JP6066773B2 - Method for manufacturing piezoelectric sensor - Google Patents

Description

  The present invention relates to a method for manufacturing a piezoelectric sensor.

  Conventionally, pressure sensors, acceleration sensors, and acoustic emission sensors using piezoelectric sheets have been used in medical facilities and nursing care facilities.

  Patent Document 1 includes a substantially rectangular belt-shaped body in which the other electrode layer and the shield layer are formed on both surfaces of one electrode layer via an insulating layer, respectively, and a protective layer is formed on the outside of the other electrode layer and shield layer. Two contacts are provided, and the contact is peeled off the protective layer in the vicinity of the contact, one contact is connected to the one electrode layer, and the other contact is connected to the other electrode layer and the shield layer. A piezoelectric pressure sensor is disclosed.

  Further, Patent Document 2 discloses a piezoelectric body made of a polymer material, a first electrode holding portion which is disposed on one side of the piezoelectric body and carries a signal electrode on a first insulator, and the piezoelectric body. And a second electrode carrying part that carries a ground electrode on a second insulator, and the first electrode carrying part and the second electrode carrying part are viewed in the overlapping direction. Discloses a piezoelectric sensor in which the signal electrode and the ground electrode are arranged so as to overlap each other.

  However, at the time of manufacturing the piezoelectric sensor, when the signal electrode and the ground electrode are laminated and integrated on both surfaces of the piezoelectric sheet, it is necessary to accurately position the signal electrode and the ground electrode so as to have a desired positional relationship with each other. There is a problem that positioning is difficult when the signal electrode and the ground electrode are laminated on both sides of the piezoelectric sheet.

Japanese Patent Laid-Open No. 10-332509 JP 2008-122215 A

  In the present invention, when the ground electrode layer and the signal electrode are laminated and integrated on the piezoelectric sheet, the positioning between the ground electrode layer and the signal electrode can be easily performed, and the two can be easily placed on the piezoelectric sheet after having the desired positional relationship. A method of manufacturing a piezoelectric sensor that can be laminated and integrated is provided.

  In the method for manufacturing a piezoelectric sensor according to the present invention, the first ground electrode layer is laminated and integrated on one surface of the long piezoelectric sheet, and the signal electrode and the second ground electrode layer are electrically insulated from each other on the other surface of the piezoelectric sheet. A laminated step of producing a laminated sheet by stacking and integrating in a state, and a cutting step of cutting the laminated sheet, wherein the first ground electrode layer is formed on one side of the elongated first electrical insulating sheet. The second electrical electrode is formed on one side of the elongated second electrical insulation sheet, and is formed in a continuous strip shape in the length direction of the first electrical insulation sheet. It is continuously formed in a band shape in a long shape in the length direction of the sheet, and the signal electrode is predetermined on one surface of the long third electric insulation sheet in the length direction of the third electric insulation sheet. It is repeatedly formed at intervals The laminated sheet is characterized in that it is cut between the signal electrode adjacent to each other.

In the method for manufacturing a piezoelectric sensor, in the laminated sheet, the signal electrode has a terminal installation portion that protrudes from the edge in the width direction of the first ground electrode layer and the second ground electrode layer.

  In the method for manufacturing a piezoelectric sensor, the stacking step includes stacking and integrating a first electrical insulating sheet having a first ground electrode layer on one surface of the piezoelectric sheet with the first ground electrode layer facing the piezoelectric sheet. A laminated piezoelectric sheet, and a third electrical insulation sheet having a signal electrode on the second ground electrode layer of the second electrical insulation sheet, the third electrical insulation sheet being on the second ground electrode layer side. A step of producing a laminated electrode sheet by stacking and integrating in a stacked state, and a step of stacking and integrating the laminated electrode sheet on the piezoelectric sheet of the laminated piezoelectric sheet with the signal electrode on the piezoelectric sheet side. It is characterized by having.

  Since the piezoelectric sensor manufacturing method of the present invention has the above-described configuration, when the first and second ground electrode layers and the signal electrode are laminated and integrated on the piezoelectric sheet, the first and second ground electrodes are integrated. Positioning between the electrode layer and the signal electrode is easy, and the first and second ground electrode layers and the signal electrode are laminated and integrated on the piezoelectric sheet without any special control or process. A sheet can be manufactured, and a piezoelectric sensor can be easily manufactured by cutting the laminated sheet at a predetermined position.

It is the top view which showed the 1st electrical insulation sheet or the 2nd electrical insulation sheet in which the 1st or 2nd ground electrode layer was formed. It is the model side view which showed the point which manufactures a laminated piezoelectric sheet. It is the top view which showed the 3rd electrical insulation sheet in which the signal electrode was formed. It is the model side view which showed the point which manufactures a laminated electrode sheet. It is the model side view which showed the point which manufactures a lamination sheet. It is the top view which showed the lamination sheet. It is the top view which showed the piezoelectric sheet. It is sectional drawing which showed the piezoelectric sheet. It is sectional drawing which showed the piezoelectric sheet.

  A method for manufacturing a piezoelectric sensor of the present invention will be described with reference to the drawings. The method for manufacturing a piezoelectric sensor according to the present invention includes a long first ground electrode layer laminated and integrated on one surface of a long piezoelectric sheet, and a long signal electrode and a second electrode on the other surface of the piezoelectric sheet. It has the lamination process which manufactures a lamination sheet by laminating | stacking and integrating two ground electrode layers in an electrically insulated state, and the cutting process which cut | disconnects the said lamination sheet.

  First, the lamination process will be described. In the laminating step, the long first ground electrode layer 21 is laminated and integrated on one surface of the long piezoelectric sheet 1, and the long signal electrode 41 and the second ground are formed on the other surface of the piezoelectric sheet 1. A laminated sheet B is manufactured by laminating and integrating the electrode layers 31 in an electrically insulated state.

  The long piezoelectric sheet 1 is not particularly limited as long as it is a long sheet that can generate an electric charge when an external force is applied. For example, a synthetic resin sheet (synthetic resin foam sheet or synthetic resin) Examples thereof include a piezoelectric sheet obtained by injecting electric charge into a non-foamed sheet.

  The method for injecting electric charges into the synthetic resin sheet is not particularly limited. For example, (1) a flat plate electrode sandwiched between a pair of flat plate electrodes and in contact with a surface to be charged is used as a high-voltage DC power source. Connecting and grounding the other plate electrode, applying a direct or pulsed high voltage to the synthetic resin sheet to inject charges into the synthetic resin and charging the surface of the synthetic resin sheet, (2) an electron beam, The surface of the synthetic resin sheet is injected by irradiating the surface of the synthetic resin sheet with ionizing radiation such as X-rays or ultraviolet rays, and ionizing air molecules in the vicinity of the synthetic resin sheet to inject the surface of the synthetic resin sheet. (3) A grounded flat plate electrode is placed in close contact with one surface of the synthetic resin sheet, and is electrically connected to a DC high-voltage power source with a predetermined interval on the other surface side of the synthetic resin sheet. The needle-like electrode or wire electrode is arranged, and the corona discharge is generated by the electric field concentration near the tip of the needle-like electrode or near the surface of the wire electrode, ionizing air molecules, and the polarity of the needle-like electrode or wire electrode For example, a method of charging the surface of the synthetic resin sheet by repelling the air ions generated by the above and injecting charges into the other surface of the synthetic resin.

  As shown in FIG. 1, the long first ground electrode layer 21 laminated and integrated on one surface of the piezoelectric sheet 1 is integrally formed on one surface of the long first electrical insulating sheet 22. Yes. The first ground electrode layer 21 is formed in a long strip shape that is continuous in the length direction of the first electrical insulating sheet 22 and has a constant width, except for both ends of the first electrical insulating sheet 22 in the width direction. ing.

  The electrical insulation sheet (first to third electrical insulation sheets) used in the present invention is not particularly limited as long as it has electrical insulation properties. For example, polyester such as polyethylene terephthalate sheet and polyethylene naphthalate sheet Resin, polyimide resin, polyethylene resin, polypropylene resin, cycloolefin resin, fluorine resin and the like.

  In the present invention, the material used for the ground electrodes (first ground electrode and second ground electrode) is not particularly limited as long as it has conductivity and sufficient electromagnetic shielding effect is obtained. For example, aluminum, iron Metal materials such as copper, gold, silver, and nickel, and carbon materials having conductivity such as carbon black and carbon nanotubes. Aluminum, copper, and carbon black are easy to process and highly conductive. Is preferable, and aluminum is more preferable because of its high electromagnetic shielding properties.

  In the present invention, as a method of forming electrodes (ground electrode and signal electrode) on the electrical insulating sheet, for example, (1) Applying a conductive paste containing conductive fine particles in a binder on the electrical insulating sheet A method of drying, (2) a method of forming an electrode on the electrical insulating sheet by vacuum deposition or sputtering, and (3) a method of laminating and integrating a metal film such as a copper film on the electrical insulating sheet. It is done.

  As shown in FIG. 2, in order to continuously produce a long laminated piezoelectric sheet C by laminating and integrating the long first ground electrode layer 21 on one surface of the long piezoelectric sheet 1, as shown in FIG. Then, the long first electrical insulating sheet 22 wound in a roll shape is continuously unwound. Next, an adhesive is applied to the entire surface of the first electrical insulating sheet 22 on which the first ground electrode layer 21 is formed using a coating roll 51, and then the first electrical insulating sheet 22 is placed in the drying furnace 61. Dry the adhesive by passing it through.

  The adhesive used in the present invention is composed of a reaction system, solvent system, water system, and hot melt system adhesive, and from the viewpoint of maintaining the sensitivity of the piezoelectric sheet 1, an adhesive having a low dielectric constant is preferable.

  On the other hand, the long piezoelectric sheet 1 wound in a roll shape is continuously unwound, and the piezoelectric sheet 1 is continuously superposed on the adhesive-coated surface of the first electrical insulating sheet 22. The insulating sheet 22 and the piezoelectric sheet 1 are passed between a pair of heat rolls, and the first electric insulating sheet 22 is bonded to one surface of the piezoelectric sheet 1 with the first ground electrode layer 21 facing the piezoelectric sheet 1 side. The laminated piezoelectric sheet C is continuously manufactured by laminating and integrating via the layer 71.

  Next, a procedure for stacking and integrating the signal electrode 41 and the second ground electrode layer 31 on the other surface of the piezoelectric sheet 1 in a state where both are electrically insulated from each other will be described. First, as shown in FIG. 1, the second ground electrode layer 31 laminated and integrated on the other surface of the piezoelectric sheet 1 is integrally formed on one side of the long second electrical insulating sheet 32. The second ground electrode layer 31 is formed in a long strip shape that is continuous in the length direction of the second electrical insulation sheet 32 and has a constant width, except for both ends of the second electrical insulation sheet 32 in the width direction. ing.

  Further, as shown in FIG. 3, the signal electrode 41 laminated and integrated on the other surface of the piezoelectric sheet 1 is integrally formed on one surface of the elongated third electrical insulating sheet 42. The signal electrode 41 is repeatedly formed at a predetermined interval 41a in the length direction of the third electrical insulating sheet 42 at portions other than both end portions in the width direction of the third electrical insulating sheet 42. That is, a plurality of signal electrodes 41 are repeatedly formed on one side of the third electrical insulation sheet 42 in the length direction of the third electrical insulation sheet 42 with a predetermined interval 41a.

  The material used for the signal electrode is not particularly limited as long as it has electrical conductivity. For example, it has electrical conductivity such as metal materials such as aluminum, iron, copper, gold, silver and nickel, and carbon black and carbon nanotubes. Examples thereof include carbon materials, and aluminum, copper, and carbon black are preferable because they are easy to process and have high conductivity.

The signal electrode 41 includes a signal electrode main body 411 and a terminal installation portion 412 formed in a state of protruding from the outer peripheral edge of the signal electrode main body 411. The signal electrode main body 411 is entirely present in a portion where the first ground electrode layer 21 and the second ground electrode layer 31 overlap in the laminated sheet B described later. In the laminated sheet B, the terminal installation portion 412 is present in a state where part or all of the terminal installation portion 412 protrudes from the edges in the width direction of the first ground electrode layer 21 and the second ground electrode layer 31. Further, the signal electrode body 411 is pierced with the first ground electrode layer 21 (first ground electrode) and the second ground electrode layer 31 (second ground electrode) electrically insulated from the signal electrode 41. A connection recess 411a for electrical connection using the terminal 8 is formed.

  In order to continuously produce the laminated electrode sheet D by laminating and integrating the second electrical insulation sheet 32 and the third electrical insulation sheet 42, as shown in FIG. 4, a long shape wound in a roll shape is used. The second electrical insulating sheet 32 is continuously unwound. Next, an adhesive is applied to the entire surface of the second electrical insulating sheet 32 on which the second ground electrode layer 31 is formed using an application roll 52, and then the second electrical insulating sheet 32 is placed in the drying furnace 62. Dry the adhesive by passing it through.

  On the other hand, the long third electrical insulation sheet 42 wound in a roll shape is continuously unwound, and the third electrical insulation sheet 42 is continuously superimposed on the adhesive application surface of the second electrical insulation sheet 32. Then, the second electrical insulation sheet 32 and the third electrical insulation sheet 42 are passed between a pair of heat rolls, and the third electrical insulation sheet 42 is formed on one surface of the second ground electrode layer 31 of the second electrical insulation sheet 32. With the third electrical insulating sheet 42 on the second ground electrode layer 31 side, the laminated electrode sheet D is continuously manufactured by laminating and integrating via the adhesive layer 72.

  As described above, when the second electrical insulating sheet 32 and the third electrical insulating sheet 42 are laminated and integrated, the second ground electrode layer 31 formed on one surface of the second electrical insulating sheet 32 Since the strip 32 is continuously formed in the lengthwise direction in the length direction, the signal electrode 41 of the third electrical insulating sheet 42 is placed on the second ground electrode layer 31 in a state of being overlaid. It is not necessary to align the lengths of the electrical insulating sheets 32 and 42 between 41 and the second ground electrode layer 31.

  The alignment in the width direction of the electrical insulating sheets 32 and 42 between the signal electrode 41 and the second ground electrode layer 31 is the same as the formation position of the second ground electrode layer 31 in the width direction of the second electrical insulating sheet 32. The position where the signal electrode 41 is formed in the width direction of the third electrical insulating sheet 42 is adjusted in advance. By doing so, when the second electrical insulation sheet 32 and the third electrical insulation sheet 42 are overlaid, the second electrical insulation sheet 32 and the third electrical insulation sheet 42 are aligned in the width direction. In addition, it is possible to easily align the second ground electrode layer 31 and the signal electrode 41 in the width direction.

  Next, in order to continuously produce the laminated sheet B by laminating and integrating the laminated piezoelectric sheet C and the laminated electrode sheet D, as shown in FIG. 5, a long laminated film wound in a roll shape is used. The electrode sheet D is continuously unwound. Next, an adhesive is applied to the entire surface of the laminated electrode sheet D on which the signal electrode 41 is formed by using an application roll 53, and then the laminated electrode sheet D is passed through a drying furnace 63 so that the adhesive is passed. dry.

  On the other hand, a long laminated piezoelectric sheet C wound in a roll shape is continuously unwound, and the laminated piezoelectric sheet C is continuously superimposed on the adhesive-coated surface of the laminated electrode sheet D, and then the laminated electrode sheet D and the laminated piezoelectric sheet C are passed between a pair of heat rolls, and the laminated electrode sheet D is placed on one surface of the laminated piezoelectric sheet C on the piezoelectric sheet 1 with the signal electrode 41 facing the piezoelectric sheet 1 side. The laminated sheet B is continuously manufactured by laminating and integrating via the layer 73 (see FIG. 6).

  The first ground electrode layer 21, the second ground electrode layer 31, and the signal electrode 41 are aligned in the width direction of the electrical insulating sheets 22, 32, and 42 in the width direction of the first electrical insulating sheet 22. The formation position of the ground electrode layer 21 and the formation positions of the second ground electrode layer 31 and the signal electrode 41 in the width direction of the second electrical insulation sheet 32 and the third electrical insulation sheet 42 are adjusted in advance. By doing so, when the laminated piezoelectric sheet C and the laminated electrode sheet D are overlapped, the laminated piezoelectric sheet C and the laminated electrode sheet D are aligned in the width direction thereof, so that the electrical insulating sheets 22, 32, In the width direction 42, the first ground electrode layer 21, the second ground electrode layer 31, and the signal electrode 41 can be easily aligned.

  The piezoelectric sensor A can be manufactured by cutting the laminated sheet B manufactured as described above over the entire length in the width direction between the signal electrodes 41 adjacent to each other (see FIGS. 7 and 8). The first ground electrode layer 21 cut to a predetermined length becomes the first ground electrode 21a, and the second ground electrode layer 31 cut to a predetermined length becomes the second ground electrode 31a.

  When the first ground electrode layer 21 is laminated and integrated on one surface of the long piezoelectric sheet 1 and the signal electrode and the second ground electrode layer 31 are stacked and integrated on the other surface of the piezoelectric sheet 1, the first ground electrode layer 21 is integrated. And the second ground electrode layer 31 is formed in a long band shape, the first ground electrode layer 21 and the second ground electrode layer 31 are aligned with the signal electrode 41 when the first ground electrode layer 21 is aligned. In the length direction of the second ground electrode layer 31, there is no need to align the first ground electrode layer 21 and the second ground electrode layer 31, and the signal electrode 41, the first ground electrode layer 21 and the second ground electrode layer The alignment between the electrode layer 31 and the signal electrode 41 may be performed only in the width direction. Then, the alignment in the width direction between the first ground electrode layer 21 and the second ground electrode layer 31 and the signal electrode 41 is the first ground on the first to third electrical insulating sheets 22, 32, 42. It is only necessary to adjust the formation positions of the electrode layer 21, the second ground electrode layer 31, and the signal electrode 41 in advance and align the first to third electrical insulating sheets 22, 32, and 42 in the width direction. Therefore, the first and second ground electrode layers 21, 41 and 31 are laminated and integrated into the long piezoelectric sheet 1 while being easily controlled so as to have a desired positional relationship. B can be produced.

In order to electrically connect the conductive wire 91 to the signal electrode 41 of the obtained piezoelectric sensor A, as shown in FIG. 9, the edges in the width direction of the first ground electrode layer 21 and the second ground electrode layer 31 are used. by piercing the piercing terminals 8 in terms of superposed conductive wire 91 on the terminal installation portion 412 portion that protrudes piezoelectric sensor a and the conductive wire 91 from a terminal installing part 412 and the conductive wire 91 of the signal electrode 41 What is necessary is just to electrically connect via the pierce terminal 8. FIG.

  Further, the first ground electrode 21a and the second ground electrode 31a of the piezoelectric sensor A are also electrically connected using the pierce terminal 8, and the conductive wire 92 is electrically connected to the first ground electrode 21a and the second ground electrode 31a. Connect to. Specifically, the conductive wire 92 is placed on the piezoelectric sensor A at a position where the connection recess 411a of the signal electrode 41 is projected in the thickness direction of the piezoelectric sensor A. Thereafter, the first ground electrode 21a and the second ground electrode 31a are electrically connected through the pierce terminal 8 by inserting the pierce terminal 8 into the piezoelectric sensor A and the conductive wire 92 in the connection recess 411a of the piezoelectric sensor A. In addition, the conductive wire 92 can be electrically connected to the first ground electrode 21a and the second ground electrode 31a through the pierce terminal 8. Since the pierced terminal 8 is inserted into the piezoelectric sensor A in the connection recess 411a of the signal electrode 41, the pierced terminal 8 is electrically insulated from the signal electrode 41, and the first ground electrode 21a and the second ground electrode 31a are The electrode 41 is electrically insulated from the electrode 41. Then, by taking the ground via the conductive wire 92 electrically connected to the first and second ground electrodes 21a and 31a, the potential of the signal electrode 41 is set using the first and second ground electrodes 21a and 31a as a reference electrode. And the pressure applied to the piezoelectric sensor A can be detected.

  In the above, after the laminated sheet B is cut across the entire length in the width direction between the adjacent signal electrodes 41, the piezoelectric sensor A is manufactured, and then the conductive wire 91, Although the case where 92 was connected was demonstrated, after connecting the conductive wires 91 and 92 to the piezoelectric sensor A using the piercing terminal 8, the lamination sheet B is covered between the signal electrodes 41 adjacent to each other over the entire length in the width direction. The piezoelectric sensor A may be manufactured by cutting.

  Further, in the above, the first electrical insulating sheet 22 and the piezoelectric sheet 1 are laminated and integrated to manufacture the laminated piezoelectric sheet C, and the second electric insulating sheet 32 and the third electric insulating sheet 42 are laminated and integrated to be laminated. The case where the electrode sheet D is manufactured and the laminated piezoelectric sheet C and the laminated electrode sheet D are laminated and integrated to produce the laminated sheet B has been described. However, the piezoelectric sheet 1 includes the first to third electrical insulating sheets 22 and 32. , 42 is not limited to this. That is, after the first electrical insulation sheet 22 is laminated and integrated on one surface of the piezoelectric sheet 1, the third electrical insulation sheet 42 is laminated and integrated on the other surface of the piezoelectric sheet, and further, the first electrical insulation sheet 22 is formed on the third electrical insulation sheet 42. The laminated sheet B may be manufactured by laminating and integrating the two electrical insulating sheets 32.

1 Piezoelectric sheet 8 Pierce terminal
21 First ground electrode layer
21a First ground electrode
22 First electrical insulation sheet
31 Second ground electrode layer
31a Second ground electrode
32 Second electrical insulation sheet
41 Signal electrode
42 Third Electrical Insulating Sheet A Piezoelectric Sensor B Multilayer Sheet C Multilayer Piezoelectric Sheet D Multilayer Electrode Sheet

Claims (3)

The first ground electrode layer is laminated and integrated on one surface of the long piezoelectric sheet, and the signal electrode and the second ground electrode layer are laminated and integrated on the other surface of the piezoelectric sheet in an electrically insulated state. A laminating step for producing, and a cutting step for cutting the laminated sheet, wherein the first ground electrode layer is provided on one side of the elongated first electric insulating sheet in the length direction of the first electric insulating sheet. The second ground electrode layer is formed in a long band in the length direction of the second electric insulating sheet on one side of the long second electric insulating sheet. It is continuously formed in a band shape, and the signal electrode is repeatedly formed on one surface of the long third electrical insulation sheet at a predetermined interval in the length direction of the third electrical insulation sheet, The laminated sheets are adjacent to each other Method of manufacturing a piezoelectric sensor, characterized in that it is cut between the signal electrode. 2. The piezoelectric sensor according to claim 1, wherein in the laminated sheet, the signal electrode has a terminal installation portion that protrudes from edges in the width direction of the first ground electrode layer and the second ground electrode layer. Production method. The laminating step is a step of manufacturing a laminated piezoelectric sheet by laminating and integrating a first electrical insulating sheet having a first ground electrode layer on one surface of the piezoelectric sheet with the first ground electrode layer facing the piezoelectric sheet. And a third electrical insulation sheet having a signal electrode on the second ground electrode layer of the second electrical insulation sheet and laminated and integrated with the third electrical insulation sheet facing the second ground electrode layer. A step of manufacturing an electrode sheet; and a step of stacking and integrating the laminated electrode sheet on the piezoelectric sheet of the laminated piezoelectric sheet with the signal electrode facing the piezoelectric sheet. A method for manufacturing a piezoelectric sensor according to claim 1 or 2.

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