CN1304858C - Mono dimension X-ray composite lens - Google Patents
Mono dimension X-ray composite lens Download PDFInfo
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- CN1304858C CN1304858C CNB2005100498395A CN200510049839A CN1304858C CN 1304858 C CN1304858 C CN 1304858C CN B2005100498395 A CNB2005100498395 A CN B2005100498395A CN 200510049839 A CN200510049839 A CN 200510049839A CN 1304858 C CN1304858 C CN 1304858C
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Abstract
The present invention relates to a one-dimensional X-ray composite lens which comprises a lens body and substrate below the lens body, wherein the lens body is provided with a plurality of air gap units in the identical shape of a through hole, which are arranged in a straight line order; the cross section of each air gap unit is an ellipse, and the major axes of the ellipses corresponding to the air gap units are on the same straight line; the lens body is made of aluminium material or aluminium oxide material, and the lens substrate is made of organic glass or glass material; the thickness range of the lens is 500 micrometers to 2000 micrometers. The present invention provides a surface shape of a refraction unit of the optimized X-ray composite lens, which is favorable for achieving the effect that an incident wave of a plane X-ray is perfectly focused; the present invention has the advantage that the thickness size of the composite lens can be increased dozens of times, and thereby, a collecting aperture can be greatly increased; the one-dimensional X-ray composite lens has the advantages of little material limitation, basic elimination of spherical aberration and capability of integration and one-time precision processing forming.
Description
(1) technical field
The invention belongs to X ray Microstructure Optics device, X ray compound lens especially, be applicable to the sigmatron wave band (＞5keV) occasion of one-dimensional focusing and imaging is carried out in radiation.
(2) background technology
The X ray compound lens is a kind of New X ray Microstructure Optics element that is applicable to sigmatron wave band (being that the X-radiation energy surpasses 5keV) that A.Snigirev proposed in 1996.The X ray compound lens has many advantages, such as the light path of need not turning back, high-temperature stability is good and easily cooling, simple and compact for structure, require low to the lens surface roughness.Therefore this element be considered to science with Study on Technology in have wide practical use.In recent years, very active based on the various radiodiagnosis technical research of X ray compound lens.Analyse experimental system such as the sigmatron fluorescence microbedding that is used for sample element distribution measuring; Utilize the middle sub-microscope of aluminium-material X-ray assembled lens; And be used for sigmatron experimental system of unicellular detection, chemical microanalysis, early stage breast tumor detection etc. or the like.These have all shown the huge applications potentiality and the wide application prospect of X ray compound lens.Spherical aberration focuses on the X ray compound lens and the influence of imaging performance in order to reduce, and the refraction unit of X ray compound lens has developed into paraboloidal from sphere.And the plane micro production technology that adopts electron beam lithography to combine with reactive ion bundle etching phase is made.
Immediate with the present invention is a kind of mono dimension X-ray composite lens of paraboloidal, is that the plane micro production technology that adopts electron beam lithography to combine with reactive ion bundle etching phase is made on the Si material.If the compound lens to this structure decomposes, the plano-concave that this compound lens is placed by a plurality of symmetries reflects the unit to constituting.Figure 2 shows that the paraboloidal mono dimension X-ray composite lens made with the Si material (C.Schroer, et al., Appl.Phys.Lett., 2003, vol.82, pp1485-1487).It is dimerous by Si material 4 and air-gap 3.The manufacturing process of these lens is earlier compound lens to be scribed on the Cr film with the electron beam lithographic method, and then with the transcription of reactive ion bundle lithographic method to the Si material, finish the making of compound lens, 20 microns of the gauges of lens.There is following shortcoming in this technology: 1, the paraboloidal of lens is not desirable face shape, but therefore desirable face shape (being elliptical area shape) being similar under the paraxial approximation condition can not make the X ray compound lens reach desirable focusing performance; 2, secondly, owing to adopted fine manufacturing technology, machining precision is higher, but because the compound lens depth dimensions is made technology limitation, cause device to be very limited at the light harvesting bore of depth direction, and and then influenced the X-radiation transmitance largely; 3, in addition, the plane micro production technology that this electron beam lithography combines with reactive ion bundle etching phase is ripe to the fine manufacture craft of Si material, and bigger for the other materials restriction.
(3) summary of the invention
In order to overcome the dissatisfactory shortcoming of lens focus performance in the prior art, the invention provides a kind of lens refraction unit is the strong mono dimension X-ray composite lens of focusing performance of elliptical area shape.
The technical solution adopted for the present invention to solve the technical problems is:
Mono dimension X-ray composite lens, comprise lens body, be positioned at the lining base of lens body below, have the through hole shape air-gap unit that a plurality of identical shaped linearly orders are arranged on the described lens body, the cross sectional shape of described air-gap unit is oval, and the transverse of described air-gap unit correspondence is located along the same line.
Described lens body is aluminum or alumina material;
Described lens lining base is organic glass or glass material;
The thickness range of described lens is at 500 microns-2000 microns.
Beneficial effect of the present invention mainly shows: 1, optimize the face shape shape of X ray compound lens refraction unit, adopt elliptical area shape, aberration is almost nil, and the focal spot mass ratio is better, helps reaching to the perfect effect that focuses on of plane X ray incident wave; 2, have the advantage that the compound lens gauge can improve tens times, so the light harvesting bore can increase substantially, and then X ray efficient can increase substantially; 3, little to materials limitations, can eliminate spherical aberration basically, can integrated, disposable Precision Machining moulding.
(4) description of drawings
Fig. 1 is the synoptic diagram of mono dimension X-ray composite lens of the present invention.
Fig. 2 is the synoptic diagram of prior art
1-serves as a contrast base, 2-lens body, 3-air-gap, 4-Si lens material
(5) embodiment
Below in conjunction with accompanying drawing the present invention is further described.
Embodiment 1:
As shown in Figure 1, mono dimension X-ray composite lens, comprise lens body 2, be positioned at the lining base 1 of lens body below, have the through hole shape air-gap unit 3 that a plurality of identical shaped linearly orders are arranged on the described lens body, the cross sectional shape of described air-gap unit is oval, and the transverse of described air-gap unit correspondence is located along the same line.Described lens body is an aluminum, and lens lining base is an organic glass.The thickness of described lens is 600 microns.
Embodiment 2:
Mono dimension X-ray composite lens, comprise lens body 2, be positioned at the lining base 1 of lens body below, have the through hole shape air-gap unit 3 that a plurality of identical shaped linearly orders are arranged on the described lens body, the cross sectional shape of described air-gap unit is oval, and the transverse of described air-gap unit correspondence is located along the same line.Described lens body is an alumina material, and lens lining base is a glass material.The thickness of described lens is 1000 microns.
Embodiment 3:
Mono dimension X-ray composite lens, comprise lens body 2, be positioned at the lining base 1 of lens body below, have the through hole shape air-gap unit 3 that a plurality of identical shaped linearly orders are arranged on the described lens body, the cross sectional shape of described air-gap unit is oval, and the transverse of described air-gap unit correspondence is located along the same line.Described lens body is an aluminum, and lens lining base is a glass material.The thickness of described lens is 1500 microns.
Claims (6)
1, mono dimension X-ray composite lens, comprise lens body, be positioned at the lining base of lens body below, have the through hole shape air-gap unit that a plurality of identical shaped linearly orders are arranged on the described lens body, it is characterized in that: the cross sectional shape of described air-gap unit is for oval, and the transverse of described air-gap unit correspondence is located along the same line.
2, mono dimension X-ray composite lens as claimed in claim 1 is characterized in that: described lens body is an aluminum.
3, mono dimension X-ray composite lens as claimed in claim 1 is characterized in that: described lens body is an alumina material.
4, mono dimension X-ray composite lens as claimed in claim 1 is characterized in that: described lining base is organic glass.
5, mono dimension X-ray composite lens as claimed in claim 1 is characterized in that: described lining base is glass material.
6, as the described mono dimension X-ray composite lens of one of claim 1-5, it is characterized in that: the thickness range of described lens is at 500 microns-2000 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100498395A CN1304858C (en) | 2005-05-26 | 2005-05-26 | Mono dimension X-ray composite lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100498395A CN1304858C (en) | 2005-05-26 | 2005-05-26 | Mono dimension X-ray composite lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1719284A CN1719284A (en) | 2006-01-11 |
| CN1304858C true CN1304858C (en) | 2007-03-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100498395A Expired - Fee Related CN1304858C (en) | 2005-05-26 | 2005-05-26 | Mono dimension X-ray composite lens |
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| CN (1) | CN1304858C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101221828B (en) * | 2008-01-07 | 2010-12-08 | 浙江工业大学 | Cross connection type nano focusing X ray lens combination |
| CN101221829B (en) * | 2008-01-07 | 2010-12-08 | 浙江工业大学 | Production method for nano focusing X ray lens combination |
| CN101493569B (en) * | 2008-01-24 | 2012-08-29 | 鸿富锦精密工业（深圳）有限公司 | Lens and lens module |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1609635A (en) * | 2004-11-18 | 2005-04-27 | 浙江工业大学 | Parabolic one-dimensional focusing X-ray combined lens |
| CN1614448A (en) * | 2004-11-18 | 2005-05-11 | 浙江工业大学 | Production for aluminium-material X-ray assembled lens |
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2005
- 2005-05-26 CN CNB2005100498395A patent/CN1304858C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1609635A (en) * | 2004-11-18 | 2005-04-27 | 浙江工业大学 | Parabolic one-dimensional focusing X-ray combined lens |
| CN1614448A (en) * | 2004-11-18 | 2005-05-11 | 浙江工业大学 | Production for aluminium-material X-ray assembled lens |
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| CN1719284A (en) | 2006-01-11 |
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Granted publication date: 20070314 Termination date: 20100526 |