body can move in the place ahead of heating wavefront or break away from soot body from y direction, and in the hollow cylinder soot body, then the hole direction breaks away from internally.
Found that in pre-treatment it is very favorable that the soot body of heating zone is heated to 800 ℃～1180 ℃ temperature.Temperature more than 800 ℃ causes the OH base to quicken to discharge from soot body, and regional the heating indicate the effect that is highly profitable, and reason as mentioned above.
In pre-treatment, preferably interior pressure is maintained less than 100mbar, preferably less than 1mbar.Low pressure in the vitrifying stove promotes the release of OH base from soot body.Therefore be provided with interior pressure low as much as possible; Interior pressure is suitable equally less than the high vacuum of 0.1mbar.During pre-processing, to small part, keep in the preferred whole process pressing in low.
For soot body is placed the heating zone, since an end, and carry out the method that heats therein regionally, found that it is favourable in pre-treatment soot body being sent into the heating zone with the speed that is not more than 20mm/min.It is slow more to send into speed, and heating wavefront progressive speed is slow more.Thereby low send into the speed augmenting response time and promote the OH base from the removing of soot body, special in the very big soot body of wall thickness.Must avoid dense sintering, this is the essential surface temperature that reduces soot body when the speed of sending into is low especially.The described lower limit of speed of sending into is owing to economic cause draws.
And this process helps the uniform distribution of gaseous substance in the soot body, particularly chlorine.
In particularly preferred embodiments, soot body after pre-treatment directly at least 1200 ℃ temperature, the interior pressure at pre-treatment end remain unchanged or situation about reducing under carry out vitrifying.The pre-treatment of soot body and vitrifying are subsequently carried out in same vitrifying stove.The raising of avoiding the vitrifying furnace pressure after pre-treatment is finished is to realize that gaseous substance is from the effective elimination of soot body and avoid the formation of aeration aperture.
Preferably from the upper end, soot body is sent into the heating zone and vitrifying with carrying out zone therein when vitrifying, and the direction of the direction that soot body is sent into the heating zone during with pre-treatment is opposite.This of the inventive method improvement has realized that the optimization of operation order causes the raising of reduction in processing time and turnout thus, and has realized inhomogeneity raising, and is special in the distribution of hydroxyl in vitrified soot body.
Cylinder quartz glass body according to the inventive method manufacturing is preferred for producing fibre-optic precast body.
Be further explained in detail the present invention below in conjunction with embodiment:
Embodiment 1
SiO
2Soot particles is by SiCl
4Pyrohydrolysis forms in the flames do of deposition roasting kiln, and described granular layer forms porous SiO to being deposited on the supporting rod of its longitudinal axis rotation
2Soot body.After finishing, sedimentation takes supporting rod away.Under help by following example institute interpretation procedure, use the soot tube that obtains by this method to make transparent quartz glass tube, its density is about 25% of silica glass density:
Soot tube is removed the hydroxyl of introducing in the production process through processed.Soot tube is vertically put into dehydration furnace also at first handles in atmosphere containing chlorine under about 900 ℃ for this reason.Handle and continue about 8 hours.Like this in the soot tube concentration of hydroxyl less than 100wt ppb.
Then, though will through above-mentioned pretreated soot tube put into have vertical in the vitrifying stove of the longitudinal axis and be exposed to uncovered air-be a bit of time.Soot tube thereby once more by hydroxyl contamination.In order to remove described hydroxyl, soot tube is put into the vitrifying stove carry out pre-treatment.
Vitrifying stove vacuum-pumping also is equipped with ring-type graphite heating element.At first, use the purging with nitrogen gas stove and accessory, then the internal drop of stove and accessory is also heated subsequently to 0.1mbar.From than low side, soot tube constantly with the speed of 10mm/min from the top to the bottom near heating unit.When the temperature of heating unit was 1200 ℃, the surface of soot body obtained about 1180 ℃ top temperature.Interior pressure in the vitrifying stove maintains 0.1mbar by constantly vacuumizing.
Thereby make the OH base discharge with Temperature Treatment and before vitrifying subsequently, make soot tube have the basic content of low OH by in the vitrifying stove, soot tube carried out vacuumizing regionally.Hydroxyl concentration in the soot tube is lower than 100wt ppb, with the same after the processed, thereby obtains substantially restoring.In the vitrifying pipe, it is checked description below.
Dehydration in the atmosphere containing chlorine can make chlorine sneak in the soot tube, and makes radial refractive index distribution depart from the distribution of expectation and subsequently treatment step is produced infringement.These influences also reduce by described pre-treatment, and wherein the content of chlorine reduces and its being more evenly distributed on tube wall in the soot body.
Vitrifying is directly being carried out in identical vitrifying stove after the above-mentioned pre-treatment, wherein soot tube is constantly sent into from bottom to top in the opposite direction, promptly from the upper end, with the close heating unit of the speed of 10mm/min, and carry out there heating regionally, the preset temperature of heating unit is at 1600 ℃, thereby the temperature on soot tube surface reaches as high as about 1580 ℃.Fusion wavefront (meltfront) moves in the inside of this soot tube from outside to inside simultaneously from top to bottom.Interior pressure during vitrifying in the vitrifying stove maintains 0.1mbar by constantly vacuumizing.
Then, measure the hydroxy radical content of vitrifying pipe.Get the ring-type sample from the top and bottom of pipe and (measuring distance=5mm) is measured OH content by equally distributed nine measurement point on the sample circumference by spectrum for this reason.In addition, OH content is by the spectrometry on the whole pipe range.
OH base concentration on all things considered tube wall reaches uniform distribution substantially.This axial distribution and radial distribution for OH content all is suitable for.Record average OH content for two samples and be 0.03wt ppm, this is just in time consistent with the whole OH content that records on the whole pipe range.In the quartz glass tube radial distribution of OH content also be surprising evenly.The mean deviation that records for two samples all is not more than ± 0.01wt ppm.
Then this sintering (vitrifying) pipe is stretched to external diameter 46mm, internal diameter 17mm.The quartz glass tube that obtains demonstrates low especially hydroxyl concentration, can be used on the nearly nuclear district of optical fiber precast billet, as is used for the substrate tube by MCVD method inside deposition.
Comparing embodiment 1
As mentioned above, with reference to embodiment 1, make about 25% the soot tube that density is silica glass density by outside deposition, and make transparent quartz glass tube by following method thus:
As mentioned above, with reference to embodiment 1, to remove the hydroxyl that production process is introduced, the hydroxyl concentration in the soot tube is lower than 100wt ppb to soot body like this through identical processed.
Then, though will through above-mentioned pretreated soot tube put into have vertical in the vitrifying stove of the longitudinal axis and be exposed to uncovered air-be a bit of time.Soot tube thereby once more by hydroxyl contamination.Be that with respect to its unique difference of embodiment 1 described method soot tube do not pass through vitrifying stove inner compartment ground heat pre-treatment, and immediately at the vitrifying stove evacuation and heat laggard oozy glassization.Parameter in the vitrifying process also fully with as mentioned above, consistent with reference to embodiment 1.This means soot tube constantly with the speed of 10mm/min from the bottom near the ring-type heating unit and carry out there heating regionally.The preset temperature of heating unit is at 1600 ℃, thereby the temperature on soot tube surface reaches as high as about 1580 ℃.Interior pressure during vitrifying in the vitrifying stove maintains 0.1mbar by constantly vacuumizing.
Then, measure the hydroxy radical content of vitrifying contrast pipe, as mentioned above, with reference to embodiment 1.In the contrast pipe, recording from the average OH content of contrast pipe upper end institute sample thief is 0.7wt ppm, is 0.4wt ppm from the average OH content of lower end institute sample thief.
Therefore there is maximum value in the axial distribution of OH base concentration in upper area on the tube wall.And, in the radial distribution of the OH of two samples base concentration, all found remarkable deviation with above-mentioned mean value ± 0.25wt ppm.
Claims (9)
1. make the method for hanging down hydroxy radical content cylindrical quartz glass body for one kind, wherein at first pass through the pyrohydrolysis and the SiO of silicon-containing compound
2The porous soot body of the course formation of deposits elongation of particle on rotating carrier; described soot body is through processed; vitrifying in the vitrifying stove then; it is characterized in that processed carries out in dehydration furnace in halogen-containing atmosphere; soot body is introduced in the vitrifying stove also thus by hydroxyl contamination after processed; with before vitrifying, soot body is carried out pre-treatment in the shielding gas of vitrifying stove and/or vacuum, be included in the heating zone soot body is heated to 100 ℃～1350 ℃.
2. according to the method for claim 1, it is characterized in that a end, it is sent into the heating zone also carry out therein heating regionally from soot body.
3. according to the method for claim 1, it is characterized in that soot body is heated to 800 ℃～1180 ℃ in the heating zone in pre-treatment.
4. according to the method for claim 1, press in it is characterized in that in pre-treatment to remain on less than 100mbar.
5. according to the method for claim 3, press in it is characterized in that in pre-treatment to remain on less than 1mbar.
6. according to each method in the claim 2～5, it is characterized in that soot body is sent into the heating zone with the speed that is not more than 20mm/min in pre-treatment.
7. according to each method in the claim 1～5, it is characterized in that soot body after pre-treatment directly at least 1200 ℃ temperature, the interior pressure at pre-treatment end remain unchanged or situation about reducing under carry out vitrifying.
8. according to each method in the claim 2～5, it is characterized in that soot body begins to send into the heating zone when vitrifying from the upper end and vitrifying with carrying out zone therein, the direction of the direction that soot body is sent into the heating zone during with pre-treatment is opposite.
9. the cylinder quartz glass body of each qualification is used for making the purposes of fibre-optic precast billet in the claim 1～5.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10218864A DE10218864C1 (en) | 2002-04-26 | 2002-04-26 | Production of a cylindrical quartz glass body comprises pretreating a soot body in a protective gas and/or under vacuum in a vitrifying oven after dehydration and before vitrification |
| DE10218864.5 | 2002-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1649797A CN1649797A (en) | 2005-08-03 |
| CN1305791C true CN1305791C (en) | 2007-03-21 |
Family
ID=28458955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038094622A Expired - Lifetime CN1305791C (en) | 2002-04-26 | 2003-04-28 | Method for the production of a cylindrical quartz glass body having a low oh content |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20050172676A1 (en) |
| JP (1) | JP4443234B2 (en) |
| CN (1) | CN1305791C (en) |
| AU (1) | AU2003236840A1 (en) |
| DE (1) | DE10218864C1 (en) |
| WO (1) | WO2003091171A2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004101456A1 (en) * | 2003-05-19 | 2004-11-25 | Sumitomo Electric Industries, Ltd | Optical fiber and method of producing the same |
| WO2005099357A1 (en) * | 2004-04-13 | 2005-10-27 | Sebit Co., Ltd | Method for manufacturing high heat-resistant quartz glass |
| JP5066784B2 (en) * | 2005-02-04 | 2012-11-07 | 旭硝子株式会社 | Method for producing synthetic quartz glass |
| DE102005059290A1 (en) * | 2005-12-09 | 2007-06-14 | Heraeus Tenevo Gmbh | Production of cylindrical, transparent quartz glass moldings comprises deposition of silica particles to form porous soot preform which is sintered in vitrification furnace below atmospheric pressure and cooled using gas fed into it |
| DE102006059779B4 (en) * | 2006-12-15 | 2010-06-24 | Heraeus Quarzglas Gmbh & Co. Kg | A method of producing a synthetic quartz hollow cylinder, a thick-walled hollow cylinder obtained by the method, and a method of producing an optical fiber preform |
| CN101323501B (en) * | 2007-01-02 | 2015-10-07 | 德雷卡通信技术公司 | For the extended baking process of quartz glass deposition tubes |
| US8062986B2 (en) * | 2007-07-27 | 2011-11-22 | Corning Incorporated | Fused silica having low OH, OD levels and method of making |
| US20100122558A1 (en) * | 2008-11-19 | 2010-05-20 | John Michael Jewell | Apparatus and Method of Sintering an Optical Fiber Preform |
| EP2977359B1 (en) | 2014-07-21 | 2016-10-19 | Heraeus Quarzglas GmbH & Co. KG | Method for producing fluorine doped quartz glass |
| CN114031274A (en) * | 2021-12-09 | 2022-02-11 | 中天科技精密材料有限公司 | Method for preparing continuous low-hydroxyl high-uniformity quartz glass |
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| JPH0891867A (en) * | 1994-09-21 | 1996-04-09 | Sumitomo Metal Ind Ltd | Ultraviolet ray transmitting synthetic quartz glass and its production |
| CN1131646A (en) * | 1995-03-17 | 1996-09-25 | 中国建筑材料科学研究院 | Manufacture method for ultraviolet laser transfer optical fiber prefabricated bar |
| JPH09309735A (en) * | 1996-05-21 | 1997-12-02 | Shinetsu Quartz Prod Co Ltd | Production of silica glass |
| US5713979A (en) * | 1992-05-14 | 1998-02-03 | Tsl Group Plc | Heat treatment facility for synthetic vitreous silica bodies |
| JPH111331A (en) * | 1998-04-03 | 1999-01-06 | Asahi Glass Co Ltd | Production of quartz glass optical member |
| CN1252778A (en) * | 1997-12-19 | 2000-05-10 | 纤维管有限公司 | Method of making a tubular member for optical fiber production using plasma outside vapor deposition |
| WO2002014231A2 (en) * | 2000-08-10 | 2002-02-21 | Yazaki Corporation | Process for making glass bodies having refractive index gradients |
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| JPS6136129A (en) * | 1984-07-30 | 1986-02-20 | Sumitomo Electric Ind Ltd | Manufacture of glass preform for optical fiber |
| DE3855370T2 (en) * | 1987-02-16 | 1997-01-02 | Sumitomo Electric Industries | Oven for heating a glass preform for optical fiber and method for producing a glass preform |
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| JP2003183042A (en) * | 2001-12-14 | 2003-07-03 | Shin Etsu Chem Co Ltd | Method of manufacturing preform for optical fiber and preform for optical fiber manufactured by the same |
-
2002
- 2002-04-26 DE DE10218864A patent/DE10218864C1/en not_active Expired - Fee Related
-
2003
- 2003-04-28 JP JP2003587745A patent/JP4443234B2/en not_active Expired - Fee Related
- 2003-04-28 CN CNB038094622A patent/CN1305791C/en not_active Expired - Lifetime
- 2003-04-28 AU AU2003236840A patent/AU2003236840A1/en not_active Abandoned
- 2003-04-28 US US10/512,523 patent/US20050172676A1/en not_active Abandoned
- 2003-04-28 WO PCT/EP2003/004412 patent/WO2003091171A2/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5713979A (en) * | 1992-05-14 | 1998-02-03 | Tsl Group Plc | Heat treatment facility for synthetic vitreous silica bodies |
| JPH0692648A (en) * | 1992-09-07 | 1994-04-05 | Shin Etsu Chem Co Ltd | Production of synthetic quartz glass member |
| JPH0891867A (en) * | 1994-09-21 | 1996-04-09 | Sumitomo Metal Ind Ltd | Ultraviolet ray transmitting synthetic quartz glass and its production |
| CN1131646A (en) * | 1995-03-17 | 1996-09-25 | 中国建筑材料科学研究院 | Manufacture method for ultraviolet laser transfer optical fiber prefabricated bar |
| JPH09309735A (en) * | 1996-05-21 | 1997-12-02 | Shinetsu Quartz Prod Co Ltd | Production of silica glass |
| CN1252778A (en) * | 1997-12-19 | 2000-05-10 | 纤维管有限公司 | Method of making a tubular member for optical fiber production using plasma outside vapor deposition |
| JPH111331A (en) * | 1998-04-03 | 1999-01-06 | Asahi Glass Co Ltd | Production of quartz glass optical member |
| WO2002014231A2 (en) * | 2000-08-10 | 2002-02-21 | Yazaki Corporation | Process for making glass bodies having refractive index gradients |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005523863A (en) | 2005-08-11 |
| CN1649797A (en) | 2005-08-03 |
| US20050172676A1 (en) | 2005-08-11 |
| AU2003236840A8 (en) | 2003-11-10 |
| WO2003091171A3 (en) | 2004-10-14 |
| WO2003091171A2 (en) | 2003-11-06 |
| AU2003236840A1 (en) | 2003-11-10 |
| DE10218864C1 (en) | 2003-10-23 |
| JP4443234B2 (en) | 2010-03-31 |
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