CN1293486A - Piezoelectric resonantor - Google Patents
Piezoelectric resonantor Download PDFInfo
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- CN1293486A CN1293486A CN 00131767 CN00131767A CN1293486A CN 1293486 A CN1293486 A CN 1293486A CN 00131767 CN00131767 CN 00131767 CN 00131767 A CN00131767 A CN 00131767A CN 1293486 A CN1293486 A CN 1293486A
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- 230000005684 electric field Effects 0.000 claims description 29
- 230000010287 polarization Effects 0.000 claims description 12
- 239000003990 capacitor Substances 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 24
- 239000011810 insulating material Substances 0.000 abstract description 6
- 239000000919 ceramic Substances 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
Abstract
To provide a piezoelectric resonator in which internal electrodes includes Two layers formed among layers of ceramic piezoelectric substrates. the surface electrodes are formed on upper and lower main surfaces of the laminated substrates. The center substrate is not polarized and both side electrodes are polarized in the direction vertical to each principal surface and with their polarizing directions set opposite to each other. A connecting electrode mounted on the side face electrically connects surface electrodes with internal electrodes and is insulated from the internal electrode via an insulating material. The other connecting electrode of the opposite side face electrically connects surface electrodes with internal electrodes and is insulated form the internal electrodes via an insulating material.
Description
The present invention relates to be applied to the piezo-electric resonator of piezoelectric vibration device, ladder-type filter and other same category of device, relate in particular to electric capacity between end big, with the piezo-electric resonator of crooked (bending) vibration mode vibration.
The piezoelectric ceramics material of common resonator is done expansion (spreading) vibration in 300kHz～800kHz frequency band.Figure 1A is the perspective view of the structure of expression expansion vibration resonance device 1, and Figure 1B is the polarised direction of expression expansion vibration resonance device 1 and the end view of direction of an electric field.In expansion vibration resonance device 1, surface electrode 3 is arranged on the upper and lower major surfaces of individual layer piezoelectric substrate 2, and substrate 2 is square, and monoblock piezoelectric substrate 2 is along the direction polarization perpendicular to two first type surfaces.Correspondingly, between surface electrode 3 direction of added electric field perpendicular to these two first type surfaces and be parallel to polarised direction.In this expansion vibration resonance device 1, when between surface electrode 3, adding signal voltage, piezoelectric substrate 2 just in the plane that is parallel to two first type surfaces to outer expansion or inwardly shrink.
In expansion vibration resonance device 1, on one side length L
sWith resonance frequency f
rProduct almost be constant, its contextual definition is:
L
s* f
r=A
s(1) A in the formula
sBe constant (frequency dependence constant), and A
s≌ 2100mmkHz.For example, obtain resonance frequency f
rThe resonator of=450kHz requires its length L on one side
s=4.67mm.
Because electronic component is beneficial more requires miniaturization, so this expansion vibration resonance device almost can't be done small-sizedly, light weight and cheapness.
Fig. 2 illustrates the ladder-type filter 6 with secondary structure, and it comprises series resonator 7a and 7b and parallel resonator 8a and 8b; Fig. 3 illustrates the attenuation characteristic of ladder-type filter 6.In view of certain specific character of this ladder-type filter 6, must increase assurance pad value Att. shown in Figure 3 as far as possible.If use C
1Electric capacity between the end of expression series resonator 7a and 7b, C
2Electric capacity between the end of expression parallel resonator 8a and 8b, then the assurance pad value Att. of the ladder-type filter 6 of secondary structure is defined as:
Att.=2 * 20log (C
2/ C
1) (2) therefore, guarantee pad value Att. in order to increase, will increase capacitor C between the end of parallel resonator 8a and 8b
2, and reduce capacitor C between the end of series resonator 7a and 7b
1Yet, when above-mentioned expansion vibration resonance device 1 is applied to parallel resonator 8a and 8b, be difficult to increase capacitor C between end
2, reason is as follows.
Capacitor C between the end of the vibration resonance of expansion shown in Figure 1A device 1
sDefine with following formula:
C
s=(ε ε
0L
s 2L in)/t (3) formula
sBe resonator 1 length on one side, ε is the dielectric constant of piezoelectric substrate, and t is the thickness of piezoelectric substrate, and ε
0Be the dielectric constant in the vacuum (that is, 8.854 * 10
-12).
At the resonance frequency f that has selected expansion vibration resonance device 1
rAfter, determine resonator 1 length L on one side
s(relatively formula (1)), therefore capacitor C between end
sOnly determine by the thickness t and the DIELECTRIC CONSTANT of substrate 2.
For capacitor C between the end that increases expansion vibration resonance device 1
s, must increase the DIELECTRIC CONSTANT of piezoelectric substrate 2, or make piezoelectric substrate thinner.Yet, because the DIELECTRIC CONSTANT of piezoelectric substrate 2 is to be determined by the material that constitutes this substrate 2, thus can't choose at random DIELECTRIC CONSTANT, and, will influence other characteristic if change the material of piezoelectric substrate.Moreover if the reduced thickness of substrate 2, then breaking strength reduces, expansion vibration resonance device 1 easy attenuate, and then breaking strength reduces, and expansion vibration resonance device 1 damages easily.Therefore, limited selectable thickness.
As a result, for the parallel resonator of ladder-type filter,, be difficult to obtain the expansion vibration resonance device of holding an electric capacity big though wish that the big resonator of electric capacity between end is arranged.Otherwise, if the piezo-electric resonator of development has corresponding to above-mentioned constant C
sLittle constant, and can make small size to piezo-electric resonator, then electric capacity will reduce between the end.Therefore, when piezo-electric resonator is used as parallel resonator, can deterioration guarantee pad value.
For addressing the above problem, preferred embodiment of the present invention provides a kind of size minimum piezo-electric resonator, and it has electric capacity between very big end, and has realized required resonance frequency.
According to the piezo-electric resonator of a preferred embodiment of the present invention, comprise stacked four layers or more multi-layered electrode and three layers or multi-layer piezoelectric layer, having at least in the piezoelectric layer is two-layer to be substantially perpendicular to the direction polarization of electrode.These electrodes so connect mutually, thereby in the first of piezoelectric layer, the electric field of generation and the polarised direction of piezoelectric layer are equidirectional, and in the second portion of piezoelectric layer, the electric field of generation is different with the direction of the polarization of piezoelectric layer.
Piezo-electric resonator according to another preferred embodiment of the present invention, comprise above-mentioned a kind of piezo-electric resonator, wherein that even level electrode and odd number piezoelectric layer is stacked, and all electrodes so connect mutually, thereby middle piezoelectric layer does not polarize, and on a side of middle piezoelectric layer, polarised direction is identical with direction of an electric field, and on the opposite side of middle piezoelectric layer, polarised direction is opposite with direction of an electric field.
In piezo-electric resonator according to above-mentioned preferred embodiment, because the piezoelectric layer that polarised direction is identical with direction of an electric field shrinks along the direction to layer center, and the polarised direction piezoelectric layer opposite with direction of an electric field expanded along the direction to layer edge, therefore produces flexural vibrations in whole piezo-electric resonator.Compare with expansion vibration resonance device, in showing the piezo-electric resonator of this flexural vibrations, the length on resonator one side and the product of resonance frequency become littler.Therefore the size of piezo-electric resonator can be reduced greatly, and same required frequency band can be used.In addition, because piezo-electric resonator has four layers or more multi-layered electrode, so increased electric capacity between electric capacity between the end that produces between every pair of electrode and total end greatly.Moreover, because each piezoelectric layer is stacked, do not reduce the intensity of piezo-electric resonator so reduced the thickness of each piezoelectric layer greatly, even also increased electric capacity between end.
In the piezo-electric resonator according to another preferred embodiment, middle piezoelectric layer does not polarize, and on a side of middle piezoelectric layer, polarised direction is identical with direction of an electric field, and on the opposite side of middle piezoelectric layer, polarised direction is opposite with direction of an electric field.Thereby produce strong flexural vibrations.In addition, by inserting a piezoelectric layer that does not polarize, can make other piezoelectric layer thinner and do not reduce the intensity of resonator, even also increase electric capacity between end.
To the detailed description of preferred embodiment and with reference to accompanying drawing, it is clearer that further feature of the present invention, key element, characteristic and advantage will become by following.
Figure 1A is the perspective view that the structure of common expansion vibration resonance device is shown;
Figure 1B illustrates the polarised direction of Figure 1A resonator and the end view of direction of an electric field;
Fig. 2 is the circuit diagram of ladder-type filter;
Fig. 3 is the figure that the characteristic of ladder-type filter among Fig. 2 is shown;
Fig. 4 is the perspective view of the piezo-electric resonator of a preferred embodiment of the present invention;
Fig. 5 is the amplification view of piezo-electric resonator shown in Figure 4;
Fig. 6 A illustrates perspective view and the cutaway view that female substrate polarization is handled;
Fig. 6 B is the perspective view that the cutting process for the first time of female substrate is shown;
Fig. 6 C is the perspective view that illustrates through female substrate of cutting;
Fig. 6 D is the perspective view that the cutting process for the second time of female substrate is shown;
Fig. 6 E is the perspective view of the piezo-electric resonator finished;
Fig. 7 A is the figure that the polarization processing of the piezo-electric resonator of another preferred embodiment according to the present invention is shown;
Fig. 7 B is the figure that the driving of Fig. 7 A piezo-electric resonator is shown;
Fig. 8 A is the figure that the polarization processing of the piezo-electric resonator of another preferred embodiment according to the present invention is shown;
Fig. 8 B is the figure that the driving of Fig. 8 A piezo-electric resonator is shown; And
Fig. 9 illustrates its double-decker to be suitable for perspective view with the piezo-electric resonator of beam mode vibration.
Fig. 4 is the perspective view that illustrates according to the piezo-electric resonator 9 of a preferred embodiment of the present invention, and Fig. 5 is the cutaway view of the resonator of this preferred embodiment according to the present invention.For example, this piezo-electric resonator 9 is arrived the ceramic resonator of about 800kHz as the about 300kHz of frequency band.Piezo-electric resonator 9 preferably includes: interior electrode 12 and 14, and electrode holder was in the middle of piezoelectric ceramics layer 11,13 and 15 in this was two-layer, and these three layers of piezoelectric ceramics layers are essentially square; And be arranged on stacked piezoelectric layer 11,13 and 15 and in surface electrode 10 and 16 on electrode 12 and 14 two first type surfaces up and down.Middle piezoelectric layer 13 does not polarize, and the piezoelectric layer 11 on piezoelectric layer 13 both sides and 15 is being substantially perpendicular to the direction polarization of first type surface, thereby polarised direction is opposite.In addition, inside on piezoelectric layer 13 both sides in the middle of polarised direction can be shown in as the solid arrow among Fig. 5, perhaps outside on the both sides of middle piezoelectric layer 13.
On the both side surface of piezo-electric resonator 9, be provided with connection electrode 18 and 20.One connection electrode 18 is electrically connected to two the separately surface electrode 10 and the interior electrodes 14 at piezoelectric layer place, and utilizes the insulating material 17 and the interior electrode 12 in the centre that are arranged on the side to insulate.In addition, another connection electrode 20 is electrically connected to two the separately surface electrodes 16 and interior electrode 12 at piezoelectric layer place, also utilizes the insulating material 19 and the interior electrode 14 in the centre that are arranged on the another side to insulate.
Therefore, when adding that between two surface electrodes 10 and 16 thereby voltage produces the direction of an electric field of direction shown in the dotted arrow in Fig. 5, direction of an electric field becomes identical with polarised direction for 11 li at a piezoelectric layer, and piezoelectric layer 11 shrinks to its center position, but it is opposite that direction of an electric field and polarised direction become 15 li of another piezoelectric layers, and piezoelectric layer 15 stretches to its edge direction.As a result, when being added to signal (high-frequency electric field) between surface electrode 150 and 16, piezoelectric layer 11 and 15 all shrinks along its edge direction expansion and along its center position with the expansion vibration mode.So, because piezoelectric layer 11 is opposite with the phase place of 15 stretching, extension and contraction, so whole piezo-electric resonator 9 produces deformation, two first type surfaces are crooked and alternately form concave surface and convex surface (following this deformation is called flexural vibrations, the piezo-electric resonator 9 of each preferred embodiment of the present invention is called the crooked syntony device).
In having the crooked syntony device 9 of this three-decker, L
bExpression resonator 9 length on one side, ε represents the dielectric constant of piezoelectric layer 11,13 and 15, t
1, t
2With t
3The thickness of representing piezoelectric layer 11,13 and 15 respectively is capacitor C between end
bBe defined as:
C
b=(ε ε
0L
b 2) (1/t
a+ 1/t
b+ 1/t
c) (4) ε
0It is the dielectric constant in the vacuum.
When expansion vibration resonance device 1 all used same material (ε is identical) to make with crooked syntony device 9, wherein size was the same basically, and thickness equates (t substantially
a+ t
b+ t
c=t), electric capacity between the end of available formula (3) definition expansion vibration resonance device 1, but when piezoelectric layer 11,13 is substantially the same with 15 separately thickness (t
a=t
b=t
c=t/3), then by electric capacity between the end of following formula (4 ') definition crooked syntony device 9:
C
b=(ε ε
0L
b 2) (9/t)=9C
s(4 ') therefore, in the crooked syntony device 9 of preferred embodiment of the present invention, electric capacity is 9 times of electric capacity between the end of unidimensional, stack pile expansion vibration resonance device 1 between the end that obtains.And even if do the thickness of piezoelectric layer 11,13 and 15 thinner, but the gross thickness of stacked piezoelectric layer is constant, so intensity is also constant.
As a result, the parallel resonator 8a that ladder-type filter uses in Fig. 2 and 8b when expansion vibration resonance device 1 changes the crooked syntony device 9 of three-decker into, the about 38.2dB of assurance pad value increase of ladder-type filter, shown in (5):
Δ Att.=2 * 20log (C
b/ C
sOther common method combines)=38.2dB (5) in the material of differing dielectric constant, the thickness that changes series resonator and parallel resonator and the routine techniques if will select, and just can design relative electric capacity with wideer scope and guarantee pad value.
In crooked syntony device 9, on one side length L
bWith resonance frequency f
rProduct also almost constant, may be defined as:
L
b* f
r=A
bHere, the frequency dependence constant is:
Because the frequency dependence constant A of crooked syntony device 9
bIt approximately is the frequency dependence constant A of expansion vibration resonance device 1
s0.3 times
So, for same resonance frequency, crooked syntony device 9 length L on one side
bBe about expansion vibration resonance device 1 length L on one side
s0.3 times.Therefore, when relatively crooked syntony device 9 is with expansion vibration resonance device 1, become about 1/3.3 less than expansion vibration resonance device 1 one edge lengths of crooked syntony device 9 length on one side, on area less than about 1/10.As a result, as long as use same resonance frequency, the size of crooked syntony device 9 reduces much than the size of expansion vibration resonance device 1.
Moreover during with crooked syntony device 9, crooked syntony device 9 becomes 1/10 so big (L of expansion vibration resonance device 1 at the expansion vibration resonance device 1 of more same resonance frequency
b 2=L
s 2/ 10), when piezoelectric layer 11,13 and 15 thickness separately for expansion vibration resonance device 1 thickness 1/3 the time (t
a=t
b=t
c=t/3), capacitor C between the end of crooked syntony device 9
bBecome capacitor C between the end of expanding vibration resonance device 1
s9/10, in other words,, but have the termination capacitor about the same with resonator 1 though the size of crooked syntony device 9 is about 1/10 of expansion vibration resonance device 1.In addition, though the thickness of crooked syntony device 9 is constant, intensity has increased greatly.
Next the manufacture method of above-mentioned crooked syntony device 9 is described.At first, at stacked raw cook (greensheet) 11a, the 13a that makes through the prepared interior electrode 12a of thick film screen printing conductive paste and 14a and piezoelectric and 15a and after sintering, form the female substrate 21 shown in Fig. 6 A by on two surfaces of agglomerated material, forming external electrode 10a with 16a, and in the end face formation of agglomerated material is connected to the termination electrode 22 of electrode 12a and 14a.At this moment, add an electrode between external electrode 10a and 16a and termination electrode 22, agglomerated material just polarizes along the direction of arrow among Fig. 6 A.Then, cut female substrate 21, make it to be in strip, just can obtain female substrate 23 of bar shaped shown in Fig. 6 C along arrow line shown in Fig. 6 B.Next, along the female substrate 23 of the cutting of arrow line shown in Fig. 6 D bar shaped, obtain the piezo-electric resonator 24 of individual unit shown in Fig. 6 E.Then, give the end covering insulating material 17 and 19 of interior electrode 12 and 14 as shown in Figure 5, on the end face of piezo-electric resonator 9, connection electrode 18 and 20 is placed above insulating material 17 and 19.With this method many crooked syntony devices 9 shown in Figure 4 of can producing once.
How the piezo-electric resonator 31 that Fig. 7 A illustrates another preferred embodiment of the present invention polarizes, and how Fig. 7 B represents drive pressure electrical resonator 31.In piezo-electric resonator 31, stacked five piezoelectric layers 33,35,37,39 and 41 (number of plies can be equal 7 or bigger odd number) with four layers in electrode 34,36,38 and 40 (number of plies can be equal 6 or bigger even number), surface electrode 32 and 42 is arranged on two surfaces of laminates.In polarization is handled, shown in Fig. 7 A, be electrically connected surface electrode 32 and 42 and interior electrode 36 and 38, interior electrode 34 and 40 also is electrically connected, and adds a voltage between them.So, middle piezoelectric layer 37 do not polarize and be positioned at above the piezoelectric layer 37 or following piezoelectric layer 33,35,39 and 41 polarized.Afterwards, shown in Fig. 7 B, utilize a connection electrode that surface electrode 32 is electrically connected with interior electrode 36 and 40, and interior electrode 34 and 38 is electrically connected with surface electrode 42 with another connection electrode.So because in the piezoelectric layer 33 and 35 on middle piezoelectric layer 37, polarised direction is identical with direction of an electric field, and in the piezoelectric layer 39 and 41 below middle piezoelectric layer 37, polarised direction is opposite with direction of an electric field, so piezo-electric resonator is done flexural vibrations.Utilize this structure, because between surface electrode 32,42 and the interior electrode 34,40 and at interior electrode 34,36,38 electric capacity between generation is held between self with 40, so can obtain electric capacity between much bigger end.
How the piezo-electric resonator 51 that Fig. 8 A illustrates another preferred embodiment of the present invention polarizes, and how Fig. 8 B represents drive pressure electrical resonator 51.In piezo-electric resonator 51, electrode 54,56 and 58 (for example, three layers) in stacked even number piezoelectric layer 53,55,57 and 59 (for example, four layers) and the odd number, surface electrode 52 and 60 is arranged on two surfaces of laminates.In polarization is handled, shown in Fig. 8 A, be electrically connected surface electrode 52,60 and interior electrode 56, interior electrode 54 and 58 also is electrically connected, and adds a voltage betwixt.So piezoelectric layer 53,55,57 and 59 is polarized.Afterwards, shown in Fig. 8 B, first connection electrode is electrically connected surface electrode 54 and interior electrode 56,58, and second connection electrode is electrically connected interior electrode 54 with surface electrode 60.So because in the piezoelectric layer 53 and 55 of the first half, polarised direction is identical with direction of an electric field, and in undermost piezoelectric layer 59, it is opposite with direction of an electric field to polarize, so piezo-electric resonator 51 is done flexural vibrations.Even adopt this structure since surface electrode 52 and 60 with interior electrode 54 and 58 between and electric capacity between generation is held between interior electrode 54 and 56, so electric capacity is very big between the end that obtains.
Moreover in the preferred embodiment of Fig. 7 A and 7B or Fig. 8 A and 8B, polarization can be put upside down with the wiring that drives.Yet, as by diagram, connecting up since can be between two surface electrodes that drive plus signal, so can simplify the shell of arrangement piezo-electric resonator or the structure of encapsulation.
In addition, Fig. 9 illustrates the piezo-electric resonator 61 of doing flexural vibrations, wherein stacked two piezoelectric layers 63 and 65 (interior electrode 64 is clipped in therebetween), and external electrode 62 and 66 is arranged on laminates two surfaces.Situation as the piezo-electric resonator of each preferred embodiment of the present invention, compare with the piezo-electric resonator of expansion vibration mode, the size of piezo-electric resonator 61 has been dwindled greatly, but in the piezo-electric resonator 61 of unidimensional, stack pile and same piezoelectric, compare with the piezo-electric resonator of all preferred embodiments of the present invention, electric capacity is very little between its end.Therefore, if constitute ladder-type filter shown in Figure 2 (or having three grades or more multistage) as series resonator and with piezo-electric resonator 61 as parallel resonator, then can make the ladder-type filter that guarantees that pad value is big, size is little with piezo-electric resonator 61.
The piezo-electric resonator of each preferred embodiment according to the present invention, piezo-electric resonator has been realized miniaturization, but still can obtain electric capacity between big end, and vibrates with beam mode.Therefore, if, can improve pad value greatly with the parallel resonator of piezo-electric resonator as ladder-type filter.
In addition, the piezo-electric resonator of each preferred embodiment according to the present invention, middle piezoelectric layer does not polarize, and on middle piezoelectric layer one side, polarised direction is identical with direction of an electric field, and on the opposite side of middle piezoelectric layer, polarised direction is opposite with direction of an electric field.Therefore, the flexural vibrations of piezo-electric resonator strengthen greatly and are very strong.
Though described content of the present invention with reference to all preferred embodiments, one skilled in the art will appreciate that to make in the form and details and above-mentionedly do not deviate from spirit of the present invention and scope with other change.
Claims (20)
1. piezo-electric resonator comprises:
Comprise a plurality of electrodes of at least four layers;
Stacked with a plurality of electrodes to limit at least three piezoelectric layers of resonator body; It is characterized in that
At least two piezoelectric layers at least three piezoelectric layers are to be substantially perpendicular to the direction polarization of a plurality of electrodes, all electrodes so connect mutually, thereby in piezoelectric layer first, the electric field that produces and the polarised direction of piezoelectric layer are equidirectional, and in the piezoelectric layer second portion, the electric field of generation is different with the polarised direction of piezoelectric layer.
2. piezo-electric resonator as claimed in claim 1, it is characterized in that even number of electrodes layer and odd number piezoelectric layer are stacked and limit resonator body, piezoelectric layer did not polarize in the middle of a plurality of electrodes were interconnected to and make, and on a side of middle piezoelectric layer, polarised direction is identical with direction of an electric field, at the opposite side of middle piezoelectric layer, polarised direction is opposite with direction of an electric field.
3. piezo-electric resonator as claimed in claim 1 is characterized in that the piezo-electric resonator formation is operated in the frequency band of about 300kHz to about 800kHz.
4. piezo-electric resonator as claimed in claim 1 is characterized in that at least four layers of electrode are square substantially.
5. piezo-electric resonator as claimed in claim 1 is characterized in that at least three piezoelectric layers are square substantially.
6. piezo-electric resonator as claimed in claim 2, it is characterized in that polarised direction in middle piezoelectric layer both sides to interior orientation.
7. piezo-electric resonator as claimed in claim 2 is characterized in that polarised direction is outwards directed in middle piezoelectric layer both sides.
8. piezo-electric resonator as claimed in claim 1 is characterized in that the interior electrode in the stacked resonator body and piezoelectric layer be positioned in response to the voltage that it is applied and vibrates with beam mode.
9. piezo-electric resonator as claimed in claim 1 is characterized in that L
bRepresent stacked resonator body length on one side, ε represents the dielectric constant of piezoelectric layer, t
1, t
2And t
3The thickness of representing each piezoelectric layer is capacitor C between end
bBe defined as:
C
b=(ε ε
0L
b 2) (1/t
a+ 1/t
b+ 1/t
c) ε in the formula
0Be the dielectric constant in the vacuum.
10. piezo-electric resonator as claimed in claim 1 is characterized in that the number of piezoelectric layer is at least five.
11. piezo-electric resonator as claimed in claim 1, number of electrodes is at least four in it is characterized in that.
12. a piezo-electric resonator comprises:
A plurality of electrode layers;
Stack to limit a plurality of piezoelectric layers of resonator body with a plurality of electrodes; It is characterized in that
At least two piezoelectric layers in the piezoelectric layer are to be substantially perpendicular to the direction polarization of a plurality of electrode layers, all electrodes so connect mutually, thereby in piezoelectric layer first, the electric field that produces and the polarised direction of piezoelectric layer are equidirectional, and in the piezoelectric layer second portion, the electric field of generation is different with the polarised direction of piezoelectric layer.
13. piezo-electric resonator as claimed in claim 12 is characterized in that even number of electrodes layer and odd number piezoelectric layer are stacked to limit resonator body.
14. piezo-electric resonator as claimed in claim 12, it is characterized in that a plurality of electrodes be interconnected to make in the middle of piezoelectric layer do not polarize, and on a side of middle piezoelectric layer, polarised direction is identical with direction of an electric field, at the opposite side of middle piezoelectric layer, polarised direction is opposite with direction of an electric field.
15. piezo-electric resonator as claimed in claim 12 is characterized in that the piezo-electric resonator formation operates in the frequency band of about 300kHz to about 800kHz.
16. piezo-electric resonator as claimed in claim 12 is characterized in that a plurality of electrode layers and a plurality of piezoelectric layer are square substantially.
17. piezo-electric resonator as claimed in claim 14, it is characterized in that polarised direction in middle piezoelectric layer both sides to interior orientation.
18. piezo-electric resonator as claimed in claim 14 is characterized in that polarised direction is outwards directed in middle piezoelectric layer both sides.
19. piezo-electric resonator as claimed in claim 12 wherein is positioned to the interior electrode in the stacked resonator body and piezoelectric layer in response to the voltage that it is applied and vibrates with beam mode.
20. piezo-electric resonator as claimed in claim 1, wherein the number of piezoelectric layer is at least three, and the inner electrode layer number is at least two.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29449199A JP2001119262A (en) | 1999-10-15 | 1999-10-15 | Piezoelectric resonator |
| JP294491/1999 | 1999-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1293486A true CN1293486A (en) | 2001-05-02 |
| CN1164032C CN1164032C (en) | 2004-08-25 |
Family
ID=17808460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB001317679A Expired - Lifetime CN1164032C (en) | 1999-10-15 | 2000-10-13 | Piezoelectric resonantor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2001119262A (en) |
| KR (1) | KR20010040089A (en) |
| CN (1) | CN1164032C (en) |
| DE (1) | DE10050058A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102739186A (en) * | 2011-03-31 | 2012-10-17 | 三星电机株式会社 | Piezoelectric resonator and electrode structure thereof |
| CN105900253A (en) * | 2012-12-26 | 2016-08-24 | 应用空化有限公司 | Piezoelectric device |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6664716B2 (en) * | 2000-06-07 | 2003-12-16 | Purdue Research Foundation | Piezoelectric transducer |
| JP3473567B2 (en) | 2000-10-30 | 2003-12-08 | 株式会社村田製作所 | Piezoelectric resonator and ladder-type filter using this piezoelectric resonator |
| US6700314B2 (en) | 2001-06-07 | 2004-03-02 | Purdue Research Foundation | Piezoelectric transducer |
| KR100485596B1 (en) * | 2002-06-04 | 2005-04-27 | 한국과학기술연구원 | Bender typed multilayer actuator |
| JP5036435B2 (en) * | 2006-09-01 | 2012-09-26 | 太陽誘電株式会社 | Elastic wave device, filter and duplexer |
| JP6066773B2 (en) * | 2013-03-05 | 2017-01-25 | 積水化学工業株式会社 | Method for manufacturing piezoelectric sensor |
-
1999
- 1999-10-15 JP JP29449199A patent/JP2001119262A/en active Pending
-
2000
- 2000-10-10 DE DE2000150058 patent/DE10050058A1/en not_active Ceased
- 2000-10-13 CN CNB001317679A patent/CN1164032C/en not_active Expired - Lifetime
- 2000-10-14 KR KR1020000060527A patent/KR20010040089A/en not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102739186A (en) * | 2011-03-31 | 2012-10-17 | 三星电机株式会社 | Piezoelectric resonator and electrode structure thereof |
| CN102739186B (en) * | 2011-03-31 | 2016-07-06 | 三星电机株式会社 | Piezo-electric resonator and electrode structure thereof |
| CN105900253A (en) * | 2012-12-26 | 2016-08-24 | 应用空化有限公司 | Piezoelectric device |
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| Publication number | Publication date |
|---|---|
| JP2001119262A (en) | 2001-04-27 |
| DE10050058A1 (en) | 2001-05-31 |
| KR20010040089A (en) | 2001-05-15 |
| CN1164032C (en) | 2004-08-25 |
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